CN115420750A - Surface defect detection system, surface defect detection method and surface detection production line - Google Patents
Surface defect detection system, surface defect detection method and surface detection production line Download PDFInfo
- Publication number
- CN115420750A CN115420750A CN202211204990.1A CN202211204990A CN115420750A CN 115420750 A CN115420750 A CN 115420750A CN 202211204990 A CN202211204990 A CN 202211204990A CN 115420750 A CN115420750 A CN 115420750A
- Authority
- CN
- China
- Prior art keywords
- light source
- light sources
- defect detection
- surface defect
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention provides a surface defect detection system, a surface defect detection method and a surface detection production line, wherein the surface defect detection system comprises a bearing structure, an image acquisition device and a plurality of light sources. The bearing structure is used for supporting the detected surface, and the image acquisition device can move relative to the bearing structure or the detected surface in a preset path. The light source can be independently controlled to be turned on or turned off and is fixed relative to the image acquisition device, the light source is controlled to irradiate the bearing structure at different incidence angles, a strip-shaped irradiation range can be formed, and the irradiation ranges of the light sources on the bearing structure are overlapped. The embodiment of the invention can comprehensively reflect the characteristics of the detected surface, and the plurality of light sources irradiate at the same position at different incidence angles, so that the image acquisition device can acquire reflected light with enough intensity, a hardware basis is provided for improving the surface defect detection method, and the method can be applied to surface defect detection of a mirror surface or a semi-mirror surface.
Description
Technical Field
The invention relates to the technical field of workpiece surface detection, in particular to a surface defect detection system, a surface defect detection method and a surface detection production line.
Background
For a workpiece with a high-precision machining requirement, the surface of the workpiece needs to be detected before subsequent machining or delivery from a factory to judge whether the surface of the workpiece has defects such as spots, bulges, pits, scratches, chromatic aberration and the like, which is a necessary process for judging whether the workpiece is qualified or not.
The existing method for detecting surface defects by using machine vision mainly comprises the steps of shooting the surface of a workpiece by using a 2D camera or a 3D camera, judging whether the surface of the workpiece has defects or not by using a specific algorithm according to the acquired image characteristics, and determining the type and the position of the surface defects. However, the existing surface defect detecting system mainly uses halcon algorithm library (a machine vision algorithm library), which is a computing method based on lambertian illumination mathematical model, and according to the principle of the lambertian illumination mathematical model, it is limited that the brightness of the surface under all viewing angles is the same, and this feature requires that the light source is set as a parallel light source or an infinite point light source, and the camera is set such that the optical axis is perpendicular to the detected surface, and in the design form of the light source and the camera, only the diffuse reflection surface can make the camera receive enough reflected light, and for the specular reflection surface and the semi-specular reflection surface, the existing surface defect detecting form is adopted, so that the camera cannot obtain enough reflected light, and is difficult to present applicable stripe virtual images, resulting in the accuracy of surface defect detection being reduced, and the surface features of the workpiece cannot be fully reflected, therefore, a novel surface defect detecting system not only limited to the diffuse reflection surface needs to be provided.
The statements in the background section are merely prior art as they are known to the inventors and do not, of course, represent prior art in the field.
Disclosure of Invention
In view of one or more deficiencies in the prior art, the present invention provides a surface defect detection system comprising:
a load bearing structure for supporting a surface to be inspected;
an image acquisition device configured to be relatively movable with the load bearing structure or the inspected surface in a predetermined path; and
the light sources can be independently controlled to be turned on or off and are fixed relative to the image acquisition device; the light sources are controlled to irradiate the bearing structure at different incidence angles and are configured to form a strip-shaped irradiation range, and the irradiation ranges of the light sources on the bearing structure are overlapped; the irradiation range of the light source is positioned in the visual field range of the image acquisition device.
According to an aspect of the present invention, an optical axis of the image capturing device is directed to a strip-shaped illumination range formed by the plurality of light sources on the carrying structure or the detected surface.
According to an aspect of the present invention, the carrying structure comprises a driving unit, the driving unit drives the detected surface to move along a preset path; the image acquisition device and the light source are fixedly arranged.
According to an aspect of the invention, the predetermined path of the inspected surface comprises:
translating in a first direction along a plane of the load bearing structure; and
and the light source is translated along the plane of the bearing structure in the second direction, and when the detected surface moves along the first direction and the second direction, the strip-shaped illumination range of the light source on the detected surface is approximately vertical.
According to one aspect of the invention, the surface defect detection system further comprises a control system in communication with the image acquisition device and the light sources and configured to control the different light sources to be turned on or off at a preset frequency and time sequence, respectively.
According to an aspect of the present invention, an optical axis direction of the image capturing device is substantially perpendicular to a long side direction of a strip-shaped illumination range formed by the light source;
the detected surface is divided into a first side and a second side by taking a normal direction as an interface, the light sources are divided into a first light source group and a second light source group, and the first light source group and the second light source group are respectively arranged on the first side and the second side of the detected surface.
According to an aspect of the invention, wherein the first light source group comprises bar-shaped light sources which are laterally illuminated towards the carrying structure with an angle of incidence not less than 75 °.
According to an aspect of the invention, the second light source group comprises at least three strip light sources, and the strip light sources irradiate to the same position of the bearing structure at different incidence angles; the strip-shaped light source with the largest incidence angle in the three strip-shaped light sources of the second light source group is irradiated to the side face of the bearing structure at an incidence angle not smaller than 75 degrees.
According to an aspect of the invention, the second light source group comprises at least three strip-shaped light sources, and the three strip-shaped light sources are arranged in parallel and uniformly in a preset incidence angle range of the second side of the detected surface.
According to an aspect of the present invention, the surface defect detecting system further includes a second image capturing device, the second image capturing device is disposed on the first side of the detected surface, and an optical axis of the second image capturing device is directed to a strip-shaped illumination range formed by the plurality of light sources on the carrying structure or the detected surface.
