CN115404553A - Furnace chassis opening and closing mechanism - Google Patents
Furnace chassis opening and closing mechanism Download PDFInfo
- Publication number
- CN115404553A CN115404553A CN202211003506.9A CN202211003506A CN115404553A CN 115404553 A CN115404553 A CN 115404553A CN 202211003506 A CN202211003506 A CN 202211003506A CN 115404553 A CN115404553 A CN 115404553A
- Authority
- CN
- China
- Prior art keywords
- furnace
- opening
- positioning ring
- rotary
- closing mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 24
- 238000007789 sealing Methods 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000000712 assembly Effects 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 abstract description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 3
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
The invention relates to the technical field of silicon carbide crystal growth equipment. A furnace chassis opening and closing mechanism comprises a furnace body, wherein the bottom of the furnace body is provided with a lower flange and a furnace chassis which are arranged up and down; the furnace bottom plate opening and closing device comprises a furnace bottom plate, a rotary opening and closing assembly and a rotary shaft, wherein the furnace bottom plate is arranged on the furnace bottom plate; the rotary opening and closing assembly comprises a driving mechanism for driving the rotary positioning ring to rotate circumferentially, and the driving mechanism is in transmission connection with the rotary positioning ring; the inner side of the rotary positioning ring is provided with roller transmission components which are circumferentially distributed; the lower side surface of the furnace chassis is provided with an open slot and a guide inclined plane which are adjacently arranged, and the guide inclined plane inclines downwards from the position adjacent to the open slot to the position far away from the open slot. The invention improves the upper cover opening mode into the lower cover opening mode. The locking and the releasing switching of the furnace chassis are realized through the rotation of the rotary positioning ring of the rotary opening and closing mechanism.
Description
Technical Field
The invention relates to the field of silicon carbide crystal growth equipment, in particular to an opening and closing mechanism of a furnace chamber.
Background
Aiming at a silicon carbide crystal growth furnace, the charging and the material taking are usually realized by opening and closing a furnace cover at the top of a furnace body. The charging and the material taking are inconvenient each time the furnace is opened, and the cleaning of the hearth is also troublesome.
In addition, the traditional furnace opening mechanism is in a manual mode, and the efficiency is low. The original connection between the furnace cover and the furnace body is also fastened by screws, and the furnace can be opened after more than ten screws are loosened before opening the furnace, which wastes time and labor.
There is currently a lack of an automated furnace switching mechanism that can address the above-mentioned problems.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a furnace chassis opening and closing mechanism to solve at least one technical problem.
In order to achieve the aim, the invention provides a furnace chassis opening and closing mechanism which comprises a furnace body and is characterized in that a lower flange and a furnace chassis which are arranged up and down are arranged at the bottom of the furnace body;
the furnace bottom plate opening and closing device comprises a furnace bottom plate, a lower flange and a rotary opening and closing assembly, wherein the furnace bottom plate is fixed on the furnace bottom plate through the rotary opening and closing assembly;
the rotary opening and closing assembly comprises a driving mechanism for driving the rotary positioning ring to rotate circumferentially, and the driving mechanism is in transmission connection with the rotary positioning ring;
the inner side of the rotary positioning ring is provided with roller transmission assemblies which are circumferentially distributed;
the lower side surface of the furnace chassis is provided with an open slot and a guide inclined plane which are adjacently arranged, and the guide inclined plane inclines downwards from the position adjacent to the open slot to the position far away from the open slot.
The invention improves the upper cover opening mode into the lower cover opening mode. The locking and the releasing switching of the furnace chassis are realized through the rotation of the rotary positioning ring of the rotary opening and closing mechanism.
Further preferably, when the roller transmission assembly is pressed against the guide slope, the furnace chassis is in a locked state;
when the roller transmission assembly is positioned at the open groove, the furnace chassis is in a loosening state.
Further preferably, the open slot is communicated with the radial outer side of the furnace chassis;
the rotary positioning ring is provided with a flanging extending downwards, and the inner side of the flanging is provided with the roller transmission assembly.
When the furnace chassis is loosened, the open slot and the roller transmission assembly are avoided.
Preferably, the periphery of the lower flange is detachably connected with a positioning ring seat;
the retaining ring mount supports the rotating retaining ring.
