CN115436835A - LED detection equipment - Google Patents

Abstract

The embodiment of the invention provides LED detection equipment. The LED detection equipment comprises a driving device, a power supply and a detection device; the power supply is used for outputting alternating voltage and comprises a first terminal and a second terminal; the driving device comprises a substrate, a first electrode and a second electrode which are positioned on the same side of the substrate; when the LED is detected, the first electrode is electrically connected to the first terminal, the second electrode is electrically connected to the second terminal, the first pole of the LED is opposite to the first electrode, and the second pole of the LED is opposite to the second electrode in the direction vertical to the substrate; the detection device is used for collecting the luminous information of the LED and detecting the failed LED according to the luminous information. The invention can adopt a non-contact driving mode to carry out lighting detection on the LED. When the detection is carried out, the detection does not need to be in contact with the anode and the cathode of the LED, so that the damage to the anode and the cathode of the LED can be avoided. And can carry out batch detection to LED, promote LED's detection efficiency.

Description

LED detection equipment

Technical Field

The invention belongs to the technical field of light emission, and particularly relates to LED detection equipment.

Background

An LED (light-emitting diode) is a device that generates light emission and brightness based on electron transition. The LEDs are combined with the driving device according to a specific layout to form a display system, and the display system can be applied to equipment with a display module, such as mobile phones, computers, televisions and the like. Compared with the traditional LED, the Micro LED or the nano LED has smaller size, can make more pixel points on a panel with the same size, has better and finer display effect, and is the development direction of next generation display.

During manufacturing, a large quantity of micro or nano LED monomers are firstly required to be manufactured on a substrate, and then the LEDs are transferred to a driving substrate by utilizing a massive transfer process so as to be finally used as a display module. When the LEDs are manufactured, all finished products cannot be qualified, and some LEDs may be damaged before being transferred in a large quantity, so that a display module formed after the transfer has a display defect, and the product yield is influenced. Therefore, it is necessary to detect the lighting of the LED before the mass transfer. Therefore, the LEDs transferred to the driving substrate can be guaranteed to normally emit light, the yield of the display module is improved, and the manufacturing cost is reduced.

Disclosure of Invention

In view of this, the present invention provides an LED inspection apparatus for performing batch lighting tests on LEDs before transferring a large amount of LEDs, so as to improve the inspection efficiency of LEDs.

The invention provides LED detection equipment, which comprises a driving device, a power supply and a detection device, wherein the driving device is connected with the power supply; wherein the content of the first and second substances,

the power supply is used for outputting alternating voltage and comprises a first terminal and a second terminal;

the driving device comprises a substrate, a first electrode and a second electrode which are positioned on the same side of the substrate; when the LED is detected, the first electrode is electrically connected to the first terminal, the second electrode is electrically connected to the second terminal, the first pole of the LED is opposite to the first electrode, and the second pole of the LED is opposite to the second electrode in the direction vertical to the substrate;

the detection device is used for collecting the luminous information of the LED and detecting the failed LED according to the luminous information.

According to the invention, the first electrode and the second electrode are arranged on the same side of the substrate of the driving device, when the LED is detected, the first electrode of the LED is opposite to the first electrode, the second electrode of the LED is opposite to the second electrode, the first electrode and the second electrode are supplied with power by a power supply capable of providing alternating current, so that coupling capacitors are formed between the first electrode and between the second electrode and the second electrode, current is injected into the LED by using the coupling capacitors, the LED is lightened by adopting a non-contact driving mode, and the detection device is used for collecting light emitting information of the LED for detection. When the detection is carried out, the detection does not need to be in contact with the anode and the cathode of the LED, so that the damage to the anode and the cathode of the LED can be avoided. The detection equipment provided by the embodiment of the invention can be used for detecting the LEDs in batches, and the detection efficiency of the LEDs is improved.

In some embodiments, the first electrode comprises at least two first sub-electrodes and the second electrode comprises at least two second sub-electrodes; in a first direction, the first sub-electrodes and the second sub-electrodes are alternately arranged, and the first direction is parallel to the plane of the substrate. According to the arrangement, one first sub-electrode corresponds to the first poles of the LED devices and one second sub-electrode corresponds to the second poles of the LED devices during detection, batch detection of the LED devices can be achieved, and the LED devices are not only detected for one LED device at a time. Therefore, the detection efficiency of the LED can be greatly improved.

In some embodiments, in a second direction, at least two first sub-electrodes are connected to each other at the same end through the first connecting part, and the second direction is parallel to the plane of the substrate and intersects with the first direction; in the second direction, at least two of the second sub-electrodes are connected to each other at the same end by a second connection portion. The arrangement enables simultaneous driving of a plurality of LED devices in an LED array using the first and second electrodes. The plurality of first sub-electrodes are connected with each other, and can provide voltage signals to all the first sub-electrodes through one interface, and similarly, the voltage signals can be provided to all the second sub-electrodes through one interface, so that the wiring in the driving device can be simplified, and the connection mode with the power supply can be simplified.

Optionally, the first connection portion, the first sub-electrode, the second connection portion, and the second sub-electrode are all located in the same layer. That is, the first electrode and the second electrode are located in the same layer, so that the first electrode and the second electrode can be manufactured in the same process.

In some embodiments, the second electrode further includes a third connection portion extending along the first direction, the third connection portion being electrically connected to the second sub-electrode, the third connection portion being located at a different layer from the first sub-electrode, and the third connection portion overlapping the first sub-electrode in a direction perpendicular to the substrate.

Further, the driving device further comprises a protective layer, and the protective layer is located on one side, far away from the substrate, of the first sub-electrode and the second sub-electrode. The protective layer is used for protecting the electrode so as to prevent the electrode from corroding and influencing the performance of the driving device.

The thickness of the protective layer is d, wherein d is more than or equal to 10nm and less than or equal to 1 mu m. The thickness of the protective layer does not need to be set too large while the protective effect on the electrode is achieved, so that the influence on the size of a coupling capacitor formed between the electrode and the anode and the cathode of the LED during detection of the LED and the influence on the detection accuracy of the detection equipment are avoided.

In some embodiments, the lighting information of the LED comprises a lighting brightness of the LED; the detection device comprises a spectrometer, wherein the spectrometer is used for collecting the brightness of the LED, and when the brightness is smaller than a brightness threshold, the LED corresponding to the brightness is judged to be a failure LED. The brightness of the LED is used as the detection condition of the failed LED, and the detection mode is simple and easy to implement.

The voltage signal of the alternating voltage is sine wave or square wave, the frequency is r, and r is more than or equal to 1Hz and less than or equal to 1000KHz. Through carrying out reasonable setting to alternating current frequency, can guarantee that normal LED's luminous luminance is big enough when detecting LED to detection device detects it.

In some embodiments, the LED detection apparatus further includes a clamp for clamping and fixing the driving device and the LED to be detected. The included angle can control the spacing distance between the driving device and the LED to be detected to meet the test requirement, and the detection accuracy is guaranteed. Meanwhile, the included angle can also enable a closed space to be formed between the driving device and the LED to be detected when the detection is carried out, so that a medium material can be conveniently injected between the driving device and the LED to be detected.

The LED detection equipment provided by the invention has the following beneficial effects: the LED detection equipment provided by the invention comprises a driving device, a power supply and a detection device. The first electrode and the second electrode are arranged on the same side of the substrate of the driving device, when the LED is detected, the first pole of the LED is opposite to the first electrode, the second pole of the LED is opposite to the second electrode, the first electrode and the second electrode are powered through a power supply capable of providing alternating current, so that coupling capacitors are formed between the first pole and the first electrode and between the second pole and the second electrode, current is injected into the LED through the coupling capacitors, the LED is lightened in a non-contact driving mode, and the light emitting information of the LED is collected by the detection device to be detected. When the detection is carried out, the detection does not need to be in contact with the anode and the cathode of the LED, so that the damage to the anode and the cathode of the LED can be avoided. The detection equipment provided by the embodiment of the invention can be used for detecting the LEDs in batches, and the detection efficiency of the LEDs is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic diagram of an LED array arrangement;

FIG. 2 isbase:Sub>A schematic cross-sectional view taken along line A-A' of FIG. 1;

FIG. 3 is a schematic diagram of a detection apparatus provided in an embodiment of the present invention;

FIG. 4 is a schematic top view of a driving device of a detecting apparatus according to an embodiment of the present invention;

fig. 5 is a schematic diagram illustrating a corresponding relationship between a driving device and an LED array when the detection device provided by the embodiment of the present invention is used for detection;

fig. 6 is an equivalent circuit diagram of the detection device according to the embodiment of the present invention when detecting an LED;

FIG. 7 is a monocycle waveform of voltage between the first and second poles of a single LED device as it is sensed over time;

FIG. 8 is a table of simulation test data;

FIG. 9 is a graph of simulated test data for driving an LED using an AC power supply;

FIG. 10 is another schematic view of a detection apparatus provided in an embodiment of the present invention;

FIG. 11 is a schematic top view of a driving device of a detecting apparatus according to an embodiment of the present invention;

FIG. 12 is a schematic cross-sectional view taken along line B-B' of FIG. 11;

FIG. 13 is another schematic cross-sectional view taken along line B-B' of FIG. 11;

FIG. 14 is a schematic top view of a driving device of a detecting apparatus according to an embodiment of the present invention;

fig. 15 is a schematic cross-sectional view taken at the position of line C-C' of fig. 14.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the examples of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

In the prior art, a contact-type electrification mode is usually adopted to detect the LED, namely, probes are respectively contacted with the anode and the cathode of the LED, and then the LED is electrified to test the light emitting condition of the LED so as to judge whether the LED fails. For a very small device such as a micro or nano LED, the size of the electrode is very small, and the size of the probe is also required to be very small; when LEDs are used in the display field, hundreds of thousands or millions of LED devices are formed on a substrate. If a single probe is used for detection, the detection efficiency is very low. If the multi-probe detection is adopted, a large number of probes need to be manufactured in a unit area, and the positive probes and the negative probes alternately exist, so that the detection accuracy is seriously influenced if the probes are damaged.

Based on the problems in the prior art, the invention provides the LED detection equipment, which is characterized in that two electrodes arranged on the same side of a substrate of a driving device are respectively connected with the anode and the cathode of the LED to be detected to form coupling capacitors, and the first electrode and the second electrode are connected with an alternating current power supply, so that the LED is driven to be lightened in a mode of feeding power to the LED through the alternating current power supply. And then, the detection device is used for collecting the light emitting information of the LED to detect whether the LED emits light normally or not, so that the failed LED can be detected. The detection equipment provided by the invention can be used for testing LEDs in batches, and can be used for removing damaged devices before transferring the LEDs in a large quantity so as to improve the yield of the display module.

Fig. 1 isbase:Sub>A schematic diagram of an arrangement of an LED array, and fig. 2 isbase:Sub>A schematic diagram ofbase:Sub>A cross section atbase:Sub>A position ofbase:Sub>A tangent linebase:Sub>A-base:Sub>A' in fig. 1.

As will be understood with reference to fig. 1 and fig. 2, a substrate 10 is provided, and then a plurality of LED devices 20 are fabricated on the substrate 10 by using a semiconductor process, wherein the plurality of LED devices 20 are arranged in an array to form an LED array. The substrate 10 is used as a bearing substrate when the LED is manufactured, after the LED is manufactured, the LED needs to be transferred onto a driving substrate, a circuit for driving the LED to emit light is arranged on the driving substrate, and the LED device and the driving substrate are combined to form a display module.

As shown in fig. 2, the LED device cell includes an n-doped substrate 21, a p-doped substrate 22, a light emitting layer 23, an n-pole 24, a p-pole 25, and an insulating layer 26. Wherein the n-doped substrate 21 comprises, for example, nGaN; the p-doped substrate 22 comprises pGaN; the n-pole 24 and the p-pole 25 are metallic materials, such as copper; an np channel is formed in a light emitting layer of the LED, the light emitting color of the LED is related to the material of the light emitting layer, and the light emitting layer 23 is made of, for example, gaN. The insulating layer 26 may be made of silicon oxide, silicon nitride, or silicon dioxide. Optionally, as illustrated in fig. 2, a glue layer 30 is provided between the substrate 10 and the LED device 20, the glue layer 30 being used to adhere the LED device and also facilitating the complete separation of the LED device from the substrate 10 after the LED fabrication is completed. It should be noted that the detection apparatus provided by the present invention can be applied to a lighting test of an LED device having an n-pole and a p-pole located on the same side of the LED device, and fig. 2 is a simplified illustration of a structure of only one LED device.

Fig. 3 is a schematic diagram of a detection apparatus according to an embodiment of the present invention, and fig. 4 is a schematic top view of a driving device in the detection apparatus according to the embodiment of the present invention. Fig. 5 is a schematic diagram illustrating a corresponding relationship between a driving device and an LED array when the detection device provided by the embodiment of the present invention is used for detection. Fig. 6 is an equivalent circuit diagram of a detection device according to an embodiment of the present invention when detecting an LED. FIG. 7 is a single-cycle waveform of voltage between the first and second poles of a single LED device as it is sensed over time.

As shown in fig. 3, the LED detection apparatus includes a driving device 100, a power supply 200, and a detection device 300; the driving device 100 includes a substrate 110, and a first electrode 111 and a second electrode 112 located on the same side of the substrate 110. The power supply 200 is used for outputting an alternating voltage, that is, the power supply 200 is capable of generating a voltage waveform varying with time, and the power supply 200 includes a first terminal D1 and a second terminal D2; the detection device 300 is used for collecting the light emitting information of the LEDs and detecting the failed LEDs according to the light emitting information.

Fig. 3 also illustrates an LED array to be detected, before the LED array is transferred to the driving substrate, the substrate 10 is used to carry the LED array, and the LED array is placed in a detection device to detect LED devices in the LED array. In fig. 3, the detection means 300 is schematically shown on the side of the LED array remote from the driving means 100. I.e. the LED array is placed between the driving device 100 and the detecting device 300. When the LED device is tested, the first electrode 111 of the driving device 100 is electrically connected to the first terminal D1 of the power supply 200, and the second electrode 112 of the driving device 100 is electrically connected to the second terminal D2 of the power supply 200, and fig. 3 only shows the connection relationship between the first electrode 111 and the second electrode 113 and the power supply 200 in a simplified manner. In a direction f perpendicular to the substrate 110, a first pole of the LED is opposite to the first electrode 111, and a second pole of the LED is opposite to the second electrode 112. The first pole and the second pole of the LED are respectively a positive pole and a negative pole. In fig. 3, the n-pole 24 and the p-pole 25 of the LED device are illustrated as a first pole and a second pole, in this embodiment, the second terminal D2 of the power supply 200 is grounded, the first terminal D1 of the power supply 200 outputs a time-varying voltage signal, and the power supply 200 outputs an alternating current. In another embodiment, the first terminal D1 of the power supply 200 is grounded, and the second terminal D2 outputs a voltage signal varying with time, so that the power supply 200 outputs alternating current.

Fig. 4 schematically shows a structure of a driving device, as shown in fig. 4, in the driving device 100, the first electrode 111 includes at least two first sub-electrodes 111a, and the second electrode 112 includes at least two second sub-electrodes 112b; the first sub-electrodes 111a and the second sub-electrodes 112b are alternately arranged in a first direction x, which is parallel to the plane of the substrate 110. Optionally, the number of the first sub-electrodes 111a is equal to the number of the second sub-electrodes 112b. Three first sub-electrodes 111a and three second sub-electrodes 112b are illustrated in fig. 4. Also shown in fig. 4 is a simplified schematic of the power supply 200, the first sub-electrode 111a being connected to a first terminal D1 of the power supply 200, and the second sub-electrode 112b being connected to a second terminal D2 of the power supply 200. The present invention is not limited herein with respect to the specific implementation of the connection between the power source 200 and the electrodes of the driving device 100. Optionally, an exposed interface P is disposed on the driving device 100, the electrode (i.e., the first electrode 111 or the second electrode 112) is connected to the interface P through a metal trace disposed on the driving device 100, and then the interface P is connected to a terminal of the power supply 200, so that the power supply 200 supplies power to the electrode on the driving device 100.

Optionally, the first electrode 111 and the second electrode 112 are made of a metal material, such as any one or more of silver, magnesium, aluminum, titanium, molybdenum.

Fig. 5 illustrates the corresponding relationship between the driving device 100 and the LED array during the detection, and fig. 5 only illustrates the first sub-electrode 111a and the second sub-electrode 112b on the driving device 100 in a simplified manner, and does not illustrate the substrate and other structures. By designing the shape, size and arrangement of the first sub-electrodes 111a and the second sub-electrodes 112b on the driving apparatus 100, when detecting, one first sub-electrode 111a corresponds to the first poles of the plurality of LED devices, and one second sub-electrode 112b corresponds to the second poles of the plurality of LED devices, so that batch detection of the LED devices can be realized, instead of detecting only a single LED device at a time. Therefore, the detection efficiency of the LED can be greatly improved.

As shown in fig. 6, an equivalent circuit formed between one LED device and the power supply 200 when the LED array is detected is illustrated. Meanwhile, the testing principle of the detection device provided by the embodiment of the invention is understood by combining the voltage variation waveform illustrated in fig. 7.

In placing the LED array in the inspection apparatus, the LED array is aligned with the driving device 100, wherein the first electrode 111 is opposite to a first pole of the plurality of LEDs, and the second electrode 112 is opposite to a second pole of the plurality of LEDs. The first electrode 111 is connected to a first terminal of the power source 200, the second electrode 112 is connected to a second terminal of the power source 200, the power source 200 is turned on, and the power source 200 is controlled to output alternating current, that is, the first electrode 111 and the second electrode 112 are connected, one is connected to the positive pole of the power source 200, and the other is connected to the negative pole of the power source 200. As illustrated in fig. 3, a coupling capacitor C1 is formed between the first electrode 111 and the first pole of the LED, and a coupling capacitor C2 is formed between the second electrode 112 and the second pole of the LED. The alternating voltage signal may be passed through the capacitor in the form of a displacement current, so that energy is coupled from the first and second electrodes 111, 112 to the first and second poles of the LED, respectively. After the power is turned on, a certain coupling capacitance, such as a capacitance C3 and a capacitance C4 illustrated in fig. 3, is actually formed between the first electrode 111 and the second pole of the LED, or between the second electrode 112 and the first pole of the LED, and in the present invention, a current is injected into the LED device mainly by using the coupling capacitance C1 between the first electrode 111 and the first pole opposite thereto, and the coupling capacitance C2 between the second electrode 112 and the second pole opposite thereto, so as to detect the LED.

The power supply 200 of the present invention outputs an alternating current whose voltage varies with time. The voltage signal of the alternating voltage output by the power supply 200 is a sine wave or a square wave, the frequency is r, wherein r is more than or equal to 1Hz and less than or equal to 1000KHz. In one embodiment, the frequency r is set to 10KHz. When the alternating current frequency is too low or too high, the brightness of the LED during detection is influenced. Through carrying out reasonable setting to alternating current frequency, can guarantee that normal LED's luminous luminance is big enough when detecting LED to detection device 300 detects it.

Fig. 8 is a simulation test data table, in which waveforms indicate voltage waveforms output by the power supply 200 in the simulation test, currents indicate currents generated when the LEDs emit light in the simulation test, and a pitch indicates a distance between the driving device 100 and the LEDs, where ACF indicates anisotropic conductive adhesive. The distance ACF + water means that ACF is coated on a side of the driving device 100 close to the LED, and pure water is filled between the driving device 100 and the LED to be detected as a medium during detection, wherein the thickness of the ACF is not limited. In some embodiments, the ACF may not be used when testing the LED array. Pure water has a high relative dielectric constant, and can improve the capacitive coupling efficiency between the electrode of the driving device 100 and the anode and cathode of the LED. Optionally, the medium between the driving device 100 and the LED may also be a liquid with a higher dielectric constant, such as: glycerin, ester oils, and the like.

In some embodiments, when the LED is detected by using the detection apparatus provided by the embodiment of the present invention, no other material is filled between the driving device 100 and the LED, and only air is used as a medium.

In an embodiment, the LED detection apparatus further includes a fixture, and the fixture is configured to clamp and fix the driving device 100 and the LED to be detected, so as to control a distance between the driving device 100 and the LED to be detected to meet a test requirement, and ensure accuracy of detection. Meanwhile, the included angle can also enable a closed space to be formed between the driving device 100 and the LED to be detected during detection, so that a medium material can be injected between the driving device 100 and the LED to be detected.

The principle of the present invention will be briefly described below by taking the square wave signal as an example of the voltage signal output from the power supply 200. When the LED is detected, one detection period comprises a phase A, a phase B and a phase C. In the phase a, as the voltage output by the power supply 200 gradually increases, the capacitor C1 between the first electrode 111 and the first pole of the LED and the capacitor C2 between the second electrode 112 and the second pole of the LED gradually accumulate charges, and as the charges move, a voltage difference is generated between the first pole and the second pole of the LED, and when the voltage difference between the two poles reaches the turn-on voltage of the LED, the LED is turned on to emit light. In the phase B, the voltage output by the power supply 200 does not increase any more, and then the capacitor C1 and the capacitor C2 stop charging the first pole and the second pole of the LED, so that the current in the LED disappears, and the light emission of the LED gradually disappears. In the phase C, the voltage output by the power supply 200 decreases, the charges accumulated in the first capacitor C1 and the second capacitor C2 are released and reach charge neutralization after a long time, and at this time, the LED reversely leaks and does not emit light. That is, when the LED device has no abnormal performance, the LED emits light once in one period of the voltage signal provided by the power supply 200; when the LED device fails, the LED does not emit light or emits light with a brightness less than a design value in one period of the voltage signal supplied from the power supply 200. By detecting the light emission luminance of the LED, a failed LED can be detected.

Optionally, the output voltage and the pulse frequency of the power supply 200 are set according to the photoelectric characteristics of the LED to be detected, and when the detection device provided by the present invention is used to detect the LED, after the driving device 100 corresponds to the LED array, the electrodes in the driving device 100 correspond to a plurality of LEDs in a certain area range in the array. When a plurality of LEDs in the area are detected, the power supply 200 provides alternating current, the equivalent circuit can be controlled to execute a plurality of detection cycles, and the LEDs are lightened for multiple times to collect the light emitting information of the LEDs.

Fig. 9 is a graph of simulation test data of driving an LED by using an ac power supply, and as shown in fig. 9, the abscissa is time (μ s) and the ordinate is current (μ a), it can be seen that when the LED is powered by using the ac power supply, the LED can periodically generate current, that is, the LED can be repeatedly turned on, so that it can be verified that the LED can be repeatedly turned on by using the ac power supply, so as to collect light-emitting information of the LED for detection.

In an embodiment, the detecting device 300 includes a spectrometer, and the spectrometer is configured to collect the light-emitting brightness of the LED, and determine that the LED corresponding to the light-emitting brightness is a failed LED when the light-emitting brightness is smaller than a brightness threshold. Optionally, the brightness threshold is a design value of the light emitting brightness of the LED device, and when the LED does not emit light or the brightness is smaller than the brightness threshold, it indicates that the LED cannot meet the design requirement. Specifically, in a primary detection process, the spectrometer simultaneously obtains the luminance of a plurality of LEDs in a certain area range, when an LED with abnormal luminance is detected, the LED is a failed LED, the position of the failed LED is marked, and the failed LED is removed before the LED array is transferred, so that the yield of the display module obtained after the LED array and the driving substrate are combined is ensured. The brightness of the LED is used as the detection condition of the failed LED, and the detection mode is simple and easy to implement.

As illustrated in fig. 3, the light emitting direction e of the LED when detecting the LED is shown, in this embodiment, the driving device 100 drives the LED to emit light to detect the LED, wherein the light emitting direction e of the LED is a direction away from the driving device 100. In this embodiment, the substrate 10 carrying the LED array is a transparent substrate, such as a glass substrate. After the driving device 100 drives the LED to emit light, the light penetrates through the substrate 10 and is collected by the detection device 300, without penetrating through other structures, and the substrate 10 has high light transmittance. The amount of light received by the detection device 300 can be increased, in other words, a sufficient amount of light can be used as detection light, and the difference between the luminance when the LED fails and does not emit light and the luminance when the LED emits light normally is more significant, so that the detection accuracy can be increased.

The LED detection equipment provided by the invention comprises a driving device, a power supply and a detection device. The first electrode and the second electrode are arranged on the same side of the substrate of the driving device, when the LED is detected, the first pole of the LED is opposite to the first electrode, the second pole of the LED is opposite to the second electrode, the first electrode and the second electrode are powered through a power supply capable of providing alternating current, so that coupling capacitors are formed between the first pole and the first electrode and between the second pole and the second electrode, current is injected into the LED through the coupling capacitors, the LED is lightened in a non-contact driving mode, and the light emitting information of the LED is collected by the detection device to be detected. When the detection is carried out, the detection does not need to be in contact with the anode and the cathode of the LED, so that the damage to the anode and the cathode of the LED can be avoided. The detection equipment provided by the embodiment of the invention can be used for detecting the LEDs in batches, and the detection efficiency of the LEDs is improved.

In another embodiment, fig. 10 is another schematic diagram of the inspection apparatus provided in the embodiment of the present invention, as shown in fig. 10, before the LED array is transferred onto the driving substrate, the base 10 is used to carry the LED array, and the LED array is placed in the inspection apparatus to inspect LED devices in the LED array. Wherein the first electrode 111 of the driving device 100 is electrically connected to the first terminal D1 of the power supply 200, the second electrode 112 of the driving device 100 is electrically connected to the second terminal D2 of the power supply 200, and in a direction f perpendicular to the substrate 110, the first pole of the LED is opposite to the first electrode 111, and the second pole of the LED is opposite to the second electrode 112. Wherein, the detecting device 300 is located on a side of the driving device 100 far away from the LED array. In this embodiment, the light emission direction e of the LED is a direction toward the driving device 100. That is, after the driving device 100 drives the LED to emit light, the light penetrates through the driving device 100 and is collected by the detection device 300. In this embodiment, the substrate 110 of the driving device 100 is required to be a transparent substrate, and optionally, the substrate 110 is a glass substrate.

In an embodiment, fig. 11 is another schematic top view of a driving device in a detection apparatus provided in an embodiment of the present invention. As shown in fig. 11, the first sub-electrodes 111a are connected to each other at the same end by the first connection portion 31 in a second direction y parallel to the plane of the substrate 110 and crossing the first direction x; the first electrode 111 is a comb-teeth-shaped electrode as a whole, and the first sub-electrode 111a is a comb tooth of the first electrode 111. In the second direction y, the second sub-electrodes 112b are connected to each other at the same end through the second connecting portion 32, so that the second electrodes 112 are also comb-teeth-shaped electrodes, and the second sub-electrodes 112b are comb teeth of the second electrodes 112. The first sub-electrode 111a is positioned between adjacent comb teeth of the second electrode 112, and the second sub-electrode 112b is positioned between adjacent comb teeth of the first electrode 111, so that it is possible to simultaneously drive a plurality of LED devices in the LED array using the first and second electrodes. The plurality of first sub-electrodes are connected with each other, and can provide voltage signals to all the first sub-electrodes through one interface, and similarly, the voltage signals can be provided to all the second sub-electrodes through one interface, so that the wiring in the driving device can be simplified, and the connection mode with the power supply can be simplified.

Fig. 12 is a schematic cross-sectional view taken along line B-B' of fig. 11. As shown in fig. 12, the first connection portion 31 and the first sub-electrode 111a are located at the same layer, the second connection portion 32 and the second sub-electrode 112b are located at the same layer, and the first sub-electrode 111a and the second sub-electrode 112b are located at the same layer. That is, the first electrode 111 and the second electrode 112 are located at the same layer, so that the first electrode and the second electrode can be fabricated in the same process.

In another embodiment, FIG. 13 is another schematic cross-sectional view taken at line B-B' of FIG. 11. As shown in fig. 13, the driving apparatus further includes a protection layer 140, and the protection layer 140 is located on the sides of the first sub-electrode 111a and the second sub-electrode 112b far from the substrate 110. The protective layer 140 serves to protect the electrodes from corrosion that affects the performance of the driving device.

Optionally, the thickness of the protection layer 140 is d, wherein d is greater than or equal to 10nm and less than or equal to 1 μm. The thickness of the protective layer 140 does not need to be set too large while the protective effect on the electrode is achieved, so that the influence on the size of the coupling capacitance formed between the electrode and the anode and cathode of the LED during the detection of the LED and the influence on the detection accuracy of the detection equipment are avoided.

Optionally, the material of the protection layer 140 includes any one of silicon oxide, silicon nitride, and silicon oxynitride.

In another embodiment, fig. 14 is another schematic top view of a driving device in a detection apparatus provided in an embodiment of the present invention. Fig. 15 is a schematic cross-sectional view taken at the position of line C-C' of fig. 14. As shown in fig. 14 and 15, the second electrode 112 further includes a third connection portion 33, the third connection portion 33 extends along the first direction x, the third connection portion 33 is electrically connected to the second sub-electrode 112a, the third connection portion 33 is located at a different layer from the first sub-electrode 111a, and the third connection portion 33 overlaps the first sub-electrode 111a in a direction f perpendicular to the substrate 110.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. The LED detection equipment is characterized by comprising a driving device, a power supply and a detection device; wherein the content of the first and second substances,

the power supply is used for outputting alternating-current voltage and comprises a first terminal and a second terminal;

the driving device comprises a substrate, a first electrode and a second electrode which are positioned on the same side of the substrate; when the LED is detected, the first electrode is electrically connected to the first terminal, the second electrode is electrically connected to the second terminal, and in the direction perpendicular to the substrate, the first pole of the LED is opposite to the first electrode, and the second pole of the LED is opposite to the second electrode;

the detection device is used for collecting the luminous information of the LED and detecting the failed LED according to the luminous information.

2. The LED detection apparatus of claim 1,

the first electrode comprises at least two first sub-electrodes, and the second electrode comprises at least two second sub-electrodes;

in a first direction, the first sub-electrodes and the second sub-electrodes are alternately arranged, and the first direction is parallel to the plane of the substrate.

3. LED detection device according to claim 2,

in a second direction, the first sub-electrodes are connected with each other at the same end through a first connecting part, and the second direction is parallel to the plane of the substrate and is crossed with the first direction;

in the second direction, the second sub-electrodes are connected to each other at the same end by a second connection portion.

4. The LED detection apparatus of claim 3,

the first connecting portion, the first sub-electrode, the second connecting portion and the second sub-electrode are all located on the same layer.

5. LED detection device according to claim 3,

the second electrode further comprises a third connecting portion extending along the first direction, the third connecting portion is electrically connected with the second sub-electrode, the third connecting portion and the first sub-electrode are located on different layers, and the third connecting portion and the first sub-electrode are overlapped in a direction perpendicular to the substrate.

6. The LED detection apparatus of claim 4,

the driving device further comprises a protective layer, and the protective layer is located on one side, far away from the substrate, of the first sub-electrode and the second sub-electrode.

7. The LED detection apparatus of claim 6,

the thickness of the protective layer is d, wherein d is more than or equal to 10nm and less than or equal to 1 mu m.

8. The LED detection apparatus of claim 1,

the luminous information of the LED comprises the luminous brightness of the LED;

the detection device comprises a spectrometer, wherein the spectrometer is used for collecting the brightness of the LED, and when the brightness is smaller than a brightness threshold value, the LED corresponding to the brightness is judged to be a failure LED.

9. The LED detection apparatus of claim 1,

the voltage signal of the alternating voltage is a sine wave or a square wave, the frequency is r, and r is more than or equal to 1Hz and less than or equal to 1000KHz.

10. The LED detection apparatus of claim 1,

the LED detection equipment further comprises a clamp, and the clamp is used for clamping and fixing the driving device and the LED to be detected.

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