CN115324868A - Water vapor pumping low-temperature pump and water vapor pumping speed testing method - Google Patents

Water vapor pumping low-temperature pump and water vapor pumping speed testing method Download PDF

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Publication number
CN115324868A
CN115324868A CN202211145493.9A CN202211145493A CN115324868A CN 115324868 A CN115324868 A CN 115324868A CN 202211145493 A CN202211145493 A CN 202211145493A CN 115324868 A CN115324868 A CN 115324868A
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CN
China
Prior art keywords
water vapor
water
shell
cryopump
pump
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Pending
Application number
CN202211145493.9A
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Chinese (zh)
Inventor
杨杨
邓家良
武义锋
曾环
冯欣宇
王建勇
韩雨松
程祥
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Vacree Technologies Co Ltd
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Vacree Technologies Co Ltd
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Priority to CN202211145493.9A priority Critical patent/CN115324868A/en
Publication of CN115324868A publication Critical patent/CN115324868A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/121—Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/123—Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16—Filtration; Moisture separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The invention discloses a water pumping vapor cryopump, which comprises a refrigerator, a shell, a baffle, a radiation cold shield, a cryopanel and a drainage component, wherein the shell is provided with a water inlet and a water outlet; the shell is connected with the refrigerator, the radiation cold screen is connected with a primary cooling table of the refrigerator, the low-temperature plate is connected with a secondary cooling table of the refrigerator, the baffle is connected with the top of the radiation cold screen, the radiation cold screen is positioned in the shell, the radiation cold screen and the shell are coaxially arranged, the shell and the bottom of the radiation cold screen are inclined planes, the shell and the inclined plane of the radiation cold screen are provided with water outlets, and the water outlets of the shell and the water drainage assembly are connected. The invention also discloses a water vapor pumping speed testing method. The invention has the beneficial effects that: the regeneration time of the low-temperature pump is shortened, the regeneration effect is improved, the adverse effect on the backing pump is avoided, and the operation efficiency of the coating equipment is improved; the method for testing the water vapor of the cryopump can optimize theoretical calculation parameters and improve calculation accuracy.

Description

Water vapor pumping low-temperature pump and water vapor pumping speed testing method
Technical Field
The invention relates to the technical field of low-temperature vacuum, in particular to a water vapor low-temperature pump and a water vapor pumping speed testing method.
Background
The cryopump is an ultrahigh vacuum pump for capturing gas by utilizing low-temperature condensation, low-temperature adsorption and low-temperature trapping mechanisms, and the ultimate vacuum can reach 10 DEG C -11 Pa. The cryopump has the advantages of high pumping speed, high ultimate vacuum, no moving parts, real cleanness, no oil and the like, and is widely applied to the high-end manufacturing fields of optical coating, integrated circuits and the like.
With the continuous development of industrial level and vacuum technology, the types of base materials and coating materials for vacuum coating are increasing, and higher requirements are also put forward on coating equipment and coating processes, wherein sputtering coating is a common method in coating processes. It is a coating method which utilizes high-speed inert gas ions to bombard atoms, atomic groups or molecules on the surface of a target material in vacuum so as to deposit the atoms, the atomic groups or the molecules on a substrate. The optical film is a common functional film, and is widely applied to various aspects in our lives, from liquid crystal display of glasses, mobile phones, computers and televisions, to LED illumination and the like. The film layer needs a clean vacuum environment in the preparation process and is particularly sensitive to water vapor in a vacuum system, the existence of the water vapor not only affects the deposition quality of the film layer, but also affects the optical characteristics of the film, therefore, the optical film coating equipment needs to be provided with an ultrahigh vacuum pump with high pumping speed to the water vapor, wherein the commonly used ultrahigh vacuum pump comprises an oil diffusion pump, a molecular pump and a low-temperature pump, but the oil diffusion pump has the risk of oil pollution and needs to be matched with a cold trap for use, the molecular pump has the problems of low pumping speed under high vacuum, poor steam pumping effect and the like, and the low-temperature pump becomes the preferred ultrahigh vacuum pump in the optical film coating equipment in recent years.
Along with the wide use of cryopump in the optics coating film field, the cryopump catches a large amount of steam inside the pump body in the use, and the cryopump reaches that steam can liquefy into water and stays inside the pump body among the saturated regeneration process, need use the backing pump to take out the vacuum in advance before restarting, but the backing pump all can be relatively poor and long-time steam of drawing water to the pumping rate of steam can make the backing pump performance attenuate fast. For example, chinese patent application: CN113236530A, a moisture regeneration type cryopump which is convenient for pumping the moisture generated in the regeneration process by using a pre-pump, this method not only has a slow pumping speed, but also affects the service life of the pre-pump.
According to the JB/T11081-2011 'vacuum technology refrigerator cryopump' industry standard, a flow method and a flow guide method are adopted for pumping speed test of the cryopump, the two methods both need high-purity gas to be tested and a high-precision flowmeter to control the gas flow, and for N, the two methods are used for measuring the flow of the gas 2 Ar and H 2 The second and third types of gas can be accurately measured, but for the first type of gas H 2 O is not applicable, and H is determined by adopting a theoretical calculation mode in the industry at present 2 Pumping speed of O, lack of H 2 Actual test method of O.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Disclosure of Invention
One of the technical problems to be solved by the present invention is: how to solve the automatic drainage of current cryopump, solve the problem that a large amount of steam caused the backing pump to pump speed slowly, the life-span is short during regeneration.
The second technical problem to be solved by the present invention is: how to provide a pumping speed test method suitable for water vapor.
The invention solves the technical problems through the following technical means:
the pumping steam cryogenic pump comprises a refrigerator, a shell, a baffle plate, a radiation cold screen, a cryogenic plate and a drainage component; the shell is connected with the refrigerator, the radiation cold screen is connected with a primary cooling table of the refrigerator, the low-temperature plate is connected with a secondary cooling table of the refrigerator, the baffle is connected with the top of the radiation cold screen, the radiation cold screen is positioned in the shell, the radiation cold screen and the shell are coaxially arranged, the shell and the bottom of the radiation cold screen are inclined planes, the shell and the inclined plane of the radiation cold screen are provided with water outlets, and the water outlets of the shell and the water drainage assembly are connected.
The invention is mainly applied to coating equipment with higher water vapor content, when in use, the shell is connected with a coating machine through a flange, a low-temperature pump is pre-pumped to a starting pressure value, and a vacuum chamber is pumped to a required vacuum degree through low-temperature condensation and adsorption after a refrigerator is cooled to a low temperature; according to the invention, the low-temperature pump shell and the bottom of the radiation cold screen are designed into the shape of the bow bottom seal head, so that liquid water in regeneration can flow to the groove bottom of the bow bottom seal head of the pump body in a directional manner, the lowest part of the bow bottom seal head is provided with the drainage component, and the water generated in regeneration can be quickly drained out of the pump body at normal temperature, so that the pre-pumping time of a backing pump is greatly shortened, and the regeneration efficiency of the low-temperature pump is improved.
Preferably, the refrigerator further comprises a heating block, and the heating block is connected to a primary cooling table and a secondary cooling table of the refrigerator.
The heating block is installed on the first-stage cooling table and the second-stage cooling table, and the effect is to heat on the first-stage cooling table and the second-stage cooling table when regenerating, so that the temperature return time is shortened, and the regeneration of the adsorbing material on the low-temperature plate is thorough.
Preferably, the casing includes pump port flange, barrel, end seal, the barrel is the cylindrical section of thick bamboo of both ends open-ended, pump port flange joint the outside on barrel top, the bottom of barrel with end seal connects, end seal's bottom surface is the inclined plane, and the delivery port is located the inclined plane lower, drainage component connects end seal.
Preferably, the baffle comprises a plurality of annular plates and a plurality of connecting plates, one ends of the connecting plates are connected, the other ends of the connecting plates are connected with the inner wall of the radiation cold screen, the annular plates are connected on the connecting plates at equal intervals, and the diameter of one end, close to the air suction port, of each annular plate is smaller than that of one end, far away from the air suction port, of each annular plate.
Preferably, the low-temperature plate includes an installation cylinder and a plurality of low-temperature single plates, the plurality of low-temperature single plates are connected to the outside of the installation cylinder at intervals along the height direction of the installation cylinder, and the installation cylinder is connected to the refrigerator.
Preferably, the water discharge assembly comprises a filtering device and an electromagnetic valve, the water discharge port is connected with the filtering device, and the filtering device is connected with the electromagnetic valve.
The drainage assembly comprises filter equipment and solenoid valve, installs in the lower of the pump body, and when the intelligent control ware discerned temperature and pump body pressure and satisfied the settlement condition, the liquid water in the automatic solenoid valve discharge pump body of opening, filter equipment installs in valve water inlet department, and the main function is the solid impurity in the filtration water, guarantees the leakproofness of valve, and the valve is opened automatic shutdown after the certain time.
Preferably, the radiation cold screen further comprises a gas sweeping joint, wherein the gas sweeping joint is connected with the shell and extends into the interior of the radiation cold screen.
The gas purging connector is used for purging high-purity N in the shell when regeneration is carried out 2 The regeneration time of the cryopump is shortened, and meanwhile, part of water vapor in the cryopump can be discharged from the safety valve along with the gas.
The invention also provides a water vapor pumping speed testing method, which comprises the water vapor pumping low-temperature pump, a testing sealing device, a heating device, a sealing measuring cylinder and an evacuating device; the testing sealing device of the water vapor extraction cryopump is connected with the testing sealing device, the testing sealing device comprises a vacuum measuring meter and an air inlet, the sealing measuring cylinder is connected with the testing sealing device through a gas pipeline, and the sealing measuring cylinder is connected with the evacuating device through an evacuating pipeline;
the heating device heats the sealed measuring cylinder, records water surface scales at the same time, and opens the evacuating device; when water in the sealed measuring cylinder begins to boil, introducing water vapor into the testing sealing device to reach a vacuum value to be tested, starting timing, keeping the air introduction for more than 10 minutes, closing the water vapor introduction, recording a water surface scale value and continuous water vapor introduction time, obtaining the water vapor pumping speed of the water vapor low-temperature pump under the vacuum control value to be tested through S = Q/P, repeating the operation for multiple times, obtaining the water vapor pumping speed under different vacuum values, and finally obtaining the water vapor pumping speed curve of the water vapor low-temperature pump.
Preferably, the heating device comprises a constant temperature heater and a vessel, water is filled in the vessel, the sealed measuring cylinder is positioned in the vessel, and the vessel is positioned on the constant temperature heater.
Preferably, still include needle valve, hand valve, the needle valve is connected the gas pipeline, the hand valve is connected and is managed to find time the pipeline.
The invention has the advantages that:
(1) The invention is mainly applied to coating equipment with higher water vapor content, when in use, the shell is connected with a coating machine, the temperature pump is pre-pumped to a starting pressure value, and the refrigerator is cooled to a low temperature and pumps the vacuum chamber to a required vacuum degree through low-temperature adsorption; the low-temperature pump shell and the bottom of the radiation cold screen are designed into the shape of the bow bottom end enclosure, so that liquid water in regeneration can directionally flow to the groove bottom of the bow bottom end enclosure of the pump body, a drainage component is arranged at the lowest position of the bow bottom end enclosure, and the water generated in regeneration can be quickly drained out of the pump body at normal temperature, thereby greatly shortening the pre-pumping time of a backing pump and improving the regeneration efficiency of the low-temperature pump; the regeneration time of the low-temperature pump is shortened, the regeneration effect of the low-temperature pump is improved, the adverse effect on a backing pump is avoided, and the operation efficiency of the coating equipment is improved;
(2) The heating block is arranged on the first-stage cooling table and the second-stage cooling table and is used for heating the first-stage cooling table and the second-stage cooling table during regeneration, so that the temperature return time is shortened, and the adsorbing materials on the low-temperature plate are ensured to be regenerated thoroughly;
(3) The water drainage assembly consists of a filtering device and an electromagnetic valve, is arranged at the lowest position of the pump body, and is automatically opened to drain liquid water in the pump body when the intelligent controller identifies that the temperature and the pressure of the pump body meet set conditions;
(4) The gas purging connector is used for purging high-purity N in the shell when regeneration is carried out 2 The regeneration time of the cryogenic pump is shortened, and meanwhile, part of water vapor in the cryogenic pump is discharged from the safety valve along with the gas; the method of water drainage, purging and heating is adopted to ensure that water vapor is thoroughly removed, reduce the regeneration time and improve the regeneration effect of the low-temperature pump;
(5) The method for testing the water vapor of the cryogenic pump can obtain the actual measurement data of the water vapor pumping speed of the cryogenic pump, and meanwhile, the actual measurement data can be comprehensively compared with the data calculated theoretically, theoretical calculation parameters are optimized, and calculation accuracy is improved.
