CN115326879A - Moisture generating device and multi-dew-point generating method - Google Patents

Moisture generating device and multi-dew-point generating method Download PDF

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Publication number
CN115326879A
CN115326879A CN202210937263.XA CN202210937263A CN115326879A CN 115326879 A CN115326879 A CN 115326879A CN 202210937263 A CN202210937263 A CN 202210937263A CN 115326879 A CN115326879 A CN 115326879A
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moisture
permeation
buffer cavity
interface
gas
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王建帅
李良来
朱道竞
胡雪蛟
杨越洲
谭恩
刘欢欢
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Zhouji Strait Energy Technology Co ltd
Wuhan Mizi Energy Technology Co ltd
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Zhouji Strait Energy Technology Co ltd
Wuhan Mizi Energy Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/56Investigating or analyzing materials by the use of thermal means by investigating moisture content
    • G01N25/66Investigating or analyzing materials by the use of thermal means by investigating moisture content by investigating dew-point
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0006Calibrating gas analysers

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  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
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Abstract

The invention relates to a moisture generating device and a multi-dew-point generating method, which comprise a gas distribution device, a drying device, a penetration device, a humidity switching device and a dew-point detection device, wherein the penetration device comprises a constant-temperature water bath box and a plurality of penetration pipes arranged in the constant-temperature water bath box. The humidity switching device can selectively connect permeation tubes of different numbers in series to form permeation tube groups of different lengths, and can enable dry gas output by the drying device to be conveyed into the buffer cavity after passing through the permeation tube groups, and the dew point detection device is used for detecting the dew point temperature of the gas in the buffer cavity. The invention can generate multi-dew-point moisture, and has simple operation, low cost and fast switching response time.

Description

Moisture generating device and multi-dew-point generating method
Technical Field
The invention relates to the technical field of moisture generation, in particular to a moisture generation device and a multi-dew-point generation method.
Background
With the development of modern industry, the rapid development of advanced scientific technologies such as petrochemical industry, aerospace, atomic energy, ultralow temperature and the like, the demand for low-humidity measurement is increasing day by day. Dew point and humidity sensors are applied more and more widely, technical requirements are higher and higher, and the workload for further detecting the humidity sensor is correspondingly increased, so that a humidity verification instrument adapted to the dew point and humidity sensor is required to generate lower dew point, higher precision and higher response speed.
The principle of the humidity generator in the low humidity measurement field mainly comprises a double-temperature double-pressure method, a shunt method, a penetration method and the like. Currently, there are two general ways for moisture metering standards:
firstly, a precision dew point meter is used as a humidity measurement standard device, and a moisture generator is used as a dynamic humidity source to form a humidity measurement standard system;
and secondly, a high-accuracy dual-temperature dual-pressure humidity generator is used as a standard device.
Most of high-precision moisture generation standard devices have extremely high purchase cost and large volume and weight, and although the shunt method moisture generator has low manufacturing cost and is easy to miniaturize, the shunt method moisture generator needs to precisely control the flow ratio of multi-stage dry moisture and has higher requirements on the performance of a saturated moisture generation device-a saturator.
Therefore, the inventor provides a moisture generating device and a multi-dew-point generating method by experience and practice of related industries for many years, so as to overcome the defects of the prior art.
Disclosure of Invention
The invention aims to provide a moisture generating device and a multi-dew-point generating method, which can generate multi-dew-point moisture, and have the advantages of simple operation, low cost and quick switching response time.
The above object of the present invention can be achieved by the following technical solutions:
the present invention provides a moisture generating device, comprising:
the gas distribution device is used for storing the standard gas to be detected;
the drying device is used for drying the standard gas to be detected;
the infiltration device comprises a constant-temperature water bath tank and a plurality of infiltration pipes arranged in the constant-temperature water bath tank;
the humidity switching device can selectively connect different numbers of permeation tubes in series to form permeation tube groups with different lengths, and can enable the dry gas output by the drying device to be conveyed into the buffer cavity after passing through the permeation tube groups;
and the dew point detection device is used for detecting the dew point temperature of the gas in the buffer cavity.
In a preferred embodiment of the present invention, the plurality of permeation tubes are sequentially arranged in a spaced manner from front to back along the predetermined direction, and the humidity switching device includes a front end moisture selection valve, a plurality of middle moisture selection valves, and a rear end moisture selection valve; the front end moisture selection valve is connected with the drying device, the inlet end of the most front end permeation tube and the buffer cavity and can be communicated with the drying device and the buffer cavity or can be communicated with the drying device and the permeation tube; the middle moisture selection valve is connected with two adjacent end parts of two adjacent permeation tubes and the buffer cavity and can be communicated with the permeation tube and the buffer cavity which are positioned in front or can be communicated with the two adjacent permeation tubes; the rear end moisture selection valve is connected with the outlet end of the permeation tube at the rearmost end and the buffer cavity and can control the on-off of the permeation tube and the buffer cavity.
In a preferred embodiment of the present invention, the front end moisture selection valve comprises a first port, a second port and a third port and is connected to the drying device, the inlet end of the foremost permeation tube and the buffer chamber, respectively, and the first port can be communicated with the second port or the third port; the middle moisture selection valve comprises a fourth interface, a fifth interface and a sixth interface which are respectively connected with the inlet ends and the outlet ends of two adjacent permeation tubes and the buffer cavity, and the fourth interface can be communicated with the fifth interface or the sixth interface; the rear end moisture selector valve is an on-off valve.
In a preferred embodiment of the invention, the air distribution device comprises at least one air cylinder, and each air cylinder is connected with the inlet end of the drying device through an air outlet pipe.
In a preferred embodiment of the invention, a pressure reducing valve and a mass flow meter are arranged on the gas outlet pipe, and the pressure reducing valve is arranged close to the outlet end of the gas storage cylinder.
In a preferred embodiment of the present invention, the constant temperature water bath includes a closed box containing deionized water, each of the permeation tubes is disposed in the closed box, and the deionized water can submerge each of the permeation tubes.
In a preferred embodiment of the present invention, the moisture generating device further comprises a heating controller and a cooling controller, the closed box body is further provided with a heating device and a cooling device, the heating controller is electrically connected to the heating device and can control the heating temperature in the constant temperature water bath box, and the cooling controller is electrically connected to the cooling device and can control the cooling temperature in the constant temperature water bath box.
In a preferred embodiment of the present invention, an evacuation valve is further connected to the buffer chamber.
In a preferred embodiment of the invention, the drying device is a dryer, the dew point detection device is a dew point meter, the detection range of the dew point meter is-70-20 ℃, and the precision is 0.1 ℃.
The invention also provides a multi-dew-point generating method, which is operated by adopting the moisture generating device and comprises the following steps:
drying the standard gas to be detected and then conveying the standard gas to a humidity switching device;
switching the humidity switching device to enable a preset number of permeation tubes to be connected in series to form a permeation tube group with a preset length;
the dried standard gas to be detected enters a buffer cavity after passing through a permeation tube set;
carrying out dew point temperature detection on the gas in the buffer cavity by using a dew point detection device;
converting the detected dew point temperature into water content;
and repeating the steps, adjusting the length of the permeation tube group to obtain the moisture with different dew point temperatures, and calculating to obtain the water content of the moisture.
According to the moisture generating device and the multi-dew-point generating method, the total length of the permeation tube set is changed by the humidity switching device through the matching of all the parts, so that gases with different humidity can be obtained, the dew-point detecting device is used for detecting the temperature of the gases in the buffer cavity, the water content of the gases can be obtained through conversion, and the subsequent work calibration and inspection of equipment to be inspected (such as a humidity detecting instrument) are more convenient. The whole device has simple structure, easy operation and low cost, can generate multi-dew-point moisture, has quick switching response time, and has good reliability of the generated moisture.
Drawings
The drawings are only for purposes of illustrating and explaining the present invention and are not to be construed as limiting the scope of the present invention. Wherein:
FIG. 1: the structure of the moisture generating device is shown schematically.
FIG. 2: the invention provides an enlarged view of the matching of the humidity switching device and the buffer cavity.
The reference numbers indicate:
1. a gas cylinder; 11. an air outlet pipe; 12. a pressure reducing valve; 13. a mass flow meter;
2. a drying device;
3. a constant temperature water bath tank; 31. sealing the box body; 32. deionized water;
4. a permeate tube;
51. a front end moisture selection valve; a1, a first interface; a2, a second interface; a3, a third interface; 52. an intermediate moisture selector valve; a4, a fourth interface; a5, a fifth interface; a6, a sixth interface; 53. a back end moisture selector valve; 54. a connecting pipe;
6. a buffer chamber; 61. an evacuation valve;
7. a dew point detecting device;
81. a heating controller; 82. a refrigeration controller.
Detailed Description
In order to more clearly understand the technical features, objects, and effects of the present invention, embodiments of the present invention will now be described with reference to the accompanying drawings.
As shown in fig. 1 and 2, the present application provides a moisture generating device including:
the gas distribution device is used for storing the standard gas to be detected;
the drying device 2 is used for drying the standard gas to be detected;
the infiltration device comprises a constant temperature water bath tank 3 and a plurality of infiltration pipes 4 arranged in the constant temperature water bath tank 3;
the humidity switching device can selectively connect different numbers of permeation tubes 4 in series to form permeation tube groups with different lengths, and can enable the dry gas output by the drying device 2 to be conveyed into the buffer cavity 6 after passing through the permeation tube groups;
and a dew point detection device 7 for detecting the dew point temperature of the gas in the buffer chamber 6.
The selectivity here means that a preset number of permeation tubes 4 can be selected to be connected in series according to actual needs, and then a permeation tube group with a preset length is obtained. During the use, the mark gas that awaits measuring is carried to humidity auto-change over device after drying device 2, concatenates into the infiltration nest of tubes of predetermineeing length with a certain amount of infiltration pipe 4 through humidity auto-change over device's switching selective action, and the gas after the drying gets into in buffer chamber 6 behind this infiltration pipe group, utilizes dew point detection device 7 alright detect the dew point temperature of the gas in this buffer chamber 6, later through corresponding procedure conversion alright obtain the water content of this gas. The length of the permeation tube group is changed continuously through the action of the humidity switching device, so that the gas with different humidity is conveyed into the buffer cavity 6, and the dew point temperature is detected by the dew point detection device 7.
Therefore, the moisture generating device in the application can obtain gases with different humidity (namely, humidity with different dew point temperatures) by matching each component and changing the total length of the permeation tube set by the humidity switching device, can obtain the water content of the gases by converting the temperature of the gases in the buffer cavity 6 by the dew point detection device 7, and is more convenient for working calibration and inspection of subsequent equipment to be inspected (such as a humidity inspection instrument). The whole device has simple structure, easy operation and low cost, can generate multi-dew-point moisture, has quick switching response time, and has good reliability of the generated moisture.
In a specific implementation, in order to facilitate the switching selection function of the humidity switching device, the plurality of permeation tubes 4 are sequentially arranged at intervals from front to back along a predetermined direction, and the humidity switching device includes a front end moisture selection valve 51, a plurality of middle moisture selection valves 52, and a rear end moisture selection valve 53. The front end moisture selection valve 51 is connected with the drying device 2, the inlet end of the most front end permeation tube 4 and the buffer chamber 6, and can communicate the drying device 2 with the buffer chamber 6, or can communicate the drying device 2 with the permeation tube 4; the intermediate moisture selection valve 52 is connected to adjacent two end portions of adjacent two permeation tubes 4 (i.e., the outlet end of one permeation tube 4 and the inlet end of the other permeation tube 4) and the buffer chamber 6, and can communicate with the permeation tube 4 and the buffer chamber 6 located at the front, or can communicate with the adjacent two permeation tubes 4; the rear moisture selecting valve 53 is connected with the outlet end of the rearmost permeation tube 4 and the buffer chamber 6 and can control the on-off of the two.
The preset direction can be determined according to the requirement, and can be a linear direction or a curve direction. For example, the constant temperature water bath box 3 in this embodiment is a rectangular box structure, the preset direction is along the length direction of the constant temperature water bath box 3, and the permeation tubes 4 are sequentially arranged along the length direction of the constant temperature water bath box 3 at intervals. Different numbers of permeation tubes 4 can be connected in series by the switching function of different moisture selection valves to form permeation tube groups with different lengths.
More specifically, the front end moisture selection valve 51 includes a first port A1, a second port A2, and a third port A3 and is connected to the drying device 2, the inlet end of the foremost permeation tube 4, and the buffer chamber 6, respectively, and the first port A1 can communicate with the second port A2 or the third port A3. The middle moisture selection valve 52 includes a fourth port A4, a fifth port A5 and a sixth port A6 and is connected to the inlet and outlet ends of two adjacent permeation tubes 4 and the buffer chamber 6, respectively, and the fourth port A4 can communicate with the fifth port A5 or the sixth port A6. The rear end moisture selection valve 53 is an on-off valve (having two ports and connected to the outlet end of the rearmost permeation tube 4 and the buffer chamber 6, respectively).
The lengths of the permeate tubes 4 may be the same or different. The arrangement of permeate tubes 4 can be in a spiral-like manner as shown in fig. 1 to save space. The above-mentioned interfaces can be connected with the corresponding ends of the permeation tube 4 through the connecting tube 54, and the specific length, material and the like of the permeation tube 4 can be determined according to the requirement, for example, the permeation tube 4 selected in this embodiment is a polypropylene tube with an outer diameter of 3mm, a wall thickness of 0.5mm and a hardness of 80D, and the connecting tube 54 is a corrosion-resistant 1/8 inner polished stainless steel tube.
Taking the example shown in fig. 1 that four permeation tubes 4, three intermediate moisture selection valves 52 are provided as a first intermediate moisture selection valve, a second intermediate moisture selection valve, and a third intermediate moisture selection valve, respectively, the control temperature of the constant temperature water bath 3 is 70 ℃, the control accuracy is 0.01 ℃, and the length of each permeation tube 4 is 5 m: when the first interface A1 and the third interface A3 of the front-end moisture selection valve 51 are communicated, the gas dried by the drying device 2 directly enters the buffer cavity 6 without passing through the permeation tube 4; when the first interface A1 of the front-end wet gas selection valve 51 is communicated with the second interface A2, and the fourth interface A4 of the first middle wet gas selection valve is communicated with the sixth interface A6, the gas dried by the drying device 2 enters the buffer cavity 6 through the permeation tube 4; when the first interface A1 and the second interface A2 of the front end wet gas selection valve 51 are communicated, the fourth interface A4 and the fifth interface A5 of the first middle wet gas selection valve are communicated, and the fourth interface A4 and the sixth interface A6 of the second middle wet gas selection valve are communicated, the gas dried by the drying device 2 enters the buffer cavity 6 through the two permeation tubes 4.
When the first interface A1 of the front-end wet gas selection valve 51 is communicated with the second interface A2, the fourth interfaces A4 of the first intermediate wet gas selection valve and the second intermediate wet gas selection valve are both communicated with the respective fifth interfaces A5, and the fourth interface A4 and the sixth interface A6 of the third intermediate wet gas selection valve are both communicated with the respective fifth interfaces A5, the gas dried by the drying device 2 enters the buffer cavity 6 through the three permeation tubes 4; when the first port A1 of the front-end wet gas selector valve 51 is communicated with the second port A2, the fourth ports A4 of the three middle wet gas selector valves 52 are all communicated with the respective fifth ports A5, and the rear-end wet gas selector valve 53 is in an open state, the gas dried by the drying device 2 enters the buffer chamber 6 through the four permeation tubes 4. With the five moisture-selective valves described above, zero to four permeate tubes 4 can be connected, respectively, to generate a fixed moisture of 1uL/L, 100uL/L, 200uL/L, 300uL/L, 400uL/L, respectively, with a moisture-switching response time <60s.
Therefore, through different selection combinations of the moisture selection valves, only one path for the standard gas to be detected to reach the buffer cavity 6 after being dried can be ensured, and different numbers of permeation tubes 4 can be selected for combination, so that the dried gas enters the buffer cavity 6 after passing through permeation tube groups with different lengths.
Further, the air distribution device comprises at least one air storage bottle 1, and each air storage bottle 1 is connected with the inlet end of the drying device 2 through an air outlet pipe 11.
In order to control the pressure and flow of the standard gas to be measured more conveniently, a pressure reducing valve 12 and a mass flow meter 13 are arranged on the gas outlet pipe 11, and the pressure reducing valve 12 is arranged close to the outlet end of the gas storage cylinder 1.
Different standard gases to be detected are stored in each gas storage bottle 1, and the standard gases to be detected with specified pressure and mass flow are conveniently conveyed into the drying device 2 through the pressure reducing valve 12 and the mass flow meter 13.
Referring to fig. 1, the constant temperature water bath 3 includes a closed tank 31 containing deionized water 32, each of the permeation tubes 4 is disposed in the closed tank 31, and the deionized water 32 can submerge each of the permeation tubes 4.
The deionized water 32 in the closed tank 31 may be filled or not, as long as it is ensured that the permeation tube 4 can be completely immersed in the deionized water 32 to maintain a stable permeation rate. The deionized water 32 has less impurities and higher precision.
In order to facilitate the control of the temperature of the constant temperature water bath box 3, the moisture generating device further comprises a heating controller 81 and a refrigerating controller 82, a heating device and a refrigerating device are further arranged on the closed box body 31, the heating controller 81 is electrically connected with the heating device and can control the heating temperature in the constant temperature water bath box 3, and the refrigerating controller 82 is electrically connected with the refrigerating device and can control the refrigerating temperature in the constant temperature water bath box 3.
Any existing structure can be adopted for the heating device and the refrigerating device, and the constant-temperature water bath box 3 can be conveniently heated and refrigerated, so that the dynamic balance of the temperature of the constant-temperature water bath box 3 can be controlled.
Further, an evacuation valve 61 is connected to the buffer chamber 6. In the initial operation, the evacuation valve 61 can be opened to evacuate the air in the buffer chamber 6, so as to ensure the detection accuracy. The evacuation valve 61 may also be opened when testing is complete or when a fault requires servicing.
The drying device 2 can specifically adopt a dryer, the dew point detection device 7 can adopt a dew point meter which is used as the output moisture standard of the device, the detection range of the dew point meter is-70-20 ℃, and the precision is 0.1 ℃, so that the dew point meter is ensured to be a high-precision dew point meter, and the precision of the moisture generated by the whole humidity generation device is further ensured to be higher.
Further, the principle analysis of the entire moisture generating apparatus is as follows:
this application is based on the FICK law (i.e., FICK's first law) where a dry carrier gas carries away another pure gas that permeates out of a membrane at a certain flow rate. The permeation tube 4 is filled with deionized water 32, and when dry carrier gas (i.e. gas dried by a dryer) passes by, water vapor permeates from the outside to the inside of the permeation tube 4 due to different partial pressures of water vapor inside and outside the permeation tube 4. The gas is brought out by dry carrier gas with known flow and is mixed uniformly by the buffer cavity 6 to form the micro-moisture standard gas substance, and the moisture content C can be expressed as:
C=q V/F M
in the formula: q is the corresponding permeability of the permeation tube 4, ug/min; v is the molar volume of water vapor in the buffer cavity 6, and is 22.41L/mol; f is the dry carrier gas flow, L/min; m is the molar mass of water, 18.015g/mol.
The permeability of the permeable membrane of the permeation tube 4 (i.e. its wall) depends on the nature of the substance used itself: comprising the components, the area of the permeable membrane, the temperature and the pressure gradient at the two sides of the membrane:
Figure BDA0003784084150000071
in the formula: q is the permeability; d is a permeability coefficient; s is the effective penetration area; dP/dB is the pressure gradient of the gas on two sides of the membrane; b is the thickness of the permeable membrane. And the following steps:
S=2πrL
in the formula: s is the effective penetration area; r is the radius of the permeate tube 4; l is the length of the permeation tube 4;
when the permeate tube and the standard gas flow rate are determined, the standard water content C generated by the moisture generating device can be simply expressed as:
Figure BDA0003784084150000081
in the formula: a is a constant. Temperature is one of the factors affecting moisture because it directly affects the capillary structure of the permeation tube 4 and the pressure gradient of water vapor. But because the temperature and the water content are not in a linear relation, the response time of the temperature control of the constant temperature water bath box 3 is slow, and the permeability balance time is long, the humidity with different concentrations required by the test is generated by determining the length of the permeation tube 4 in advance, the response time is faster, the reliability of the generated humidity is better, and the precision is high.
Further, the application also provides a multi-dew-point generation method, the multi-dew-point generation method is operated by adopting the moisture generation device, and the multi-dew-point generation method comprises the following steps:
drying the standard gas to be detected and then conveying the standard gas to a humidity switching device;
switching the humidity switching device to connect a preset number of permeation tubes 4 in series to form a permeation tube group with a preset length;
the dried standard gas to be detected enters the buffer cavity 6 through the permeation tube group;
dew point temperature detection is carried out on the gas in the buffer cavity 6 by a dew point detection device 7;
converting the detected dew point temperature into water content;
and repeating the steps, adjusting the length of the permeation tube group to obtain the moisture with different dew point temperatures, and calculating to obtain the water content of the moisture.
The working principle and the beneficial effects of the whole multi-dew-point generation method are the same as those of the moisture generation device, and are not described in detail herein.
In conclusion, the moisture generation device and the multi-dew-point generation method in the embodiment are based on the permeation method, have low cost and simple control, can be manually adjusted to have the moisture generation range of 1-3000uL/L and the moisture precision of less than 0.5uL/L, are convenient and flexible to operate, have wide application range, high application value and low cost, and are easy to popularize and popularize as calibration devices of water content analyzers and humidity sensors.
