CN115469173A - Ion source testing platform - Google Patents
Ion source testing platform Download PDFInfo
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- CN115469173A CN115469173A CN202211353095.6A CN202211353095A CN115469173A CN 115469173 A CN115469173 A CN 115469173A CN 202211353095 A CN202211353095 A CN 202211353095A CN 115469173 A CN115469173 A CN 115469173A
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- 238000012360 testing method Methods 0.000 title claims abstract description 59
- 230000005684 electric field Effects 0.000 claims abstract description 27
- 238000005086 pumping Methods 0.000 claims abstract description 27
- 230000005686 electrostatic field Effects 0.000 claims abstract description 21
- 238000004891 communication Methods 0.000 claims abstract description 15
- 150000002500 ions Chemical class 0.000 claims description 144
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 35
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 34
- 238000001816 cooling Methods 0.000 claims description 29
- 238000009434 installation Methods 0.000 claims description 16
- 229910052742 iron Inorganic materials 0.000 claims description 16
- 238000012544 monitoring process Methods 0.000 description 16
- 239000007789 gas Substances 0.000 description 9
- -1 hydrogen ions Chemical class 0.000 description 4
- 239000000110 cooling liquid Substances 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses an ion source test platform, which relates to the field of ion source test, and comprises: the tank body is provided with a cavity; the vacuum pumping system is communicated with the cavity; an electrostatic deflection system, the electrostatic deflection system comprising: the electrostatic field generator is arranged in the cavity; the beam target plate is arranged corresponding to the electrostatic field generator; an ion source replacement system in communication with the cavity; a high field magnet system for forming a magnetic field. Therefore, different types of ion sources are provided for the ion source test platform by arranging the ion source replacement system, and the different types of ion sources are tested in different vacuum degrees, different electric field strengths and different magnetic field strengths by arranging the vacuum pumping system, the electrostatic deflection system and the high-magnetic-field magnet system, so that the performance data of the different types of ion sources under corresponding conditions can be tested.
Description
Technical Field
The application relates to the field of ion source testing, in particular to an ion source testing platform.
Background
Ion sources are important components for providing ion sources for accelerators, ion implanters, and the like, and various types of ion sources have been developed.
At present, the proportion and the deflection radius of the excited hydrogen ions of different types of ion sources have differences under the field intensity of magnetic fields and extraction electric fields with different magnetic field intensities, so that the types and the proportion parameters of the hydrogen ions extracted from the ion source component under the background of the field intensity of the extraction electric fields with different magnetic field intensities are required to be measured after the ion source component is processed.
In the related art, corresponding test systems need to be designed for testing different types of ion source components, so that the test systems cannot meet the use requirements for detecting various types of ion source components, and further the test cost is high.
Disclosure of Invention
The present application is directed to solving at least one of the problems in the prior art. To this end, an object of the present application is to provide an ion source testing platform, which can test different types of ion sources in different vacuum degrees, different electric field strengths and different magnetic field strengths.
An ion source test platform according to the present invention comprises: the tank body is provided with a cavity; the vacuum pumping system is communicated with the cavity and is used for adjusting the vacuum degree of the cavity; an electrostatic deflection system, the electrostatic deflection system comprising: an electrostatic field generator disposed within the cavity; the beam target plate is arranged corresponding to the electrostatic field generator; an ion source replacement system in communication with the cavity; the high-magnetic-field magnet system is used for forming a magnetic field, and the tank body is arranged in the magnetic field formed by the high-magnetic-field magnet system; wherein, the jar body is equipped with first installation department and second installation department, first installation department with the second installation department is all located the lateral wall of the jar body, ion source replacement system passes through first installation department with the cavity intercommunication, and be suitable for to carry the ion in the cavity, evacuation system passes through the second installation department with the cavity intercommunication, and be suitable for the regulation the vacuum of cavity.
According to the ion source test platform, the ion source replacement system is arranged to provide different types of ion sources for the ion source test platform, the vacuum pumping system is arranged to test the different types of ion sources in different vacuum degrees, the electrostatic deflection system is arranged to test the different types of ion sources in different electric field strengths, and the high-magnetic-field magnet system is arranged to test the different types of ion sources in different magnetic field strengths, so that the performance data of the different types of ion sources in different vacuum degrees, different electric field strengths and different magnetic field strengths can be tested.
