CN115464246B - Electron beam focusing magnetic lens driving circuit and electron beam welding equipment thereof - Google Patents

Electron beam focusing magnetic lens driving circuit and electron beam welding equipment thereof Download PDF

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Publication number
CN115464246B
CN115464246B CN202211169216.1A CN202211169216A CN115464246B CN 115464246 B CN115464246 B CN 115464246B CN 202211169216 A CN202211169216 A CN 202211169216A CN 115464246 B CN115464246 B CN 115464246B
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Prior art keywords
loop
amplifier
electron beam
magnetic lens
circuit
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CN202211169216.1A
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CN115464246A (en
Inventor
钟富才
刘美燕
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Hebei Zhonghang High Energy Technology Co ltd
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Hebei Zhonghang High Energy Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/02Control circuits therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48Electron guns
    • H01J29/485Construction of the gun or of parts thereof
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/687Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Amplifiers (AREA)

Abstract

The invention discloses an electron beam focusing magnetic lens driving circuit which comprises a signal input loop, an amplification factor switching loop, a power supply loop and an MOS tube driving loop, wherein the signal input loop is connected with a signal generator for outputting a 0-10V voltage signal, the signal input loop is connected with a grid electrode of the MOS tube driving loop through the amplification factor switching loop, a source electrode of the MOS tube driving loop is connected with the power supply loop, and a drain electrode of the MOS tube driving loop is connected with a focusing magnetic lens. The invention adopts the electron beam focusing magnetic lens driving circuit with the structure, and changes the grid voltage of the MOS tube by switching different amplification factors, thereby changing the output current of the MOS tube and realizing the adjustable control of a plurality of ranges.

Description

Electron beam focusing magnetic lens driving circuit and electron beam welding equipment thereof
Technical Field
The invention relates to the technical field of magnetic lens driving, in particular to an electron beam focusing magnetic lens driving circuit and electron beam welding equipment thereof.
Background
The driving design of the focusing magnetic lens in the existing electron beam welding equipment mainly focuses on the following two aspects:
1. current design with continuously adjustable interval:
for the focusing driving circuit in the electron beam welding equipment, namely the focusing magnetic lens power supply, the current range value meeting the working requirement of the focusing magnetic lens is designed according to the practical situation of the electron beam welding equipment, and the range value is generally 0A to 3A and is continuously adjustable. Because of the strong specialization, when the mating equipment is changed slightly, a replacement solution is needed.
2. And (3) designing a system protection function:
the focusing magnetic lens drive has protection functions such as overcurrent protection, overheat protection, short-circuit protection and the like during design. However, the protection function types of each device are different, and each designer has a thousand years for the same protection function implementation mode, so that multiple use scenes cannot be commonly used.
Disclosure of Invention
The invention aims to provide an electron beam focusing magnetic lens driving circuit, which changes the grid voltage of an MOS tube by switching different amplification factors, so that the output current of the MOS tube can be changed, and the adjustable control of a plurality of ranges is realized.
In order to achieve the above purpose, the invention provides an electron beam focusing magnetic lens driving circuit, which comprises a signal input loop, an amplification factor switching loop, a power supply loop and an MOS tube driving loop, wherein the signal input loop is connected with a signal generator for outputting a voltage signal of 0-10V, the signal input loop is connected with a grid electrode of the MOS tube driving loop through the amplification factor switching loop, a source electrode of the MOS tube driving loop is connected with the power supply loop, and a drain electrode of the MOS tube driving loop is connected with a focusing magnetic lens.
Preferably, the amplification factor switching loop comprises a plurality of amplifying branches with different voltage amplification factors connected in parallel.
Preferably, the amplification factor switching circuit comprises three amplifying branches connected in parallel;
a first multiple change-over switch, a first amplifier, a second amplifier, a first fine tuning change-over switch connected with the second amplifier in parallel, a first adjusting resistor and a first protection resistor are sequentially connected in series on one amplifying branch;
the other amplifying branch is sequentially connected with a third amplifier, a second multiple change-over switch, the first amplifier, the second amplifier, a second fine tuning change-over switch connected with the second amplifier in parallel, a second adjusting resistor and a second protection resistor in series;
and the other amplifying branch is sequentially connected with the third amplifier, the fourth amplifier, the fifth amplifier, the third triplicate change-over switch, the first amplifier, the second amplifier, the third fine tuning change-over switch connected with the second amplifier in parallel, the third adjusting resistor and the third protection resistor in series.
Preferably, the output end of the second amplifier is connected with the PLC controller, and is configured to compare the amplified signal value with the input signal value, and determine whether the amplification factor switching circuit works normally and whether the output signal and the input signal are within an error range.
Preferably, the invention further comprises a circuit breaking monitoring loop, wherein the circuit breaking monitoring loop comprises a sixth amplifier, the input end of the sixth amplifier is connected with the MOS tube driving loop, the output end of the sixth amplifier is connected with a circuit breaking indicator lamp through a driving triode, the circuit breaking indicator lamp is coupled with a photoelectric coupler, and the photoelectric coupler is connected with the PLC.
Preferably, the PLC is further connected with a temperature monitoring loop, the temperature monitoring loop comprises a normally closed temperature control switch and a temperature indicator lamp which are connected in series, and the normally closed temperature control switch is used for monitoring the working temperature of the MOS tube.
Preferably, the power supply loop comprises an overcurrent protection loop and a rectification loop, wherein the input end of the overcurrent protection loop is connected with the transformer, the output end of the overcurrent protection loop is connected with the rectification loop, and the output end of the rectification loop is connected with the source electrode of the MOS tube driving loop.
Preferably, the overcurrent protection circuit comprises a fuse connected in series with the circuit;
the rectifying circuit comprises rectifying capacitors arranged in parallel.
The electron beam welding equipment based on the electron beam focusing magnetic lens driving circuit comprises a focusing magnetic lens arranged in the electron gun, wherein the focusing magnetic lens is electrically connected with the driving circuit;
the signal input circuit, the amplification factor switching circuit, the circuit breaking monitoring circuit, the temperature monitoring circuit, the power supply circuit and the load circuit breaking alarm circuit of the driving circuit are all embedded in the bottom circuit board;
the MOS tube driving circuit of the driving circuit is embedded in the top circuit board;
the bottom of the top circuit board is electrically connected with the top of the bottom circuit board through a plug-in unit, and a plurality of groups of radiators are fixed on the top of the top circuit board.
And the radiator is provided with a normally closed temperature control switch.
Preferably, an accelerating electron beam emission head is arranged in the electron gun and aligned to the focusing magnetic lens, and the accelerating electron beam emission head is electrically connected with the high-voltage cable;
the bottom end of the electron gun is provided with a vacuum chamber, and a workpiece to be welded is arranged in the vacuum chamber and aligned to the position of the accelerating electron beam emission head.
Therefore, the electron beam focusing magnetic lens driving circuit with the structure changes the grid voltage of the MOS tube by switching different amplification factors, thereby changing the output current of the MOS tube and realizing the adjustable control of a plurality of ranges.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
Fig. 1 is a schematic circuit diagram of an electron beam focusing magnetic lens driving circuit according to an embodiment of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings, and it should be noted that, while the present embodiment provides a detailed implementation and a specific operation process on the premise of the present technical solution, the protection scope of the present invention is not limited to the present embodiment.
Fig. 1 is a schematic circuit diagram of an electron beam focusing magnetic lens driving circuit according to an embodiment of the present invention, and as shown in fig. 1, the structure of the present invention includes a signal input circuit IC1 connected to a signal generator for outputting a voltage signal of 0-10V, an amplification switching circuit, a power supply circuit, and a MOS transistor driving circuit, where the signal input circuit is connected to a gate of the MOS transistor driving circuit through the amplification switching circuit, a source of the MOS transistor driving circuit is connected to the power supply circuit, and a drain of the MOS transistor driving circuit is connected to a focusing magnetic lens. The MOS tube driving circuit comprises four groups of MOS tubes (T1A, T1B, T1C, T1D) which are arranged in parallel. The amplification factor switching loop comprises a plurality of amplifying branches which are connected in parallel and have different voltage amplification factors. In this embodiment, the amplification factor switching circuit includes three amplifying branches connected in parallel; a first multiple change-over switch A1, a first amplifier IC2D, a second amplifier IC4B, a first fine tuning change-over switch A4, a first regulating resistor R33 and a first protection resistor R32 which are connected in parallel with the second amplifier are sequentially connected in series on one amplifying branch; a third amplifier IC2A, a second multiple change-over switch A2, the first amplifier, the second amplifier, a second fine tuning change-over switch A5, a second regulating resistor R35 and a second protection resistor R34 which are connected in parallel with the second amplifier are sequentially connected in series on the other amplifying branch; the other amplifying branch is sequentially connected with the third amplifier, the fourth amplifier IC2B, the fifth amplifier IC2C, the third triplicate change-over switch A3, the first amplifier, the second amplifier, a third fine tuning change-over switch A6 connected with the second amplifier in parallel, a third adjusting resistor R37 and a third protection resistor R36 in series.
Working principle: firstly, selecting an output voltage adjusting range, in the embodiment, closing a first multiple change-over switch and a first fine adjustment change-over switch to realize continuous adjustment of an output current range of 0-5A; or closing the second multiple change-over switch and the second fine adjustment change-over switch to realize that the output current range is 0-2A continuously adjustable; or the third triple change-over switch and the third fine adjustment change-over switch are closed, so that the output current range is continuously adjustable within 1-3A;
the signal generator inputs 0-10V voltage signals through B6 and Z6 ports of the signal input loop, and the voltage signals can drive the MOS tube to output current with a certain range after being amplified by a certain multiple through the first amplifier and the second amplifier in sequence.
Preferably, the output end of the second amplifier is connected with the PLC controller, and is configured to compare the amplified signal value with the input signal value, and determine whether the amplification factor switching circuit works normally and whether the output signal and the input signal are within an error range.
Preferably, the invention further comprises a circuit breaking monitoring loop, the circuit breaking monitoring loop comprises a sixth amplifier IC3, the input end of the sixth amplifier IC3 is connected with the MOS tube driving loop, the output end of the sixth amplifier IC3 is connected with a circuit breaking indicator lamp H2 through a driving triode T2, the circuit breaking indicator lamp is coupled with a photoelectric coupler, the photoelectric coupler is connected with the PLC, when a load circuit breaks, the MOS tube driving loop outputs a driving signal, the driving signal is amplified by the third amplifier IC3 and then is output to the driving triode T2, the driving triode T2 conducts the circuit breaking indicator lamp to be on, the optocoupler isolator acts, the circuit breaking signal is output to the PLC, and then the PLC is utilized to output an alarm signal.
Preferably, the PLC is still continuous with the temperature monitoring return circuit, the temperature monitoring return circuit includes normal close temperature detect switch and temperature indicator H1 of establishing ties, normal close temperature detect switch is used for monitoring the operating temperature of MOS pipe, and when operating temperature is greater than 80 ℃, normal close temperature detect switch opens, and the temperature indicator goes out, and normal close temperature detect switch in this embodiment still links to each other with the PLC for receive the high temperature signal, thereby control electron gun stop work when operating temperature is too high.
Preferably, the power supply loop comprises an overcurrent protection loop and a rectification loop, wherein the input end of the overcurrent protection loop is connected with the transformer, the output end of the overcurrent protection loop is connected with the rectification loop, and the output end of the rectification loop is connected with the source electrode of the MOS tube driving loop. Preferably, the overcurrent protection circuit comprises a fuse (E1B, E A) connected in series with the circuit; the rectifying circuit comprises rectifying capacitors (C1C, C1B, C A) arranged in parallel.
The electron beam welding equipment based on the electron beam focusing magnetic lens driving circuit comprises a focusing magnetic lens arranged in the electron gun, wherein the focusing magnetic lens is electrically connected with the driving circuit; the signal input circuit, the amplification factor switching circuit, the circuit breaking monitoring circuit, the temperature monitoring circuit, the power supply circuit and the load circuit breaking alarm circuit of the driving circuit are all embedded in the bottom circuit board; the MOS tube driving circuit of the driving circuit is embedded in the top circuit board; the bottom of the top circuit board is electrically connected with the top of the bottom circuit board through plug-ins (J0 and P2), and a plurality of groups of heat radiators are fixed on the top of the top circuit board. The normally closed temperature control switch is arranged on the radiator, the high-power MOS tube is independently arranged on the other circuit board, and the radiator is additionally arranged, so that heat can be conveniently emitted.
Preferably, an accelerating electron beam emission head is arranged in the electron gun and aligned to the focusing magnetic lens, and the accelerating electron beam emission head is electrically connected with the high-voltage cable;
the bottom end of the electron gun is provided with a vacuum chamber, and a workpiece to be welded is arranged in the vacuum chamber and aligned to the position of the accelerating electron beam emission head.
Therefore, the electron beam focusing magnetic lens driving circuit with the structure changes the grid voltage of the MOS tube by switching different amplification factors, thereby changing the output current of the MOS tube and realizing the adjustable control of a plurality of ranges.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention and not for limiting it, and although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that: the technical scheme of the invention can be modified or replaced by the same, and the modified technical scheme cannot deviate from the spirit and scope of the technical scheme of the invention.

Claims (7)

1. An electron beam focusing magnetic lens driving circuit is characterized in that: the device comprises a signal input loop, an amplification factor switching loop, a power supply loop and an MOS tube driving loop, wherein the signal input loop is connected with a signal generator for outputting 0-10V voltage signals, the signal input loop is connected with a grid electrode of the MOS tube driving loop through the amplification factor switching loop, a source electrode of the MOS tube driving loop is connected with the power supply loop, and a drain electrode of the MOS tube driving loop is connected with a focusing magnetic lens;
the amplification factor switching loop comprises a plurality of amplifying branches which are connected in parallel and have different voltage amplification factors;
the amplification factor switching loop comprises three amplifying branches connected in parallel;
a first multiple change-over switch, a first amplifier, a second amplifier, a first fine tuning change-over switch connected with the second amplifier in parallel, a first adjusting resistor and a first protection resistor are sequentially connected in series on one amplifying branch;
the other amplifying branch is sequentially connected with a third amplifier, a second multiple change-over switch, the first amplifier, the second amplifier, a second fine tuning change-over switch connected with the second amplifier in parallel, a second adjusting resistor and a second protection resistor in series;
the other amplifying branch is sequentially connected with a third amplifier, a fourth amplifier, a fifth amplifier, a third multiplier change-over switch, the first amplifier, the second amplifier, a third fine tuning change-over switch connected with the second amplifier in parallel, a third adjusting resistor and a third protection resistor in series;
the power supply loop comprises an overcurrent protection loop and a rectification loop, wherein the input end of the overcurrent protection loop is connected with the transformer, the output end of the overcurrent protection loop is connected with the rectification loop, and the output end of the rectification loop is connected with the source electrode of the MOS tube driving loop.
2. The electron beam focusing magnetic lens driving circuit according to claim 1, wherein: the output end of the second amplifier is connected with the PLC controller and is used for comparing the amplified signal value with the input signal value and judging whether the amplification factor switching loop works normally or not and whether the output signal and the input signal are in an error range or not.
3. An electron beam focusing magnetic lens driving circuit according to claim 2, wherein: the circuit breaking monitoring circuit comprises a sixth amplifier, the input end of the sixth amplifier is connected with the MOS tube driving circuit, the output end of the sixth amplifier is connected with a circuit breaking indicator lamp through a driving triode, the circuit breaking indicator lamp is coupled with a photoelectric coupler, and the photoelectric coupler is connected with the PLC.
4. An electron beam focusing magnetic lens driving circuit according to claim 2, wherein: the PLC is further connected with a temperature monitoring loop, the temperature monitoring loop comprises a normally closed temperature control switch and a temperature indicator lamp which are connected in series, and the normally closed temperature control switch is used for monitoring the working temperature of the MOS tube.
5. The electron beam focusing magnetic lens driving circuit according to claim 1, wherein: the overcurrent protection circuit comprises a fuse connected in series with the circuit;
the rectifying circuit comprises rectifying capacitors arranged in parallel.
6. An electron beam welding apparatus based on the electron beam focusing magnetic lens driving circuit according to any one of the preceding claims 1-5, characterized in that: the electronic gun comprises a focusing magnetic lens arranged in the electronic gun, wherein the focusing magnetic lens is electrically connected with a driving circuit;
the signal input loop, the amplification factor switching loop, the circuit break monitoring loop, the temperature monitoring loop, the power supply loop and the load circuit break alarm loop of the MOS tube driving loop are all embedded in the bottom circuit board;
the MOS tube driving loop is embedded in the top circuit board;
the bottom of the top circuit board is electrically connected with the top of the bottom circuit board through an insert, and a plurality of groups of radiators are fixed on the top of the top circuit board;
and the radiator is provided with a normally closed temperature control switch.
7. The electron beam welding apparatus of the electron beam focusing magnetic lens driving circuit according to claim 6, wherein: an accelerating electron beam emission head is arranged in the electron gun and aligned to the focusing magnetic lens, and the accelerating electron beam emission head is electrically connected with a high-voltage cable;
the bottom end of the electron gun is provided with a vacuum chamber, and a workpiece to be welded is arranged in the vacuum chamber and aligned to the position of the accelerating electron beam emission head.
CN202211169216.1A 2022-09-26 2022-09-26 Electron beam focusing magnetic lens driving circuit and electron beam welding equipment thereof Active CN115464246B (en)

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CN202211169216.1A CN115464246B (en) 2022-09-26 2022-09-26 Electron beam focusing magnetic lens driving circuit and electron beam welding equipment thereof

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CN202211169216.1A CN115464246B (en) 2022-09-26 2022-09-26 Electron beam focusing magnetic lens driving circuit and electron beam welding equipment thereof

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CN115464246B true CN115464246B (en) 2023-12-22

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB744127A (en) * 1951-03-03 1956-02-01 Emi Ltd Improvements relating to circuit arrangements embodying cathode ray tubes
US4980615A (en) * 1986-03-06 1990-12-25 Pentchev Vassil B Electron beam control circuit in electron beam evaporators with alternating acceleration voltages
CN1351756A (en) * 1999-04-07 2002-05-29 Ut-巴特勒有限责任公司 Electrostatically focused addressable field emission arraychips (AFEA' s) for high-speed maskless digital e-beam direct write lithography and scanning electron microscopy
CN1657966A (en) * 2005-02-06 2005-08-24 重庆工学院 On-line testing system for capacity of vehicle lead-acid battery
CN101776478A (en) * 2009-12-29 2010-07-14 中国科学院武汉物理与数学研究所 Wide-waveband multi-range high-precision low-power consumption portable laser power meter
CN108140525A (en) * 2015-09-29 2018-06-08 株式会社日立高新技术 Have the scanning transmission electron microscope and its observation method of electronic energy loss spectrometer
CN109048027A (en) * 2018-08-13 2018-12-21 河北众航高能科技有限公司 Electron beam turntable driving control panel and electron-beam welder
CN114978130A (en) * 2022-05-05 2022-08-30 北京市科通电子继电器总厂有限公司 Operational amplifier constant current driving circuit based on solid-state power controller

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB744127A (en) * 1951-03-03 1956-02-01 Emi Ltd Improvements relating to circuit arrangements embodying cathode ray tubes
US4980615A (en) * 1986-03-06 1990-12-25 Pentchev Vassil B Electron beam control circuit in electron beam evaporators with alternating acceleration voltages
CN1351756A (en) * 1999-04-07 2002-05-29 Ut-巴特勒有限责任公司 Electrostatically focused addressable field emission arraychips (AFEA' s) for high-speed maskless digital e-beam direct write lithography and scanning electron microscopy
CN1657966A (en) * 2005-02-06 2005-08-24 重庆工学院 On-line testing system for capacity of vehicle lead-acid battery
CN101776478A (en) * 2009-12-29 2010-07-14 中国科学院武汉物理与数学研究所 Wide-waveband multi-range high-precision low-power consumption portable laser power meter
CN108140525A (en) * 2015-09-29 2018-06-08 株式会社日立高新技术 Have the scanning transmission electron microscope and its observation method of electronic energy loss spectrometer
CN109048027A (en) * 2018-08-13 2018-12-21 河北众航高能科技有限公司 Electron beam turntable driving control panel and electron-beam welder
CN114978130A (en) * 2022-05-05 2022-08-30 北京市科通电子继电器总厂有限公司 Operational amplifier constant current driving circuit based on solid-state power controller

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