CN115365680A - Laser precision adjusting device - Google Patents

Abstract

The invention relates to a laser precision adjusting device, comprising: the output end of the first power source is used for providing driving force moving along a first direction; the linkage module is connected with the output end of the first power source, is provided with a plurality of connecting parts, and drives the connecting parts to move at equal intervals along a first direction through the first power source; a plurality of supporting plates, one supporting plate is correspondingly connected to a connecting part; the laser module comprises a plurality of mirror modules, a plurality of laser modules and a plurality of vibration mirrors, wherein one mirror module is arranged on a supporting plate and comprises a reflector group and a vibration mirror, the reflector group is used for receiving and reflecting laser emitted by the laser module, and the vibration mirror is used for receiving reflected light from the reflector group and performing precision compensation; a plurality of connecting portion equidistance in the first direction removes, realizes multichannel laser equidistance and adjusts, and the high accuracy compensation in the mirror that shakes after the reflection of laser process speculum group for the product yield is higher, the productivity is higher, and the structure is comparatively simple, and is simple and convenient easy to operate, and the maintenance cost is low, the debugging is convenient, long-term operation stability is higher.

Description

Laser precision adjusting device

Technical Field

The invention relates to the technical field of laser cutting, in particular to a laser precision adjusting device.

Background

The laser cutting is widely applied by the advantages of non-contact property, high processing speed, excellent quality and the like, and particularly, the laser module for carrying out mass cutting by multi-path laser scribing is gradually applied to the cutting industry of large and small breadth due to the advantages of high speed and high efficiency cutting, strong applicability and the like.

At present, in order to ensure the precision requirement of multi-path laser scribing, an adjusting device is usually designed to be matched with a laser module for use, but the existing adjusting device is difficult to achieve the required laser scribing precision, so that the product yield is low, the productivity is low, the structure of the adjusting device is complex, the debugging and the calibration of the laser precision are troublesome, the technical requirement on maintenance personnel is high, and the problems of high maintenance cost, inconvenience in debugging, poor long-term operation stability and the like are caused.

Disclosure of Invention

Therefore, it is necessary to provide a laser precision adjusting device for solving the problems that the structure of the adjusting device is complicated and the required multi-path laser scribing precision is difficult to achieve.

The invention provides a laser precision adjusting device, which is matched with a laser module for use and comprises:

the output end of the first power source is used for providing driving force moving along a first direction;

the linkage module is connected with the output end of the first power source, is provided with a plurality of connecting parts and drives the connecting parts to move at equal intervals along the first direction through the first power source;

the supporting plates are correspondingly connected to the connecting parts;

the laser module comprises a plurality of mirror modules, wherein one mirror module is arranged on one supporting plate and comprises a reflector group and a vibrating mirror, the reflector group is used for receiving and reflecting laser emitted by the laser module, and the vibrating mirror is used for receiving reflected light from the reflector group and performing precision compensation.

When the laser precision adjusting device is used, the output end of the first power source drives the linkage module to move along the first direction, the connecting parts of the linkage module move equidistantly in the first direction to drive the supporting plate, the mirror module moves equidistantly in the first direction along with the supporting plate, equidistant adjustment of multi-path laser on the first direction after the mirror module performs laser action on the laser module is realized, meanwhile, the laser emitted by the laser module is reflected by the reflector group and then input to the vibrating mirror, and high-precision compensation is performed in the vibrating mirror, so that accurate positioning can be performed on the multi-path laser, the laser scribing adjusting precision is improved, the product yield is higher, the productivity is higher, the structure of the laser precision adjusting device is simpler, debugging and laser precision calibration are simpler and easier to operate, the technical requirements on maintenance personnel are lower, the maintenance cost is low, the debugging is convenient, and the long-term operation stability is higher.

In one embodiment, the linkage module is a hinge linkage structure having a plurality of linkage assemblies extending and retracting along the first direction, and the connecting portion is located between two adjacent linkage assemblies.

In one embodiment, the linkage module comprises a plurality of first plate bodies and a plurality of second plate bodies which are arranged in parallel and at intervals, wherein:

the middle areas of the second plate body and the first plate body are arranged oppositely and are connected in a rotating mode to form the connecting part;

the end parts of the second plate body and the first plate body are rotatably connected, the adjacent two second plate bodies and the adjacent two first plate bodies enclose the linkage assembly, and the second plate body and the first plate body which are positioned at one end are connected with the output end of the first power source.