According to one embodiment of the invention, the ion source replacement system comprises: an ion source in communication with the cavity and configured to form ions; an air intake system in communication with the ion source.
According to one embodiment of the invention, the ion source is one of a hot cathode ion source, a cold cathode ion source, an ECR ion source.
According to one embodiment of the invention, the central magnetic field strength of the high-field magnet system is adjusted within a range of 0-2T.
According to one embodiment of the invention, the high field magnet system comprises: dipolar iron; the power supply set is electrically connected with the diode, and the output current of the power supply set is adjusted within the range of 0-2500A; and the water cooling component is suitable for respectively exchanging heat of the dipolar iron and the power pack.
According to one embodiment of the invention, the electric field strength of the electrostatic deflection system is adjusted in the range of 0-100kV/cm.
According to an embodiment of the invention, the vacuum pumping system further comprises a vacuum gauge mounted to the canister for measuring the vacuum level of the cavity.
According to one embodiment of the invention, the evacuation system comprises: the molecular pump and the roots pump unit are used for adjusting the vacuum degree of the cavity.
According to an embodiment of the invention, the ion source testing platform further comprises: a monitor control system adapted to communicate with the evacuation system, the electrostatic deflection system, the ion source replacement system, and the high magnetic field magnet system to monitor the evacuation system, the electrostatic deflection system, the ion source replacement system, and the high magnetic field magnet system.
According to one embodiment of the invention, the tank body is provided with an observation window.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural diagram of an ion source testing platform according to the present invention.
Reference numerals are as follows:
the ion source testing platform 100, the canister 110, the pumping hole 110a, the cavity 111, the first mounting part 112, the first gate valve 112a, the second mounting part 113, the high vacuum gate valve 113a, the observation window 114, the connecting channel 115, the third mounting part 116,
A vacuum pumping system 120, a vacuum gauge 121,
An electrostatic deflection system 130, an electrostatic field generator 131, a connecting rod 131a, a beam target 132,
An ion source replacement system 140, an air inlet system 141, a power subsystem 142,
A high magnetic field magnet system 150, a dipole 151, a power pack 152, a water cooling unit 153, a first water cooling unit 1531, a second water cooling unit 1532,
The control system 160 is monitored.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
An ion source testing platform 100 according to an embodiment of the present application is described below with reference to fig. 1.
The ion source testing platform 100 according to the present invention comprises: canister 110, evacuation system 120, electrostatic deflection system 130, ion source replacement system 140, and high magnetic field magnet system 150, electrostatic deflection system 130 further comprising: an electrostatic field generator 131 and a beam target 132.
The ion source replacing system 140 is communicated with the cavity 111, the high-magnetic-field magnet system 150 is used for forming a magnetic field, and the tank 110 is arranged in the magnetic field formed by the high-magnetic-field magnet system 150.
In addition, the can 110 is provided with a first mounting part 112 and a second mounting part 113, the first mounting part 112 and the second mounting part 113 are both provided at a side wall of the can 110, the ion source exchanging system 140 is communicated with the chamber 111 through the first mounting part 112, and the ion source exchanging system 140 can transport ions into the chamber 111, the vacuum pumping system 120 is communicated with the chamber 111 through the second mounting part 113, and the vacuum pumping system 120 can adjust a degree of vacuum of the chamber 111.
Specifically, referring to fig. 1, a first mounting portion 112 is provided on a sidewall of the canister 110, and the ion source exchanging system 140 is mounted on an outer side of the canister 110 through the first mounting portion 112 to communicate with the chamber 111.
The ion source exchange system 140 may be used to exchange ion sources to connect different types of ion sources to the canister 110 for testing of different types of ion sources by the ion source testing platform 100.
