CN115452719A - Multi-mode optical characteristic detection device and method based on integrating sphere - Google Patents

Abstract

The invention discloses a multimode optical characteristic detection device and method based on an integrating sphere, relating to the field of agricultural detection and having the technical scheme key points that: the device comprises a light source, a light beam supporting part, a moving device, a spherical cover, a sample clamp, an integrating sphere, a spherical support, a spectrometer and a computer; the light source and the light beam supporting part are connected to the mobile device; the spherical cover and the sample clamp are detachably connected to an incident port or an exit port of the integrating sphere, a sample clamp hole of the sample clamp is coaxial with a light beam incident port or a light beam exit port, and the integrating sphere is rotatably connected with the spherical support; the light beam supporting part, the moving device, the integrating sphere and the sphere support are coaxially arranged, and the spectrometer transmits spectral data in the integrating sphere to the computer to calculate optical characteristic parameters. The invention can rotate the integrating sphere under the condition that the light source does not extend into the integrating sphere to measure the total transmission and total reflection data of the agricultural product sample, and has simple operation and higher detection precision.

Description

Multi-mode optical characteristic detection device and method based on integrating sphere

[ technical field ] A method for producing a semiconductor device

The invention relates to the field of agricultural detection, in particular to a multi-mode optical characteristic detection device and method based on an integrating sphere.

[ background ] A method for producing a semiconductor device

In the traditional agricultural detection field, a near infrared spectrum analysis technology is generally adopted to analyze the quality of agricultural products, and modeling prediction analysis is carried out on various quality parameters of the agricultural products by collecting optical signals. In order to overcome the above defects, in recent years, research has been carried out to measure optical characteristic parameters of biological tissues of agricultural products by using laser technology, and absorption coefficient mu capable of reflecting chemical components and physical structures in the tissues of agricultural products is mainly detected _a And scattering coefficient mu _s And the like, so that the interaction mechanism between the light and the biological tissues of the agricultural products is known, the chemical components, the physical structure and the pathological information of the agricultural products are determined, and the research and the development on the device and the method for detecting the optical characteristics of the agricultural products are of practical significance on the basis.

However, the optical characteristics of the tissue of agricultural products are mainly inspected by a single integrating sphere method at present, the relative positions of different components such as a light source, an integrating sphere and a sample need to be changed for many times in the operation process, and the light source needs to extend into the integrating sphere, so that the problems of inaccurate detection caused by the change of the relative position of the sample, the absorption or reflection of light by a light source device and the like easily occur. Chinese patent with publication number CN104677845B discloses an automatic detection device for optical characteristics of agricultural product tissue based on an integrating sphere, which can automatically complete the measurement of optical characteristic parameters of different samples, but the relative position between the sample and the integrating sphere needs to be changed continuously in the measurement process, and the system error caused by position change is increased. In addition, chinese patent No. CN108519337a discloses a single integrating sphere-based detecting device for optical characteristic parameters of tissue of agricultural products, wherein a sample can rotate along with the integrating sphere, but a sample switching device driven by a motor cannot ensure that the sample is tightly attached to a window hole of the integrating sphere, thereby causing light leakage and increasing measurement errors.

Above-mentioned patent all needs the removal that drives the sample through other mechanical device, and the multiple movement of unavoidable sample for there is the space between integrating sphere and the sample holder, causes great influence to the testing result.

[ summary of the invention ]

The invention aims to provide a multi-mode optical characteristic detection device based on an integrating sphere, which has the advantages that various operation modes such as different wavelengths and whether a light source extends into the integrating sphere can be selected, so that the optical characteristic parameters of the tissue of an agricultural product can be more comprehensively obtained, a sample is directly fixed on the integrating sphere, the measurement of total reflection and total transmission is realized by rotating a rotary table, and the technical problems of multiple movement of the sample and large environmental influence are solved.

The technical purpose of the invention is realized by the following technical scheme:

a multimode optical characteristic detection device based on an integrating sphere comprises a light source, a light beam supporting part, a moving device, a sample clamp, the integrating sphere, a sphere support, a detection optical fiber, a spectrometer and a computer; the light source is connected to the light beam supporting part, the light beam supporting part is connected to the moving device, and the relative distance between the output end of the light source and the input end of the integrating sphere is adjusted by the moving device; the integrating sphere comprises a sphere and a sphere cover, wherein a light beam incident port, a light beam exit port and a switching cover are arranged on the sphere, the sphere cover is detachably connected with the light beam incident port and the light beam exit port, the sample clamp can be coaxially fixed on the light beam incident port or the light beam exit port, so that a sample clamp hole is coaxial with the light beam incident port or the light beam exit port, and the sphere is rotatably connected to a sphere support; the light beam supporting part, the moving device, the integrating sphere and the spherical support are arranged on the same straight line, the output end of the light source is coaxial with the light beam incident port and the light beam emergent port, the input end of the spectrometer is connected with the switching cover through the detection optical fiber, the output end of the spectrometer is connected to the computer in a data mode, and the computer calculates the optical characteristics of the sample.

Through adopting above-mentioned technical scheme, the position of accessible mobile device selectivity adjustment light source and light beam supporting part, make the light source stretch into or stretch out the integrating sphere, and the integrating sphere rotates with the ball support and is connected, in the testing process, can make the integrating sphere rotatory around the ball support, make the light beam entrance port and the light beam exit port and the sample of integrating sphere press from both sides, light beam supporting part and light source are located same straight line, to same sample, can also survey full transmission and total reflection data even not moving the sample, therefore the laminating degree is higher with integrating sphere fixed connection in the simultaneous measurement process, environmental factor has been reduced to the influence of testing result, play the effect of simplified operation process, improvement detection precision.

Further setting: the ball support comprises a base, an optical rotary platform and a first optical lifting rod, the optical rotary platform is connected to the base, one end of the first optical lifting rod is fixedly connected with the movable end of the optical rotary platform, and the other end of the first optical lifting rod is fixedly connected with a ball of the integrating sphere, so that the integrating sphere and the optical rotary platform form rotating connection.

Through adopting above-mentioned technical scheme, connect by first optics lifter and support the integrating sphere to by the unified rotation angle who supports adjustment first optics lifter and integrating sphere of optics rotary platform, make the operation in-process can be when the rotation angle of adjustment integrating sphere adjust the height of integrating sphere through first optics lifter, the flexibility ratio is higher.

Further setting: the moving device comprises an optical guide rail, a moving seat and a second optical lifting rod, the moving seat is connected to the optical guide rail in a sliding mode, one end of the second optical lifting rod is fixedly arranged on the moving seat, and the other end of the second optical lifting rod is fixedly connected with a light beam supporting part.

Through adopting above-mentioned technical scheme, by second optics lifter fixed support light source, remove the unified light source that drives of seat and second optics lifter and remove for can adjust the spectral emission height of light source through second optics lifter when the relative integrating sphere coaxial distance of light source in the operation process, make device maneuverability higher.

Further setting: the light source comprises a light box, a transmission optical fiber is connected to the light box, the light box generates a spectrum and conducts outwards through the transmission optical fiber, the spectrum output end of the transmission optical fiber is connected with a collimating mirror, and the collimating mirror and the transmission optical fiber are connected to a light beam supporting part.

Through adopting above-mentioned technical scheme, the light box passes through the conduction optic fibre remote connection collimating mirror, produces spectrum transmission to the collimating mirror with the light box by the conduction optic fibre, jets out after the collimation is rectified by the collimating mirror, only need during the measurement with the collimating mirror alone install to the light beam support frame can, reduce the bearing burden of light beam support frame, make device measurement process more light, simple and easy, the operation degree of difficulty reduces.

Further setting: the board is placed including balancing weight, fixed block, optic fibre to the light beam supporting part, balancing weight fixed connection second optics lifter, optic fibre is placed the board and is put the board and the coaxial setting of light beam incident port, light beam exit port and one end rigid coupling balancing weight, its other end fixed connection fixed block, the fixed block is equipped with the card hole, the fixed grafting of collimating mirror is in the card hole, optic fibre is placed the board and is equipped with the draw-in groove, and conduction optic fibre fixed connection is in the draw-in groove.

Through adopting above-mentioned technical scheme, the collimating mirror is pegged graft and is gone into the card downthehole, the conduction optic fibre of fixed block and place in the draw-in groove, and the integration degree of light source and light beam supporting part is higher, can effectively reduce because of the mobile device drives the light beam supporting part and removes the system error that the collimating mirror camera lens vibration skew that leads to the conduction optic fibre to rock the initiation and bring, plays the purpose that improves measurement accuracy.

Further setting: the light beam supporting part also comprises a light spot reducing device used for limiting the diameter of the light beam, the light spot reducing device is a tinfoil paper with a small opening, a groove is arranged at the opening of the clamping hole, the light spot reducing device is connected to the groove, and the light beam emitted by the collimating mirror passes through the light spot reducing device and then enters the input end of the integrating sphere.

By adopting the technical scheme, the diameter of the collimated light beam emitted from the collimating mirror is limited by arranging the light spot reducing device, so that the light source requirement of the collimated thin light beam required by calculating the optical characteristic parameters of the biological tissue by using a reverse multiplication algorithm is met, and meanwhile, the absorption of the device to the light can be reduced when the light source extends into the integrating sphere, and the detection precision is improved.

Further setting: the balancing weight is provided with a limiting hole for inserting the second optical lifting rod, a fastening threaded hole is formed in the limiting hole, and the balancing weight is in threaded connection with the second optical lifting rod through the fastening threaded hole.

Through adopting above-mentioned technical scheme, during the use, the balancing weight of light beam supporting part passes through fastening screw hole and spacing hole fixed connection on second optics lifter, and the design of integration has improved the assembly precision of light beam supporting part and mobile device, has effectively avoided the system error that the assembly leads to for more stable, accurate when the device is measured.

Another objective of the present invention is to provide a method for detecting an optical characteristic detecting device, which does not need to extend a light beam supporting portion and a light source into an integrating sphere during the detection process, thereby reducing the possibility of light absorption or reflection by the light beam supporting portion and further improving the detection accuracy, and meanwhile, can realize multi-mode detection at different wavelengths to obtain optical characteristic parameters comprehensively.

The technical purpose of the invention is realized by the following technical scheme:

a detection method of an optical characteristic detection apparatus, comprising the steps of:

step 1: turning off a light source, respectively fixing a spherical cover of an integrating sphere at a light beam incident port and a light beam exit port of the integrating sphere, adjusting the position of the light source through a moving device to enable the distance between the light beam exit end of the light source and the light beam incident port of the integrating sphere to be L, enabling L to be larger than the diameter r of the integrating sphere, taking L = r +20mm, and acquiring a transmission dark field spectrum T by a spectrometer _dark ；

Step 2: taking off the spherical cover at the light beam entrance of the integrating sphere, emitting light beam by the light source, and collecting by the spectrometer to obtain the transmission reference T _ref ；

And step 3: taking down a ball cover at a light beam exit port of the integrating sphere, adjusting the position of the light source through a moving device to enable the distance between the light beam exit hole of the light source and the light beam exit port of the integrating sphere to be L, and collecting a reflected dark field spectrum Rdark by a spectrometer;

and 4, step 4: fixing a sample clamp with a reference sample at a light beam exit of an integrating sphere, closely attaching the sample to the light beam exit of the integrating sphere, and collecting a reflection reference Rref by a spectrometer;

and 5: clamping a sample clamped with a reference sample at a light beam exit of the integrating sphere; fixing a sample clamp holding a test sample at a light beam exit of an integrating sphere, and acquiring a total reflected light intensity value R of the test sample by a spectrometer;

step 6: adjusting the position of a light source through a moving device to enable the distance between the position of the light source and a light beam incident port of an integrating sphere to be L, rotating a rotating table for 180 degrees to enable a light beam emergent port of the integrating sphere fixed with a sample clamp to face the light source, fixing a spherical cover of the integrating sphere at the light beam incident port of the integrating sphere, and acquiring a total transmission light intensity value T of a tested sample through a spectrometer;

and 7: resetting the devices such as the mobile device, the integrating sphere, the sample clamp and the like to return to the initial position;

and 8: the calculation formula of the total transmittance MT and the total reflectance MR is as follows:

and step 9: substituting the total transmittance MT, the total reflectance MR and the fixed anisotropy coefficient g value or the calculated anisotropy coefficient g value into an IAD xp-version-3-9-10 program for calculation to obtain the absorption coefficient mu of the sample to be measured _a And reduced scattering coefficient mu _s ′。

Through the technical scheme: the method for measuring the optical characteristic parameters of the sample is adopted, on the basis that the light beam supporting part does not extend into the integrating sphere, the position of the light beam supporting part on the integrating sphere does not need to be moved for the same sample, and the total transmission and total reflection data of the sample can be measured only by rotating the integrating sphere and turning the angle between the integrating sphere and the sample clamp, so that the influence of the environment on the inspection result is greatly reduced, the operation process is simplified, and the detection precision is higher.

[ description of the drawings ]

Fig. 1 is an overall schematic diagram of an integrating sphere-based multimode optical property detection apparatus;

FIG. 2 is a schematic diagram of the integrating sphere and the sphere support;

FIG. 3 is a schematic view of the connection between the cover and the sample holder and the integrating sphere;

FIG. 4 is a schematic view of a light source of the present invention;

FIG. 5 is a schematic view of the light source, the light beam supporting portion and the moving device;

FIG. 6 is a schematic view of the structure of the beam support;

FIG. 7 is a schematic cross-sectional view of a beam support portion;

fig. 8 is a schematic structural view of a spot reducing apparatus;

FIG. 9 is a graph of transmission dark field T _dark The positions of all parts of the time system are schematic;

FIG. 10 is a graph of measured transmission reference T _ref The positions of all parts of the time system are schematic;

FIG. 11 is a graph of a reflection dark field R _dark The positions of all parts of the time system are schematic;

FIG. 12 is a chart of measured reflectance reference R _ref The positions of all parts of the time system are schematic;

FIG. 13 is a schematic diagram showing the positions of the parts of the system when the total reflected light intensity value R of the sample is measured;

FIG. 14 is a schematic diagram showing the positions of the parts of the system when the total transmitted light intensity value T of the sample is measured;

reference numerals are as follows: 1. an integrating sphere; 11. a sphere; 12. a ball cover; 13. a light beam entrance port; 14. a light beam exit port; 15. a transfer cover; 2. a ball support; 21. a base; 22. an optical rotary platform; 23. a first optical lifter; 3. a light source; 31. a light box; 32. a conducting optical fiber; 33. a collimating mirror; 4. a light beam support section; 41. a balancing weight; 42. a fixed block; 43. an optical fiber placing plate; 44. clamping holes; 45. a groove; 46. a light spot reducing device; 47. a card slot; 48. fastening the threaded hole; 49. a limiting hole; 5. a mobile device; 51. an optical guide; 52. a movable seat; 53. a second optical lifter; 6. a sample holder; 7. a spectrometer; 8. detecting an optical fiber; 9. a computer; 10. reference sample.

[ detailed description ] embodiments

The present invention will be described in detail with reference to the accompanying drawings, which clearly and completely describe the technical solutions in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.

It should be noted that the descriptions of "first", "second", etc. used in the embodiments of the present invention are only used for descriptive purposes, and should not be interpreted as indicating or implying any limitation to the number of technical features, therefore, the features defined as "first", "second", etc. in the embodiments of the present invention may indicate that at least one of the defined technical features is included.

Technical solutions between the embodiments of the present invention described in the present specification may be combined with each other, but it is necessary for those skilled in the art to realize the technical solutions.

First preferred embodiment:

a multimode optical characteristic detection device based on an integrating sphere is disclosed, as shown in FIG. 1, FIG. 2 and FIG. 3, comprising an integrating sphere 1, a sphere support 2, a light source 3, a light beam support part 4, a moving device 5, a sample holder 6, a spectrometer 7, a detection optical fiber 8 and a computer 9. Wherein, integrating sphere 1 includes spheroid 11 and spherical cover 12, and spheroid 11 is inside hollow and rotate to be connected on ball support 2, is provided with light beam entrance port 13, light beam exit port 14 and switching lid 15 on the spheroid 11, and spherical cover 12 can dismantle and connect in light beam entrance port 13 or light beam exit port 14 department, and is same, and sample clamp 6 can the centre gripping sample coaxial fastening in light beam entrance port 13 or light beam exit port 14 department light source 3 connect on beam supporting part 4. The light beam supporting part 4 is installed on the moving device 5 together with the light source 3, and the relative distance between the output end of the light source 3 and the input end of the integrating sphere 1 is adjusted by the moving device 5, so that the sample clamp 6 hole is coaxial with the light beam entrance port 13 or the light beam exit port 14.

When the spectrometer is used, the integrating sphere 1, the sphere support 2, the light beam support part 4 and the moving device 5 can be installed on the same straight line, the relative horizontal distance between the light beam support part 4 and the integrating sphere 1 is selectively adjusted by the moving device 5, the light source 3 correspondingly extends into or out of the integrating sphere 1 according to detection requirements, in addition, the emergent light beam of the light source 3 is selectively emitted to the light beam incident port 13 or the light beam emergent port 14 by rotating the integrating sphere 1, so that the invention has multiple detection modes, in the process, the output end of the light source 3 is coaxial with the light beam incident port 13 and the light beam emergent port 14 of the integrating sphere 1, the input end of the spectrometer 7 is connected with the switching cover 15 through the detection optical fiber 8, the data of the output end is connected to the computer 9, and the computer 9 calculates the optical characteristics of a sample. In the preferred embodiment, the connection manner of the ball cap 12, the sample holder 6 and the integrating sphere 1 is common knowledge and will not be described herein.

Referring to fig. 2, the sphere support 2 includes a base 21, an optical rotation platform 22 and a first optical lifting rod 23, the optical rotation platform 22 is connected to the base 21, one end of the first optical lifting rod 23 is fixedly connected to the movable end of the optical rotation platform 22, and the other end of the first optical lifting rod is fixedly connected to the sphere 11 of the integrating sphere 1, so that the integrating sphere 1 and the optical rotation platform 22 form a rotating connection. When the integrating sphere height adjusting device is used, the optical rotating platform 22 uniformly supports and adjusts the rotating angles of the first optical lifting rod 23 and the integrating sphere 1, and then the height of the integrating sphere 1 can be adjusted through the first optical lifting rod 23.

As shown in fig. 4 and 5, the light source 3 includes a light box 31 for generating a spectrum, an output end of the light box 31 is connected to the transmitting fiber 32 and transmits the spectrum to the outside through the latter, a collimator lens 33 for correcting the collimated light beam is connected to an output end of the transmitting fiber 32, and the collimator lens 33 is attached to the light beam supporting section 4 together with the transmitting fiber 32.

As shown in fig. 4 and 5, the light beam supporting portion 4 includes a weight block 41, a fixing block 42 and an optical fiber placing plate 43, the weight block 41 is fixedly connected to the moving device 5, the optical fiber placing plate 43 is coaxially disposed with the light beam incident port 13 and the light beam emergent port 14, one end of the optical fiber placing plate 43 is connected to the fixing block 42, and the other end is connected to the weight block 41, so that the fixing block 42 is fixedly connected to the moving device 5, the fixing block 42 is provided with a clamping hole 44, a clamping groove 47 is formed in the surface of the optical fiber placing plate 43, the clamping groove 47 is adapted to the cross section of the conducting optical fiber 32, when in use, the collimating mirror 33 is inserted and fixed in the clamping hole 44, and the conducting optical fiber 32 at the end of the collimating mirror 33 is installed and fixed in the clamping groove 47.

As shown in fig. 6 and 7, the light beam supporting portion 4 further includes a light spot reducing device 46 for limiting the diameter of the light beam, the light spot reducing device 46 is a tinfoil paper with a small opening, a groove 45 is disposed at the opening of the card hole 44, the light spot reducing device 46 is connected to the groove 45, the light beam emitted from the collimating mirror 33 passes through the light spot reducing device 46 and then enters the input end of the integrating sphere 1, the light spot reducing device 46 is used for limiting the diameter of the collimated light beam emitted from the collimating mirror 33, so as to meet the requirement of the light source 3 for calculating the collimated thin light beam required by the optical characteristic parameter of the biological tissue by using the inverse multiplication algorithm, and at the same time, when the light source 3 extends into the integrating sphere 1, the absorption of the device to the light can be reduced, and the detection accuracy can be improved.

As shown in fig. 5 and 7, the moving device 5 includes an optical guide 51 parallel to the optical fiber placing plate 43, a moving seat 52 is slidably connected to the optical guide, a second optical lifting rod 53 is connected to the moving seat 52, a limiting hole 49 for the second optical lifting rod 53 to be inserted and positioned is formed in the lower end of the counterweight block 41, a fastening threaded hole 48 is formed in the limiting hole 49, the upper end of the second optical lifting rod 53 is inserted into the limiting hole 49 and is in threaded connection with the fastening threaded hole 48, so that the counterweight block 41, the second optical lifting rod 53 and the moving seat 52 are integrally connected, the assembly precision of the light beam supporting part 4 and the moving device 5 is improved, the system error caused by assembly is effectively avoided, and the device is more stable and accurate in measurement.

Second preferred embodiment: this embodiment specifically describes a detection method of the apparatus of the first embodiment for measuring an optical characteristic parameter of a sample without the light source 3 projecting into the integrating sphere 1.

A multi-mode optical characteristic detection method based on an integrating sphere 1 comprises the following steps:

step 1: as shown in fig. 9, the light source 3 is turned off, the spherical cap 12 of the integrating sphere 1 is respectively fixed at the light beam entrance port 13 and the light beam exit port 14 of the integrating sphere 1, the position of the light source 3 is adjusted by the moving device 5, so that the distance between the light beam exit end of the light source 3 and the light beam entrance port 13 of the integrating sphere 1 is L, L is greater than the diameter r of the integrating sphere 1, L = r +20mm is taken, and at the position shown in fig. 9, the transmitted dark field spectrum T is acquired by the spectrometer 7 _dark ；

Step 2: as shown in fig. 10, the cover 12 at the light beam entrance port 13 of the integrating sphere 1 is removed, the light source 3 emits light beam, and the rest positions are consistent with the step 1, and in the position shown in fig. 9, the transmission reference T is acquired by the spectrometer 7 _ref ；

And step 3: as shown in fig. 11, the cover 12 at the light beam exit port 14 of the integrating sphere 1 is removed, and the position of the light source 3 is adjusted by the moving device 5, so that the distance between the light beam exit hole of the light source 3 and the light beam exit port 14 of the integrating sphere 1 is L, and the rest positions are consistent with step 2, and in the position shown in fig. 11, the reflected dark field spectrum R is collected by the spectrometer 7 _dark ；

And 4, step 4: as shown in fig. 12, the sample holder 6 holding the reference sample 10 is fixed at the light beam exit port 14 of the integrating sphere 1, the sample is tightly attached to the light beam exit port 14 of the integrating sphere 1, the rest positions are consistent with the step 3, and the spectrometer 7 collects the reflection reference Rref at the position shown in fig. 12;

and 5: as shown in fig. 13, the sample holder 6 holding the reference sample 10 at the light beam exit port 14 of the integrating sphere 1 is removed; fixing the sample clamp 6 holding the test sample at the light beam exit port 14 of the integrating sphere 1, wherein the rest positions are consistent with the step 4, and acquiring the total reflected light intensity value R of the test sample by a spectrometer 7 at the position shown in FIG. 13;

step 6: as shown in fig. 14, the position of the light source 3 is adjusted by the moving device 5, so that the distance between the position of the light source 3 and the light beam entrance port 13 of the integrating sphere 1 is L, the rotating table is rotated by 180 degrees, so that the light beam exit port 14 of the integrating sphere 1 fixed with the sample holder 6 faces the light source 3, the spherical cover 12 of the integrating sphere 1 is fixed at the light beam entrance port 13 of the integrating sphere 1, and the rest positions are consistent with the step 5, and at the position shown in fig. 14, the total transmitted light intensity value T of the test sample is acquired by the spectrometer 7;

and 7: resetting the moving device 5, the integrating sphere 1, the sample clamp 6 and other devices to return to the initial position;

and 8: the calculation formula of the total transmittance MT and the total reflectance MR is as follows:

and step 9: substituting the total transmittance MT, the total reflectance MR and the fixed anisotropy coefficient g value or the calculated anisotropy coefficient g value into an IAD xp-version-3-9-10 program for calculation (Prah 1, S., "evaporating I thin you cover dark around Inverse Adding-Doubling" 1) to obtain the absorption coefficient mu of the sample to be measured _a And reduced scattering coefficient mu _s ′。

The above-mentioned embodiments are merely illustrative and not restrictive, and those skilled in the art can make modifications to the embodiments without inventive contribution as required after reading the present specification, but only protected by the patent laws within the scope of the claims.

Claims (8)

1. A multimode optical characteristic detection device based on an integrating sphere is characterized in that: the device comprises a light source (3), a light beam supporting part (4), a moving device (5), a sample clamp (6), an integrating sphere (1), a sphere support (2), a detection optical fiber (8), a spectrometer (7) and a computer (9);

the light source (3) is connected to the light beam supporting part (4), the light beam supporting part (4) is connected to the moving device (5), and the relative distance between the output end of the light source (3) and the input end of the integrating sphere (1) is adjusted by the moving device (5); the integrating sphere (1) comprises a sphere (11) and a sphere cover (12), wherein a light beam inlet (13), a light beam outlet (14) and a switching cover (15) are arranged on the sphere (11), the sphere cover (12) is detachably connected to the light beam inlet (13) or the light beam outlet (14), the sample clamp (6) can be coaxially fixed to the light beam inlet (13) or the light beam outlet (14), so that a hole of the sample clamp (6) is coaxial with the light beam inlet (13) or the light beam outlet (14), and the sphere (11) is rotatably connected to the sphere support (2);

the light beam supporting part (4), the moving device (5), the integrating sphere (1) and the spherical support (2) are arranged on the same straight line, the output end of the light source (3) is coaxially arranged with the light beam incident port (13) and the light beam emergent port (14), the input end of the spectrometer (7) is connected with the switching cover (15) through the detection optical fiber (8), the output end of the spectrometer is connected to the computer (9) through data, and the optical characteristics of a sample are calculated through the computer (9).

2. The integrating-sphere-based multimode optical property detection device according to claim 1, characterized in that: the sphere support (2) comprises a base (21), an optical rotating platform (22) and a first optical lifting rod (23), wherein the optical rotating platform (22) is connected to the base (21), one end of the first optical lifting rod (23) is fixedly connected with the movable end of the optical rotating platform (22), and the other end of the first optical lifting rod is fixedly connected with a sphere (11) of the integrating sphere (1), so that the integrating sphere (1) and the optical rotating platform (22) form a rotating connection.

3. The integrating-sphere-based multimode optical property detection device according to claim 1, characterized in that: the moving device (5) comprises an optical guide rail (51), a moving seat (52) and a second optical lifting rod (53), the moving seat (52) is connected to the optical guide rail (51) in a sliding mode, one end of the second optical lifting rod (53) is fixedly assembled on the moving seat (52), and the other end of the second optical lifting rod is fixedly connected with the light beam supporting part (4).

4. The integrating-sphere-based multimode optical property detection device according to claim 1, characterized in that: the light source (3) comprises a light box (31), a transmission optical fiber (32) is connected to the light box (31), the light box (31) generates a light spectrum and transmits the light spectrum outwards through the transmission optical fiber (32), the light spectrum output end of the transmission optical fiber (32) is connected with a collimating mirror (33), and the collimating mirror (33) and the transmission optical fiber (32) are connected to the light beam supporting part (4).

5. The integrating-sphere-based multimode optical property detection device according to claim 4, wherein: light beam supporting part (4) place board (43) including balancing weight (41), fixed block (42), optic fibre, balancing weight (41) fixed connection second optics lifter (53), optic fibre is placed board (43) and is put mouthful (13), light beam exit port (14) coaxial setting and one end rigid coupling balancing weight (41), its other end fixed connection fixed block (42), fixed block (42) are equipped with card hole (44), collimating mirror (33) are fixed pegging graft in card hole (44), optic fibre is placed board (43) and is equipped with draw-in groove (47), and conduction optic fibre (32) fixed connection is in draw-in groove (47).

6. The integrating-sphere-based multimode optical property detection device according to claim 5, wherein: the light beam supporting part (4) further comprises a light spot reducing device (46) used for limiting the diameter of the light beam, the light spot reducing device (46) is made of tinfoil paper with a small opening, a groove (45) is formed in the opening of the clamping hole (44), the light spot reducing device (46) is connected to the groove (45), and the light beam emitted by the collimating mirror (33) passes through the light spot reducing device (46) and then enters the input end of the integrating sphere (1).

7. The integrating-sphere-based multimode optical property detection device according to claim 5, wherein: be equipped with on balancing weight (41) and supply second optics lifter (53) male spacing hole (49), be equipped with fastening screw hole (48) in spacing hole (49), balancing weight (41) are through fastening screw hole (48) and second optics lifter (53) threaded connection.

8. An inspection method of the integrating sphere-based multimode optical property inspection apparatus as claimed in any one of claims 1 to 7, characterized in that: the method comprises the following steps:

step 1: turning off the light source (3), respectively fixing a spherical cover (12) of the integrating sphere (1) at a light beam entrance port (13) and a light beam exit port (14) of the integrating sphere (1), and adjusting the position of the light source (3) through the moving device (5) to enable the distance between the light beam exit end of the light source (3) and the light beam entrance port (13) of the integrating sphere (1) to be L, wherein L is larger than the integrating sphere(1) The diameter r is taken as L = r +20mm, and a transmission dark field spectrum T is acquired by a spectrometer (7) _dark ；

Step 2: taking off the spherical cover (12) at the light beam entrance port (13) of the integrating sphere (1), emitting light beams by the light source (3), and acquiring the transmission reference T by the spectrometer (7) _ref ；

And step 3: taking down a spherical cover (12) at a light beam exit port (14) of the integrating sphere (1), adjusting the position of the light source (3) through the moving device (5), enabling the distance between a light beam exit hole of the light source (3) and the light beam exit port (14) of the integrating sphere (1) to be L, and collecting a reflected dark field spectrum R by the spectrometer (7) _dark ；

And 4, step 4: fixing a sample clamp (6) holding a reference sample (10) at a light beam exit port (14) of an integrating sphere (1), closely attaching the sample to the light beam exit port (14) of the integrating sphere (1), and collecting a reflection reference R by a spectrometer (7) _ref ；

And 5: taking down a sample clamp (6) which is arranged at a light beam exit port (14) of the integrating sphere (1) and clamps a reference sample (10); fixing a sample clamp (6) holding a test sample at a light beam exit port (14) of an integrating sphere (1), and acquiring a total reflected light intensity value R of the test sample by a spectrometer (7);

and 6: the position of the light source (3) is adjusted through the moving device (5), the distance between the position of the light source (3) and a light beam entrance port (13) of the integrating sphere (1) is L, the rotating platform rotates 180 degrees, a light beam exit port (14) of the integrating sphere (1) fixed with the sample clamp (6) faces the light source (3), a sphere cover (12) of the integrating sphere (1) is fixed at the light beam entrance port (13) of the integrating sphere (1), and a total transmission light intensity value T of the tested sample is acquired through the spectrometer (7);

and 7: the mobile device (5), the integrating sphere (1) and the sample clamp (6) are reset to return to the initial position;

and step 8: the calculation formula of the total transmittance MT and the total reflectance MR is as follows:

and step 9: total transmittance MT, total reflectance MR and fixed anisotropySubstituting the coefficient g value or the calculated anisotropy coefficient g value into an IAD xp-version-3-9-10 program for calculation to obtain the absorption coefficient mu of the sample to be measured _a And reduced scattering coefficient mu _s ′。

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