CN115436018A - Optical detection system - Google Patents
Optical detection system Download PDFInfo
- Publication number
- CN115436018A CN115436018A CN202210407933.7A CN202210407933A CN115436018A CN 115436018 A CN115436018 A CN 115436018A CN 202210407933 A CN202210407933 A CN 202210407933A CN 115436018 A CN115436018 A CN 115436018A
- Authority
- CN
- China
- Prior art keywords
- light source
- optical
- image
- optical device
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The present application discloses an optical detection system; the optical detection system is used for detecting at least one optical device to be detected and comprises a material tray, a displacement mechanism, an incident visual angle setting structure, at least one collimation light source module and an image transmission and control module. The tray is used for carrying the at least one optical device to be tested. The displacement mechanism is connected with the material tray to enable the material tray to generate displacement so as to move the at least one optical device to be detected. At least one collimation light source module is arranged on the incident visual angle arrangement structure to emit a light to irradiate the at least one optical device to be measured. And the image transmission and control module is used for transmitting the light rays from the collimation light source modules to form a test image after passing through the at least one optical device to be tested. The invention can achieve the beneficial effect of efficiently carrying out batch detection on stray light or/and optical distortion of at least one optical device to be detected on the material tray.
Description
Technical Field
The present invention relates to an optical detection system, and more particularly, to an optical detection system for detecting optical properties of stray light and optical distortion of an optical device.
Background
When the lens and the image module are used in a strong light environment, stray light is easy to occur, and the risk of misjudgment of an image identification system is caused. Such as a driving auxiliary system, which is affected by stray light and may cause a driving safety hazard when misjudgment occurs. Therefore, a stray light detection system is needed for controlling the quality of stray light of the lens or the image module to avoid related damages. The optical distortion will cause the misjudgment of the spatial positioning, and in order to eliminate the above problems, the distortion effect is usually eliminated by performing the post-processing of the image according to the optical distortion measurement result, so an optical distortion measurement system is required.
In ISO9358, there are defined stray light spread functions (GSF) and related measurement systems and methods that measure the stray light intensity distribution of the lens at different fields of view at a single azimuth angle. For example, taiwan patent No. I712778 is an application of ISO9358, in which a plurality of shafts and light sources are provided to achieve the field of view incident angle transformation. And has a rotating member to achieve the change of azimuth. However, a single measurement requires a continuous change in field position or angle of incidence, while maintaining a fixed azimuth. The stray light distribution at different azimuths must be measured several times.
FIG. 1 is a schematic diagram of a portion of a conventional optical distortion measurement system for detecting a lens. As shown in fig. 1, the conventional optical distortion measuring system 100 includes a target 120 and a module 110 to be measured. In the conventional optical distortion measurement system 100, the target 120 of the array dot pattern or the checkerboard pattern is photographed by the image module 110 to be measured, an image and an image distortion thereof are obtained, and the optical distortion of the image module 110 to be measured is calculated by the image distortion. However, as shown in fig. 1, for the object to be measured, such as a large field lens or a fisheye lens with an angle of view fv exceeding 150 degrees, it is difficult to erect a target in the optical distortion measuring system 100 to cover the field range, so that the optical distortion of the large-angle area of the image module 110 to be measured is difficult to measure.
At present, there are known patents to improve the above-mentioned large-angle view measurement problem, for example, chinese patent publication No. CN106404352B which changes the tilt angle of the distortion test target, or chinese patent publication No. CN102706536B which changes the rotation angle of the object stage to be measured to achieve the large-angle view distortion measurement, however, like the above-mentioned stray light measurement system, the view angle must be continuously changed for multiple measurements, which is not favorable for the measurement efficiency of the large-scale detection system.
Disclosure of Invention
An embodiment of the present invention provides an optical inspection system.
