CN115437235A - Method for adaptively adjusting position of combustion surface of target material - Google Patents
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
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Abstract
The invention relates to a method for adaptively adjusting the position of a combustion surface of a target material, which comprises the steps of mounting the target material on a lifting adjusting device, mounting a knocking probe at one end of a knocking rod, rotatably mounting the knocking rod, detecting the rotating angle of the knocking probe when the knocking probe effectively knocks the target material by adopting a detection device, transmitting a signal to a control device by the detection device, analyzing and processing the detection signal by the control device to judge whether the rotating angle exceeds a preset threshold value, and adjusting the running state of the lifting adjusting device by the control device according to the analysis and judgment result. According to the scheme provided by the invention, the included angle between the target combustion surface and the target knocking rod can be always stabilized in a reasonable range by adjusting the position of the target combustion surface, so that the combustion effect and the service life of the target are improved, the extra time for manually replacing and adjusting the position of the target is saved, the target combustion surface is always in a favorable and effective working position, and the efficient and stable operation of a coating process is ensured.
Description
Technical Field
The invention relates to the field of ion vacuum coating, in particular to a method for adaptively adjusting the position of a combustion surface of a target material.
Background
In ion vacuum coating, the target is gradually consumed as the coating progresses, so that the height of the combustion surface on the target changes. The influence of the height of the combustion surface of the target on the coating process performance is great, and the method is more important particularly in the thick film process, so that the height of the combustion surface of the target needs to be adjusted. The height of the combustion surface of the traditional target is mainly adjusted manually, and the operation mode has the defects of insufficient adjustment precision, untimely adjustment and long adjustment time, greatly influences the vacuum coating performance, and therefore the problem needs to be solved.
Disclosure of Invention
It is an object of the present invention to provide a method for adaptively adjusting the position of a combustion surface of a target, which can be used to solve the above technical problems.
The technical scheme adopted by the invention is as follows.
A method for adaptively adjusting a position of a combustion surface of a target, characterized by: including installing the target on lift adjustment device, knocking the probe and installing in the one end of knocking the pole, knocking the pole and rotate the installation, adopt detection device to detect the pivoted angle when knocking the probe and effectively knocking the target, detection device carries signal to controlling means, controlling means carries out analysis processes to the detected signal and judges whether turned angle exceeds predetermined threshold value, controlling means adjusts lift adjustment device's running state according to the result of analysis judgement.
The further scheme is as follows: the control device is a PLC control device and adopts a PID regulation and control method to analyze and process the detection signals.
The lifting adjusting device is a screw nut lifting adjusting device.
The other end of the knocking rod is assembled at one end of the rotating shaft, a round angle detection piece is arranged at the other end of the rotating shaft, the detection device comprises a A, B detection piece, an A detection piece detects the initial state and the reset state of the angle detection piece, and a B detection piece detects the state of the knocking probe when the knocking probe effectively knocks the target.
Before the parameters of the PID control method are obtained, the height of the target surface of the target is adjusted to a reasonable position, the target is knocked under the condition that a knocking probe is not powered on, the knocking force of the knocking probe is adjusted until the knocking force is proper, then a power supply of the knocking probe is switched on to carry out charged knocking, whether the arc light intensity of the combustion surface of the target is proper or not is observed, the operation is carried out for a period of time, the consumption of the target is recorded, and the parameters of the PID control method are obtained after the target is knocked stably.
The parameter acquisition of the PID control method comprises the following steps: setting a sampling period and proportional parameters, setting an initial value of a larger integral time constant during adjustment, gradually reducing the integral time constant, gradually increasing the integral time constant until the system fluctuation disappears when the system fluctuates, recording the integral time constant at the moment, and setting the integral time constant of the PID to be 150-180% of the current value; then, a differential time constant is set, and the differential time constant is set in the same way as the method for determining the integral time constant, and is 30% of the time when the system does not fluctuate.
And optimizing the parameters of the obtained PID control method by adopting a critical proportion parameter method.
The specific operation of optimizing PID parameters by adopting a critical proportion parameter method is as follows:
firstly, the integral time constant is set to be maximum, the differential time constant is set to be zero, the proportional parameter is set to be a larger appropriate value, then the proportional parameter is slowly reduced, and the change condition of the output signal of the control device and the adjusted parameter is carefully observed under the action of external interference; if the curve fluctuation of the control process is attenuated, the proportional parameter is continuously adjusted to be small, if the curve fluctuation of the control process is divergent, the proportional parameter is adjusted to be large until the curve fluctuation is in constant amplitude oscillation, so that a critical oscillation process is obtained, and the critical proportional parameter delta k and the critical period Tk are obtained;
calculating the parameter values of the control device according to the calculation formula in the following table;
regulation law | Proportional parameter δ k (%) | Integration time Ti (min) | Differential time Td (min) |
P | 2δk | 0 | 0 |
PI | 2.3δk | 0.85Tk | 0 |
PID | 1.78δk | 0.5Tk | 0.125Tk |
After the specific parameter value is obtained, the proportional parameter is adjusted on a scale which is larger than the calculated value, then the integral time constant is put on the calculated value, then the integral time constant is adjusted from large to small, finally the differential time constant is put on the calculated value, and the differential time constant is adjusted from small to large; finally, the proportional parameters are reduced to calculated values, and the PID parameter adjustment output curve graph is observed to properly fine-tune each parameter to determine satisfactory parameter values.
A transmission shaft is arranged beside the rotating shaft, the transmission shaft is connected with the rotating shaft through a gear transmission assembly, and the transmission shaft is connected with a pneumatic driving assembly. The periphery of the angle detection piece is provided with a notch part, the A, B detection piece is a photoelectric sensor, and the A, B detection piece detects the notch part.
According to the scheme provided by the invention, the included angle between the target combustion surface and the target knocking rod can be always stabilized in a reasonable range by adjusting the position of the target combustion surface, so that the combustion effect and the service life of the target are improved, the extra time for manually replacing and adjusting the position of the target is saved, the target combustion surface is always in a favorable and effective working position, and the efficient and stable operation of a coating process is ensured.
Drawings
FIG. 1 is a flow chart of the present invention.
FIG. 2 is a flowchart of a PID control routine.
FIG. 3 is a PID parameter tuning output graph.
Fig. 4 is a schematic structural view of the target knocking device.
The corresponding relation between the reference numbers and the components is as follows:
01-target material, 02-knocking probe, 03-knocking rod, 04-angle detection piece, 05-A detection piece, 06-B detection piece and 07-pneumatic driving component.
Detailed Description
In order that the objects and advantages of the invention will be more clearly understood, the following description is given in conjunction with the accompanying examples. It is to be understood that the following text is merely illustrative of one or more specific embodiments of the invention and does not strictly limit the scope of the invention as specifically claimed. As used herein, the terms "parallel" and "perpendicular" are not limited to their strict geometric definitions, but include tolerances for machining or human error, which are reasonable and inconsistent.
As shown in fig. 1, 2 and 3, a method for adaptively adjusting the position of a combustion surface of a target material comprises the steps of mounting the target material 01 on a lifting adjusting device, mounting a knocking probe 02 at one end of a knocking rod 03, rotatably mounting the knocking rod 03, detecting the rotation angle of the knocking probe 02 when the target material 01 is effectively knocked by adopting a detection device, transmitting a signal to a control device by the detection device, analyzing and processing the detection signal by the control device to judge whether the rotation angle exceeds a preset threshold value, and adjusting the operation state of the lifting adjusting device by the control device according to the analysis and judgment result. The control device is a PLC control device and adopts a PID regulation and control method to analyze and process the detection signals. The lifting adjusting device is a screw nut lifting adjusting device. The other end of the knocking rod 03 is assembled at one end of the rotating shaft, the other end of the rotating shaft is provided with a round angle detection piece 04, the detection device comprises A, B detection pieces 05 and 06, the A detection piece 05 detects the initial state and the reset state of the angle detection piece 04, and the B detection piece 06 detects the state when the knocking probe 02 effectively knocks the target 01. A transmission shaft is arranged beside the rotating shaft, the transmission shaft is connected with the rotating shaft through a gear transmission assembly, and the transmission shaft is connected with a pneumatic driving assembly 07. The angle detector 04 is provided with a notch at the periphery, the A, B detectors 05 and 06 are photoelectric sensors, and the A, B detectors 05 and 06 detect the notch.
The invention mainly uses the angle change detected by A, B detection pieces to measure the change of the height of the target 01, when the target 01 knocks and consumes a certain amount of the target 01, the position of the combustion surface (upper surface) of the target 01 slightly changes, at the moment, A, B detection pieces 05 and 06 can transmit the current position information of the target 01 to a control device (PLC) when detecting that the height of the surface of the target 01 changes, the PLC programming is carried out in the control device, the flow shown in figures 2 and 3 is used for carrying out logic judgment and calculating the control pulse number of the lifting stroke of the target 01, and the self-adaptive adjustment of the lifting of the target 01 can be carried out according to the consumption of the target 01 through the PLC programming. The lifting height of the target 01 can be controlled within a very accurate range by using a PID control method when the lifting of the target 01 is controlled. Thereby improving the accuracy of regulation and control and improving the quality of ion vacuum coating.
The detailed operation is as follows: the equipment is assembled and debugged to operate correctly without jamming as shown in fig. 4, and the judgment programs shown in the flowcharts 2 and 3 are written in the control device. The position of the combustion surface of the target 01 is manually adjusted in a lifting mode, and the knocking probe 02 is manually adjusted to enable the combustion surface of the target 01 to be perfectly attached to the knocking probe 02. And inputting the current value detected by the detection device into the control device as the angle setting. And starting a program in the control device, starting the target 01 to knock, and circularly monitoring whether the current position of the target 01 needs to be adjusted or not through the program. When the target 01 is consumed to a certain extent, the PLC master control program starts a PID control method to intervene in adjustment.
The parameter acquisition step of the PID control is as follows, and the formula used by the PID control is consistent with the formula in the existing PID control or the formula for making optimization change.
The target 01 is installed on the lifting adjusting device, the height of the knocking probe 02 and the height of the target 01 are adjusted to be reasonable, and the knocking program is started to knock the target 01 under the condition that the knocking probe 02 is not electrified. The knocking force of the target 01 probe is adjusted by adjusting a knob of the pneumatic valve until the knocking force is proper. And (4) switching on a power supply of the target 01 knocking probe 02 to perform charged knocking on the target 01, and observing whether the arc light intensity of the combustion surface of the target 01 is proper or not. And recording the consumption of the target material 01 knocking the surface of the target material 01 after a period of time and recording data. And performing the next step of PID adjustment of the lifting position of the target 01 after the target 01 is knocked stably. The sampling period is set, and the setting of the sampling period is mainly determined according to the characteristics of the controlled object. And setting a proportion parameter, wherein the property of the controlled value is considered when the proportion parameter is set.
During adjustment, a larger initial value of an integral time constant (Ti) can be set first, the Ti is gradually reduced, when the system fluctuates, the Ti is gradually increased in reverse until the system fluctuation disappears, the Ti at the moment is recorded, and the Ti of the PID is set to be 150% -180% of the current value. The differential time constant was set to 30% of the time when no fluctuation was observed, in the same manner as the method for determining Ti. The setting of the differential time constant should be based on the setting of other parameters, otherwise the system will lose control.
General principles of PID tuning: when the output does not oscillate, the proportional gain P is increased; when the output does not oscillate, the integral time constant Ti is reduced; when the output does not oscillate, the differential time constant Td is increased.
General procedure for tuning PID parameters by critical ratio parameter method: the integral time constant is firstly put to the maximum, the differential time constant is put to zero, and the proportional parameter is put to a larger appropriate value. The control system is operated in a pure proportion action mode, then the proportion parameters are slowly reduced, and the change conditions of the output signals and the adjusted parameters of the control device are carefully observed under the action of external interference; if the curve fluctuation of the control process is attenuated, the proportional parameter is continuously adjusted to be small, and if the curve fluctuation of the control process is divergent, the proportional parameter is adjusted to be large until the curve fluctuation oscillates in a constant amplitude manner, so that the critical oscillation process is obtained, and the critical proportional parameter delta k and the critical period Tk are obtained. And calculating each parameter value of the control device according to a parameter calculation formula table of a critical ratio parameter method in table 1.
TABLE 1 Critical proportionality method parameter table
Regulation law | Proportional parameter δ k (%) | Integration time Ti (min) | Differential time Td (min) |
P | 2δk | 0 | 0 |
PI | 2.3δk | 0.85Tk | 0 |
PID | 1.78δk | 0.5Tk | 0.125Tk |
After a specific numerical value is obtained, the proportional parameter is adjusted on a scale which is larger than the calculated numerical value, then the integral time constant is put on the calculated value, then the integral time constant is adjusted from large to small, finally the differential time constant is put on the calculated value, and the differential time constant is adjusted from small to large. Finally, the proportional parameters are reduced to calculated values, and the fine adjustment of each parameter is properly carried out by observing the curve diagram 3 so as to achieve a satisfactory control effect and obtain the optimal PID parameters.
In a word, according to the scheme provided by the invention, the included angle between the combustion surface of the target 01 and the knocking rod 03 of the target 01 can be always stabilized in a reasonable range by adjusting the position of the combustion surface of the target 01, so that the combustion effect and the service life of the target 01 are improved, the extra time for manually changing the target and adjusting the position of the target 01 is saved, the combustion surface of the target 01 is always in a favorable and effective working position, and the efficient and stable operation of a coating process is ensured.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be construed as the protection scope of the present invention. Structures, mechanisms, and methods of operation not specifically described or illustrated herein are generally practiced in the art without specific recitation or limitation.
Claims (10)
1. A method for adaptively adjusting a position of a combustion surface of a target, characterized by: including installing the target on lift adjustment device, knocking the probe and installing in the one end of knocking the pole, knocking the pole and rotate the installation, adopt detection device to detect the pivoted angle when knocking the probe and effectively knocking the target, detection device carries signal to controlling means, controlling means carries out analysis processes to the detected signal and judges whether turned angle exceeds predetermined threshold value, controlling means adjusts lift adjustment device's running state according to the result of analysis judgement.
2. The method for adaptively adjusting the position of a combustion surface of a target according to claim 1, wherein: the control device is a PLC control device, and the control device analyzes and processes the detection signal by adopting a PID regulation and control method.
3. The method for adaptively adjusting the position of a combustion surface of a target according to claim 1 or 2, wherein: the lifting adjusting device is a screw nut lifting adjusting device.
4. The method for adaptively adjusting the position of a combustion surface of a target according to claim 3, wherein: the other end of the knocking rod is assembled at one end of the rotating shaft, a round angle detection piece is arranged at the other end of the rotating shaft, the detection device comprises a A, B detection piece, an A detection piece detects the initial state and the reset state of the angle detection piece, and a B detection piece detects the state of the knocking probe when the knocking probe effectively knocks the target.
5. The method for adaptively adjusting the position of a combustion surface of a target according to claim 2, wherein: before the parameters of the PID control method are obtained, the height of the target surface of the target is adjusted to a reasonable position, the target is knocked under the condition that a knocking probe is not powered on, the knocking force of the knocking probe is adjusted until the knocking force is proper, then a power supply of the knocking probe is switched on to carry out charged knocking, whether the arc light intensity of the combustion surface of the target is proper or not is observed, the operation is carried out for a period of time, the consumption of the target is recorded, and the parameters of the PID control method are obtained after the target is knocked stably.
6. The method for adaptively adjusting a position of a combustion surface of a target according to claim 2, wherein: the parameter acquisition of the PID control method comprises the following steps: setting a sampling period and proportional parameters, setting an initial value of a larger integral time constant during adjustment, gradually reducing the integral time constant, gradually increasing the integral time constant until the system fluctuation disappears when the system fluctuates, recording the integral time constant at the moment, and setting the integral time constant of the PID to be 150-180% of the current value; then, a differential time constant is set, and the differential time constant is set to be 30% of the time when the system does not fluctuate in the same way as the method for determining the integral time constant.
7. The method for adaptively adjusting the position of a combustion surface of a target according to claim 6, wherein: and optimizing the parameters of the obtained PID control method by adopting a critical proportion parameter method.
8. The method for adaptively adjusting the position of the combustion surface of the target according to claim 7, wherein the specific operation of optimizing the PID parameters by using the critical ratio parameter method is as follows:
firstly, the integral time constant is set to be maximum, the differential time constant is set to be zero, the proportional parameter is set to be a larger appropriate value, then the proportional parameter is slowly reduced, and the change condition of the output signal of the control device and the adjusted parameter is carefully observed under the action of external interference; if the curve fluctuation of the control process is attenuated, the proportional parameter is continuously adjusted to be small, if the curve fluctuation of the control process is divergent, the proportional parameter is adjusted to be large until the curve fluctuation is in constant amplitude oscillation, so that a critical oscillation process is obtained, and the critical proportional parameter delta k and the critical period Tk are obtained;
calculating the parameter values of the control device according to the calculation formula in the following table;
After the specific parameter value is obtained, the proportional parameter is adjusted on a scale which is larger than the calculated value, then the integral time constant is put on the calculated value, then the integral time constant is adjusted from large to small, finally the differential time constant is put on the calculated value, and the differential time constant is adjusted from small to large; finally, the proportional parameters are reduced to calculated values, and the PID parameter adjustment output curve graph is observed to properly fine-tune each parameter to determine satisfactory parameter values.
9. The method as claimed in claim 8, wherein a transmission shaft is disposed beside the rotating shaft, the transmission shaft and the rotating shaft are connected by a gear assembly, and the transmission shaft is connected to the pneumatic driving assembly.
10. The method according to claim 8, wherein the angle detector has a notch at its periphery, the A, B detector is a photoelectric sensor, and the A, B detector detects the notch.
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CN117555223A (en) * | 2024-01-05 | 2024-02-13 | 深圳风向标教育资源股份有限公司 | Parameter calibration method, device, terminal equipment and storage medium |
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