The beam target plate 132 and the electrostatic field generator 131 are both disposed inside the cavity 111, and the beam target plate 132 and the electrostatic field generator 131 are correspondingly disposed to form the electrostatic deflection system 130, the electrostatic field generator 131 is used for generating static electricity and providing an electric field, and the strength of the electric field can be adjusted, so that different types of ion sources can be tested in different electric field strengths, and performance data of different types of ion sources in different electric field strengths can be obtained.
Wherein, the electrostatic field generator 131 is arranged at an interval with the inner wall of the can 110 (i.e. the electrostatic field generator 131 is suspended in the can 110), so as to prevent the can 110 from being electrified due to the contact between the electrostatic field generator 131 and the can 110, thereby influencing the electric field strength.
Further, a high magnetic field magnet system 150 is further disposed outside the tank 110, the high magnetic field magnet system 150 can provide a magnetic field, and the strength of the magnetic field can be adjusted, so that different types of ion sources can be tested in different magnetic field strengths, and performance data of different types of ion sources in different magnetic field strengths can be obtained. The magnetic permeability of the tank 110 is low, so as to reduce the influence of the tank 110 on the field intensity of the magnetic field.
Therefore, the ion source replacing system 140 is arranged to test different types of ion sources, the vacuum pumping system 120 is further arranged to test different types of ion sources in different vacuum degrees, the electrostatic deflection system 130 is arranged to test different types of ion sources in different electric field strengths, and the high magnetic field magnet system 150 is arranged to test different types of ion sources in different magnetic field strengths, so that the performance data of different types of ion sources in different vacuum degrees, different electric field strengths and different magnetic field strengths can be tested.
According to the ion source testing platform 100 of the present invention, the ion source replacing system 140 is provided to provide different types of ion sources for the ion source testing platform 100, the vacuum pumping system 120 is provided to test different types of ion sources in different vacuum degrees, the electrostatic deflection system 130 is provided to test different types of ion sources in different electric field strengths, and the high magnetic field magnet system 150 is provided to test different types of ion sources in different magnetic field strengths, so that performance data of different types of ion sources in different vacuum degrees, different electric field strengths and different magnetic field strengths can be tested.
In some embodiments of the present invention, the sidewall of the canister 110 is provided with a pumping hole 110a, the pumping hole 110a is communicated with the chamber 111, the second mounting portion 113 is connected to the pumping hole 110a, and the vacuum pumping system 120 is communicated with the pumping hole 110a through the second mounting portion 113, so that the vacuum pumping system 120 can be communicated with the chamber 111 to adjust the vacuum degree of the chamber 111.
Further, the beam target plate 132 is disposed corresponding to the electrostatic field generator 131, and the beam target plate 132 may deflect relative to the electrostatic field generator 131 according to the test requirement to adjust the test condition, and the specific arrangement of the beam target plate 132 is not specifically limited herein.
Further, one end of the electrostatic field generator 131 is further provided with a connecting rod 131a, the connecting rod 131a extends along the axial direction of the tank 110, the tank 110 is further provided with a third installation portion 116, the connecting rod 131a is connected and matched with the third installation portion 116, so that the electrostatic field generator 131 is suspended in the cavity 111, and the field intensity of the electric field is prevented from being influenced due to the contact between the electrostatic field generator 131 and the inner wall surface of the tank 110.
In some embodiments of the present invention, the ion source replacement system 140 comprises: an ion source and an air inlet system 141.
Wherein the ion source is in communication with the chamber 111 and is used to form ions, and the gas inlet system 141 is in communication with the ion source.
Specifically, the gas inlet system 141 is used to provide a gas with molecules or atoms to the ion source, the ion source ionizes the gas to form corresponding ions (e.g., hydrogen ions), and the ion source is placed in communication with the chamber 111 such that the ions generated by the ion source can be injected into the chamber 111.
In addition, the ion source replacement system 140 further comprises: a first gate valve 112a, on which the first installation part 112 may be provided, the first gate valve 112a controlling opening and closing of the connection passage 115 between the ion source and the chamber 111.
In a further embodiment of the present invention, the ion source replacement system 140 further comprises: a power subsystem 142, the power subsystem 142 electrically connected to the ion source to provide electrical energy to the ion source such that the ion source can ionize the gas with atoms or molecules provided by the gas inlet system 141 to form corresponding ions.
In some embodiments of the invention, the ion source is one of a hot cathode ion source, a cold cathode ion source, an ECR ion source.
Specifically, the ion source may be configured as an ion source of the above-mentioned kind, accordingly, a plurality of gas inlet systems 141 may be provided, a plurality of gas inlet systems 141 may provide different types of gases for the ion source to form different types of ion sources, a plurality of power supply subsystems 142 may be provided, and a plurality of power supply subsystems 142 may be respectively used in cooperation with different types of ion sources, so that the ion source testing platform 100 may test different types of ion sources.
Further, different types of ion sources can be tested in different vacuum degrees by arranging the vacuum pumping system 120, different types of ion sources can be tested in different electric field strengths by arranging the electrostatic deflection system 130, and different types of ion sources can be tested in different magnetic field strengths by arranging the high magnetic field magnet system 150, so that performance data of different types of ion sources in different vacuum degrees, different electric field strengths and different magnetic field strengths can be tested.
In some embodiments of the present invention, the high field magnet system 150 has a central field strength adjustment in the range of 0-2T.
Specifically, the field strength of the central magnetic field of the high-field magnet system 150 can be adjusted, and the adjustment range is between 0T and 2T, so that the ion source test platform 100 of the present application can test different types of ion sources under different field strengths, thereby obtaining performance data of different types of ion sources under different field strengths.
In some embodiments of the present invention, high field magnet system 150 comprises: the power supply pack 152 is electrically connected with the dipolar iron 151, the output current of the power supply pack 152 is adjusted within the range of 0-2500A, and the water cooling assembly 153 can respectively exchange heat with the dipolar iron 151 and the power supply pack 152.
Specifically, the diode iron 151 is disposed on the outer circumferential side of the can 110, the power supply pack 152 supplies power to the diode iron 151, the diode iron 151 can form a magnetic field after the power supply pack 152 is energized, and the field intensity of the magnetic field formed by the diode iron 151 is variable, and the field intensity of the magnetic field formed by the diode iron 151 is increased as the output current of the power supply pack 152 is increased.
Further, the water cooling assembly 153 includes: the water cooling system includes a first water cooling part 1531 and a second water cooling part 1532, wherein a first high pressure water pipe is provided on the first water cooling part 1531, a second high pressure water pipe is provided on the second water cooling part 1532, the first water cooling part 1531 cools the power pack 152 through the first high pressure water pipe, and the second water cooling part 1532 cools the diode 151 through the second high pressure water pipe, wherein the pressure-bearing ranges of the first high pressure water pipe and the second high pressure water pipe are 0 to 10MPa.
Alternatively, the first and second water cooling parts 1531 and 1532 may be filled with a cooling liquid. The first water cooling part 1531 is configured to be connected to the power package 152, and a first water cooling channel that is connected to the first water cooling part 1531 may be disposed inside or on an outer surface of the power package 152, and a cooling liquid in the first water cooling part 1531 may flow into the first water cooling channel to perform heat exchange between the first water cooling part 1531 and the power package 152, thereby reducing a temperature of the power package 152.
The second water cooling part 1532 is configured to be connected to the dipolar iron 151, and a second water cooling channel is provided in the dipolar iron 151 and is communicated with the second water cooling part 1532, so that the cooling liquid in the second water cooling part 1532 can flow into the second water cooling channel to realize heat exchange between the second water cooling part 1532 and the dipolar iron 151, thereby reducing the temperature of the dipolar iron 151.
In some embodiments of the present invention, the electric field strength of the electrostatic deflection system 130 is adjusted in the range of 0-100kV/cm.
Specifically, the electric field strength of the electrostatic deflection system 130 can be adjusted, and the adjustment range of the electric field strength is 0-100kV/cm, so that the ion source testing platform 100 of the present application can test performance data of different types of ion sources under different electric field strength conditions.
In some embodiments of the present invention, the vacuum pumping system 120 further comprises a vacuum gauge 121, the vacuum gauge 121 is mounted to the canister 110, and the vacuum gauge 121 is used for measuring the vacuum degree of the cavity 111.
Specifically, the vacuum gauge 121 may be flange-mounted on the can 110 so that the vacuum gauge 121 may contact the cavity 111, and thus the degree of vacuum of the cavity 111 may be measured. In addition, a composite hot cathode gauge may be used as the vacuum gauge 121.
In some embodiments of the present invention, the evacuation system 120 comprises: the molecular pump and the roots pump unit are used for adjusting the vacuum degree of the cavity 111.
Specifically, the molecular pump and the roots pump are used for pumping the cavity 111 to adjust the vacuum degree of the cavity 111, the molecular pump and the roots pump have different working thresholds, and the pumping range of the vacuum pumping system 120 can be increased by combining the molecular pump with the roots pump unit, so that 1.0 × e in the cavity 111 is realized -4 Pa, ultimate degree of vacuum.
Among them, molecular pumps can be divided into: the molecular pump may be a traction molecular pump, a turbo molecular pump, or a composite molecular pump, and the specific type of the molecular pump may be adjusted in combination with the actual pump, and is not particularly limited herein.
In a further embodiment of the present invention, the evacuation system 120 further comprises: the high vacuum gate valve 113a and the second installation part 113 are arranged on the high vacuum gate valve 113a, and the high vacuum gate valve 113a is used for controlling the opening and closing of the pumping hole 110 a.
Optionally, in some embodiments of the present invention, the first mounting portion 112 is configured as a first mounting flange for mounting an air inlet arrangement in the ion source and air inlet system 141. The second mounting portion 113 is configured as a second mounting flange for connecting to a molecular pump and a roots pump unit in the vacuum pumping system 120. The third mounting portion 116 is configured as a third mounting flange for mounting the connection rod 131a to support the connection rod 131a in the circumferential direction so as to be suspended in the cavity 111, so that the electrostatic field generator 131 connected to the connection rod 131a can be suspended in the cavity 111.
In some embodiments of the present invention, the ion source testing platform 100 further comprises: a monitor and control system 160, the monitor and control system 160 being in communication with the evacuation system 120, the electrostatic deflection system 130, the ion source replacement system 140, and the high magnetic field magnet system 150 to monitor the evacuation system 120, the electrostatic deflection system 130, the ion source replacement system 140, and the high magnetic field magnet system 150.
Specifically, referring to fig. 1, the power subsystem 142 is electrically connected to the monitoring and control system 160 to supply power to the monitoring and control system 160, and the monitoring and control system 160 has an automatic monitoring function to monitor the vacuum degree of the chamber 111 by connecting the monitoring and control system 160 to the vacuum pumping system 120 and the vacuum gauge 121 respectively in a communication manner.
By connecting the monitoring control system 160 with the electrostatic deflection system 130 in a communication manner, the electrostatic deflection system 130 can feed back the electric field strength to the monitoring control system 160, so that the staff can acquire the electric field strength information through the monitoring control system 160, and the staff can adjust the electric field strength according to the data fed back by the monitoring control system 160, thereby meeting the testing requirement.
By coupling the monitor and control system 160 with the ion source replacement system 140, the ion source replacement system 140 can feed back the type of ion source to the monitor and control system 160, so that the operator can obtain information about the type of ion source through the monitor and control system 160.
Through the communication connection of the monitoring control system 160 and the high magnetic field magnet system 150, the high magnetic field magnet system 150 can feed back the magnetic field intensity to the monitoring control system 160, so that the staff can acquire the information of the magnetic field intensity, and the staff can adjust the magnetic field intensity according to the data fed back by the monitoring control system 160, thereby meeting the testing requirement.
Further, a temperature sensor may be disposed on the water cooling module 153, and the temperature sensor is in communication connection with the monitoring control system 160 to feed back the temperature of the high magnetic field magnet system 150 to the monitoring control system 160, so that a worker may obtain the temperature information of the high magnetic field magnet system 150 through the monitoring control system 160, and prevent the high magnetic field magnet system 150 from malfunctioning due to overheating. In addition, the monitoring control system 160 also has an automatic saving function, so that each data measured by the ion source testing platform 100 can be automatically monitored and saved, thereby improving the accuracy and convenience of the ion source testing platform 100.
In some embodiments of the present invention, the tank 110 is provided with an observation window 114, so that a worker can observe the inside of the cavity 111 through the observation window 114.
In particular, the viewing window 114 may be configured as a germanium glass viewing window.
In a further embodiment of the present invention, an electrically insulating isolation column and a vacuum feeder line are further disposed in the canister 110, so that the cavity of the canister 110 is separately grounded through the electrically insulating isolation column and the vacuum feeder line, thereby improving the safety of the ion source testing platform 100.
The following is incorporated in the writing process as needed to explain the relevant content:
1. in the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present application.
2. In the description of the present application, "a plurality" means two or more.
In the description of the present specification, reference to the description of "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the application, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. An ion source test platform, comprising:
the tank body (110), the tank body (110) is provided with a cavity (111);
the vacuum pumping system (120), the vacuum pumping system (120) is communicated with the cavity (111) and is used for adjusting the vacuum degree of the cavity (111);
an electrostatic deflection system (130), the electrostatic deflection system (130) comprising:
an electrostatic field generator (131), the electrostatic field generator (131) being disposed within the cavity (111);
a beam target plate (132), wherein the beam target plate (132) is arranged corresponding to the electrostatic field generator (131);
an ion source replacement system (140), the ion source replacement system (140) in communication with the chamber (111);
a high field magnet system (150), the high field magnet system (150) for forming a magnetic field, and the tank (110) being disposed within the magnetic field formed by the high field magnet system (150);
wherein, jar body (110) is equipped with first installation department (112) and second installation department (113), first installation department (112) with second installation department (113) are all located the lateral wall of jar body (110), ion source replacement system (140) pass through first installation department (112) with cavity (111) intercommunication, and be suitable for to carry the ion in cavity (111), evacuation system (120) pass through second installation department (113) with cavity (111) intercommunication, and be suitable for the regulation the vacuum of cavity (111).
2. The ion source test platform of claim 1, wherein said ion source replacement system (140) comprises:
an ion source in communication with the chamber (111) and configured to form ions;
an air intake system (141), the air intake system (141) in communication with the ion source.
3. The ion source testing platform of claim 2, wherein the ion source is one of a hot cathode ion source, a cold cathode ion source, and an ECR ion source.
4. The ion source test platform of claim 1, wherein said high field magnet system (150) has a central magnetic field strength adjustment range of 0-2T.
5. The ion source testing platform of claim 1, wherein the high field magnet system (150) comprises:
a dipolar iron (151);
the power supply set (152), the power supply set (152) is electrically connected with the diode iron (151), and the output current of the power supply set (152) is adjusted within the range of 0-2500A;
a water cooling assembly (153), the water cooling assembly (153) being adapted to exchange heat with the dipolar iron (151) and the power pack (152), respectively.
6. The ion source testing platform of claim 1, wherein the electric field strength of the electrostatic deflection system (130) is adjusted in a range of 0-100kV/cm.
7. The ion source testing platform of claim 1, wherein the evacuation system (120) further comprises a vacuum gauge (121), the vacuum gauge (121) being mounted to the canister (110) and configured to measure a vacuum level of the chamber (111).
8. The ion source testing platform of claim 1, wherein said evacuation system (120) comprises: the molecular pump and the roots pump unit are used for adjusting the vacuum degree of the cavity (111).
9. The ion source test platform of claim 1, further comprising: a monitor control system (160), the monitor control system (160) adapted to communicate with the evacuation system (120), the electrostatic deflection system (130), the ion source replacement system (140), and the high magnetic field magnet system (150) to monitor the evacuation system (120), the electrostatic deflection system (130), the ion source replacement system (140), and the high magnetic field magnet system (150).
10. The ion source testing platform of claim 1, wherein said canister (110) is provided with a sight window (114).
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| CN202211353095.6A CN115469173A (en) | 2022-11-01 | 2022-11-01 | Ion source testing platform |
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