CN115404432A - Method for strengthening end face of metal hard sealing connecting pipe of stainless steel VCR for high-purity gas circuit - Google Patents
Method for strengthening end face of metal hard sealing connecting pipe of stainless steel VCR for high-purity gas circuit Download PDFInfo
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- CN115404432A CN115404432A CN202211099508.2A CN202211099508A CN115404432A CN 115404432 A CN115404432 A CN 115404432A CN 202211099508 A CN202211099508 A CN 202211099508A CN 115404432 A CN115404432 A CN 115404432A
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- China
- Prior art keywords
- face
- stainless steel
- connecting pipe
- pipe
- strengthening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 26
- 229910001220 stainless steel Inorganic materials 0.000 title claims abstract description 26
- 239000010935 stainless steel Substances 0.000 title claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 25
- 239000002184 metal Substances 0.000 title claims abstract description 25
- 238000005728 strengthening Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000007789 gas Substances 0.000 claims abstract description 22
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000001294 propane Substances 0.000 claims abstract description 10
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 5
- 239000001257 hydrogen Substances 0.000 claims abstract description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 5
- -1 hydrogen ions Chemical class 0.000 claims abstract description 5
- 238000002161 passivation Methods 0.000 claims abstract description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 210000001503 joint Anatomy 0.000 claims description 4
- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 125000004432 carbon atom Chemical group C* 0.000 abstract description 2
- 238000005255 carburizing Methods 0.000 abstract description 2
- 238000009792 diffusion process Methods 0.000 abstract description 2
- 238000010849 ion bombardment Methods 0.000 abstract description 2
- 238000001179 sorption measurement Methods 0.000 abstract description 2
- 230000009977 dual effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/04—Treatment of selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/20—Carburising
- C23C8/22—Carburising of ferrous surfaces
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Arc Welding In General (AREA)
Abstract
The invention relates to a method for strengthening the end face of a stainless steel VCR metal hard sealing connecting pipe for a high-purity gas circuit, which comprises the following steps: shielding the inner surface and the outer surface outside the end face of a joint pipe, wherein the joint pipe is a stainless steel VCR metal hard seal joint pipe for a high-purity gas path; step (2), performing surface bombardment on the end face of the pipe by using hydrogen ions in vacuum with the temperature below 300 ℃ and the pressure below 100 Pa; step (3), performing surface passivation film removing treatment on the end face of the pipe by adopting HF at the temperature of 300-500 ℃ and the pressure of below 400 Pa; and (4) introducing propane or a mixed gas of propane and carbon monoxide into a low vacuum environment with the temperature below 500 ℃ and the pressure below 500Pa to perform surface carburizing and strengthening treatment. Through the invention, the compact passive film on the end face of the VCR connecting pipe is cleanly and effectively removed through the dual functions of ion bombardment and HF corrosion, the adsorption and the diffusion of the following activated carbon atoms are convenient, and the purpose of strengthening the end face of the VCR connecting pipe is achieved.
Description
Technical Field
The invention relates to a method for strengthening the end face of a metal hard sealing connecting pipe of a stainless steel VCR for a high-purity gas circuit, belonging to the technical field of strengthening the end face of the connecting pipe.
Background
The VCR joint has high cleanliness, good sealing performance, wide working temperature range, minimum disassembly gap, repeated disassembly and assembly and wide application in ultrahigh pure systems, ultrahigh vacuum systems and high-pressure systems which require no leakage. The VCR joint is one of the surface sealing joints, the sealing element adopts a metal gasket, and the metal gasket is pressed by interlocking the internal thread and the external thread to generate certain deformation, thereby achieving the sealing effect. The foreign VCR connector raw materials select single V or double V stainless steel with higher cleanliness factor, the raw material strength is also high, the hardness of the metal gasket for matching is suitable, and the sealing effect is good. At present, domestic VCR raw materials are soft in hardness, metal gaskets are hard, and the sealing effect is poor. The surface hardening treatment of the hard metal sealing connecting pipe end surface of the stainless steel VCR by using the surface hardening technology is a more effective method.
Disclosure of Invention
The invention aims to provide a method for removing a passive film on the end face of a stainless steel VCR (videocassette recorder) adapter tube and strengthening the surface of the end face of the adapter tube on the premise of not reducing the original corrosion resistance, namely a method for strengthening the end face of a stainless steel VCR metal hard sealing adapter tube for a high-purity gas circuit.
The purpose of the invention is realized as follows: a method for strengthening the end face of a stainless steel VCR metal hard sealing connecting pipe for a high-purity gas circuit is characterized by comprising the following steps:
step (1), shielding the inner surface and the outer surface of the butt joint pipe except the end face, wherein the connecting pipe is a stainless steel VCR metal hard sealing connecting pipe for a high-purity gas circuit;
step (2), performing surface bombardment on the end face of the pipe by using hydrogen ions in vacuum with the temperature below 300 ℃ and the pressure below 100 Pa;
step (3), performing surface passivation film removing treatment on the end face of the pipe by adopting HF at the temperature of 300-500 ℃ and the pressure of below 400 Pa;
and (4) introducing propane or a mixed gas of propane and carbon monoxide into a low-vacuum environment with the temperature below 500 ℃ and the pressure below 500Pa to perform surface carburization strengthening treatment, so as to complete the strengthening of the end face of the stainless steel VCR metal hard sealing connecting pipe.
In the step (1), the inner surface and the outer surface of the butt joint pipe outside the end face are shielded, and are shielded by impermeable coating or pure machinery.
The stainless steel is austenitic stainless steel.
The method for strengthening the end face of the metal hard sealing connecting pipe of the stainless steel VCR for the high-purity gas path has the advantages that the structure is reasonable and simple, the use is convenient, the method for strengthening the end face of the metal hard sealing connecting pipe of the stainless steel VCR for the high-purity gas path firstly shields the surface outside the end face of the connecting pipe, the anti-seepage coating or the pure mechanical shielding can be used, and the shielding part keeps the original performance unchanged; then, in vacuum with the temperature below 300 ℃ and the pressure below 100Pa, hydrogen ions are adopted for surface bombardment; then, performing surface passivation film removing treatment by adopting HF at the temperature of 300-500 ℃ and the pressure of below 400 Pa; the surface carburizing strengthening treatment is carried out by introducing propane or a mixed gas of propane and carbon monoxide into a low vacuum environment with the temperature below 500 ℃ and the pressure below 500 Pa.
The invention removes compact passive film on VCR connecting pipe end surface through ion bombardment and HF corrosion, which is convenient for adsorption and diffusion of active carbon atom at back surface, and achieves the aim of VCR connecting pipe end surface strengthening, the experiment proves that the hardness of VCR connecting pipe end surface is improved from 200HV to 1000HV, the salt spray time is as long as 1000 hours, thereby ensuring the sealing performance of high purity gas path.
Detailed Description
The present invention is further illustrated by the following examples.
A method for strengthening the end face of a stainless steel VCR metal hard sealing connecting pipe for a high-purity gas circuit comprises the following steps:
step (1), shielding the inner and outer surfaces except the end face of the connecting pipe, wherein the connecting pipe is a stainless steel VCR metal hard sealing connecting pipe for a high-purity gas circuit and can be shielded by impermeable coating or pure machinery;
step (2), performing surface bombardment on the end face of the pipe by using hydrogen ions in vacuum with the temperature below 300 ℃ and the pressure below 100 Pa;
step (3), performing surface passivation film removing treatment on the end face of the pipe by adopting HF at the temperature of 300-500 ℃ and the pressure of below 400 Pa;
and (4) introducing propane or a mixed gas of propane and carbon monoxide into a low-vacuum environment with the temperature below 500 ℃ and the pressure below 500Pa to perform surface carburization strengthening treatment, so as to complete the strengthening of the end face of the stainless steel VCR metal hard sealing connecting pipe.
In the present embodiment, the stainless steel is austenitic stainless steel.
The surface strengthening method is very suitable for strengthening the end face of the metal hard sealing connecting pipe of the stainless steel VCR for the high-purity gas path.
Claims (3)
1. A method for strengthening the end face of a stainless steel VCR metal hard sealing connecting pipe for a high-purity gas circuit is characterized by comprising the following steps:
shielding the inner surface and the outer surface outside the end face of a joint pipe, wherein the joint pipe is a stainless steel VCR metal hard seal joint pipe for a high-purity gas path;
step (2), in vacuum with the temperature below 300 ℃ and the pressure below 100Pa, hydrogen ions are adopted to carry out surface bombardment on the end face of the pipe;
step (3), performing surface passivation film removing treatment on the end face of the pipe by adopting HF at the temperature of 300-500 ℃ and the pressure of below 400 Pa;
and (4) introducing propane or mixed gas of propane and carbon monoxide into a low-vacuum environment with the temperature below 500 ℃ and the pressure below 500Pa to perform surface carburization strengthening treatment, so as to strengthen the end face of the stainless steel VCR metal hard sealing connecting pipe.
2. The method for strengthening the end face of the metal hard sealing connecting pipe of the stainless steel VCR for the high-purity gas circuit according to claim 1, wherein the method comprises the following steps: in the step (1), the inner surface and the outer surface of the butt joint pipe outside the end face are shielded, and are shielded by impermeable coating or pure machinery.
3. The method for strengthening the end face of the metal hard sealing connecting pipe of the high-purity gas circuit stainless steel VCR according to the claim 1 or 2, which is characterized in that: the stainless steel is austenitic stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211099508.2A CN115404432A (en) | 2022-09-09 | 2022-09-09 | Method for strengthening end face of metal hard sealing connecting pipe of stainless steel VCR for high-purity gas circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211099508.2A CN115404432A (en) | 2022-09-09 | 2022-09-09 | Method for strengthening end face of metal hard sealing connecting pipe of stainless steel VCR for high-purity gas circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115404432A true CN115404432A (en) | 2022-11-29 |
Family
ID=84164921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211099508.2A Pending CN115404432A (en) | 2022-09-09 | 2022-09-09 | Method for strengthening end face of metal hard sealing connecting pipe of stainless steel VCR for high-purity gas circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115404432A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105603359A (en) * | 2016-03-28 | 2016-05-25 | 福建上润精密仪器有限公司 | Glow ion carbonization method for enhancing surface hardness and corrosion resistance of stainless steel |
| CN111910146A (en) * | 2019-11-30 | 2020-11-10 | 华南理工大学 | Hardening method of austenitic stainless steel without reducing antirust performance |
-
2022
- 2022-09-09 CN CN202211099508.2A patent/CN115404432A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105603359A (en) * | 2016-03-28 | 2016-05-25 | 福建上润精密仪器有限公司 | Glow ion carbonization method for enhancing surface hardness and corrosion resistance of stainless steel |
| CN111910146A (en) * | 2019-11-30 | 2020-11-10 | 华南理工大学 | Hardening method of austenitic stainless steel without reducing antirust performance |
Non-Patent Citations (2)
| Title |
|---|
| 李伟等: "渗碳对AISI316不锈钢表面性能影响的研究", 《热处理技术与装备》, vol. 33, no. 5, pages 541 - 542 * |
| 杨广义等: "奥氏体不锈钢低温离子-气体复合硬化处理工艺", 《金属热处理》, vol. 41, no. 10, pages 133 - 136 * |
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