According to an embodiment of the present invention, an optical inspection system for inspecting at least one optical device to be inspected includes a tray, a displacement mechanism, an incident angle setting structure, at least one collimated light source module, and an image transmission and control module. The tray is used for carrying the at least one optical device to be tested. The displacement mechanism is connected to the material tray to enable the material tray to generate displacement so as to move the at least one optical device to be measured. At least one collimation light source module is arranged on the incident visual angle arrangement structure to emit a light to irradiate the at least one optical device to be measured. And the image transmission and control module is used for transmitting the light rays from the collimation light source modules to form a test image after passing through the at least one optical device to be tested.
In one embodiment, the optical inspection system further comprises a computer. The computer is used for receiving the test image and determining the optical properties of stray light and optical distortion of the at least one optical device to be tested according to the test image. The tray is used for carrying a plurality of optical devices to be tested. The number of the at least one collimating light source module is multiple, and the collimating light source modules are arranged at different positions of the incident visual angle setting structure and respectively emit light rays at different incident angles so as to irradiate the optical device to be tested.
In one embodiment, the at least one optical device under test includes a lens. The image transmission and control module is arranged below the material tray and comprises an image sensor and a movable adjusting shaft, the image sensor is connected with the movable adjusting shaft and used for adjusting the image sensor to a proper position, and the image sensor is used for obtaining the test image according to the light rays from the collimation light source modules and then transmitting the test image to the computer.
In one embodiment, the movable adjusting shaft is a Z-axis adjusting base for adjusting the imaging position of the lens. In one embodiment, the at least one optical device under test includes an image module for obtaining the test image according to the light from the collimated light source modules, and the image transmission and control module includes an image controller for receiving the test image and transmitting the test image to the computer. In one embodiment, the image controller is connected to the image module on the tray for activating or controlling the image module.
In an embodiment, the light source intensities of the light rays emitted by the collimating light source modules are different, so as to simultaneously detect the stray light intensities or the stray light distribution conditions of a plurality of different incident angles and orientations of the at least one to-be-detected optical device. In one embodiment, an optical axis of one of the collimated light source modules is coaxial with an optical axis of the at least one optical device to be measured, and at least one other collimated light source module of the collimated light source modules is installed at a designated position and a view field angle according to an incident angle required for detecting stray light and optical distortion.
In one embodiment, at least one of the collimated light source modules comprises a housing, a light source and a collimating lens set. The light source is arranged on the shell and used for generating the light. The collimating lens group is arranged on the shell, so that the light rays form quasi-parallel light rays after passing through the collimating lens group. In one embodiment, at least one of the collimated light source modules comprises a housing, a light source, a target and a collimating lens. The light source is arranged on the shell and used for generating the light. The target is arranged on the shell and is provided with a detection drawing surface for forming a patterned light pattern according to the detection drawing surface after the light rays pass through the target. The collimating lens group is arranged on the shell, so that the light rays form quasi-parallel light rays after passing through the collimating lens group.
In one embodiment, at least one of the collimated light source modules further comprises a diaphragm disposed between the light source and the collimating lens set. In one embodiment, the Aperture comprises an adjustable Aperture (Aperture) for changing the illumination angle of the at least one of the collimated light source modules.
As described above, according to the optical inspection system of an embodiment of the present invention, at least one optical device to be inspected is placed on the tray. The displacement mechanism is connected with the material tray to displace the material tray so as to move the at least one optical device to be detected, thereby achieving the beneficial effect of efficiently carrying out batch detection on stray light or/and optical distortion on the at least one optical device to be detected on the material tray. According to an embodiment of the present invention, the optical detection system can achieve the result of detecting the stray light of the optical device under test in multiple axial directions and multiple incident angles simultaneously, and the measurement time can be shortened. In addition, because the collimation light source module of the optical detection system can be arranged at a large-angle position of the incident visual angle arrangement structure, the measurement of the optical distortion of a large-angle visual field can be achieved.
Drawings
FIG. 1 is a schematic diagram of a conventional optical distortion measurement system for detecting a lens.
FIG. 2 is a schematic diagram of an optical inspection system for inspecting lenses according to an embodiment of the invention.
FIG. 3 is a schematic diagram of an optical inspection system for inspecting an image module according to an embodiment of the present invention.
Fig. 4A is a schematic diagram of a collimated light source module according to an embodiment of the invention.
Fig. 4B is a schematic view of a collimated light source module according to another embodiment of the invention.
Fig. 5A is a perspective view of a part of a collimated light source module according to an embodiment of the invention.
Fig. 5B is a schematic diagram of a top surface of the incident view angle setting structure of the collimated light source module in the embodiment of fig. 5A.
Fig. 6A is a perspective view of a part of a collimated light source module according to an embodiment of the invention.
Fig. 6B is a schematic side view of the incident view angle setting structure of the collimated light source module in the embodiment of fig. 6A.
Fig. 6C is a perspective view of a part of the collimated light source module according to an embodiment of the invention.
Reference numerals
100: optical distortion measuring system
110: image module to be tested
120: target
200a: optical detection system
200b: optical detection system
210: charging tray
220: displacement mechanism
230: image transmission module
231: image sensor
232: movable adjusting shaft
233: image transmission and controller
240: collimation light source module
240a: collimating light source module
240b: collimating light source module
241: light source
242: target
243: collimating lens group
245: aperture of light
249: shell body
250: incident visual angle setting structure
251: cambered surface track
260: computer with a memory card
290: optical device to be tested
291: lens barrel
292: image module
Detailed Description
An embodiment of the present invention provides an optical detection system suitable for detecting an optical device 290 to be detected. The DUT 290 may be, for example, a lens 291 or an image module 292.
FIG. 2 is a schematic diagram of an optical inspection system for inspecting a lens according to an embodiment of the invention. As shown in fig. 2, the optical inspection system 200a includes a tray 210, a displacement mechanism 220, an image transmission module 230, at least one collimated light source module 240, an incident angle setting structure 250, and a computer 260. The embodiment includes a plurality of collimated light source modules 240, and the collimated light source modules 240 are disposed at different positions of the incident angle setting structure 250 and can emit a light beam at different incident angles to illuminate the optical device 290 to be tested. The image transmission module 230 is used for transmitting the light from the collimated light source modules 240 to the computer 260 through a test image Im formed by the optical device 290 to be tested. The computer 260 determines the optical properties of stray light and optical distortion of the optical device 290 under test based on the test image.
In the embodiment of fig. 2, the optical device to be tested 290 is a lens 291, and the optical inspection system 200a is suitable for inspecting the lens 291. The image transmission module 230 includes an image sensor 231 and a movable adjusting shaft 232, the image sensor 231 is connected to the movable adjusting shaft 232, the movable adjusting shaft 232 is used for adjusting the image sensor 231 to a proper position, the image sensor 231 obtains a test image Im according to the light from the collimated light source modules 240, and then transmits the test image Im to the computer 260. Finally, the optical properties of the stray light and optical distortion of the lens 291 are measured by the computer 260 and software algorithms (not shown).
In one embodiment, in the case where the optical device 290 to be tested is a lens 291, the image transmission module 230 is disposed under the tray 210, and the movable adjustment shaft 232 of the image transmission module 230 is a Z-axis adjustment seat capable of sensing stray light and adjusting the imaging position of the lens, and the image sensor 231 is used as an image receiving device for optical distortion.
The tray 210 can carry more than one lens 291. The displacement mechanism 220 is connected to the tray 210, and can be used to move the lens 291 so that the lenses 291 can be moved to the position required for detecting stray light and optical distortion, thereby achieving the advantageous effect of sequentially performing batch detection of stray light on the lenses 291 on the tray 210 in one batch.