The relative rotation of the rotary positioning ring and the lower flange is facilitated.
Further preferably, a wear-resistant base plate is fixed on the side, contacting the rotary positioning ring, of the positioning ring seat.
Further preferably, a wear-resistant washer is fixed on the upper end face of the rotary positioning ring.
Preferably, the lower flange is provided with an installation groove for installing a sealing ring, and the sealing ring is arranged between the lower flange and the furnace chassis.
Further preferably, the mounting groove is a V-shaped groove.
Further preferably, the roller transmission assembly comprises a roller body, a roller shaft, a spacer bush and a nut;
the rotary positioning ring is provided with a through hole penetrating through the roller shaft, and the roller shaft sequentially penetrates through the roller body, the spacer bush and the through hole and is locked and fixed through the nut.
Preferably, the driving mechanism comprises an electric cylinder, and a cylinder body of the electric cylinder is hinged with an electric cylinder tailstock arranged on the side wall of the furnace body;
the telescopic end of the electric cylinder is provided with a universal bearing, and the universal bearing is movably connected with the rotary positioning ring through a connecting shaft.
The circumferential movement of the rotary positioning ring is convenient to realize.
Has the advantages that:
the automatic loading mechanism changes the traditional loading mode of the furnace body, adopts the unloading mode, automatically closes and locks after automatically loading the furnace body on the furnace chassis, and automatically releases the unloading mode. The furnace bottom can be conveniently opened and closed, and loading and unloading and furnace body cleaning are convenient.
Drawings
FIG. 1 is a bottom view of a furnace base in a locked condition in accordance with an embodiment of the present invention 1;
FIG. 2 is a cross-sectional view of a furnace base in a locked state according to embodiment 1 of the present invention;
FIG. 3 is a bottom view of the oven base in a released condition in accordance with the preferred embodiment of the present invention 1;
fig. 4 is an exploded view of the oven chassis in a released state according to embodiment 1 of the present invention.
Wherein: 1 is a furnace body; 2 is a sealing ring; 3 is a furnace chassis; 4 is a wear-resistant washer; 5 is a rotary positioning ring; 6 is a nut; 7 is a spacer bush; 8 is a wheel body; 9 is a roller shaft; 10 is a wear-resistant backing plate; 11 is a positioning ring seat; 12 is a locking support; 13 is a gasket; 14 is a connecting shaft; 15 is an electric cylinder; 16 is a cotter pin; 17 is a pin shaft; 18 is an electric cylinder tail seat.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
In specific embodiment 1, referring to fig. 1 to 4, a furnace chassis 3 opening and closing mechanism includes a furnace body 1, a lower flange and a furnace chassis 3 which are vertically arranged are arranged at the bottom of the furnace body 1; the furnace bottom plate opening and closing device further comprises a rotary opening and closing component for locking the furnace bottom plate 3 and loosening the furnace bottom plate 3, the rotary opening and closing component comprises a rotary positioning ring 5, and the lower flange is rotationally connected with the rotary positioning ring 5; the rotary opening and closing assembly comprises a driving mechanism for driving the rotary positioning ring 5 to rotate circumferentially, and the driving mechanism is in transmission connection with the rotary positioning ring 5; the inner side of the rotary positioning ring 5 is provided with roller transmission components which are circumferentially distributed; the lower side surface of the furnace chassis 3 is provided with an open slot and a guide inclined plane which are adjacently arranged, and the guide inclined plane inclines downwards from the position adjacent to the open slot to the position far away from the open slot. The invention improves the upper cover opening mode into the lower cover opening mode. The locking and releasing of the furnace chassis 3 are switched by the rotation of the rotary positioning ring 5 of the rotary opening and closing mechanism.
When the roller transmission assembly H is tightly pressed with the guide inclined plane, the furnace chassis 3 is in a locking state; when the roller transmission assembly is positioned at the open groove, the furnace chassis 3 is in a loosening state.
The periphery of the lower flange is detachably connected with a positioning ring seat 11; the retaining ring mount 11 supports the rotating retaining ring 5. Facilitating the relative rotation of the rotating positioning ring 5 and the lower flange. The side of the positioning ring seat 11 contacting with the rotary positioning ring 5 is fixed with a wear-resistant backing plate 10. The upper end surface of the rotary positioning ring 5 is fixed with a wear-resistant washer 4. The lower flange is provided with an installation groove for installing the sealing ring 2, and the sealing ring 2 is clamped between the lower flange and the furnace chassis 3. The mounting groove is a V-shaped groove.
The open slot is communicated up and down. The open slot is communicated with the radial outer side of the furnace chassis 3; the rotary positioning ring 5 is provided with a flanging extending downwards, and the inner side of the flanging is provided with a roller transmission component. When the furnace chassis 3 is loosened, the open slot and the roller transmission component are avoided. The roller transmission assembly comprises a roller body 8, a roller shaft 9, a spacer 7 and a nut 6; the rotary positioning ring 5 is provided with a through hole penetrating through a roller shaft 9, and the roller shaft 9 penetrates through a roller body 8, a spacer 7 and the through hole in sequence and is locked and fixed through a nut 6.
The driving mechanism comprises an electric cylinder 15, and the cylinder body of the electric cylinder 15 is hinged with an electric cylinder tailstock 18 arranged on the side wall of the furnace body 1. The cylinder body is rotationally connected with an electric cylinder tailstock 18 through a pin shaft 17. A cotter pin 16 is mounted at the end of the pin shaft. The telescopic end of the electric cylinder is provided with a universal bearing, and the universal bearing is movably connected with the rotary positioning ring 5 through a connecting shaft. Facilitating the circumferential movement of the rotating positioning ring 5. A locking support 12 is fixed on the outer side of the rotary positioning ring 5. The locking support 12 is provided with a connecting shaft 14, and a washer 13 penetrating through the connecting shaft 14 is clamped between the universal bearing and the locking support. The electric cylinder is provided with 2 position sensors which are respectively used for controlling the opening position and the closing position of the electric cylinder.
The furnace body is preferably a crystal growth furnace. The lower flange is the lower flange at the bottom of the furnace body auxiliary chamber. The side wall of the auxiliary cavity of the furnace body is provided with a gas port. The internal pressure is convenient to adjust.
Referring to fig. 1 and 2, the furnace chassis 3 is in a locked state; the furnace body 1 is in a vacuum heating state, the furnace chassis 3 cannot be opened when the equipment is in a processing working state, and the wheel body 8 of the roller transmission assembly on the rotary positioning ring 5 is completely pressed with the guide inclined plane of the furnace chassis 3, so that the sealing in the furnace is reliable.
Referring to fig. 3 and 4, the oven base plate 3 is in a released state, and the open slot on the oven base plate 3 is matched with the position of the roller transmission assembly on the rotary positioning ring 5. At the moment, if the pressure in the furnace is inflated to the normal pressure, the furnace chassis 3 is opened, the furnace chassis 3 is descended, and the thermal field and the crystal in the furnace are taken out.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.
Claims (10)
1. A furnace chassis opening and closing mechanism comprises a furnace body and is characterized in that a lower flange and a furnace chassis which are arranged up and down are arranged at the bottom of the furnace body;
the furnace bottom plate opening and closing device comprises a furnace bottom plate, a furnace bottom plate and a rotary opening and closing assembly, wherein the furnace bottom plate is arranged on the furnace bottom plate;
the rotary opening and closing assembly comprises a driving mechanism for driving the rotary positioning ring to rotate circumferentially, and the driving mechanism is in transmission connection with the rotary positioning ring;
the inner side of the rotary positioning ring is provided with roller transmission assemblies which are circumferentially distributed;
the lower side surface of the furnace chassis is provided with an open slot and a guide inclined plane which are adjacently arranged, and the guide inclined plane inclines downwards from the position adjacent to the open slot to the position far away from the open slot.
2. The opening and closing mechanism of the furnace chassis according to claim 1, wherein: when the roller transmission assembly is tightly pressed with the guide inclined plane, the furnace chassis is in a locking state;
when the roller transmission assembly is positioned at the open groove, the furnace chassis is in a loosening state.
3. The opening and closing mechanism of the furnace chassis according to claim 1, wherein: the open slot is communicated with the radial outer side of the furnace chassis;
the rotary positioning ring is provided with a flanging extending downwards, and the roller transmission assembly is mounted on the inner side of the flanging.
4. The opening and closing mechanism of the furnace chassis according to claim 1, wherein: the periphery of the lower flange is detachably connected with a positioning ring seat;
the retaining ring mount supports the rotating retaining ring.
5. The opening and closing mechanism of the furnace chassis according to claim 4, wherein: and a wear-resistant base plate is fixed on the side of the positioning ring seat, which is in contact with the rotary positioning ring.
6. The opening and closing mechanism of the furnace chassis according to claim 1, wherein: and a wear-resistant gasket is fixed on the upper end surface of the rotary positioning ring.
7. The opening and closing mechanism of the furnace chassis according to claim 1, wherein: the lower flange is provided with a mounting groove for mounting a sealing ring, and the sealing ring is clamped between the lower flange and the furnace chassis.
8. The oven chassis opening and closing mechanism according to claim 7, wherein: the mounting groove is a V-shaped groove.
9. The opening and closing mechanism of the furnace chassis according to claim 1, wherein: the roller transmission assembly comprises a roller body, a roller shaft, a spacer bush and a nut;
the rotary positioning ring is provided with a through hole penetrating through the roller shaft, and the roller shaft sequentially penetrates through the roller body, the spacer bush and the through hole and is locked and fixed through the nut.
10. The opening and closing mechanism of the furnace chassis according to claim 1, wherein: the driving mechanism comprises an electric cylinder, and a cylinder body of the electric cylinder is hinged with an electric cylinder tailstock arranged on the side wall of the furnace body;
the telescopic end of the electric cylinder is provided with a universal bearing, and the universal bearing is movably connected with the rotary positioning ring through a connecting shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211003506.9A CN115404553B (en) | 2022-08-19 | 2022-08-19 | Furnace chassis opening and closing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211003506.9A CN115404553B (en) | 2022-08-19 | 2022-08-19 | Furnace chassis opening and closing mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115404553A true CN115404553A (en) | 2022-11-29 |
| CN115404553B CN115404553B (en) | 2024-09-24 |
Family
ID=84161396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211003506.9A Active CN115404553B (en) | 2022-08-19 | 2022-08-19 | Furnace chassis opening and closing mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115404553B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0882481A (en) * | 1994-09-09 | 1996-03-26 | Tokai Konetsu Kogyo Co Ltd | Bedplate mover for continuous-atmosphere furnace |
| CN208562595U (en) * | 2018-05-29 | 2019-03-01 | 上海汉虹精密机械有限公司 | The automatic trip gear of semiconductor monocrystal furnace upper furnace tube |
| CN209840684U (en) * | 2019-04-30 | 2019-12-24 | 西安西炉特种电炉有限公司 | Automatic locking device of vertical lower charging vacuum heating furnace bottom |
| CN215800054U (en) * | 2021-09-28 | 2022-02-11 | 山东天岳先进科技股份有限公司 | Automatic sealed reaction furnace |
| CN217149399U (en) * | 2022-03-29 | 2022-08-09 | 宁波恒普真空科技股份有限公司 | Sealing and locking mechanism of semiconductor equipment |
-
2022
- 2022-08-19 CN CN202211003506.9A patent/CN115404553B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0882481A (en) * | 1994-09-09 | 1996-03-26 | Tokai Konetsu Kogyo Co Ltd | Bedplate mover for continuous-atmosphere furnace |
| CN208562595U (en) * | 2018-05-29 | 2019-03-01 | 上海汉虹精密机械有限公司 | The automatic trip gear of semiconductor monocrystal furnace upper furnace tube |
| CN209840684U (en) * | 2019-04-30 | 2019-12-24 | 西安西炉特种电炉有限公司 | Automatic locking device of vertical lower charging vacuum heating furnace bottom |
| CN215800054U (en) * | 2021-09-28 | 2022-02-11 | 山东天岳先进科技股份有限公司 | Automatic sealed reaction furnace |
| CN217149399U (en) * | 2022-03-29 | 2022-08-09 | 宁波恒普真空科技股份有限公司 | Sealing and locking mechanism of semiconductor equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115404553B (en) | 2024-09-24 |
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