According to an aspect of the invention, a distance between the image capturing device and the carrying structure in the direction of the optical axis thereof is smaller than a distance between the second image capturing device and the carrying structure in the direction of the optical axis thereof.
According to an aspect of the invention, with the extending direction of the first side being a 0 ° direction, an included angle between the optical axis direction of the image capturing device and the 0 ° direction is 30-95 ° and is adjustable within the angle range.
According to one aspect of the invention, the angle between the incident direction of the first light source group and the normal direction of the detected surface is 75-87 degrees; the range of the included angle between the incident direction of the second light source group and the normal direction of the detected surface is 10-87 degrees.
According to an aspect of the invention, wherein the distance between the image acquisition device and the bearing structure along the optical axis is 750-850 mm.
According to an aspect of the invention, the distance between the first light source group and the bearing structure in the irradiation direction is 600-1000 mm; the second light source group at least comprises three strip-shaped light sources which are independently controlled, and the distance between the three strip-shaped light sources and the bearing structure along the irradiation direction is 600-1000 mm.
According to an aspect of the invention, the plurality of bar light sources in the second light source group are equidistant from the supporting structure in the illumination direction.
According to an aspect of the present invention, the second image capturing device is disposed on the first side of the detected surface, and an included angle between the optical axis direction of the second image capturing device and the normal direction of the detected surface on the first side ranges from 25 ° to 60 °.
According to one aspect of the invention, the distance between the second image acquisition device and the bearing structure along the optical axis direction of the second image acquisition device is 940-1040 mm.
According to one aspect of the invention, wherein the image acquisition device is a 16K line scan camera; the second image acquisition device is an 8K line scan camera.
According to one aspect of the invention, the invention also comprises a surface defect detection method, applying the surface defect detection system as described above, the surface defect detection method comprising:
respectively acquiring incident angles of a plurality of light sources and angles of an optical axis of an image acquisition device relative to a detected surface;
acquiring images of the detected surface under the irradiation of different light sources, and acquiring a gray value of the irradiated part in the detected surface corresponding to the light sources according to the images corresponding to the different light sources;
calculating a surface normal vector and/or glossiness of an irradiated part in the detected surface according to the gray value, the incident angle of the corresponding light source and the angle of the optical axis of the image acquisition device relative to the detected surface;
calculating the curvature of the irradiated part in the detected surface according to the surface normal vector;
and judging the surface defects of the detected surface according to the curvature and/or glossiness of the irradiated part in the detected surface.
According to one aspect of the invention, the incident angles of the plurality of light sources and the angle of the optical axis of the image capture device relative to the inspected surface are obtained by calibrating the surface defect detection system.
According to one aspect of the present invention, the present invention further comprises a surface inspection production line comprising: a surface defect detection system as hereinbefore described.
Compared with the prior art, the embodiment of the invention provides a surface defect detection system, which utilizes a plurality of light sources to form coincident strip-shaped irradiation ranges on a detected surface, irradiates the same position of a bearing structure at different incidence angles, and after an image at the position is obtained, completes the surface defect detection of the detected surface by processing and analyzing the image and combining the incidence angle of the light sources and the optical axis angle of an image acquisition device, reduces the limitation on the hardware setting mode, provides a hardware basis for improving a surface defect detection method, can more accurately reflect the characteristics and the position of the middle surface defect of the detected surface, and can be applied to the defect detection of the mirror surface or the semi-mirror surface. The invention also comprises an embodiment of a surface defect detection method, which can improve the detection accuracy by using the surface defect detection system to detect the surface defects and can be applied to the specular reflection surface or the semi-specular reflection surface. The invention also includes an embodiment of a surface inspection production line, which includes the surface defect inspection system.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic perspective view of a surface defect detection system in accordance with an embodiment of the present invention;
FIG. 2 is a schematic side view of a surface defect detection system in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of a movement path of a detected object driven by a carrying structure according to an embodiment of the present invention;
FIG. 4 is a block diagram of a surface defect detection system in accordance with an embodiment of the present invention;
FIG. 5 is a schematic diagram of an image capture device according to an embodiment of the present invention;
FIG. 6 is a schematic view of a surface to be inspected in one embodiment of the present invention;
FIG. 7 is a timing diagram of a plurality of light sources in an embodiment of the invention;
FIG. 8 is a flow chart illustrating a method for detecting surface defects in accordance with an embodiment of the present invention.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection, either mechanically, electrically, or in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Moreover, the present invention may repeat reference numerals and/or reference letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it should be understood that they are presented herein only to illustrate and explain the present invention and not to limit the present invention.
FIG. 1 illustrates a detailed structure of a surface defect detection system 100 according to an embodiment of the present invention, which is described in detail below in conjunction with FIG. 1.
As shown in fig. 1, the surface defect detecting system 100 includes a carrying structure 110, an image capturing device 120 and a plurality of light sources 130, wherein the carrying structure 110 is used for supporting the inspected article and making a surface of the inspected article facing the image capturing device 120 and the light sources 130, the surface is used as an inspected surface 200 in the surface defect detecting system 100. In this embodiment, the detected surface 200 and the image capturing device 120 can move relative to each other along a predetermined path, wherein the detected surface 200 and/or the image capturing device 120 can be configured to be driven by a driving unit (not shown) to move along the predetermined path. In a preferred embodiment of the present invention, the carrying structure 110 is a conveyor belt or a set of conveyor belts, the inspected object is fixed or directly placed on the conveyor belt, and the inspected surface 200 faces upward, the image capturing device 120 and the light source 130 are fixedly disposed above the conveyor belt, so as to keep the positions of the image capturing device 120 and the light source 130 stable, and avoid the deviation caused by movement from affecting the precision of the surface defect detecting system 100, and meanwhile, the conveyor belt is used as the carrying structure 110, so that the inspected object can be conveniently separated from the surface defect detecting system 100 quickly after the inspection is completed, and can be rapidly replaced by another inspected object for surface inspection. Of course, in other embodiments of the present invention, the bearing structure 110 may only provide a supporting and fixing function, and the object to be detected is placed on the bearing structure 110 while the image capturing device 120 and the light source 130 move along a predetermined path relative to the surface to be detected 200, for example, a sliding rail with a predetermined shape is provided.