In one embodiment, the linkage module further comprises a plurality of threaded connectors for locking the first plate body, the second plate body and the support plate, the threaded connectors are provided with a threaded section and an optical axis section along the axis of the threaded connectors, the optical axis section is rotatably accommodated in the middle area of the first plate body, and the threaded section is in threaded connection with the middle areas of the support plate and the second plate body respectively.

In one embodiment, the linkage module further comprises a plurality of spacer rings, and the spacer rings are arranged between the middle area of the second plate body and the middle area of the first plate body and sleeved on the threaded connectors.

In one embodiment, the ends of the second plate and the first plate are rotatably coupled by a bearing or a pin.

In one embodiment, the linkage module further comprises two third plate bodies, the length of each third plate body is half of that of the second plate body, one end part of each third plate body is rotatably connected with the output end of the first power source, and the other end part of each third plate body is rotatably connected with the end parts of the second plate body and the first plate body respectively.

In one embodiment, the laser precision adjusting device further comprises a bottom plate and a plurality of slide rails, the slide rails are divided into two groups and arranged on two sides of the linkage module, the slide rails are mounted on the bottom plate, the extending directions of the slide rails and the bottom plate are parallel to the first direction, a slide block protrudes from one side, away from the mirror module, of the supporting plate, and the slide block is in sliding fit with the slide rails.

In one embodiment, the reflector set includes a first reflector and a second reflector mounted at two ends of the support plate along the extending direction thereof, wherein:

the first reflecting mirrors are used for receiving laser from the laser module, and the first reflecting mirrors are arranged in a staggered mode in the extending direction of the supporting plate;

the second reflector is arranged close to the vibrating mirror and used for receiving the light reflected by the first reflector and inputting reflected light to the vibrating mirror.

In one embodiment, the mirror module further includes a second power source, a fixed end of the second power source is mounted on the support plate, an output end of the second power source is used for providing a driving force for moving in a vertical direction, and the vibrating mirror and the second reflecting mirror are mounted on the output end of the second power source.

Drawings

FIG. 1 is a schematic structural diagram of a module formed by a laser precision adjusting device and two laser modules according to an embodiment of the present invention;

FIG. 2 is a top view of a laser precision adjustment apparatus according to an embodiment of the present invention;

FIG. 3 is a front view of a laser precision adjustment apparatus according to an embodiment of the present invention;

FIG. 4 is a bottom view of the laser precision adjustment apparatus after removing the base plate according to an embodiment of the present invention;

fig. 5 is a top view of a linkage module in the laser precision adjusting apparatus according to an embodiment of the invention.

Reference numerals:

10. a laser precision adjusting device; x, a first direction; y, a second direction; z, vertical direction;

100. a first power source; 110. a linear module; 120. transplanting the module;

200. a linkage module; 210. a connecting portion; 220. a linkage assembly; 230. a first plate body; 240. a second plate body; 250. a threaded coupling; 260. a spacer ring; 270. a bearing; 280. a pin; 290. a third plate body;

300. a support plate; 310. a slider;

400. a mirror module; 410. a reflector group; 411. a first reflector; 412. a second reflector; 420. a galvanometer; 430. a frame;

500. a base plate;

600. a slide rail;

700. a second power source;

20. and a laser module.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

The technical scheme provided by the embodiment of the invention is described in the following with reference to the accompanying drawings.

As shown in fig. 1, 2 and 3, the present invention provides a laser precision adjusting device 10 for realizing precision adjustment of multi-path laser scribing. The laser precision adjusting device 10 is matched with the laser module 20 for use, and is suitable for high-precision processing of large-scale and small-scale glass etching. The laser precision adjusting apparatus 10 includes a first power source 100, a linkage module 200, a plurality of support plates 300, and a plurality of mirror modules 400, wherein:

the output end of the first power source 100 is used for providing a driving force for moving along the first direction X, when the first power source 100 is specifically arranged, the first power source 100 can be directly the linear module 110, the first power source 100 can also be a matching form of the linear module 110 and the transplanting module 120, and the transplanting module 120 is arranged so as to facilitate connection between the first power source 100 and the linkage module 200 and ensure high-precision and stable movement of the linkage module 200, of course, the structural form of the first power source 100 is not limited to this, and can also be other forms capable of meeting the requirements.

The linkage module 200 is connected to the output end of the first power source 100 in a threaded connection, a concave-convex fit, or a snap connection. The linkage module 200 has a plurality of connecting portions 210, and the connecting portions 210 are driven by the first power source 100 to move at equal intervals along the first direction X, and when the linkage module is specifically configured, the number of the connecting portions 210 may be two, three, four, five, or more than five, and the connecting portions 210 have the same structure, so as to ensure that the connecting portions 210 move at equal intervals.

The number of the supporting plates 300 can be two, three, four, five or more than five, the number of the supporting plates 300 is adapted to the number of the connecting parts 210, one connecting part 210 corresponds to one supporting plate 300, one supporting plate 300 is correspondingly connected to one connecting part 210, and the connecting modes of the two can be threaded connection, concave-convex fit, buckle connection and the like; in a specific arrangement, the plurality of support plates 300 are arranged at intervals along the first direction X, and the thickness direction of each support plate 300 is a vertical direction Z perpendicular to the first direction X and the second direction Y.

The number of the mirror modules 400 can be two, three, four, five or more than five, the number of the mirror modules 400 is adapted to the number of the support plates 300, one support plate 300 corresponds to one mirror module 400, one mirror module 400 is installed on one support plate 300, and the connection mode of the two can be threaded connection, concave-convex fit, buckle connection and the like; the mirror module 400 includes a mirror group 410 and a vibrating mirror 420, the mirror group 410 is used for receiving the laser emitted by the laser module 20 and reflecting the received laser for multiple times, and the vibrating mirror 420 is used for receiving the reflected light from the mirror group 410 and performing precision compensation on the received reflected light.

When the laser precision adjusting device 10 is used, the output end of the first power source 100 drives the linkage module 200 to move along the first direction X, the connecting portions 210 of the linkage module 200 move equidistantly in the first direction X to drive the support plate 300 and the mirror module 400 to move equidistantly in the first direction X, so that equidistant adjustment of the multi-path laser on the first direction X after the laser action of the laser module 20 is performed by the mirror module 400, meanwhile, the laser emitted by the laser module 20 is reflected by the reflector set 410 and then input to the vibrating mirror 420, and high-precision compensation is performed in the vibrating mirror 420, so that the multi-path laser can be accurately positioned, the laser scribing adjustment precision is improved, the product yield is high, the productivity is high, the structure of the laser precision adjusting device 10 is simple, the debugging and the calibration of the laser precision are easy to operate, the technical requirements on maintenance personnel are low, the maintenance cost is low, the debugging is convenient, and the long-term operation stability is high.

The linkage module 200 has various structures, in a preferred embodiment, the linkage module 200 is a hinge linkage structure and has a plurality of linkage assemblies 220, the linkage assemblies 220 extend and retract along the first direction X, and the connecting portion 210 is located between two adjacent linkage assemblies 220, when the linkage module is specifically configured, the number of the linkage assemblies 220 and the connecting portion 210 may be two, three, four, five or more, and the linkage assemblies 220 have the same structure, so as to ensure that the linkage assemblies 220 and the connecting portion 210 move at equal intervals.

When the laser precision adjusting device 10 is used, the output end of the first power source 100 drives the linkage module 200 to move along the first direction X, the plurality of linkage assemblies 220 of the linkage module 200 extend or contract equidistantly in the first direction X, and the plurality of connecting portions 210 thereon move equidistantly in the first direction X to drive the support plate 300 and the mirror module 400 to move equidistantly in the first direction X, so that equidistant adjustment of the plurality of paths of laser beams after the laser action of the mirror module 400 on the laser module 20 is realized. Of course, the structure of the linkage module 200 is not limited to this, and other structural forms that can meet the requirement may also be adopted, for example, similar to an equidistant screw rod screw module.

When the linkage module 200 is a hinge linkage structure, in a preferred embodiment, as shown in fig. 4 and 5, the linkage module 200 includes a plurality of first plates 230 and a plurality of second plates 240, the plurality of first plates 230 are disposed in parallel and at intervals along one direction, and the plurality of second plates 240 are disposed in parallel and at intervals along another direction, wherein:

the middle areas of the second plate 240 and the first plate 230 are opposite to each other, the middle areas of the second plate 240 and the first plate 230 are rotatably connected, and the middle areas of the second plate 240 and the first plate 230 are connected to form the connecting portion 210.

The second plate 240 is rotatably connected to the end of the first plate 230, two adjacent second plates 240 and two adjacent first plates 230 enclose a linkage assembly 220, and the second plate 240 and the first plate 230 at one end of the linkage module 200 are connected to an output end of the first power source 100. In a specific arrangement, the length of the first plate 230 is the same as that of the second plate 240, so that the linkage assembly 220 is shaped like a parallelogram, the structure is simplified, and the equidistant movement of the plurality of connection parts 210 is facilitated.

When the laser precision adjusting device 10 is used, the output end of the first power source 100 applies force to the second plate 240 and the first plate 230 at one end of the linkage module 200 to drive the second plate 240 and the first plate 230 at one end of the linkage module 200 to move and relatively rotate, and the power is transmitted in the linkage module 200, so that all the remaining second plates 240 and first plates 230 move and relatively rotate, and the plurality of linkage assemblies 220 are extended or contracted at equal intervals in the first direction X. The linkage module 200 has a simple structure, and the movement adjustment in the first direction X can be conveniently realized through the linkage module 200.

As shown in fig. 5, specifically, the linkage module 200 further includes a plurality of threaded couplers 250, the number of the threaded couplers 250 may be two, three, four, five, or more than five, the number of the threaded couplers 250 is adapted to the number of the connection portions 210, and one connection portion 210 corresponds to one threaded coupler 250. The screw coupling 250 is used to lock the first plate 230, the second plate 240 and the support plate 300 together, and the screw coupling 250 has a screw section and an optical axis section along the axis thereof, the optical axis section is rotatably received in the middle region of the first plate 230 and the second plate 240, so that the friction of the linkage module 200 between the contraction and the extension is reduced, and the screw section is fixedly connected with the support plate 300.

When specifically setting up, first plate 230 offers the first through-hole that runs through its thickness, second plate 240 offers the second through-hole that runs through its thickness, backup pad 300 offers the first screw hole that runs through its thickness, threaded connection 250 can be the bolt, the bolt runs through first through-hole, behind the second through-hole, its optical axis section is located first through-hole, in the second through-hole, its nut compresses tightly first plate 230 and second plate 240 together, its screw thread section passes first through-hole and second through-hole, and stretch into the first screw hole and the threaded connection of backup pad 300.

Of course, the threaded coupling 250 is not limited to this, and may be a nut + a stud, or other structural forms that can meet the requirements.

When the laser precision adjusting apparatus 10 is used, when the first plate 230 is stressed, the first plate 230 rotates relative to the second plate 240 by using the optical axis section as a rotation axis, and the projection length of the first plate 230 in the first direction X changes to drive the second plate 240 and the support plate 300 to move in the first direction X, so that the plurality of linkage assemblies 220 extend or retract in the first direction X at equal intervals.

As shown in fig. 5, more specifically, the linkage module 200 further includes a plurality of spacers 260, the number of the spacers 260 may be two, three, four, five or more, the number of the spacers 260 is adapted to the number of the support plates 300, and one support plate 300 corresponds to one spacer 260. Spacer ring 260 is disposed between the intermediate region of second plate body 240 and the intermediate region of first plate body 230, and spacer ring 260 is fitted over threaded coupling 250. When the laser precision adjusting apparatus 10 is used, the spacer ring 260 separates the middle region of the second plate 240 from the middle region of the first plate 230, so as to reduce the contact area between the middle region of the second plate 240 and the middle region of the first plate 230, reduce the friction between the middle region of the second plate 240 and the middle region of the first plate 230 during relative rotation, and ensure high stability in long-term operation.

As shown in fig. 5, specifically, the end of the second plate 240 and the end of the first plate 230 are rotatably connected through a bearing 270 or a pin 280, so as to facilitate the rotatable connection between the end of the second plate 240 and the end of the first plate 230, and reduce friction between the end of the second plate 240 and the end of the first plate 230 during relative rotation, thereby ensuring high stability in long-term operation.

As shown in fig. 5, specifically, the linkage module 200 further includes two third plates 290, the length of the third plates 290 is half of the length of the second plate 240, one end portions of the two third plates 290 are rotatably connected and fixedly connected to the output end of the first power source 100 after being connected, and the other end portions of the two third plates 290 are rotatably connected to the end portions of the second plate 240 and the first plate 230 through a bearing 270 or a pin 280, respectively. When specifically setting up, a terminal of two third plate 290, the connection mode between the output ends of first power source 100 may be the same as that of above-mentioned threaded connection 250, or after two third plate 290 rotate to connect, the output end of first power source 100 is connected with one third plate 290 through modes such as snap connection, concave-convex fit, etc., through setting up above-mentioned two third plate 290, can realize the connection between linkage module 200 and the output end of first power source 100 comparatively conveniently, of course, in order to ensure the symmetry of linkage module 200 structure and the stability of motion, two third plate 290 may also be provided at both ends of linkage module 200 along first direction X.

As shown in fig. 1, fig. 2, fig. 3 and fig. 4, in order to improve the accuracy of the movement along the first direction X, in a preferred embodiment, the laser precision adjusting apparatus 10 further includes a bottom plate 500 and a plurality of slide rails 600, and the number of the slide rails 600 is a plurality, for example, 2, 4 or 6. A plurality of slide rails 600 equally divide into two sets of settings in the both sides of linkage module 200, slide rail 600 passes through threaded connection, unsmooth cooperation, modes such as buckle connection are installed in bottom plate 500, and slide rail 600 all is on a parallel with first direction X with bottom plate 500's extending direction, one side protrusion that backup pad 300 deviates from mirror module 400 has slider 310, slider 310 and slide rail 600 sliding fit, when specifically setting up, the figure of slide rail 600 can be one, two, three, four or more than four, slider 310 suits with the figure of slide rail 600, slider 310 and backup pad 300 can integrated into one piece, slider 310 and backup pad 300 can also assemble as an organic whole after the components of a whole that can function independently preparation.

When the laser precision adjusting device 10 is used, the output end of the first power source 100 drives the linkage module 200 to move, the plurality of connecting portions 210 move equidistantly in the first direction X, and the sliding block 310 on the supporting plate 300 slides under the guidance of the sliding rail 600 during the moving process, so as to ensure the linearity, accuracy and stability of the movement of the supporting plate 300 and the mirror module 400 in the first direction X. When the laser precision adjusting device is specifically arranged, the first power source 100 can be arranged on the bottom plate 500, so that the whole laser precision adjusting device 10 can move, after the supporting plate 300 and the mirror module 400 move along the first direction X for a set distance, the position of the sliding block 310 and the sliding rail 600 is fixed by the clamp on the sliding rail 600, and the situation that the precision is affected by the error caused by the laser shaking is reduced. When specifically setting up, the position of slide rail 600 and slider 310 can be exchanged, and two sets of slide rails 600 are the symmetrical setting of relative linkage module 200 to ensure that the whole atress of backup pad 300 is even, improve the reliability of backup pad 300 motion, ensure that long-term operation stability is higher.

As shown in fig. 1, 2 and 3, the reflecting mirror assembly 410 has various structural forms, in a preferred embodiment, the reflecting mirror assembly 410 includes a first reflecting mirror 411 and a second reflecting mirror 412, the first reflecting mirror 411 and the second reflecting mirror 412 are respectively mounted on two ends of the supporting plate 300 along the extending direction thereof through a mirror frame 430, wherein:

the first reflector 411 is used for receiving the laser light from the laser module 20, and the laser light is reflected on the first reflector 411 to be transmitted to the second reflector 412. The plurality of first reflecting mirrors 411 are disposed to be shifted in the extending direction of the support plate 300 so that the plurality of first reflecting mirrors 411 can receive the laser light from the laser module 20.

The second reflecting mirror 412 is disposed close to the vibrating mirror 420, and the second reflecting mirror 412 is used for receiving the light reflected by the first reflecting mirror 411, and the light is reflected by the second reflecting mirror 412 and then is input to the vibrating mirror 420.

When the laser precision adjusting device 10 is used, after rough adjustment of equidistant movement in the first direction X is completed, laser emitted by the laser module 20 is reflected by the first reflecting mirror 411 and then input to the second reflecting mirror 412, and is reflected by the second reflecting mirror 412 and then transmitted to the vibrating mirror 420, and reflected light is precisely positioned and compensated in the vibrating mirror 420, so that multi-path laser scribing can be precisely positioned, and the laser scribing adjusting precision is improved. In specific arrangement, one laser precision adjusting device 10 may correspond to one laser module 20, or may correspond to a plurality of laser modules 20, the arrangement position of the mirror group 410 is adaptively adjusted according to the position of the laser module 20, and the structure of the mirror group 410 is not limited thereto, and may be in other forms that can meet the requirements.

As shown in fig. 1 and 2, the mirror module 400 further includes a second power source 700, a fixed end of the second power source 700 is mounted on the support plate 300 by means of screw connection, concave-convex fit, snap connection, etc., an output end of the second power source 700 is used for providing a driving force for moving along the vertical direction Z, and the vibrating mirror 420 and the second reflecting mirror 412 are mounted on the output end of the second power source 700 by means of screw connection, concave-convex fit, snap connection, etc. In a specific arrangement, the second power source 700 may be directly the linear module 110, and the second power source 700 may also be in other forms capable of meeting the requirements.

When the laser precision adjusting device 10 is used, the second power source 700 acts to drive the vibrating mirror 420 and the second reflecting mirror 412 to move up and down along the vertical direction Z, so as to adjust the focus, realize automatic focusing, and realize high-precision positioning of multi-path laser scribing.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. The utility model provides a laser precision adjusting device, uses with the laser module cooperation, its characterized in that includes:

the output end of the first power source is used for providing driving force moving along a first direction;

the linkage module is connected with the output end of the first power source, is provided with a plurality of connecting parts and drives the connecting parts to move at equal intervals along the first direction through the first power source;

the supporting plates are correspondingly connected to the connecting parts;

the laser module comprises a plurality of mirror modules, wherein the mirror modules are arranged on the supporting plate and comprise a reflector group and a vibrating mirror, the reflector group is used for receiving and reflecting laser emitted by the laser module, and the vibrating mirror is used for receiving reflected light from the reflector group and performing precision compensation.

2. The laser precision adjusting apparatus according to claim 1, wherein the linkage module is a hinge linkage structure having a plurality of linkage assemblies extending and contracting in the first direction, and the connecting portion is located between two adjacent linkage assemblies.

3. The laser precision adjusting device according to claim 2, wherein the linkage module comprises a plurality of first plates and a plurality of second plates arranged in parallel and at intervals, wherein:

the middle areas of the second plate body and the first plate body are arranged oppositely and are connected in a rotating mode to form the connecting part;

the end parts of the second plate body and the first plate body are rotatably connected, the adjacent two second plate bodies and the adjacent two first plate bodies enclose the linkage assembly, and the second plate body and the first plate body which are positioned at one end are connected with the output end of the first power source.

4. The laser precision adjusting apparatus according to claim 3, wherein the linkage module further comprises a plurality of threaded connectors for locking the first plate, the second plate and the support plate, the threaded connectors having a threaded section and an optical axis section along an axis thereof, the optical axis section being rotatably received in a middle region of the first plate, the threaded section being in threaded connection with middle regions of the support plate and the second plate, respectively.

5. The laser precision adjusting apparatus according to claim 4, wherein the linkage module further comprises a plurality of spacer rings, the spacer rings are disposed between the middle region of the second plate body and the middle region of the first plate body, and are sleeved on the threaded connection member.

6. The laser precision adjusting apparatus according to claim 3, wherein the ends of the second plate and the first plate are rotatably connected by a bearing or a pin.

7. The laser precision adjusting device according to claim 3, wherein the linkage module further comprises two third plate bodies, the length of each third plate body is half of the length of the second plate body, one end portions of the two third plate bodies are rotatably connected and fixedly connected with the output end of the first power source, and the other end portions of the two third plate bodies are rotatably connected with the end portions of the second plate body and the first plate body respectively.

8. The laser precision adjusting device according to claim 1, further comprising a bottom plate and a plurality of slide rails, wherein the slide rails are divided into two groups and disposed on two sides of the linkage module, the slide rails are mounted on the bottom plate, the extending directions of the slide rails and the bottom plate are both parallel to the first direction, a slide block protrudes from one side of the support plate facing away from the mirror module, and the slide block is in sliding fit with the slide rails.

9. The laser accuracy adjusting apparatus according to claim 1, wherein the mirror group includes a first mirror and a second mirror that are mounted at both ends of the support plate in an extending direction thereof, wherein:

the first reflecting mirrors are used for receiving laser from the laser module, and the first reflecting mirrors are arranged in a staggered mode in the extending direction of the supporting plate;

the second reflector is arranged close to the vibrating mirror and used for receiving the light reflected by the first reflector and inputting reflected light to the vibrating mirror.

10. The laser precision adjusting apparatus of claim 9, wherein the mirror module further comprises a second power source, a fixed end of the second power source is mounted on the supporting plate, an output end of the second power source is used for providing a driving force for moving in a vertical direction, and the vibrating mirror and the second mirror are mounted on an output end of the second power source.

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