CN115409895A - Positioning device and method - Google Patents
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- CN115409895A CN115409895A CN202211057393.0A CN202211057393A CN115409895A CN 115409895 A CN115409895 A CN 115409895A CN 202211057393 A CN202211057393 A CN 202211057393A CN 115409895 A CN115409895 A CN 115409895A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
- G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
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- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T1/00—General purpose image data processing
- G06T1/0014—Image feed-back for automatic industrial control, e.g. robot with camera
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- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
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- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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- G06V10/10—Image acquisition
- G06V10/12—Details of acquisition arrangements; Constructional details thereof
- G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
- G06V10/141—Control of illumination
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- G06—COMPUTING; CALCULATING OR COUNTING
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- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
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- G06T2207/30148—Semiconductor; IC; Wafer
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Abstract
The invention relates to the technical field of wafer positioning, in particular to a positioning device and a positioning method. The positioning device includes: the device comprises a rotary carrying platform, an image positioning assembly, a reflective light-emitting piece and a detection positioning piece. The rotary carrying platform is used for placing an object to be measured, the position of the object to be measured can be adjusted, and the outer edge of the rotary carrying platform is positioned on the inner side of the outer edge of the object to be measured; the image positioning assembly is used for acquiring an image of the object to be detected from one side of the object to be detected, which is far away from the rotating carrying platform after the object to be detected is placed, and performing positioning detection; the reflection light-emitting piece is arranged on the other side of the part of the object to be measured, which extends out of the rotating carrying platform, and is used for providing illumination for the object to be measured and reflecting the object to be measured to a set position; the detection positioning piece is arranged on a reflection light path of the reflection luminous piece and used for acquiring an image of the object to be detected through the reflection luminous piece and carrying out positioning detection. This scheme can be solved the positioner suitability among the prior art and low, when the opaque determinand back of the back orientation positioner, is difficult to the problem of location.
Description
Technical Field
The invention relates to the technical field of wafer positioning, in particular to a positioning device and a positioning method.
Background
With the development of semiconductor technology, semiconductor processing involves a plurality of processes, each process requires different equipment, and many processes require the accurate position state of a wafer to be obtained in advance.
In the prior art, a method of laser positioning or image positioning in cooperation with rotation of a turntable is usually adopted to obtain position information of a wafer, so as to realize wafer alignment.
However, the laser positioning system in the prior art has a simple structure but high cost. The accuracy is low, the positioning success rate is low, and the actual industrial requirements can not be met gradually. The image positioning mode is adopted, the adaptive wafer type is few, for example, the back surface of an object to be measured is not light-tight, and when the back surface faces to the positioning device, the positioning device cannot position the object to be measured. If the positioning device is additionally arranged, the problem that no installation space exists.
Disclosure of Invention
The invention aims to provide a positioning device and a positioning method, aiming at overcoming the defects in the prior art, and solving the problems that the positioning device in the prior art is low in adaptability and difficult to position when the back surface of an object to be measured, of which the back surface is not light-tight, faces the positioning device.
In order to achieve the above purposes, the technical scheme adopted by the invention is as follows:
in one aspect, the present invention provides a positioning device, comprising:
the rotary carrying platform is used for placing an object to be measured and adjusting the position of the object to be measured, and the outer edge of the rotary carrying platform is positioned on the inner side of the outer edge of the object to be measured;
the image positioning assembly is used for acquiring an image of the object to be detected from one side of the object to be detected, which is far away from the rotating carrier after the object to be detected is placed, and determining the position of the object to be detected according to the coordinates of the mark points of the object to be detected in the image;
the reflection light-emitting piece is arranged on the other side of the part of the object to be measured, which extends out of the rotary carrying platform, and is used for providing illumination for the object to be measured and reflecting the object to be measured to a set direction;
and the detection positioning part is arranged on a reflection light path of the reflection luminous part and used for acquiring the image of the object to be detected through the reflection luminous part and determining the position of the object to be detected according to the coordinate of the mark point of the object to be detected in the image.
In some optional schemes, the image positioning assembly includes at least one of a first image positioning mechanism and a second image positioning mechanism, the first image positioning mechanism is located in the middle of the object to be detected and is used for acquiring a global image of the object to be detected and performing positioning detection, and the second image positioning mechanism is located in a portion of the object to be detected, which extends out of the rotating stage, and is used for acquiring a local image of the object to be detected and performing positioning detection.
In some alternatives, the first image positioning mechanism comprises:
the first light source is arranged on one side, away from the rotating carrying platform, of the object to be detected after the object to be detected is placed, and is used for providing illumination for the object to be detected;
and the first image positioning part is arranged on one side of the object to be detected, which is far away from the rotating carrying platform after being placed, and is used for acquiring the global image of the object to be detected and carrying out positioning detection.
In some optional schemes, the first light source includes two line light sources respectively located at two sides of an image capturing optical path of the first image positioning element.
In some optional solutions, the first image positioning mechanism further includes an opening light source, which is sleeved outside the rotating stage.
In some alternatives, the second image positioning mechanism comprises:
the second light source is arranged on one side, away from the rotating carrying platform, of the object to be detected and used for providing illumination for the object to be detected;
and the second image positioning part is arranged on one side of the object to be detected, which is far away from the rotating carrying platform after being placed, and is used for acquiring a local image of the object to be detected and carrying out positioning detection.
In some optional schemes, the first image positioning element, the second image positioning element and the detection positioning element each include a camera and a positioning detection module, the camera is configured to acquire an image of the object to be detected, and the positioning detection module is configured to acquire coordinates of a mark point of the object to be detected in the image, and determine the position of the object to be detected according to the position of the mark point in the image.
In some alternatives, the second light source is an outer coaxial light source.
In some optional schemes, the reflection luminous element is a corner coaxial light source, and the reflection angle is degrees.
On the other hand, the invention also provides a positioning method, which is realized by the positioning device and comprises the following steps:
when the back of an object to be detected with an opaque back faces towards the rotary carrying table, acquiring an image of the object to be detected by adopting an image positioning assembly, and determining the position of the object to be detected according to the coordinate of the object to be detected corresponding to the mark point in the image;
when the back of an object to be detected with a non-light-tight back faces to the rotary carrying platform, the reflection light-emitting piece is used for providing illumination for one side, facing the rotary carrying platform, of the object to be detected, the image of the object to be detected is obtained by the reflection light path detection positioning piece arranged on the reflection light-emitting piece, and the position of the object to be detected is determined according to the coordinate, corresponding to the mark point in the image, of the object to be detected.
Compared with the prior art, the invention has the advantages that: when the back of the object to be measured, the back of which is opaque, faces the rotary carrying table, an image of the object to be measured is obtained by adopting the image positioning assembly, and the position of the object to be measured is determined according to the coordinates of the object to be measured, which correspond to the mark points in the image; when the back of the object to be detected with the back being opaque faces back to the rotary carrying table, the reflection luminous piece is used for providing illumination for the object to be detected, the detection positioning piece arranged on the reflection light path of the reflection luminous piece is used for obtaining the image of the object to be detected, and the position of the object to be detected is determined according to the coordinate of the mark point of the object to be detected in the image. For an object to be detected with a light-transmitting back surface, the image of the object to be detected can be obtained by the image positioning component for positioning detection, and the image of the object to be detected is obtained by matching the reflective luminous piece and the detection positioning piece for positioning detection. When the position corresponding to the coordinates of the mark points in the object to be detected does not meet the set position requirement, the position of the object to be detected can be adjusted by rotating the carrying platform, so that the coordinates of the mark points in the object to be detected meet the requirement.
The reflection illuminating part is utilized in the scheme, so that the setting position of the detection positioning part can be changed, the possibility of installation conflict interference with other parts is reduced, and the utilization rate of the space is improved. The problem that the object to be detected with the opaque back cannot be shot due to insufficient space is solved, and a solution is provided for a detection scheme with a small space.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a positioning device in an embodiment of the present invention.
In the figure: 1. rotating the carrying platform; 2. an object to be tested; 3. an image positioning component; 31. a first image positioning mechanism; 311. a first light source; 312. a first image positioning member; 313. an aperture light source; 32. a second image positioning mechanism; 321. a second light source; 322. a second image positioning member; 4. a reflective light emitting member; 5. detecting a positioning piece; 6. a drive mechanism.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
As shown in fig. 1, the present invention provides a positioning apparatus, comprising: the device comprises a rotary carrying platform 1, an image positioning component 3, a reflective luminous element 4 and a detection positioning element 5.
The rotary carrying platform 1 is used for placing the object 2 to be measured, the position of the object 2 to be measured can be adjusted, and the outer edge of the rotary carrying platform 1 is positioned on the inner side of the outer edge of the object 2 to be measured; the image positioning component 3 is used for acquiring an image of the object 2 to be measured from one side of the object 2 to be measured, which is far away from the rotating carrier 1 after being placed, and determining the position of the object 2 to be measured according to the coordinates of the mark points of the object 2 to be measured in the image; the reflection luminous piece 4 is arranged at the other side of the part of the object 2 to be measured, which extends out of the rotary carrying platform 1, and is used for providing illumination for the object 2 to be measured and reflecting the object 2 to be measured to a set position; the detecting and positioning part 5 is arranged on the reflection light path of the reflection light-emitting part 4 and is used for acquiring the image of the object 2 to be detected through the reflection light-emitting part 4 and determining the position of the object 2 to be detected according to the coordinate of the mark point of the object 2 to be detected in the image.
When the positioning device is used, the object to be measured 2 is placed on the rotating carrying platform 1, when the back of the object to be measured, the back of which is opaque, faces the rotating carrying platform 1, the image positioning assembly 3 is adopted to obtain the image of the object to be measured 2, and the position of the object to be measured 2 is determined according to the coordinates of the object to be measured 2, corresponding to the mark points in the image; when the back of the object 2 to be measured, the back of which is opaque, rotates the carrier 1 in a reverse direction, the reflective light-emitting member 4 is used for providing illumination for the object 2 to be measured, the detection positioning member 5 arranged on the reflective light path of the reflective light-emitting member 4 is used for acquiring the image of the object 2 to be measured, and the position of the object 2 to be measured is determined according to the coordinate of the mark point in the image corresponding to the object 2 to be measured.
By using the reflective luminous element 4, the setting position of the detection positioning element 5 can be changed, the possibility of installation conflict interference with other parts is reduced, and the utilization rate of space is improved.
For the object 2 to be detected with a light-transmitting back surface, the image can be acquired through the image positioning component 3, and the image can be positioned and detected, and the image can be acquired by matching the reflective luminescent part 4 with the detection positioning part 5, and can also be positioned and detected.
When the coordinates corresponding to the mark points in the object to be measured 2 on the image are detected not to meet the corresponding set coordinate requirements, namely the positions corresponding to the mark points do not meet the set position requirements, the positions of the object to be measured 2 can be adjusted by rotating the carrying platform 1, so that the positions of the object to be measured 2 meet the requirements.
In this embodiment, the apparatus further includes a control module, which is used to determine whether the position corresponding to the coordinates of the mark point in the object 2 meets the requirement of setting the position, and when the position does not meet the requirement of setting the position, the position of the object 2 is adjusted by rotating the carrier 1, so that the position of the object 2 meets the requirement.
The object 2 to be measured in this example is a wafer, and may be a device similar to a wafer.
In some optional embodiments, the reflective light-emitting member 4 is a corner coaxial light source, is disposed at an outer edge portion of the object 2 extending out of the rotating carrier 1, and cooperates with the image of the other side of the object 2 obtained by the detecting and positioning member 5 to provide a light source for the object 2.
When the rotating carrying platform 1 is vertically placed and the object to be measured 2 is horizontally placed, the image positioning assembly 3 is used for acquiring an image of the upper side of the object to be measured 2 and positioning the position of the object to be measured 2 according to the mark points on the object to be measured 2 in the image. The reflective luminous element 4 is arranged below the object to be measured 2 and is positioned at the outer edge part position of the object to be measured 2 extending out of the rotary carrying platform 1, so that illumination can be provided for the lower side of the object to be measured 2, and the reflective luminous element 4 can reflect an image below the object to be measured 2 to a set position.
In some alternative embodiments, the reflection angle of the reflective luminescent member 4 is 90 degrees.
In this embodiment, the reflection angle of the reflective/luminescent member 4 is 90 degrees, and when the object 2 to be measured is placed horizontally, the light path can be rotated by 90 degrees by using the reflection function of the reflective/luminescent member 4, so that the detecting/positioning member 5 is placed laterally. The obtained working distance is the distance between the reflective luminous element 4 of the shot object and the distance between the reflective luminous element 4 and the detection positioning element 5, so that the light path in the z-axis direction is converted into the light paths in the z-axis direction and the x-axis direction, and the installation space is greatly saved. Meanwhile, the reflective luminous element 4 can irradiate diffused light to the object 2 to be measured, so that an illumination effect is provided. The detection positioning part 5 is arranged on a horizontal position, namely, an image under the object 2 to be detected can be obtained on a reflection light path of the reflection luminous part 4, the object 2 to be detected is positioned through a mark point on the object 2 to be detected in the image, and when the object 2 to be detected does not meet the requirement, the position of the object 2 to be detected can be adjusted by rotating the carrying platform 1, so that the position of the object 2 to be detected meets the requirement.
In addition, the mark point on the object 2 may be a notch on the outer edge or a pattern on the object 2 as a mark point, and the pattern is a small square or a small star.
Therefore, the scheme can be suitable for the objects to be measured 2 with various mark points, the objects to be measured 2 with the light-transmitting back and the objects to be measured 2 with the light-tight back. The positioning device can meet the positioning and detecting requirements of different objects to be detected 2 and has stronger adaptability.
In this embodiment, the positioning apparatus further includes a driving mechanism 6, which uses a driving motor to drive the rotating stage 1 to rotate, so as to drive and adjust the position of the object 2 to be measured. The device can also be provided with a control module which is in signal connection with the driving mechanism 6, the image positioning component 3 and the detection positioning component 5, and can judge whether the position of the object to be detected 2 meets the requirement or not by acquiring the positioning detection result of the image positioning component 3 and the detection positioning component 5 on the object to be detected 2, and when the position of the object to be detected 2 does not meet the requirement, the rotating carrier 1 is controlled to rotate to adjust the position of the object to be detected 2.
In some optional schemes, the image positioning assembly 3 includes at least one of a first image positioning mechanism 31 and a second image positioning mechanism 32, where the first image positioning mechanism 31 is located in the middle of the object 2 and is used to acquire a global image of the object 2 and perform positioning detection, and the second image positioning mechanism 32 is located in a portion of the object 2 that extends out of the rotating stage 1 and is used to acquire a local image of the object 2 and perform positioning detection.
In this embodiment, the first image positioning mechanism 31 and the second image positioning mechanism 32 can obtain the image of the object 2 to be measured from the side of the object 2 far away from the rotating stage 1 and perform positioning detection, wherein the first image positioning mechanism 31 is located in the middle of the object 2 to be measured and is used for obtaining the global image of the object 2 to be measured and performing positioning detection, and can perform coarse positioning on the object 2 to be measured, and the second image positioning mechanism 32 is used for obtaining the local image of the object 2 to be measured and performing positioning detection, and can perform fine positioning on the object 2 to be measured.
If the image positioning assembly 3 includes the first image positioning mechanism 31 and the second image positioning mechanism 32, in a specific use process, the first image positioning mechanism 31 and the second image positioning mechanism 32 may be selected according to actual needs, or the first image positioning mechanism 31 is used to perform coarse positioning, and then the second image positioning mechanism 32 is used to perform fine positioning. For example, when the requirement for positioning the object 2 is not high, the object may be positioned only by performing positioning, and when the requirement for positioning the object 2 is high, the second image positioning mechanism 32 may be used, or the first image positioning mechanism 31 may be used to perform coarse positioning first, and then the second image positioning mechanism 32 may be used to perform fine positioning. The first image positioning mechanism 31 is firstly used for coarse positioning, and then the second image positioning mechanism 32 is used for fine positioning, so that the mutual matching mode can reduce the detection and positioning time and improve the production operation efficiency.
In some alternative embodiments, the first image positioning mechanism 31 includes: a first light source 311 and a first image positioning member 312.
The first light source 311 is arranged on one side of the object 2 to be measured away from the rotating carrier 1, and is used for providing illumination for the object 2 to be measured; the first image positioning element 312 is disposed on a side of the object 2 away from the rotating stage 1, and is configured to obtain a global image of the object 2 and perform positioning detection.
In the present embodiment, the first image positioning element 312 is disposed on a side of the object 2 away from the rotary stage 1. When the object 2 is a back-side light-tight element and the back side faces the rotary stage 1, when the image of the object 2 is acquired, the first light source 311 disposed on the same side as the first image positioning member 312 illuminates the object 2, and the reflected light enters the first image positioning member 312, so that the acquired image is clearer.
When the object 2 is a device with a light-transmitting back surface, the object 2 can be positioned in the same manner.
In some alternative embodiments, the first light source 311 includes two line light sources respectively located at two sides of the optical path of the image captured by the first image positioning element 312.
In this embodiment, in order to have a better illumination effect for the first light source 311 to the object to be measured 2, two line light sources respectively located at the two sides of the image light path of the first image positioning element 312 are adopted, and the line light sources face the object to be measured 2, so that the object to be measured 2 has a better illumination effect, and the first image positioning element 312 obtains a clearer image.
In some optional embodiments, the first image positioning mechanism 31 further includes an opening light source 313, which is disposed outside the rotating stage 1.
In this embodiment, when the object 2 is a device with a transparent back surface, in order to make the first image positioning element 312 obtain a clearer image, the front surface illumination mode is adopted because the back surface of the object 2 is transparent, which may cause that the mark points on the object 2 are difficult to clearly display in the image obtained by the first image positioning element 312. At this time, the opening light source 313 is sleeved outside the rotary carrier 1 and located on the other side of the object 2 to be measured relative to the first light source 311, and when the object 2 to be measured is a component with a light-transmitting back surface, the opening light source 313 is used for illuminating the object 2 to be measured, so that the first image positioning element 312 can obtain a clearer image. In addition, in this embodiment, the opening light source 313 is a surface light source, and a better image effect can be obtained by the first image positioning element 312.
In some alternative embodiments, the second image positioning mechanism 32 includes: the second light source 321 is arranged on one side of the object 2 to be measured, which is far away from the rotating carrier 1, and is used for providing illumination for the object 2 to be measured; the second image positioning element 322 is disposed on a side of the object 2 away from the rotating stage 1, and is configured to obtain a local image of the object 2 and perform positioning detection.
In this embodiment, the second light source 321 and the second image positioning element 322 are located at a position where the object 2 extends out of the outer edge portion of the rotating stage 1. When the object 2 is a back-opaque element and the back faces the rotating stage 1, when the image of the object 2 is obtained, the second light source 321 disposed on the same side as the second image positioning element 322 provides illumination for the object 2, and the reflected light enters the second image positioning element 322, so that the obtained image is clearer.
In addition, in this embodiment, the second image positioning mechanism 32 and the reflective luminescent element 4 are respectively located at two sides of the object 2. When the object 2 to be measured is a light-transmitting element on the back, the reflective light-emitting member 4 can also be used to provide illumination for the object 2 to be measured, so that the second image positioning member 322 can obtain a clearer image of the object 2 to be measured, and the position of the object 2 to be measured can be more accurately obtained according to the mark points of the object 2 to be measured in the image.
In some optional embodiments, each of the first image positioning element 312, the second image positioning element 322, and the detecting positioning element 5 includes a camera for acquiring an image of the object 2, and a positioning detection module for acquiring coordinates of the object 2 corresponding to the mark point in the image, and determining the position of the object 2 according to the coordinates of the mark point in the image.
In this example, the object 2 to be measured is provided with a mark point, the mark point corresponding to the object 2 to be measured also exists in the image, the position of the positioning detection module is determined, the distance from the positioning detection module to the object 2 to be measured is also determined, and the coordinate of the mark point in the coordinate system is obtained by establishing the coordinate system in the obtained image, so that the orientation of the object 2 to be measured is determined. The resolution of the second image positioner 322 camera is greater than the resolution of the first image positioner 312 camera. When the first image positioning mechanism 31 is needed to perform rough positioning and the second image positioning mechanism 32 is needed to perform fine positioning, the camera of the second image positioning element 322 can be used to obtain a clearer picture because the resolution of the camera of the second image positioning element 322 is greater than that of the camera of the first image positioning element 312, so that the positioning detection precision of the second image positioning element 322 is greater than that of the first image positioning element 312.
In some alternative embodiments, the second light source 321 is an outer coaxial light source.
In this embodiment, the outer coaxial light source is sleeved outside the camera lens, so that the object 2 to be measured has a better illumination effect, and the camera of the second image positioning mechanism 32 acquires a clearer image. In addition, when the object 2 to be detected is a component with a light-transmitting back surface, the external coaxial light source can also be used for providing illumination for the object 2 to be detected, so that the camera of the detection positioning part 5 can obtain a clearer image of the object 2 to be detected, and the detection positioning part 5 can position the detection module to more accurately obtain the position of the object 2 to be detected according to the mark points of the object 2 to be detected in the image.
The invention provides a positioning method which is realized by utilizing the positioning device and comprises the following steps:
when the back of the object 2 with the back face being opaque faces the rotating carrying platform 1, the image of the object 2 is obtained by the image positioning assembly 3, and the position of the object 2 is determined according to the coordinates of the mark points in the image corresponding to the object 2.
When the back of the object 2 to be measured, the back of which is opaque, is back to the rotating stage 1, the reflecting and light-emitting member 4 is used for providing illumination for one side, facing the rotating stage 1, of the object 2 to be measured, the image of the object to be measured is obtained by the reflecting and light path detecting and positioning member 5 arranged on the reflecting and light-emitting member 4, and the position of the object 2 to be measured is determined according to the coordinates of the mark point, corresponding to the object 2 to be measured, in the image.
In summary, the object 2 to be measured is placed on the rotating stage 1, and when the back of the object to be measured, which is opaque, faces the rotating stage 1, the image positioning assembly 3 is adopted to obtain the image of the object 2 to be measured and perform positioning detection; when the back of the object to be detected with the back being lighttight rotates the carrying platform 1, the reflection luminous piece 4 is used for providing illumination for the object to be detected 2, and the detection positioning piece 5 arranged on the reflection light path of the reflection luminous piece 4 is used for acquiring the image of the object to be detected 2 and performing positioning detection. For the object 2 to be detected with a light-transmitting back surface, the image positioning component 3 can also perform positioning detection on the object, and the reflection light-emitting component 4 and the detection positioning component 5 can also perform positioning detection on the object. When detecting that the object 2 to be measured does not meet the requirement, the position of the object 2 to be measured can be adjusted by rotating the carrying platform 1, so that the position of the object 2 to be measured meets the requirement.
In addition, the positioning device can be simultaneously provided with three different image positioning mechanisms, can meet different detection requirements, can be simultaneously provided with four different light sources, and can meet the polishing requirements of various types of measured objects. This utilize reflection and the function of polishing of reflection illuminating part 4, the position that can nimble relatively set up detection setting element 5 reduces the mutual interference with other spare parts, can save installation space, can promote space utilization by a wide margin. The positioning device is simultaneously provided with the first image positioning mechanism 31 and the second image positioning mechanism 32, two different sets of detection positioning mechanisms can perform coarse positioning through a global view firstly and perform high-precision positioning through a local view, and therefore time is saved, and precision is high. The reflective luminous part 4 and the detection positioning part 5 solve the problem that the object to be detected with light-tight back cannot be shot due to insufficient space, and provide a solution for a detection scheme with small space.
In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.
It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of another identical element in a process, method, article, or apparatus that comprises the element.
The previous description is only an example of the present application, and is provided to enable any person skilled in the art to understand or implement the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A positioning device, comprising:
the device comprises a rotary carrying platform (1), a positioning device and a control device, wherein the rotary carrying platform (1) is used for placing an object to be measured (2) and can adjust the position of the object to be measured (2), and the outer edge of the rotary carrying platform (1) is positioned on the inner side of the outer edge of the object to be measured (2);
the image positioning assembly (3) is used for acquiring an image of the object to be detected (2) from one side, away from the rotary carrying platform (1), of the placed object to be detected (2), and determining the position of the object to be detected (2) according to the coordinates of the mark points of the object to be detected (2) in the image;
the reflection luminous piece (4) is arranged on the other side of the part, extending out of the rotary carrying platform (1), of the object to be measured (2), and is used for providing illumination for the object to be measured (2) and reflecting the object to be measured (2) to a set position;
and the detection positioning part (5) is arranged on a reflection light path of the reflection luminous part (4) and is used for acquiring the image of the object to be detected (2) through the reflection luminous part (4), and determining the position of the object to be detected (2) according to the coordinate of the mark point in the image corresponding to the object to be detected (2).
2. The positioning device according to claim 1, wherein the image positioning assembly (3) comprises at least one of a first image positioning mechanism (31) and a second image positioning mechanism (32), the first image positioning mechanism (31) is located in the middle of the object (2) and is used for acquiring a global image of the object (2) to be detected and performing positioning detection, and the second image positioning mechanism (32) is located in a portion of the object (2) to be detected, which extends out of the rotary stage (1), and is used for acquiring a local image of the object (2) to be detected and performing positioning detection.
3. The positioning device according to claim 2, wherein the first image positioning mechanism (31) comprises:
the first light source (311) is arranged on one side, away from the rotating carrying platform (1), of the object to be measured (2) after being placed and used for providing illumination for the object to be measured (2);
and the first image positioning part (312) is arranged on one side of the object to be detected (2) which is far away from the rotating carrying platform (1) after being placed, and is used for acquiring a global image of the object to be detected (2) and performing positioning detection.
4. A positioning device according to claim 3, wherein said first light source (311) comprises two line light sources respectively located on both sides of an image-capturing optical path of said first image positioning member (312).
5. The positioning device according to claim 3 or 4, wherein the first image positioning mechanism (31) further comprises an aperture light source (313) which is arranged outside the rotary stage (1).
6. A positioning device according to claim 3, wherein the second image positioning mechanism (32) comprises:
the second light source (321) is arranged on one side, away from the rotating carrying platform (1), of the object to be detected (2) after being placed and is used for providing illumination for the object to be detected (2);
and the second image positioning part (322) is arranged on one side of the object to be detected (2) which is far away from the rotating carrying platform (1) after being placed, and is used for acquiring a local image of the object to be detected (2) and performing positioning detection.
7. The positioning apparatus according to claim 6, wherein the first image positioning element (312), the second image positioning element (322) and the detecting positioning element (5) each comprise a camera for acquiring an image of the object (2) and a positioning detection module for acquiring coordinates of the object (2) corresponding to the mark points in the image and determining the orientation of the object (2) according to the positions of the mark points in the image.
8. The positioning device according to claim 6 or 7, wherein the second light source (321) is an outer coaxial light source.
9. The positioning device according to claim 1, wherein the reflective lighting element (4) is a corner coaxial light source, the reflection angle being 90 degrees.
10. A positioning method, implemented by the positioning apparatus of claim 1, comprising the steps of:
when the back of an object (2) to be detected, the back of which is not transparent, faces towards the rotating carrying platform (1), an image of the object (2) to be detected is obtained by adopting an image positioning assembly (3), and the position of the object (2) to be detected is determined according to the coordinates of the object (2) to be detected, corresponding to the mark points in the image;
when the back of an object to be detected (2) with a light-tight back faces away from the rotating carrier (1), illumination is provided for one side, facing the rotating carrier (1), of the object to be detected (2) through the reflective light-emitting piece (4), an image of the object to be detected is obtained through the reflective light path detection positioning piece (5) arranged on the reflective light-emitting piece (4), and the position of the object to be detected (2) is determined according to the coordinates of the object to be detected (2) corresponding to the mark points in the image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211057393.0A CN115409895A (en) | 2022-08-31 | 2022-08-31 | Positioning device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211057393.0A CN115409895A (en) | 2022-08-31 | 2022-08-31 | Positioning device and method |
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| Publication Number | Publication Date |
|---|---|
| CN115409895A true CN115409895A (en) | 2022-11-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211057393.0A Pending CN115409895A (en) | 2022-08-31 | 2022-08-31 | Positioning device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115409895A (en) |
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2022
- 2022-08-31 CN CN202211057393.0A patent/CN115409895A/en active Pending
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