In this embodiment, the image capturing device 120 may select a line scan camera, which is used to detect continuous materials, such as metal, plastic, paper, fiber, etc., and detect the entire surface thereof, in cooperation with a corresponding line scan lens. The specific type and resolution accuracy of the image capturing device 120 can be selected according to the detection accuracy requirement of the detected surface 200, for example, in one specific embodiment of the present invention, the image capturing device 120 is selected from a model ML-HM-16K 30H-00-R16K line scan camera of Teledyne dala, and is used with a model LS1626B line scan lens of long-track. The image acquiring device 120 may further be configured with an image acquiring card to acquire the acquired image signal into the industrial control equipment, and store the acquired image signal on the hard disk in the form of a data file, so as to facilitate subsequent image processing. Specifically, the image acquisition card can be an OR-A8S0-PX840 image acquisition card of Teledyne DALSA brand.
As shown in fig. 1, the surface defect detecting system 100 includes a plurality of light sources 130, wherein the light sources 130 can be individually controlled to be turned on or off, and the light sources 130 can emit light sequentially or several light sources can emit light simultaneously according to a preset control program. In the present embodiment, the relative position of the light source 130 and the image capturing device 120 is fixed, and preferably, the light source 130 and the image capturing device 120 are both disposed at fixed positions of the surface defect detecting system 100, and the bearing structure 110 drives the object to be detected to move, and the direction of the detected surface 200 facing the light source 130 and the image capturing device 120 is maintained, so that the light source 130 is controlled to irradiate the bearing structure 110, and the irradiation range of the light source 130 on the bearing structure 110 is located within the visual field range of the image capturing device 120.
In the present embodiment, the light sources 130 irradiate the supporting structure 110 at different incident angles, and each of the light sources is capable of forming a strip-shaped irradiation range on the supporting structure 110, for example, a plurality of lasers are arranged in a one-dimensional array in the light sources 130, and a strip-shaped irradiation range is formed after light is homogenized, or an optical element is arranged at the front end of the light source 130 to form a target light field. Preferably, the length of the long side of the strip-shaped irradiation range formed by the light source 130 is not less than the maximum width of the inspected surface 200 so as to cover the whole range of the inspected surface 200, and the length of the short side of the strip-shaped irradiation range is determined according to the relative movement speed of the inspected surface 200 and the light source 130 and the surface inspection accuracy of the inspected surface 200. In an embodiment of the present invention, 6 light sources 130 are provided at different locations in the surface defect detection system 100, and the light sources 130 may be selected from CST model CST-2LPG800-W-TS bar light sources.
The plurality of strip-shaped irradiation ranges formed by the plurality of light sources 130 on the bearing structure 110 are overlapped and irradiate at the same position, the image acquisition device 120 acquires images in the strip-shaped irradiation ranges, the positions irradiated by the light sources 130 change according to the movement path of the detected surface 200 in the process that the detected surface 200 moves relative to the image acquisition device 120 and the light sources 130, and the image acquisition device 120 acquires the images in the strip-shaped irradiation ranges in the detected surface 200 until images of all positions of the detected surface 200 are acquired for surface defect detection. Specifically, the surface defect detecting system may further include a detecting module, such as an industrial computer, which is capable of receiving the image obtained by the image obtaining device 120, and calculating the surface defect detecting result according to a preset processing procedure and a calculation method, so as to obtain the type, range, and position of the surface defect point.
Further, as shown in fig. 1 and fig. 2, in the surface defect detecting system 100, the optical axis of the image capturing device 120 is directed to the strip-shaped illumination range formed on the carrying structure 110 or the detected surface 200 by the plurality of light sources 130. In the present embodiment, the optical axis of the image capturing device 120 is not limited to be perpendicular to the detected surface 200, but the center position of the image captured by the image capturing device 120 is ensured to coincide with the irradiation position of the light source 130, so as to ensure the image accuracy. When the line-scan camera is selected by the image capturing device 120, the irradiation position of the light source 130 is ensured to be within the visual field of the image capturing device 120, and preferably, the irradiation range direction of the bar shape formed by the light source 130 is the same as the opening direction of the light inlet of the line-scan camera (see fig. 5).
In a preferred embodiment of the present invention, the inspected object is in the shape of a flat plate, such as a plate made of various metals, plastics, glass, etc., wherein the inspected surface 200 is a large plane facing upward in the shape of a flat plate, and if the bottom plane needs to be inspected, the inspection can be continued by using the surface defect inspection system 100 in this embodiment after the flat plate is turned over. The side detection of the flat plate shape is not within the scope of the present embodiment and will not be described. In this embodiment, the detected surface 200 is driven to move in a predetermined path by using a device such as a conveyor belt set as the bearing structure 110, and the predetermined path of the detected surface 200 includes a translation along the plane of the bearing structure 110 in a first direction and a translation along the plane of the bearing structure 110 in a second direction, so that the illumination ranges of the light source 130 in the stripe shape formed on the detected surface 200 are substantially perpendicular to each other, so as to ensure the accuracy of the curvature calculation, for example, the angle between the illumination ranges of the light source 130 in the stripe shape formed on the detected surface 200 is 90 ° and the deviation is not greater than ± 5 °. Specifically, for example, as shown in fig. 6, the detected surface 200 is substantially a rectangular plane, the first direction and the second direction of the detected surface may be set as the long side direction and the short side direction of the rectangle, and for the detected surfaces 200 with other shapes, the first direction and the second direction perpendicular to each other may also be preset in the plane, and the bearing structure 110 is controlled to drive the detected surfaces 200 to perform translational motion in two directions, respectively.