In the present embodiment, the stray light spread function (GSF) of the lens 291 under test can be detected under the specification conforming to ISO 9358. In one embodiment, when there are a plurality of collimated light source modules 240, the light source intensities of the collimated light source modules 240 can be individually adjusted and controlled to simultaneously detect the stray light intensities or the stray light distribution of the lens 291 to be tested at different incident angles and orientations. Meanwhile, when the collimated light source module 240b including the target 242 is adopted, the target 242 includes a pattern which can be used as an optical distortion test target at the same time, and the optical distortion amount can be calculated according to a predetermined installation view field angle.
FIG. 3 is a schematic diagram of an optical inspection system for inspecting an image module according to an embodiment of the present invention. The embodiment of fig. 3 is similar to the embodiment of fig. 2, and therefore like elements are given like reference numerals and their associated description is omitted. In the embodiment of FIG. 3, the DUT 290 is a vision module 292, and the optical inspection system 200b is adapted to inspect the vision module 292. The image transmission module 230 includes an image transmission and control unit 233. The image module 292 obtains the test image Im according to the light from the collimated light source modules 240, and then transmits the test image Im to the computer 260. Finally, the optical properties of stray light and optical distortion of the image module 292 are measured by the computer 260 and software algorithms (not shown).
In one embodiment, in the case where the optical device 290 under test is an image module 292, the image transfer module 230 is disposed under the tray 210, and the image transfer and control unit 233 thereof can be connected to the image module 292 and respectively activate and control the image module 292 on the tray 210.
In the present embodiment, the stray light spread function (GSF) of the image module 292 under test can be detected under the standard conforming to ISO 9358. In one embodiment, when there are a plurality of collimated light source modules 240, the light source intensities of the collimated light source modules 240 can be individually controlled to simultaneously detect the stray light intensities or the stray light distribution at a plurality of different viewing angles and orientations of the to-be-detected image module 292. Meanwhile, when the collimated light source module 240b including the target 242 is adopted, the target 242 includes a pattern which can be used as an optical distortion test target at the same time, and the optical distortion amount can be calculated according to the predetermined installation view field angle, so that the optical detection system can have the functions of stray light and optical distortion detection.
Fig. 4A is a schematic diagram of a collimated light source module according to an embodiment of the invention. As shown in FIG. 4A, the collimated light source module 240a includes a housing 249; and a light source 241 and a collimating lens assembly 243 disposed in the housing 249. The light source 241 is used for generating a light. The light from the light source 241 is collimated by the collimating lens assembly 243 to form quasi-parallel light, which can then be captured by the image sensor 231 or the image module 292. Preferably, an aperture 245 may be further included in the housing 249. In one embodiment, the Aperture 245 is disposed between the light source 241 and the collimating lens group 243, and the Aperture 245 is disposed at a focus of the collimating lens group 243, and the Aperture 245 includes an adjustable Aperture (Aperture) for changing a light-emitting angle of the collimated light source module 240a, so as to adjust the angle of view for matching with various stray light detection requirements of the lens or image module under test. Meanwhile, the optical distortion detection requirements of different lenses to be detected or image modules can be matched conveniently.
Fig. 4B is a schematic diagram of a collimated light source module according to another embodiment of the invention. Referring to fig. 4B, the collimated light source module 240B includes a housing 249; and a light source 241, a target 242 and a collimating lens set 243 disposed in the housing 249. In this embodiment, the collimating lens set 243 can be disposed between the light source 241 and the target 242. The light source 241 is used for generating a light. The target 242 has a detection drawing (not shown). The light from the light source 241 is collimated by the collimating lens group 243 to form a quasi-parallel light, which passes through the target 242 and forms a parallel patterned light pattern I3 according to the detection image, and then the parallel patterned light pattern I3 can be obtained by the image sensor 231 or the image module 292. Preferably, an aperture 245 may be further included in the housing 249. The aperture 245 is disposed between the light source 241 and the collimating lens group 243. In one embodiment, the target 242 may also be disposed between the light source 241 and the collimating lens group 243.
In one embodiment, the collimated light source module 240a or the collimated light source module 240b can be a telescope collimated light source module. In one embodiment, the collimating lens assembly 243 is a replaceable lens assembly for changing the light-emitting angle of the collimated light source module 240a or the collimated light source module 240b, so as to adjust various stray light detection requirements of the lens 291 or the image 292. Meanwhile, the optical distortion detection requirements of different lenses 291 or image modules 292 to be detected can be matched conveniently. In one embodiment, the optical inspection system may include at least one collimated light source module 240a and at least one collimated light source module 240b to meet different testing requirements.
In one embodiment, the collimating lens assembly 243 is an adjustable lens assembly for changing the light-emitting angle or optical path of the collimating light source module of the telescope, so as to adjust various stray light detection requirements associated with the lens 291 to be tested or the image module 292. Meanwhile, the optical distortion detection requirements of different lenses 291 or image modules 292 to be detected can be matched conveniently.
In one embodiment, the stray light at multiple axial directions and multiple incident angles of the optical device 290 to be measured can be detected simultaneously, and the measurement time can be shortened without rotating the field angle or the object stage for the same optical device 290 to be measured. In addition, since the collimated light source module 240 can be disposed at a large angle position of the incident visual angle setting structure 250, for example, an angle of 100 to 180 degrees, preferably an angle of 100 to 150 degrees, the measurement of the optical distortion of the large angular field of view can also be achieved.
Fig. 5A is a perspective view of a part of a collimated light source module according to an embodiment of the invention. Fig. 5B is a schematic diagram of a top surface of the incident view angle setting structure of the collimated light source module in the embodiment of fig. 5A. The incident view angle setting structure 250 may include at least one arc track 251, and the arc track 251 is formed with an arc groove penetrating the upper and lower surfaces. The collimated light source modules 240 are disposed on the arc tracks 251, and can move along the arc grooves of the arc tracks 251 to be disposed at different positions of the arc tracks 250, so as to obtain test images Im at different viewing angles. In one embodiment, the displacement mechanism 220 is an XY translation stage displacement mechanism capable of performing displacements in X-direction and Y-direction planes. The tray 210 can carry more than one optical device 290 to be tested, and the tray 210 is placed on the XY translation stage displacement mechanism to perform batch testing of the same type of optical devices 290 to be tested.
In an embodiment, the arc groove of the arc track 251 is a continuous groove, which facilitates adjusting the position of the collimated light source module 240 in the continuous arc groove to match with the incident view angle required by detecting various stray lights of the optical device 290 to be detected. In addition, in an embodiment, the optical detection system employs the collimated light source module 240b, and the target 242 has a pattern as an optical distortion test target, which is convenient for adjusting the optical distortion detection requirement in a large-angle field of view. In addition, in the embodiment of fig. 5B, since the light passes through the upper and lower surfaces of the arc track 251, the optical axis of the collimated light source module 240 is perpendicular to the continuously adjustable arc groove, i.e. the optical axis is parallel to the normal of the surface of the arc groove.
Fig. 6A is a perspective view of a part of a collimated light source module according to an embodiment of the invention. Fig. 6B is a schematic side view of the incident view angle setting structure of the collimated light source module in the embodiment of fig. 6A. The embodiment of fig. 6A is similar to the embodiment of fig. 5A, and therefore like elements are given like reference numerals and their associated description is omitted. The incident view angle setting structure 250 may include at least one arc track 251, and the arc track 251 is formed with arc grooves penetrating left and right side surfaces. The collimated light source modules 240 are disposed on the arc tracks 251 and can move along the arc grooves of the arc tracks 251. In addition, in the embodiment of fig. 6B, since the light axis penetrates through the left and right side surfaces of the arc track 251, the optical axis of the collimated light source module 240 is perpendicular to the continuously adjustable arc groove, that is, the optical axis is perpendicular to the normal of the surface of the arc groove.
Fig. 6C is a perspective view of a part of the collimated light source module according to an embodiment of the invention. The embodiment of fig. 6C is similar to the embodiment of fig. 6A, and therefore like elements are given like reference numerals and their associated description is omitted. In one embodiment, the displacement mechanism 220 is a rotating disk displacement mechanism capable of rotating in either a clockwise or counterclockwise direction. The tray 210 can carry more than one (including) optical devices 290 to be tested, and the tray 210 is placed on the rotating disk displacement mechanism, so that batch detection of the same type of optical devices 290 to be tested can be performed.
In an embodiment, the arc groove of the arc track 251 is a continuous groove, so that the collimated light source module 240 has a continuously adjustable installation position, and the distance between the collimated light source module 240 and the optical device 290 to be detected can be adjusted, so that the outgoing light beam of the collimated light source module 240 can fully cover the Clear Aperture (Clear Aperture) of the optical device 290 to be detected, thereby satisfying various different stray light detection requirements.
In an embodiment, the displacement mechanism 220 may be used to transfer the first optical device to be tested 290 and the second optical device to be tested 290, so that the first optical device to be tested 290 may be transferred to a stray light and optical distortion detection required position, and at the same time, the second optical device to be tested 290 may be selectively moved to other detection areas (for example, stray light and optical distortion detection with different wavelengths, or other detection areas other than stray light and optical distortion), so as to achieve a batch detection requirement of multiple stray light tests at one time.
The light from the collimated light source module 240b passes through the target 242, the target 242 is engraved with a pattern to be analyzed, and then the light is projected to the image sensor 231 or the image module 292 through the optical device 290 to be tested. The image sensor 231 or the image module 292 obtains an image of the pattern including the target 242, and uses a computer and software algorithms (not shown) to obtain the image quality. In one embodiment, the plurality of collimated light source modules 240b can be installed to measure the image quality of different view angles (FOV) at the same time, and the collimated light source module 240b can also move along the arc of the arc track 251 to measure the image quality of another different view angle as required.
In one embodiment, the target 242 of the collimated light source module 240b has a dot pattern (Chart) to generate a Point Spread Function (PSF) for calculating a spatial frequency response function (SFR) of the optical device 290 to be tested, so as to achieve a batch composite test requirement of having stray light, optical distortion detection and spatial frequency detection at the same time. In one embodiment, the target 242 of the collimated light source module 240b has a linear or cross-shaped pattern (Chart), so that a Line Spread Function (LSF) is generated, which can be used to calculate a spatial frequency response function (SFR) of the optical device 290 to be tested, thereby meeting the batch composite detection requirement of both stray light, optical distortion detection and spatial frequency detection. In one embodiment, the target 242 of the collimated light source module 240b has a light and dark edge pattern (Chart), so that an Edge Spread Function (ESF) is generated, which can be used to calculate a spatial frequency response function (SFR) of the optical device 290 to be tested, thereby meeting the batch composite detection requirement of stray light, optical distortion detection and spatial frequency detection.
In one embodiment, the optical inspection system 200a or 200b has a plurality of collimated light source modules 240, wherein an optical axis of one of the collimated light source modules 240 is coaxial with an optical axis of the optical device 290 to be inspected (as shown in fig. 2, the collimated light source module 240 and the lens 291 located in the middle are coaxial), and at least one other collimated light source module 240 can be installed at a designated position and view angle according to an incident angle required for stray light and optical distortion inspection, so that the plurality of collimated light source modules 240 can be simultaneously turned on or turned on, and can be used for calculating the optical distortion of the optical device 290 to achieve a batch composite inspection requirement of stray light inspection and optical distortion inspection.
In one embodiment, the optical inspection system 200a or 200b has a plurality of collimated light source modules 240b, so that the collimated light source modules 240b can simultaneously detect stray light at a plurality of incident angles in a plurality of axial directions of an optical device 290 (which may be a lens 291 or an image module 292) to be inspected, and meanwhile, the target 242 of the collimated light source module 240b also includes a pattern as an optical distortion test target, so that the optical distortion can be calculated according to a predetermined installation view angle, so that the optical inspection system 200a or 200b can have the functions of stray light detection and optical distortion detection. In addition, batch detection of the same type of optical devices 290 to be detected can be performed by matching with the trays 210.
In one embodiment, the optical inspection system 200a or 200b may further comprise a cooperative control device (including but not limited to PC/PLC and other programmable logic controllers, etc.) for processing and controlling the brightness of the plurality of collimated light source modules 240 and the exposure time of the image sensor 231 or the image module 292 in parallel, so as to generate a combination of stray light and brightness variation under the requirement of optical distortion inspection for measuring multiple incident angles at one time.
According to the prior art, the switching between the shaft and the rotating member needs to be repeated during the measurement process, which consumes measurement time and is difficult to satisfy the requirement of rapid measurement in the current market. And the optical device 290 to be tested can only be loaded when being erected for a single time, and is not easy to switch rapidly, so that the requirement of mass detection in mass production in the existing market is difficult to meet. However, according to an embodiment of the present invention, the optical inspection system 200a or 200b can achieve the advantageous effect of sequentially performing batch inspection of stray light and/or optical distortion on the plurality of lenses 291 on the tray 210 in one batch.
Claims (12)
1. An optical inspection system for inspecting at least one optical device to be inspected, comprising:
a tray for carrying the at least one optical device to be tested;
the displacement mechanism is connected with the material tray and enables the material tray to generate displacement so as to move the at least one optical device to be detected;
an incident visual angle setting structure;
the at least one collimation light source module is arranged on the incident visual angle arrangement structure and used for emitting a light ray to irradiate the at least one optical device to be detected; and
and the image transmission and control module is used for transmitting the light rays from the plurality of collimation light source modules to form a test image after passing through the at least one optical device to be tested.
2. The optical inspection system of claim 1, further comprising a computer, wherein,
the computer is used for receiving the test image and determining the optical properties of stray light and optical distortion of the at least one optical device to be tested according to the test image;
the tray is used for carrying a plurality of optical devices to be tested;
the number of the at least one collimation light source module is multiple, and the multiple collimation light source modules are arranged at different positions of the incident visual angle setting structure and respectively emit light rays at different incident angles so as to irradiate the optical device to be tested.
3. The optical inspection system of claim 2,
the at least one optical device to be measured comprises a lens,
the image transmission and control module is arranged below the tray,
the image transmission and control module includes an image sensor and a movable adjustment shaft,
the image sensor is connected to the movable adjusting shaft, the movable adjusting shaft is used for adjusting the image sensor to a proper position, and
the image sensor is used for obtaining the test image according to the light rays from the plurality of collimated light source modules and then transmitting the test image to the computer.
4. The optical inspection system of claim 3,
the movable adjusting shaft is a Z-axis adjusting seat and is used for adjusting the imaging position of the lens.
5. The optical inspection system of claim 2,
the at least one optical device to be tested comprises an image module for obtaining the test image according to the light from the plurality of collimated light source modules, and
the image transmission and control module comprises an image controller, and the image controller receives the test image and transmits the test image to the computer.
6. The optical inspection system of claim 5,
the image controller is connected with the image module on the material tray and used for starting or controlling the image module.
7. The optical detection system of any one of claims 2 to 6,
the light source intensities of the light rays emitted by the plurality of collimation light source modules are different, and the light source modules are used for simultaneously detecting the stray light intensity or the stray light distribution situation of a plurality of different incident visual angles and directions of the at least one optical device to be detected.
8. The optical detection system of any one of claims 2 to 6,
the optical axis of one of the plurality of collimated light source modules is coaxial with the optical axis of at least one optical device to be measured, and
and at least one other collimation light source module of the plurality of collimation light source modules is arranged at a specified direction and a view field angle according to the incidence angle of the stray light and the optical distortion detection requirement.
9. The optical inspection system of claim 2, wherein at least one of the plurality of collimated light source modules comprises:
a housing;
the light source is arranged on the shell and used for generating the light;
and the collimating lens group is arranged on the shell, so that the light rays pass through the collimating lens group to form quasi-parallel light rays.
10. The optical inspection system of claim 2 wherein at least one of the plurality of collimated light source modules comprises:
a housing;
the light source is arranged on the shell and used for generating the light;
the target is arranged in the shell and is provided with a detection drawing surface, and the light beam forms a patterned light pattern according to the detection drawing surface after passing through the target; and
and the collimating lens group is arranged on the shell, so that the light rays pass through the collimating lens group to form quasi-parallel light rays.
11. The optical inspection system of claim 9 or 10, wherein at least one of the plurality of collimated light source modules further comprises:
an aperture is disposed between the light source and the collimating lens group.
12. The optical inspection system of claim 11 wherein the aperture comprises an adjustable aperture for changing the illumination angle of view of at least one of the plurality of collimated light source modules.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW110120439 | 2021-06-04 | ||
| TW110120439 | 2021-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115436018A true CN115436018A (en) | 2022-12-06 |
Family
ID=84241174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210407933.7A Pending CN115436018A (en) | 2021-06-04 | 2022-04-19 | Optical detection system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115436018A (en) |
| TW (1) | TW202248615A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115773865A (en) * | 2022-12-16 | 2023-03-10 | 江苏第三代半导体研究院有限公司 | Optical test equipment and test method |
-
2022
- 2022-04-08 TW TW111113353A patent/TW202248615A/en unknown
- 2022-04-19 CN CN202210407933.7A patent/CN115436018A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115773865A (en) * | 2022-12-16 | 2023-03-10 | 江苏第三代半导体研究院有限公司 | Optical test equipment and test method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202248615A (en) | 2022-12-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20210026000A1 (en) | Methods and Systems for LIDAR Optics Alignment | |
| EP2800946B1 (en) | Arrangement for optical measurements and related method | |
| US9243900B2 (en) | Apparatus and method for measuring a three dimensional shape | |
| US7782449B2 (en) | Method and apparatus for analyzing an optical device | |
| KR101578496B1 (en) | Method for determining the tilt of an image sensor | |
| US20040109170A1 (en) | Confocal distance sensor | |
| WO2015151557A1 (en) | Defect inspection device and inspection method | |
| CN102037309A (en) | Optical inspection probe | |
| CA2675028A1 (en) | Method and apparatus for the examination of an object | |
| US6987571B2 (en) | Sensor head, luminance distribution measurement apparatus having the sensor head, and unevenness inspection/evaluation apparatus | |
| US20170333953A1 (en) | Method and system for inspecting a manufactured part at an inspection station | |
| CA2334225C (en) | Method and device for opto-electrical acquisition of shapes by axial illumination | |
| JP5807772B2 (en) | Defect detection apparatus and method | |
| KR101652356B1 (en) | optical apparatus for examining pattern image of semiconductor device | |
| CN115436018A (en) | Optical detection system | |
| KR101652355B1 (en) | optical apparatus for examining pattern image of semiconductor wafer | |
| JP2014240766A (en) | Surface inspection method and device | |
| KR101826127B1 (en) | optical apparatus for inspecting pattern image of semiconductor wafer | |
| EP2098849B1 (en) | Test apparatus usable to measure stray light in electro-optical apparatuses | |
| JP3715377B2 (en) | Object shape measuring device | |
| EP3594665A1 (en) | Optical inspection device and method | |
| Sayanca et al. | Indirect light intensity distribution measurement using image merging | |
| EP4246204A1 (en) | Calibration target, fourier ptychographic imaging system and method for calibrating a fourier ptychographic imaging system | |
| CN109211106A (en) | Optical measuring apparatus | |
| CN110873639B (en) | Optical detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |