CN115386833A

CN115386833A - Mask device, control method thereof and film coating equipment

Info

Publication number: CN115386833A
Application number: CN202211324750.5A
Authority: CN
Inventors: 尚鲲鹏; 雷克武; 伍平生; 薛颜同; 王岳利
Original assignee: Contemporary Amperex Technology Co Ltd
Current assignee: Contemporary Amperex Technology Co Ltd
Priority date: 2022-10-27
Filing date: 2022-10-27
Publication date: 2022-11-25

Abstract

The application discloses a mask device, a control method thereof and a coating device, which can solve the problem of uneven coating on a substrate. The mask device of the embodiment of the application comprises: a base; the mask plate is movably arranged on the base; and the driving assembly is connected with the mask plate and used for driving the mask plate to move so as to adjust the size of the mask plate extending out of the base. In the mask device of the embodiment, the driving assembly drives the mask plate to move so as to adjust the size of the mask plate extending out of the base, so that the area of the mask plate covering the coating material can be adjusted, the amount of the coating material coated on the substrate can be controlled, and the coating thickness formed on the substrate is uniform.

Description

Mask device, control method thereof and film coating equipment

Technical Field

The application relates to the technical field of coating equipment, in particular to a mask device, a control method thereof and coating equipment.

Background

Energy conservation and emission reduction are the key points of sustainable development of the automobile industry, and electric vehicles become important components of the sustainable development of the automobile industry due to the advantages of energy conservation and environmental protection. For electric vehicles, battery technology is an important factor in its development. In the power battery, the pole piece of the battery cell of the battery monomer can be formed by a film coating process, namely, a film coating material is coated on the base material by the film coating process. In the coating process, the thickness of a film layer formed on a substrate by a coating material may not be uniform, resulting in low quality of the produced pole piece.

Disclosure of Invention

The embodiment of the application provides a mask device, a control method thereof and a coating device, and can solve the problem of uneven coating on a substrate.

The mask device of the embodiment of the application comprises:

a base;

the mask plate is movably arranged on the base;

and the driving assembly is connected with the mask plate and used for driving the mask plate to move so as to adjust the size of the mask plate extending out of the base.

In the mask device of the embodiment, the driving assembly drives the mask plate to move so as to adjust the mask plate to stretch out of the size of the base, so that the area of the mask plate covering the coating material can be adjusted, the amount of the coating material coated on the substrate can be controlled, and the coating thickness formed on the substrate is uniform.

In some embodiments, the driving assembly includes a driving member and a transmission member, the transmission member connects the driving member and the mask, and the driving member drives the mask to move through the transmission member. Therefore, the driving piece drives the mask plate to move through the transmission part, so that the motion control of the mask plate is easier to realize, and the motion precision is higher.

In certain embodiments, the transmission component comprises a gear transmission. Therefore, the transmission of the gear transmission mechanism is more stable, and the movement precision of the mask plate can be improved.

In some embodiments, the gear transmission mechanism comprises a gear and a rack engaged with the gear, the gear is connected with the driving piece, and the rack is detachably connected with the mask plate. Therefore, the gear and the rack are matched to convert the rotary motion into parallel movement, the transmission precision is high, and the displacement precision of the mask plate is improved.

In some embodiments, the base includes a base and a cover plate, the base and the cover plate enclose an installation space, the transmission part is at least partially disposed in the installation space, the driving part is located outside the installation space, and the mask plate can extend out of or retract into the installation space. Therefore, the transmission component is arranged in the installation space, and the transmission component can be prevented from being polluted by particles such as dust and the like to cause faults and even fail. In addition, the driving part is positioned outside the installation space, so that the structure of the mask device is more compact.

In some embodiments, the number of the mask plates is multiple, the mask plates are arranged along the width direction of the mask plates, and each mask plate is connected with one driving assembly. Therefore, the movement of the plurality of mask plates can control the coating thicknesses at different positions, and the uniformity of the coating thickness of the substrate is realized.

In some embodiments, the mask device further includes a controller connected to the driving assembly, and the controller is configured to control an operating state of the driving assembly to adjust a size of the mask plate protruding from the base. Therefore, the thickness of the coating film layer can be adjusted by adjusting the size of the mask plate extending out of the base, so that the coating film formed on the substrate is uniform in thickness.

In some embodiments, the controller is configured to obtain a thickness of a coated film layer, and control an operating state of the driving assembly according to the thickness of the coated film layer. Therefore, the working state of the driving assembly is controlled by the controller according to the thickness of the film coating film layer, so that the position of the mask plate can be controlled, and the thickness of the film coating can be controlled.

In some embodiments, the controller is configured to control the driving assembly to drive the mask plate when the thickness of the coating film layer is greater than a threshold value, so as to increase the protrusion amount of the mask plate relative to the base; and the driving component is controlled to drive the mask plate when the thickness of the film coating film layer is smaller than a threshold value, so that the extending amount of the mask plate relative to the base is reduced. So, through the amount that stretches out of adjustment mask plate for the base for the thickness of coating film rete is more even.

In some embodiments, the controller is configured to determine an amount of expansion and contraction of the mask plate, and determine a rotation direction and a rotation angle of a motor of the driving assembly according to the amount of expansion and contraction; and the motor is controlled to rotate according to the determined rotating direction and the determined rotating angle. Therefore, the accurate control of the movement of the mask plate can be realized by controlling the rotation direction and the rotation angle of the motor, so that the accurate control of the thickness of the film coating layer is realized.

The coating equipment of the embodiment of the application comprises the mask device of any one of the above embodiments.

The control method is used for a mask device, the mask device comprises a base, a mask plate and a driving assembly, and the driving assembly is used for driving the mask plate to move so as to adjust the size of the mask plate extending out of the base;

the control method comprises the following steps:

obtaining the thickness of a coating film layer;

and controlling the working state of the driving assembly according to the thickness of the coating film layer so as to adjust the size of the mask plate extending out of the base.

Therefore, the thickness of the coating film layer can be adjusted by adjusting the size of the mask plate extending out of the base, so that the coating film formed on the substrate is uniform in thickness.

In some embodiments, the controlling the operating state of the driving assembly according to the thickness of the coating film layer to adjust the size of the mask plate extending out of the base includes:

when the thickness of the film coating film layer is larger than a threshold value, controlling the driving assembly to drive the mask plate so as to increase the extending amount of the mask plate relative to the base;

when the thickness of the coating film layer is smaller than a threshold value, the driving assembly is controlled to drive the mask plate so as to reduce the extending amount of the mask plate relative to the base.

So, through the amount that stretches out of adjustment mask plate for the base for the thickness of coating film rete is more even.

determining the expansion amount of the mask plate;

determining the rotation direction and the rotation angle of a motor of the driving assembly according to the expansion amount;

and controlling the motor to rotate according to the determined rotating direction and the determined rotating angle.

Therefore, the accurate control of the movement of the mask plate can be realized by controlling the rotation direction and the rotation angle of the motor, so that the accurate control of the thickness of the film coating layer is realized.

Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic view of a coating apparatus according to one embodiment of the present application;

FIG. 2 is a schematic cross-sectional view of a masking device according to one embodiment of the present application;

FIG. 3 is a schematic view of a partial structure of a mask device according to an embodiment of the present disclosure;

FIG. 4 is a schematic flow chart of a control method according to one embodiment of the present application;

FIG. 5 is a schematic flow chart diagram of a control method according to one embodiment of the present application;

fig. 6 is a schematic flow chart of a control method according to an embodiment of the present application.

Description of the main reference numerals:

the mask device 100, the base 10, the base 11, the cover plate 12, the first cover 121, the second cover 122, the installation space 13, the mask plate 20, the driving assembly 30, the driving member 31, the transmission member 32, the gear 321, the rack 322, the connecting rod 33, the controller 40, the coating equipment 200, the substrate 210, the coating film layer 220, and the film thickness meter 230.

Detailed Description

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are merely used to more clearly illustrate the technical solutions of the present application, and therefore are only examples, and the protection scope of the present application is not limited thereby.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "including" and "having," and any variations thereof, in the description and claims of this application and the description of the above figures are intended to cover non-exclusive inclusions.

In the description of the embodiments of the present application, the technical terms "first", "second", and the like are used only for distinguishing different objects, and are not to be construed as indicating or implying relative importance or implicitly indicating the number, specific order, or primary-secondary relationship of the technical features indicated. In the description of the embodiments of the present application, "a plurality" means two or more unless specifically defined otherwise.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.

In the description of the embodiments of the present application, the term "and/or" is only one kind of association relationship describing an associated object, and means that three relationships may exist, for example, a and/or B, and may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.

In the description of the embodiments of the present application, the term "plurality" refers to two or more (including two), and similarly, "plural sets" refers to two or more (including two), and "plural pieces" refers to two or more (including two).

In the description of the embodiments of the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the directions or positional relationships indicated in the drawings, and are only for convenience of description of the embodiments of the present application and for simplicity of description, but do not indicate or imply that the referred device or element must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the embodiments of the present application.

In the description of the embodiments of the present application, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are used in a broad sense, and for example, may be fixedly connected, detachably connected, or integrated; mechanical connection or electrical connection is also possible; either directly or indirectly through intervening media, either internally or in any other relationship. Specific meanings of the above terms in the embodiments of the present application can be understood by those of ordinary skill in the art according to specific situations.

At present, the application of the power battery is more and more extensive from the development of market situation. The power battery is not only applied to energy storage power supply systems such as hydraulic power, firepower, wind power and solar power stations, but also widely applied to electric vehicles such as electric bicycles, electric motorcycles and electric automobiles, and a plurality of fields such as military equipment and aerospace. With the continuous expansion of the application field of the power battery, the market demand is also continuously expanding.

In the power battery, the pole piece of the battery cell of the battery monomer can be formed by a film coating process, namely, a film coating material is coated on the base material by the film coating process. In the coating process, because the coating material is generally particles, the movement locus of the particles is uncertain, so that the thickness of a film layer formed on a substrate by the coating material is possibly uneven, and the quality of the produced pole piece is not high.

In order to solve the technical problem of uneven thickness of a coating film layer, the inventor researches and discovers that the movement path of the coating material can be shielded by the mask plate so as to control the amount of the coating material attached to the base material, thereby realizing the adjustment of the coating thickness. Based on the consideration, the inventor conducts intensive research, and drives the mask plate to move through the driving assembly so as to control the position of the mask plate, so that the adjustment of the coating thickness is realized, and the effect of coating thickness uniformity is realized.

Referring to fig. 1, the masking device 100 of the present embodiment may be applied to a coating apparatus 200, or the coating apparatus 200 includes the masking device 100. The coating apparatus 200 is an apparatus for forming a coating layer on an object to be coated by using a chemical vapor deposition coating technique, a physical vapor deposition coating technique, or the like. The coating device 200 is, for example, a vacuum coating device 200, and the vacuum coating device 200 mainly refers to a device requiring coating under a high vacuum degree, and may specifically include many types such as vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, and the like.

Referring to fig. 1 and 2, a mask device 100 according to an embodiment of the present invention includes a base 10, a mask plate 20, and a driving assembly 30, wherein the mask plate 20 is movably disposed on the base 10; the driving assembly 30 is connected to the mask 20, and the driving assembly 30 is used to drive the mask 20 to move so as to adjust the size of the mask 20 protruding out of the base 10.

Specifically, the base 10 is a carrier element of the mask device 100, and the base 10 is mainly used for mounting and carrying other components of the mask device 100. The base 10 may be configured and shaped accordingly depending on the mechanism and location of the components to be mounted. For example, the base 10 may be irregular. The base 10 may be of a single-piece structure or a split structure. It is understood that when the base 10 is of a split structure, the base 10 includes at least two split portions.

The base 10 may be made of a single material or may be made of a plurality of materials. For example, the base 10 may be made of alloy steel, and the application does not limit the specific material of the base 10 as long as the material of the base 10 is corrosion-resistant, not easily deformed, and high-temperature resistant.

The MASK 20 (MASK) is a plate for shielding a coating material. In the embodiment of the present application, the mask plate 20 is rectangular. Of course, in other embodiments, the shape of the mask 20 may be other shapes, for example, the mask 20 may be square. The mask 20 may be made of stainless steel, which is resistant to corrosion, deformation and high temperature. Optionally, the mask 20 is preferably made of a material with a relatively high strength, so that the mask 20 is not easily deformed during the movement.

The mask 20 may be disposed on the base 10 by sliding, rotating, or the like. In the embodiment of the present application, the mask 20 is disposed on the base 10 in a sliding manner. Alternatively, the mask 20 may be slid with respect to the base 10.

The driving assembly 30 is a mechanism for driving the mask plate 20 by an automated means. For example, the driving assembly 30 may drive the mask 20 to move by using an electric drive or the like. When the driving assembly 30 drives the mask 20 to move in an electrically driven manner, the driving assembly 30 may include a motor, and the driving assembly 30 drives the mask 20 to move by a driving force generated by the motor. The driving assembly 30 may be coupled to the mask plate 20 by a fastener such as a screw.

Drive assembly 30 may include one or more components, and when drive assembly 30 includes one component, drive assembly 30 is, for example, a linear motor; when the driving assembly 30 includes a plurality of components, the driving assembly 30 may include a power source and an intermediate member for transmitting the power source to the mask plate 20.

The size of the mask 20 protruding out of the susceptor 10 refers to a distance between an end of the mask 20 and an edge of the susceptor 10. It can be understood that when the mask 20 is completely retracted into the susceptor 10, the size of the mask 20 protruding out of the susceptor 10 is zero.

In summary, in the mask device 100 of the embodiment of the present invention, the driving assembly 30 drives the mask plate 20 to move so as to adjust the size of the mask plate 20 extending out of the base 10, so that the area of the mask plate 20 covering the coating material can be adjusted to control the amount of the coating material coated on the substrate 210, and the thickness of the coating formed on the substrate 210 is relatively uniform.

In the embodiments of the present application, the coating material is, for example, niobium oxide, silicon nitride, silicon hydride, or the like, and the present application does not limit the specific type of the coating material.

Referring to fig. 2, in some embodiments, the driving assembly 30 includes a driving member 31 and a transmission member 32, the transmission member 32 connects the driving member 31 and the mask plate 20, and the driving member 31 drives the mask plate 20 to move through the transmission member 32.

Specifically, the driving member 31 is a power source of the driving assembly 30, and the driving member 31 can convert energy and provide power for the movement of the transmission member 32. For example, the driving member 31 may be a power element such as a motor. It is understood that, in the case that the driving member 31 is a motor, the driving member 31 may convert electric energy into kinetic energy, thereby transmitting the kinetic energy to the mask 20 through the transmission member 32 to move the mask 20.

The transmission member 32 is a member for transmitting the power of the driving member 31 to the mask 20. The transmission member 32 may be connected to the driving member 31 by interference fit, fastening, or the like. In addition, the transmission member 32 may be connected to the mask plate 20 by a fastening member or the like. Therefore, the driving member 31 drives the mask plate 20 to move through the transmission member 32, so that the movement control of the mask plate 20 is easier to realize, and the movement precision is higher.

Referring to fig. 2 and 3, in some embodiments, the transmission member 32 includes a gear train. The gear transmission mechanism is an integral structure formed by connecting toothed parts such as a gear 321, a rack 322 and the like. Because gear drive has advantages such as the transmission is stable, transmission precision height, consequently, drive unit 32 adopts gear drive for drive assembly 30's transmission is more stable, and can improve the precision of mask plate 20 motion, and then controls the thickness of coating film more easily, makes the coating film thickness more even.

Of course, in other embodiments, the transmission member 32 may be a pulley mechanism, a link mechanism, or other transmission mechanism as long as the power of the driving member 31 can be transmitted to the mask plate 20.

In some embodiments, the gear transmission mechanism includes a gear 321 and a rack 322 engaged with the gear 321, the gear 321 is connected to the driving member 31, and the rack 322 is detachably connected to the mask 20. Specifically, the gear 321 is a mechanical part that transmits power by being continuously engaged by gear teeth while rotating. The gear 321 may be made of corrosion-resistant, non-deformable, and high-temperature-resistant materials such as alloys, and the specific materials of the gear 321 are not limited in this application. The rack 322 is a bar-shaped member engaged with the gear 321. In order to make the transmission precision of the gear 321 and the rack 322 higher, the teeth of the gear 321 and the teeth of the rack 322 adopt the same parameters, for example, the pressure angles of the tooth types are equal.

In the embodiment of the present application, in the case where the driving member 31 is a motor, the gear 321 may be connected to the motor shaft through the link 33. For example, one end of the link 33 is inserted on the gear 321, and the other end of the link 33 is connected to the motor shaft of the motor through a coupling. Of course, in other embodiments, the gear 321 may be sleeved on the motor shaft of the motor and fixed by a key.

The rack 322 and the mask 20 may be coupled by a fastener such as a screw. Certainly, the rack 322 and the mask plate 20 can also be detachably connected through structures such as a buckle, and the application does not limit the specific connection mode of the rack 322 and the mask plate 20.

In the embodiment of the application, the number of the gear 321 and the number of the rack 322 are both one, so that the risk of errors caused by excessive part transmission is reduced. Of course, in other embodiments, under the condition of ensuring the transmission precision, a plurality of gears 321 can be used for meshing transmission to realize a larger transmission ratio and realize larger amplitude adjustment of the rotating speed.

Therefore, the gear 321 and the rack 322 are matched, so that the rotation motion of the driving member 31 can be converted into the parallel movement of the mask plate 20, the transmission precision of the gear 321 and the rack 322 is high, and the displacement precision of the mask plate 20 is improved. In one example, in the case where the amount of protrusion of the mask 20 is changed by 1mm, the thickness of the plating film may be changed by 1nm.

Referring to fig. 2 and 3, in some embodiments, the base 10 includes a base 11 and a cover 12, the base 11 and the cover 12 enclose an installation space 13, the transmission member 32 is at least partially disposed in the installation space 13, the driving member 31 is located outside the installation space 13, and the mask 20 can extend out of or retract into the installation space 13. Specifically, the base 11 may provide a bearing space for the transmission component 32 and other components, and the base 11 may be designed into a corresponding structure according to requirements. The cover plate 12 may be assembled with the base 11 by means of snaps, screws, or the like. The installation space 13 is an inner space of the base 10, and the specific configuration of the installation space 13 is determined according to the shapes of the base 11 and the cover 12.

Thus, by disposing the transmission member 32 at least in the installation space 13, it is possible to prevent the transmission member 32 from being contaminated by particles such as dust and the like to cause malfunction or even fail. In addition, the driving member 31 is located outside the installation space 13, so as to avoid the interference between the driving member 31 and other components in the installation space 13, and also avoid the driving member 31 occupying a larger position of the installation space 13, so that the structure of the mask device 100 is more compact.

As discussed above, the transmission component 32 may include the gear 321 and the rack 322, in which case, both the gear 321 and the rack 322 may be installed in the installation space 13, and the driving component 31 may be disposed on the cover plate 12, so that the cover plate 12 provides a supporting surface for the driving component 31, which is beneficial to improving the installation stability of the motor.

Referring to fig. 2, in some embodiments, the cover plate 12 includes a first cover 121 and a second cover 122 separated from the first cover 121, the second cover 122 covers the transmission member 32, and the first cover 121 covers a portion of the mask plate 20. In this manner, the cover plate 12 is provided in two parts, so that the cover plate 12 is easily mounted on the base 11.

In some embodiments, the number of the mask plates 20 is plural, a plurality of mask plates 20 are arranged along the width direction of the mask plates 20, and one driving assembly 30 is connected to each mask plate 20. It is understood that the substrate 210 for coating has a certain width, and the thickness of the coating may be different at different width positions. Thus, the position of one mask plate 20 is controlled by one driving assembly 30, so that the coating thicknesses of different positions of the substrate 210 can be controlled, that is, the movement of a plurality of mask plates 20 can control the coating thicknesses of different positions of the substrate 210, thereby realizing the uniformity of the overall coating thickness of the substrate 210.

Referring to fig. 1 and 2, in some embodiments, the mask device 100 further includes a controller 40 connected to the driving assembly 30, wherein the controller 40 is configured to control an operating state of the driving assembly 30 to adjust a size of the mask plate 20 protruding out of the base 10. Specifically, the controller 40 is an electrical component that sends a control signal to the drive assembly 30. The controller 40 is, for example, a microprocessor, and the controller 40 may be integrated on a single chip, and sends a controllable instruction to the driving member 31 of the driving assembly 30, so as to control the working state of the driving member 31, and further drive the mask plate 20 through the transmission member, so as to adjust the size of the mask plate 20 extending out of the base 10.

The operating state of the drive assembly 30 is controlled by various parameters. In one example, where the driving member 31 is an electric motor, the controller 40 can control at least one of the rotation speed, rotation angle and rotation direction of the electric motor, so as to enable the driving assembly 30 to be in different working states. In this way, the thickness of the coating film layer 220 can be adjusted by adjusting the size of the mask 20 extending out of the base 10, so that the thickness of the coating film formed on the substrate 210 is uniform.

In some embodiments, the controller 40 is configured to obtain the thickness of the coated film layer 220 and control the operating state of the driving assembly 30 according to the thickness of the coated film layer 220. Specifically, the thickness of the coated film layer 220 can be obtained through the film thickness meter 230 by collecting and detecting, and the film thickness meter 230 can send the detected coated film thickness to the controller 40, so that the controller 40 obtains the thickness of the coated film layer 220. Thus, the controller 40 controls the operating state of the driving assembly 30 according to the thickness of the coating film layer 220, so as to control the position of the mask plate 20, further control the thickness of the coating film, and make the thickness of the coating film on the substrate 210 more uniform.

In some embodiments, the controller 40 is configured to control the driving assembly 30 to drive the mask plate 20 to increase the protrusion amount of the mask plate 20 relative to the base 10 when the thickness of the plating film layer 220 is greater than the threshold; and when the thickness of the film coating layer 220 is smaller than the threshold, controlling the driving assembly 30 to drive the mask plate 20 so as to reduce the protrusion amount of the mask plate 20 relative to the base 10.

It can be understood that the larger the protruding amount of the mask 20 with respect to the base 10, the larger the area of the mask 20 shielding the coating material, so that the coating material attached to the substrate 210 can be reduced. Conversely, the smaller the amount of protrusion of the mask 20 with respect to the base 10, the smaller the area of the mask 20 shielding the coating material, so that the coating material attached to the substrate 210 can be increased. Therefore, according to the relationship between the thickness of the film coating layer 220 and the threshold value, the thickness of the film coating layer 220 is more uniform by adjusting the protruding amount of the mask plate 20 relative to the base 10.

The threshold of the coating film layer 220 can be obtained according to experimental tests or calculation. The threshold is smaller than the total thickness of the coating film layer 220, for example, when the coating film layer 220 needs to be coated to a thickness of 20nm, the threshold may be set to 12nm, so that the final coating film thickness is the required total thickness after adjusting the protrusion amount of the mask plate 20 relative to the base 10.

In some embodiments, the controller 40 is configured to determine an amount of expansion and contraction of the mask plate 20, and to determine a rotation direction and a rotation angle of the motor of the driving assembly 30 according to the amount of expansion and contraction; and the motor is controlled to rotate according to the determined rotating direction and rotating angle.

Specifically, the amount of expansion and contraction of the mask 20 is an increased or decreased amount of protrusion of the mask 20 with respect to the base 10. The stretching amount of the mask 20 can be determined according to a predetermined relationship between the extending amount of the mask 20 and the coating film layer 220. For example, if the film coating layer 220 needs to be increased by 2nm, it can be determined that the mask 20 needs to be retracted by 2mm according to the preset relationship.

The driving assembly 30 includes a motor, and the rotation direction of the motor is, for example, forward rotation or reverse rotation, and by controlling the rotation direction of the motor, the mask 20 can be controlled to extend out of the base 10 or retract into the base 10. The rotation angle of the motor is an angle rotated by the rotor of the motor, for example, the rotation angle of the motor is pi, 2 pi, 3 pi, etc., and the amount of movement of the mask plate 20 can be controlled by controlling the rotation angle of the motor. Therefore, the accurate control of the movement of the mask plate 20 can be realized by controlling the rotation direction and the rotation angle of the motor, so that the accurate control of the thickness of the coating film layer 220 is realized.

Referring to fig. 4, the control method according to the present embodiment is applied to a mask device 100, and the mask device 100 is, for example, the mask device 100 described in any of the above embodiments. Illustratively, the mask apparatus 100 includes a base 10, a mask plate 20, and a driving assembly 30, wherein the driving assembly 30 is used for driving the mask plate 20 to move so as to adjust the size of the mask plate 20 protruding out of the base 10.

The control method comprises the following steps:

s10, obtaining the thickness of the coating film layer 220;

and S20, controlling the working state of the driving assembly 30 according to the thickness of the coating film layer 220 so as to adjust the size of the mask plate 20 extending out of the base 10.

The above steps S10 and S20 may be performed by the controller 40. Therefore, the working state of the driving assembly 30 is controlled according to the thickness of the coating film layer 220, so that the position of the mask plate 20 can be controlled, the thickness of the coating film is further controlled, and the thickness of the coating film on the substrate 210 is more uniform.

Referring to fig. 5, in some embodiments, the operation state of the driving assembly 30 is controlled according to the thickness of the coating film layer 220 to adjust the size of the mask plate 20 protruding out of the base 10 (step S20), which includes:

s21, when the thickness of the coating film layer 220 is larger than a threshold value, controlling the driving assembly 30 to drive the mask plate 20 so as to increase the extending amount of the mask plate 20 relative to the base 10;

and S22, when the thickness of the film coating layer 220 is smaller than a threshold value, controlling the driving assembly 30 to drive the mask plate 20 so as to reduce the protruding amount of the mask plate 20 relative to the base 10.

The above steps S21 and S22 may be performed by the controller 40. So, according to the thickness of coating film layer 220 and the relation of threshold value, through the amount that stretches out of adjustment mask plate 20 for base 10 for the thickness of coating film layer 220 is more even.

Referring to fig. 6, in some embodiments, the operation state of the driving assembly 30 is controlled according to the thickness of the coating film layer 220 to adjust the size of the mask plate 20 extending out of the base 10 (step S20), which includes:

s23, determining the expansion amount of the mask plate 20;

s24, determining the rotation direction and the rotation angle of the motor of the driving assembly 30 according to the expansion amount;

and S25, controlling the motor to rotate according to the determined rotation direction and rotation angle.

The above steps S23-S22 may be performed by the controller 40. Therefore, the accurate control of the movement of the mask plate 20 can be realized by controlling the rotation direction and the rotation angle of the motor, so that the accurate control of the thickness of the coating film layer 220 is realized.

It should be noted that the explanations of the coating device in the above embodiments are applicable to the control method in the embodiments of the present application, and therefore, other unexploded parts of the control method in the embodiments of the present application may refer to the same or similar parts of the coating device in the above embodiments, and are not repeated herein.

In the description herein, references to the description of the terms "one embodiment," "certain embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present disclosure, and the present disclosure should be construed as being covered by the claims and the specification. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. The present application is not intended to be limited to the particular embodiments disclosed herein but is to cover all embodiments that may fall within the scope of the appended claims.

Claims

1. A masking apparatus, comprising:

a base;

the mask plate is movably arranged on the base;

2. The mask device according to claim 1, wherein the driving assembly comprises a driving member and a transmission member, the transmission member connects the driving member and the mask plate, and the driving member drives the mask plate to move through the transmission member.

3. The mask apparatus according to claim 2, wherein the transmission member comprises a gear transmission mechanism.

4. The mask device according to claim 3, wherein the gear transmission mechanism comprises a gear and a rack engaged with the gear, the gear is connected with the driving member, and the rack is detachably connected with the mask plate.

5. The mask apparatus according to claim 2, wherein the base comprises a base and a cover plate, the base and the cover plate define an installation space, the transmission member is at least partially disposed in the installation space, the driving member is located outside the installation space, and the mask plate can extend out of or retract into the installation space.

6. The mask device according to claim 1, wherein the number of the mask plates is plural, the plural mask plates are arranged along a width direction of the mask plates, and each mask plate is connected with one driving assembly.

7. The mask device according to claim 1, further comprising a controller connected to the driving assembly, wherein the controller is configured to control an operating state of the driving assembly to adjust a size of the mask plate protruding from the base.

8. The mask apparatus according to claim 7, wherein the controller is configured to obtain a thickness of the coated film layer, and control the operating state of the driving assembly according to the thickness of the coated film layer.

9. The mask device according to claim 8, wherein the controller is configured to control the driving assembly to drive the mask plate to increase an amount of protrusion of the mask plate relative to the base when the thickness of the coating film layer is greater than a threshold value; and the driving component is controlled to drive the mask plate when the thickness of the film coating film layer is smaller than a threshold value, so that the extending amount of the mask plate relative to the base is reduced.

10. The mask device according to claim 9, wherein the controller is configured to determine an amount of expansion and contraction of the mask plate, and to determine a rotation direction and a rotation angle of a motor of the driving assembly according to the amount of expansion and contraction; and the motor is controlled to rotate according to the determined rotating direction and the determined rotating angle.

11. A coating apparatus comprising the mask device according to any one of claims 1 to 10.

12. The control method is used for a mask device, and is characterized in that the mask device comprises a base, a mask plate and a driving assembly, wherein the driving assembly is used for driving the mask plate to move so as to adjust the size of the mask plate extending out of the base;

the control method comprises the following steps:

obtaining the thickness of a coating film layer;

13. The control method according to claim 12, wherein the controlling the operating state of the driving assembly according to the thickness of the film layer to adjust the size of the mask plate protruding from the base comprises:

14. The control method according to claim 12, wherein the controlling the operating state of the driving assembly according to the thickness of the film layer to adjust the size of the mask plate protruding from the base comprises:

determining the expansion amount of the mask plate;