CN115386831A - Mask assembly, manufacturing method thereof and display device - Google Patents
Mask assembly, manufacturing method thereof and display device Download PDFInfo
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- CN115386831A CN115386831A CN202211063893.5A CN202211063893A CN115386831A CN 115386831 A CN115386831 A CN 115386831A CN 202211063893 A CN202211063893 A CN 202211063893A CN 115386831 A CN115386831 A CN 115386831A
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- alignment
- mask
- hole
- frame
- mask plate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
A mask assembly, a manufacturing method thereof and a display device belong to the technical field of display. The mask assembly comprises a mask plate and a mask frame, wherein the mask plate is arranged on the mask frame and fixedly connected with the mask frame, the mask plate comprises a first alignment structure, the mask frame comprises a second alignment structure, the first alignment structure is different from the second alignment structure, and the first alignment structure is aligned with the second alignment structure. In the mask assembly provided by the application, the alignment precision of the mask plate and the mask frame is higher.
Description
Technical Field
The application relates to the technical field of display, in particular to a mask assembly, a manufacturing method thereof and a display device.
Background
In the display field, an evaporator is usually used to prepare an evaporation pattern in cooperation with a mask assembly.
At present, a mask assembly comprises a mask plate and a metal frame, wherein alignment holes are formed in the peripheral area of the mask plate and the metal frame, the mask plate is firstly arranged on the metal frame in the process of manufacturing the mask assembly, the alignment holes in the mask plate are aligned with the alignment holes in the metal frame, and then the mask plate is fixed with the metal frame through a glue material.
However, in the process of fixing the mask plate and the metal frame, the mask plate and the metal frame may have a position offset, so that the mask plate and the metal frame cannot be aligned accurately in the finally manufactured mask assembly.
Disclosure of Invention
The application provides a mask assembly and a manufacturing method thereof, and a display device, which can improve the alignment precision of a mask plate and a mask frame, and the technical scheme of the application is as follows:
in a first aspect, a mask assembly is provided, the mask assembly includes a mask plate and a mask frame, the mask plate is disposed on the mask frame and fixedly connected with the mask frame, the mask plate includes a first alignment structure, the mask frame includes a second alignment structure, the first alignment structure is different from the second alignment structure, and the first alignment structure is aligned with the second alignment structure.
Optionally, the first alignment structure includes an alignment post, the second alignment structure includes an alignment hole, and the alignment post is located in the alignment hole.
Optionally, the alignment hole is a long strip-shaped hole, the width of the opening at the first end of the alignment hole is greater than the width of the opening at the second end of the alignment hole, and the alignment column is fixed at the second end of the alignment hole.
Optionally, a difference between a width of an opening of the second end of the alignment hole and a width of a cross section of the alignment post is smaller than a preset difference, so that the alignment post is fixed at the second end of the alignment hole; alternatively, the first and second electrodes may be,
a locking structure is arranged in the alignment hole, and the alignment column is fixed at the second end of the alignment hole through the locking structure; alternatively, the first and second electrodes may be,
the alignment column is fixed at the second end of the alignment hole through a glue material.
Optionally, the locking structure includes an elastic substrate and a spring piece disposed on the elastic substrate, and the spring piece is located between the first end of the alignment hole and the second end of the alignment hole.
Optionally, the mask frame includes a frame body and a sliding structure, the sliding structure can slide along the frame body, and the alignment hole is located on the sliding structure.
Optionally, the mask plate includes a plurality of first alignment structures, the mask frame includes a plurality of second alignment structures, and the plurality of first alignment structures and the plurality of second alignment structures are aligned in a one-to-one correspondence.
In a second aspect, there is provided a method of manufacturing a mask assembly, the method including:
forming a mask plate and a mask frame, wherein the mask plate comprises a first alignment structure, the mask frame comprises a second alignment structure, and the first alignment structure is different from the second alignment structure;
arranging the mask plate on the mask frame to enable the first aligning structure to be aligned with the second aligning structure, and fixing the mask plate and the mask frame relatively through the first aligning structure and the second aligning structure;
and fixing the mask plate and the mask frame.
Optionally, the first alignment structure includes alignment posts, the second alignment structure includes alignment holes, the mask plate is disposed on the mask frame, so that the first alignment structure is aligned with the second alignment structure, and the mask plate and the mask frame are fixed to each other through the first alignment structure and the second alignment structure, including: and arranging the mask plate on the mask frame, and inserting the alignment columns into the alignment holes.
Optionally, the alignment hole is a long strip-shaped hole, the width of the opening at the first end of the alignment hole is greater than the width of the opening at the second end of the alignment hole, the mask plate is arranged on the mask frame, so that the alignment column is inserted into the alignment hole, including: and arranging the mask plate on the mask frame, and enabling the alignment column to be inserted into the first end of the alignment hole.
Optionally, the mask frame includes a frame body and a sliding structure, the sliding structure can slide along the frame body, the alignment hole is located on the sliding structure, and the fixing of the mask plate and the mask frame includes: and controlling the sliding structure to slide along the frame body, so that the alignment column moves from the first end of the alignment hole to the second end of the alignment hole and is locked at the second end of the alignment hole.
Optionally, a difference between the width of the opening of the second end of the alignment hole and the width of the cross section of the alignment post is smaller than a preset difference, so that the alignment post is locked at the second end of the alignment hole; or a locking structure is arranged in the alignment hole, and the alignment column is locked at the second end of the alignment hole through the locking structure.
Optionally, the locking structure includes an elastic substrate and an elastic sheet disposed on the elastic substrate, and the elastic sheet is located between the first end of the alignment hole and the second end of the alignment hole.
Optionally, the mask frame includes a frame body and a sliding structure, the sliding structure can slide along the frame body, the alignment hole is located on the sliding structure, and the mask plate and the mask frame are fixed, including: and controlling the sliding structure to slide along the frame body, so that the alignment column moves from the first end of the alignment hole to the second end of the alignment hole, and fixing the mask plate and the mask frame by adopting a glue material.
Optionally, the alignment holes are blind holes, and before the mask plate is disposed on the mask frame, the method further includes: injecting a glue material into the alignment hole;
adopt gluey material will the mask plate with the mask frame is fixed, include: and curing the glue material in the alignment holes to fix the mask plate and the mask frame.
Optionally, a slide rail is arranged on the frame body, an operation knob is arranged on the sliding structure, the sliding structure is arranged on the slide rail and can slide along the slide rail, and the sliding structure is controlled to slide along the frame body, including: and rotating the operation knob to enable the operation knob to drive the sliding structure to slide along the sliding rail.
In a third aspect, there is provided a display device including: the evaporation coating pattern prepared by the mask assembly is adopted.
The technical scheme provided by the application brings the beneficial effects that:
the mask assembly comprises a mask plate and a mask frame, the mask plate is arranged on the mask frame and fixedly connected with the mask frame, the mask plate comprises a first aligning structure, the mask frame comprises a second aligning structure, the first aligning structure is different from the second aligning structure, and the first aligning structure is aligned with the second aligning structure. Because the first alignment structure is different from the second alignment structure, and the first alignment structure is aligned with the second alignment structure, the alignment precision of the first alignment structure and the second alignment structure is higher, so that the alignment precision of the mask plate and the mask frame is higher.
For example, when manufacturing the mask assembly, a mask plate is first disposed on a mask frame, a first alignment structure on the mask plate is aligned with a second alignment structure on the mask frame, and the mask plate and the mask frame are fixed relatively by the first alignment structure and the second alignment structure, and then the mask plate and the mask frame are fixed. Because behind the mask plate setting on the mask frame, this mask plate and this mask frame are relatively fixed through first counterpoint structure and second counterpoint structure, consequently, at the in-process of fixed mask plate and mask frame, this mask plate and this mask frame can not take place the offset for in the mask subassembly that finally makes, the counterpoint precision of mask plate and mask frame is higher.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a front view of a mask assembly according to an embodiment of the present disclosure;
fig. 2 is a flowchart of a method for manufacturing a mask assembly according to an embodiment of the present disclosure;
fig. 3 is a perspective view of a mask provided in an embodiment of the present application;
fig. 4 is a front view of the mask shown in fig. 3;
FIG. 5 is a cross-sectional view taken at the location M-M of FIG. 4;
FIG. 6 is a perspective view of a mask frame according to an embodiment of the present disclosure;
FIG. 7 is a front view of the mask frame shown in FIG. 6;
fig. 8 is a front view of an aligning apparatus provided in an embodiment of the present application;
FIG. 9 is a cross-sectional view of an alignment device according to an embodiment of the present application;
FIG. 10 is a cross-sectional view of another alignment device provided in an embodiment of the present application;
FIG. 11 is a schematic view of an alignment hole provided in an embodiment of the present application;
FIG. 12 is a schematic view of another alignment hole provided in embodiments of the present application;
fig. 13 is a schematic view of a state in a process of disposing a mask plate on a mask frame according to an embodiment of the present application;
FIG. 14 is a schematic view of a mask plate after being disposed on a mask frame according to an embodiment of the present disclosure;
FIG. 15 is a diagram illustrating a position change of the alignment post and the alignment hole according to an embodiment of the present disclosure;
FIG. 16 is a diagram illustrating another variation of the positions of the alignment posts and the alignment holes according to an embodiment of the present disclosure;
fig. 17 is a diagram illustrating a position change of the alignment posts and the alignment holes according to another embodiment of the present application.
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be described in further detail with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.
In the field of organic light emitting display, an evaporator is usually used to prepare an evaporation pattern in cooperation with a mask assembly. Currently, the market puts higher demands on the resolution of organic light-emitting diode (OLED) products. For example, the resolution of OLED products such as Augmented Reality (AR) and Virtual Reality (VR) needs to be more than 4000. This puts higher demands on the accuracy of the mask assembly. Resolution refers to the number of Pixels Per Inch (PPI).
At present, a mask assembly comprises a mask plate and a metal frame, wherein alignment holes are formed in the peripheral area of the mask plate and the metal frame, the mask plate is firstly arranged on the metal frame in the process of manufacturing the mask assembly, the alignment holes in the mask plate are aligned with the alignment holes in the metal frame, and then the mask plate is fixed with the metal frame through a glue material. However, in the process of fixing the mask plate and the metal frame by the adhesive material, the mask plate and the metal frame may be subjected to position deviation, so that the mask assembly finally manufactured is caused to have an effect that the mask plate and the metal frame cannot be accurately aligned, the preparation precision of an evaporation pattern is affected, and for example, a display product is poor in color mixing.
In addition, after the mask plate and the metal frame are fixed through the glue material, the glue material is located between the mask plate and the metal frame, so that gaps exist between the mask plate and the metal frame, the uniformity of the thickness of the glue material is poor, the flatness of the surface of the mask plate is poor, the alignment precision of the mask plate and the metal frame can be affected, and the preparation precision of evaporation patterns is further affected. Further, when forming an evaporation pattern on a substrate, the mask assembly needs to be aligned with the substrate, and the alignment precision of the mask assembly and the substrate also affects the preparation precision of the evaporation pattern. When the alignment precision of the mask plate and the metal frame and the alignment precision of the mask assembly and the substrate are low, the preparation precision of the evaporation pattern is further influenced.
In view of the problems of the existing mask assembly, the embodiments of the present application provide a mask assembly, a manufacturing method thereof, and a display device. The mask assembly comprises a mask plate and a mask frame, wherein the mask plate is arranged on the mask frame and fixedly connected with the mask frame, the mask plate comprises a first alignment structure, the mask frame comprises a second alignment structure, the first alignment structure is different from the second alignment structure, and the first alignment structure is aligned with the second alignment structure. Because the first alignment structure is different from the second alignment structure, and the first alignment structure is aligned with the second alignment structure, the alignment precision of the first alignment structure and the second alignment structure is higher, so that the alignment precision of the mask plate and the mask frame is higher. Because the alignment precision of the mask plate and the mask frame is higher, even if the mask assembly is used for forming an evaporation coating pattern on the substrate, the alignment precision of the mask assembly and the substrate is lower, and the accuracy of the evaporation coating pattern cannot be greatly influenced. For example, if the alignment precision of the mask plate and the metal frame and the alignment precision of the mask assembly and the substrate are low, the evaporation pattern finally formed on the substrate may cause that pixels including the evaporation pattern cannot normally emit light.
The technical scheme of the present application is described below, and an embodiment of the mask assembly of the present application is first described.
Referring to fig. 1, a front view of a mask assembly provided in an embodiment of the present application is shown. This mask subassembly includes mask plate 01 and mask frame 02, mask plate 01 set up on mask frame 02 and with mask frame 02 fixed connection, mask plate 01 includes first counterpoint structure 011, mask frame 02 includes second counterpoint structure 0223, first counterpoint structure 011 and second counterpoint structure 0223 counterpoint. For example, the mask plate 01 includes a plurality of first alignment structures 011, the mask frame 02 includes a plurality of second alignment structures 0223, and the plurality of first alignment structures 011 and the plurality of second alignment structures 0223 are aligned in a one-to-one correspondence.
Optionally, the first alignment structure 011 comprises alignment posts and the second alignment structure 0223 comprises alignment holes, the alignment posts being positioned in the alignment holes such that the first alignment structure 011 is aligned with the second alignment structure 0223. For example, the alignment posts are inserted into the alignment holes in a one-to-one correspondence, so that the mask plate 01 and the mask frame 02 are aligned. The alignment column may be a cylinder, a prism, or other irregular column, and the prism may be a triangular prism, a quadrangular prism, or the like. The alignment hole can be a through hole or a blind hole, the inner wall surface of the alignment hole can be a smooth-transition curved surface, or the inner wall surface of the alignment hole is formed by a curved surface and a plane, or the inner wall surface of the alignment hole is formed by a plurality of planes, or the inner wall surface of the alignment hole is in a step shape.
For example, as shown in fig. 1, the mask plate 01 includes a plurality of mask regions A1 and non-mask regions A2, and the non-mask regions A2 are regions of the mask plate 01 except for the mask regions A1. Each mask area A1 has a plurality of evaporation holes (none shown in fig. 1), the evaporation holes in each mask area A1 are uniformly distributed in each mask area A1, and the hole diameter of the evaporation hole and the distance between adjacent evaporation holes may be set according to practical situations, for example, the hole diameter of the evaporation hole ranges from 3 micrometers to 5 micrometers. The unmasked area A2 is provided with a plurality of first contraposition structures 011, and the first contraposition structures 011 are uniformly distributed in the unmasked area A2 at the periphery of the mask plate 01. For example, the non-mask region A2 at the periphery of the mask plate 01 has a plurality of alignment grooves 012 uniformly distributed therein, and the first alignment structures 011 are located in the grooves 012 in a one-to-one correspondence. The height direction of the first alignment structure 011 is parallel to the thickness direction of the mask plate 01, and the height of the first alignment structure 011 can be set according to actual needs, for example, the range of the height of the first alignment structure is 500 micrometers to 700 micrometers. As shown in fig. 1, the mask frame 02 includes a frame body 021 and a plurality of alignment devices 022, an opening (not labeled in fig. 1) is disposed on the frame body 021, the plurality of alignment devices 022 are uniformly disposed on the frame body 021 and distributed along an edge of the opening, and mask regions A1 of the mask plate 01 are all located in the opening of the frame body 021. Each aligning device 022 includes a sliding structure 0222 and a second aligning structure 0223, a plurality of sliding rails G are disposed on the frame body 021, the sliding structures 0222 of the aligning devices 022 are disposed on the plurality of sliding rails G in a one-to-one manner, and each sliding structure 0222 can slide along the sliding rail G where it is located. Optionally, each alignment device 022 includes an operation knob 0221, wherein the operation knob 0221 is connected to the sliding structure 0222 through a thread, and the operation knob 0221 can rotate around an axis of the operation knob 0221 to drive the sliding structure 0222 to slide along the sliding rail G on which the operation knob 0221 is located.
In an alternative embodiment, the first alignment structure 011 includes an alignment post, and the second alignment structure 0223 includes an alignment hole, the alignment hole is a strip-shaped hole, the width of the opening of the first end of the alignment hole is greater than the width of the opening of the second end of the alignment hole, and the alignment post is fixed at the second end of the alignment hole.
In one example, a difference between a width of an opening of the second end of the alignment hole and a width of a cross section of the alignment post is less than a preset difference, so that the alignment post is fixed at the second end of the alignment hole. That is, the second end of the alignment hole and the cross section of the alignment post are arranged in a size relationship, so that the alignment post is clamped at the second end of the alignment hole.
In another example, a locking structure is disposed in the alignment hole, and the alignment post is fixed to the second end of the alignment hole by the locking structure. For example, the locking structure comprises an elastic substrate arranged along the inner wall surface of the alignment hole and a plurality of elastic sheets arranged on the elastic substrate, the elastic sheets surround to form a locking opening, the width of the first end of the locking opening is larger than that of the second end of the locking opening, and the alignment column is locked at the second end of the alignment hole through the locking opening.
In another example, the alignment post is fixed to the second end of the alignment hole by a glue material. The glue material is positioned in the alignment hole, so that the size of a gap between the mask plate and the mask frame cannot be influenced by the glue material. Thereby not influencing the flatness of the surface of the mask plate.
To sum up, the mask assembly provided by the embodiment of the application comprises a mask plate and a mask frame, wherein the mask plate is arranged on the mask frame and is fixedly connected with the mask frame, the mask plate comprises a first alignment structure, the mask frame comprises a second alignment structure, the first alignment structure is different from the second alignment structure, and the first alignment structure is aligned with the second alignment structure. Because the first alignment structure is different from the second alignment structure, and the first alignment structure is aligned with the second alignment structure, the alignment precision of the first alignment structure and the second alignment structure is higher, so that the alignment precision of the mask plate and the mask frame is higher.
The above is the introduction to the mask assembly of the present application. The method of manufacturing the mask assembly of the present application is described below.
Referring to fig. 2, a flowchart of a method for manufacturing a mask assembly according to an embodiment of the present disclosure is shown. As shown in fig. 2, the method includes the following steps S101 to S104.
S101, forming a mask plate, wherein the mask plate comprises a first alignment structure.
In an alternative embodiment, the mask plate comprises a mask area and a non-mask area, the mask area is provided with evaporation holes, and the non-mask area is provided with a first alignment structure. The unmasked region can be a region on the mask plate except the masked region, and the first alignment structure can be an alignment column which can be a cylinder, a prism or other irregular columns. The prism is, for example, a triangular prism, a quadrangular prism, or the like.
By way of example, fig. 3 is a perspective view of a mask 01 according to an embodiment of the present disclosure, fig. 4 is a front view of the mask 01 shown in fig. 3, and fig. 5 is a cross-sectional view of a portion M-M of fig. 4. As shown in fig. 3 to 5, the mask plate 01 includes a plurality of mask regions A1 and non-mask regions A2, and the non-mask regions A2 are regions of the mask plate 01 other than the mask regions A1. Each mask region A1 has a plurality of evaporation holes K therein (not shown in fig. 3 and 4), the evaporation holes K in each mask region A1 are uniformly distributed in each mask region A1, and the aperture of each evaporation hole K and the distance between adjacent evaporation holes K may be set according to practical situations, for example, the aperture of each evaporation hole K ranges from 3 micrometers to 5 micrometers. The unmasked area A2 is provided with a plurality of first contraposition structures 011, and the first contraposition structures 011 are uniformly distributed in the unmasked area A2 at the periphery of the mask plate 01. For example, the non-mask region A2 at the periphery of the mask plate 01 has a plurality of alignment grooves 012 uniformly distributed therein, and the first alignment structures 011 are located in the grooves 012 in a one-to-one correspondence. The height direction of the first alignment structure 011 is parallel to the thickness direction of the mask plate 01, and the height of the first alignment structure 011 can be set according to actual needs, for example, the range of the height of the first alignment structure is 500 micrometers to 700 micrometers. As shown in fig. 5, the mask 01 further optionally includes a support structure 013, the support structure 013 is located in the unmasked region A2, the support structure 013 and the first alignment structure 011 are located on the same surface side of the mask 01, and the height direction of the support structure 013 is parallel to the height direction of the first alignment structure 011. Wherein, the support structure 013 is used for supporting the mask plate 01. The thickness of the mask area A1 can be set according to actual needs, for example, the thickness of the mask area A1 ranges from 19 micrometers to 21 micrometers.
In an optional embodiment, when the mask 01 is formed, a mask body is formed first, and then the mask body is processed to obtain the mask 01. The mask plate body is of a plate-shaped structure without patterns, the material of the mask plate body can be silicon, and correspondingly, the mask plate 01 can be a silicon-based mask plate.
By way of example, processing the mask body includes: firstly, thinning a mask area of a mask plate body (the mask area of the mask plate body refers to an area to be formed with the mask area on the mask plate body and corresponds to the mask area A1 of the mask plate 01) so as to reduce the thickness of the mask area, then forming evaporation holes in the mask area, and finally forming a first alignment structure in a non-evaporation area of the mask plate body.
As an example, firstly, a wet etching process is adopted to etch a mask region of a mask plate body so as to thin the mask region; then, etching the thinned mask region by adopting a dry etching process so as to form an evaporation hole in the mask region; finally, etching the non-evaporation area of the mask body through an etching process (such as a wet etching process or a dry etching process) to form a first alignment structure in the non-evaporation area; after the processing, the part of the mask body which is not etched and is positioned at the same side with the first alignment structure is used as a supporting structure. The thickness of the thinned mask region can be set according to actual requirements, and the range of the thickness of the thinned mask region is 19-21 micrometers.
According to the embodiment of the application, the evaporation hole is formed in the mask region firstly, and then the first counterpoint structure is formed in the non-mask region as an example, the first counterpoint structure can also be formed in the non-mask region firstly, and then the evaporation hole is formed in the mask region.
S102, forming a mask frame, wherein the mask frame comprises a second alignment structure.
In an alternative embodiment, the mask frame includes a frame body and an alignment device on the frame body, and the alignment device includes a second alignment structure. For example, a slide rail is disposed on the frame body, the aligning device includes a sliding structure, the sliding structure is disposed on the slide rail and can slide along the slide rail, and the sliding structure includes a second aligning structure. The sliding structure can be a sliding block, the second alignment structure can be an alignment hole, the alignment hole can be a through hole or a blind hole, the inner wall surface of the alignment hole can be a smooth-transition curved surface, or the inner wall surface of the alignment hole is formed by a curved surface and a plane, or the inner wall surface of the alignment hole is formed by a plurality of planes, or the inner wall surface of the alignment hole is in a step shape. The frame body may be made of metal, and the frame body may be made of iron-nickel alloy (Invar 36).
Illustratively, fig. 6 is a perspective view of a mask frame 02 according to an embodiment of the present application, and fig. 7 is a front view of the mask frame 02 shown in fig. 6. As shown in fig. 6 and 7, the mask frame 02 includes a frame body 021 and a plurality of alignment devices 022 (fig. 6 and 7 illustrate 4 alignment devices 022), the frame body 021 is a rectangular plate-shaped structure, an opening B is disposed on the frame body 021, and the plurality of alignment devices 022 are uniformly disposed on the frame body 021 and distributed along an edge of the opening B. The shape of the opening B may be circular, rectangular, or other irregular patterns, and the embodiment of the present application takes the example that the shape of the opening B is circular. Fig. 8 is a front view (enlarged view of a region Q in fig. 7) of an alignment device 022 provided in an embodiment of the present application, fig. 9 is a cross-sectional view (for example, fig. 9 is a cross-sectional view of a region N-N in fig. 8) of the alignment device 022 provided in an embodiment of the present application, fig. 10 is a cross-sectional view of another alignment device 022 provided in an embodiment of the present application, as shown in fig. 6 to 10, each alignment device 022 includes a sliding structure 0222 and a second alignment structure 0223, a frame body 021 is provided with a plurality of sliding rails G, the sliding structures 0222 of the plurality of alignment devices 022 are correspondingly disposed on the plurality of sliding rails G, and each sliding structure 022 can slide along the sliding rail G on which the sliding structure 022 is disposed. Optionally, each alignment device 022 further includes an operation knob 0221, the operation knob 0221 is in threaded connection with the sliding structure 0222, and the operation knob 0221 can rotate around an axis of the operation knob 0221, so as to drive the sliding structure 0222 to slide along the sliding rail G on which the operation knob 0221 is located. Illustratively, the operation knob 0221 includes an operation handle (none labeled in fig. 6 to 10) and a screw (none labeled in fig. 6 to 10) fixedly connected with the operation handle, a length direction of the screw is parallel to a length direction of the slide rail G where the corresponding sliding structure 0222 is located, a screw hole is provided on the sliding structure 0222, the screw of the operation knob 0221 is in threaded fit with the screw hole on the sliding structure 0222, the operation knob 0221 is in threaded connection with the sliding structure 0222, and the operation knob 0221 can rotate around an axis of the operation knob 0221. As shown in fig. 9, the second aligning structure 0223 is an aligning hole on the sliding structure 0222, the aligning hole 0223 is a through hole, an inner wall of the aligning hole 0223 is stepped, the aligning hole 0223 includes a first sub-hole (not marked in fig. 9) and a second sub-hole (not marked in fig. 9) distributed along a depth direction h thereof, the first sub-hole and the second sub-hole are communicated, an axis of the first sub-hole and an axis of the second sub-hole are collinear, and an area of an opening surface of the second sub-hole is larger than an area of an opening surface of the first sub-hole. As shown in fig. 10, the second alignment structure 0223 is an alignment hole on the sliding structure 0222, and the alignment hole 0223 is a blind hole, the upper end of the alignment hole 0223 is open, and the lower end is closed, when the upper end of the alignment hole 0223 is disposed on the frame body 021 for the sliding structure 0222, the alignment hole 0223 is far away from one end of the frame body 021, and when the upper end of the alignment hole 0223 is disposed on the frame body 021 for the sliding structure 0222, the alignment hole 0223 is close to one end of the frame body 021.
In an optional embodiment, fig. 11 and 12 are schematic diagrams of two alignment holes (i.e., the second alignment structure 0223) provided in the embodiment of the present application, the alignment hole 0223 is a long-strip-shaped hole, the opening surface of the alignment hole 0223 is long-strip-shaped, the width L1 of the first end of the alignment hole 0223 is greater than the width L2 of the second end of the alignment hole 0223, the inner wall surface of the first end of the alignment hole 0223 and the inner wall surface of the second end of the alignment hole 0223 are both arc surfaces, the inner wall surface between the first end and the second end of the alignment hole 0223 is a plane, the inner wall surface of the first end of the alignment hole 0223, the inner wall surface between the first end and the second end of the alignment hole 0223, and the inner wall surface of the second end of the alignment hole 0223 are sequentially connected and smoothly transitioned. Fig. 11 and 12 illustrate the inner wall surface of the first end of the alignment hole 0223 and the inner wall surface of the second end of the alignment hole 0223 as cambered surfaces. In other embodiments, the inner wall surface of the first end of the alignment hole 0223 and/or the inner wall surface of the second end of the alignment hole 0223 may also be formed of a plurality of planes, which is not limited in the embodiments of the present application. The width L1 of the first end of the alignment hole 0223 is greater than the width of the cross section of the positioning column 011 on the mask plate 01, the difference between the width L2 of the second end of the alignment hole 0223 and the width of the cross section of the positioning column 011 is smaller than a preset difference, and the cross section of the positioning column 011 is perpendicular to the height direction of the positioning column 011. Wherein, the preset difference can be set according to practical situations, for example, the preset difference is smaller than 0.5um (micrometer), for example, the preset difference is 0, that is, the width L2 of the second end of the aligning hole 0223 is equal to the width of the cross section of the aligning column 011.
Optionally, as shown in fig. 12, a locking structure 0224 is disposed inside the alignment hole 0223, and the locking structure 0224 is used for locking the structure inserted into the alignment hole 0223 at the second end of the alignment hole 0223. Illustratively, the locking structure 0224 includes an elastic substrate 02241 disposed along the inner wall surface of the alignment hole 0223 and a plurality of resilient sheets 02242 disposed on the elastic substrate 02241, wherein the elastic substrate 02241 is closely attached to the inner wall surface of the alignment hole 0223. This a plurality of shell fragments 02242 are located between the first end of this counterpoint hole 0223 and the second end of this counterpoint hole 0223, the one end of every shell fragment 02242 is fixed to be set up on elastic substrate 02241, the other end is located this counterpoint hole 0223 and towards the second end of this counterpoint hole 0223, this a plurality of shell fragments 02242 are arranged for at least two sets of (what fig. 12 shows is two sets of circumstances) along the depth direction of this counterpoint hole 0223, this two sets of shell fragments 02242 enclose into the locking mouth, the width W1 of the first end of this locking mouth is greater than the width W2 of the second end of this locking mouth, the first end of this locking mouth is close to the first end of this counterpoint hole 0223, the second end of this locking mouth is close to the second end of this counterpoint hole 0223, this locking mouth is used for will inserting the structure locking of the second end of this counterpoint hole 0223 at the second end of this counterpoint hole 0223. Here, the elastic substrate 02241 may be disposed on the inner wall surface of the alignment hole 0223 by an injection molding process, and the elastic substrate 02241 may be compressed by a pressure, and the elastic substrate 02241 may be restored to its original shape after the pressure is removed. The material of the elastic substrate 02241 is an organic polymer material, such as an organic polymer material, and specifically may be Polyimide (PI), polyethylene terephthalate (PET), polypropylene (PP), or the like. The elastic sheet 02242 is an elastic sheet structure, which can be inserted into the elastic substrate 02241, and the elastic sheet 02242 can be made of metal.
S103, arranging the mask plate on the mask frame to enable the first aligning structure and the second aligning structure to be aligned, and fixing the mask plate and the mask frame relatively through the first aligning structure and the second aligning structure.
In an optional embodiment, the first aligning structure comprises an aligning column, the second aligning structure comprises an aligning hole, the mask plate is arranged on the mask frame, the mask area of the mask plate is located in the opening of the mask frame, the aligning column on the mask plate is inserted into the aligning hole on the mask frame, and the aligning and the relative fixing of the mask plate and the mask frame are realized through the aligning column and the aligning hole. For example, the alignment hole may be a long bar-shaped hole, and the width of the opening of the first end of the alignment hole may be greater than the width of the opening of the second end of the alignment hole.
Optionally, the mask plate includes a plurality of first alignment structures, the mask frame includes a plurality of second alignment structures, the plurality of first alignment structures are alignment posts, the plurality of second alignment structures are alignment holes, the mask plate is disposed on the mask frame, and the plurality of alignment posts are inserted into first ends of the plurality of alignment holes in a one-to-one correspondence manner. Fig. 13 is a schematic view illustrating a state in which the mask plate 01 is disposed on the mask frame 02, and fig. 14 is a schematic view after the mask plate 01 is disposed on the mask frame 02. As shown in fig. 14, after the mask plate 01 is disposed on the mask frame 02, the mask regions A1 of the mask plate 01 are all located in the openings of the mask frame 02, the four alignment posts 011 on the mask plate 01 are inserted into the first ends of the four alignment holes 0223 on the mask frame 02 in a one-to-one correspondence manner, and the mask plate 01 and the mask frame 02 are aligned and relatively fixed through the four alignment posts 011 and the four alignment holes 0223.
It should be noted that the mask frame includes a frame body and an alignment device, a slide rail is provided on the frame body, the alignment device includes a sliding structure, an alignment hole (i.e., a second alignment structure) and an operation knob, the second alignment structure and the operation knob are both provided on the sliding structure, and the sliding structure is provided on the slide rail. Before the mask plate is arranged on the mask frame (or the mask plate is arranged on the mask frame), the operation knob can be operated, so that the operation knob drives the sliding structure to slide along the sliding rail (for example, the operation handle of the operation knob is rotated around a first direction, so that the operation handle drives the screw rod of the operation knob to rotate, so that the screw rod drives the sliding structure to slide along the sliding rail), so as to adjust the relative position between the sliding structure and the frame body, so that when the mask plate is arranged on the mask frame, the alignment column (namely, the first alignment structure) on the mask plate can be inserted into the first end of the alignment hole on the mask frame.
And S104, fixing the mask plate and the mask frame.
As described in S103, after the mask plate is disposed on the mask frame, the first alignment structure on the mask plate is aligned with the second alignment structure on the mask frame, and the mask plate and the mask frame are relatively fixed by the first alignment structure and the second alignment structure. In order to improve the firmness of fixing the mask plate and the mask frame, the mask plate and the mask frame can be secondarily fixed after the mask plate is arranged on the mask frame.
In an alternative embodiment, the mask frame includes a frame body and a plurality of alignment devices, each alignment device includes a sliding structure and a second alignment structure, the sliding structure can slide along the frame body, the second alignment structure is an alignment hole on the sliding structure, the mask plate includes a plurality of first alignment structures, each first alignment structure is an alignment column, and the width of the opening of the first end of the alignment hole is greater than the width of the opening of the second end of the alignment hole. After the mask plate is arranged on the mask frame, the alignment posts are inserted into the first ends of the alignment holes in a one-to-one correspondence manner. After S104, each sliding structure can be controlled to slide along the frame body, so as to drive the alignment hole on each sliding structure to move relative to the alignment post in the alignment hole, so that the alignment post moves from the first end of the alignment hole to the second end of the alignment hole, and is locked at the second end of the alignment hole. After the alignment column is locked at the second end of the alignment hole, the mask plate and the mask frame can be fixed.
In one example, the difference between the width of the opening of the second end of each alignment hole and the width of the cross section of the corresponding alignment post is smaller than a preset difference, so that the alignment post is locked at the second end of the alignment hole or clamped at the second end of the alignment hole.
In another example, a locking structure is arranged in each alignment hole, and the alignment column in each alignment hole is locked at the second end of the alignment hole through the locking structure. For example, the locking structure comprises an elastic substrate arranged along the inner wall surface of the alignment hole and a plurality of elastic sheets arranged on the elastic substrate, the elastic sheets enclose a locking opening in the alignment hole, the width of the first end of the locking opening is larger than that of the second end of the locking opening, the width of the second end of the locking opening is smaller than that of the cross section of the alignment column, and in the process that the alignment hole moves relative to the alignment column in the alignment hole, the alignment column sequentially penetrates through the first end of the locking opening and the second end of the locking opening to enter the second end of the alignment hole. The locking structure locks the alignment post at the second end of the alignment hole because the width of the second end of the locking opening is smaller than the width of the cross section of the alignment post, so that the alignment post cannot pass through the second end of the locking opening to return after entering the second end of the alignment hole.
In an optional embodiment, the alignment device further includes an operation knob, the operation knob is threadedly connected to the sliding structures, and in S104, the operation knob on each sliding structure can be operated, and the sliding structure is controlled to slide along the frame body by the operation knob. For example, the operation knob includes an operation handle and a screw rod fixedly connected to the operation handle, the screw rod is in threaded connection with the sliding structure, and the operation handle can be rotated around a second direction (the second direction is opposite to the first direction in S103), so that the operation handle drives the screw rod to rotate, and the screw rod drives the sliding structure to slide along the sliding rail.
As an example, fig. 15 is a position change diagram of alignment columns 011 on the mask plate 01 and alignment holes 0223 on the mask frame 02 in the process of fixing the mask plate 01 and the mask frame 02 according to the embodiment of the present application. Referring to fig. 14 and 15, after S103, the alignment pins 011 are inserted into the first ends (i.e., the ends having the larger opening widths) of the alignment holes 0223. In S104, the operation knob 0221 is rotated around the second direction, so that the operation knob 0221 drives the sliding structure 0222 to slide along the sliding rail G on the frame body 021, thereby driving the alignment hole 0223 on the sliding structure 0222 to move relative to the alignment post 011 in the alignment hole 0223, and finally, moving the alignment post 011 from the first end of the alignment hole 0223 to the second end (i.e., the end with the smaller opening width) of the alignment hole 0223, and locking the alignment post 011 at the second end of the alignment hole 0223. As shown in fig. 15, the alignment columns 011 are clipped at the second end of the alignment holes 0223.
As another example, fig. 16 is a position change diagram of alignment columns 011 on the mask plate 01 and alignment holes 0223 on the mask frame 02 in another process of fixing the mask plate 01 and the mask frame 02 according to the embodiment of the present application. In the example shown in fig. 16, a locking structure 0224 is disposed in the alignment hole 0223, and the locking structure 0224 includes an elastic substrate 02241 and a plurality of elastic sheets 02242 disposed on the elastic substrate 02241, wherein the plurality of elastic sheets 02242 surround a locking opening inside the alignment hole 0223 (refer to fig. 12). Referring to fig. 16, after S103, the alignment rod 011 is inserted into a first end (i.e., an end having a larger opening width) of the alignment hole 0223 and is located between the first end of the alignment hole 0223 and a first end of the locking opening defined by the plurality of resilient sheets 02242. In S104, the operation knob 0221 is rotated around the second direction, so that the operation knob 0221 drives the sliding structure 0222 to slide along the sliding rail G on the frame body 021, thereby driving the alignment holes 0223 on the sliding structure 0222 to move relative to the alignment posts 011 in the alignment holes 0223. During the process of moving the alignment hole 0223 relative to the alignment post 011 in the alignment hole 0223, the alignment post 011 presses the plurality of resilient sheets 02242 and enters the second end of the alignment hole 0223 (i.e., the end with smaller opening width) through the first end of the locking hole surrounded by the resilient sheets 02242 and the second end of the locking hole in sequence. After the alignment post 011 enters the second end of the alignment hole 0223, the elastic sheets 02242 recover to their original shape, so that the width of the second end of the locking opening defined by the elastic sheets 02242 is smaller than the width of the cross section of the alignment post 011, and the locking opening defined by the elastic sheets 02242 locks the alignment post 011 at the second end of the alignment hole 0223.
The above description of S104 is given by way of example that the mask plate and the mask frame are fixed in a manner that the alignment holes lock the alignment posts, and the alignment holes in the above description may be through holes or blind holes. Besides the fixing mode, the mask plate and the mask frame can be fixed by adopting a glue material. In an optional embodiment, the alignment holes are blind holes, before S103, a glue material is injected into the alignment holes, then S103 is executed to insert the alignment posts into the first ends of the alignment holes injected with the glue material, then the sliding structure is controlled to slide along the frame body to drive the alignment holes on the sliding structure to move relative to the alignment posts in the alignment holes, so that the alignment posts move from the first ends of the alignment holes to the second ends of the alignment holes, and finally the glue material in the alignment holes is cured to fix the mask plate and the mask frame through the glue material in the alignment holes. The method for curing the glue material can be high-temperature curing. The height of the alignment column can be smaller than or equal to the depth of the alignment hole (blind hole) or larger than the depth of the alignment hole.
In an example, fig. 17 is a position change diagram of alignment columns 011 on the mask plate 01 and alignment holes 0223 on the mask frame 02 in a process of fixing the mask plate 01 and the mask frame 02 according to another embodiment of the present application. As shown in fig. 17, before the mask plate 01 is set on the mask frame 02, a glue material is first injected into the aligning holes 0223; then, referring to fig. 14 and 17, the mask plate 01 is set on the mask frame 02 such that the alignment posts 011 are inserted into the first ends (i.e., the ends having a larger opening width) of the alignment holes 0223 filled with the paste material; then, rotating the operation knob 0221 in the second direction, so that the operation knob 0221 drives the sliding structure 0222 to slide along the sliding rail G on the frame body 021, thereby driving the alignment hole 0223 on the sliding structure 0222 to move relative to the alignment post 011 in the alignment hole 0223, and moving the alignment post 011 from the first end of the alignment hole 0223 to the second end of the alignment hole 0223 (i.e. the end with the smaller opening width); and finally, curing the glue material in the aligning holes 0223 to fix the mask plate 01 and the mask frame 02 through the glue material.
And fixing the mask plate and the mask frame to obtain a structure, namely the mask assembly. For example, a structure (i.e., a mask assembly) obtained after fixing a mask plate and a mask frame is shown in fig. 1.
To sum up, in the manufacturing method of the mask assembly provided by the embodiment of the present application, when the mask assembly is manufactured, the mask plate is firstly arranged on the mask frame, so that the first alignment structure on the mask plate is aligned with the second alignment structure on the mask frame, and the mask plate and the mask frame are relatively fixed through the first alignment structure and the second alignment structure, and then the mask plate and the mask frame are fixed. Because with the mask plate setting on mask frame after, this mask plate and this mask frame are relatively fixed through first counterpoint structure and second counterpoint structure, consequently, at the in-process of fixed this mask plate and this mask frame, this mask plate and this mask frame can not take place the offset for in the mask assembly that finally makes, the counterpoint precision of mask plate and mask frame is higher, and the precision of the coating by vaporization figure of using this mask assembly to make is higher.
The embodiment of the application also provides a display device, which comprises the evaporation graph prepared by adopting the mask assembly shown in fig. 1. Because the precision of the mask component is higher, the precision of the evaporation pattern prepared by the mask component is higher, and the high-resolution display of the display device can be realized.
By way of example, the display device may be: the display device comprises a display substrate, a display module, a watch, electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator and other products or components with display functions.
The above description is only exemplary of the present application and should not be taken as limiting the present application, and any modifications, equivalents, improvements and the like that are made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. The utility model provides a mask assembly, its characterized in that, mask assembly includes mask plate and mask frame, the mask plate sets up on the mask frame and with mask frame fixed connection, the mask plate includes first counterpoint structure, the mask frame includes second counterpoint structure, first counterpoint structure with second counterpoint structure is different, first counterpoint structure with second counterpoint structure is counterpointed.
2. A mask assembly according to claim 1, wherein the first alignment structure includes alignment posts and the second alignment structure includes alignment holes, the alignment posts being located in the alignment holes.
3. A mask assembly according to claim 2, wherein the registration hole is a long bar-shaped hole, the width of the opening of the first end of the registration hole is greater than the width of the opening of the second end of the registration hole, and the registration post is fixed to the second end of the registration hole.
4. A mask assembly according to claim 3,
the difference value between the width of the opening at the second end of the alignment hole and the width of the cross section of the alignment column is smaller than a preset difference value, so that the alignment column is fixed at the second end of the alignment hole; alternatively, the first and second liquid crystal display panels may be,
a locking structure is arranged in the alignment hole, and the alignment column is fixed at the second end of the alignment hole through the locking structure; alternatively, the first and second electrodes may be,
the alignment column is fixed at the second end of the alignment hole through a glue material.
5. A mask assembly according to claim 4, wherein the locking structure comprises an elastic substrate and a spring plate arranged on the elastic substrate, and the spring plate is located between the first end of the alignment hole and the second end of the alignment hole.
6. A mask assembly according to claim 2,
the mask frame comprises a frame body and a sliding structure, the sliding structure can slide along the frame body, and the alignment holes are located in the sliding structure.
7. A mask assembly according to any one of claims 1 to 6, wherein the mask plate comprises a plurality of first alignment structures, the mask frame comprises a plurality of second alignment structures, and the plurality of first alignment structures are aligned with the plurality of second alignment structures in a one-to-one correspondence.
8. A method of manufacturing a mask assembly, the method comprising:
forming a mask plate and a mask frame, wherein the mask plate comprises a first alignment structure, the mask frame comprises a second alignment structure, and the first alignment structure is different from the second alignment structure;
arranging the mask plate on the mask frame to enable the first aligning structure to be aligned with the second aligning structure, and fixing the mask plate and the mask frame relatively through the first aligning structure and the second aligning structure;
and fixing the mask plate and the mask frame.
9. The method of claim 8, wherein the first alignment structure comprises alignment posts and the second alignment structure comprises alignment holes, and wherein disposing the mask plate on the mask frame such that the first alignment structure is aligned with the second alignment structure and the mask plate and the mask frame are fixed relative to each other by the first alignment structure and the second alignment structure comprises:
and arranging the mask plate on the mask frame, and inserting the alignment columns into the alignment holes.
10. A display device, characterized in that the display device comprises an evaporation pattern prepared by using the mask assembly of any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211063893.5A CN115386831A (en) | 2022-09-01 | 2022-09-01 | Mask assembly, manufacturing method thereof and display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211063893.5A CN115386831A (en) | 2022-09-01 | 2022-09-01 | Mask assembly, manufacturing method thereof and display device |
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| Publication Number | Publication Date |
|---|---|
| CN115386831A true CN115386831A (en) | 2022-11-25 |
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| CN202211063893.5A Pending CN115386831A (en) | 2022-09-01 | 2022-09-01 | Mask assembly, manufacturing method thereof and display device |
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|---|---|---|---|---|
| JP2001318473A (en) * | 2000-05-09 | 2001-11-16 | Howa Mach Ltd | Positioning structure for mask film |
| JP2002210916A (en) * | 2001-01-12 | 2002-07-31 | Tokai Shoji Kk | Metal mask plate for screen printing |
| JP2007217767A (en) * | 2006-02-17 | 2007-08-30 | Sumitomo Heavy Ind Ltd | Substrate holder and method for treating substrate holder |
| CN211556188U (en) * | 2020-03-23 | 2020-09-22 | 深圳市金丰盛电子有限公司 | Self-locking structure of annular terminal and terminal wire |
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2022
- 2022-09-01 CN CN202211063893.5A patent/CN115386831A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001318473A (en) * | 2000-05-09 | 2001-11-16 | Howa Mach Ltd | Positioning structure for mask film |
| JP2002210916A (en) * | 2001-01-12 | 2002-07-31 | Tokai Shoji Kk | Metal mask plate for screen printing |
| JP2007217767A (en) * | 2006-02-17 | 2007-08-30 | Sumitomo Heavy Ind Ltd | Substrate holder and method for treating substrate holder |
| CN211556188U (en) * | 2020-03-23 | 2020-09-22 | 深圳市金丰盛电子有限公司 | Self-locking structure of annular terminal and terminal wire |
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