The above are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention. Any equivalent changes and modifications that can be made by one skilled in the art without departing from the spirit and principles of the invention should fall within the protection scope of the invention.

Claims (10)

1. A moisture generating device, comprising:
the gas distribution device is used for storing the standard gas to be detected;
the drying device is used for drying the standard gas to be detected;
the infiltration device comprises a constant-temperature water bath box and a plurality of infiltration pipes arranged in the constant-temperature water bath box;
the humidity switching device can selectively connect different numbers of permeation tubes in series to form permeation tube groups with different lengths, and can enable the dry gas output by the drying device to pass through the permeation tube groups and then to be conveyed into the buffer cavity;
and the dew point detection device is used for detecting the dew point temperature of the gas in the buffer cavity.
2. Moisture generating device according to claim 1,
the plurality of permeation tubes are sequentially arranged at intervals from front to back along a preset direction, and the humidity switching device comprises a front end moisture selection valve, a plurality of middle moisture selection valves and a rear end moisture selection valve;
the front end moisture selection valve is connected with the drying device, the inlet end of the most front end permeation tube and the buffer cavity and can be communicated with the drying device and the buffer cavity or can be communicated with the drying device and the permeation tube; the middle moisture selection valve is connected with two adjacent end parts of two adjacent permeation tubes and the buffer cavity and can be communicated with the permeation tube positioned in front and the buffer cavity or can be communicated with the two adjacent permeation tubes; the rear end moisture selection valve is connected with the outlet end of the permeation tube at the rearmost end and the buffer cavity and can control the on-off of the rear end moisture selection valve and the buffer cavity.
3. Moisture generating device according to claim 2,
the front end moisture selecting valve comprises a first interface, a second interface and a third interface and is respectively connected with the drying device, the inlet end of the most front end permeation tube and the buffer cavity, and the first interface can be communicated with the second interface or the third interface;
the middle moisture selection valve comprises a fourth interface, a fifth interface and a sixth interface and is respectively connected with the inlet ends and the outlet ends of two adjacent permeation tubes and the buffer cavity, and the fourth interface can be communicated with the fifth interface or the sixth interface;
the rear end moisture selecting valve is an on-off valve.
4. Moisture generating device according to claim 1,
the air distribution device comprises at least one air storage bottle, and each air storage bottle is connected with the inlet end of the drying device through an air outlet pipe.
5. Moisture generating device according to claim 4,
and the gas outlet pipe is provided with a pressure reducing valve and a mass flow meter, and the pressure reducing valve is arranged close to the outlet end of the gas storage bottle.
6. Moisture generating device according to claim 1,
the constant-temperature water bath box comprises a closed box body filled with deionized water, each permeation tube is arranged in the closed box body, and the deionized water can submerge each permeation tube.
7. Moisture generating device according to claim 6,
the moisture generating device further comprises a heating controller and a refrigerating controller, wherein the heating device and the refrigerating device are further arranged on the closed box body, the heating controller is electrically connected with the heating device and can control the heating temperature in the constant-temperature water bath box, and the refrigerating controller is electrically connected with the refrigerating device and can control the refrigerating temperature in the constant-temperature water bath box.
8. Moisture generating device according to claim 1,
and the buffer cavity is also connected with an exhaust valve.
9. Moisture generating device according to claim 1,
the drying device is a dryer, the dew point detection device is a dew point meter, the detection range of the dew point meter is-70-20 ℃, and the precision is 0.1 ℃.
10. A multiple dew point generating method operating with a moisture generating device as claimed in any one of claims 1 to 9, comprising the steps of:
drying the standard gas to be detected and then conveying the standard gas to the humidity switching device;
switching the humidity switching device to enable a preset number of permeation tubes to be connected in series to form a permeation tube group with a preset length;
the dried standard gas to be detected enters the buffer cavity after passing through the permeation tube group;
carrying out dew point temperature detection on the gas in the buffer cavity by using the dew point detection device;
converting the detected dew point temperature into water content;
and repeating the steps, adjusting the length of the permeation tube group to obtain the humidity with different dew point temperatures, and calculating the water content of the humidity.
CN202210937263.XA 2022-08-05 2022-08-05 Moisture generating device and multi-dew-point generating method Pending CN115326879A (en)

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Application Number Priority Date Filing Date Title
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