Further, for the embodiment where the image capturing device 120 and the light source 130 are fixedly disposed, the movement path of the detected surface 200 enables the detected surface 200 to pass through the field of view of the image capturing device 120, such as a set of conveyor belts disposed at a specific angle, or cooperate with other equipment, such as a gripping device, to change the movement direction of the detected surface 200. Preferably, the image capturing device 120 and the light source 130 are disposed above the carrying structure 110, as shown in fig. 3, the carrying structure 110 drives the detected surface 200 to pass through the view range of the image capturing device 120 from below, and after the far end drives the detected surface 200 to rotate 90 °, the detected surface is reversely translated under the coordinate system of the image capturing device 120 to pass through the view range of the image capturing device 120.
As shown in fig. 4, the surface defect detecting system 100 further includes a control system 140 according to a preferred embodiment of the present invention, wherein the control system 140 is in communication with the image capturing device 120 and the light sources 130 and is capable of controlling the different light sources 130 to be turned on or off at a preset frequency and timing, respectively, as illustrated in the following embodiments of the present invention. The different light sources 130 are controlled to irradiate the detected surface 200 in a time-sharing manner, images of a certain position (the position irradiated by the light source 130) in the detected surface 200 under the irradiation of the different light sources 130 can be acquired by the image acquisition device 120, and the surface characteristics of the detected surface 120 can be reflected more comprehensively by setting the light rays and the incident angles emitted by the different light sources 130.
Further, according to the preferred embodiment of the present invention, as shown in fig. 1 and fig. 2, the optical axis direction of the image capturing device 120 is substantially perpendicular to the long side direction of the strip-shaped illumination range formed by the light source 130 on the carrying structure 110 or the inspected surface 200, so as to avoid large distortion at the edge position of the captured image, and for deviations caused by machining precision and assembly precision, in the preferred embodiment of the present invention, the image captured by the image capturing device 120 can be corrected by compensating for a small inclination amount through algorithm optimization, but when the inclination amount of the image capturing device 120 is large, even if the correction is performed through algorithm optimization, the image precision is also greatly reduced, and the surface defect detection result is affected. The light sources 130 are illuminated at the same position, and the light beams are fanned out at different central angles above the supporting structure 110. The direction in which the optical axis of the image capturing device 120 extends passes through the irradiation range (the region where the light rays coincide in fig. 2) formed by the plurality of light sources 130, and may be in a plane perpendicular to the long-side direction of the strip-shaped irradiation range. For the inspected surface 200 closer to the specular reflection, the farther the image capturing device 120 deviates from the reflection angle, the lower the intensity of the received reflected light, therefore, in the preferred embodiment of the present invention, the angle range between the optical axis of the image capturing device 120 and the inspected surface 200 can be adjusted within a certain range to meet the inspected surface of different material and the surface defect inspection requirement. During the primary surface defect detection, the relative position between the image capturing device 120 and the light source 130 is fixed, and the relative position does not conflict with the relative position between the image capturing device 120 and the light source 130 being adjustable within a certain angle range.
In this embodiment, the inspected surface 200 is divided into a first side and a second side by the normal direction, for example, in fig. 2, the first side is the left side and the second side is the right side from the perspective of the observer. The light sources 130 are divided into a first light source group 131 and a second light source group 132 according to the arrangement positions, the first light source group 131 is arranged on a first side of the inspected surface 200, and the second light source group 132 is arranged on a second side of the inspected surface 200.
Specifically, in the preferred embodiment of the present invention, the first light source group 131 includes one bar-shaped light source 131-1, and the bar-shaped light source 131-1 laterally irradiates the bearing structure 110 at an incident angle of not less than 75 °. Further, the second light source group 132 includes at least three stripe light sources, and the stripe light sources in the second light source group 132 irradiate the same position of the supporting structure 110 with different incident angles. The stripe light source 132-1 with the largest incident angle among the plurality of stripe light sources of the second light source group 132 is laterally irradiated to the carrying structure 110 with an incident angle not less than 75 °, wherein the incident angles of the stripe light source 131-1 and the stripe light source 132-1 are selected according to the material characteristics of the inspected surface 200, for example, 80 °. In practical application, dust may be contaminated in the transportation process or the processing process of the detected surface 200, convex particles are formed on the detected surface 200, the convex particles do not belong to the defects of the detected surface 200, and in order to prevent misjudgment, in the embodiment, the bar-shaped light source 131-1 and the bar-shaped light source 132-1 with large incident angles are selected to irradiate the detected surface 200 from the first side and the second side respectively, so that the characteristics of the connection position of the dust and the detected surface 200 can be displayed more clearly, discrimination can be performed, misjudgment can be reduced, and the accuracy of surface defect detection can be improved.
As shown in fig. 1 and 2, in the preferred embodiment of the present invention, at least three strip light sources are included in the second light source group 132, and the three strip light sources are arranged in parallel and uniformly within a preset incident angle range of the second side of the detected surface 200. Preferably, all the bar-shaped light sources in the first and second light source groups 131 and 132 are arranged in parallel and edge-aligned. In practical application, the strip-shaped light sources can be selected to have the same specification, and are arranged in parallel and aligned by taking the overlapped irradiation positions as the centers of circles, so that the coverage range of the formed strip-shaped irradiation positions is the same. Different strip-shaped light sources are irradiated to the inspected surface 200 at different incident angles to form different reflected lights, and increasing the number of strip-shaped light sources in the second light source group 132 can improve the accuracy of surface defect detection, for example, as shown in fig. 2, the second light source group 132 includes 5 strip-shaped light sources. In different embodiments of the present invention, the number of bar-shaped light sources in the second light source group 132 is preferably not less than three, for example, only the bar-shaped light sources 132-1, 132-3 and 132-5 in fig. 2 are retained by the bar-shaped light sources in the second light source group 132. Of course, more strip light sources may be provided to further improve the accuracy of surface defect detection.
Taking the example that the first light source group 131 has 1 bar light source, and the second light source group 132 includes 5 bar light sources, in the specific embodiment of the present invention, the 6 bar light sources are turned on and off at different frequencies and time sequences, and further, the supporting structure 110 driving the detected surface 200 to move is also stopped when the light source 130 and the image obtaining device 120 are turned on, so as to avoid the decrease of the definition of the obtained image and the insufficient capability of representing the defect details due to the movement. Specifically, the moving/stopping frequency of the carrying structure 110, the on/off frequency of the image capturing device 120, and the on/off frequency of the 6 bar light sources may be as shown in fig. 7, images of the detected surface 200 under different light source illumination are captured by the image capturing device 120, specifically, an industrial personal computer may be used as a unified control switch, for example, the on and off of the image capturing device 120 and the light sources 130 are controlled by an enable signal, a low level signal is output during the translation of the detected surface 200 along the first direction or the second direction or within the visual field of the image capturing device 120, the image capturing device 120 and the light sources 130 are turned on, a high level signal is output during the rotation of the detected surface 200 or outside the visual field of the image capturing device 120, the image capturing device 120 and the light sources 130 are turned off, and a voltage signal is continuously output at a preset frequency during all the detection processes, so as to control the timing of the image capturing device 120 and the different light sources 130.
According to a preferred embodiment of the present invention, as shown in fig. 1 and fig. 2, the surface defect detecting system 100 further includes a second image capturing device 150, wherein the second image capturing device 150 is disposed on a first side of the inspected surface 200, and an optical axis of the second image capturing device 150 is also directed to a strip-shaped irradiation range formed on the carrying structure 110 or the inspected surface 200 by the plurality of light sources 130. Preferably, the second image capturing device 150 also selects a line scan camera, which can be used as a supplementary device of the image capturing device 120, and when the surface defect detection is performed, the image capturing device 120 and the second image capturing device 150 are simultaneously turned on, and images at different angles are respectively captured, so that the accuracy of the surface defect detection is improved. In an embodiment of the present invention, the second image capturing device 150 may select a model 8K line scan camera model ML-HM-08K30H-00-R model of Teledyne DALSA, and be used in conjunction with a model LS9001A line scan lens model of a long footpath. The second image capturing device 150 may further be configured with an image capturing card to capture the captured image signal into the industrial control device, and store the captured image signal in the form of a data file on the hard disk, so as to facilitate subsequent image processing. Specifically, the image acquisition card can be an OR-A8X0-PX840 image acquisition card of Teledyne DALSA brand.
In a preferred embodiment of the present invention, the distance between the image capturing device 120 and the carrying structure 110 in the optical axis direction thereof and the distance between the second image capturing device 150 and the carrying structure 110 in the optical axis direction thereof are not coincident, so as to avoid mutual interference when adjusting the angles of the image capturing device 120 and the second image capturing device 150, specifically, standard lenses with different working distances may be selected, in this embodiment, the image capturing device 120 is closer to the detected surface 200 than the second image capturing device 150 in the respective optical axis directions.
According to a preferred embodiment of the present invention, the bar light source 131-1 of the first light source group 131 and the bar light source 132-1 of the second light source group 132 having the largest incident angle are dark field light sources, and the bar light sources 132-2-132-5 of the second light source group 132 except the bar light source 132-1 having the largest incident angle are gray field light sources. In the present embodiment, the bar light source 131-1 and the bar light source 132-1 are mainly used in cooperation with the image capturing device 120 to prevent dust from adhering to the detected surface 200 and causing erroneous judgment.
In various embodiments of the present invention, the setting angles and distances of the image capturing device 120 and the light source 130 are selected within a preferred range of values. As shown in fig. 2, the extending direction of the first side of the detected surface 200 is taken as a 0 ° direction, and the included angle between the optical axis direction of the image capturing device and the 0 ° direction is 30-95 ° and is adjustable within the angle range. The optical axis of the image capturing device 120 is not limited to be perpendicular to the inspected surface 200, but can be adjusted in a wide range according to the surface characteristics of the inspected surface 200, and for the inspected surface 200 with obvious diffuse reflection, the image capturing device 120 can be disposed on the second side of the inspected surface 200, i.e. the side close to the second light source 132. Meanwhile, in order to avoid the interference between the image capturing device 120 and the light source 130, and the second light source group 132 having a plurality of bar-shaped light sources is disposed at the second side, the selectable angle range of the image capturing device 120 at the first side is larger. Specifically, the image capturing device 120 may include angles of 30 °, 60 °, 90 °, 95 ° with the 0 ° direction. The distance between the image capturing device 120 and the carrying structure 110 along the optical axis is 750-850 mm, for example 800 mm.
The second image capturing device 150 is disposed on the first side of the detected surface 200, an included angle between the optical axis direction of the second image capturing device 150 and the normal direction of the detected surface 200 on the first side ranges from 25 ° to 60 °, and when the reflection characteristic of the detected surface 200 is known once, an included angle between the optical axis direction of the second image capturing device 150 and the normal direction of the detected surface 200 on the first side may be 25 °, 30 °, 45 °, 60 °, and the like, and is adjustable within an angle range of 25 ° to 60 °. The distance between the second image capturing device 150 and the carrying structure 110 along the optical axis thereof is 940-1040 mm, for example 990 mm, and the distance between the second image capturing device 150 and the inspected surface 200 along the optical axis may be set to be slightly larger than the distance between the image capturing device 120 and the inspected surface 200 along the optical axis.
The range of the included angle between the incident direction of the first light source group 131 and the normal direction of the detected surface 200 is 75-87 degrees, for example, 80 degrees, and the included angle is used for screening dust attached to the detected surface 200 to reduce misjudgment. The angle between the incident direction of the second light source group 132 and the normal direction of the detected surface 200 is in the range of 10-87 °, and the incident angles of the plurality of strip-shaped light sources are distributed in the angle range. The distance between the first light source set 131 and the supporting structure 110 in the irradiation direction is 600-1000 mm, for example, 800 mm. The second light source group 132 includes at least three individually controlled strip-shaped light sources, and the distance between the three strip-shaped light sources and the supporting structure 110 along the illumination direction is 600-1000 mm, for example, 800 mm.
Further, the plurality of bar light sources in the second light source group 132 are equidistant from the supporting structure 110 along the irradiation direction, as shown in fig. 2, the plurality of bar light sources are dispersed in a fan shape in a range of an angle of 10 to 87 ° with respect to the normal direction of the detected surface 200 in a side view, and the plurality of bar light sources are equidistant from the supporting structure 110 along the irradiation direction, so that the structure is compact, the incident angle of the light sources can be conveniently adjusted, and meanwhile, when the curvature of the surface defect is calculated, the influence of the incident distances of different light sources can be ignored, and the calculation is simplified.
The present invention also includes an embodiment of a surface defect inspection method S100, which can perform surface defect inspection on an inspected surface by using the surface defect inspection system described in the foregoing embodiment. As shown in fig. 8, in step S101, the incident angles of the plurality of light sources and the angles of the optical axes of the image capturing devices with respect to the detected surface are respectively obtained, and in particular, this step can be obtained when the surface defect detecting system is set up. According to the preferred embodiment of the present invention, the incident angle of the light source and the angle of the optical axis of the image capturing device relative to the detected surface can be adjusted within a certain range to adapt to the detected surface with different diffuse reflection coefficients.
In step S102, images of the detected surface under different light sources are obtained, and the gray value of the irradiated portion of the detected surface corresponding to the light source is obtained according to the images corresponding to the different light sources. The image of the inspected surface is obtained by an image acquisition device, specifically, an industrial camera, whose relative position with respect to the plurality of light sources is fixed, and which can photograph the position on the inspected surface irradiated by the light sources. In different embodiments of the present invention, the gray-scale image of the detected surface can be directly obtained and the gray-scale value is read, or after the image is obtained, the image is preprocessed to obtain the gray-scale value. The images under the irradiation of different light sources can be respectively turned on and off in a preset time sequence by controlling the plurality of light sources, and also can be turned on simultaneously according to the setting that different light sources can emit light beams with different colors, and after the images are obtained, the images under the irradiation of different light sources are split according to the colors of the light beams.
In step S103, a surface normal vector and/or a glossiness of the illuminated portion of the inspected surface is calculated according to the gray value, the incident angle of the corresponding light source, and the angle of the optical axis of the image capturing device relative to the inspected surface, wherein the glossiness of the inspected surface can be represented by the specular reflection coefficient.
In the existing surface defect detection method, because the light source is a parallel light source or an infinite point light source, and the optical axis of the image acquisition device is perpendicular to the detected surface, the numerical values of the incident angle and the optical axis angle are not introduced in the process of calculating the normal vector of the surface, specifically, the most widely applied halcon algorithm library in the existing method for detecting the surface defect by using machine vision is taken as an example, wherein the limitation on a plurality of relative position relations set by hardware and the defects of the surface defect detection only capable of being applied to the diffuse reflection surface are all caused by the calculation principle.
The surface defect detection method S100 provided in this embodiment can adjust the incident angle of the light source and the optical axis angle of the image acquisition device according to the diffuse reflection coefficient of the detected surface, and calculate the surface normal vector according to the incident angle of the light source and the optical axis angle of the image acquisition device, and can be applied to surface defect detection of a specular reflection surface and a semi-specular reflection surface, so that the limitation on the relative position relationship of hardware is reduced, and the application range is wider.
In step S104, the curvature of the irradiated portion of the detected surface is calculated from the surface normal vector. According to a preferred embodiment of the present invention, a change in curvature in the direction of the portion of the detected surface irradiated with the light source can be calculated by controlling the direction of the light source. Further, the curvature change in different directions at the same position, for example, the same pixel coordinate, is calculated, and after the detection of the entire range of the detected surface is completed, the defective point in the detected surface whose curvature change exceeds the threshold (for example, it is not acceptable to set the threshold to be exceeded), and the position coordinate of the defective point in the detected surface are output. Preferably, the image of the position of the defect point can be amplified and displayed, so that the defect point can be rechecked, and the visualization degree and the accuracy of surface defect detection are improved.
In step S105, the surface defect of the surface to be inspected is determined based on the curvature and/or the glossiness of the irradiated portion of the surface to be inspected, and for example, the curvature exceeds a certain threshold value for a flat surface, and the surface defect is determined. And when the surface detection is finished in the range needing surface detection in the detected surface, finishing the surface detection process of the whole detected surface on the current station.
Further, according to a preferred embodiment of the present invention, the method for detecting surface defects further includes obtaining a surface roughness of the detected surface, for example, an actual measured value of the detected surface, where gray values of the detected surface under irradiation of different light sources are also related to the surface roughness of the detected surface, and after the detected surface is determined, the surface roughness can be used as a constant in the process of calculating a surface normal vector.
In the embodiment of the invention, a Lambert (Lambert) illumination mathematical model is improved into a Bidirectional reflection Distribution Function (Bidirectional reflection Distribution Function BRDF), and the brightness of the surfaces under different visual angles is different according to the Theory of the Bidirectional reflection Distribution Function, so that after the angle of the optical axis of the image acquisition device relative to the surface to be detected is set, for example, the image acquisition device is calibrated, and the BRDF model established based on a Cook-torance model of a micro surface Theory (micro surface Theory) is specifically as follows:
in the preferred embodiment of the present invention, in order to simplify the calculation process and adapt to industrial production, the three above three can be simplified into fixed constants related to the surface roughness of the detected surface, and can be obtained by calibration calculation in advance, specifically:
the fresnel equation is expressed as:
F(h，l)＝F 0 +(1-F 0 )(1-(h·l)) 5
the geometric attenuation factor is expressed as:
k＝0.5α
the normal distribution function is expressed as:
wherein alpha is the surface roughness of the detected surface, the value range is [0,1], and the alpha can be obtained through actual measurement of the detected surface or directly according to the processing process of the detected surface. l is the incident angle of the light source, v is the angle of the optical axis of the image acquisition device relative to the detected surface, which can be obtained by calibrating the light source and the image acquisition device in the surface defect detection system, and according to the above expression, the gray value of the image at the position irradiated by one light source in the detected surface can be simply expressed as:
s 1 G 1 ＝K a +K d (n·l 1 )+K s (v·l 1 )
in the formula, G is a gray value of an acquired image, after the image under irradiation of the corresponding light source is acquired by the image acquisition device, the corresponding gray value can be read, s represents an illumination coefficient of the corresponding light source, and is directly acquired when the surface defect detection system is arranged.
