CN115390512B - Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof - Google Patents

Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof Download PDF

Info

Publication number
CN115390512B
CN115390512B CN202211096635.7A CN202211096635A CN115390512B CN 115390512 B CN115390512 B CN 115390512B CN 202211096635 A CN202211096635 A CN 202211096635A CN 115390512 B CN115390512 B CN 115390512B
Authority
CN
China
Prior art keywords
loop
control
translational
disturbance
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202211096635.7A
Other languages
Chinese (zh)
Other versions
CN115390512A (en
Inventor
关新平
谷朝臣
陈超
位广宇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiaotong University
Original Assignee
Shanghai Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiaotong University filed Critical Shanghai Jiaotong University
Priority to CN202211096635.7A priority Critical patent/CN115390512B/en
Publication of CN115390512A publication Critical patent/CN115390512A/en
Application granted granted Critical
Publication of CN115390512B publication Critical patent/CN115390512B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35349—Display part, programmed locus and tool path, traject, dynamic locus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)

Abstract

The invention relates to the field of motor driving and motion control, in particular to a flexible gantry double-drive system and an electromechanical combined decoupling motion control method thereof. According to the gantry double-drive motion platform based on the permanent magnet synchronous linear motor, the motion of the gantry double-drive is divided into the translational loop and the rotational loop, and the translational loop and the rotational loop are respectively controlled, so that the synchronization problem and the coupling problem in the gantry double-drive motion control with the asymmetric flexible supporting structure are solved, the synchronization performance and the convergence speed of the double-drive motion are improved, the effective inhibition of internal coupling and external disturbance is realized, and the positioning precision of the gantry double-drive motion platform is improved.

Description

Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof
Technical Field
The invention relates to the field of motor driving and motion control, in particular to a flexible gantry double-drive system and an electromechanical combined decoupling motion control method thereof.
Background
The gantry double-drive motion platform is used as an industrial device and has important application in the fields of precision instruments, high-end machine tools and semiconductor equipment. The mechanical coupling introduced by the cross beam makes the double-drive synchronous control difficult, and especially the coupling problem of the system can seriously influence the positioning precision of the gantry double-drive system, and in addition, various unknown external disturbances further influence the double-drive synchronous performance of the system.
Most of the existing gantry double-drive systems adopt rigid supporting structures, the influence of internal force of a cross beam is controlled by means of system adjustment precision and master-slave shaft synchronous precision, and complete inhibition cannot be achieved under complex working conditions. The double-drive gantry platform local replaceable flexible joint design and modeling research discloses a double-side thin-wall beam flexible support joint, which has the defects that the transverse beam cannot vibrate left and right in the span direction, the transverse beam displaces in the span direction under the action of external force, and meanwhile, left and right oscillations are easy to generate, so that the overall accuracy of the system is influenced.
The existing gantry double-drive algorithm mostly adopts a double-side synchronous thought and an asynchronous interference suppression thought as guiding ideas, for example, in the text of synchronous control of a gantry machine tool double-drive system based on an interference observer, however, double-drive complete synchronization is impossible to realize, and the occurrence of double-side asynchronism can lead to rapid change of a system model.
The invention fully considers the consistency of a mechanical model and an electric model, realizes the mechanical and mechanical combined decoupling of the gantry double-drive machine through flexible support design and control algorithm design, and overcomes various defects of the existing gantry servo system.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a flexible gantry double-drive system and an electromechanical combined decoupling motion control method thereof.
The invention provides a flexible gantry double-drive system, which comprises a flexible supporting device, a linear motor, a linear guide rail and a cross beam;
the flexible supporting device comprises a deflection flexible hinge and a rotation flexible hinge, two groups of linear motors are respectively arranged on two linear guide rails which are arranged in parallel at intervals, two ends of a beam are respectively connected with the two groups of linear motors through the deflection flexible hinge and the rotation flexible hinge, the deflection flexible hinge provides relative rotation in the horizontal plane of the beam and relative displacement along the span direction of the beam, and the rotation flexible hinge provides relative rotation in the horizontal plane of the beam;
the motion control of one end of the cross beam connected with the deflection flexible hinge adopts translational loop control, wherein the translational loop follows a position-speed cascade control mode, the motion control of one end of the cross beam connected with the rotation flexible hinge adopts rotary loop control, the rotary loop follows a position single-stage control mode, the control quantity of the translational loop control and the control quantity of the rotary loop control are processed and then used as current loop control setting, and the current loop control adopts decoupling control under a vector control frame.
In some embodiments, the deflection flexible hinge includes a first cross beam connection frame, a first track connection block, a first vertical stop tab, and a first longitudinal stop tab;
the first beam connecting frame is a hollow structure frame, the upper end face and the lower end face of the first wire rail connecting block are respectively connected with the upper beam and the lower beam of the first beam connecting frame through the first vertical stop piece, the left side face and the right side face of the first wire rail connecting block are respectively connected with the left beam and the right beam of the first beam connecting frame through the first longitudinal stop piece, and one end of the beam is located on the left beam and the right beam of the first beam connecting frame;
the first vertical stop piece limits the relative displacement of the first beam connecting frame and the second wire rail connecting block in the vertical direction, and the first longitudinal stop piece limits the relative displacement of the first beam connecting frame and the wire rail connecting block in the sliding direction of the beam.
In some embodiments, the swivel flexible hinge includes a second cross beam connection frame, a second wire rail connection block, a second vertical stop tab, a second longitudinal stop tab, a transverse stop tab, and a transverse stop plate;
the second beam connecting frame is a hollow structure frame, the upper end surface and the lower end surface of the second wire rail connecting block are respectively connected with the upper beam and the lower beam of the second beam connecting frame through the second vertical stop piece, the left side surface and the right side surface of the second wire rail connecting block are respectively connected with the left beam and the right beam of the second beam connecting frame through the second longitudinal stop piece, the transverse stop plate is respectively connected with the upper beam and the lower beam of the second beam connecting frame and the second wire rail connecting block through the transverse stop piece,
the second vertical stop piece limits the relative displacement of the second beam connecting frame and the second wire rail connecting block in the vertical direction, the second longitudinal stop piece limits the relative displacement of the first beam connecting frame and the second wire rail connecting block in the sliding direction of the beam, and the transverse stop piece and the transverse stop plate limit the relative displacement of the first beam connecting frame and the second wire rail connecting block in the front-back direction.
The invention also provides an electromechanical combined decoupling motion control method of the flexible gantry double-drive system, which comprises the following steps:
step 100, a controller gives a gantry double-drive movement position;
step 200, measuring the actual displacement of the two shafts of the double drive, and calculating the feedback quantity of the system;
step 300: the double-drive motion control is divided into translational loop control and rotational loop control, wherein the translational loop control is position-speed cascade control, and the rotational loop control is angle single-stage control;
step 400: calculating the angle control quantity of the rotating loop by using the beam deflection angle and the beam deflection angular velocity as variables of a nonsingular terminal sliding mode controller;
step 500: the translational loop control quantity and the rotational loop control quantity are processed and then are given as current loop control, and the current loop control adopts decoupling control under a vector control frame;
in some embodiments, the step 200 includes:
a two-axis displacement measurement step: measuring the actual displacement of two shafts through a grating ruler, and taking the displacement of a main shaft as translational displacement, wherein the main shaft is the main shaft of a specified linear motor on a certain side;
and a translation speed calculating step: differential calculation is carried out on the displacement of the main shaft to obtain the translational speed of the main shaft;
calculating a beam deflection angle: and calculating the deflection angle of the cross beam through the displacement of the two shafts and the distance between the two parallel shafts.
In some embodiments, including step 300 includes:
translational loop position loop control step: the translational loop position loop control adopts proportional-differential control, the translational loop position loop receives a position given instruction of the motion controller, and the control quantity is input to the speed loop;
translational loop speed loop control step: the translational loop speed loop design is based on a model compensation second-order linear expansion state observer decoupling control loop;
and a rotary loop angle ring control step: the rotating loop angle ring design is based on model compensation third-order linear expansion state observer decoupling control loop.
In some embodiments, the translational loop speed loop control step includes:
the step of dynamically calculating a known model of the translation loop: the translational speed and the beam deflection angular speed can be measured and calculated;
a disturbance term observation step based on an extended state observer: the translational loop speed loop designs a second-order linear expansion state observer with model compensation, the state variable is translational speed, and the total disturbance term f is calculated T Expand to a new state for observation and set the derivative thereof as r t The total disturbance term consists of dynamic and control errors which are difficult to measure in an actual system, modeling errors, unmodeled high-order dynamic and external disturbance, and a gantry translational state equation is written as follows:
Figure GDA0004191728700000031
y T ＝C T z T
wherein:
Figure GDA0004191728700000041
z 1 is the translational velocity, z 2 For the total disturbance term f T New state as f T0 For the known part of the model, u T For translational loop velocity loop output, y T B for velocity loop model output T0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a second-order velocity loop model after expanding the disturbance state into a new state, designing a second-order linear expansion state observer with model compensation:
Figure GDA0004191728700000042
Figure GDA0004191728700000043
Figure GDA0004191728700000044
wherein:
Figure GDA0004191728700000045
for observer output, L T Setting a gain matrix for the observer to ensure that the observer has BIBO stability, wherein BIBO is a bounded input-bounded output;
a control amount calculation step: the position loop control quantity is input to the speed loop as a given speed V Td Following the control law:
Figure GDA0004191728700000046
calculating a control amount u T The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) T Is the velocity error gain.
In some embodiments, the rotating loop angle ring control step includes:
the known model dynamic calculation step: the known model of the rotating loop dynamically calculates the disturbance moment and Y-axis acceleration disturbance, which are formed by the disturbance moment, translational ring acceleration and load position together and are formed by the flexible support, the disturbance moment and Y-axis acceleration disturbance, which are formed by the translational ring acceleration and the load position together, are calculated by the deflection angle of the cross beam, the disturbance moment and Y-axis acceleration disturbance are replaced by the X-axis acceleration setting, and the Y-axis acceleration disturbance is replaced by the Y-axis acceleration setting;
an extended state observer step; the rotating loop angle ring designs a third-order linear expansion state observer with model compensation, state variables are a beam deflection angle and a beam deflection angle angular speed, and the total disturbance item f R Expand to a new state for observation and set the derivative thereof as r R The total disturbance term consists of dynamic and modeling and control errors which are not easy to measure in an actual system, unmodeled high-order dynamic and external disturbance, and then a gantry angle state equation is written as follows:
Figure GDA0004191728700000047
y R ＝C R z R
wherein:
Figure GDA0004191728700000048
Figure GDA0004191728700000049
for deflection angle +.>
Figure GDA00041917287000000410
For yaw angular velocity +.>
Figure GDA00041917287000000411
For the total disturbance term f R New state as f R0 For the known part of the model, u R For the output of the rotary loop angle ring, y R For angular ring model output, b R0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a third-order angle ring model after the disturbance state is expanded to a new state, designing a third-order linear expansion state observer with model compensation:
Figure GDA0004191728700000051
Figure GDA0004191728700000052
Figure GDA0004191728700000053
wherein:
Figure GDA0004191728700000054
for observer output, L R Gain matrix for observerSetting a gain matrix to enable the observer to have BIBO stability, and outputting an observation result of the total disturbance term of the expansion state variable by the expansion state observer;
the control step: the deflection angle of the beam for controlling the two-axis synchronous movement is given as 0, and the control law is followed:
Figure GDA0004191728700000055
calculating a control amount u R The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) R For angular error gain Θ gd For a given angle, set to 0, D R For the gain of the angular velocity error,
Figure GDA0004191728700000056
for a given angular velocity, 0 is set.
In some embodiments, the rotating loop sliding mode control step includes:
the design step of the sliding mode function: according to the system rotation equation, the state space equation of the system is as follows, regardless of the total disturbance state:
Figure GDA0004191728700000057
designing a sliding mode function:
Figure GDA0004191728700000058
wherein: s is a function of the system state, p and q are both positive and odd numbers and have
Figure GDA0004191728700000059
Designing a design control rule, namely: designing a nonlinear control law according to the designed sliding mode function:
Figure GDA00041917287000000510
f Rmax and eta is more than 0 as the upper bound of the total disturbance term.
In some embodiments, the step of controlling the current loop under the vector control framework includes:
a current setting step: calculating the given two-axis current by using the control quantity of the translational loop speed loop and the rotational loop angle loop;
and an electrical angle calculating step: searching an initial phase of a motor as a zero point for recording an electrical angle after the platform is electrified, and calculating the electrical angle through position information measured by an incremental grating ruler;
and a current collection step: using a Hall sensor to sample and measure two-phase current of the motor, and calculating current of the other phase according to the theoretical relation of three-phase current;
and a two-phase rotation coordinate system current calculation step: according to the calculated electrical angle, converting three-phase current of the motor under a three-phase static coordinate system into current represented under the dq axis of a two-phase rotating coordinate system;
d-axis voltage control step: d-axis current given quantity is 0, proportional-integral control is adopted, feedforward compensation is added to eliminate disturbance of q-axis current and rotation speed product;
q-axis voltage control step: the q-axis current is given by a translational loop speed loop and a rotational loop angle loop, proportional-integral control is adopted, and feedforward compensation is added to eliminate the interference of d-axis current and permanent magnet flux linkage;
a two-phase stationary coordinate system voltage calculation step: the current loop control amount in the two-phase rotating coordinate system is converted into a voltage expressed in the alpha beta axis of the two-phase stationary coordinate system according to the calculated electrical angle.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention solves the synchronization problem and the coupling problem in the gantry double-drive motion control with the asymmetric flexible support structure, improves the synchronization performance and the convergence speed of the double-drive motion, realizes the effective inhibition of internal coupling and external disturbance, and improves the positioning precision of the gantry double-drive motion platform.
2. According to the invention, a nonsingular terminal sliding mode control strategy is adopted, so that the dynamic response performance of the system is improved.
3. The invention adopts a current loop control scheme under a vector control framework to realize decoupling control of three-phase current of the controlled object motor.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of the overall structure of a flexible gantry dual drive system of the present invention;
FIG. 2 is a schematic illustration of a deflection flexible hinge structure according to the present invention;
FIG. 3 is a schematic view of a swing flexible hinge structure according to the present invention;
FIG. 4 is a schematic flow chart of an electromechanical joint decoupling motion control method of the flexible gantry dual-drive system of the present invention;
fig. 5 is a control schematic diagram of an electromechanical combined decoupling motion control method of the flexible gantry dual-drive system of the present invention.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Example 1
The invention provides a flexible gantry double-drive system formed under a mechanical decoupling design method for eliminating internal stress of a cross beam and a guide rail of a gantry double-drive platform, which mainly comprises a flexible support device 1, a linear motor 2, a linear guide rail 3 and a cross beam 4, wherein the flexible support device 1 comprises a deflection flexible hinge 11 and a rotation flexible hinge 12, the flexible hinge device 1 is adopted to realize sliding connection and flexible support of the cross beam 4 and the linear guide rail 3, one side of the cross beam 4 and the linear guide rail 3 are connected and supported by adopting the rotation flexible hinge 12 capable of realizing relative rotation in a horizontal plane, and the other side of the cross beam and the linear guide rail are connected and supported by adopting the deflection flexible hinge 11 capable of realizing relative rotation in the horizontal plane and relative displacement in the span direction of the cross beam so as to realize the elimination and mechanical decoupling of forces in the cross beam and the guide rail of the gantry double-drive platform.
The deflection flexible hinge 11 mainly includes a first beam connection frame 111, a first track connection block 112, a first vertical stop tab 113, and a first longitudinal stop tab 114. The first beam connecting frame 11 is formed by four hollow structure frames Liang Weicheng, four beams are arranged up and down and left and right, the upper end face and the lower end face of the first line rail connecting block 112 are respectively connected with the upper beam and the lower beam of the first beam connecting frame 111 through a first vertical stop piece 113, the first vertical stop piece 113 is of a thin-wall structure, the thin-wall surface of the first vertical stop piece 113 is positioned in a vertical plane parallel to the sliding direction of the line rail, and the first vertical stop piece 113 limits the relative displacement of the first beam connecting frame 111 and the second line rail connecting block 112 in the up-down vertical direction. The left and right side surfaces of the first rail connecting block 112 are respectively connected with the left and right beams of the first beam connecting frame 111 through first longitudinal stop pieces 114, the first longitudinal stop pieces are of thin-wall structures, the thin-wall surfaces of the first longitudinal stop pieces are positioned in a vertical plane parallel to the sliding direction of the rail, and the first longitudinal stop pieces 114 limit the relative displacement of the first beam connecting frame 111 and the rail connecting block 112 in the sliding direction of the beam 4. One end of the beam 4 is located on the left and right beams of the first beam connecting frame 111, and a boss can be arranged on the left and right beams of the first beam connecting frame 111, and one end of the beam 4 is located on the boss. The first vertical stop piece 113 and the first longitudinal stop piece 114 in the deflection flexible hinge 11 are both in pairs, and can be one pair or multiple pairs. Preferably, the deflection flexible hinge 11 is formed by an integral manufacturing.
The swing flexible hinge 12 includes a second cross beam connection frame 121, a second wire rail connection block 122, a second vertical stop tab 123, a second longitudinal stop tab 124, a transverse stop tab 125, and a transverse stop plate 126. The second connecting frame 121 and the first beam connecting frame 111 are hollow frames with the same structure, the second vertical stop piece 123 and the first vertical stop piece 113, and the second longitudinal stop piece 124 and the first longitudinal stop piece 114 are thin-walled pieces with the same structure, and the transverse stop piece 125 is also thin-walled sheet body structure. The upper and lower end surfaces of the second rail connecting block 122 are respectively connected with the upper and lower beams of the second beam connecting frame 121 through second vertical stop pieces 123, the thin wall surfaces of the second vertical stop pieces 123 are positioned in a vertical plane parallel to the sliding direction of the rails, and the second vertical stop pieces 123 limit the relative displacement of the second beam connecting frame 121 and the second rail connecting block 122 in the upper and lower vertical directions. The left and right side surfaces of the second rail connecting block 122 are respectively connected with the left and right beams of the second beam connecting frame 121 through second longitudinal stop pieces 124, the thin wall surfaces of the second longitudinal stop pieces 124 are positioned in a vertical plane parallel to the sliding direction of the rail, and the second longitudinal stop pieces 124 limit the relative displacement of the first beam connecting frame 121 and the second rail connecting block 122 in the sliding direction of the beam 4. The lateral stopper plate 126 is connected to the upper and lower beams of the second beam connecting frame 12 and the second rail connecting block 122 through the lateral stopper piece 125, respectively, the thin wall surface of the lateral stopper piece 125 is located in a vertical plane perpendicular to the rail sliding direction, and the lateral stopper piece 125 and the lateral stopper plate 126 restrict the relative displacement of the first beam connecting frame 121 and the second rail connecting block 122 in the front-rear direction. The number of second vertical stop tabs 123, second longitudinal stop tabs 124, and transverse stop tabs 125 in the swing flexible hinge 12 is preferably in pairs, and may be one or more pairs. Preferably, the swivel flexible hinge 12 is formed by an integral manufacturing.
Example 2
In the electromechanical combined decoupling motion control method of the flexible gantry double-drive system formed on the basis of the embodiment 1, the flexible gantry double-drive system of the embodiment 1 is adopted, the gantry double-drive motion platform based on the permanent magnet synchronous linear motor divides the gantry double-drive motion into a translational loop and a rotation loop, which are respectively controlled, so that the problem of synchronization and decoupling of double-drive is realized, namely, the motion control of one end of the cross beam 4 connected with the deflection flexible hinge 11 adopts translational loop control, the translational loop follows a position-speed cascade control mode, the motion control of one end of the cross beam 4 connected with the rotation flexible hinge 12 adopts rotation loop control, the rotation loop follows a position single-stage control mode, the control quantity of the translational loop control and the control quantity of the rotation loop control are treated and then are given as current loop control, and the current loop control adopts decoupling control under a vector control frame. The method comprises the following specific steps:
step 100, the controller gives the gantry double drive motion position.
Step 200, measuring the actual displacement of the two shafts of the double drive, and calculating the feedback quantity of the system, comprising the following steps:
a two-axis displacement measurement step: measuring the actual displacement of the two shafts through a grating ruler, defining a linear motor position main shaft on one side, and taking the main shaft displacement as translational displacement;
and a translation speed calculating step: differential calculation is carried out on the displacement of the main shaft to obtain the translational speed of the main shaft;
calculating a beam deflection angle: and calculating the deflection angle of the cross beam through the displacement of the two shafts and the distance between the two parallel shafts.
Step 300: the double-drive motion control is divided into translational loop control and rotational loop control, wherein the translational loop control is position-speed cascade control, and the rotational loop control is position single-stage control, and the method comprises the following steps:
translational loop position loop control step: the translational loop position loop control adopts proportional-differential control, the translational loop position loop receives a position given instruction of the motion controller, and the control quantity is input to the speed loop;
translational loop speed loop control step: the translational loop speed loop design model-based compensation second-order linear expansion state observer decoupling control loop comprises the following steps:
the step of dynamically calculating a known model of the translation loop: the translational speed and the beam deflection angular speed can be measured and calculated;
a disturbance term observation step based on an extended state observer: the translational loop speed loop designs a second-order linear expansion state observer with model compensation, the state variable is translational speed, and the total disturbance term f is calculated T Expand to a new state for observation and set the derivative thereof as r t The total disturbance term consists of dynamic and control errors which are difficult to measure in an actual system, modeling errors, unmodeled high-order dynamic and external disturbance, and a gantry translational state equation is written as follows:
Figure GDA0004191728700000091
y T ＝C T z T
wherein:
Figure GDA0004191728700000092
z 1 is the translational velocity, z 2 For the total disturbance term f T New state as f T0 For the known part of the model, u T For translational loop velocity loop output, y T B for velocity loop model output T0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a second-order velocity loop model after expanding the disturbance state into a new state, designing a second-order linear expansion state observer with model compensation:
Figure GDA0004191728700000093
Figure GDA0004191728700000094
Figure GDA0004191728700000095
wherein:
Figure GDA0004191728700000096
for observer output, L T For the observer gain matrix, additionally, l 1 And l 2 Setting a gain matrix for the gain value calculated according to the actual condition, which is a dimensionless proportion, so that the observer has BIBO stability, wherein BIBO is a bounded input-bounded output;
a control amount calculation step: the position loop control quantity is input to the speed loop as a given speed V Td Following the control law:
Figure GDA0004191728700000097
calculating a control amount u T The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) T Is the velocity error gain.
And a rotary loop angle ring control step: the rotating loop angle ring design is based on model compensation third-order linear expansion state observer decoupling control loop.
The known model dynamic calculation step: the known model of the rotating loop dynamically calculates the disturbance moment and Y-axis acceleration disturbance, which are formed by the disturbance moment, translational ring acceleration and load position together and are formed by the flexible support, the disturbance moment and Y-axis acceleration disturbance, which are formed by the translational ring acceleration and the load position together, are calculated by the deflection angle of the cross beam, the disturbance moment and Y-axis acceleration disturbance are replaced by the X-axis acceleration setting, and the Y-axis acceleration disturbance is replaced by the Y-axis acceleration setting;
an extended state observer step; the rotating loop angle ring designs a third-order linear expansion state observer with model compensation, state variables are a beam deflection angle and a beam deflection angle angular speed, and the total disturbance item f R Expand to a new state for observation and set the derivative thereof as r R The total disturbance term consists of dynamic and modeling and control errors which are not easy to measure in an actual system, unmodeled high-order dynamic and external disturbance, and then a gantry angle state equation is written as follows:
Figure GDA0004191728700000101
y R ＝C R z R
wherein:
Figure GDA0004191728700000102
Figure GDA0004191728700000103
for deflection angle +.>
Figure GDA0004191728700000104
For yaw angular velocity +.>
Figure GDA0004191728700000105
For the total disturbance term f R New state as f R0 For the known part of the model, u R For the output of the rotary loop angle ring, y R For angular ring model output, b R0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a third-order angle ring model after the disturbance state is expanded to a new state, designing a third-order linear expansion state observer with model compensation:
Figure GDA0004191728700000106
Figure GDA0004191728700000107
Figure GDA0004191728700000108
wherein:
Figure GDA0004191728700000109
for observer output, L R Setting a gain matrix for the observer so that the observer has BIBO stability, and outputting an observation result of the total disturbance term of the extended state variable by the extended state observer;
the control step: the deflection angle of the beam for controlling the two-axis synchronous movement is given as 0, and the control law is followed:
Figure GDA00041917287000001010
calculating a control amount u R The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) R For angular error gain Θ gd For a given angle, set to 0, D R For the gain of the angular velocity error,
Figure GDA00041917287000001011
for a given angular velocity, 0 is set.
Step 400: calculating the position control quantity of the rotating loop by using the beam deflection angle and the beam deflection angular velocity as variables of a nonsingular terminal sliding mode controller;
the design step of the sliding mode function: according to the system rotation equation, the state space equation of the system is as follows, regardless of the total disturbance state:
Figure GDA0004191728700000111
designing a sliding mode function:
Figure GDA0004191728700000112
wherein: s is a function of the system state, p and q are both positive and odd numbers and have
Figure GDA0004191728700000113
Designing a design control rule, namely: designing a nonlinear control law according to the designed sliding mode function:
Figure GDA0004191728700000114
f Rmax for the upper bound of the total disturbance term, eta is more than 0, and n and beta are proportionality coefficients.
Step 500: the translational loop control quantity and the rotational loop control quantity are processed and then are given as current loop control, and the current loop control adopts decoupling control under a vector control frame;
a current setting step: calculating the given two-axis current by using the control quantity of the translational loop speed loop and the rotational loop angle loop;
and an electrical angle calculating step: searching an initial phase of a motor as a zero point for recording an electrical angle after the platform is electrified, and calculating the electrical angle through position information measured by an incremental grating ruler;
and a current collection step: using a Hall sensor to sample and measure two-phase current of the motor, and calculating current of the other phase according to the theoretical relation of three-phase current;
and a two-phase rotation coordinate system current calculation step: according to the calculated electrical angle, converting three-phase current of the motor under a three-phase static coordinate system into current represented under the dq axis of a two-phase rotating coordinate system;
d-axis voltage control step: d-axis current given quantity is 0, proportional-integral control is adopted, feedforward compensation is added to eliminate disturbance of q-axis current and rotation speed product;
q-axis voltage control step: the q-axis current is given by a translational loop speed loop and a rotational loop angle loop, proportional-integral control is adopted, and feedforward compensation is added to eliminate the interference of d-axis current and permanent magnet flux linkage;
a two-phase stationary coordinate system voltage calculation step: the current loop control amount in the two-phase rotating coordinate system is converted into a voltage expressed in the alpha beta axis of the two-phase stationary coordinate system according to the calculated electrical angle.
In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements being referred to must have a specific orientation, be configured and operated in a specific orientation, and are not to be construed as limiting the present application.
Those skilled in the art will appreciate that the systems, apparatus, and their respective modules provided herein may be implemented entirely by logic programming of method steps such that the systems, apparatus, and their respective modules are implemented as logic gates, switches, application specific integrated circuits, programmable logic controllers, embedded microcontrollers, etc., in addition to the systems, apparatus, and their respective modules being implemented as pure computer readable program code. Therefore, the system, the apparatus, and the respective modules thereof provided by the present invention may be regarded as one hardware component, and the modules included therein for implementing various programs may also be regarded as structures within the hardware component; modules for implementing various functions may also be regarded as being either software programs for implementing the methods or structures within hardware components.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily without conflict.

Claims (7)

1. The flexible gantry double-drive system is characterized by comprising a flexible supporting device (1), a linear motor (2), a linear guide rail (3) and a cross beam (4);
the flexible supporting device (1) comprises a deflection flexible hinge (11) and a rotation flexible hinge (12), two groups of linear motors (2) are respectively arranged on two linear guide rails (3) which are arranged in parallel at intervals, two ends of the cross beam (4) are respectively connected with the two groups of linear motors (2) through the deflection flexible hinge (1) and the rotation flexible hinge (12), the deflection flexible hinge (11) provides relative rotation in the horizontal plane of the cross beam (4) and relative displacement along the span direction of the cross beam, and the rotation flexible hinge (12) provides relative rotation in the horizontal plane of the cross beam (4);
the motion control of one end, connected with the deflection flexible hinge (11), of the cross beam (4) adopts translational loop control, wherein the translational loop follows a position-speed cascade control mode, the motion control of one end, connected with the rotation flexible hinge (12), of the cross beam (4) adopts rotary loop control, wherein the rotary loop follows a position single-stage control mode, the control quantity of the translational loop control and the control quantity of the rotary loop control are processed and then used as current loop control setting, and the current loop control adopts decoupling control under a vector control frame;
the translational loop control and the rotational loop control comprise translational loop position loop control, translational loop speed loop control and rotational loop angle loop control;
the translational loop speed loop control comprises:
the step of dynamically calculating a known model of the translation loop: the translational speed and the beam deflection angular speed can be measured and calculated;
a disturbance term observation step based on an extended state observer: the translational loop speed loop designs a second-order linear expansion state observer with model compensation, the state variable is translational speed, and the total disturbance term f is calculated T Expand to a new state for observation and set the derivative thereof as r t The total disturbance term consists of dynamic and control errors which are difficult to measure in an actual system, modeling errors, unmodeled high-order dynamic and external disturbance, and a gantry translational state equation is written as follows:
Figure FDA0004191728690000011
y T ＝C T z T
wherein:
Figure FDA0004191728690000012
C T ＝[1 0]，z 1 is the translational velocity, z 2 For the total disturbance term f T New state as f T0 For the known part of the model, u T For translational loop velocity loop output, y T B for velocity loop model output T0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a second-order velocity loop model after expanding the disturbance state into a new state, designing a second-order linear expansion state observer with model compensation:
Figure FDA0004191728690000021
Figure FDA0004191728690000022
Figure FDA0004191728690000023
L T ＝[l 1 l 2 ] T
wherein:
Figure FDA0004191728690000024
for observer output, L T Setting a gain matrix for the observer to ensure that the observer has BIBO stability, wherein BIBO is a bounded input-bounded output;
a control amount calculation step: the position loop control quantity is input to the speed loop as a given speed V Td Following the control law:
Figure FDA0004191728690000025
calculating a control amount u T The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) T Gain for speed error;
the control of the rotating loop angle ring comprises the following steps:
the known model dynamic calculation step: the known model of the rotating loop dynamically calculates the disturbance moment and Y-axis acceleration disturbance, which are formed by the disturbance moment, translational ring acceleration and load position together and are formed by the flexible support, the disturbance moment and Y-axis acceleration disturbance, which are formed by the translational ring acceleration and the load position together, are calculated by the deflection angle of the cross beam, the disturbance moment and Y-axis acceleration disturbance are replaced by the X-axis acceleration setting, and the Y-axis acceleration disturbance is replaced by the Y-axis acceleration setting;
an extended state observer step; the rotating loop angle ring designs a third-order linear expansion state observer with model compensation, state variables are a beam deflection angle and a beam deflection angle angular speed, and the total disturbance item f R Expand to a new state for observation and set the derivative thereof as r R The total disturbance term is formed by the dynamic state, modeling and control errors which are not easy to measure in an actual system and is not modeledThe high-order dynamic and external disturbance components, the gantry angle state equation is written as:
Figure FDA0004191728690000026
y R ＝C R z R
wherein:
Figure FDA0004191728690000027
C R ＝[1 0 0]，ζ 1 zeta is the deflection angle 2 Zeta is the angular velocity of deflection 3 For the total disturbance term f R New state as f R0 For the known part of the model, u R For the output of the rotary loop angle ring, y R For angular ring model output, b R0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a third-order angle ring model after the disturbance state is expanded to a new state, designing a third-order linear expansion state observer with model compensation:
Figure FDA0004191728690000031
Figure FDA0004191728690000032
Figure FDA0004191728690000033
L R ＝(β 1 ，β 2 ，β 3 ) T
wherein:
Figure FDA0004191728690000034
for observer output, L R Setting a gain matrix for the observer so that the observer has BIBO stability and expandsThe state observer outputs the observation result of the total disturbance term of the expansion state variable;
the control step: the deflection angle of the beam for controlling the two-axis synchronous movement is given as 0, and the control law is followed:
Figure FDA0004191728690000035
calculating a control amount u R The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) R For angular error gain Θ gd For a given angle, set to 0, D R For the gain of the angular velocity error,
Figure FDA0004191728690000036
for a given angular velocity, 0 is set.
2. The flexible gantry dual drive system of claim 1, wherein the deflection flexible hinge (11) comprises a first beam connection (111), a first rail connection block (112), a first vertical stop tab (113), and a first longitudinal stop tab (114);
the first beam connecting frame (111) is a hollow structure frame, the upper end face and the lower end face of the first wire rail connecting block (112) are respectively connected with the upper beam and the lower beam of the first beam connecting frame (111) through the first vertical stop piece (113), the left side face and the right side face of the first wire rail connecting block (112) are respectively connected with the left beam and the right beam of the first beam connecting frame (111) through the first vertical stop piece (114), and one end of the beam (4) is located on the left beam and the right beam of the first beam connecting frame (111);
the first vertical stop piece (113) limits the relative displacement of the first beam connecting frame (111) and the first wire rail connecting block (112) in the vertical direction, and the first longitudinal stop piece (114) limits the relative displacement of the first beam connecting frame (111) and the wire rail connecting block (112) in the sliding direction of the beam (4).
3. The flexible gantry dual drive system of claim 1 or 2, wherein the swivel flexible hinge (12) comprises a second cross beam connection (121), a second wire rail connection block (122), a second vertical stop tab (123), a second longitudinal stop tab (124), a transverse stop tab (125), and a transverse stop plate (126);
the second beam connecting frame (121) is a hollow structure frame, the upper and lower end surfaces of the second wire rail connecting block (122) are respectively connected with the upper and lower beams of the second beam connecting frame (121) through the second vertical stop piece (123), the left and right side surfaces of the second wire rail connecting block (122) are respectively connected with the left and right beams of the second beam connecting frame (121) through the second longitudinal stop piece (124), the transverse stop plate (126) is respectively connected with the upper and lower beams of the second beam connecting frame (12) and the second wire rail connecting block (122) through the transverse stop piece (125),
the second vertical stop piece (123) limits the relative displacement of the second beam connecting frame (121) and the second wire rail connecting block (122) in the vertical direction, the second longitudinal stop piece (124) limits the relative displacement of the second beam connecting frame (121) and the second wire rail connecting block (122) in the sliding direction of the beam (4), and the transverse stop piece (125) and the transverse stop plate (126) limit the relative displacement of the second beam connecting frame (121) and the second wire rail connecting block (122) in the front-back direction.
4. An electromechanical combined decoupling motion control method of a flexible gantry double-drive system, which is characterized by adopting the flexible gantry double-drive system as claimed in any one of claims 1-3, comprising the following steps:
step 100, a controller gives a gantry double-drive movement position;
step 200, measuring the actual displacement of the two shafts of the double drive, and calculating the feedback quantity of the system;
step 300: the double-drive motion control is divided into translational loop control and rotational loop control, wherein the translational loop control is position-speed cascade control, and the rotational loop control is angle single-stage control;
step 400: calculating the angle control quantity of the rotating loop by using the beam deflection angle and the beam deflection angular velocity as variables of a nonsingular terminal sliding mode controller;
step 500: the translational loop control quantity and the rotational loop control quantity are processed and then are given as current loop control, and the current loop control adopts decoupling control under a vector control frame;
the step 300 includes:
translational loop position loop control step: the translational loop position loop control adopts proportional-differential control, the translational loop position loop receives a position given instruction of the motion controller, and the control quantity is input to the speed loop;
translational loop speed loop control step: the translational loop speed loop design is based on a model compensation second-order linear expansion state observer decoupling control loop;
and a rotary loop angle ring control step: the design of the angle ring of the rotating loop is based on a model compensation third-order linear expansion state observer decoupling control loop;
the translational loop speed loop control step comprises the following steps:
the step of dynamically calculating a known model of the translation loop: the translational speed and the beam deflection angular speed can be measured and calculated;
a disturbance term observation step based on an extended state observer: the translational loop speed loop designs a second-order linear expansion state observer with model compensation, the state variable is translational speed, and the total disturbance term f is calculated T Expand to a new state for observation and set the derivative thereof as r t The total disturbance term consists of dynamic and control errors which are difficult to measure in an actual system, modeling errors, unmodeled high-order dynamic and external disturbance, and a gantry translational state equation is written as follows:
Figure FDA0004191728690000041
y T ＝C T z T
wherein:
Figure FDA0004191728690000051
C T ＝[1 0]，z 1 for the translation speed, the speed of the translation,z 2 for the total disturbance term f T New state as f T0 For the known part of the model, u T For translational loop velocity loop output, y T B for velocity loop model output T0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a second-order velocity loop model after expanding the disturbance state into a new state, designing a second-order linear expansion state observer with model compensation:
Figure FDA0004191728690000052
Figure FDA0004191728690000053
Figure FDA0004191728690000054
L T ＝[l 1 l 2 ] T
wherein:
Figure FDA0004191728690000055
for observer output, L T Setting a gain matrix for the observer to ensure that the observer has BIBO stability, wherein BIBO is a bounded input-bounded output;
a control amount calculation step: the position loop control quantity is input to the speed loop as a given speed V Td Following the control law:
Figure FDA0004191728690000056
calculating a control amount u T The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) T Gain for speed error;
the rotating loop angle ring control step comprises the following steps:
the known model dynamic calculation step: the known model of the rotating loop dynamically calculates the disturbance moment and Y-axis acceleration disturbance, which are formed by the disturbance moment, translational ring acceleration and load position together and are formed by the flexible support, the disturbance moment and Y-axis acceleration disturbance, which are formed by the translational ring acceleration and the load position together, are calculated by the deflection angle of the cross beam, the disturbance moment and Y-axis acceleration disturbance are replaced by the X-axis acceleration setting, and the Y-axis acceleration disturbance is replaced by the Y-axis acceleration setting;
an extended state observer step; the rotating loop angle ring designs a third-order linear expansion state observer with model compensation, state variables are a beam deflection angle and a beam deflection angle angular speed, and the total disturbance item f R Expand to a new state for observation and set the derivative thereof as r R The total disturbance term consists of dynamic and modeling and control errors which are not easy to measure in an actual system, unmodeled high-order dynamic and external disturbance, and then a gantry angle state equation is written as follows:
Figure FDA0004191728690000057
y R ＝C R z R
wherein:
Figure FDA0004191728690000058
C R ＝[1 0 0]，ζ 1 zeta is the deflection angle 2 Zeta is the angular velocity of deflection 3 For the total disturbance term f R New state as f R0 For the known part of the model, u R For the output of the rotary loop angle ring, y R For angular ring model output, b R0 Reflecting the relationship between the control quantity and the controlled quantity derivative;
based on a third-order angle ring model after the disturbance state is expanded to a new state, designing a third-order linear expansion state observer with model compensation:
Figure FDA0004191728690000061
Figure FDA0004191728690000062
Figure FDA0004191728690000063
L R ＝(β 1 ，β 2 ，β 3 ) T
wherein:
Figure FDA0004191728690000064
for observer output, L R Setting a gain matrix for the observer so that the observer has BIBO stability, and outputting an observation result of the total disturbance term of the extended state variable by the extended state observer;
the control step: the deflection angle of the beam for controlling the two-axis synchronous movement is given as 0, and the control law is followed:
Figure FDA0004191728690000065
calculating a control amount u R The method comprises the steps of carrying out a first treatment on the surface of the Wherein: k (K) R For angular error gain Θ gd For a given angle, set to 0, D R For the gain of the angular velocity error,
Figure FDA0004191728690000066
for a given angular velocity, 0 is set.
5. The method for controlling the electromechanical joint decoupling motion of a flexible gantry dual drive system according to claim 4, wherein said step 200 comprises:
a two-axis displacement measurement step: measuring the actual displacement of two shafts through a grating ruler, and taking the displacement of a main shaft as translational displacement, wherein the main shaft is the main shaft of a specified linear motor on a certain side;
and a translation speed calculating step: differential calculation is carried out on the displacement of the main shaft to obtain the translational speed of the main shaft;
calculating a beam deflection angle: and calculating the deflection angle of the cross beam through the displacement of the two shafts and the distance between the two parallel shafts.
6. The method for controlling the electromechanical coupling decoupling motion of the flexible gantry dual-drive system according to claim 4, wherein the rotating loop sliding mode control step comprises the following steps:
the design step of the sliding mode function: according to the system rotation equation, the state space equation of the system is as follows, regardless of the total disturbance state:
Figure FDA0004191728690000067
designing a sliding mode function:
Figure FDA0004191728690000068
wherein: s is a function of the system state, p and q are both positive and odd numbers and have
Figure FDA0004191728690000069
Designing a design control rule, namely: designing a nonlinear control law according to the designed sliding mode function:
Figure FDA0004191728690000071
f Rmax and eta is more than 0 as the upper bound of the total disturbance term.
7. The method for controlling the electromechanical joint decoupling motion of the flexible gantry dual-drive system according to claim 4, wherein the step of controlling the current loop under the vector control frame comprises the steps of:
a current setting step: calculating the given two-axis current by using the control quantity of the translational loop speed loop and the rotational loop angle loop;
and an electrical angle calculating step: searching an initial phase of a motor as a zero point for recording an electrical angle after the platform is electrified, and calculating the electrical angle through position information measured by an incremental grating ruler;
and a current collection step: using a Hall sensor to sample and measure two-phase current of the motor, and calculating current of the other phase according to the theoretical relation of three-phase current;
and a two-phase rotation coordinate system current calculation step: according to the calculated electrical angle, converting three-phase current of the motor under a three-phase static coordinate system into current represented under the dq axis of a two-phase rotating coordinate system;
d-axis voltage control step: d-axis current given quantity is 0, proportional-integral control is adopted, feedforward compensation is added to eliminate disturbance of q-axis current and rotation speed product;
q-axis voltage control step: the q-axis current is given by a translational loop speed loop and a rotational loop angle loop, proportional-integral control is adopted, and feedforward compensation is added to eliminate the interference of d-axis current and permanent magnet flux linkage;
a two-phase stationary coordinate system voltage calculation step: the current loop control amount in the two-phase rotating coordinate system is converted into a voltage expressed in the alpha beta axis of the two-phase stationary coordinate system according to the calculated electrical angle.
CN202211096635.7A 2022-09-08 2022-09-08 Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof Active CN115390512B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211096635.7A CN115390512B (en) 2022-09-08 2022-09-08 Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211096635.7A CN115390512B (en) 2022-09-08 2022-09-08 Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof

Publications (2)

Publication Number Publication Date
CN115390512A CN115390512A (en) 2022-11-25
CN115390512B true CN115390512B (en) 2023-05-30

Family

ID=84126926

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211096635.7A Active CN115390512B (en) 2022-09-08 2022-09-08 Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof

Country Status (1)

Country Link
CN (1) CN115390512B (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997020260A1 (en) * 1995-11-28 1997-06-05 Fanuc Ltd Method of estimating disturbance load on servomotors
US6119804A (en) * 1999-05-13 2000-09-19 Owen; Thomas E. Horizontally polarized shear-wave vibrator seismic source
CN101578584A (en) * 2005-09-19 2009-11-11 克利夫兰州立大学 Controllers, observers, and applications thereof
CN103869701A (en) * 2014-02-27 2014-06-18 天津大学 Attitude sequence resolving-based air vehicle novel real-time guide method
CN110531777A (en) * 2019-08-13 2019-12-03 北京理工大学 Quadrotor attitude control method and system based on Auto Disturbances Rejection Control Technique
CN113334096A (en) * 2021-07-16 2021-09-03 上海交通大学 Gantry sliding table flexible hinge support assembly and gantry double-drive device thereof
CN113806871A (en) * 2021-11-18 2021-12-17 北京航空航天大学 Flexible flight dynamics modeling method considering structural nonlinearity
CN114637202A (en) * 2022-03-14 2022-06-17 浙江大学 Electromagnetic bearing flexible rotor system same-frequency vibration suppression method based on disturbance compensation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8978796B2 (en) * 2012-01-06 2015-03-17 Silvio Gallazzini Tractor having dual hydrostatic drive with single hand control and attachment adapter for powered attachments

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997020260A1 (en) * 1995-11-28 1997-06-05 Fanuc Ltd Method of estimating disturbance load on servomotors
US6119804A (en) * 1999-05-13 2000-09-19 Owen; Thomas E. Horizontally polarized shear-wave vibrator seismic source
CN101578584A (en) * 2005-09-19 2009-11-11 克利夫兰州立大学 Controllers, observers, and applications thereof
CN103869701A (en) * 2014-02-27 2014-06-18 天津大学 Attitude sequence resolving-based air vehicle novel real-time guide method
CN110531777A (en) * 2019-08-13 2019-12-03 北京理工大学 Quadrotor attitude control method and system based on Auto Disturbances Rejection Control Technique
CN113334096A (en) * 2021-07-16 2021-09-03 上海交通大学 Gantry sliding table flexible hinge support assembly and gantry double-drive device thereof
CN113806871A (en) * 2021-11-18 2021-12-17 北京航空航天大学 Flexible flight dynamics modeling method considering structural nonlinearity
CN114637202A (en) * 2022-03-14 2022-06-17 浙江大学 Electromagnetic bearing flexible rotor system same-frequency vibration suppression method based on disturbance compensation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
《轧机接轴系统扭振动力学模型研究》;王坤;《工程科技I辑》;全文 *

Also Published As

Publication number Publication date
CN115390512A (en) 2022-11-25

Similar Documents

Publication Publication Date Title
Chen et al. Contouring control of biaxial systems based on polar coordinates
US7671553B2 (en) Servo controller
JP3830475B2 (en) Control device
Gordon et al. Accurate control of ball screw drives using pole-placement vibration damping and a novel trajectory prefilter
Yan et al. Theory and application of a combined feedback–feedforward control and disturbance observer in linear motor drive wire-EDM machines
Chen et al. Repetitive control design and implementation for linear motor machine tool
Li et al. Posture control of electromechanical-actuator-based thrust vector system for aircraft engine
CN105159227B (en) A kind of positioning of double-shaft moving platform and dynamic trajectory follow-up control apparatus and method
WO2024037394A1 (en) Gantry machine tool moving beam cross coupling control method
Wu et al. Integral design of contour error model and control for biaxial system
Shi et al. Analysis of the transient backlash error in CNC machine tools with closed loops
Yang et al. A model predictive contouring error precompensation method
Hsieh et al. Modeling and synchronous control of a single-axis stage driven by dual mechanically-coupled parallel ball screws
CN108681239B (en) Decoupling servo control loop system and method for two-axis integrated gyro accelerometer
CN109495026A (en) Double drive gantry platform drive system, method, equipment and computer-readable memory
CN103853099A (en) SERVO CONTROL device WITH POSITION COMPENSATION FUNCTION FOR DRIVEN MEMBER
CN107065562A (en) A kind of anti-interference synchronization sliding-mode control of series parallel type automobile electrophoretic coating conveyor structure
TWI494725B (en) Control device, control method and compensating method of position command
CN115390512B (en) Flexible gantry double-drive system and electromechanical combined decoupling motion control method thereof
Zhao et al. Weighted sum of vector norms based contouring control method for five-axis CNC machine tools
Rassudov et al. FPGA implementation of servodrive control system
JP2003263228A (en) Synchronous control apparatus
Jung et al. Disturbance observer based decoupling control to suppress rotational motion of cross-coupled gantry stage
Yang et al. Nonsingular terminal sliding-mode control for nonlinear robot manipulators with uncertain parameters
WO2010110168A1 (en) Motor control device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant