CN115365208B - High-pressure ultrapure water spray device - Google Patents
High-pressure ultrapure water spray device Download PDFInfo
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- CN115365208B CN115365208B CN202211008400.8A CN202211008400A CN115365208B CN 115365208 B CN115365208 B CN 115365208B CN 202211008400 A CN202211008400 A CN 202211008400A CN 115365208 B CN115365208 B CN 115365208B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to a high-pressure ultrapure water spraying device, which comprises: the supporting mechanism is fixed on the ground; the motion mechanism comprises a sliding mechanism and a rotating mechanism, the sliding mechanism is arranged on the supporting mechanism, and the rotating mechanism is fixed on the sliding mechanism; the spraying mechanism is fixed on the ground and comprises a high-pressure pump, a filter and a spraying rod which are sequentially connected, and the spraying rod is arranged along the Z direction and penetrates through the rotating mechanism and the sliding mechanism. According to the high-pressure ultrapure water spraying device, the spraying rod is fixed, the load is cleaned in a load movement mode, the up-and-down and rotation movement of the load is realized through the sliding mechanism and the rotating mechanism, the length of an ultrapure water pipeline is effectively shortened, and therefore the water pressure loss is reduced; and the structure is compact.
Description
Technical Field
The invention relates to the technical field of metal cavity inner surface cleaning treatment devices, in particular to a high-pressure ultrapure water spraying device.
Background
At present, the high-pressure ultrapure water spraying device with the superconducting high-frequency niobium cavity mainly comprises two types, wherein one type of the high-pressure ultrapure water spraying device adopts a mode that a cavity is fixed and a spraying rod moves up and down, and has the following problems: 1) Because the spray rod is connected with the waterway high-pressure stainless steel hose and moves in unison, the movement of the spray rod can drive the stainless steel hose to move, so that a longer hose is required to compensate the movement displacement, the large water pressure drop is caused, and the intractable particle attachments on the inner surface of the load cannot be effectively cleaned; 2) The variation of shape, bending degree and the like during the movement of the hose can lead to poor hydraulic stability; 3) In the movement process of the spray rod, the fluororubber O ring used for sealing between the spray rod and the water tank is easy to wear, so that water leakage is caused, and the spray rod and the water tank need to be replaced frequently.
In addition, the spray rod is adopted to fix, the cavity is rotated and moves up and down, the cavity is suspended on the supporting upright post by adopting a cantilever, the gravity force arm of the cavity and the suspension arm is larger, obvious coaxiality deviation between the cavity and the spray rod is easily caused, the influence degree is reduced by being matched with a supporting mechanism with larger rigidity and a corresponding counterweight and adjusting mechanism, the whole mechanism and the installation space are required to be larger, the space is easily limited, and the compact space installation operation is not facilitated.
Disclosure of Invention
The invention aims to provide a high-pressure ultrapure water spray device, which realizes small water pressure loss and installation in a small space.
The invention provides a high-pressure ultrapure water spraying device, which comprises:
the supporting mechanism is fixed on the ground;
the motion mechanism comprises a sliding mechanism and a rotating mechanism, the sliding mechanism is arranged on the supporting mechanism, and the rotating mechanism is fixed on the sliding mechanism;
the spraying mechanism is fixed on the ground and comprises a high-pressure water pump, a filter and a spraying rod which are sequentially connected, and the spraying rod is arranged along the Z direction and penetrates through the rotating mechanism and the sliding mechanism.
Further, the supporting mechanism comprises a supporting frame, the supporting frame comprises a supporting base fixed on the ground, two vertical beams which are arranged at intervals and extend along the Z direction are arranged on the supporting base, and a plurality of cross beams which are arranged at intervals and extend along the Y direction are connected between the two vertical beams.
Further, a first supporting rod and a second supporting rod are respectively arranged on the two vertical beams, two ends of the first supporting rod are respectively connected with the vertical beams and the supporting base, and two ends of the second supporting rod are respectively connected with the vertical beams and the ground.
Further, the sliding mechanism comprises a sliding frame, a plurality of sliding blocks are arranged on the sliding frame, and guide rails matched with the sliding blocks are respectively arranged on the two vertical beams.
Further, the sliding mechanism further comprises a screw rod, a nut and a first driving motor, two ends of the screw rod are respectively installed on the supporting base and the uppermost cross beam, the nut is installed on the screw rod, the first driving motor is connected with the screw rod, and the sliding frame is fixedly connected with the nut.
Further, the sliding frame comprises a back plate arranged along the Y direction, lifting arms extending along the X direction are respectively arranged at two ends of the back plate along the Y direction, the sliding block is arranged on the back plate, and the nut is fixedly connected with the back plate.
Further, the rotary mechanism comprises a second driving motor, a first belt pulley and a second belt pulley, the second driving motor is fixed on the back plate, the first belt pulley is connected with a driving shaft of the second driving motor, the second belt pulley is linked with the first belt pulley through a belt, the second belt pulley is connected with a rotary disc through a bearing, and a load supporting disc is fixed on the rotary disc.
Further, the bearing comprises a bearing inner ring, a bearing outer ring and balls clamped between the bearing inner ring and the bearing outer ring, a step is arranged on the rotating disc and is in interference fit with the upper end of the bearing inner ring, and the lower end of the bearing inner ring is matched with the second belt pulley and is fastened through a clamping ring.
Further, a lifting square disk is sleeved outside the bearing outer ring, and is positioned below the rotating disk and is provided with a gap with the rotating disk.
Further, a rotary encoder is arranged on the belt, and a rotary wheel of the rotary encoder is meshed with the second belt pulley.
Further, the belt jacket is provided with an outer cover.
Further, the two lifting arms are provided with load translation mechanisms, each load translation mechanism comprises a sliding arm and a sliding rail, each sliding rail is arranged on each lifting arm along the X direction, each sliding arm is arranged on each sliding rail, and each load support disc is detachably connected with each sliding arm.
Further, a locking screw is arranged on the sliding arm, and the locking screw is in separable contact with the sliding rail.
Further, the top end of the spray rod is provided with a spray header, and the spray header is provided with a plurality of spray holes along the circumferential direction.
Further, a supporting pipe is arranged at the bottom of the spray rod, a drain pan is sleeved outside the supporting pipe, the drain pan is fixed on the ground, a sealing ring is arranged at the joint of the drain pan and the supporting pipe, and a water outlet is arranged on the drain pan.
Further, the novel water blocking device comprises a water blocking cover, wherein the water blocking cover comprises a cover body and a supporting disc, the supporting disc is located below the load supporting disc and fixed on two lifting arms, the bottom end of the cover body is connected with the supporting disc in an inserting mode, and the load supporting disc and the spraying rod are shielded by the cover body.
Further, the cover body and the supporting disc are formed by splicing two symmetrical halves.
Further, a water outlet is arranged on the supporting disc.
Further, the device also comprises a control device, wherein the control device is electrically or communicatively connected with the high-pressure water pump, the first driving motor, the second driving motor and the rotary encoder.
Further, the control device comprises a touch display screen, and an emergency stop button is arranged on the touch display screen.
Further, a displacement sensor, an upper limit switch and a lower limit switch which are electrically or communicatively connected with the control device are arranged on the vertical beam.
According to the high-pressure ultrapure water spraying device, the spraying rod is fixed, the load is cleaned in a load movement mode, the up-and-down and rotation movement of the load is realized through the sliding mechanism and the rotating mechanism, the length of an ultrapure water pipeline is effectively shortened, and therefore the water pressure loss is reduced; and the structure is compact.
Drawings
FIG. 1A is a schematic view showing a structure of a high-pressure ultrapure water spray device according to an embodiment of the present invention;
FIG. 1B is a side view of FIG. 1A;
FIG. 2A is a schematic view of a support mechanism according to an embodiment of the present invention;
FIG. 2B is a side view of FIG. 2A;
fig. 3A is a schematic structural view of a sliding mechanism according to an embodiment of the present invention;
FIG. 3B is a front view of FIG. 3A;
FIG. 3C is a right side view of FIG. 3A;
FIG. 4A is a schematic diagram of a rotary mechanism according to an embodiment of the present invention;
FIG. 4B is a cross-sectional view of FIG. 4A;
FIG. 4C is an enlarged schematic view of the left side of FIG. 4B;
FIG. 5A is a schematic diagram of a load translation mechanism according to an embodiment of the present invention;
FIG. 5B is a top view of FIG. 5A;
fig. 6 is a schematic structural view of a shower mechanism according to an embodiment of the present invention;
fig. 7A is a schematic structural view of a water shield according to an embodiment of the present invention;
FIG. 7B is a top view of FIG. 7A;
fig. 8 is a schematic structural view of a control box according to an embodiment of the present invention.
Detailed Description
Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1A and fig. 1B, the embodiment of the invention provides a high-pressure ultra-pure water (water resistivity > 18mΩ·cm) spraying device, which is used for cleaning superconducting high-frequency cavities and other devices in an ultra-clean room, and comprises a supporting mechanism 1, a moving mechanism 2 and a spraying mechanism 3, wherein the supporting mechanism 1 comprises a supporting frame 11, the supporting frame 11 comprises a supporting base 111 fixed on the ground, two vertical beams 112 which are arranged on the supporting base 111 at intervals and extend along the Z direction, and a plurality of cross beams 113 which are arranged between the two vertical beams 112 at intervals and extend along the Y direction are connected, so that a frame structure is formed; the two vertical beams 112 are respectively provided with a first supporting rod 12 and a second supporting rod 13, two ends of the first supporting rod 12 are respectively connected with the vertical beams 112 and the supporting base 111, and two ends of the second supporting rod 13 are respectively connected with the vertical beams 112 and the ground, so that the supporting frame 11 is supported. Specifically, a first interface screw 1111 is disposed on the support base 11, a second interface screw 1121 is disposed on the vertical beam 112, threads matching with the interface screws are disposed at two ends of the first support rod 12, the first support rod 12 is in threaded connection with the first interface screw 1111 and the second interface screw 1121, and tightness of connection with the interface screw 1121 can be adjusted by rotating the first support rod 12, so that inclination, i.e. levelness adjustment, of the support frame 11 along the Y direction is realized; similarly, the vertical beam 112 is also provided with a third interface screw 1122, the ground is provided with a fourth interface screw 14, and both ends of the second support rod 12 are provided with threads matched with the interface screw, so that the second support rod 12 is in threaded connection with the interface screw, and the inclination, namely the perpendicularity, of the support frame 11 along the X direction can be adjusted by rotating the second support rod 13; the support base 111 and the ground can be fixedly connected through four M12 expansion screws.
The movement mechanism 2 includes a slide mechanism 21 and a rotation mechanism 22, wherein the slide mechanism 21 is provided on the vertical beam 112 and is movable up and down along Z, and the rotation mechanism 22 is fixed to the slide mechanism 21 so as to be movable up and down along Z along with the slide mechanism 21 on the one hand, and to be rotatable in the XY plane on the other hand.
As shown in fig. 3A to 3C, the sliding mechanism 21 includes a sliding frame 211, a plurality of sliding blocks 212 are provided on the sliding frame 211, guide rails 213 matching with the sliding blocks 212 are provided on the two vertical beams 112, respectively, and the sliding blocks 212 slide up and down along the guide rails 213, so that the sliding frame 211 moves up and down along Z. The sliding of the sliding frame 211 can be driven by a ball screw mechanism 214, which comprises a screw rod 2141 and a nut 2142 which are matched with each other, wherein the screw rod 2141 is arranged along the Z direction, two ends of the screw rod 2141 are respectively arranged on the supporting base 111 and the uppermost cross beam 113 through a mounting seat 2143, the nut 2142 is arranged on the screw rod 2141, and the sliding frame 211 and the nut 2142 slide up and down along the screw rod 2141 along with the rotation of the screw rod 2141, so that the sliding frame 211 moves up and down along Z under the driving of the nut 2142; the support base 111 is further provided with a first driving motor 2144 connected to the screw rod 2141 for driving the screw rod 2141 to rotate, thereby moving the carriage 211 and the nut 2142 up and down.
The carriage 211 includes a back plate 2111 disposed along the Y direction, lifting arms 2112 extending along the X direction are respectively disposed at two ends of the back plate 2111 along the Y direction, the slider 212 is disposed on the back plate 2111, and the nut 2142 is fixedly connected to the back plate 2111.
As shown in fig. 4A and 4B, the rotation mechanism 22 includes a second driving motor 221, a first pulley 222 and a second pulley 223, the second driving motor 221 is fixed on a back plate 2111 through a fixing seat 2211, the first pulley 222 is connected with a driving shaft of the second driving motor 221 and is linked with the second pulley 223 through a belt 224, the second pulley 223 is connected with a rotating disc 226 through a bearing 225, a load supporting disc 227 is fixed on the rotating disc 226, a load such as a superconducting high-frequency cavity is mounted on the load supporting disc 227, so that under the driving of the second driving motor 221, the first pulley 222 drives the second pulley 223 to synchronously rotate through the belt 224, and the second pulley 223 drives the rotating disc 226 to synchronously rotate through the bearing 225, thereby synchronously rotating the load supporting disc 227 and the load thereon along with the rotating disc 226; since the rotation mechanism 22 is mounted on the back plate 2111, it can move up and down along the Z-direction following the back plate 2111, so that the load can realize up and down movement along the Z-direction and rotation movement in the XY-plane by the driving of the first driving motor 2114 and the second driving motor 221.
As shown in fig. 4C, the bearing 225 includes a bearing inner ring 2251, a bearing outer ring 2252, and a stainless steel ceramic mixed ball 2253 interposed therebetween, and the stainless steel ceramic mixed bearing can operate at a low speed and for a long period without lubrication, thereby ensuring cleanliness without pollution; the rotating disc 226 is welded with a step 2261, which is interference fit with the upper end of the bearing inner race 2251, and the lower end of the bearing inner race 2251 is fitted with the second pulley 223 and fastened by a snap ring 2231. The step 2261 can support the bearing 225 on the rotating disk 226, and can keep a gap between the bearing 225 and the rotating disk 226 to avoid friction, so that the bearing 225 drives the rotating disk 226 to rotate.
The bearing outer race 2252 overcoat is equipped with lifts square disk 228, and it is located the below of rotary disk 226 to leave certain clearance between with rotary disk 226, avoid producing friction between the two during operation, lift square disk 228 and bearing outer race 2252 have 8M 6 screw rods (inner circle 4, outer circle 4), namely rotary disk adjustment screw rod 230 for the levelness of adjustment rotary disk 226. The principle is as follows: unscrewing the outer ring 4 adjusting screws 230, and respectively and finely adjusting the inner ring 4 adjusting screws 230 for a plurality of times according to the levelness (or the height of each direction by adopting a level meter) of the rotating disc 226, so that the levelness meets the use requirement of equipment; the outer race 4 adjustment screws 230 are then tightened to secure the lifting plate 228 with the bearing outer race 2252.
The belt 224 is provided with a rotary encoder 229, a rotary wheel is mounted on the rotary shaft of the rotary encoder 229, and gear teeth of the rotary wheel are meshed with the second belt pulley 223, so that synchronous rotation of the rotary wheel and the second belt pulley 223 is realized, and whether abnormal phenomena such as lost rotation and the like of the belt pulley or motor drive are judged through photoelectric signals output by the rotary encoder 229.
The belt 224 is also provided with a cover 2241 to prevent particles from being worn and dropped during rotation from polluting the clean room.
As shown in fig. 5A and 5B, the load translation mechanism 4 is disposed on each of the two lifting arms 2112, and includes a sliding arm 41 and a sliding rail 42, the sliding rail 42 is disposed on the lifting arm 2112 along the X direction, the sliding arm 41 is provided with a roller 411, and the roller 411 cooperates with the sliding rail 42, and can slide on the sliding rail 42, so that the sliding arm 41 moves along the X direction; the slide arm 41 is also detachably and fixedly connected to the load support disc 227 such that the load support disc 227 follows the movement of the slide arm 41 in the X-direction.
The sliding arm 41 is further provided with a locking screw 412, and the sliding arm 41 can be locked and unlocked by rotating the locking screw 412 to contact with or separate from the sliding rail 42.
As shown in fig. 6, the spray mechanism 3 includes a high-pressure water pump 31 (see fig. 1A and 1B), a filter 32 and a spray bar 33, through holes are formed in each of the second pulley 223, the rotary disk 226 and the load supporting disk 227, the spray bar 33 extends in the Z direction and sequentially passes through the second pulley 223, the bearing 225, the rotary disk 226 and the load supporting disk 227, a spray head 331 is provided at the top end of the spray bar 33, a plurality of spray holes 3311 are formed in the circumferential direction thereof, the high-pressure water pump 31, the filter 32 and the spray bar 33 are connected by pipes, and thus high-pressure water is filtered and sprayed out by the spray head 331 at the top end of the spray bar 33 to clean the load on the load supporting disk 227.
The bottom of the spray rod 33 is sleeved with a support tube 34, so that the spray rod 33 is firmer, the support tube 34 is sleeved with a lower water disc 35 which is fixed on the ground through a bracket 36, and the joint of the lower water disc 35 and the support tube 34 is sealed through a fluorine rubber ring 36, so that water leakage is avoided; the drain pan 35 is further provided with a water outlet 351 to collect the washed sewage. The drain pan 35 can support the shower bar 33 on the one hand and collect the sewage after washing on the other hand.
In the embodiment, the high-pressure water pump 31 is selected from the hydro-Cell D15 series, so that oil and water can be completely isolated, and the water pressure and water flow requirements of more than 13L/min@100bar can be easily realized; the ultra-pure water tank is connected with the high-pressure water pump 31 through a special PVC pipe for ultra-pure water; a safety valve (pressure 120 bar) protection device is arranged at the outlet of the high-pressure water pump 31; the rotation speed of the water pump is adjusted through frequency conversion, so that the pressure adjustment is realized. The adjustable frequency of the high-pressure water pump ranges from 10 Hz to 50Hz, and the precision is 0.1Hz. The filter 32 is a CELL 0.2um@100bar filter element and is arranged on a specially-manufactured matched stainless steel cylinder, so that residual magazines in a water pipeline are filtered, and the water quality is ensured. The pipeline can be selected from EP grade 304 steel pipes, and joints are sealed by tetrafluoro rings, so that the pipeline can resist high pressure up to 150bar.
As shown in fig. 7A and 7B, the high-pressure ultrapure water spray device further comprises a water blocking cover 5, which comprises a cover body 51 and a support disc 52, wherein the support disc 52 is positioned above the load support disc 227 and is fixed on the two lifting arms 2112, the bottom end of the cover body 51 is inserted into the support disc 52, and shields the load support disc 227, the load and the spray rod 33, so that water during cleaning is prevented from being sputtered to other areas of the ultra-clean room, and the cleanliness in the ultra-clean room is ensured.
For easy assembly and disassembly, the cover 51 and the support plate 52 are formed by splicing symmetrical two halves, and are fixedly connected through a buckle. The support plate 52 may be mounted on the two lift arms 2112 via a mounting bracket 521 to effect securement.
The support plate 52 is further provided with a drain 522, and the cleaned sewage can be discharged into the drain plate 35 through the drain 522, so as to realize recovery of the sewage.
As shown in fig. 8, the high-pressure ultra-pure water spraying apparatus further comprises a control device 6 electrically or communicatively connected to the high-pressure water pump 31, the first driving motor 2114 and the second driving motor 221, controlling the up-and-down movement and rotation rate of the load by controlling the rotation speed thereof, and controlling the pressure and on-off of ultra-pure water.
In order to prevent the mechanical or motor from stopping moving and causing damage due to local long-time flushing of the inner surface of the load, the vertical beam 112 is provided with a displacement sensor 215 for measuring the displacement of the load in real time and feeding it back to the control device 6, and the control device 6 also receives the photoelectric signal of the rotary encoder 229 in real time, so that when the displacement of the load is detected to be out of sync with the set value of the control device within a certain time (generally 2 seconds, which can be set according to the requirement), the control device 6 alarms and stops the high-pressure water pump 31, waiting for maintenance and reset.
With continued reference to fig. 3A, the vertical beam 112 is further provided with an upper limit switch 216 and a lower limit switch 217, which are respectively electrically or communicatively connected to the control device 6, and when the slider 212 touches the limit switch, the control device 6 directly turns off the first drive motor 2114, the second drive motor 221 and the high pressure water pump 31, so that the spraying device stops operating.
The control device 6 comprises a touch display screen 61, and various parameters such as up-and-down movement speed and times, rotation speed, up-and-down movement travel and the like can be set through the touch display screen 61, so that man-machine interaction is realized. The touch display screen 61 is also provided with an emergency stop button, and when pressed, the spraying device stops running.
The control device 6 can be arranged on the supporting frame 11, and the isolating cover 7 is arranged outside the supporting frame 11, so that the supporting mechanism 1 is separated from the spraying area, and the influence on the cleanliness of the spraying area is avoided or reduced. The shielding cover 7 may be made of a transparent material, such as plexiglas, and the touch screen 61 is provided on the shielding cover 7 to facilitate the operation thereof.
The working process of the high-pressure ultrapure water spraying device is as follows:
the control device 6 controls the sliding frame 211 to move downwards along the Z direction, so that the load supporting disc 227 is lowered to a proper position, the load is mounted on the load supporting disc 227, after the load supporting disc 211 is mounted, the sliding frame 211 is controlled to move upwards to exceed the top end of the spraying rod 33, the load supporting disc 227 and the rotating disc 226 are released, the load supporting disc 227 and the sliding arm 41 rotate the locking screw 412 to leave the sliding rail 42, then the sliding arm 41 is pushed to move towards the spraying rod 33, the through hole of the load supporting disc 227 is positioned right above the spraying rod 33, the locking screw 412 is rotated to be contacted with the sliding rail 42, locking is achieved, the load supporting disc 227 is disconnected with the sliding arm 41, the load supporting disc 227 is fixed with the rotating disc 226 again, the sliding frame 211 is controlled to descend, the top end of the spraying rod 33 penetrates through the load supporting disc 227, then the high-pressure water pump 31 is controlled to be opened, high-pressure ultrapure water is sprayed out by the head 331 at the top end of the spraying rod 33, the load is cleaned, and the control device 6 controls the load to move up and down and rotate according to a preset program in the cleaning process; after the cleaning is completed, the high-pressure water pump 31 is stopped, the carriage 211 is controlled to be raised, the load is moved away from the spray bar 33 by the slide arm 41, and then lowered to a proper position, and the load is removed.
According to the high-pressure ultrapure water spraying device provided by the embodiment of the invention, the spraying rod 33 is fixed, the load is cleaned in a load movement mode, the up-and-down and rotation movement of the load is realized through the sliding mechanism 21 and the rotating mechanism 22, the length of an ultrapure water pipeline is effectively shortened, and the water pressure loss is reduced; and the structure is compact.
The foregoing description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and various modifications can be made to the above-described embodiment of the present invention. All simple, equivalent changes and modifications made in accordance with the claims and the specification of this application fall within the scope of the patent claims. The present invention is not described in detail in the conventional art.
Claims (19)
1. A high pressure ultra-pure water spray apparatus, comprising:
the supporting mechanism is fixed on the ground;
the motion mechanism comprises a sliding mechanism and a rotating mechanism, the sliding mechanism is arranged on the supporting mechanism, and the rotating mechanism is fixed on the sliding mechanism; the sliding mechanism comprises a sliding frame, the sliding frame comprises a back plate arranged along the Y direction, and lifting arms extending along the X direction are respectively arranged at two ends of the back plate along the Y direction; the rotating mechanism comprises a second driving motor, a first belt pulley and a second belt pulley, the second driving motor is fixed on the back plate, the first belt pulley is connected with a driving shaft of the second driving motor, the second belt pulley is linked with the first belt pulley through a belt, the second belt pulley is connected with a rotating disc through a bearing, and a load supporting disc is fixed on the rotating disc;
the spraying mechanism is fixed on the ground and comprises a high-pressure water pump, a filter and a spraying rod which are sequentially connected, and the spraying rod is arranged along the Z direction and passes through the rotating mechanism and the sliding mechanism;
the two lifting arms are respectively provided with a load translation mechanism, each load translation mechanism comprises a sliding arm and a sliding rail, each sliding rail is arranged on each lifting arm along the X direction, each sliding arm is arranged on each sliding rail, and each load support disc is detachably connected with each sliding arm.
2. The high-pressure ultrapure water spray device of claim 1, wherein the support mechanism comprises a support frame, the support frame comprises a support base fixed on the ground, two vertical beams which are arranged at intervals and extend along the Z direction are arranged on the support base, and a plurality of cross beams which are arranged at intervals and extend along the Y direction are connected between the two vertical beams.
3. The high-pressure ultrapure water spraying device according to claim 2, wherein a first supporting rod and a second supporting rod are respectively arranged on the two vertical beams, two ends of the first supporting rod are respectively connected with the vertical beams and the supporting base, and two ends of the second supporting rod are respectively connected with the vertical beams and the ground.
4. The high-pressure ultrapure water spray device according to claim 2, wherein a plurality of sliding blocks are arranged on the sliding frame, and guide rails matched with the sliding blocks are respectively arranged on the two vertical beams.
5. The high-pressure ultra-pure water spray apparatus according to claim 4, wherein the sliding mechanism further comprises a screw rod, a nut and a first driving motor, both ends of the screw rod are respectively installed on the supporting base and the uppermost cross beam, the nut is installed on the screw rod, the first driving motor is connected with the screw rod, and the sliding frame is fixedly connected with the nut.
6. The high-pressure ultra-pure water spray apparatus according to claim 5, wherein the slider is disposed on the back plate, and the nut is fixedly connected with the back plate.
7. The high-pressure ultra-pure water spraying device according to claim 1, wherein the bearing comprises a bearing inner ring, a bearing outer ring and balls clamped between the bearing inner ring and the bearing outer ring, a step is arranged on the rotating disk, the step is in interference fit with the upper end of the bearing inner ring, and the lower end of the bearing inner ring is matched with the second belt pulley and is fastened through a clamping ring.
8. The high-pressure ultra-pure water spraying device according to claim 7, wherein the bearing outer ring is sleeved with a lifting square disk, and the lifting square disk is positioned below the rotating disk and has a gap with the rotating disk.
9. The high-pressure ultrapure water spray system of claim 5, wherein a rotary encoder is provided on the belt, and a rotary wheel of the rotary encoder is engaged with the second pulley.
10. The high pressure ultra-pure water spray apparatus according to claim 1, wherein said belt jacket is provided with an outer cover.
11. The high-pressure ultrapure water spray device according to claim 1, wherein a locking screw is arranged on the sliding arm, and the locking screw is detachably contacted with the sliding rail.
12. The high-pressure ultra-pure water spray apparatus according to claim 1, wherein the spray rod top is provided with a spray header having a plurality of spray holes along a circumferential direction.
13. The high-pressure ultrapure water spraying device according to claim 1, wherein a supporting pipe is arranged at the bottom of the spraying rod, a lower water tray is sleeved outside the supporting pipe, the lower water tray is fixed on the ground, a sealing ring is arranged at the joint of the lower water tray and the supporting pipe, and a water outlet is arranged on the lower water tray.
14. The high-pressure ultra-pure water spraying device according to claim 1, further comprising a water blocking cover, wherein the water blocking cover comprises a cover body and a supporting disc, the supporting disc is positioned below the load supporting disc and fixed on two lifting arms, the bottom end of the cover body is connected with the supporting disc in an inserting mode, and the cover body shields the load supporting disc and the spraying rod.
15. The high-pressure ultra-pure water spray apparatus according to claim 14, wherein the cover body and the support plate are formed by splicing symmetrical two halves.
16. The high-pressure ultra-pure water spray apparatus according to claim 14, wherein a water drain port is provided on the support plate.
17. The high pressure ultra-pure water spray apparatus according to claim 9, further comprising a control device electrically or communicatively connected to the high pressure water pump, the first drive motor, the second drive motor, and the rotary encoder.
18. The high-pressure ultra-pure water spray apparatus according to claim 17, wherein the control means comprises a touch display screen on which a scram button is provided.
19. The high-pressure ultra-pure water spray apparatus according to claim 17, wherein the vertical beam is provided with a displacement sensor, an upper limit switch and a lower limit switch which are electrically or communicatively connected with the control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211008400.8A CN115365208B (en) | 2022-08-22 | 2022-08-22 | High-pressure ultrapure water spray device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211008400.8A CN115365208B (en) | 2022-08-22 | 2022-08-22 | High-pressure ultrapure water spray device |
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| Publication Number | Publication Date |
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| CN115365208A CN115365208A (en) | 2022-11-22 |
| CN115365208B true CN115365208B (en) | 2023-07-14 |
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| CN202211008400.8A Active CN115365208B (en) | 2022-08-22 | 2022-08-22 | High-pressure ultrapure water spray device |
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