K a Representing ambient light, and in particular applications, the sensing environment of the sensed surface can be controlled to reduce the ambient light effects in the application scenario, such that K a Approaching zero and neglecting the influence of ambient light. K d For albedo, K, of the surface to be inspected in the existing photometric stereo method s Is the specular reflection coefficient of the surface to be inspected, where K s Is approximately equal to K d Reciprocal of (1), in the above formula, K d (n.l) represents the gray value, K, contributed by diffuse reflection in the image of the inspected surface s (v · l) represents the gray value contributed by the specular reflection in the image of the inspected surface.
Further, the gray-scale values for the images of the detected surface respectively illuminated by the plurality of light sources can be expressed as:
from the above equation system, the surface normal vector n = (Z) in the detected surface within the light source irradiation range can be accurately calculated x ,Z y 1) and further calculating the curvature of the light source irradiated portion in the detected surface according to the surface normal vector n.
Compared with the existing surface defect detection and calculation method, the surface defect detection method provided by the embodiment reflects the incident angles of different light sources and the influence of the visual angle of the image acquisition device on the gray value of the detected surface image, is more flexible in setting the positions of the light source and the image acquisition device, can also perform surface defect detection on the specular reflection surface and the semi-specular reflection surface, and enlarges the application range of the surface defect detection. Compared with manual visual detection, the limit resolution of the industrial camera is superior to that of human eyes, the surface defect detection method in the embodiment is uniform in detection standard and higher in precision, efficiency and accuracy can be improved by replacing manual detection, and labor cost is reduced.
Wherein the specular reflection coefficient K of the surface to be inspected s The glossiness of the detected surface can be reflected and can be obtained when the normal vector n of the surface is calculated. The gloss of the inspected surface, and the combination of gloss and curvature, are also used to characterize the defects of the inspected surface. In practical applications, there are many different types of surface defects in the inspected surface, and for the inspected surface in which only shape defects such as projections or depressions exist, it can be reflected only by the curvature of the inspected surface, or by a combination of the curvature and the glossiness of the inspected surface. For a detected surface where only color abnormality exists, the surface defect can be judged only by the glossiness of the detected surface. Of course, in most cases, there are usually a plurality of surface defects in the inspected surface, and different types of surface defects can be judged by using the curvature and the glossiness separately or by using a combination of the curvature and the glossiness.
Specifically, the detected surface is a flat surface of the anodized aluminum plate, and in the process of manufacturing the anodized aluminum plate, the possible surface defects in the detected surface mainly include 12 types in the following table, wherein each type of surface defect can be identified by curvature, glossiness or combination of curvature and glossiness, and the correspondence between the surface defect and curvature and glossiness is as shown in the following table.
For other types of inspected surfaces, it is also possible to capture most surface defects by curvature and/or gloss.
The present invention further includes an embodiment of a surface inspection production line, which includes the surface defect inspection system 100 described in the foregoing embodiment, and the surface inspection production line may further be provided with a surface defect inspection system applied to other surfaces of the inspected object, so as to complete the defect inspection process of the entire surface or the preset surface of the inspected object. The surface detection production line can also integrate stations or equipment for detecting the surface cleanliness of detected objects.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (21)
1. A surface defect detection system, comprising:
a load bearing structure for supporting a surface to be inspected;
an image acquisition device configured to be relatively movable with the load bearing structure or the inspected surface in a predetermined path; and
the light sources can be independently controlled to be turned on or off and are fixed relative to the image acquisition device; the light sources are controlled to irradiate the bearing structure at different incidence angles and are configured to form a strip-shaped irradiation range, and the irradiation ranges of the light sources on the bearing structure are overlapped; the irradiation range of the light source is positioned in the visual field range of the image acquisition device.
2. The surface defect detecting system of claim 1, wherein an optical axis of the image capturing device is directed to a strip-shaped illumination range formed by the plurality of light sources on the carrying structure or the detected surface.
3. The surface defect detecting system of claim 1 or 2, wherein the carrying structure comprises a driving unit, the driving unit drives the detected surface to move in a preset path; the image acquisition device and the light source are fixedly arranged.
4. The surface defect detection system of claim 3, wherein the predetermined path of the inspected surface comprises:
translating in a first direction along a plane of the load bearing structure; and
when the detected surface moves along the first direction and the second direction, the strip-shaped illumination range of the light source on the detected surface is approximately vertical.
5. The surface defect detection system of claim 1 or 2, further comprising a control system in communication with the image acquisition device and the light sources and configured to control the different light sources to be turned on or off at a preset frequency and time sequence, respectively.
6. The surface defect detecting system according to claim 2, wherein an optical axis direction of the image pickup device is substantially perpendicular to a long side direction of a strip-shaped irradiation range formed by the light source;
the detected surface is divided into a first side and a second side by taking a normal direction as an interface, the light sources are divided into a first light source group and a second light source group, and the first light source group and the second light source group are respectively arranged on the first side and the second side of the detected surface.
7. The surface defect detection system of claim 6, wherein the first light source bank comprises a bar light source that is side-illuminated at an angle of incidence of not less than 75 ° to the load bearing structure.
8. The surface defect detection system of claim 6, wherein the second light source set comprises at least three strip light sources, and the strip light sources illuminate the same position of the carrying structure at different incident angles; the strip-shaped light source with the largest incidence angle in the three strip-shaped light sources of the second light source group is irradiated to the side face of the bearing structure at an incidence angle not smaller than 75 degrees.
9. The surface defect detection system of claim 6, wherein the second light source group comprises at least three strip light sources arranged in parallel and uniformly within a preset incident angle range of the second side of the inspected surface.
10. The surface defect detecting system of claim 6, further comprising a second image capturing device disposed at the first side of the inspected surface, and an optical axis of the second image capturing device is directed to a strip-shaped illumination area formed by the plurality of light sources on the carrying structure or the inspected surface.
11. The surface defect detecting system of claim 6, wherein the extending direction of the first side is 0 °, and the included angle between the optical axis direction of the image capturing device and the 0 ° direction is 30-95 ° and is adjustable within the angle range.
12. The surface defect detection system of claim 11, wherein the angle between the incident direction of the first light source group and the normal of the surface to be detected ranges from 75 ° to 87 °; the included angle between the incident direction of the second light source group and the normal direction of the detected surface ranges from 10 degrees to 87 degrees.
13. The surface defect detection system of claim 6, wherein the distance between the image capture device and the carrying structure in the direction along the optical axis is 750-850 millimeters.
14. The surface defect detection system of claim 6, wherein the distance between the first light source group and the bearing structure in the irradiation direction is 600-1000 mm; the second light source group at least comprises three strip-shaped light sources which are independently controlled, and the distance between the three strip-shaped light sources and the bearing structure along the irradiation direction is 600-1000 mm.
15. The surface defect detection system of claim 14, wherein the plurality of strip light sources in the second light source group are equidistant from the carrier structure in an illumination direction.
16. The surface defect detecting system of claim 10, wherein the second image capturing device is disposed on the first side of the inspected surface, and an included angle between the optical axis direction of the second image capturing device and the normal direction of the inspected surface on the first side is in a range of 25-60 °.
17. The surface defect detection system of claim 10, wherein the second image capture device is positioned 940-1040 millimeters from the support structure along the optical axis thereof.
18. The surface defect detection system of claim 10, wherein the image acquisition device is a 16K line scan camera; the second image acquisition device is an 8K line scan camera.
19. A surface defect detection method using the surface defect detection system as claimed in any one of claims 1 to 18, the surface defect detection method comprising:
respectively acquiring incident angles of a plurality of light sources and angles of an optical axis of an image acquisition device relative to a detected surface;
acquiring images of the detected surface under the irradiation of different light sources, and acquiring a gray value corresponding to the light source of the irradiated part in the detected surface according to the images corresponding to the different light sources;
calculating a surface normal vector and/or glossiness of an irradiated part in the detected surface according to the gray value, the incident angle of the corresponding light source and the angle of the optical axis of the image acquisition device relative to the detected surface;
calculating the curvature of the irradiated part in the detected surface according to the surface normal vector;
and judging the surface defects of the detected surface according to the curvature and/or glossiness of the irradiated part in the detected surface.
20. The method of claim 19, wherein the angles of incidence of the plurality of light sources and the angle of the optical axis of the image capture device relative to the inspected surface are obtained by calibrating the surface defect inspection system.
21. A surface inspection production line comprising: the surface defect detection system of any one of claims 1-18.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211204990.1A CN115420750A (en) | 2022-09-29 | 2022-09-29 | Surface defect detection system, surface defect detection method and surface detection production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211204990.1A CN115420750A (en) | 2022-09-29 | 2022-09-29 | Surface defect detection system, surface defect detection method and surface detection production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115420750A true CN115420750A (en) | 2022-12-02 |
Family
ID=84206007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211204990.1A Pending CN115420750A (en) | 2022-09-29 | 2022-09-29 | Surface defect detection system, surface defect detection method and surface detection production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115420750A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115575399A (en) * | 2022-09-29 | 2023-01-06 | 梅卡曼德(上海)机器人科技有限公司 | Surface defect detection method and surface defect detection system |
-
2022
- 2022-09-29 CN CN202211204990.1A patent/CN115420750A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115575399A (en) * | 2022-09-29 | 2023-01-06 | 梅卡曼德(上海)机器人科技有限公司 | Surface defect detection method and surface defect detection system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110596131B (en) | Sheet glass edge flaw detection method based on image acquisition | |
| CN102023164B (en) | For detecting the apparatus and method of the local defect of transparent plate | |
| US9019489B2 (en) | Method and system for optically inspecting parts | |
| CN115436383A (en) | Surface defect detection system and surface detection production line | |
| SG173068A1 (en) | Methods for examining a bonding structure of a substrate and bonding structure inspection devices | |
| JP7268032B2 (en) | METHOD, APPARATUS AND INSPECTION LINE FOR SPECIFYING THREE-DIMENSIONAL SHAPE OF CONTAINER RING SURFACE | |
| CN218788002U (en) | Surface defect detection system and surface detection production line | |
| CN115420750A (en) | Surface defect detection system, surface defect detection method and surface detection production line | |
| US7986402B2 (en) | Three dimensional profile inspecting apparatus | |
| CN218629551U (en) | Surface defect detection system and surface detection production line | |
| WO2020220168A1 (en) | System for measuring contour of curved surface of transparent or semi-transparent material | |
| CN113466246B (en) | High-precision imaging system, method, image acquisition device and detection equipment | |
| US20150253128A1 (en) | Measurement apparatus, measurement method, and method of manufacturing article | |
| KR101198406B1 (en) | Pattern inspection device | |
| KR20190001789A (en) | Multi optic display inspecting device | |
| TWI529387B (en) | Optical detection device | |
| CN111220087B (en) | Surface topography detection method | |
| CN115575399A (en) | Surface defect detection method and surface defect detection system | |
| CN216747463U (en) | On-line object surface defect detection device | |
| CN110907470A (en) | Optical filter detection device and optical filter detection method | |
| CN213121656U (en) | Appearance inspection device and appearance inspection system | |
| CN213544424U (en) | Inspection equipment | |
| CN105229409A (en) | Use the method for the narrow recessed features of machine vision metrology | |
| CN217688624U (en) | Device for detecting edge defects of display panel and test equipment | |
| CN220690029U (en) | Multi-lens detection mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |