CN115421083A - Magnetic field testing device and method based on high-frequency magnetic sensor - Google Patents
Magnetic field testing device and method based on high-frequency magnetic sensor Download PDFInfo
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- CN115421083A CN115421083A CN202211031469.2A CN202211031469A CN115421083A CN 115421083 A CN115421083 A CN 115421083A CN 202211031469 A CN202211031469 A CN 202211031469A CN 115421083 A CN115421083 A CN 115421083A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The invention provides a magnetic field testing device and method based on a high-frequency magnetic sensor, wherein the corresponding device comprises: a rotary base rotatable around the center thereof; a rotating rod, one end of which is arranged on the center; the sample seat is arranged at the other end of the rotating rod and is used for arranging a GSG (global system for mobile) sheet and a GSG binding wire, and the GSG binding wire is arranged on the GSG sheet and is connected with a sensor to be detected; the biaser is connected with the other end of the GSG binding wire; a high frequency source for providing a high frequency signal, connected to the biaser; the phase-locked amplifier is respectively connected with the high-frequency source and the biaser; and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the rotating rod. The invention constructs a magnetic field testing device of a high-frequency magnetic sensor, designs and processes an L-shaped high-frequency sample holder to be matched with a rotating table, realizes corner high-frequency spin torque ferromagnetic resonance (STFMR) testing, and has the advantages of low cost, simple process and high integration level.
Description
Technical Field
The invention relates to magnetic electronic device testing equipment, in particular to a magnetic field testing device and method based on a high-frequency magnetic sensor.
Background
Magnetic sensors are widely used in modern industrial electronic products, and sense magnetic field intensity of the magnetic sensors is utilized to measure physical parameters such as current, position, direction and the like. The method has wide application in many fields, such as electromechanical automatic control, biological detection, aerospace industry and the like. In the prior art, there are many different types of sensors for measuring magnetic fields and other parameters, such as magnetic sensors that use Hall (Hall) elements, anisotropic magneto-resistance (AMR) elements or giant magneto-resistance (GMR) elements as sensitive elements. Among them, the hall effect and anisotropic magnetoresistance effect have been mature, and giant magnetoresistance has been widely used in hard disk heads. A Tunneling Magnetoresistive (TMR) element is a new magnetoresistive effect sensor that has been industrially used in recent years, and it uses the tunneling magnetoresistive effect of a magnetic multilayer film material to sense a magnetic field. With the development of new technologies such as artificial intelligence, unmanned driving and the like, the requirements on the sensor are higher and higher, and some novel magnetic sensors such as quantum magnetic sensing, high-frequency magnetic sensing and superconducting magnetic sensing appear.
Magnetic sensors exist in the prior art as follows: anisotropic sensors, giant magnetoresistance effect sensors and tunneling magnetoresistance effect sensors. The anisotropic sensor, the giant magnetoresistance effect sensor and the tunneling magnetoresistance effect sensor are all sensors based on magnetic thin film materials, all work under direct current voltage, are not based on high-frequency resonance, and do not realize multi-azimuth magnetic field measurement.
Disclosure of Invention
Aiming at the problems in the prior art, the magnetic field testing device based on the high-frequency magnetic sensor provided by the invention adopts a high-frequency resonance method to realize the testing of the azimuth and the size of the magnetic field.
In one aspect, an embodiment of the present invention provides a magnetic field testing apparatus based on a high-frequency magnetic sensor, including:
a rotary base rotatable about a center thereof;
a rotating rod, one end of which is arranged on the center;
the sample seat is arranged at the other end of the rotating rod and is used for arranging a GSG (global system for mobile) sheet and a GSG binding wire, and the GSG binding wire is arranged on the GSG sheet and is connected with a sensor to be detected;
the biaser is connected with the other end of the GSG binding wire;
a high frequency source for providing a high frequency signal, connected to the biaser;
the phase-locked amplifier is respectively connected with the high-frequency source and the biaser;
and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the rotating rod.
In one embodiment, the magnetic field testing device based on the high-frequency magnetic sensor further comprises: and the motor is used for driving the rotating seat to rotate.
In one embodiment, an SMA joint is arranged on the GSG sheet, and the GSG binding wires are wound on the SMA joint;
the electromagnet is a one-dimensional electromagnet;
the sensor to be measured comprises a first film and a second film.
In one embodiment, the sensor to be measured further includes two electrodes connected through the first thin film and the second thin film;
the first film is made of spin orbit coupling material.
In one embodiment, the spin-orbit coupling material comprises: heavy metal material such as Pt, W, ta, moS 2 、WSe 2 Equi-two-dimensional material and Bi 2 Se 3 Iso-topological insulators;
the second thin film is made of a ferromagnetic material.
In one embodiment, the ferromagnetic material comprises: coFeB, co/Pt, and NiFe.
In another aspect, an embodiment of the present invention provides a magnetic field testing method based on a high-frequency magnetic sensor, which is applied to a magnetic field testing apparatus based on a high-frequency magnetic sensor, and the method includes:
inputting a high-frequency signal through a high-frequency source;
inputting low-frequency amplitude modulation through a phase-locked amplifier;
inputting the low-frequency amplitude modulation into a sample to be tested through a GSG binding wire;
and generating a magnetic field test curve according to an output signal generated by the rotating sample to be tested.
In one embodiment, the generating a magnetic field test curve according to the output signal generated by the rotating sample to be tested includes:
filtering the high-frequency signal of the output signal by a bias device, and inputting the high-frequency signal into the phase-locked amplifier;
and carrying out fixed frequency test on the input signal, and generating a magnetic field test curve according to the test signal.
In one embodiment, the magnetic field testing method based on the high-frequency magnetic sensor further includes:
and determining a magnetic field source value and a magnetic field source direction according to the magnetic field test curve.
In one embodiment, the determining the magnetic field origin value and the magnetic field origin direction according to the magnetic field test curve includes:
when no external magnetic field exists, fixing the angle of the sample to be tested, and simultaneously changing the magnetic field to generate a sample voltage change curve;
determining a magnetic field source value according to the sample voltage change curve and a predetermined standard curve;
forming a preset angle of the sample to be tested in the magnetic field by setting the position of the electromagnet, and reading the voltage value of the sample to be tested by a phase-locked amplifier;
rotating the sample to be tested and the electromagnet for 360 degrees simultaneously, and measuring the maximum voltage value of the sample measured by the phase-locked amplifier in the rotating process;
and determining the direction of the magnetic field source according to the voltage direction corresponding to the maximum value.
As can be seen from the above description, first, the magnetic field testing apparatus based on a high-frequency magnetic sensor according to the embodiment of the present invention includes: a rotary base rotatable around the center thereof; one end of the rotating rod is arranged on the center; the sample seat is arranged at the other end of the rotating rod and is used for arranging a GSG sheet and a GSG binding wire, and the GSG binding wire is arranged on the GSG sheet and is connected with a sensor to be detected; the biaser is connected with the other end of the GSG binding wire; a high frequency source for providing a high frequency signal, connected to the biaser; the phase-locked amplifier is respectively connected with the high-frequency source and the biaser; and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the rotating rod. The invention adopts a high-frequency resonance method to build a set of high-frequency magnetic field test system to realize the test of the azimuth and the size of the magnetic field.
Next, the present invention also provides a magnetic field testing method based on the high-frequency magnetic sensor, which includes: firstly, inputting a high-frequency signal through a high-frequency source; inputting low-frequency amplitude modulation through a phase-locked amplifier; secondly, inputting low-frequency amplitude modulation into a sample to be tested through a GSG binding wire; and finally, generating a magnetic field test curve according to an output signal generated by the rotating sample to be tested.
The invention constructs a magnetic field testing device of a high-frequency magnetic sensor, designs and processes an L-shaped high-frequency sample holder to be matched with a rotating table, realizes corner high-frequency spin torque ferromagnetic resonance (STFMR) testing, has the advantages of low cost, simple process and high integration level, and can realize multifunctional magnetic testing (magnetic field direction and size).
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a magnetic field testing device based on a high-frequency magnetic sensor according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a sample holder according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a sensor under test according to an embodiment of the present invention;
FIG. 4 is a first flowchart illustrating a magnetic field testing method based on a high-frequency magnetic sensor according to an embodiment of the present invention;
FIG. 5 is a first diagram illustrating a magnetic sensing test curve according to an embodiment of the present invention;
FIG. 6 is a second graph illustrating a magnetic sensing test according to an embodiment of the present invention;
FIG. 7 is a flowchart illustrating step 400 of a magnetic field testing method based on a high-frequency magnetic sensor according to an embodiment of the present invention;
fig. 8 is a schematic flowchart of a magnetic field testing method based on a high-frequency magnetic sensor in an embodiment of the present invention;
fig. 9 is a schematic flowchart of step 500 in the magnetic field testing method based on the high-frequency magnetic sensor in the embodiment of the present invention.
Reference numerals:
1: a rotating base;
2: rotating the rod;
3: a sample holder;
3-1: a GSG slice;
3-2: a sensor to be tested;
3-3: an SMA joint;
3-4: a first electrode;
3-5: a second electrode;
4: a bias device;
5: a high frequency source;
6: a phase-locked amplifier;
7: an electromagnet hole;
8: a first film;
9: a second film.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In an embodiment, referring to fig. 1 and fig. 2, the present invention first provides a magnetoelectric measuring apparatus, including: a rotary base 1 rotatable around the center thereof; a rotating rod 2, one end of which is arranged on the center; the sample seat 3 is arranged at the other end of the rotating rod 2 and is used for arranging a GSG sheet 3-1 and a GSG binding wire, and the GSG binding wire is arranged on the GSG sheet 3-1 and is connected with a sensor to be detected 3-2 (a dotted line frame in the figure 2 represents the integral part of the sensor to be detected and has no physical significance); the biaser 4 is connected with the other end of the GSG binding wire; a high frequency source 5 for providing a high frequency signal, connected to the biaser 4; a lock-in amplifier 6 connected to the high frequency source 5 and the bias device 4, respectively; and the two electromagnets 7 are symmetrically arranged on two sides of the rotating shaft of the rotating rod 2.
Preferably, the shape of the rotary base 1 may be a circle, which can be driven by an external force (which may be a motor) to rotate clockwise or counterclockwise around its center. It will be appreciated that, as the rotary base 1 rotates, it also rotates the rotary rod 2 provided thereon, and thus the sample holder 3 and the various devices thereon.
The high-frequency signal source 5 is a high-frequency signal generator for measurement, and can generate a high-frequency sine signal, an amplitude-modulated signal, a frequency-modulated signal, and square waves, triangular waves, sawtooth waves, positive and negative pulse signals of various frequencies. The amplitude of the output signal can be adjusted according to the requirement. The high-frequency signal source main oscillator stage is used for generating a high-frequency oscillation signal, and the high-frequency oscillation signal determines the main operating characteristics of the high-frequency signal generator. Depending on the method of generating the master oscillator signal, the high frequency signal generator can be divided into: the signal source comprises a tuning signal source, a phase-locked signal source and a synthesized signal source. Specifically, the effects include:
1. and measuring the element parameters. Such as inductance, capacitance, and Q value, loss angle, etc.
2. And measuring the amplitude-frequency characteristic, the phase-frequency characteristic, the period and the like of the network.
3. The performance of the receiver is tested. Such as sensitivity, selectivity, etc. of the receiver.
4. The transient response of the network is measured. Such as with square wave or narrow pulse excitation, measuring the step response, impulse response, time constant, etc. of the network.
5. The meter is calibrated. And outputting signals with accurate frequency and amplitude, and calibrating an attenuator, gain and scale of the instrument.
In one embodiment, referring to fig. 2, SMA joints 3-3 are provided on the GSG sheet 3-1, and the GSG binding wires are wound around the SMA joints 3-3 (the omitted wires in fig. 1 and 2 indicate that the two are connected).
In one embodiment, the electromagnet 7 is a one-dimensional electromagnet, which is a pair of magnetic poles and generates an electromagnetic field in only one direction.
Referring to fig. 3, the sensor to be measured includes a first film 8 and a second film 9. That is, the sensor 3-2 to be measured is a laminated structure of two films, and preferably, the first film 8 is a ferromagnetic material, such as CoFeB, niFe, and the like. The second film 9 is a spin-orbit coupling material, such as Pt, W, ta, topological insulator, etc.,
referring to fig. 2, the sensor under test further comprises two electrodes 3-4 and 3-5 connected by the first membrane 8 and the second membrane 9.
Specifically, referring to fig. 2, a sample (sensor to be measured) is micro-machined to have the shape as shown in the figure, the middle rectangle is a double-layer thin film strip, two electrodes are provided, one rectangle (3-4) is connected with a signal end S of the high-frequency GSG, and one saddle-shaped (3-5) is connected with a grounding end G of the high-frequency GSG.
Based on the magnetic field testing device based on the high-frequency magnetic sensor, an embodiment of the present invention further provides a magnetic field testing method based on the high-frequency magnetic sensor, and referring to fig. 4, the method specifically includes:
step 100: inputting a high-frequency signal through a high-frequency source;
step 200: inputting low-frequency amplitude modulation through a phase-locked amplifier;
step 300: inputting the low-frequency amplitude modulation into a sample to be tested through a GSG binding wire;
step 400: and generating a magnetic field test curve according to an output signal generated by the rotating sample to be tested.
In steps 100 to 400, specifically, a high frequency 5GHz high frequency is added, while the lock-in amplifier inputs a low frequency amplitude modulation, such as 10kHz, the output is passed through the biaser, input into the sample through the GSG binding wire, the output signal is passed through the GSG binding wire, returned to the biaser, the low frequency is input into the lock-in amplifier through the biaser, and the high frequency is filtered out. The test curves are shown in fig. 5 and fig. 6 by the varying magnetic field.
In some embodiments, referring to fig. 7, step 400 comprises:
step 401: filtering the high-frequency signal of the output signal by a bias device, and inputting the high-frequency signal into the phase-locked amplifier;
step 402: and carrying out fixed frequency test on the input signal, and generating a magnetic field test curve according to the test signal.
It is to be understood that the fixed frequency test in step 402 is also referred to as a low frequency modulation frequency test.
In some embodiments, referring to fig. 8, the magnetic field testing method based on the high-frequency magnetic sensor further includes:
step 500: and determining a magnetic field source value and a magnetic field source direction according to the magnetic field test curve.
In some embodiments, referring to fig. 9, step 500 comprises:
step 501: when no external magnetic field exists, fixing the angle of the sample to be tested, and simultaneously changing the magnetic field to generate a sample voltage change curve;
in the absence of an external magnetic field, the sample voltage change curve is obtained by fixing the angle change magnetic field, as shown in fig. 5, and the sample voltage change curve is obtained by fixing the angle change magnetic field, as shown in fig. 6.
Step 502: determining a magnetic field source value according to the sample voltage change curve and a predetermined standard curve;
step 503: forming a preset angle of the sample to be tested in the magnetic field by setting the position of the electromagnet, and reading the voltage value of the sample to be tested by a phase-locked amplifier;
step 504: rotating the sample to be tested and the electromagnet for 360 degrees simultaneously, and measuring the maximum voltage value of the sample measured by the phase-locked amplifier in the rotating process;
step 505: and determining the direction of the magnetic field source according to the voltage direction corresponding to the maximum value.
And determining the direction of the magnetic field source according to the voltage direction corresponding to the maximum value, and comparing the direction with a standard curve (figure 5) to determine the magnitude of the magnetic field source value.
Further, in steps 501 to 503, according to fig. 5 and 6, the magnetic field is set at H0, the angle is set at 35 degrees with respect to the sample, the maximum value is ensured, the rotating rod is rotated 360 degrees, and the angle between the sample and the magnetic field is ensured to be constant. Within 360 degrees, the voltage has a maximum value and a minimum value, and the direction of the maximum value is the direction of the magnetic field source. Scanning the magnetic field in the maximum direction, such as the curve in fig. 5, can obtain the magnitude of the magnetic field by curve fitting.
As can be seen from the above description, first, the magnetic field testing apparatus based on a high-frequency magnetic sensor according to the embodiment of the present invention includes: a rotary base rotatable about a center thereof; one end of the rotating rod is arranged on the center; the sample seat is arranged at the other end of the rotating rod and is used for arranging a GSG sheet and a GSG binding wire, and the GSG binding wire is arranged on the GSG sheet and is connected with a sensor to be detected; the biaser is connected with the other end of the GSG binding wire; a high frequency source for providing a high frequency signal, connected to the biaser; the phase-locked amplifier is respectively connected with the high-frequency source and the biaser; and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the rotating rod. The invention adopts a high-frequency resonance method to build a set of high-frequency magnetic field test system to realize the test of the azimuth and the size of the magnetic field.
Next, the present invention further provides a magnetic field testing method based on the high-frequency magnetic sensor, including: firstly, inputting a high-frequency signal through a high-frequency source; inputting low-frequency amplitude modulation through a phase-locked amplifier; secondly, inputting low-frequency amplitude modulation into a sample to be tested through a GSG binding wire; and finally, generating a magnetic field test curve according to an output signal generated by the rotating sample to be tested.
The invention adopts a high-frequency resonance method to build a set of high-frequency magnetic field testing device, and realizes the testing of the azimuth and the size of the magnetic field based on the device.
In the description of the present specification, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
Reference to the description of the terms "one embodiment," a particular embodiment, "" some embodiments, "" e.g., "an example," "a particular example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. The sequence of steps involved in the various embodiments is provided to schematically illustrate the practice of the invention, and the sequence of steps is not limited and can be suitably adjusted as desired.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A magnetic field testing device based on a high-frequency magnetic sensor is characterized by comprising:
a rotary base rotatable around the center thereof;
a rotating rod, one end of which is arranged on the center;
the sample seat is arranged at the other end of the rotating rod and is used for arranging a GSG (global system for mobile) sheet and a GSG binding wire, and the GSG binding wire is arranged on the GSG sheet and is connected with a sensor to be detected;
the biaser is connected with the other end of the GSG binding wire;
a high frequency source for providing a high frequency signal, connected to the biaser;
the phase-locked amplifier is respectively connected with the high-frequency source and the biaser;
and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the rotating rod.
2. The magnetic field testing device of claim 1, further comprising: and the motor is used for driving the rotating seat to rotate.
3. The magnetic field testing device of claim 1, wherein the GSG sheet is provided with an SMA joint, and the GSG binding wire is wound on the SMA joint;
the electromagnet is a one-dimensional electromagnet;
the sensor to be measured comprises a first film and a second film.
4. The magnetic field testing device of claim 3, wherein the sensor under test further comprises two electrodes connected by the first membrane and the second membrane;
the first film is made of spin orbit coupling material.
5. The magnetic field testing device of claim 4, wherein the spin-orbit coupling material comprises: heavy metal material such as Pt, W, ta, moS 2 、WSe 2 Equi-two-dimensional material and Bi 2 Se 3 Iso-topological insulators;
the second thin film is made of a ferromagnetic material.
6. The magnetic field testing device of claim 5, wherein the ferromagnetic material comprises: coFeB, co/Pt, and NiFe.
7. A magnetic field test method based on a high-frequency magnetic sensor applied to the magnetic field test apparatus based on a high-frequency magnetic sensor according to any one of claims 1 to 6, comprising:
inputting a high-frequency signal through a high-frequency source;
inputting low-frequency amplitude modulation through a phase-locked amplifier;
inputting the low-frequency amplitude modulation into a sample to be tested through a GSG binding wire;
and generating a magnetic field test curve according to an output signal generated by the rotating sample to be tested.
8. The method of claim 7, wherein generating a magnetic field test profile from the output signal generated by the rotating sample under test comprises:
filtering the high-frequency signal of the output signal by a bias device, and inputting the high-frequency signal into the phase-locked amplifier;
and carrying out fixed frequency test on the input signal, and generating a magnetic field test curve according to the test signal.
9. The magnetic field testing method of claim 7, further comprising:
and determining the magnitude of the magnetic field source value and the direction of the magnetic field source according to the magnetic field test curve.
10. The method of claim 9, wherein determining a magnetic field origin value and a magnetic field origin direction from the magnetic field test curve comprises:
when no external magnetic field exists, fixing the angle of the sample to be tested, and simultaneously changing the magnetic field to generate a sample voltage change curve;
determining a magnetic field source value according to the sample voltage change curve and a predetermined standard curve;
forming a preset angle of the sample to be tested in the magnetic field by setting the position of the electromagnet, and reading the voltage value of the sample to be tested by a phase-locked amplifier;
rotating the sample to be tested and the electromagnet for 360 degrees simultaneously, and measuring the maximum voltage value of the sample measured by the phase-locked amplifier in the rotating process;
and determining the magnetic field source direction according to the voltage direction corresponding to the maximum value.
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