CN115446660A - Laser indexing detection device and detection method thereof - Google Patents
Laser indexing detection device and detection method thereof Download PDFInfo
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- CN115446660A CN115446660A CN202211085509.1A CN202211085509A CN115446660A CN 115446660 A CN115446660 A CN 115446660A CN 202211085509 A CN202211085509 A CN 202211085509A CN 115446660 A CN115446660 A CN 115446660A
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- 238000001514 detection method Methods 0.000 title claims abstract description 69
- 230000003287 optical effect Effects 0.000 claims abstract description 34
- 238000012545 processing Methods 0.000 claims abstract description 11
- 239000000523 sample Substances 0.000 claims description 40
- 238000005259 measurement Methods 0.000 claims description 12
- 230000007613 environmental effect Effects 0.000 claims description 6
- 238000012360 testing method Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
- B23Q16/02—Indexing equipment
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Abstract
The invention relates to a laser indexing detection device and a detection method thereof, which comprises a detection platform, an adjusting platform, a numerical control indexing turntable, an optical detection system, an environment compensation system, a computer processing system and a numerical control system, wherein the detection platform is connected with the adjustment platform; the adjusting platform is arranged on the detection platform, the numerical control indexing table is arranged on the adjusting platform, the optical detection system is arranged on the numerical control indexing table and is in signal connection with the computer processing system; the environment compensation system is arranged on the detection platform, the adjustment platform and the numerical control indexing turntable and is in signal connection with the computer processing system; and the numerical control system is in signal connection with the numerical control indexing turntable. The invention analyzes the angle position data of the rotary table and the optically collected data to generate the indexing precision of the tested rotary table, and outputs the detection result, thereby realizing the effective detection of the numerical control indexing rotary table and ensuring the product delivery quality.
Description
Technical Field
The invention relates to the technical field of machine tool positioning precision detection, in particular to a laser indexing detection device and a detection method thereof.
Background
The numerical control indexing table is a core component of the mortise broaching machine, has strict requirements on the numerical control indexing table, and can bear huge cutting force and can bear more than 20 tons of cutting force even if accurate indexing is required, the positioning precision is within 10 arc seconds, and the repeated positioning precision is within 6 arc seconds. The requirement of high accuracy and big cutting force limits ordinary numerical control indexing table to use on the tongue-and-groove broaching machine, and the tongue-and-groove broaching machine needs special numerical control indexing table, and the locking force of revolving stage is big more, and then the revolving platform is more stable, and positioning accuracy and repeated positioning accuracy are also better then. Therefore, before the numerical control indexing rotary table leaves a factory, the locking torque, the indexing positioning precision and the indexing repeated positioning precision of the numerical control indexing rotary table must be tested, the numerical control indexing rotary table is guaranteed to be in accordance with the safe use range, and the positioning precision and the repeated positioning precision are in accordance with the use requirements.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a laser indexing detection device and a detection method thereof in order to manufacture a qualified numerical control indexing turntable, and mainly adopts the modes of laser detection and an environment compensator.
The technical scheme of the invention is as follows:
a laser indexing detection device is characterized by comprising a detection platform, an adjustment platform, a detected numerical control indexing rotary table, an optical detection system, an environment compensation system, a computer processing system and a numerical control system for driving the detected numerical control rotary table; the adjusting platform is arranged on the detection platform, the numerical control indexing table is arranged on the adjusting platform, the optical detection system is arranged on the numerical control indexing table and is in signal connection with the computer processing system; the environment compensation system is arranged on the detection platform, the adjustment platform and the numerical control indexing turntable and is in signal connection with the computer processing system; and the numerical control system is in signal connection with the numerical control indexing turntable.
Furthermore, optical detection system includes prism revolving stage, reflection prism and laser generator, the prism revolving stage sets up on numerical control indexing table, reflection prism sets up on the prism revolving stage, laser generator erects on ground through the tripod, set up angle measurement optical lens group between reflection prism and the laser generator, angle measurement optical lens group installs on testing platform.
Furthermore, the environment compensation system comprises an environment compensation instrument and four probes, and plugs of the four probes are respectively inserted into corresponding sockets of the environment compensation instrument.
Furthermore, the four probes comprise a probe A, a probe 1, a probe 2 and a probe 3, and the probe A is arranged in the air and used for detecting the air temperature; the No. 1 probe is arranged on the numerical control indexing rotary table and is used for detecting the temperature of a base of the numerical control indexing rotary table; the No. 2 probe is arranged on the adjusting platform and used for detecting the temperature of the adjusting platform; the No. 3 probe is arranged on the detection platform and used for detecting the temperature of the detection platform.
Furthermore, the computer processing system comprises a notebook computer and measurement software, and the notebook computer is respectively connected with the environment compensator and the laser generator through data lines.
Furthermore, a Bluetooth generator is connected to the prism rotary table, a Bluetooth receiver is arranged on the notebook computer, and the prism rotary table and the notebook computer are communicated through Bluetooth.
Furthermore, the centers of the reflecting prism, the angle measurement optical lens group and the laser generator are positioned on a horizontal straight line at the same height.
A laser indexing detection method comprises the following steps:
1) Installing a numerical control rotary table on a test platform, and installing a prism rotary table on a rotary table of a numerical control indexing rotary table;
2) Placing the environment compensator at a proper position, respectively installing 4 probes at corresponding positions, and inserting the plugs of the 4 probes into corresponding sockets of the environment compensator according to the mark numbers A, 1, 2 and 3;
3) Connecting the numerical control system with the numerical control indexing turntable by using a data line, connecting the environment compensator with a notebook computer by using the data line, connecting the laser transmitter with the notebook computer by using the data line, and establishing communication between the prism turntable and the notebook computer by using Bluetooth;
4) Adjusting light paths among the laser emitter, the angle measuring optical lens group and the reflecting prism;
5) Automatically finding zero position by the numerical control indexing table, and performing optical automatic calibration;
6) The numerical control system controls the numerical control indexing rotary table to rotate, the prism rotary table and the reflecting prism are driven to rotate together in the rotating process of the numerical control indexing rotary table, and the servo motor stops when the numerical control indexing rotary table rotates to a set angle;
7) The reflecting prism, the angle measuring optical lens group and the light path of the laser generator form an angle (within 20 degrees) due to the rotation of the numerical control indexing table; when the numerical control indexing turntable stops, the reflecting prism automatically rotates and automatically aligns and returns the originally arranged light path;
8) The prism rotating table uploads the rotation angle data to a notebook computer through Bluetooth for recording;
9) And analyzing and calculating the rotation angle of the rotary table angle encoder and the data acquired by laser indexing detection through measurement software to generate a detection result, obtaining indexing precision data and outputting a chart.
The invention has the following beneficial effects: the angular position of the tested rotary table is measured and analyzed by software of a laser generator, an angle measuring optical lens group, a numerical control indexing rotary table, a prism rotary table, a reflecting prism and a notebook computer, the angular position data of the rotary table and the collected data are analyzed to generate the indexing precision of the tested rotary table, and the detection result is output, so that the effective detection of the numerical control indexing rotary table is realized, and the product delivery quality is ensured.
Drawings
FIG. 1 is a schematic diagram of the layout of the indexing detection method of the numerical control turntable.
In the figure: 1. a detection platform; 2. adjusting the platform; 3. a Bluetooth generator; 4. a numerical control indexing turntable; 5. a prism turntable; 6. a reflective prism; 7. an angle measurement optical lens group; 8. a laser generator; 9. a notebook computer; 10. an environmental compensation instrument; 11. a numerical control system; 12. a data line; 13. a bluetooth receiver.
Detailed Description
The invention is described in further detail below with reference to the accompanying examples.
As shown in fig. 1, a laser indexing detection device includes a detection platform 1, an adjustment platform 2, a bluetooth generator 3, a numerical control indexing turntable 4, a prism turntable 5, a reflection prism 6, an angle measurement optical lens group 7, a laser generator 8, a notebook computer 9, an environment compensator 10, a numerical control system 11, a data line 12, a bluetooth receiver 13, and the like.
The detected numerical control indexing rotary table 4 is placed and installed on the detection platform 1, and the adjusting platform 2 adjusts the horizontal state of the numerical control indexing rotary table 4. The numerical control indexing table 4 is provided with a prism table 5 on a turntable, the reflecting prism 6 is arranged on the prism table 5, and the numerical control indexing table 4 rotates to drive the prism table 5 and the reflecting prism 6 to rotate. The laser generator 8 generating laser with stable wavelength is erected on the ground through a tripod, and an angle measurement optical lens group 7 is arranged between the reflecting prism 6 and the laser generator 8. The angle measurement optical lens group 7 plays an interference role, and can be combined according to the detection requirement, so that different precision detection items can be completed. The angle measurement optical lens group 7 is mounted on the detection platform 1, and it is noted that the light paths of the reflection prism 6, the angle measurement optical lens group 7 and the laser generator 8 are adjusted.
The drive program of the numerical control system for measuring the indexing accuracy is matched with a program (rotation axis measuring software) in the notebook computer 9.
The principle of the indexing detection is that the software of the indexing detection is installed in a notebook computer 9, the laser 8, the angle optical lens group 7, the prism rotary table 5, the reflecting prism 6 and the software of the notebook computer 9 are used for measuring and analyzing the angle position of the numerical control indexing rotary table 4 to be detected, the software combines the angle position of the numerical control indexing rotary table 4 with the degrees from the laser 8 and the angle optical prism 7 together, the analysis is carried out to generate the indexing precision of the numerical control indexing rotary table 4 to be detected, and the detection result is output.
The environment compensator 10 is placed at a proper position, 4 probes are respectively arranged at the positions of air, a machine base, an adjusting platform, a detecting platform and the like, and plugs of the probes are inserted into corresponding sockets of the environment compensator 10 according to the mark numbers A, 1, 2 and 3. Wherein:
the probe A detects the air temperature;
the No. 1 probe detects the temperature of a machine base of the numerical control indexing rotary table 4;
the No. 2 probe detects the temperature of the adjusting platform 2;
the No. 3 probe detects the temperature of the detection platform 1;
the environmental compensator 10 can collect temperature data through each probe, and upload the temperature data to the notebook computer 9 to participate in data analysis, thereby avoiding the influence of temperature change on detection.
The environment compensator 10 is connected with the notebook computer 9 through a data line 12, the laser emitter 8 is connected with the notebook computer 9 through the data line 12, and the prism rotary table 5 is communicated with the notebook computer 9 through Bluetooth. The light paths of the laser emitter 8, the angle measurement optical mirror group 7 and the reflecting prism 6 are well adjusted.
The test software run by the laptop computer 9 collates the relevant settings. And after the verification is finished, the Bluetooth generator and the receiver are automatically connected with the network. The software analyzes and calculates the collected data, generates a detection result, obtains data of the indexing precision and the indexing repeated positioning precision, and outputs a chart.
A laser indexing detection method specifically comprises the following steps:
1) Installing a numerical control rotary table on a test platform, and installing a prism rotary table on a rotary table of a numerical control indexing rotary table;
2) The environment compensator is placed at a proper position, 4 probes are respectively installed at corresponding positions (the probe A is arranged in the air, the probe 1 is arranged on a base of the probe 1 detection numerical control indexing rotary table 4, the probe 2 is arranged on the adjusting platform 2, and the probe 3 is arranged on the detecting platform 1), and plugs of the 4 probes are inserted into corresponding sockets of the environment compensator according to the mark numbers of A, 1, 2 and 3;
3) Connecting the numerical control system with the numerical control indexing turntable by using a data line, connecting the environment compensator with a notebook computer by using the data line, connecting the laser transmitter with the notebook computer by using the data line, and establishing communication between the prism turntable and the notebook computer by using Bluetooth;
4) Adjusting light paths among the laser emitter, the angle measuring optical lens group and the reflecting prism;
5) Automatically finding zero position and optically calibrating by the numerical control indexing table;
6) The numerical control system controls the numerical control indexing rotary table to rotate, the prism rotary table and the reflecting prism are driven to rotate together in the rotating process of the numerical control indexing rotary table, and the servo motor stops when the numerical control indexing rotary table rotates to a set angle (such as 10 degrees);
7) The reflecting prism, the angle measuring optical lens group and the light path of the laser generator form an angle after the numerical control indexing table rotates; when the numerical control indexing turntable stops, the reflecting prism can automatically rotate (the prism turntable drives the reflecting prism to rotate), and the originally arranged light path is automatically aligned and returned;
8) The laser generator receives the alignment signal of the reflecting prism (the reflecting prism, the angle measuring optical lens group and the laser generator jointly form an optical system), and the prism turntable uploads the rotation angle data to the notebook computer for recording through Bluetooth;
9) And analyzing and calculating the rotation angle of the rotary table angle encoder and the data acquired by laser indexing detection through measurement software to generate a detection result, obtaining indexing precision data and outputting a chart.
Claims (8)
1. The laser indexing detection device is characterized by comprising a detection platform (1), an adjusting platform (2), a detected numerical control indexing rotary table (4), an optical detection system, an environment compensation system, a computer processing system and a numerical control system (11) for driving the detected numerical control rotary table; the adjusting platform (2) is arranged on the detecting platform (1), the numerical control indexing table (4) is arranged on the adjusting platform (2), the optical detecting system is arranged on the numerical control indexing table (4), and the optical detecting system is in signal connection with the computer processing system; the environment compensation system is arranged on the detection platform (1), the adjustment platform (2) and the numerical control indexing rotary table (4), and is in signal connection with the computer processing system; the numerical control system (11) is in signal connection with the numerical control indexing rotary table (4).
2. The laser scale division detection device according to claim 1, wherein the optical detection system comprises a prism turntable (5), a reflection prism (6) and a laser generator (8), the prism turntable (5) is arranged on the numerical control scale division turntable (4), the reflection prism (6) is arranged on the prism turntable (5), the laser generator (8) is erected on the ground through a tripod, an angle measurement optical lens group (7) is arranged between the reflection prism (6) and the laser generator (8), and the angle measurement optical lens group (7) is installed on the detection platform (1).
3. The laser scale division detection apparatus according to claim 1, wherein the environmental compensation system comprises an environmental compensator (10) and four probes, and the plugs of the four probes are respectively inserted into the corresponding sockets of the environmental compensator (10).
4. The laser indexing detection device according to claim 1, wherein the four probes include a probe a, a probe 1, a probe 2 and a probe 3, the probe a is disposed in the air for detecting the air temperature; the No. 1 probe is arranged on the numerical control indexing rotary table (4) and is used for detecting the temperature of a base of the numerical control indexing rotary table (4); the No. 2 probe is arranged on the adjusting platform (2) and is used for detecting the temperature of the adjusting platform (2); the No. 3 probe is arranged on the detection platform (1) and used for detecting the temperature of the detection platform (1).
5. The laser graduation detection device according to claim 1, characterized in that, the computer processing system comprises a notebook computer (9) and measurement software, the notebook computer (9) is respectively connected with the environmental compensator (10) and the laser generator (8) by a data line (12).
6. The laser indexing detection device as claimed in claim 1, wherein the prism turntable (5) is connected with a bluetooth generator (3), the notebook computer (9) is provided with a bluetooth receiver, and the prism turntable (5) and the notebook computer (9) are communicated with each other by bluetooth.
7. The laser graduation detection device as claimed in claim 1, characterized in that the centers of said reflection prism (6), said optical lens (7) and said laser generator (8) are located on a horizontal straight line at the same height.
8. A laser graduation detection method is characterized by comprising the following steps:
1) Installing a numerical control rotary table on a test platform, and installing a prism rotary table on a rotary table of a numerical control indexing rotary table;
2) Placing the environment compensator at a proper position, respectively installing 4 probes at corresponding positions, and inserting the plugs of the 4 probes into corresponding sockets of the environment compensator according to the mark numbers A, 1, 2 and 3;
3) Connecting the numerical control system with the numerical control indexing turntable by using a data line, connecting the environment compensator with a notebook computer by using the data line, connecting the laser transmitter with the notebook computer by using the data line, and establishing communication between the numerical control indexing turntable and the notebook computer by using Bluetooth;
4) Adjusting light paths among the laser emitter, the angle measuring optical lens group and the reflecting prism;
5) Automatically finding zero position and optically calibrating by the numerical control indexing table;
6) The numerical control system controls the numerical control indexing rotary table to rotate, the prism rotary table and the reflecting prism are driven to rotate together in the rotating process of the numerical control indexing rotary table, and the servo motor stops when the numerical control indexing rotary table rotates to a set angle;
7) The reflecting prism, the angle measuring optical lens group and the light path of the laser generator form an angle after the numerical control indexing table rotates; when the numerical control indexing turntable stops, the reflecting prism automatically rotates and automatically aligns and returns the originally arranged light path;
8) The prism rotating table uploads the rotation angle data to a notebook computer through Bluetooth for recording;
9) And analyzing and calculating the rotation angle of the rotary table angle encoder and the data acquired by laser indexing detection through measurement software to generate a detection result, obtaining indexing precision data and outputting a chart.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202211085509.1A CN115446660A (en) | 2022-09-06 | 2022-09-06 | Laser indexing detection device and detection method thereof |
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| CN202211085509.1A CN115446660A (en) | 2022-09-06 | 2022-09-06 | Laser indexing detection device and detection method thereof |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101236076A (en) * | 2008-02-29 | 2008-08-06 | 成都工具研究所 | Laser angle interferometry system possessing standard angle rotating platform and its measurement method |
| CN101241314A (en) * | 2008-03-11 | 2008-08-13 | 上海微电子装备有限公司 | 6 freedom degree precision positioning station capable of compensating Z-direction position |
| JP2009236746A (en) * | 2008-03-27 | 2009-10-15 | Mitsutoyo Corp | Tracking laser interferometer |
| CN101833304A (en) * | 2009-03-10 | 2010-09-15 | 北京信息科技大学 | Method for measuring positioning accuracy of numerical control rotary table by using photoelectric auto-collimator |
| CN102192716A (en) * | 2010-12-08 | 2011-09-21 | 陕西宝成航空仪表有限责任公司 | Laser interference detection method and system for dynamic indexes of rotary table |
| CN103245520A (en) * | 2013-04-19 | 2013-08-14 | 南京工业大学 | Testing device for condition simulated numerical control rotary table test bed |
| CN104864812A (en) * | 2014-02-20 | 2015-08-26 | 北京航天计量测试技术研究所 | Rotary workbench |
| US20170176164A1 (en) * | 2015-12-21 | 2017-06-22 | Carl Zeiss Industrielle Messtechnik Gmbh | Method for performing measurements using a test element in a coordinate measuring machine or a machine tool |
| CN112835270A (en) * | 2021-01-19 | 2021-05-25 | 上海集成电路装备材料产业创新中心有限公司 | Rotary measurement and control device of rotary platform |
| CN114688996A (en) * | 2020-12-31 | 2022-07-01 | 北京华航无线电测量研究所 | Method for measuring rotation precision angle of rotary table |
-
2022
- 2022-09-06 CN CN202211085509.1A patent/CN115446660A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101236076A (en) * | 2008-02-29 | 2008-08-06 | 成都工具研究所 | Laser angle interferometry system possessing standard angle rotating platform and its measurement method |
| CN101241314A (en) * | 2008-03-11 | 2008-08-13 | 上海微电子装备有限公司 | 6 freedom degree precision positioning station capable of compensating Z-direction position |
| JP2009236746A (en) * | 2008-03-27 | 2009-10-15 | Mitsutoyo Corp | Tracking laser interferometer |
| CN101833304A (en) * | 2009-03-10 | 2010-09-15 | 北京信息科技大学 | Method for measuring positioning accuracy of numerical control rotary table by using photoelectric auto-collimator |
| CN102192716A (en) * | 2010-12-08 | 2011-09-21 | 陕西宝成航空仪表有限责任公司 | Laser interference detection method and system for dynamic indexes of rotary table |
| CN103245520A (en) * | 2013-04-19 | 2013-08-14 | 南京工业大学 | Testing device for condition simulated numerical control rotary table test bed |
| CN104864812A (en) * | 2014-02-20 | 2015-08-26 | 北京航天计量测试技术研究所 | Rotary workbench |
| US20170176164A1 (en) * | 2015-12-21 | 2017-06-22 | Carl Zeiss Industrielle Messtechnik Gmbh | Method for performing measurements using a test element in a coordinate measuring machine or a machine tool |
| CN114688996A (en) * | 2020-12-31 | 2022-07-01 | 北京华航无线电测量研究所 | Method for measuring rotation precision angle of rotary table |
| CN112835270A (en) * | 2021-01-19 | 2021-05-25 | 上海集成电路装备材料产业创新中心有限公司 | Rotary measurement and control device of rotary platform |
Non-Patent Citations (1)
| Title |
|---|
| 张曙 等, 东南大学出版社 * |
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Application publication date: 20221209 |