CN115386952B - Air cooling assembly - Google Patents
Air cooling assembly Download PDFInfo
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- CN115386952B CN115386952B CN202211033201.2A CN202211033201A CN115386952B CN 115386952 B CN115386952 B CN 115386952B CN 202211033201 A CN202211033201 A CN 202211033201A CN 115386952 B CN115386952 B CN 115386952B
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- seat
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- 238000001816 cooling Methods 0.000 title claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 41
- 230000008569 process Effects 0.000 claims abstract description 41
- 239000004065 semiconductor Substances 0.000 claims abstract description 26
- 238000013016 damping Methods 0.000 claims abstract description 21
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 23
- 230000000694 effects Effects 0.000 abstract description 24
- 230000006378 damage Effects 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000035939 shock Effects 0.000 description 8
- 238000000407 epitaxy Methods 0.000 description 7
- 238000002955 isolation Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000013011 mating Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
Abstract
The invention provides an air cooling assembly which is applied to semiconductor process equipment, wherein the air cooling assembly comprises a fan and a supporting device, the fan is used for providing gas for a process chamber of the semiconductor process equipment, and the supporting device is used for being fixedly arranged on a rack of the semiconductor process equipment and supporting the fan; the supporting device comprises at least one first elastic mechanism, the first elastic mechanism comprises a top seat, a base and an elastic supporting module, the top seat is connected with the bottom of the fan, the base is fixedly connected with a rack of semiconductor process equipment, the elastic supporting module is used for driving the top seat and the base to be away from each other, and driving force applied to the top seat and the base by the elastic supporting module is increased along with the fact that the top seat and the base are close to each other. In the invention, the driving force of the elastic support module for expanding the top seat and the base is increased along with the mutual approaching of the top seat and the base, so that the transmission of vibration to the frame through the support device can be blocked, the damping effect on the fan is improved, and the damage of the fan vibration to the machine table is reduced.
Description
Technical Field
The invention relates to the field of semiconductor technology, in particular to an air cooling assembly.
Background
The silicon epitaxy process is a process for growing one or more layers of silicon single crystal films on a polished silicon single crystal wafer through gas phase chemical reaction at high temperature, and epitaxial layers with different resistivity, thickness and model can be obtained by controlling growth conditions. Currently, the mainstream silicon epitaxy equipment comprises a multi-wafer silicon epitaxy equipment and a single-wafer silicon epitaxy equipment, wherein the single-wafer silicon epitaxy equipment generally utilizes a lamp and a reflecting screen to heat a quartz chamber for chemical vapor deposition, and single crystal silicon with certain thickness and same lattice arrangement as the original substrate is grown on the single crystal silicon substrate.
When the single-chip silicon epitaxy equipment performs a silicon epitaxy process, the reaction temperature can reach more than 1000 ℃, so that two cooling modes, namely water cooling and air cooling, are generally required to cool the process chamber. The air cooling system is generally based on the principle that centrifugal blast converts kinetic energy into potential energy, as shown in fig. 1, a fan 10 accelerates gas by using an impeller rotating at a high speed, then decelerates and changes flow direction, converts kinetic energy of the gas into pressure potential energy, and finally introduces cooling gas into a process chamber 2 through an air duct 1.
However, the fan inevitably generates vibration in the operation process, the vibration with too high strength is transmitted to the machine to cause damage to the machine, and the wafer is fallen off in the process when serious, so that the damping effect on the fan is improved, the damage of the vibration of the fan to the machine is reduced, and the technical problem to be solved in the field is urgent.
Disclosure of Invention
The invention aims to provide an air cooling assembly which can improve the damping effect on a fan and reduce the damage of the vibration of the fan to a machine.
In order to achieve the above object, the present invention provides an air cooling assembly applied to a semiconductor process apparatus, the air cooling assembly including a blower for supplying gas to a process chamber of the semiconductor process apparatus and a supporting device for fixedly disposed on a frame of the semiconductor process apparatus and supporting the blower; the supporting device comprises at least one first elastic mechanism, the first elastic mechanism comprises a footstock, a base and an elastic supporting module, the footstock is connected with the bottom of the fan, the base is used for being fixedly connected with a frame of semiconductor process equipment, the elastic supporting module is used for driving the footstock and the base to be far away from each other, and the driving force applied to the footstock and the base by the elastic supporting module is increased along with the mutual approach of the footstock and the base.
Optionally, the elastic support module comprises an upper magnetic part and a lower magnetic part, wherein the upper magnetic part is fixedly arranged on the footstock, the lower magnetic part is fixedly arranged on the base, and the upper magnetic part and the lower magnetic part can generate mutually exclusive magnetic fields so as to drive the footstock and the base to be far away from each other.
Optionally, the upper magnetic part comprises an upper iron core fixedly arranged on the top seat and an upper electromagnetic coil arranged around the upper iron core; the lower magnetic part comprises a lower iron core fixedly arranged on the base and a lower electromagnetic coil arranged around the lower iron core; the upper magnetic part can generate a magnetic field when the upper electromagnetic coil is electrified, the lower magnetic part can generate a magnetic field when the lower electromagnetic coil is electrified, and the upper electromagnetic coil and the lower electromagnetic coil are coaxially arranged.
Optionally, the supporting device further comprises a fan adjusting plate and a fan supporting seat, the fan adjusting plate is horizontally arranged above the top surface of the fan supporting seat, the fan adjusting plate is connected with the fan, the fan supporting seat is fixedly connected with the rack of the semiconductor process equipment, the number of the first elastic mechanisms is multiple, the first elastic mechanisms are arranged between the fan adjusting plate and the fan supporting seat, the top seat is fixedly connected with the fan adjusting plate, and the base is fixedly connected with the fan supporting seat.
Optionally, the supporting device further includes a first nut, the upper iron core includes a first connecting rod and an iron core main body that are connected with each other, a cross section size of the first connecting rod is smaller than a cross section size of the iron core main body, a first avoiding hole corresponding to the first connecting rod in shape is formed on the top seat, and a plurality of first mounting holes corresponding to the first connecting rod in shape and position to the plurality of first elastic mechanisms one by one are formed on the fan adjusting plate; the fan adjusting plate is characterized in that an external thread is formed on the first connecting rod, the top end of the first connecting rod sequentially penetrates through the first avoiding hole and the corresponding first mounting hole, and the first nut is sleeved on the first connecting rod so as to fixedly connect the upper iron core, the top seat and the fan adjusting plate.
Optionally, the supporting device further comprises a plurality of first shockproof rubber seats, and the plurality of first shockproof rubber seats are connected between the bottom surface of the fan and the top surface of the fan adjusting plate.
Optionally, the air cooling assembly further comprises a supporting beam and at least one second elastic mechanism, wherein the supporting beam is used for being fixedly arranged on the frame, the second elastic mechanism comprises a mounting seat, a connecting piece and an elastic piece, the connecting piece is fixedly connected with the fan, the mounting seat is connected with the supporting beam, and the elastic piece is connected between the mounting seat and the connecting piece and used for providing upward elastic force for the connecting piece.
Optionally, the elastic component is the spring, the connecting piece includes the second connecting rod and connects the spring seat piece on second connecting rod top, the mount pad has the bottom plate, just be formed with on the bottom plate the shape with the second that the second connecting rod corresponds dodges the hole, the elastic component cover is established on the second connecting rod and be located the spring seat piece with between the bottom plate of mount pad, the bottom of second connecting rod is passed through the second dodges the hole and wears out downwards and with fan fixed connection.
Optionally, the mount pad still includes the roof and connects the roof with the casing between the bottom plate, second elastic mechanism still includes damping rubber piece, third connecting rod and third nut, be formed with on the roof the shape with the hole is dodged to the third that the third connecting rod corresponds, damping rubber piece is last to be formed with the shape with the fourth that the third connecting rod corresponds dodges the hole, have the external screw thread on the third connecting rod, the top of third connecting rod with supporting beam fixed connection, the bottom of third connecting rod passes in proper order the hole is dodged to the third dodge the hole with the fourth dodges the hole, the third nut cover is established the bottom of third connecting rod, in order will the mount pad hoist and mount are connected on the supporting beam.
Optionally, the air cooling assembly further comprises a fan hanging plate, the fan hanging plate is fixedly arranged on the fan, the fan hanging plate is provided with a horizontal connecting part, and a plurality of second mounting holes with positions corresponding to the second elastic mechanisms one by one are formed in the horizontal connecting part;
the second elastic mechanism further comprises two lock nuts and two lock nut washers, the bottom end of the second connecting rod passes through the corresponding second mounting hole, the second connecting rod is provided with external threads, the lock nuts and the lock nut washers are sleeved on the second connecting rod, the two lock nuts are respectively located on the upper side and the lower side of the horizontal connecting portion, one lock nut washer is arranged between each lock nut and the horizontal connecting portion, and the two lock nuts can clamp the horizontal connecting portion through the two lock nut washers so as to connect the second connecting rod with the fan hanging plate in an adjustable mode.
In the air cooling assembly provided by the invention, the supporting device comprises the footstock, the base and the elastic supporting module, the base is fixedly connected with the frame below, the footstock is connected with the bottom of the fan, the elastic supporting module increases the driving force of expanding the footstock and the base along with the mutual approaching of the footstock and the base and decreases along with the mutual separating of the footstock and the base, so that the footstock and the base can relatively reciprocate under the condition of vibration of the fan, and further, the transmission of vibration to the frame through the supporting device is blocked while the fan is supported by the frame, the damping effect on the fan is improved, the harm of the vibration of the fan to the machine is reduced, the stability of a process result is improved, and the product yield is ensured.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate the invention and together with the description serve to explain, without limitation, the invention. In the drawings:
FIG. 1 is a schematic diagram of a semiconductor processing apparatus;
fig. 2 is a schematic structural diagram of a conventional air cooling system;
FIG. 3 is a left side view of the air cooling system of FIG. 2;
FIG. 4 is a schematic perspective view of the air cooling system of FIG. 2 from one perspective;
FIG. 5 is a schematic perspective view of the air cooling system of FIG. 4 from another perspective;
FIG. 6 is a schematic diagram of an air cooling system according to an embodiment of the present invention;
FIG. 7 is a left side view of the air cooling system of FIG. 6;
FIG. 8 is a schematic perspective view of an air cooling system according to an embodiment of the present invention;
fig. 9 is a schematic perspective view of an air cooling system according to an embodiment of the present invention under another view angle;
fig. 10 is a schematic structural view of a first elastic mechanism in a transmission chamber according to an embodiment of the present invention;
fig. 11 is an enlarged schematic view of a portion of the area a of the cooling system of fig. 7.
Reference numerals illustrate:
1: and (2) an air duct: process chamber
10: fan 110: adapter seat
120: fan hanger plate 121: horizontal connecting part
122: vertical connection 20: supporting device
21: fan adjusting plate 22: fan supporting seat
23: first shock-proof rubber mount 200: first elastic mechanism
210: top base 211: top connecting plate
212: top connection barrel 220: base seat
221: bottom web 222: bottom connecting cylinder
230: upper magnetic part 231: upper iron core
232: upper electromagnetic coil 201: first connecting rod
202: core body 240: lower magnetic part
241: lower core 242: lower electromagnetic coil
31: support beam 32: fixing support
33: hanging plate 34: second shockproof rubber seat
300: the second elastic mechanism 310: mounting base
311: base plate 312: top plate
313: housing 320: connecting piece
321: second connecting rod 322: spring seat block
323: second nut 330: elastic piece
341: third connecting rod 342: shock-absorbing rubber block
343: third nut 351: lock nut
352: lock nut washer
Detailed Description
The following describes specific embodiments of the present invention in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.
Fig. 2 to 5 are schematic structural views of a conventional air cooling system, which includes a fan 10, a support beam 31, a fan support base 22, and a plurality of first vibration-proof rubber bases 23. Because of the large weight and volume of the blower 10, the top and bottom of the blower 10 are generally fixed to avoid toppling of the blower 10.
The top of the fan 10 is fixed by a supporting beam 31, as shown in fig. 2 to 5, the top of the fan 10 is provided with a hanging plate 33, the hanging plate 33 is connected with the supporting beam 31 by two second shockproof rubber seats 34, and two ends of the supporting beam 31 are fixedly connected with a rack of the semiconductor process equipment by two fixing brackets 32; the bottom of the blower 10 is connected with a blower support base 22 through four first shockproof rubber bases 23, and the blower support base 22 is fixedly connected (optionally welded) with a frame of the semiconductor process equipment. That is, the top and bottom of the blower 10 are indirectly connected with the frame of the semiconductor process equipment through the shock-proof rubber mount, so that the shock-proof rubber mount is used to reduce the vibration amplitude transferred to the frame. However, the shock absorbing effect of the shock absorbing rubber seat is not ideal, and the frame still can vibrate when the fan 10 has high power and drive the process chamber of the semiconductor process equipment to vibrate, so that the semiconductor process effect is affected.
To solve the above-mentioned problems, as an aspect of the present invention, there is provided an air cooling assembly applied to a semiconductor process apparatus, as shown in fig. 6 to 9, the air cooling assembly including a blower 10 and a supporting device 20, the blower 10 being used to supply gas to a process chamber of the semiconductor process apparatus, the supporting device 20 being used to be fixedly disposed on a frame of the semiconductor process apparatus and to support the blower 10. The supporting device 20 includes at least one first elastic mechanism 200, as shown in fig. 10, the first elastic mechanism 200 includes a top base 210, a base 220, and an elastic supporting module, the top base 210 is connected with the bottom of the fan 10, the base 220 is fixedly connected with a rack of the semiconductor processing device, the elastic supporting module is used for driving the top base 210 and the base 220 to be far away from each other, and a driving force exerted on the top base 210 and the base 220 by the elastic supporting module increases as the top base 210 and the base 220 approach each other.
In the air cooling assembly provided by the invention, the supporting device 20 comprises the top seat 210, the base 220 and the elastic supporting module, wherein the base 220 is fixedly connected with the lower frame, the top seat 210 is connected with the bottom of the fan 10, the elastic supporting module increases the driving force for expanding the top seat 210 and the base 220 along with the mutual approaching of the top seat 210 and the base 220 and decreases along with the mutual separating of the top seat 210 and the base 220, so that the top seat 210 and the base 220 can relatively reciprocate under the condition that the fan 10 vibrates, and further, the fan 10 is supported by the frame, and meanwhile, the vibration is blocked from being conducted to the frame through the supporting device 20, so that the damping effect on the fan 10 is improved, the damage of the fan 10 vibration on a machine table is reduced, the stability of a process result is improved, and the product yield is ensured.
In some embodiments of the present invention, the elastic support module may be a member having elasticity, such as a spring, and the elastic support between the top base 210 and the bottom base 220 is achieved through deformation of the member. In order to further improve the damping effect on the fan 10, as a preferred embodiment of the present invention, the elastic support module realizes the elastic connection effect through the magnetic field.
Specifically, as shown in fig. 10, the elastic supporting module includes an upper magnetic portion 230 and a lower magnetic portion 240, the upper magnetic portion 230 is fixedly disposed on the top base 210, the lower magnetic portion 240 is fixedly disposed on the base 220, and the upper magnetic portion 230 and the lower magnetic portion 240 can generate mutually exclusive magnetic fields to drive the top base 210 and the base 220 to be away from each other.
In the embodiment of the present invention, the elastic support module includes an upper magnetic portion 230 fixedly disposed on the top base 210 and a lower magnetic portion 240 fixedly disposed on the base 220, which are capable of generating mutually exclusive magnetic fields, so as to generate repulsive force (i.e. the driving force described above) that keeps the top base 210 and the base 220 away from each other. Based on the magnetic field characteristics, the closer the upper magnetic part 230 and the lower magnetic part 240 are, the larger the repulsive force between the magnetic fields generated by the two is, that is, the driving force for making the top base 210 and the base 220 separate from each other increases as the top base 210 and the base 220 are close to each other, so that the effect of elastic connection between the top base 210 and the base 220 is achieved, and the non-contact electromagnetic spring shock absorbing effect is better than the conventional spring effect, and the shock absorbing effect of the supporting device 20 on the fan 10 is further improved.
To improve the adaptability of the air cooling assembly to different processes, as a preferred embodiment of the present invention, as shown in fig. 10, the upper magnetic part 230 includes an upper iron core 231 fixedly provided on the top chassis 210 and an upper electromagnetic coil 232 provided around the upper iron core 231; the lower magnetic part 240 includes a lower iron core 241 fixedly disposed on the base 220 and a lower electromagnetic coil 242 disposed around the lower iron core 241; the upper magnetic part 230 can generate a magnetic field when energized in the upper electromagnetic coil 232, and the lower magnetic part 240 can generate a magnetic field when energized in the lower electromagnetic coil 242, and the upper electromagnetic coil 232 and the lower electromagnetic coil 242 are coaxially disposed.
In the embodiment of the present invention, the upper magnetic portion 230 and the lower magnetic portion 240 are both electromagnets, and the magnetic field strength generated by the upper magnetic portion 230 and the lower magnetic portion 240 is related to the current in the electromagnetic coil, so that the magnetic field strength generated by the upper magnetic portion 230 and the lower magnetic portion 240 can be changed by changing the current applied to the electromagnetic coil, and further the electromagnetic repulsive force between the upper magnetic portion 230 and the lower magnetic portion 240 is changed, and the effect of changing the rigidity of the electromagnetic spring equivalent to the effect is achieved.
For example, if the magnitude of the current supplied to the electromagnetic coil is increased, the magnetic field strength generated by the upper magnetic portion 230 and the lower magnetic portion 240 is increased, and thus the electromagnetic repulsive force between the upper magnetic portion 230 and the lower magnetic portion 240 is increased, in which case the same amount of change in the distance between the upper and lower electromagnets corresponds to a larger change in the electromagnetic repulsive force, and the reflected effect is that the stiffness of the electromagnetic spring becomes larger; conversely, if the current to the electromagnetic coil is reduced, the electromagnetic repulsive force between the upper magnetic portion 230 and the lower magnetic portion 240 is reduced, the same amount of change in the distance between the upper and lower electromagnets corresponds to a smaller change in the electromagnetic repulsive force, and the reflected effect is that the stiffness of the electromagnetic spring becomes smaller. Compared with the common spring damping principle, the stiffness of the electromagnetic spring equivalent to the two electromagnets is variable in the embodiment of the invention, so that the invention can flexibly adapt to various process requirements.
As a preferred embodiment of the present invention, the supporting device 20 may also cooperate with a controller to implement real-time adjustment of the vibration damping effect, for example, the air cooling system may further include a controller and a power detection circuit or a vibration sensor disposed on the blower 10, where the controller determines the magnitudes of currents flowing to the upper electromagnetic coil 232 and the lower electromagnetic coil 242 according to the real-time power of the blower 10 detected by the detection circuit or parameters such as the vibration amplitude and the frequency of the blower 10 detected by the vibration sensor, that is, the currents flowing to the electromagnetic coils increase with the increase of the power or the vibration amplitude and the frequency of the blower 10, so that the stiffness of the electromagnetic spring equivalent to the elastic supporting module adapts to the service condition of the blower 10 in real time.
As a preferred embodiment of the present invention, as shown in fig. 10, the supporting apparatus 20 further includes a blower adjusting plate 21 and a blower supporting seat 22, the blower adjusting plate 21 is horizontally disposed above the top surface of the blower supporting seat 22, the blower adjusting plate 21 is connected with the blower 10, the blower supporting seat 22 is fixedly connected with the rack of the semiconductor process equipment, the number of the first elastic mechanisms 200 is plural, and the plurality of first elastic mechanisms 200 are disposed between the blower adjusting plate 21 and the blower supporting seat 22, the top seat 210 is fixedly connected with the blower adjusting plate 21, and the base 220 is fixedly connected with the blower supporting seat 22 (i.e., the base 220 is fixedly connected with the rack of the semiconductor process equipment through the blower supporting seat 22).
In the embodiment of the present invention, the supporting device 20 further includes a fan adjusting plate 21 and a fan supporting seat 22, and the plurality of first elastic mechanisms 200 are horizontally disposed between the fan adjusting plate 21 and the fan supporting seat 22, so as to improve the stability of the bottom of the fan 10.
Optionally, four first elastic mechanisms 200 are disposed between the fan adjusting plate 21 and the fan supporting seat 22, and the four first elastic mechanisms 200 are arranged in a square shape (i.e. the connecting lines between adjacent first elastic mechanisms 200 can form a square pattern).
As a preferred embodiment of the present invention, the supporting device 20 further includes a first nut, as shown in fig. 10, the upper core 231 includes a first connecting rod 201 and a core body 202 connected to each other, the cross-sectional size of the first connecting rod 201 is smaller than that of the core body 202, a first escape hole having a shape corresponding to the first connecting rod 201 is formed on the top base 210, and a plurality of first mounting holes having a position corresponding to the plurality of first elastic mechanisms 200 one by one and a shape corresponding to the first connecting rod 201 are formed on the fan adjusting plate 21; the first connecting rod 201 is formed with external threads, the top end of the first connecting rod 201 sequentially passes through the first avoiding hole and the corresponding first mounting hole, and the first nut is sleeved on the first connecting rod 201 to fixedly connect the upper iron core 231, the top seat 210 and the fan adjusting plate 21.
In the embodiment of the present invention, the upper core 231 includes the first connecting rod 201 and the core main body 202 that are connected to each other, and the top end of the first connecting rod 201 sequentially passes through the first avoiding hole on the top base 210 and the first mounting hole on the fan adjusting plate 21 and is connected to the first nut, so that the top base 210, the upper magnetic portion 230 and the fan adjusting plate 21 are fixedly connected at the same time, the number of fasteners required for separately fixedly connecting the top base 210 and the fan adjusting plate 21 and separately fixedly connecting the upper magnetic portion 230 and the top base 210 is reduced, and the overall weight of the supporting device 20 is reduced.
As an alternative embodiment of the present invention, as shown in fig. 10, the top chassis 210 includes a top connection plate 211 and a top connection cylinder 212 connected to each other (may be formed as one body), the base 220 includes a bottom connection plate 221 and a bottom connection cylinder 222 connected to each other (may be formed as one body), the top connection plate 211 is disposed opposite to the bottom connection plate 221 in the height direction, the top connection cylinder 212 is coaxial with the bottom connection cylinder 222, and an outer wall of the top connection cylinder 212 is in mating contact with an inner wall of the bottom connection cylinder 222, or an inner wall of the top connection cylinder 212 is in mating contact with an outer wall of the bottom connection cylinder 222 (a case where the outer wall of the top connection cylinder 212 is in mating contact with an inner wall of the bottom connection cylinder 222 is shown in fig. 10).
That is, in the embodiment of the present invention, the side of the top base 210 and the side of the base 220 facing each other are both provided with the tubular structures, and the two tubular structures are sleeved with each other while accommodating the electromagnet structure, so as to realize the motion guiding function, ensure that the top base 210 and the base 220 can only relatively move up and down along the vertical direction before, avoid sliding between the fan adjusting plate 21 and the fan supporting base 22, and further ensure the stability of the horizontal position of the fan 10.
Alternatively, the top base 210 and the bottom base 220 are both made of metal.
As a preferred embodiment of the present invention, as shown in fig. 6 to 9, the air cooling assembly further includes a plurality of first shock-resistant rubber mounts 23, and the plurality of first shock-resistant rubber mounts 23 are connected between the bottom surface of the fan 10 and the top surface of the fan adjusting plate 21.
Namely, in the embodiment of the invention, the electromagnetic spring and the rubber damping structure are connected in series, so that the structure formed by the electromagnetic spring and the rubber damping structure has the high elasticity of the shockproof rubber and the viscoelasticity of the electromagnetic spring, the axial shockproof capacity of the supporting device 20 is improved, and the supporting device 20 has the vibration isolation performance in the transverse direction and the rotation direction; moreover, the internal damping of the shockproof rubber is larger than that of metal, the shock-proof rubber has good isolation performance on high-frequency vibration and good sound insulation effect; the electromagnetic spring has the advantages of variable elastic rigidity, low natural frequency, good low-frequency vibration isolation performance and the like, and the two vibration absorption modes are combined to form secondary vibration absorption, so that the defect of a single vibration absorption mode can be effectively overcome, and the vibration absorption effect on the fan is further improved.
Optionally, four first shock-proof rubber seats 23 are arranged between the bottom surface of the fan 10 and the top surface of the fan adjusting plate 21, and the four first shock-proof rubber seats 23 are arranged in a square shape.
As an alternative embodiment of the present invention, the first vibration-proof rubber seat 23 may be replaced by a vibration-proof gel seat, and the vibration-proof body of the vibration-proof gel seat is made of silicone, so that the phenomenon of weakening of elasticity is less than that of rubber, and the vibration-proof effect on light load and micro vibration is better.
Because of the structural specificity of the fan 10, the lower surface of the fan is generally curved, in order to level the fan 10, optionally, as shown in fig. 6, 8 and 9, an adapter 110 is fixed to the bottom of the side of the fan 10, and the bottom of the adapter 110 is the bottom of the fan 10, that is, a flat bottom surface of the fan 10 is formed by using the adapter 110.
The inventors of the present invention have also found in study that the support beam 31 has a problem of unstable structure due to vibration in the existing air cooling assembly. Specifically, to avoid the fan 10 tilting, the fixing brackets 32 on both sides of the supporting beam 31 need to be leveled when the supporting beam 31 is installed, that is, the height between each fixing bracket 32 on each side and the frame can be adjusted by a set of screw and nut structures. However, since the supporting beam 31 is connected with the fan 10 only through the two second vibration-proof rubber seats 34, the vibration isolation effect of the second vibration-proof rubber seats 34 is limited, the structures such as screws connected between the fixing support 32 and the frame are very easy to loosen or fall off due to vibration in the running process of the fan 10, the uneven supporting beam 31 and uneven stress of the two second vibration-proof rubber seats 34 are further caused, the vibration absorption capacity of the second vibration-proof rubber seats 34 is further reduced, the second vibration-proof rubber seats 34 are damaged, and the influence of the vibration of the fan 10 on a machine table is aggravated.
To solve the technical problem, as a preferred embodiment of the present invention, as shown in fig. 6, 7 and 11, the air cooling assembly further includes a support beam 31 and at least one second elastic mechanism 300, wherein the support beam 31 is fixedly disposed on the frame, the second elastic mechanism 300 includes a mounting seat 310, a connecting piece 320 and an elastic piece 330, the connecting piece 320 is fixedly connected with the fan 10, the mounting seat 310 is connected with the support beam 31, and the elastic piece 330 is connected between the mounting seat 310 and the connecting piece 320 and is used for providing upward elastic force to the connecting piece 320.
In the embodiment of the invention, the supporting beam 31 is connected with the fan 10 through the second elastic mechanism 300, the mounting seat 310 and the connecting piece 320 of the second elastic mechanism 300 are respectively fixed on the supporting beam 31 and the fan 10, and are connected with each other through the elastic piece 330, so that the top of the fan 10 is lifted through the elastic force generated by the elastic piece 330, the elastic piece 330 can elastically deform when the fan 10 vibrates, and the mounting seat 310 and the connecting piece 320 can relatively reciprocate, so that the vibration amplitude transmitted to the supporting beam 31 is reduced, and the stability of a machine is improved.
As an alternative embodiment of the present invention, as shown in FIG. 11, the connecting member 320 includes a second connecting rod 321 and a spring seat block 322 connected to the top end of the second connecting rod 321, the mounting seat 310 has a bottom plate 311, a second avoidance hole having a shape corresponding to the second connecting rod 321 is formed on the bottom plate 311, and the elastic member 330 is sleeved on the second connecting rod 321 and is located between the spring seat block 322 and the bottom plate 311 of the mounting seat 310, and the bottom end of the second connecting rod 321 passes through the second avoidance hole downward and is fixedly connected to the fan 10.
As a preferred embodiment of the present invention, as shown in fig. 11, the mounting base 310 further includes a top plate 312 and a housing 313 connected between the top plate 312 and the bottom plate 311, the second elastic mechanism 300 further includes a shock absorbing rubber block 342, a third connecting rod 341 and a third nut 343, a third avoidance hole having a shape corresponding to the third connecting rod 341 is formed on the top plate 312, a fourth avoidance hole having a shape corresponding to the third connecting rod 341 is formed on the shock absorbing rubber block 342, an external thread is formed on the third connecting rod 341, a top end of the third connecting rod 341 is fixedly connected with the supporting beam 31, a bottom end of the third connecting rod 341 sequentially passes through the third avoidance hole and the fourth avoidance hole, and the third nut 343 is sleeved on the bottom end of the third connecting rod 341 to hoist and mount the mounting base 310 on the supporting beam 31.
In the embodiment of the invention, the bottom end of the third connecting rod 341 fixed on the supporting beam 31 is contacted with the top plate 312 of the mounting seat 310 through the damping rubber block 342, so that the suspension spring and the rubber damping structure are connected in series, the structure formed by the suspension spring and the rubber damping structure has the high elasticity of the damping rubber and the viscoelasticity of the electromagnetic spring, the axial damping capacity of the second elastic mechanism 300 is improved, and the second elastic mechanism 300 has the vibration isolation performance in the transverse direction and the rotation direction;
moreover, the internal damping of the shockproof rubber is larger than that of metal, the shock-proof rubber has good isolation performance on high-frequency vibration and good sound insulation effect; the natural frequency of the spring is low, the low-frequency vibration isolation performance is good, and the two vibration absorption modes are combined to form secondary vibration absorption, so that the defect of a single vibration absorption mode can be effectively overcome, and the vibration absorption effect on the fan is further improved.
Optionally, the air cooling assembly includes two second elastic mechanisms 300.
In order to facilitate adjustment of levelness of the fan 10, as a preferred embodiment of the present invention, as shown in fig. 11, the air cooling assembly further includes a fan hanger plate 120, the fan hanger plate 120 is fixedly disposed on the fan 10, and the fan hanger plate 120 has a horizontal connection part 121, and a plurality of second mounting holes are formed on the horizontal connection part 121, the positions of which correspond to the plurality of second elastic mechanisms 300 one by one;
the second elastic mechanism 300 further comprises two lock nuts 351 and two lock nut washers 352, the bottom end of the second connecting rod 321 passes through the corresponding second mounting hole, the second connecting rod 321 is provided with external threads, the lock nuts 351 and the lock nut washers 352 are all sleeved on the second connecting rod 321, the two lock nuts 351 are respectively located on the upper side and the lower side of the horizontal connecting portion 121, one lock nut washer 352 is arranged between each lock nut 351 and the horizontal connecting portion 121, and the two lock nuts 351 can clamp the horizontal connecting portion 121 through the two lock nut washers 352 so as to adjustably connect the second connecting rod 321 with the fan hanger plate 120.
When the levelness of the fan 10 needs to be adjusted, the lock nuts 351 on the second connecting rods 321 of the two second elastic mechanisms 300 can be loosened, the positions of the horizontal connecting portions 121 of the fan hanger plate 120 are adjusted, and then the lock nuts 351 on the upper side and the lower side of the horizontal connecting portions 121 at each second connecting rod 321 are tightened, so that the two second connecting rods 321 can be fixedly connected with the fan 10 again.
Alternatively, the lock nut 351 may be a lock round nut.
Optionally, as shown in fig. 11, the fan hanger plate 120 further includes a vertical connection portion 122, and a lower edge of the vertical connection portion 122 is fixedly connected (e.g., may be integrally formed) with an edge of the horizontal connection portion 121, that is, the cross-sectional shape of the fan hanger plate 120 is "L" shaped, and the vertical connection portion 122 is fixedly connected with a side surface of the top of the fan 10.
Optionally, as shown in fig. 11, the connector 320 further includes a second nut 323, where the second connecting rod 321 is a screw, and the second nut 323 is sleeved on the top end of the second connecting rod 321, so as to fix the spring seat block 322 on the top end of the second connecting rod 321 by upward elasticity of the elastic member 330 and a limiting effect of the second nut 323.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.
Claims (5)
1. The air cooling assembly is applied to semiconductor process equipment and comprises a fan and a supporting device, wherein the fan is used for providing gas for a process chamber of the semiconductor process equipment, and the supporting device is fixedly arranged on a rack of the semiconductor process equipment and supports the fan;
the elastic support module comprises an upper magnetic part and a lower magnetic part, the upper magnetic part is fixedly arranged on the top seat, the lower magnetic part is fixedly arranged on the base, the upper magnetic part and the lower magnetic part can generate mutually exclusive magnetic fields, the elastic connection between the top seat and the base is realized through the magnetic fields, the magnetic fields drive the top seat and the base to be mutually far away, and the driving force exerted on the top seat and the base by the elastic support module is increased along with the mutual approaching of the top seat and the base;
the upper magnetic part comprises an upper iron core fixedly arranged on the top seat and an upper electromagnetic coil arranged around the upper iron core; the lower magnetic part comprises a lower iron core fixedly arranged on the base and a lower electromagnetic coil arranged around the lower iron core; the upper magnetic part can generate a magnetic field when the upper electromagnetic coil is electrified, the lower magnetic part can generate a magnetic field when the lower electromagnetic coil is electrified, and the upper electromagnetic coil and the lower electromagnetic coil are coaxially arranged;
the supporting device further comprises a fan adjusting plate and a fan supporting seat, wherein the fan adjusting plate is horizontally arranged above the top surface of the fan supporting seat, the fan adjusting plate is connected with the fan, the fan supporting seat is used for being fixedly connected with a rack of the semiconductor process equipment, the number of the first elastic mechanisms is multiple, the first elastic mechanisms are arranged between the fan adjusting plate and the fan supporting seat, the top seat is fixedly connected with the fan adjusting plate, and the base is fixedly connected with the fan supporting seat;
the supporting device further comprises a first nut, the upper iron core comprises a first connecting rod and an iron core main body which are connected with each other, the cross section size of the first connecting rod is smaller than that of the iron core main body, a first avoidance hole which is corresponding to the first connecting rod in shape is formed in the top seat, and a plurality of first mounting holes which are corresponding to the first connecting rod in shape and are one-to-one corresponding to the first elastic mechanisms in position are formed in the fan adjusting plate; the first connecting rod is provided with external threads, the top end of the first connecting rod sequentially penetrates through the first avoiding hole and the corresponding first mounting hole, and the first nut is sleeved on the first connecting rod so as to fixedly connect the upper iron core, the top seat and the fan adjusting plate;
the supporting device further comprises a plurality of first shockproof rubber seats, and the plurality of first shockproof rubber seats are connected between the bottom surface of the fan and the top surface of the fan adjusting plate.
2. The air cooling assembly of claim 1, further comprising a support beam and at least one second elastic mechanism, wherein the support beam is configured to be fixedly disposed on the frame, the second elastic mechanism comprises a mounting base, a connecting member, and an elastic member, the connecting member is fixedly connected with the fan, the mounting base is connected with the support beam, and the elastic member is connected between the mounting base and the connecting member, and is configured to provide an upward elastic force to the connecting member.
3. The air cooling assembly according to claim 2, wherein the elastic member is a spring, the connecting member comprises a second connecting rod and a spring seat block connected to the top end of the second connecting rod, the mounting seat is provided with a bottom plate, a second avoidance hole corresponding to the second connecting rod in shape is formed in the bottom plate, the elastic member is sleeved on the second connecting rod and is located between the spring seat block and the bottom plate of the mounting seat, and the bottom end of the second connecting rod passes through the second avoidance hole to penetrate downwards and is fixedly connected with the fan.
4. The air cooling assembly according to claim 3, wherein the mounting seat further comprises a top plate and a shell connected between the top plate and the bottom plate, the second elastic mechanism further comprises a damping rubber block, a third connecting rod and a third nut, a third avoidance hole corresponding to the third connecting rod in shape is formed in the top plate, a fourth avoidance hole corresponding to the third connecting rod in shape is formed in the damping rubber block, an external thread is arranged on the third connecting rod, the top end of the third connecting rod is fixedly connected with the supporting beam, the bottom end of the third connecting rod sequentially penetrates through the third avoidance hole and the fourth avoidance hole, and the third nut is sleeved at the bottom end of the third connecting rod so as to hoist and mount the mounting seat on the supporting beam.
5. The air cooling assembly according to claim 3, further comprising a fan hanger plate fixedly arranged on the fan, wherein the fan hanger plate is provided with a horizontal connecting part, and a plurality of second mounting holes which are in one-to-one correspondence with the plurality of second elastic mechanisms are formed in the horizontal connecting part;
the second elastic mechanism further comprises two lock nuts and two lock nut washers, the bottom end of the second connecting rod passes through the corresponding second mounting hole, the second connecting rod is provided with external threads, the lock nuts and the lock nut washers are sleeved on the second connecting rod, the two lock nuts are respectively located on the upper side and the lower side of the horizontal connecting portion, one lock nut washer is arranged between each lock nut and the horizontal connecting portion, and the two lock nuts can clamp the horizontal connecting portion through the two lock nut washers so as to connect the second connecting rod with the fan hanging plate in an adjustable mode.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211033201.2A CN115386952B (en) | 2022-08-26 | 2022-08-26 | Air cooling assembly |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211033201.2A CN115386952B (en) | 2022-08-26 | 2022-08-26 | Air cooling assembly |
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| CN115386952A CN115386952A (en) | 2022-11-25 |
| CN115386952B true CN115386952B (en) | 2024-03-26 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209041186U (en) * | 2018-10-31 | 2019-06-28 | 浙江腾创机械设备有限公司 | A kind of shock-damping structure of blower |
| CN210799518U (en) * | 2019-07-03 | 2020-06-19 | 无锡精恩风机有限公司 | Fan with shock-absorbing function |
| CN214170915U (en) * | 2020-12-31 | 2021-09-10 | 深圳市瑞来稀土材料有限公司 | Draught fan for rare earth processing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4009087B2 (en) * | 2001-07-06 | 2007-11-14 | アプライド マテリアルズ インコーポレイテッド | Magnetic generator in semiconductor manufacturing apparatus, semiconductor manufacturing apparatus, and magnetic field intensity control method |
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- 2022-08-26 CN CN202211033201.2A patent/CN115386952B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209041186U (en) * | 2018-10-31 | 2019-06-28 | 浙江腾创机械设备有限公司 | A kind of shock-damping structure of blower |
| CN210799518U (en) * | 2019-07-03 | 2020-06-19 | 无锡精恩风机有限公司 | Fan with shock-absorbing function |
| CN214170915U (en) * | 2020-12-31 | 2021-09-10 | 深圳市瑞来稀土材料有限公司 | Draught fan for rare earth processing |
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| CN115386952A (en) | 2022-11-25 |
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