CN115430370A - Chlorosilane synthesizer - Google Patents

Abstract

The invention belongs to the technical field of chlorosilane synthesis, and particularly relates to a chlorosilane synthesis device which comprises a fluidized bed reactor, wherein a main gas flow enters a cone section from a main gas inlet to continuously form large bubbles, and solid powder is also arranged in the cone section; a plurality of inner cyclone dust collectors are arranged at positions close to the inner side wall of the expansion section, the inner cyclone dust collectors are used for separating solid-gas mixtures, and each inner cyclone dust collector comprises a dipleg for discharging separated solid powder; the junction of main reaction zone and cone section is formed with the annulus between main reaction zone outer wall and the cone section inner wall, has seted up vice air inlet on the cone section lateral wall of junction, and vice air current gets into the annulus from vice air inlet, and above-mentioned dipleg extends and is close to the annulus along main reaction zone inner wall. The invention ensures that the pressure drop between the upper part and the bottom of the reactor is very small, so that the dust in the dipleg of the inner cyclone dust remover can easily flow to the bottom of the reactor by the self weight, thereby reducing the required installation height of the inner cyclone dust remover and optimizing the flow working condition of the expanding section.

Description

Chlorosilane synthesizer

Technical Field

The invention belongs to the technical field of chlorosilane synthesis, and particularly relates to a chlorosilane synthesis device.

Background

Methylchlorosilane is usually synthesized by a Rochow direct method, wherein solid raw materials in the synthesis reaction are silicon powder particles, a catalyst is copper powder particles, chloromethane and gaseous reaction products play a role of a fluidized medium, and the reaction process is a gas-solid reaction. When synthesizing methyl chlorosilane, silicon powder with certain granularity, a copper catalyst, a cocatalyst and the like are mixed to form a composition containing the catalyst. The catalyst-containing composition is then fed into a fluidized bed reactor and allowed to react. The process causes that the impurity elements in the silicon powder are easy to accumulate in the fluidized bed, the impurity elements have the function of catalyzing side reactions, and the accumulated impurities can be slowly combined with each other to form various complex catalytic active substances, so that the reaction for generating complex side reaction products is stronger and stronger, the yield of target products is easy to reduce, the difficulty in rectification and purification is high, and the product quality is seriously influenced. The production process depends heavily on the quality of the silicon briquette, so that the production raw materials of the silicon briquette are severely limited, and the cost of the silicon briquette is increased. In the production process of domestic devices, solid materials in a reactor are easy to grade and difficult to uniformly mix, a complex catalyst formula is not suitable for optimizing the reaction, a high-price simple formula catalyst is needed, and high-pressure fluidized bed reactors with the gauge pressure of 0.24-0.42 Mpa are adopted, so that the partial pressure of methyl chloride is high, a tiny hot spot with high reaction temperature is easily formed, the methyl chloride is easy to crack and carbonize to generate caking, the side reaction capacity is rapidly increased, only the operation temperature of the reactor can be controlled to be low, the one-way conversion rate of the methyl chloride is low, and the circulating energy consumption of raw materials is high. And the cyclone dust removal system of the reactor has strong dust carrying capacity due to high-pressure gas density, so that the efficiency of the dust remover is reduced, a large amount of slurry slag which is difficult to treat can be formed in a wet dust removal system, the safety risk is high, the environmental protection cost is high, and the raw material consumption is high. Therefore, a synthesis device capable of efficiently synthesizing chlorosilane at low pressure is urgently needed.

Disclosure of Invention

The invention aims to provide a chlorosilane synthesis device aiming at the technical problems, so that the gas feeding pressure drop of a reactor is greatly reduced, and the heat energy can be fully utilized by the process design; and the pressure drop between the upper part and the bottom of the reactor is very small, so that the dust in the dipleg of the internal cyclone dust collector can easily flow to the bottom of the reactor by the weight of the dust, the mounting height required by the internal cyclone dust collector is reduced, and the effect of the flow working condition of the expansion section is optimized.

In view of this, the invention provides a chlorosilane synthesis apparatus, which includes a fluidized bed reactor, and the fluidized bed reactor is provided with:

the cone-shaped gas inlet structure comprises a cone section, a gas inlet and a gas outlet, wherein a main gas inlet is arranged at the cone angle of the cone section, main gas flow enters the cone section from the main gas inlet to continuously form large bubbles, and solid powder is also arranged in the cone section;

the heat pipe bundle can improve the temperature of the main reaction zone;

the inner cyclone dust collector is used for separating a solid-gas mixture and comprises a dust collector gas inlet, a dust collector gas outlet and a dipleg for discharging separated solid powder, and the gas outlet of the dust collector discharges the separated gas to a reactor gas outlet positioned above the expanding section;

wherein, the junction of main reaction zone and cone section is formed with the annular space between main reaction zone outer wall and the cone section inner wall, has seted up vice air inlet on the cone section lateral wall of junction, and vice air current gets into the annular space from vice air inlet, and above-mentioned dipleg extends and is close to the annular space along main reaction zone inner wall.

In the technical scheme, a main gas flow enters a cone section to continuously form large bubbles to push solid powder to float to a main reaction zone and react in the high-temperature main reaction zone, the reacted gas with the solid powder continuously rises under the action of the main gas flow and is separated by a solid-gas separation device through an inner cyclone dust collector, the separated gas is discharged from a gas outlet of a reactor, the separated solid powder slides to the cone section from a dipleg, the solid powder discharged from the dipleg of the cyclone dust collector is loosened by an auxiliary gas flow entering from an auxiliary gas inlet and the flowing center of the solid powder is contacted with the large bubbles in the cone section, the large bubbles are unstable and easy to break, collapse and explode, so that the gas and the solid are continuously and strongly impacted to efficiently mix, the gas-solid mixing mode greatly reduces the gas feeding pressure drop of the reactor, and the process design can fully utilize heat energy; the pressure drop between the upper part and the bottom of the reactor is small, so that dust in the dipleg of the inner cyclone dust remover can easily flow to the bottom of the reactor by the weight of the dust, the mounting height required by the inner cyclone dust remover is reduced, and the flow working condition of the expansion section is optimized; the gas-solid material mixed at the bottom of the reactor rises and flows from the central heat exchange tube bundle region in a centralized manner, so that the heat transfer coefficient of the heat exchange tube bundle is maximized.

Furthermore, the primary air flow enters from the primary air inlet at a low air speed of below 40m/s, large bubbles are continuously formed, and the secondary air flow is sprayed from the annular space at the air speed of below 40 m/s.

Furthermore, heat conduction oil is arranged in the heat pipe bundle, the reaction temperature is controlled by the flowing of the heat conduction oil in the heat pipe bundle, and the heat conduction oil has large inlet and outlet temperature difference.

In the technical scheme, the oil carrying capacity of the heat conduction oil system is greatly reduced by adopting large inlet-outlet temperature difference flowing of the heat conduction oil in the heat pipe bundle, so that the reactor is easy to perform rapid temperature rise and fall operation.

Further, the annular space department still is provided with annular space protection gas device, annular space protection gas device includes:

the annular main pipe is fixedly arranged at the annular gap;

the branch pipes are arranged at intervals along the circumferential direction of the annular main pipe, one end of each branch pipe is connected with the annular main pipe, the other end of each branch pipe faces the conical bottom and is close to the narrowest part of the annular gap, a plurality of small holes are formed in each branch pipe, and gas can enter the annular main pipe from the outside and can be sprayed to the annular gap through the small holes.

In the technical scheme, when the reactor is stopped for discharging, solid particles of the reactor can fall off fully from the bottom to be discharged only by closing and closing the air inlet of the auxiliary air inlet at the annular gap, so that an annular gap protection air device is required to be arranged in front of the annular gap to prevent partial solid powder from entering the annular gap to block the annular gap after the air inlet at the annular gap is stopped. Under the normal driving condition, the auxiliary air inlet at the annular gap continuously blows downwards, powder is difficult to enter the annular gap, so the annular gap gas protection device only needs to keep continuously introducing dustless gas with small gas flow to prevent solid from entering the small holes on the branch pipes, the low-gas-flow low-spraying-speed mode can prevent the wear caused by the high-speed gas spraying of the small holes and also can ensure that the pressure drop of the annular gap is very low, and the large gas spraying is temporarily opened for a short time at the last period of the shutdown and material discharging of the reactor to ensure that the powder flowing into the annular gap is blown and pressed out, so the annular gap state can meet the requirement of normal driving.

Furthermore, the chlorosilane synthesis device further comprises an outer cyclone dust collector, the outer cyclone dust collector is arranged outside the fluidized bed reactor, the outer cyclone dust collector can carry out gas-solid separation on dust-containing gas discharged from a gas outlet of the dust collector, a dust return port is further formed in the cone section, and solid powder separated by the outer cyclone dust collector is recycled into the cone section from the dust return port.

In the technical scheme, the gas leaving the reactor still carries more ultrafine dust, and is continuously separated by the external cyclone dust remover, so that the obtained gas is purer, few solids enter a subsequent wet dust removal washing tower, and few dangerous waste slurry residues are generated; the catalyst is not easy to be taken away by gas, when a short-period start mode is realized, the catalyst is only needed to be added when the start is carried out, only silica powder is added in a stable operation stage, and dried quartz micropowder with low purity is added to maintain fluidization when the shutdown is approached, so that the residual silica powder can fully react, and the residual catalyst and impurities can be adsorbed on the silica powder, thereby avoiding the phenomenon that the catalyst and the impurities are concentrated and adsorbed on a heat exchange tube bundle to cause the caking of a reactor, and ensuring that the impurities in the reactor are fully discharged when the shutdown is carried out for discharging.

Further, the external cyclone dust collector comprises:

a dust-containing gas inlet communicated with the gas outlet of the reactor;

the first-stage cyclone tube comprises a first-stage inlet, a first-stage gas outlet and a first-stage solid outlet, the first-stage inlet is communicated with the dust-containing gas inlet, dust-containing gas can enter the first-stage cyclone tube from the first-stage inlet, the first-stage gas outlet can discharge separated first-stage purified gas, and the first-stage solid outlet can discharge separated first-stage dust-collecting gas;

the second-stage cyclone tube comprises a second-stage inlet, a second-stage gas outlet and a second-stage solid outlet, the second-stage inlet is communicated with the first-stage solid outlet, the first-stage dust-collecting gas can flow from the second-stage inlet second-stage cyclone tube, the second-stage gas outlet can discharge separated second-stage purified gas, and the second-stage solid outlet can discharge separated second-stage dust-collecting gas;

and the secondary dust collecting gas discharged from the secondary solid outlet can be recycled to the cone section from the main dust discharging port and the dust returning port.

Furthermore, the first-stage cyclone tube adopts a vertical multi-tube type direct-current cyclone dust collector, the proportion of the first-stage purified gas discharged from the first-stage cyclone tube in the dust-containing gas entering from the first-stage inlet is 80-85%, and the proportion of the discharged first-stage dust-collecting gas in the dust-containing gas entering from the first-stage inlet is 15-20%.

Furthermore, the second-stage cyclone tube adopts a vertical tangential flow cyclone dust collector, and the proportion of the second-stage dust collecting gas discharged by the second-stage cyclone tube in the first-stage dust collecting gas entering from the second-stage inlet is 2-10%.

Further, still include the purification gas collector in the outer cyclone dust remover, be provided with the baffle in the purification gas collector and will purify the gas collector inner chamber and separate for one-level chamber and second grade chamber, above-mentioned one-level purifies the gas and can get into the one-level intracavity and from one-level total exit discharge, above-mentioned second grade purifies the gas and can get into the second grade intracavity and from second grade total exit discharge.

Further, the chlorosilane synthesis apparatus further comprises:

the dust removal washing tower comprises a saturation section, a washing section and a rectification section, and the saturation section is communicated with the primary gas outlet and the secondary gas outlet;

a condensing evaporator comprising a crude monomer sub-column, a reboiling column, and a scrubber reflux drum.

The invention has the beneficial effects that:

1. the solid powder discharged from the dipleg of the cyclone dust collector is loosened by the auxiliary airflow entering from the auxiliary air inlet, the flowing center of the solid powder is contacted with the large bubbles of the cone section, the large bubbles are unstable and easy to break, collapse and explode, so that strong impact is continuously generated to efficiently mix gas and solid, the gas-solid mixing mode greatly reduces the gas feeding pressure drop of the reactor, and the process design can fully utilize heat energy; the pressure drop between the upper part and the bottom of the reactor is small, so that dust in the dipleg of the inner cyclone dust remover can easily flow to the bottom of the reactor by the weight of the dust, the mounting height required by the inner cyclone dust remover is reduced, and the flow working condition of the expansion section is optimized; the gas-solid material mixed at the bottom of the reactor rises and flows from the central heat exchange tube bundle region in a centralized manner, so that the heat transfer coefficient of the heat exchange tube bundle is maximized.

2. The oil carrying capacity of a heat conduction oil system is greatly reduced by flowing the heat conduction oil in the heat pipe bundle by adopting a large inlet-outlet temperature difference, so that the reactor is easy to carry out rapid heating and cooling operation.

3. When the material is discharged during stopping, the solid particles in the reactor can fall down fully and be discharged from the bottom only by closing and closing the air inlet of the auxiliary air inlet at the annular gap, so that an annular gap protective air device is required to be arranged in front of the annular gap to prevent partial solid powder from entering the annular gap to block the annular gap after the air inlet at the annular gap is stopped. Under the normal driving condition, the auxiliary air inlet at the annular gap continuously blows downwards, powder is difficult to enter the annular gap, so the annular gap gas protection device only needs to keep continuously introducing dustless gas with small gas flow to prevent solid from entering the small holes on the branch pipes, the low-gas-flow low-spraying-speed mode can prevent the wear caused by the high-speed gas spraying of the small holes and also can ensure that the pressure drop of the annular gap is very low, and the large gas spraying is temporarily opened for a short time at the last period of the shutdown and material discharging of the reactor to ensure that the powder flowing into the annular gap is blown and pressed out, so the annular gap state can meet the requirement of normal driving.

4. The gas leaving the reactor still carries more ultrafine dust, and is continuously separated by the external cyclone dust remover, so that the obtained gas is purer, few solids enter a subsequent wet dust removal washing tower, and few hazardous waste slurry residues are generated; the catalyst is not easy to be taken away by gas, when a short-period start-up mode is realized, the catalyst is only needed to be added when the start-up is started, only silicon powder is added in a stable operation stage, and dried quartz micro powder with low purity is added to maintain fluidization when the shutdown is approached, so that the residual silicon powder can fully react, the residual catalyst and impurities can be adsorbed on the quartz powder, the phenomenon that the catalyst and the impurities are concentrated and adsorbed on a heat exchange tube bundle to cause the agglomeration of a reactor is avoided, and the impurities in the reactor are fully discharged when the shutdown is stopped for discharging.

Drawings

FIG. 1 is a cross-sectional view of a fluidized bed reactor of the present invention;

FIG. 2 is a cross-sectional view of an external cyclone dust collector of the present invention;

FIG. 3 is a system flow diagram after a methylchlorosilane synthesis section;

the labels in the figures are:

1. a reactor; 2. a cone section; 3. a primary reaction zone; 4. an expansion section; 5. a primary air inlet; 6. a solid powder; 7. a heat exchange tube bundle; 8. an inner cyclone dust collector; 9. an air inlet of a dust remover; 10. an air outlet of the dust remover; 11. a dipleg; 12. the gas outlet of the reactor; 13. an annular gap; 14. a secondary air inlet; 15. an annular space shielding gas device; 16. a ring-shaped main pipe; 17. a branch pipe; 18. an external cyclone dust collector; 19. a dust return port; 20. a dusty gas inlet; 21. a first stage cyclone tube; 22. a second stage cyclone tube; 23. a total dust exhaust port; 24. a primary inlet; 25. a primary gas outlet; 26. a first-stage solids outlet; 27. a secondary inlet; 28. a secondary gas outlet; 29. a secondary solids outlet; 30. a purified gas collector; 31. a partition plate; 32. a primary cavity; 33. a secondary cavity; 34. a primary main outlet; 35. and a secondary main outlet.

Detailed Description

The technical solutions in the embodiments of the present application will be described clearly below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments that can be derived by one of ordinary skill in the art from the embodiments given herein are intended to be within the scope of the present disclosure.

In the description of the present application, it is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present application. For convenience of description, the dimensions of the various features shown in the drawings are not necessarily drawn to scale. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be discussed further in subsequent figures.

It should be noted that the terms "first," "second," and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one. In addition, "and/or" in the specification and claims means at least one of connected objects, a character "/", and generally means that the former and latter related objects are in an "or" relationship.

It should be noted that in the description of the present application, the directions or positional relationships indicated by the terms such as "front, back, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are usually based on the directions or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, and in the case of not making a contrary explanation, these directions do not indicate and imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore, should not be interpreted as limiting the scope of the present application; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

It should be noted that, in the present application, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one of 8230, and" comprising 8230does not exclude the presence of additional like elements in a process, method, article, or apparatus comprising the element. Further, it should be noted that the scope of the methods and apparatus of the embodiments of the present application is not limited to performing the functions in the order illustrated or discussed, but may include performing the functions in a substantially simultaneous manner or in a reverse order based on the functions involved, e.g., the methods described may be performed in an order different than that described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

Example 1:

as shown in fig. 1, a chlorosilane synthesis apparatus comprises a fluidized bed reactor 1, wherein the fluidized bed reactor 1 is provided with a cone section 2, a main reaction zone 3 and an expansion section 4 from bottom to top in sequence.

The cone angle of the cone section is provided with a main air inlet 5, main air flow enters the cone section 2 from the main air inlet 5 and continuously forms large bubbles, and solid powder 6 is further arranged in the cone section 2. The main reaction zone 3 is internally provided with a heat pipe bundle, and heat conduction oil is arranged in the heat pipe bundle to ensure that the heat pipe bundle can improve the temperature of the main reaction zone 3. The reaction temperature is controlled by the flow of the heat transfer oil within the heat pipe bundle. The heat conduction oil has large inlet and outlet temperature difference, so that the oil carrying capacity of a heat conduction oil system can be greatly reduced, and the reactor 1 is easy to rapidly raise and lower the temperature.

A plurality of inner cyclone dust collectors 8 are arranged on the inner side of the expanding section 4 close to the wall, the inner cyclone dust collectors 8 are used for separating solid-gas mixtures, each inner cyclone dust collector 8 comprises a dust collector gas inlet 9, a dust collector gas outlet 10 and a dipleg 11 used for discharging separated solid powder 6, and the gas outlet 10 of each dust collector discharges the separated gas to a gas outlet of the reactor 1 above the expanding section 4; an annular gap 13 is formed between the outer wall of the main reaction zone 3 and the inner wall of the cone section 2 at the joint of the main reaction zone 3 and the cone section 2, an auxiliary air inlet 14 is formed in the side wall of the cone section 2 at the joint, auxiliary air flow enters the annular gap 13 from the auxiliary air inlet 14, and the dipleg 11 extends along the inner wall of the main reaction zone 3 and is close to the annular gap 13. The main gas flow enters the cone section 2 from the main gas inlet 5 at a low gas velocity of below 40m/s, large bubbles are continuously formed to push the solid powder 6 to float to the main reaction zone 3 and react in a high-temperature main reaction, the reacted gas is mixed with the solid powder 6 and continuously ascends under the action of the main gas flow to pass through the inner cyclone dust collector 8 for solid-gas separation, the separated gas is discharged from a gas outlet of the reactor 1, the separated solid powder 6 slides to the cone section 2 from the dipleg 11, the secondary gas flow entering from the secondary gas inlet 14 is sprayed in from the annular gap 13 at a gas velocity of below 40m/s, the solid powder 6 discharged from the dipleg 11 of the cyclone dust collector is loosened and the solid powder 6 flows in the center to be contacted with the large bubbles of the cone section 2, the large bubbles are unstable and easy to break, collapse and explode, and strong impact is continuously generated to efficiently mix gas and solid, the gas-solid mixing mode greatly reduces the gas feeding pressure drop of the reactor 1, and the flow design can fully utilize heat energy; the pressure drop between the upper part and the bottom of the reactor 1 is small, so that dust in the dipleg 11 of the inner cyclone dust remover 8 can easily flow to the bottom of the reactor 1 by the weight of the dust, the mounting height required by the inner cyclone dust remover 8 is reduced, and the flowing working condition of the expansion section 4 is optimized; the gas-solid materials mixed at the bottom of the reactor 1 rise and flow from the central heat exchange tube bundle 7 zone in a centralized manner, so that the heat transfer coefficient of the heat exchange tube bundle 7 is maximized.

Example 2:

as shown in fig. 1, an annular space 13 shielding gas device is further arranged at the annular space 13, and the annular space 13 shielding gas device comprises an annular main pipe 16 and a branch pipe 17. The annular manifold 16 is fixedly arranged at the annular gap 13; the branch pipes 17 are arranged at intervals along the circumferential direction of the annular main pipe 16, one end of each branch pipe 17 is connected with the annular main pipe 16, the other end of each branch pipe 17 faces the conical bottom and is close to the narrowest part of the annular gap 13, a plurality of small holes are formed in the branch pipes 17, and gas can enter the annular main pipe 16 from the outside and can be sprayed to the annular gap 13 through the small holes by the branch pipes 17. When the reactor is stopped for discharging, the solid particles in the reactor 1 can fall down sufficiently and can be discharged from the bottom only by closing and closing the air inlet of the auxiliary air inlet 14 at the annular gap 13, so that an annular gap 13 protective air device is needed to be arranged in front of the annular gap 13 to prevent partial solid powder 6 from entering the annular gap 13 to block the annular gap 13 after the air inlet at the annular gap 13 is stopped. Under the normal driving condition, the auxiliary air inlet 14 at the annular gap 13 continuously blows downwards, powder is difficult to enter the annular gap 13, so the annular gap 13 protective gas device only needs to keep continuously introducing dustless gas to prevent solid from entering the small holes on the branch pipes 17, the low-spraying-speed mode with small gas flow can prevent the small holes from being abraded due to high-speed gas injection and can also enable the pressure drop of the annular gap 13 to be low, and the large gas injection is temporarily opened for a short time in the final period of stopping and discharging the reactor 1 to enable the powder flowing into the annular gap 13 to be blown and pressed out, so that the state of the annular gap 13 can meet the requirement of normal driving.

Example 3:

as shown in fig. 1-2, the chlorosilane synthesis apparatus further comprises an external cyclone dust collector 18, the external cyclone dust collector 18 is arranged outside the fluidized bed reactor 1, the external cyclone dust collector 18 can separate gas and solid from dust-containing gas discharged from the gas outlet 10 of the dust collector, the cone section 2 is further provided with a dust return port 19, and solid powder 6 separated by the external cyclone dust collector 18 is recycled into the cone section 2 from the dust return port 19. The gas leaving the reactor 1 still carries more ultrafine dust, and is continuously separated by the external cyclone dust remover 18, so that the obtained gas is purer, the solid entering a subsequent wet dust removal washing tower is less, and the generated hazardous waste slurry residue is less; the catalyst is not easy to be taken away by gas, when a short-period start-up mode is realized, the catalyst is only needed to be added when the start-up is started, only silicon powder is supplemented in a stable operation stage, and dried quartz micro powder with low purity is supplemented to maintain fluidization when the shutdown is approached, so that the residual silicon powder can fully react, and the residual catalyst and impurities can be adsorbed on the quartz powder, thereby avoiding the phenomenon that the catalyst and the impurities are concentrated and adsorbed on the heat exchange tube bundle 7 to cause the agglomeration of the reactor 1, and ensuring that the impurities in the reactor 1 are fully discharged when the shutdown is stopped for discharging.

The outer cyclone dust collector 18 comprises a dust-containing air inlet 20, a first-stage cyclone pipe 21, a second-stage cyclone pipe 22 and a main dust discharge port 23. The dust-containing gas inlet 20 is communicated with the gas outlet of the reactor 1.

The first-stage cyclone tube 21 adopts a vertical multitube type direct-current cyclone dust collector, the first-stage cyclone tube 21 comprises a first-stage inlet 24, a first-stage gas outlet 25 and a first-stage solid outlet 26, the first-stage inlet 24 is communicated with a dust-containing gas inlet 20, the dust-containing gas can enter the first-stage cyclone tube 21 from the first-stage inlet 24, the first-stage purified gas after separation can be discharged from the first-stage gas outlet 25, and the first-stage dust-collecting gas after separation can be discharged from the first-stage solid outlet 26. The proportion of the primary purified gas discharged from the primary cyclone tube 21 to the dust-containing gas entering from the primary inlet 24 is 80-85%, and the proportion of the discharged primary dust-collecting gas to the dust-containing gas entering from the primary inlet 24 is 15-20%.

The second stage cyclone tube 22 adopts a vertical tangential flow cyclone dust collector, the second stage cyclone tube 22 comprises a second stage inlet 27, a second stage gas outlet 28 and a second stage solid outlet 29, the second stage inlet 27 is communicated with the first stage solid outlet 26, the first stage dust collecting gas can be discharged from the second stage inlet 27, the second stage gas outlet 28 can discharge separated second stage purified gas, and the second stage solid outlet 29 can discharge separated second stage dust collecting gas. The proportion of the secondary dust collecting gas discharged from the secondary cyclone tube 22 to the primary dust collecting gas entering from the secondary inlet 27 is 2-10%. The main dust exhaust port 23 is communicated with the dust return port 19 of the cone section 2, and the secondary dust collecting gas discharged from the secondary solid outlet 29 can be recycled to the cone section 2 from the main dust exhaust port 23 and the dust return port 19.

Still include the purified gas collector 30 in the outer cyclone 18, be provided with the baffle 31 in the purified gas collector 30 and separate the purified gas collector 30 inner chamber for one-level chamber 32 and second grade chamber 33, above-mentioned one-level purified gas can get into in one-level chamber 32 and discharge from one-level total exit 34, and above-mentioned second grade purified gas can get into in the second grade chamber 33 and discharge from second grade total exit 35. Example 4:

as shown in FIG. 3, the chlorosilane synthesis device also comprises a dedusting washing tower and a condensing evaporator. The dust removal washing tower comprises a saturation section, a washing section and a rectification section, wherein the saturation section is communicated with the primary gas outlet and the secondary gas outlet; the condensing evaporator comprises a coarse monomer auxiliary tower, a reboiling tower and a washing tower reflux tank. The high-temperature purified gas leaving the external cyclone dust collector reaches a washing tower for further treatment, the washing tower consists of a plurality of sections, high-temperature gas entering the tower is sprayed in a saturation section by high-flow slurry backflow, gas-liquid contact is promoted by a spiral centrifugal atomizing nozzle and two layers of macroporous tray sieve plates, equipment coking is prevented, pressure drop of the gas flowing through the saturation section is reduced, most of dust entering the tower is converted into a liquid phase in the saturation section, gas cooling is converted from a superheated state into a saturated state, evaporation volatilization and cooling effects of backflow slurry play a role in buffering and homogenizing the components and temperature of ascending gas flow in the tower, the washing section can safely and efficiently wash the gas by using a low-pressure-drop corrugated sieve plate, the ascending gas flow is deeply purified, the components, the flow and the temperature of the gas flow are further homogenized and stabilized, so that forty high-efficiency low-pressure-drop ADV float valve tower plates can be used for stable rectification separation in the rectification section, high-temperature substances with boiling points higher than ethyldichlorosilane can be prevented from reaching the top of the washing tower, and energy consumption of a monomer rectification section can be greatly reduced. A plurality of column plates of the rectifying section are monitored on line by using a plurality of sets of online chromatographs, so that the reaction selectivity change of the reactor is known in time, and the reflux liquid flow of the washing tower is adjusted in time. The gas at the top of the washing tower firstly reaches the shell pass of a reboiler of the crude monomer auxiliary tower, which is a falling film type evaporative condenser, the tower bottom liquid of the crude monomer auxiliary tower is evaporated in a falling film flow manner in a pipe through a circulating pump, the gas at the top of the washing tower partially condenses in the shell pass flowing from top to bottom, and the condensate enters a reflux tank of the washing tower; the uncondensed gas leaves and reaches the shell pass of the high-pressure methyl chloride vaporizer, and is also a falling film type evaporative condenser, fresh methyl chloride flows in a tube falling film to evaporate to obtain 1Mpa methyl chloride gas, part of monomers and methyl chloride are condensed in the shell pass, condensed liquid enters a washing tower reflux groove, the uncondensed gas leaves and then reaches the shell pass of the washing tower condenser, the condensed liquid enters a crude monomer intermediate groove by utilizing circulating water of the tube pass for cooling and condensation, and the condensed liquid is supplemented by the crude monomer intermediate groove when the washing tower reflux is insufficient. The gas leaving the condenser of the washing tower enters the shell pass of a main methyl chloride vaporizer, the equipment is a falling film type evaporative condenser, methyl chloride is subjected to falling film flow evaporation in a pipe, shell pass condensate is collected in a feeding groove of an auxiliary tower of a crude monomer tower, non-condensable gas reaches a centrifugal compressor sealed by dry gas, the inlet pressure of the centrifugal compressor is automatically controlled to maintain a micro-positive pressure state on the atmosphere, air is prevented from permeating into a material system, and meanwhile, the pressure of the top of the washing tower is controlled to be below 0.04MPa (gauge pressure). The operation pressure of the washing tower is low, the temperature of the washing section of the washing tower can be reduced, even if the once-through conversion rate of the chloromethane in the reactor is high, the temperature of the washing section of the washing tower still meets the requirement of fully solidifying, washing and removing the aluminum trichloride, and the influence of the catalytic reaction of the aluminum trichloride on the separation effect of the rectifying section is eliminated. The centrifugal compressor pressurizes the inlet air from normal pressure to 0.3-0.4 MPa and sends it to the degasser. The gas inlet of the degassing tower only contains a small amount of crude monomers, the discharged liquid of a main methyl chloride vaporizer is used as rectification reflux liquid, fresh methyl chloride and recovered methyl chloride in the main methyl chloride vaporizer can be mixed, so that trace moisture in the fresh methyl chloride and the crude monomers in the recovered methyl chloride react to generate hydrolysis high-boiling residues which reach the degassing tower kettle, and the degassing tower kettle liquid is discharged to a washing tower kettle slurry tank for treatment. The scrubbing section of the degasser column serves to prevent contaminants from the degasser column reflux from reaching the labyrinth reciprocating compressor. The methyl chloride auxiliary vaporizer is also a falling film type evaporation condenser, and the methyl chloride is evaporated in a falling film flow in a pipe. All falling film evaporation condensers can adopt surface sintering porous layer heat exchange enhanced tubes which can be copper heat exchange tubes, low-temperature difference reliable heat exchange is realized, and waste heat is utilized to vaporize methyl chloride liquid. The reduction of the gas inlet pressure of the reactor is very beneficial to fully utilizing the low-pressure vaporization heat absorption refrigeration of the methyl chloride to carry out fractional condensation pre-separation on the crude monomer and the methyl chloride, so that the content of the methyl chloride fed into a crude monomer tower is low, and a reboiler of the reboiler only consumes a small amount of water vapor for heating. The compressor can adopt a single-stage compressor, and the compressed air quantity is small, and the energy consumption is very low. The operation pressure of the crude monomer tower is 0.8Mpa (gauge pressure), the methyl chloride gas ejected out of the tower is cooled by circulating water and is completely condensed and collected, the part of the methyl chloride liquid is clean and does not contain water and high-boiling-point substances, and the reflux liquid is specially provided for the auxiliary tower top of the crude monomer, so that the feeding of the crude monomer tower is prevented from being polluted by dirt and high-boiling-point substances. And similarly, the recovered chloromethane gas obtained at the top of the crude monomer secondary tower is not condensed and flows to the annular space side of the reactor to be fed with gas at the lowest pressure drop, so that the operation pressure of the crude monomer secondary tower is reduced as much as possible, and the waste heat in the ejection gas of the washing tower is fully utilized. Arranging an auxiliary pipeline, switching most of gas at the outlet of the centrifugal compressor to supply gas to the washing tower for circulation while the reactor system is closed to supply gas to the washing tower in a reactor shutdown cooling discharge stage, maintaining the normal operation of the rectifying section of the washing tower, and slightly supplying gas to maintain the rectifying condition of the coarse monomer auxiliary tower; correspondingly, when the reactor is stopped for discharging materials, the labyrinth reciprocating compressor switches outlet gas to enter the saturation section of the degassing tower to maintain the normal operation of the degassing tower; the methyl chloride circulating pump of each methyl chloride vaporizer stops feeding the heat exchange tube. The switching process is completed instantly by adopting one-key automatic control. And in the reactor cooling operation stage before the reactor is stopped and discharged, measures of reducing the flow of methyl chloride entering a bed and reducing the operation gas velocity in the bed are taken, and the discharging operation can be switched after the temperature is reduced to 280 ℃. In order to realize the quick discharge and quick feeding start of the reactor, the following equipment arrangement scheme is adopted: the reactor mounted position is higher, and the bottom cone bin outlet is a little higher than useless contact jar feed inlet also very near jar body, makes the useless contact in the bed can enter useless contact jar by the quick hard pressure. The conical bottom discharge port of the material pushing tank is as close to the conical bottom feed port of the reactor as possible, so that low-pressure-difference rapid dilute phase conveying is realized. The silicon powder feeding tank and the catalyst pushing tank can be relatively far away from the conical bottom of the reactor, so that the phenomenon that the conical bottom area of the reactor is too crowded to be favorable for overhauling and operation is avoided. The low-pressure high-gas-speed micro-powder fluidized bed reactor process can greatly reduce the number of solid powder tanks and the size of equipment, so that the equipment of a large-scale single-machine process is easily optimized and arranged, and the requirements of high operation reliability and investment saving of large-scale single-machine devices are met. The application of the equipment in a direct method methyl chlorosilane monomer synthesis device is introduced, the design scheme of a fluidized bed and a washing tower of the trichlorosilane synthesis device can also be directly used for reference, so that the fluidization of the reactor is optimized, the reaction temperature can be improved, the one-way conversion rate of hydrogen chloride can be improved, the selectivity of trichlorosilane can be prevented from being reduced due to a hot spot, and meanwhile, the equipment arrangement is optimized, the reliability is improved, and the operation is simplified; in order to realize the short-period operation process and improve the adaptability to the silicon powder, the gas flow required for maintaining the normal operation of the rectifying section when the reactor is stopped for discharging is provided by switching the gas at the outlet of the non-condensable gas compressor to return to the inlet of the washing tower, so that high-boiling-point substances with boiling points higher than that of silicon tetrachloride are prevented from reaching the top of the tower.

The fluidized bed reactor uses hydrogen, hydrogen chloride and chloroethane mixed gas to maintain a fluidized reaction in the reactor to produce the ethylchlorosilane monomer, the structures and functions of the fluidized bed reactor and a washing tower are similar to those of the synthesis of the methylchlorosilane monomer, a washing tower system adopts low-pressure operation, in order to reduce the temperature of the operating tower and ensure that aluminum trichloride can be fully solidified and washed away, condensate at a lower temperature in a second condenser of the washing tower and later is completely used as reflux liquid of the washing tower, and the shortage part of the condensate is supplemented by the condensate of the first condenser. Removing high-boiling-point substances with boiling points higher than that of triethylchlorosilane in a rectifying section, and cooling and condensing the gas discharged from the top of a washing tower by circulating water in a first condenser to obtain a crude monomer tower feed liquid; rectifying the condensate of the first condenser of the washing tower in a crude monomer tower, obtaining crude monomer without high boiling in a tower kettle, sending the crude monomer to a monomer rectification section, obtaining recovered chloroethane gas at the tower top, directly sending part of the recovered chloroethane gas to a reactor, and partially condensing the chloroethane gas to be used as reflux liquid of the crude monomer tower. Part of liquid chloroethane is vaporized by a high-pressure vaporizer to provide kinetic energy for a jet supercharger of an external cyclone dust collector for returning dust to a bed. The non-condensable gas in the second condenser of the washing tower is pressurized by a reciprocating compressor, and the hydrogen chloride are recovered by a pressure swing adsorption device and returned to the reactor for circulation. The direct method ethyl chlorosilane monomer synthesis reactor has basically the same operation mode as the methyl chlorosilane monomer synthesis, adopts a short-period start scheme, has a similar catalyst formula, but needs to use aluminum fluoride instead of aluminum fluoride, and additionally uses a nickel-containing auxiliary agent, and adopts a short-period operation process, so that the use amount of the aluminum fluoride is reduced, and the generation amount of fluorine-containing waste residues and waste liquid which are difficult to treat is reduced; when the reactor is stopped and discharged, the outlet of the reciprocating compressor is switched to supply air to the washing tower so as to keep the normal operation of the rectifying section.

Then, one of the application schemes of the equipment for synthesizing the phenyl chlorosilane monomer by the direct method is introduced, the phenyl chlorosilane monomer is synthesized by the direct method by using a raw material chlorobenzene, a copper-based catalyst is usually adopted, the activity is low, the reaction temperature is up to 500-600 ℃, the powder in the reactor has strong caking property and is easy to cause caking, if a heat exchange tube is arranged in the reactor, molten salt or high-pressure nitrogen is required to be used, but the heat exchange tube is easy to wear and corrode by high-temperature chlorine, and once the heat exchange tube in the reactor is broken, explosion accidents can be caused, so that the equipment is very unsafe. The equipment is characterized in that no heat exchange tube is arranged in the fluidized bed reactor for synthesizing the phenylchlorosilane monomer by the direct method, and the empty bed structure is more favorable for flowing and mixing micro powder. A heat-conducting oil heating half-pipe jacket heat-insulating hot silicon powder tank is arranged beside a reactor, silicon powder flows from top to bottom in a dense-phase manner, the silicon powder is heated to a temperature higher than 300 ℃ through a powder flow heater and enters the hot silicon powder tank for storage and standby, a half-pipe jacket of the reactor barrel is filled with high-temperature molten salt, the reactor barrel can be preheated to 500 ℃ firstly, when the reactor is started, 300 ℃ hot silicon powder stored in the hot silicon powder tank is pushed into the reactor by nitrogen, then hydrogen chloride and silicon tetrachloride are introduced for fluidized reaction, the temperature of a fluidized bed is raised to a temperature higher than 500 ℃ by reaction heat, and the silicon tetrachloride gas with a pressure of more than 0.9MPa and more than 300 ℃ is used for providing power to continuously spray, pressurize and push the dust of the external cyclone dust collector back to the bed. Then, the benzene chloride and the catalyst are switched to start the synthesis reaction of the phenyl monomer. The reaction heat released by the synthesis of the phenyl monomer is controlled by absorbing heat through the supplemented silicon powder, carrying the fused salt in a flowing manner by the jacket and absorbing heat of air entering from the bottom of the reactor, and a plurality of ejectors which eject atomized liquid at high speed and with angles close to the vertical direction are arranged on the bottom cone part of the reactor, and the reaction temperature is controlled by utilizing the vaporization and absorption of liquid such as chlorobenzene, silicon tetrachloride, titanium tetrachloride, tin tetrachloride and the like. The high-speed nozzle adopts a working mode of spraying atomized liquid by gas-liquid mixing, the working number of the nozzles is activated according to the temperature control requirement, and the nozzles without spraying liquid maintain the ventilation protection nozzles. The input strong kinetic energy is sprayed at a high speed, so that the fluidized bed can use micro powder with large agglomeration tendency, difficult dispersion and fluidization and smaller granularity, larger reaction surface area is obtained, surface updating is enhanced, the reaction speed is improved, the capacity is enhanced without adopting overhigh reaction temperature, the mass transfer capacity of solid particles is strong, the added anhydrous NaCl powder can be efficiently combined with AlCl3, the side reaction is favorably reduced, the contact quantity for maintaining the reaction in a reactor can be further reduced, and the procedures of stopping, drying, cooling, discharging, pushing, heating, starting and driving can be completed more quickly. Correspondingly, the gas flow used by the main gas inlet can be reduced by adopting a liquid spraying process, so that a high-pressure gas nozzle is additionally arranged beside the main gas inlet, and the kinetic energy input by the high-speed gas with small flow is utilized to realize local short-distance kinetic energy fluidization so as to maintain the fluidization quality of the bottom cone area. By utilizing the characteristics that the high-gas-speed micro-powder fluidized bed reactor can keep powder to continuously flow and uniformly mix, and a high-boiling-point solid catalyst is not easily taken away by airflow, a tin-based catalyst system which is more expensive than copper powder but has higher activity can be used, the catalytic reaction can be started at the temperature of below 480 ℃, the selectivity for generating the diphenyl dichlorosilane is high and can reach more than 80 percent, and when the diphenyl dichlorosilane is generated, the reaction heat release is minimum, so that the large-capacity single-machine production can be realized by using an empty bed process. And (3) in the stage of stopping the reactor and drying, adding quartz powder to maintain fluidization, switching to introduce hydrogen chloride for reaction to consume residual silicon, and controlling the temperature by spraying silicon tetrachloride liquid to replace substances with high boiling point in the reactor so as to prevent the waste contact tank from being easily agglomerated after discharging. Because the temperature of the direct method phenyl chlorosilane monomer synthesis reaction is high, the generation of high-toxicity polychlorinated biphenyl is difficult to completely avoid, so solid waste and liquid waste in the production process are treated at high temperature by using a special plasma incinerator, the generation amount of the waste is very important to be reduced, the overhaul frequency of equipment is reduced as much as possible, and the overhaul process of the equipment is sealed as much as possible. The high-gas-speed micropowder fluidized bed process greatly reduces the number of solid powder containing equipment and the volume of the equipment, enables the equipment to be easily and compactly arranged, can install a waste incinerator nearby, reduces the difficulty of closed waste conveying treatment, and can reduce the difficulty of recovering noble metals from waste so as to be capable of reusing the high-activity silver powder catalyst in the direct phenylchlorosilane monomer synthesis. The empty bed technology simplifies the internal structure of the equipment, reduces the construction difficulty of abrasion resistance and corrosion resistance, greatly improves the working reliability of equipment maintenance, reduces the internal maintenance times of the equipment, is easy to clean and decoke in the equipment, is easy to collect and treat cleaning wastewater, and meets the requirements of parking maintenance and sealing. Other technical details of direct method phenyl chlorosilane synthesis have been established in China and are not described.

While the embodiments of the present application have been described in connection with the drawings, the embodiments and features of the embodiments of the present application can be combined with each other without conflict and the present application is not limited to the above-mentioned embodiments, which are only illustrative and not restrictive, and many modifications may be made by one skilled in the art without departing from the spirit and scope of the present application as claimed.

Claims (10)

1. The chlorosilane synthesis device is characterized by comprising a fluidized bed reactor (1), wherein the fluidized bed reactor (1) is sequentially provided with the following components:

the device comprises a cone section (2), wherein a main air inlet (5) is arranged at the cone angle of the cone section, main air flow enters the cone section (2) from the main air inlet (5) to continuously form large bubbles, and solid powder (6) is further arranged in the cone section (2);

the device comprises a main reaction zone (3), wherein a heat pipe bundle is arranged in the main reaction zone (3), and the heat pipe bundle can improve the temperature of the main reaction zone (3);

the reactor comprises an expansion section (4), wherein a plurality of inner cyclone dust collectors (8) are arranged on the inner side of the expansion section (4) close to the wall, the inner cyclone dust collectors (8) are used for separating solid-gas mixtures, each inner cyclone dust collector (8) comprises a dust collector air inlet (9), a dust collector air outlet (10) and a dipleg (11) used for discharging separated solid powder (6), and the dust collector air outlet (10) discharges separated gas to a reactor (1) air outlet positioned above the expansion section (4);

wherein, the junction of main reaction zone (3) and cone section (2) is formed with annular space (13) between main reaction zone (3) outer wall and cone section (2) inner wall, has seted up vice air inlet (14) on the cone section (2) lateral wall of junction, and vice air current gets into annular space (13) from vice air inlet (14), and above-mentioned dipleg (11) extend and are close to annular space (13) along main reaction zone (3) inner wall.

2. A chlorosilane synthesis plant according to claim 1, characterized in that the primary gas flow enters from the primary gas inlet (5) at a relatively low gas velocity of less than 40m/s, large gas bubbles continue to form, and the secondary gas flow is injected from the annular space (13) at a gas velocity of less than 40 m/s.

3. A chlorosilane synthesis apparatus as claimed in claim 1, wherein heat conducting oil is provided in the heat pipe bundle, the reaction temperature is controlled by flowing the heat conducting oil in the heat pipe bundle, and the heat conducting oil has a large inlet and outlet temperature difference.

4. A chlorosilane synthesis plant according to claim 1, characterized in that an annular space (13) shielding gas device is further arranged at the annular space (13), and the annular space (13) shielding gas device comprises:

an annular manifold (16), the annular manifold (16) being fixedly arranged at the annular gap (13);

the branch pipes (17) are arranged in the circumferential direction of the annular main pipe (16) at intervals, one end of each branch pipe (17) is connected with the annular main pipe (16), the other end of each branch pipe (17) is close to the narrowest part of the annular gap (13) towards the conical bottom, a plurality of small holes are formed in the branch pipes (17), and gas can enter the annular main pipe (16) and the branch pipes (17) from the outside and is sprayed to the annular gap (13) through the small holes.

5. A chlorosilane synthesis apparatus as claimed in claim 1, characterized in that the chlorosilane synthesis apparatus further comprises an external cyclone (18), the external cyclone (18) is disposed outside the fluidized bed reactor (1), the external cyclone (18) can gas-solid separate the dust-containing gas discharged from the gas outlet (10) of the dust remover, the cone section (2) is further provided with a dust return port (19), and the solid powder (6) separated by the external cyclone (18) is recycled into the cone section (2) from the dust return port (19).

6. A chlorosilane synthesis plant according to claim 5, characterized in that the external cyclone (18) comprises:

a dust-containing gas inlet (20), wherein the dust-containing gas inlet (20) is communicated with the gas outlet of the reactor (1);

the cyclone device comprises a first-stage cyclone tube (21), wherein the first-stage cyclone tube (21) comprises a first-stage inlet (24), a first-stage gas outlet (25) and a first-stage solid outlet (26), the first-stage inlet (24) is communicated with a dust-containing gas inlet (20), dust-containing gas can enter the first-stage cyclone tube (21) from the first-stage inlet (24), the first-stage gas outlet (25) can discharge separated first-stage purified gas, and the first-stage solid outlet (26) can discharge separated first-stage dust-collecting gas;

the second-stage cyclone tube (22), the second-stage cyclone tube (22) comprises a second-stage inlet (27), a second-stage gas outlet (28) and a second-stage solid outlet (29), the second-stage inlet (27) is communicated with the first-stage solid outlet (26), the first-stage dust collecting gas can flow from the second-stage inlet (27) to the second-stage cyclone tube (22), the second-stage gas outlet (28) can discharge separated second-stage purified gas, and the second-stage solid outlet (29) can discharge separated second-stage dust collecting gas;

and the total dust exhaust port (23) is communicated with the dust return port (19) of the cone section (2), and secondary dust collecting gas exhausted from the secondary solid outlet (29) can be recycled to the cone section (2) from the total dust exhaust port (23) and the dust return port (19).

7. The chlorosilane synthesis apparatus as claimed in claim 6, wherein the first stage cyclone tube (21) is a vertical multi-tube type straight-flow cyclone dust collector, the first stage cyclone tube (21) discharges a first stage purified gas accounting for 80-85% of the dust-containing gas entering from the first stage inlet (24), and discharges a first stage dust-collecting gas accounting for 15-20% of the dust-containing gas entering from the first stage inlet (24).

8. A chlorosilane synthesis plant as claimed in claim 6, characterized in that the second stage cyclone (22) is a vertical tangential flow cyclone, and the secondary dust collecting gas discharged from the second stage cyclone (22) accounts for 2-10% of the primary dust collecting gas entering from the secondary inlet (27).

9. A chlorosilane synthesis apparatus as claimed in claim 6, characterized in that the external cyclone (18) further comprises a purified gas collector (30), a partition (31) is arranged in the purified gas collector (30) to divide the inner space of the purified gas collector (30) into a primary chamber (32) and a secondary chamber (33), the primary purified gas can enter the primary chamber (32) and be discharged from the primary outlet (34), and the secondary purified gas can enter the secondary chamber (33) and be discharged from the secondary outlet (35).

10. A chlorosilane synthesis apparatus as claimed in claim 1, further comprising:

the dust removal washing tower comprises a saturation section, a washing section and a rectification section, and the saturation section is communicated with the primary gas outlet (25) and the secondary gas outlet (28);

a condensing evaporator comprising a crude monomer sub-column, a reboiler, and a scrubber reflux drum.

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