CN115454159A - Gas output equipment - Google Patents
Gas output equipment Download PDFInfo
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- CN115454159A CN115454159A CN202211087153.5A CN202211087153A CN115454159A CN 115454159 A CN115454159 A CN 115454159A CN 202211087153 A CN202211087153 A CN 202211087153A CN 115454159 A CN115454159 A CN 115454159A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
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- Control Of Fluid Pressure (AREA)
Abstract
The present invention provides a gas output apparatus including: the device comprises a controller, a pressure regulating circuit, a pressure stabilizing device, a gas output circuit and a key module, wherein the pressure regulating circuit, the pressure stabilizing device, the gas output circuit and the key module are electrically connected with the controller; the input end of the pressure regulating loop is used for being connected with an air source, the output end of the pressure regulating loop is connected with the input end of the pressure stabilizing device, and the output end of the pressure stabilizing device is used for being connected with an experimental device, so that the problems that a gas flow controller cannot keep constant-pressure output and cannot carry out continuous constant-current output are solved.
Description
Technical Field
The invention relates to the field of automatic control, in particular to gas output equipment.
Background
In laboratory research and experiments and actual industrial production, accurate flow control (constant flow) output or pressure control (constant pressure) output is required to be carried out on gas uninterruptedly for a long time. At present, in the prior art, a high-precision ISCO pump is mainly adopted to perform constant-flow or constant-pressure control output on gas, and in addition, a gas flow controller is also adopted to perform constant-flow output on gas.
However, although the injection rate and pressure control using the ISCO pump are highly accurate, the ISCO pump is expensive, and the ISCO pump is between 20 and 50 thousands depending on the model, and the gas flow controller can achieve accurate control of the gas flow rate, but cannot perform the constant pressure output mode, and has a single function. In addition, the gas flow controller has a big disadvantage that it cannot work when the pressure at the output end of the gas flow controller rises, so that the pressure difference at the two sides of the gas flow meter is lower than the working pressure difference.
In view of this, the present application is proposed.
Disclosure of Invention
The invention discloses a gas output device, aiming at solving the problems that a gas flow controller cannot keep constant-pressure output and the pressure difference between two ends of the gas flow controller cannot be intelligently adjusted to carry out continuous constant-flow output.
An embodiment of the present invention provides a gas output apparatus, including: the device comprises a controller, a pressure regulating loop, a pressure stabilizing device, a gas output loop and a key module, wherein the pressure regulating loop, the pressure stabilizing device, the gas output loop and the key module are electrically connected with the controller;
the input end of the pressure regulating loop is used for being connected with an air source, the output end of the pressure regulating loop is connected with the input end of the pressure stabilizing device, and the output end of the pressure stabilizing device is used for being connected with an experimental device;
wherein the controller is configured to implement the following steps by executing a computer program stored therein:
acquiring a key signal of the key module;
when the equipment is judged to be in a constant-pressure output state according to the key signal, controlling the gas output loop to open a first passage so as to enable the output end of the pressure stabilizing device to be communicated with the experimental device;
acquiring a pressure value of a pressure stabilizing device in real time, and starting the pressure regulating loop to supplement air for the pressure stabilizing device when the pressure value is lower than the preset value so as to output airflow with constant pressure to the realizing device;
when the device is judged to be in a constant-current output state according to the key signal, controlling the gas output loop to open a second passage so that the output end of the voltage stabilizer is communicated with the experimental device through a mass flow meter arranged on the second passage;
and acquiring a differential pressure value at two ends of the mass flow meter in real time, and dynamically opening and closing the regulating loop according to the differential pressure value so as to output airflow with constant flow to the realizing device.
Preferably, the pressure regulating circuit comprises: the system comprises a first three-way electromagnetic valve, a gas compressor and a first electromagnetic valve;
the first end of the first three-way electromagnetic valve is connected with the gas source, the second end of the first three-way electromagnetic valve is connected with the input end of the first electromagnetic valve, the third end of the first three-way electromagnetic valve is connected with the input end of the gas compressor, the output end of the gas compressor is connected with the input end of the first electromagnetic valve, and the output end of the first electromagnetic valve is connected with the input end of the pressure stabilizing device;
the control end of the first three-way electromagnetic valve, the control end of the gas compressor and the control end of the first electromagnetic valve are electrically connected with the output end of the controller.
Preferably, the voltage stabilization device includes: the pressure stabilizing container, the pressure gauge and the second electromagnetic valve;
the input end of the pressure stabilizing container is connected with the output end of the first electromagnetic valve, the output end of the pressure stabilizing container is connected with the input end of the second electromagnetic valve, and the output end of the second electromagnetic valve is connected with the input end of the gas output loop;
the pressure gauge is arranged on the pressure stabilizing container and used for acquiring the pressure value of the pressure stabilizing container in real time;
the pressure gauge is electrically connected with the input end of the controller, and the control end of the second electromagnetic valve is electrically connected with the output end of the controller.
Preferably, the gas output circuit comprises: the second three-way electromagnetic valve, the mass flowmeter and the differential pressure sensor;
the first end of the second three-way electromagnetic valve is connected with the output end of the second electromagnetic valve, and the second end of the second three-way electromagnetic valve is connected with an experimental device; the third end of the second three-way electromagnetic valve is connected with the input end of the mass flowmeter, the output end of the mass flowmeter is connected with the experimental device, and the differential pressure sensor is arranged on the input end and the output end of the mass flowmeter;
the control end of the second three-way electromagnetic valve is electrically connected with the output end of the controller, and the differential pressure sensor is electrically connected with the input end of the controller.
Preferably, the pressure regulating circuit is configured to turn on or off the gas compressor according to a key signal of the key module.
Preferably, the operating differential pressure of the mass flow meter is 0.2-0.8mpa.
Preferably, the controller is a PLC controller.
Preferably, the acquiring a pressure difference value at two ends of the mass flow meter in real time, and dynamically opening and closing the regulating circuit according to the pressure difference value, so as to output a constant flow of air flow to the implementing device, specifically:
acquiring a differential pressure value at two ends of a mass flow sensor through the differential pressure sensor, and judging whether the differential pressure value is smaller than a preset value or not;
if yes, controlling the first electromagnetic valve to open so as to increase the pressure in the pressure stabilizing container, and closing the first electromagnetic valve when the pressure difference value is higher than the preset value.
Based on the gas output equipment provided by the embodiment of the invention, the controller receives a key signal of the key module to determine a working mode required by an experimental device, when the condition that constant-pressure output is required is judged, the controller controls the gas output loop to open the first passage so as to enable the output end of the pressure stabilizing device to be communicated with the experimental device, and obtains a pressure value of the pressure stabilizing device in real time, and when the pressure value is lower than the preset value, the controller opens the pressure regulating loop to supplement air for the pressure stabilizing device so as to enable the realizing device to output airflow with constant pressure;
when the constant-current output is needed, controlling the gas output loop to open a second passage so that the output end of the pressure stabilizer is communicated with the experimental device through a mass flow meter arranged on the second passage; and acquiring the differential pressure value at two ends of the mass flow meter in real time, and dynamically opening and closing the regulating loop according to the differential pressure value so as to output constant-flow airflow to the realizing device, thereby solving the problems that a gas flow controller cannot keep constant-pressure output and cannot perform continuous constant-flow output.
Drawings
FIG. 1 is a schematic view of a gas delivery device provided by the present invention;
fig. 2 is a schematic diagram of a gas output apparatus provided by the present invention in a constant pressure mode.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
The following detailed description of specific embodiments of the invention refers to the accompanying drawings.
The invention discloses a gas output device, aiming at solving the problems that a gas flow controller cannot keep constant-pressure output and cannot carry out continuous constant-current output.
Referring to fig. 1, an embodiment of the present invention provides a gas output apparatus, including: the device comprises a controller 8, and a pressure regulating circuit, a pressure stabilizing device, a gas output circuit and a key module which are electrically connected with the controller 8;
the input end of the pressure regulating loop is used for connecting an air source 1, the output end of the pressure regulating loop is connected with the input end of the pressure stabilizing device, and the output end of the pressure stabilizing device is used for connecting an experimental device 14;
it should be noted that, in this embodiment, the pressure regulating circuit is configured to be connected to the gas source 1, where the gas source 1 may be a high-pressure gas cylinder of different gas types or air, and the pressure regulating circuit may increase the pressure of the gas input by the gas source 1, or may directly pass the gas output by the gas source 1 to the rear end.
In one possible embodiment of the invention, the pressure regulation circuit comprises: a first three-way solenoid valve 2, a gas compressor 3, and a first solenoid valve 4; the first end of the first three-way electromagnetic valve 2 is connected with the gas source 1, the second end of the first three-way electromagnetic valve 2 is connected with the input end of the first electromagnetic valve 4, the third end of the first three-way electromagnetic valve 2 is connected with the input end of the gas compressor 3, the output end of the gas compressor 3 is connected with the input end of the first electromagnetic valve 4, and the output end of the first electromagnetic valve 4 is connected with the input end of the pressure stabilizing device; the control end of the first three-way electromagnetic valve 2, the control end of the gas compressor 3 and the control end of the first electromagnetic valve 4 are electrically connected with the output end of the controller 8;
it should be noted that, in this embodiment, if the gas pressure value of the gas source 1 is lower and is not sufficient to meet the experiment requirement, the gas compressor 3 needs to be opened to pressurize the gas and then the gas is led to the subsequent stage loop, specifically, the key module is configured with a first button 10, where the first button is used to switch the first three-way electromagnetic valve 2, so that other parts of the gas source 1 can pass through the gas compressor 3 first and then pass through the pressure stabilizing device, and certainly, if the pressure of the gas source 1 meets the maximum pressure value required by the experiment, the other parts do not pass through the gas compressor 3.
In this embodiment, the pressure stabilizer is used to stabilize the gas output by the gas source 1, and avoid the influence on the experimental result of the experimental apparatus 14 due to the drastic change of pressure caused by the gas entering the system from the gas source 1.
In one possible embodiment of the present invention, the voltage stabilization device includes: a pressure stabilizing container 6, a pressure gauge 5 and a second electromagnetic valve 7;
the input end of the pressure stabilizing container 6 is connected with the output end of the first electromagnetic valve 4, the output end of the pressure stabilizing container 6 is connected with the input end of the second electromagnetic valve 7, and the output end of the second electromagnetic valve 7 is connected with the input end of the gas output loop;
the pressure gauge 5 is arranged on the pressure stabilizing container 6 and is used for acquiring the pressure value of the pressure stabilizing container 6 in real time; the pressure gauge 5 is electrically connected with the input end of the controller 8, and the control end of the second electromagnetic valve 7 is electrically connected with the output end of the controller 8
It should be noted that the pressure stabilizing container 6 is initially in an atmospheric pressure state, the pressure gauge 5 is configured to monitor the pressure in the pressure stabilizing container 6, the first electromagnetic valve 4 is first opened by the control, the second electromagnetic valve 7 is closed, the gas output from the gas source 1 continuously enters the pressure stabilizing container 6, when the pressure in the pressure stabilizing container 6 reaches the required working pressure of the equipment, the first electromagnetic valve 4 is closed, the second electromagnetic valve 7 is opened, the gas is output by the next module, the pressure in the pressure stabilizing container 6 decreases with the continuous output of the gas in the pressure stabilizing container 6, when the pressure is lower than the set range, the controller 8 controls the first electromagnetic valve 4 to be opened to allow the gas to enter, and when the pressure is increased to the set pressure, the pressure is closed again, so that the pressure in the pressure stabilizing container 6 is dynamically balanced
In the present embodiment, the gas output circuit is configured to switch the passage of the gas output circuit according to a gas output state required by the experimental device 14.
In one possible embodiment of the invention, the gas output circuit may comprise: a second three-way solenoid valve 9, a mass flow meter 13, and a differential pressure sensor 12;
a first end of the second three-way electromagnetic valve 9 is connected with an output end of the second electromagnetic valve 7, and a second end of the second three-way electromagnetic valve 9 is connected with an experimental device 14; the third end of the second three-way electromagnetic valve 9 is connected with the input end of the mass flowmeter 13, the output end of the mass flowmeter 13 is connected with the experimental device 14, and the differential pressure sensor 12 is arranged on the input end and the output end of the mass flowmeter 13; the control end of the second three-way electromagnetic valve 9 is electrically connected with the output end of the controller 8, and the differential pressure sensor 12 is electrically connected with the input end of the controller 8.
A second end of the second three-way solenoid valve 9 and a port of the experimental device 14 form a second passage, and a third end of the second three-way solenoid valve 9, the mass flow meter 13 and a port of the experimental device 14 form a second passage; specifically, the experimental device 14 connected behind the mass flow meter 13 monitors and adjusts the pressure of the surge tank 6 in real time through the controller 8 under the condition of pressure change, so as to ensure that the working pressure difference on two sides of the mass flow meter 13 is kept constant (usually 0.3-0.6 MPA), and maintain the mass flow meter 13 to work normally. When the pressure at the rear end of the mass flow meter 13 is continuously increased and the differential pressure of the mass flow meter 13 is monitored to be lower than the preset differential pressure through the differential pressure gauge, the controller 8 monitors and controls to open the first electromagnetic valve 4 in real time to increase the pressure in the pressure stabilizing container 6, and when the differential pressure value at the two ends of the mass flow meter 13 is restored to the preset differential pressure requirement range of the mass flow meter 13, the first electromagnetic valve 4 is closed, so that dynamic control is performed to ensure that the flow rate of the flow controller 8 stably and normally works.
It should be noted that, gas flow meters of different brands have different working pressure difference ranges, in this embodiment, a seven-star hua pio D07-11C mass flow meter 13 may be adopted, when the flow range is 0-5SCCM withstand voltage 10MPA, the working pressure difference range at both ends of the instrument is required to be 0.2-0.8MPA, and the pressure difference at both ends of the instrument can be always kept within the required range through the adjustment of the pressure regulating loop, the pressure stabilizing device and the controller 8, and the gas is stably output at a constant flow, so that the problem that the gas flow meter cannot work when the pressure at the gas outlet end of the gas flow controller 8 is increased to cause the pressure difference at both sides of the gas flow meter to be lower than the working pressure difference is solved. In other embodiments, the mass flow meter 13 may also be used in other operating pressure difference ranges, which are not limited in this respect, but are within the scope of the present invention.
When constant-pressure gas output is needed in laboratory scientific research experiments and actual industrial production, the second three-way electromagnetic valve 9 can be switched in a mode by pressing the second button 11, so that the gas switching channel is directly introduced into the experimental device 14 (namely, the second end of the second three-way electromagnetic valve 9 is connected with the experimental device 14) to input gas under the condition of stable pressure. When the gas in the pressure stabilizing container 6 continuously flows out and enters the experimental device 14, the pressure in the pressure stabilizing container 6 is reduced, at the moment, the controller 8 dynamically monitors the pressure in the pressure stabilizing container 6 through the pressure gauge 5, and when the monitored pressure is lower than a set value, the first electromagnetic valve 4 is controlled to be opened to supplement the gas, so that the pressure in the pressure stabilizing container 6 is constantly kept in a stable state, and the constant pressure output is ensured.
In one possible embodiment of the invention, the controller 8 may be a PLC controller 8.
It should be noted that, in an industrial environment, the PLC controller 8 has a strong anti-interference capability and is not interfered by a noisy industrial environment, and of course, in other embodiments, a single chip microcomputer may be used for controlling, which is not specifically limited herein, but these schemes are within the protection scope of the present invention.
Compared with the prior art, the embodiment has at least one of the following advantages: the embodiment designs a method for controlling the constant-current or constant-voltage mode output of the gas by combining a PLC (programmable logic controller), a differential pressure gauge and a flow controller, and can realize the constant-current or constant-voltage mode output of a wide pressure range, a large flow range and different gas types under the condition of low cost. Meanwhile, the function is realized, and the cost performance is higher than that of the prior art. The system is matched with a constant-current experimental system cost estimation which is built by a seven-star D07-11C mass flowmeter 13 with the flow range of 0-5SCCM and 10MPA pressure resistance.
Wherein the controller 8 is configured to implement the following steps by executing a computer program stored therein:
s101, acquiring a key signal of the key module;
s102, when it is determined that the device is in a constant-pressure output state according to the key signal, controlling the gas output circuit to open a first passage, so that the output end of the voltage stabilizer is communicated with the experimental device 14, as shown in fig. 2;
s103, acquiring a pressure value of a pressure stabilizing device in real time, and when the pressure value is lower than the preset value, starting the pressure regulating loop to supplement air for the pressure stabilizing device so as to output airflow with constant pressure to the realizing device;
s104, when the device is judged to be in a constant-current output state according to the key signal, controlling the gas output loop to open a second passage so that the output end of the pressure stabilizer is communicated with the experimental device 14 through a mass flow meter 13 arranged on the second passage;
and S105, acquiring a pressure difference value at two ends of the mass flow meter 13 in real time, and dynamically opening and closing the regulating loop according to the pressure difference value so as to output airflow with constant flow to the realizing device. Specifically, the method comprises the following steps:
acquiring a differential pressure value at two ends of the mass flow sensor through the differential pressure sensor 12, and judging whether the differential pressure value is smaller than a preset value or not;
if yes, the first electromagnetic valve 4 is controlled to be opened so as to increase the pressure in the pressure stabilizing container 6, and when the pressure difference value is higher than the preset value, the first electromagnetic valve 4 is closed.
Based on the gas output device provided by the embodiment of the present invention, the controller 8 determines a working mode required by the experimental apparatus 14 by receiving a key signal of the key module, and when it is determined that constant-pressure output is required, controls the gas output circuit to open the first path, so that the output end of the pressure stabilizer is communicated with the experimental apparatus 14, and obtains a pressure value of the pressure stabilizer in real time, and when the pressure value is lower than the preset value, opens the pressure regulation circuit to supplement gas to the pressure stabilizer, so as to output a constant-pressure gas flow to the implementation apparatus;
when the constant-current output is needed, controlling the gas output circuit to open a second passage so that the output end of the pressure stabilizer is communicated with the experimental device 14 through a mass flow meter 13 arranged on the second passage; and acquiring the differential pressure value at two ends of the mass flow meter 13 in real time, and dynamically opening and closing the regulating loop according to the differential pressure value, so that the gas flow with constant flow is output to the realizing device, and the problems that the gas flow controller 8 cannot keep constant-pressure output and cannot perform continuous constant-flow output are solved.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention.
Claims (8)
1. A gas output apparatus, comprising: the device comprises a controller, a pressure regulating loop, a pressure stabilizing device, a gas output loop and a key module, wherein the pressure regulating loop, the pressure stabilizing device, the gas output loop and the key module are electrically connected with the controller;
the input end of the pressure regulating loop is used for being connected with an air source, the output end of the pressure regulating loop is connected with the input end of the pressure stabilizing device, and the output end of the pressure stabilizing device is used for being connected with an experimental device;
wherein the controller is configured to implement the following steps by executing a computer program stored therein:
acquiring a key signal of the key module;
when the equipment is judged to be in a constant-pressure output state according to the key signal, controlling the gas output loop to open a first passage so as to enable the output end of the pressure stabilizing device to be communicated with the experimental device;
acquiring a pressure value of a pressure stabilizing device in real time, and when the pressure value is lower than the preset value, starting the pressure regulating loop to supplement air for the pressure stabilizing device so as to output airflow with constant pressure to the realizing device;
when the device is judged to be in a constant-current output state according to the key signal, controlling the gas output loop to open a second passage so as to enable the output end of the voltage stabilizer to be communicated with the experimental device through a mass flowmeter arranged on the second passage;
and acquiring a differential pressure value at two ends of the mass flow meter in real time, and dynamically opening and closing the regulating loop according to the differential pressure value so as to output airflow with constant flow to the realizing device.
2. A gas output apparatus according to claim 1, characterized in that the pressure regulating circuit comprises: the system comprises a first three-way electromagnetic valve, a gas compressor and a first electromagnetic valve;
the first end of the first three-way electromagnetic valve is connected with the gas source, the second end of the first three-way electromagnetic valve is connected with the input end of the first electromagnetic valve, the third end of the first three-way electromagnetic valve is connected with the input end of the gas compressor, the output end of the gas compressor is connected with the input end of the first electromagnetic valve, and the output end of the first electromagnetic valve is connected with the input end of the pressure stabilizing device;
the control end of the first three-way electromagnetic valve, the control end of the gas compressor and the control end of the first electromagnetic valve are electrically connected with the output end of the controller.
3. A gas output apparatus in accordance with claim 2, wherein said pressure stabilizing means comprises: the pressure stabilizing container, the pressure gauge and the second electromagnetic valve;
the input end of the pressure stabilizing container is connected with the output end of the first electromagnetic valve, the output end of the pressure stabilizing container is connected with the input end of the second electromagnetic valve, and the output end of the second electromagnetic valve is connected with the input end of the gas output loop;
the pressure gauge is arranged on the pressure stabilizing container and is used for acquiring the pressure value of the pressure stabilizing container in real time;
the pressure gauge is electrically connected with the input end of the controller, and the control end of the second electromagnetic valve is electrically connected with the output end of the controller.
4. A gas output apparatus according to claim 3, wherein the gas output circuit comprises: the second three-way electromagnetic valve, the mass flowmeter and the differential pressure sensor;
the first end of the second three-way electromagnetic valve is connected with the output end of the second electromagnetic valve, and the second end of the second three-way electromagnetic valve is connected with an experimental device; the third end of the second three-way electromagnetic valve is connected with the input end of the mass flowmeter, the output end of the mass flowmeter is connected with the experimental device, and the differential pressure sensor is arranged on the input end and the output end of the mass flowmeter;
the control end of the second three-way electromagnetic valve is electrically connected with the output end of the controller, and the differential pressure sensor is electrically connected with the input end of the controller.
5. The gas output device according to claim 2, wherein the pressure regulating circuit is configured to turn on or off the gas compressor according to a key signal of the key module.
6. A gas delivery device according to claim 4, wherein the operating differential pressure of the mass flow meter is between 0.2 and 0.8mpa.
7. A gas delivery apparatus according to claim 1, wherein the controller is a PLC controller.
8. The gas output apparatus according to claim 4, wherein the step of obtaining the pressure difference value between two ends of the mass flow meter in real time and dynamically opening and closing the regulating circuit according to the pressure difference value to make the realizing device output a constant flow of gas comprises:
acquiring a differential pressure value at two ends of a mass flow sensor through the differential pressure sensor, and judging whether the differential pressure value is smaller than a preset value;
if yes, controlling the first electromagnetic valve to open so as to increase the pressure in the pressure stabilizing container, and closing the first electromagnetic valve when the pressure difference value is higher than the preset value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211087153.5A CN115454159A (en) | 2022-09-07 | 2022-09-07 | Gas output equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211087153.5A CN115454159A (en) | 2022-09-07 | 2022-09-07 | Gas output equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118550327A (en) * | 2024-07-29 | 2024-08-27 | 百林科制药装备科技(江苏)有限公司 | Constant-pressure type gas mass flow control device and control method thereof |
| CN118550327B (en) * | 2024-07-29 | 2024-10-25 | 百林科制药装备科技(江苏)有限公司 | Constant-pressure type gas mass flow control device and control method thereof |
-
2022
- 2022-09-07 CN CN202211087153.5A patent/CN115454159A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118550327A (en) * | 2024-07-29 | 2024-08-27 | 百林科制药装备科技(江苏)有限公司 | Constant-pressure type gas mass flow control device and control method thereof |
| CN118550327B (en) * | 2024-07-29 | 2024-10-25 | 百林科制药装备科技(江苏)有限公司 | Constant-pressure type gas mass flow control device and control method thereof |
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