CN115463888A - Open Mask belt cleaning device - Google Patents

Open Mask belt cleaning device Download PDF

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Publication number
CN115463888A
CN115463888A CN202211128247.2A CN202211128247A CN115463888A CN 115463888 A CN115463888 A CN 115463888A CN 202211128247 A CN202211128247 A CN 202211128247A CN 115463888 A CN115463888 A CN 115463888A
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China
Prior art keywords
fixedly connected
sliding
cleaning
box
open mask
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CN202211128247.2A
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Chinese (zh)
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CN115463888B (en
Inventor
王圣福
贺贤汉
张正伟
周毅
阮安俊
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Anhui Fullerde Technology Development Co ltd
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Anhui Fullerde Technology Development Co ltd
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Priority to CN202211128247.2A priority Critical patent/CN115463888B/en
Publication of CN115463888A publication Critical patent/CN115463888A/en
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Publication of CN115463888B publication Critical patent/CN115463888B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/14Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A40/00Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
    • Y02A40/90Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in food processing or handling, e.g. food conservation

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The invention relates to the field of Open Mask cleaning, in particular to an Open Mask cleaning device which comprises a cleaning box and a sealing cover, wherein the outer side wall of the cleaning box is fixedly communicated with a lead-in pipe, the side wall of the cleaning box is rotatably connected with a sealing door, an ultrasonic vibrating plate is fixedly connected in the cleaning box, a circulating mechanism is arranged in the cleaning box, the circulating mechanism comprises four storage boxes, the storage boxes are symmetrically and fixedly connected to the inner side wall of the cleaning box, and first sliding rods are symmetrically and fixedly connected in inner grooves in the inner side of the cleaning box. According to the invention, by arranging the circulating mechanism and the pushing mechanism, the liquid medicine in the cleaning box can be continuously and circularly filtered, the liquid medicine is filtered, and the coating film in the liquid medicine is removed from the liquid medicine, so that the cleaning capability of the liquid medicine is improved, the cleaning effect is improved, and meanwhile, after the liquid medicine is filtered, the surface of the open mask part can be washed from top to bottom, and the coating film adhered to the surface of the open mask part is washed clean, so that the quality of the open mask part is improved.

Description

Open Mask belt cleaning device
Technical Field
The invention relates to the field of Open Mask cleaning, in particular to an Open Mask cleaning device.
Background
Vacuum evaporation is a key link in the production process of OLED panels, and the Open Mask serving as an evaporation Mask for organic materials and metal materials is a key structural component of the OLED panels. After the Open Mask is used for a period of time, a layer of vapor deposition film is formed on the surface, and the precision and yield of products are seriously influenced.
In the prior art, the Chinese invention patent with the application number of CN202010271212.9 discloses a method for cleaning an Open Mask surface evaporation material of an OLED Mask, which relates to the technical field of OLED panel production and comprises the following steps of selecting a tool clamp matched with an Open Mask part for fixing according to the structural form of the Open Mask part; selecting a material which resists N-methyl pyrrolidone corrosion to manufacture a liquid medicine soaking tank; adding electronic grade N-methyl pyrrolidone into the liquid medicine soaking tank; putting the open mask part into the liquid medicine soaking tank for reaction; taking out the reacted open mask part, and putting the part into a deionized water tank for rinsing; and (4) putting the rinsed open mask part into a vacuum oven for drying treatment.
However, in the prior art, when an Open Mask surface evaporation material is cleaned, an Open Mask component is soaked in liquid medicine, a coating film on the surface of the Open Mask component is separated and mixed with the liquid medicine, when the Open Mask component is taken out of the liquid medicine, coating film particles in the liquid medicine can be attached to the Open Mask component again and need to be washed, so that the cleaning difficulty is increased, and meanwhile, after the liquid medicine is used for a long time, the pollutant concentration of the liquid medicine is increased, the cleaning effect of the liquid medicine on the Open Mask component can be reduced, so that the precision and the yield of products are reduced.
Based on this, the invention designs an Open Mask cleaning device to solve the above problems.
Disclosure of Invention
The invention aims to provide an Open Mask cleaning device, and solves the problems that in the prior art provided by the background art, when an Open Mask part is soaked in liquid medicine during cleaning of an Open Mask surface evaporation material, a coating film on the surface of the Open Mask part is separated and mixed with the liquid medicine, when the Open Mask part is taken out of the liquid medicine, coating film particles in the liquid medicine are attached to the Open Mask part again and need to be washed, so that the cleaning difficulty is increased, and meanwhile after the liquid medicine is used for a long time, the pollutant concentration of the liquid medicine is increased, the cleaning effect of the liquid medicine on the Open Mask part is reduced, and the precision and the yield of products are reduced.
In order to achieve the purpose, the invention provides the following technical scheme: an Open Mask cleaning device comprises a cleaning box and a sealing cover, wherein the outer side wall of the cleaning box is fixedly communicated with a lead-in pipe, the side wall of the cleaning box is rotatably connected with a sealing door, an ultrasonic vibration plate is fixedly connected in the cleaning box, a circulating mechanism is arranged in the cleaning box and comprises four storage boxes, the storage boxes are symmetrically and fixedly connected to the inner side wall of the cleaning box, first slide rods are symmetrically and fixedly connected in inner grooves in the cleaning box, second slide rods are symmetrically and fixedly connected in the other two inner grooves in the cleaning box, the surface of each first slide rod is fixedly connected with a first slide block, the end parts of the two first slide blocks are fixedly connected with a first pressing plate together, the surface of each first slide block is sleeved with a first reset spring, the two ends of each first reset spring are fixedly connected to the bottom ends of the first slide block and the cleaning box respectively, the surface of each second slide rod is slidably connected with a second slide block, the end parts of the two second slide blocks are fixedly connected with a second pressing plate together, the surface of the second slide rods is sleeved with a second reset spring, the two ends of the second reset springs are fixedly connected to the bottom ends of the second slide blocks and the first pressing plate, and the sealing plate are arranged on a sealing cover, and a sealing pushing mechanism which are staggered with a filter plate;
the bottom end of the circulating pipe is fixedly communicated with the bottom end of the cleaning tank, and the top end of the circulating pipe is fixedly communicated with the side wall of the cleaning top end;
the cleaning device comprises a storage box, a plurality of first sliding rods, a plurality of second L-shaped sealing plates, a plurality of cleaning boxes, a plurality of third L-shaped sealing plates, a plurality of fourth L-shaped sealing plates, a plurality of third L-shaped sealing plate, a plurality of third L-shaped sealing plates, a plurality of fourth L-shaped sealing plates, a plurality of third L-shaped sealing plate, a plurality of cleaning boxes and a plurality of cleaning boxes, wherein the surfaces of the storage box and the cleaning boxes are symmetrically and fixedly connected with third sliding rods;
the top ends of the fourth traction magnets are all connected with a sliding frame in a sliding mode, the surface of the sliding frame is fixedly connected with a fifth sliding rod, the other end of the fifth sliding rod is connected to the bottom end of a cleaning box in a sliding mode, the surface of the fifth sliding rod is sleeved with a fifth reset spring, two ends of the fifth reset spring are fixedly connected to the sliding frame and the cleaning box respectively, the top ends of the two fourth traction magnets are fixedly connected with a first L-shaped clamping block together, the bottom end of the second pressing plate is symmetrically and fixedly connected with a second L-shaped clamping block, and the end portions of the first L-shaped clamping block and the second L-shaped clamping block are both trapezoidal blocks;
during operation, among the prior art, when wasing Open Mask surface coating by vaporization material, open Mask part soaks when liquid medicine, the coating film on Open Mask part surface breaks away from, and mix with liquid medicine, when taking out Open Mask part from liquid medicine, coating film granule can be attached to Open Mask part again in the liquid medicine, need wash, thereby the washing degree of difficulty has been increased, liquid medicine is after using for a long time simultaneously, the pollutant concentration of liquid medicine risees, can reduce liquid medicine to Open Mask part cleaning performance, thereby lead to the problem that precision and the yield of product reduce, above-mentioned problem can be solved to this technical scheme, concrete operation is as follows: firstly, opening a sealing door on the side wall of a cleaning box, placing a fixing frame for fixing an open mask component into the cleaning box, then closing the sealing door, then injecting liquid medicine into the cleaning box through a guide pipe, sealing the port of the guide pipe, covering a sealing cover on the top end of the cleaning box, then opening an ultrasonic vibration plate, soaking and cleaning the open mask component and the liquid medicine, separating a coating film on the surface of the open mask component after soaking the open mask component by the liquid medicine, mixing the coating film with the liquid medicine in the cleaning box, then pushing a first pressing plate to move downwards through a pushing mechanism, compressing a first reset spring until the first pressing plate is attached to a second pressing plate, pushing the second pressing plate to move downwards under the pushing of the first pressing plate, compressing a second reset spring, respectively forming a first filtering hole on the surfaces of the first pressing plate and the second pressing plate in a staggered array mode, and after the first pressing plate is attached to the second pressing plate, the first filtering holes are sealed with each other, the first pressing plate and the second pressing plate move downwards simultaneously, liquid medicine and a coating film in the cleaning box are discharged to the top end of the first pressing plate through the circulating pipe, meanwhile, the second L-shaped sealing plate is pushed to move downwards while the first pressing plate moves downwards, the fourth reset spring is compressed, the first L-shaped sealing plate moves downwards, the third reset spring is compressed, until the first L-shaped sealing plate moves to the bottommost end, the first traction block and the second traction magnetic block attract each other and are tightly adsorbed at the moment, the stability of the first L-shaped sealing plate is ensured, the third traction magnetic block and the fourth traction magnetic block attract each other at the moment, the fourth traction magnetic block drives the first L-shaped clamping block to move towards a third traction direction, the fifth reset spring compresses, and then the first pressing plate and the second pressing plate continue to move downwards, the third return spring and the fourth return spring continue to contract until the second L-shaped clamping block is in butt joint with and hooked with the first L-shaped clamping block, liquid medicine and a coating mixed solution in the cleaning box can be intensively discharged above the first pressing plate at the moment, then the first pressing plate is enabled to move upwards by controlling the pushing mechanism, the first L-shaped sealing plate cannot move upwards under the adsorption of the first traction magnetic block and the second traction magnetic block, so that the stability of the connection of the first L-shaped clamping block and the second L-shaped clamping block is ensured, the second pressing plate is prevented from moving upwards along with the first pressing plate, the mixed liquid medicine on the first pressing plate enters the cleaning box again after being filtered by the first pressing plate, the surface of the open mask component is continuously cleaned, and then when the first pressing plate moves to the top end, the first L-shaped sealing plate is under the elastic action of the third return spring, the first traction magnetic block and the second traction magnetic block are separated, the first L-shaped sealing plate is reset, the third traction magnetic block and the fourth traction magnetic block are not adsorbed, the first L-shaped clamping plate is reset under the action of a fifth reset spring and is in contact with the hooking action of the second L-shaped clamping plate, the second pressing plate is reset under the action of the second reset spring and is prepared for next compression, so that the liquid medicine in the box is filtered and cleaned continuously and circularly, the coating film in the liquid medicine is removed from the liquid medicine, the cleaning capacity of the liquid medicine is improved, the cleaning effect is improved, the surface of the open mask component can be cleaned from top to bottom after the liquid medicine is filtered, the coating film adhered to the surface of the open mask component is cleaned, the quality of the open mask component is improved, and when the open mask component is taken out of the liquid medicine, coating film granule can be attached to on open mask part again in liquid medicine, need wash to increased the washing degree of difficulty, liquid medicine is after long-time the use simultaneously, and the pollutant concentration of liquid medicine risees, can reduce liquid medicine to open mask part cleaning performance, thereby leads to the precision of product and the problem that the yield reduces.
As a further scheme of the invention, a second filtering hole is formed in the surface array of the bottom end of the storage box, a third filtering hole is formed in the surface array of the top end of the storage box, the second L-shaped sealing plate is sealed at the second filtering hole, a first sealing mechanism is arranged at the connection port of the bottom end of the cleaning box and the circulating pipe, and the first sealing mechanism is fixedly connected with a fourth traction magnetic block; when the cleaning tank works, the second filtering hole, the third filtering hole and the first sealing mechanism are arranged, when the first L-shaped sealing plate and the second sealing plate move downwards, the bottom end of the circulating pipe is sealed by the first sealing mechanism, liquid medicine and coated liquid in the cleaning tank can only enter through the second filtering hole and are filtered, the liquid medicine is discharged into the storage tank, and the coated liquid stays in the cleaning tank, so that the mixing ratio of the coated liquid and the coated liquid in the cleaning tank is improved.
As a further scheme of the invention, the first sealing mechanism comprises a plurality of first sealing plates, the first sealing plates are fixedly connected to the fourth traction magnetic block, and the sliding frame is fixedly connected to the top ends of the first sealing plates; when the cleaning box works, when the third traction magnetic block is in contact with the fourth traction magnetic block, the first sealing plate originally sealed at the bottom end of the circulating pipe is separated under the connecting action of the sliding frame, so that the circulating pipe is opened, and liquid medicine in the cleaning box can be discharged.
As a further scheme of the invention, a second sealing mechanism is arranged at the top end of the circulating pipe, the second sealing mechanism comprises a plurality of second sealing plates, the second sealing plates are sealed at the top end opening of the circulating pipe, the end parts of the second sealing plates are fixedly connected with sixth sliding rods, the sixth sliding rods are slidably connected onto the side wall of the storage box, the end parts of the sixth sliding rods are fixedly connected with trapezoidal pushing blocks, the surfaces of the sixth sliding rods are sleeved with sixth reset springs, the two ends of the sixth reset springs are respectively and fixedly connected onto the storage box and the trapezoidal pushing blocks, and the top ends of the first pressing plates are symmetrically and fixedly connected with pushing wheels for extruding the trapezoidal pushing blocks; during operation, through setting up the second sealing mechanism, when first clamp plate and second clamp plate downstream, cancel the extrusion to trapezoidal promotion piece at the impeller, under sixth reset spring's effect, make the second closing plate cancel the sealed to the circulating pipe top, thereby make the liquid medicine that washs the incasement can flow in first clamp plate top, when first clamp plate and second clamp plate are at the top, the impeller extrusion is on trapezoidal promotion piece at this moment, make sixth reset spring compressed, the second closing plate seals the circulating pipe top, avoid the liquid medicine backward flow, make the coating film on first clamp plate surface wash and flow in washing incasement.
As a further scheme of the invention, the pushing mechanism comprises an air cylinder and a connecting seat, the air cylinder is fixedly connected to the top end of the sealing cover, the bottom end of a telescopic rod of the air cylinder penetrates through the bottom end of the sealing cover and then is in sliding connection with the sealing cover, and the connecting seat is fixedly connected to the top end of the first pressing plate; the during operation through the control cylinder, realizes the elevating movement to first clamp plate to through setting up the connecting seat, the sealed lid of convenient to detach can be cleared up the coating film on the surface of first clamp plate by the manual work, improves the filter effect of first clamp plate.
As a further scheme of the invention, the circulating pipes are all fixedly communicated with an external water pump; when the circulating pipe works, the water pump is arranged, so that the residual of liquid medicine in the circulating pipe can be reduced, and the circulating pipe is prevented from refluxing.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, by arranging the circulating mechanism and the pushing mechanism, the liquid medicine in the cleaning box can be continuously and circularly filtered, the liquid medicine is filtered, and the coating film in the liquid medicine is removed from the liquid medicine, so that the cleaning capability of the liquid medicine is improved, the cleaning effect is improved, and meanwhile, after the liquid medicine is filtered, the surface of the open mask component can be washed from top to bottom, and the coating film adhered to the surface of the open mask component is washed clean, so that the quality of the open mask component is improved.
2. According to the invention, by arranging the second filtering hole, the third filtering hole and the first sealing mechanism, the mixing ratio of the coating film in the cleaning box and the liquid medicine can be improved, so that the discharge rate of the coating film in the cleaning box is improved, the coating film ratio in the cleaning box is reduced, the cleaning effect of the liquid medicine on the open mask component is improved, and the quality of the open mask component is improved.
3. According to the invention, by arranging the second sealing mechanism, when the first pressing plate and the second pressing plate move downwards, the pushing wheel cancels the extrusion on the trapezoidal pushing block, the second sealing plate cancels the sealing on the top end of the circulating pipe under the action of the sixth return spring, so that the liquid medicine in the cleaning box can flow into the top end of the first pressing plate, when the first pressing plate and the second pressing plate are at the top ends, the pushing wheel presses on the trapezoidal pushing block at the moment, the sixth return spring is compressed, the second sealing plate seals the top end of the circulating pipe, the liquid medicine is prevented from flowing back, and the coating film on the surface of the first pressing plate is flushed and flows into the cleaning box.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of the general structure of the present invention;
FIG. 2 is a first cross-sectional view of the general construction of the invention;
FIG. 3 is a second cross-sectional view of the general construction of the invention;
FIG. 4 is a view showing a second seal mechanism according to the present invention;
FIG. 5 is an enlarged view taken at A in FIG. 4;
FIG. 6 is a view illustrating a connection condition of a first sealing mechanism according to the present invention;
fig. 7 is a perspective view of the storage box of the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
the cleaning box comprises a cleaning box 1, a sealing cover 2, an inlet pipe 3, a sealing door 4, an ultrasonic vibrating plate 5, a storage box 6, a first sliding rod 7, a second sliding rod 8, a first sliding block 9, a first pressing plate 10, a first return spring 11, a second sliding block 12, a second pressing plate 13, a second return spring 14, a first filtering hole 15, a circulating pipe 16, a third sliding rod 17, a first L-shaped sealing plate 18, a third return spring 19, a fourth sliding rod 20, a second L-shaped sealing plate 21, a fourth return spring 22, a first traction magnetic block 23, a second traction magnetic block 24, a third traction magnetic block 25, a fourth traction magnetic block 26, a sliding frame 27, a fifth sliding rod 28, a fifth return spring 29, a first L-shaped clamping block 30, a second L-shaped clamping block 31, a second filtering hole 32, a third filtering hole 33, a first sealing plate 34, a second sealing plate 35, a sixth sliding rod 36, a trapezoidal pushing block 37, a sixth return spring 38, a pushing wheel 39, an air cylinder 40 and a connecting seat 41.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-7, the present invention provides a technical solution: an Open Mask cleaning device comprises a cleaning box 1 and a sealing cover 2, the outer side wall of the cleaning box 1 is fixedly communicated with a lead-in pipe 3, the side wall of the cleaning box 1 is rotatably connected with a sealing door 4, an ultrasonic vibration plate 5 is fixedly connected in the cleaning box 1, a circulating mechanism is arranged in the cleaning box 1 and comprises four storage boxes 6, the storage boxes 6 are symmetrically and fixedly connected to the inner side wall of the cleaning box 1, first slide bars 7 are symmetrically and fixedly connected in inner side grooves of the cleaning box 1, second slide bars 8 are symmetrically and fixedly connected in the other two inner side grooves of the cleaning box 1, a first slide block 9 is slidably connected to the surface of the first slide bar 7, a first pressing plate 10 is fixedly connected to the end parts of the two first slide blocks 9 together, a first reset spring 11 is sleeved on the surface of the first slide bar 7, two ends of the first reset spring 11 are fixedly connected to the bottom ends of the first slide blocks 9 and the cleaning box 1 respectively, a second slide block 12 is slidably connected to the surface of the second slide bar 8, a second pressing plate 13 is fixedly connected to the end part of the two second slide blocks 12, a second reset spring 14 is sleeved on the surface of the second slide block 12, a first pressing plate 13 and a first pressing plate 15 and a side wall of the cleaning box are respectively connected to the side wall of the first slide bar 10, and a filter box, a first slide bar 10, and a second slide pressing plate 15 are respectively, and a filter box, and a filter pressing plate 10, and a filter box 2, and a filter pressing plate 15 are respectively arranged on the side wall;
the circulating mechanism also comprises a plurality of circulating pipes 16, the bottom ends of the circulating pipes 16 are fixedly communicated with the bottom end of the cleaning tank 1, and the top ends of the circulating pipes 16 are fixedly communicated with the side wall of the cleaning top end;
the surface of the storage box 6 is symmetrically and fixedly connected with a third sliding rod 17, the surfaces of a plurality of first sliding rods 7 are fixedly connected with a first L-shaped sealing plate 18 together, the surface of the third sliding rod 17 is sleeved with a third return spring 19, two ends of the third return spring 19 are fixedly connected to the storage box 6 and the cleaning box 1 respectively, the top end of the first L-shaped sealing plate 18 is connected with a fourth sliding rod 20 in an array sliding mode, the surfaces of a plurality of fourth sliding rods 20 are fixedly connected with a second L-shaped sealing plate 21 together, the top end of the second L-shaped sealing plate 21 is fixedly connected to the bottom end of the first pressing plate 10, the second L-shaped sealing plate 21 is connected with the second pressing plate 13 in a sliding mode, the surface of each fourth sliding rod 20 is sleeved with a fourth return spring 22, two ends of the fourth return spring 22 are fixedly connected to the second L-shaped sealing plate 21 and the first L-shaped sealing plate 18 respectively, the bottom end of one side surface of the first L-shaped sealing plate is fixedly connected with a first traction magnetic block 23, the bottom end of the cleaning box 1 is fixedly connected with a second traction magnetic block 24 adaptive to the first traction magnetic block 23, the other side bottom of the first sealing plate 34 is connected with a third traction magnetic block 25, and the bottom end of the cleaning box 1 is provided with a fourth magnetic block 26 adaptive to the third magnetic block traction;
the top ends of the fourth traction magnets 26 are both connected with a sliding frame 27 in a sliding manner, the surface of the sliding frame 27 is fixedly connected with a fifth sliding rod 28, the other end of the fifth sliding rod 28 is connected to the bottom end of the cleaning box 1 in a sliding manner, the surface of the fifth sliding rod 28 is sleeved with a fifth reset spring 29, two ends of the fifth reset spring 29 are respectively fixedly connected to the sliding frame 27 and the cleaning box 1, the top ends of the two fourth traction magnets 26 are jointly and fixedly connected with a first L-shaped clamping block 30, the bottom end of the second pressing plate 13 is symmetrically and fixedly connected with a second L-shaped clamping block 31, and the end parts of the first L-shaped clamping block 30 and the second L-shaped clamping block 31 are both trapezoidal blocks;
during operation, among the prior art, when wasing Open Mask surface coating by vaporization material, open Mask part soaks when liquid medicine, the coating film on Open Mask part surface breaks away from, and mix with liquid medicine, when taking out Open Mask part from liquid medicine, coating film granule can be attached to Open Mask part again in the liquid medicine, need wash, thereby the washing degree of difficulty has been increased, liquid medicine is after using for a long time simultaneously, the pollutant concentration of liquid medicine risees, can reduce liquid medicine to Open Mask part cleaning performance, thereby lead to the problem that precision and the yield of product reduce, above-mentioned problem can be solved to this technical scheme, concrete operation is as follows: firstly, a sealing door 4 on the side wall of a cleaning box 1 is opened, a fixing frame for fixing an open mask component is placed in the cleaning box 1, then the sealing door 4 is closed, then medicinal liquid is injected into the cleaning box 1 through a guide pipe 3, the port of the guide pipe 3 is sealed, then a sealing cover 2 is covered at the top end of the cleaning box 1, then an ultrasonic vibrating plate 5 is opened, the open mask component and the medicinal liquid are soaked and cleaned, after the open mask component is soaked by the medicinal liquid, a coating film on the surface of the open mask component is separated with the medicinal liquid and is mixed with the medicinal liquid in the cleaning box 1, then a pushing mechanism is used for pushing a first pressing plate 10 to move downwards, a first return spring 11 is compressed, after the first pressing plate 10 is attached to a second pressing plate 13, the second pressing plate 13 moves downwards under the pushing of the first pressing plate 10, a second return spring 14 is compressed, and as first filtering holes 15 are respectively arranged on the surfaces of the first pressing plate 10 and the second pressing plate 13 in a staggered array manner, after the first pressing plate 10 and the second pressing plate 13 are attached, the first filtering holes 15 are sealed with each other, at this time, the first pressing plate 10 and the second pressing plate 13 move downwards at the same time, the liquid medicine and the coating film in the cleaning tank 1 are discharged to the top end of the first pressing plate 10 through the circulating pipe 16, at the same time, the first pressing plate 10 moves downwards, the second L-shaped sealing plate 21 is pushed to move downwards, the fourth return spring 22 is compressed, the first L-shaped sealing plate 18 moves downwards, the third return spring 19 is compressed, until the first L-shaped sealing plate 18 moves to the bottommost end, at this time, the first traction block and the second traction magnet 24 attract each other and are closely attracted, the stability of the first L-shaped sealing plate 18 is ensured, at this time, the third traction magnet 25 attracts each other with the fourth traction magnet 26, so that the fourth traction magnet 26 drives the first L-shaped clamping block 30 to move towards the third traction direction, the fifth return spring 29 is compressed, then the first pressing plate 10 and the second pressing plate 13 continue to move downwards, the third return spring 19 and the fourth return spring 22 continue to contract until the second L-shaped clamping block 31 is in butt joint with and hooked with the first L-shaped clamping block 30, at this time, the liquid medicine and the coating mixed solution in the cleaning box 1 can be intensively discharged above the first pressing plate 10, then the first pressing plate 10 moves upwards by controlling the pushing mechanism, because the first L-shaped sealing plate 18 cannot move upwards under the adsorption of the first traction magnetic block 23 and the second traction magnetic block 24, the stability of connection of the first L-shaped clamping block 30 and the second L-shaped clamping block 31 is ensured, the second pressing plate 13 is prevented from moving upwards along with the first pressing plate 10, at this time, the mixed liquid medicine on the first pressing plate 10 enters the cleaning box 1 again after being filtered by the first pressing plate 10, the surface of the open mask component is continuously cleaned, then after the first pressing plate 10 moves to the top end, the first L-shaped sealing plate 18 is under the elastic action of the third return spring 19, so that the first traction magnetic block 23 and the second traction magnetic block 24 are separated, the first L-shaped sealing plate 18 is reset, the third traction magnetic block 25 and the fourth traction magnetic block 26 cancel adsorption, under the action of the fifth return spring 29, the first L-shaped clamping plate is reset and contacts with the hooking action of the second L-shaped clamping plate, the second pressing plate 13 is reset under the action of the second return spring 14 to prepare for next compression, so that the liquid medicine in the cleaning box 1 is continuously filtered in a circulating manner, the coating film in the liquid medicine is removed from the liquid medicine, the cleaning capacity of the liquid medicine is improved, the cleaning effect is improved, and after the liquid medicine is filtered, the surface of the open mask component can be washed from top to bottom, the coating film with open mask part surface adhesion washes totally to improve open mask part quality, the improvement has been solved when taking out open mask part from liquid medicine, and coating film granule can be attached to open mask part again in the liquid medicine, need wash, thereby has increased the washing degree of difficulty, and liquid medicine is after long-time the use simultaneously, and the pollutant concentration of liquid medicine risees, can reduce liquid medicine to open mask part cleaning performance, thereby lead to the precision of product and the problem that the yield reduces.
As a further scheme of the invention, a second filtering hole 32 is formed in the surface array of the bottom end of the storage tank 6, a third filtering hole 33 is formed in the surface array of the top end of the storage tank 6, a second L-shaped sealing plate 21 is sealed at the second filtering hole 32, a first sealing mechanism is arranged at the connection port of the bottom end of the cleaning tank 1 and the circulating pipe 16, and the first sealing mechanism is fixedly connected with a fourth traction magnetic block 26; when the cleaning tank works, by arranging the second filtering hole 32, the third filtering hole 33 and the first sealing mechanism, when the first L-shaped sealing plate 18 and the second sealing plate 35 move downwards, as the bottom end of the circulating pipe 16 is sealed by the first sealing mechanism, the mixed liquid of the liquid medicine and the coating in the cleaning tank 1 can only enter through the second filtering hole 32 and is filtered, the liquid medicine is discharged into the storage tank 6, and the coating stays in the cleaning tank 1, so that the mixing ratio of the coating and the liquid medicine in the cleaning tank 1 is improved, until the first L-shaped sealing plate 18 moves to the bottom end, the first L-shaped sealing plate 18 seals the second filtering hole 32, the second L-shaped sealing plate 21 and the first sealing mechanism cancel the sealing of the third filtering hole 33 and the circulating pipe 16 respectively, the liquid medicine in the storage tank 6 enters the first pressing plate 10, the coating liquid medicine and the mixed liquid medicine in the cleaning tank 1 enter the first pressing plate 10 through the circulating pipe 16, and the filtering of the liquid medicine in the cleaning tank 1 is firstly filtered when the liquid medicine is discharged in the cleaning tank 1, so that the mixing ratio of the cleaning tank 1 and the coating liquid medicine and the coating in the cleaning tank 1 is improved, and the cleaning component is improved, and the quality of the coating part is improved, and the coating part is improved.
As a further scheme of the invention, the first sealing mechanism comprises a plurality of first sealing plates 34, the first sealing plates 34 are fixedly connected to the fourth traction magnetic block 26, and the sliding frame 27 is fixedly connected to the top ends of the first sealing plates 34; in operation, when the third traction magnet 25 contacts the fourth traction magnet 26, the first sealing plate 34 originally sealed at the bottom end of the circulation pipe 16 is separated under the connecting action of the sliding rack 27, so as to open the circulation pipe 16, and the liquid medicine in the cleaning tank 1 can be discharged.
As a further scheme of the present invention, a second sealing mechanism is arranged at the top end of the circulating pipe 16, the second sealing mechanism includes a plurality of second sealing plates 35, the second sealing plates 35 are sealed at the top end opening of the circulating pipe 16, the end portions of the second sealing plates 35 are fixedly connected with sixth sliding rods 36, the sixth sliding rods 36 are slidably connected to the side wall of the storage tank 6, the end portions of the sixth sliding rods 36 are fixedly connected with trapezoidal pushing blocks 37, the surface of the sixth sliding rod 36 is sleeved with a sixth return spring 38, two ends of the sixth return spring 38 are respectively fixedly connected to the storage tank 6 and the trapezoidal pushing blocks 37, and pushing wheels 39 for extruding the trapezoidal pushing blocks 37 are symmetrically and fixedly connected to the top end of the first pressing plate 10; when the cleaning device works, the second sealing mechanism is arranged, when the first pressing plate 10 and the second pressing plate 13 move downwards, the pushing wheel 39 cancels the extrusion on the trapezoidal pushing block 37, the second sealing plate 35 cancels the sealing on the top end of the circulating pipe 16 under the action of the sixth return spring 38, so that the liquid medicine in the cleaning box 1 can flow into the top end of the first pressing plate 10, when the first pressing plate 10 and the second pressing plate 13 are at the top end, the pushing wheel 39 extrudes on the trapezoidal pushing block 37 at the moment, the sixth return spring 38 is compressed, the second sealing plate 35 seals the top end of the circulating pipe 16, the liquid medicine backflow is avoided, and the coated film on the surface of the first pressing plate 10 is flushed and flows into the cleaning box 1.
As a further scheme of the invention, the pushing mechanism comprises an air cylinder 40 and a connecting seat 41, the air cylinder 40 is fixedly connected to the top end of the sealing cover 2, the bottom end of a telescopic rod of the air cylinder 40 penetrates through the bottom end of the sealing cover 2 and then is in sliding connection with the sealing cover 2, and the connecting seat 41 is fixedly connected to the top end of the first pressing plate 10; during operation, through control cylinder 40, realize the elevating movement to first clamp plate 10 to through setting up connecting seat 41, the sealed lid 2 of convenient to detach can be cleared up the coating film on the surface of first clamp plate 10 by the manual work, improves the filter effect of first clamp plate 10.
As a further proposal of the invention, the circulating pipes 16 are all fixedly communicated with an external water pump; when the automatic circulating device works, the water pump is arranged, so that the remaining amount of the liquid medicine in the circulating pipe 16 can be reduced, and the circulating pipe 16 is prevented from refluxing.
The working principle is as follows: firstly, a sealing door 4 on the side wall of a cleaning box 1 is opened, a fixing frame for fixing an open mask component is placed in the cleaning box 1, then the sealing door 4 is closed, then medicinal liquid is injected into the cleaning box 1 through a guide pipe 3, the port of the guide pipe 3 is sealed, then a sealing cover 2 is covered at the top end of the cleaning box 1, then an ultrasonic vibrating plate 5 is opened, the open mask component and the medicinal liquid are soaked and cleaned, after the open mask component is soaked by the medicinal liquid, a coating film on the surface of the open mask component is separated with the medicinal liquid and is mixed with the medicinal liquid in the cleaning box 1, then a pushing mechanism is used for pushing a first pressing plate 10 to move downwards, a first return spring 11 is compressed, after the first pressing plate 10 is attached to a second pressing plate 13, the second pressing plate 13 moves downwards under the pushing of the first pressing plate 10, a second return spring 14 is compressed, and as first filtering holes 15 are respectively arranged on the surfaces of the first pressing plate 10 and the second pressing plate 13 in a staggered array manner, after the first pressing plate 10 and the second pressing plate 13 are attached, the first filtering holes 15 are sealed with each other, at this time, the first pressing plate 10 and the second pressing plate 13 move downwards at the same time, the liquid medicine and the coating film in the cleaning tank 1 are discharged to the top end of the first pressing plate 10 through the circulating pipe 16, at the same time, the first pressing plate 10 moves downwards, the second L-shaped sealing plate 21 is pushed to move downwards, the fourth return spring 22 is compressed, the first L-shaped sealing plate 18 moves downwards, the third return spring 19 is compressed, until the first L-shaped sealing plate 18 moves to the bottommost end, at this time, the first traction block and the second traction magnet 24 attract each other and are closely attracted, the stability of the first L-shaped sealing plate 18 is ensured, at this time, the third traction magnet 25 attracts each other with the fourth traction magnet 26, so that the fourth traction magnet 26 drives the first L-shaped clamping block 30 to move towards the third traction direction, compressing a fifth reset spring 29, continuing to make the first pressing plate 10 and the second pressing plate 13 move downwards, continuing to contract the third reset spring 19 and the fourth reset spring 22 until the second L-shaped clamping block 31 is in butt joint with and hooked with the first L-shaped clamping block 30, at the moment, the liquid medicine and the coating mixed solution in the cleaning box 1 can be intensively discharged above the first pressing plate 10, then controlling a pushing mechanism to make the first pressing plate 10 move upwards, because the first L-shaped sealing plate 18 cannot move upwards under the adsorption of the first traction magnetic block 23 and the second traction magnetic block 24 under the first L-shaped sealing plate 18, ensuring the stability of connection of the first L-shaped clamping block 30 and the second L-shaped clamping block 31, avoiding the second pressing plate 13 from moving upwards along with the first pressing plate 10, at the moment, the mixed liquid medicine on the first pressing plate 10 enters the cleaning box 1 again after being filtered by the first pressing plate 10, continuing to clean the surface of the open mask part, then, after the first pressing plate 10 moves to the top, continuously making the mixed liquid medicine on the first L-shaped sealing plate 18 contact with the second L-shaped clamping block 19, and the filtering magnetic block 18, thereby increasing the effect of filtering and the filtering effect of the filtering and the filtering liquid medicine, thereby, the filtering return effect of the filtering return spring is improved, the filtering liquid medicine in the filtering and the filtering return plate 18, and the filtering magnetic block 18, and the filtering effect of the filtering return plate 18, and the filtering medium is improved, and the filtering magnetic block 29, and the filtering medium is improved, and the filtering medium is realized, and (4) washing the coating film adhered to the surface of the open mask part.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims (6)

1. The utility model provides an Open Mask belt cleaning device, is including wasing case (1) and sealed lid (2), it has leading-in pipe (3) to wash the fixed UNICOM of case (1) lateral wall, it is connected with sealing door (4) to wash case (1) lateral wall rotation, wash fixedly connected with ultrasonic wave shake board (5), its characterized in that in case (1): a circulating mechanism is arranged in the cleaning box (1), the circulating mechanism comprises four storage boxes (6), the storage boxes (6) are symmetrically and fixedly connected to the inner side wall of the cleaning box (1), first sliding rods (7) are symmetrically and fixedly connected to the inner side grooves of the cleaning box (1), second sliding rods (8) are symmetrically and fixedly connected to the other two inner side grooves of the cleaning box (1), the surfaces of the first sliding rods (7) are respectively and fixedly connected with first sliding blocks (9), the end parts of the two first sliding blocks (9) are respectively and fixedly connected with first pressing plates (10), the surfaces of the first sliding rods (7) are sleeved with first reset springs (11), the two ends of each first reset spring (11) are respectively and fixedly connected to the bottom ends of the first sliding blocks (9) and the cleaning box (1), the surfaces of the second sliding rods (8) are respectively and fixedly connected with second sliding blocks (12), the end parts of the two second sliding blocks (12) are respectively and fixedly connected with second pressing plates (13), the surfaces of the second sliding rods (8) are respectively and fixedly connected with second reset springs (14), the bottom ends of the second reset springs (14) are respectively and fixedly connected with second sliding blocks (12), the side walls of the cleaning box (1), and the first pressing plates (10), and the side walls of the first sliding blocks (10) are respectively connected with staggered with first pressing plates (15), the first pressing plate (10) and the sealing cover (2) are provided with a pushing mechanism together;
the circulating mechanism further comprises a plurality of circulating pipes (16), the bottom ends of the circulating pipes (16) are fixedly communicated with the bottom end of the cleaning tank (1), and the top ends of the circulating pipes (16) are fixedly communicated with the side wall of the cleaning top end;
the cleaning machine is characterized in that a third sliding rod (17) is symmetrically and fixedly connected to the surface of the storage box (6), a plurality of first sliding rods (7) are fixedly connected with a first L-shaped sealing plate (18) together on the surface, a third reset spring (19) is sleeved on the surface of the third sliding rod (17), two ends of the third reset spring (19) are fixedly connected to the storage box (6) and the cleaning box (1) respectively, a fourth sliding rod (20) is connected to the top end of the first L-shaped sealing plate (18) in an array sliding mode, a plurality of fourth sliding rods (20) are fixedly connected with a second L-shaped sealing plate (21) together on the surface, the top end of the second L-shaped sealing plate (21) is fixedly connected to the bottom end of the first pressing plate (10), the second L-shaped sealing plate (21) is connected with the second pressing plate (13) in a sliding mode, a fourth reset spring (22) is sleeved on the surface of the fourth sliding rod (20), two ends of the fourth reset spring (22) are fixedly connected to the second L-shaped sealing plate (21) and the bottom end of the first L-shaped sealing plate (18) respectively, a first magnetic block (23) is fixedly connected to the cleaning box (1), a first magnetic block (23) is fixedly connected to the bottom end of the second L-shaped sealing plate (24), a traction box, a second magnetic block (24) is connected to the cleaning box, a traction box, a second magnetic block (24) is connected to the first magnetic block (25), and a second magnetic block (24), and a traction box, a traction box are arranged on the first magnetic block (24), and a traction box, and a second magnetic block (23), and a second magnetic block traction box are arranged on the other side traction box, and a traction box A magnetic attraction block (26);
the top ends of the fourth traction magnetic blocks (26) are all connected with a sliding frame (27) in a sliding mode, the surface of the sliding frame (27) is fixedly connected with a fifth sliding rod (28), the other end of the fifth sliding rod (28) is connected to the bottom end of the cleaning box (1) in a sliding mode, a fifth reset spring (29) is sleeved on the surface of the fifth sliding rod (28), two ends of the fifth reset spring (29) are fixedly connected to the sliding frame (27) and the cleaning box (1) respectively, the top ends of the fourth traction magnetic blocks (26) are fixedly connected with first L-shaped clamping blocks (30) jointly, the bottom ends of the second pressing plate (13) are symmetrically and fixedly connected with second L-shaped clamping blocks (31), and the end portions of the first L-shaped clamping blocks (30) and the second L-shaped clamping blocks (31) are trapezoidal blocks.
2. The Open Mask cleaning device according to claim 1, wherein: the bottom end surface of the storage tank (6) is provided with a second filtering hole (32) in an array mode, the top end surface of the storage tank (6) is provided with a third filtering hole (33) in an array mode, the second L-shaped sealing plate (21) is sealed at the second filtering hole (32), a first sealing mechanism is arranged at the connection port of the bottom end of the cleaning tank (1) and the circulating pipe (16), and the first sealing mechanism is fixedly connected with the fourth traction magnetic block (26).
3. The Open Mask cleaning device according to claim 2, wherein: the first sealing mechanism comprises a plurality of first sealing plates (34), the first sealing plates (34) are fixedly connected to a fourth traction magnetic block (26), and the sliding frame (27) is fixedly connected to the top ends of the first sealing plates (34).
4. The Open Mask cleaning device according to claim 3, wherein: the circulating pipe (16) top is provided with second sealing mechanism, second sealing mechanism includes several second sealing plate (35), second sealing plate (35) are sealed in circulating pipe (16) top port department, the equal fixedly connected with sixth slide bar (36) of second sealing plate (35) tip, sixth slide bar (36) sliding connection is on storage box (6) lateral wall, the equal fixedly connected with of sixth slide bar (36) tip pushes away piece (37), sixth slide bar (36) surface has cup jointed sixth reset spring (38), sixth reset spring (38) both ends are fixed connection respectively on storage box (6) and trapezoidal promotion piece (37), first clamp plate (10) top symmetry fixedly connected with pushes away impeller (39) that trapezoidal promotion piece (37) were pushed.
5. The Open Mask cleaning device according to claim 1, wherein: push mechanism includes cylinder (40) and connecting seat (41), cylinder (40) fixed connection is on sealed lid (2) top, the telescopic link bottom of cylinder (40) run through behind sealed lid (2) bottom with sealed lid (2) sliding connection, connecting seat (41) fixed connection is on first clamp plate (10) top.
6. The Open Mask cleaning device according to claim 1, wherein: the circulating pipes (16) are all fixedly communicated with an external water pump.
CN202211128247.2A 2022-09-16 2022-09-16 Open Mask belt cleaning device Active CN115463888B (en)

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CN202211128247.2A CN115463888B (en) 2022-09-16 2022-09-16 Open Mask belt cleaning device

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Application Number Priority Date Filing Date Title
CN202211128247.2A CN115463888B (en) 2022-09-16 2022-09-16 Open Mask belt cleaning device

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CN115463888B CN115463888B (en) 2023-07-04

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0615241A (en) * 1992-07-02 1994-01-25 Roland D G Kk Ultrasonic washer
CN109226045A (en) * 2018-10-09 2019-01-18 嘉兴万顺精密机械有限公司 A kind of automobile parts soaking and washing structure
CN110076142A (en) * 2019-05-16 2019-08-02 恩利克(浙江)智能装备有限公司 Vertical type precision metallic mask plate laser cleaning system
CN111318508A (en) * 2018-12-13 2020-06-23 湖北浚山光电有限公司 Alcohol cleaning tank for metal mask plate cleaning system
JP2021001363A (en) * 2019-06-20 2021-01-07 アルバックテクノ株式会社 Mask cleaning method
CN112609189A (en) * 2020-12-09 2021-04-06 四川富乐德科技发展有限公司 Method for cleaning Open Mask surface magnesium-silver material of OLED Mask
JP2021077850A (en) * 2019-11-11 2021-05-20 饒梦華 Semiconductor cleaning facilities
CN214683222U (en) * 2021-01-21 2021-11-12 深圳大成芯片科技有限公司 Chip processing belt cleaning device
CN113770113A (en) * 2021-09-10 2021-12-10 安徽富乐德科技发展股份有限公司 Semiconductor cleaning device
CN114247695A (en) * 2021-12-29 2022-03-29 安徽应友光电科技有限公司 Cleaning method for magnesium-silver material on surface of OLED mask

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0615241A (en) * 1992-07-02 1994-01-25 Roland D G Kk Ultrasonic washer
CN109226045A (en) * 2018-10-09 2019-01-18 嘉兴万顺精密机械有限公司 A kind of automobile parts soaking and washing structure
CN111318508A (en) * 2018-12-13 2020-06-23 湖北浚山光电有限公司 Alcohol cleaning tank for metal mask plate cleaning system
CN110076142A (en) * 2019-05-16 2019-08-02 恩利克(浙江)智能装备有限公司 Vertical type precision metallic mask plate laser cleaning system
JP2021001363A (en) * 2019-06-20 2021-01-07 アルバックテクノ株式会社 Mask cleaning method
JP2021077850A (en) * 2019-11-11 2021-05-20 饒梦華 Semiconductor cleaning facilities
CN112609189A (en) * 2020-12-09 2021-04-06 四川富乐德科技发展有限公司 Method for cleaning Open Mask surface magnesium-silver material of OLED Mask
CN214683222U (en) * 2021-01-21 2021-11-12 深圳大成芯片科技有限公司 Chip processing belt cleaning device
CN113770113A (en) * 2021-09-10 2021-12-10 安徽富乐德科技发展股份有限公司 Semiconductor cleaning device
CN114247695A (en) * 2021-12-29 2022-03-29 安徽应友光电科技有限公司 Cleaning method for magnesium-silver material on surface of OLED mask

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