Drawings
Fig. 1 is a schematic structural view of a water vapor suction cryogenic pump according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a water vapor cryopump in accordance with one embodiment of the present invention;
FIG. 3 is a rear view of the hidden housing and the radiant cooling screen according to one embodiment of the present invention;
FIG. 4 is a schematic diagram of a steam testing system for a middle and low temperature pump according to a second embodiment of the present invention;
the reference numbers in the figures:
1. a pumped steam cryopump; 11. a refrigerator; 12. a housing; 121. a pump port flange; 122. a barrel; 123. bottom sealing; 13. a baffle plate; 131. an annular plate; 132. a connecting plate; 133. bending a piece; 14. a radiation cold shield; 15. a cryopanel; 151. mounting the cylinder; 152. a low-temperature veneer; 16. a drainage assembly; 161. a filtration device; 162. an electromagnetic valve; 17. a heating block; 18. a gas purge connection;
2. testing the sealing device; 3. a heating device; 31. a constant temperature heater; 32. a vessel; 4. sealing the measuring cylinder; 5. an evacuation device; 6. a gas conduit; 7. evacuating the pipeline;
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
as shown in fig. 1 and 2, the pumped steam cryopump 1 includes a refrigerator 11, a housing 12, a baffle 13, a radiant cold screen 14, a cryopanel 15, a drain assembly 16, and a heating block 17.
In this embodiment, the refrigerator 11 is a G-M refrigerator, which is used as a low-temperature cold source of the cryopump, and has the characteristics of simple structure, few low-temperature moving components, and the like. Bipolar refrigeration is employed having a primary cooling stage with a first cooling temperature and a secondary cooling stage with a second cooling temperature. The primary cooling table is cooled to 65-100K, and the secondary cooling table is cooled to 10-15K.
Casing 12 includes pump port flange 121, barrel 122, end seal 123, barrel 122 is the cylindrical section of thick bamboo of both ends open-ended, pump port flange 121 connects the outside on barrel 122 top, the bottom of barrel 122 with end seal 123 is connected, end seal 123 is the comparatively protruding, the lower disc structure in position all around in middle part, the top edge of end seal 123 is the same with barrel 122's outline, guarantees that barrel 122 and end seal 123 are connected reliably, and end seal 123 has the inclined plane, and the delivery port is located the lower department on inclined plane, the delivery port of end seal 123 is connected to drainage component 16, and during the regeneration, liquid water collects the delivery port along the inclined plane to discharge by drainage component 16. The middle of the bottom seal 123 is provided with a circular hole, the circular hole is connected with a transition cylinder, and the transition cylinder is located outside the refrigerator 11 and connected with the refrigerator 11.
As shown in fig. 3, the baffle 13 includes a plurality of annular plates 131, a plurality of connecting plates 132, and a plurality of bending pieces 133, the plurality of connecting plates 132 are arranged divergently, one ends of the plurality of connecting plates 132 are connected together, and the other ends are connected to the inner wall of the radiant cooling screen 14 through L-shaped bending pieces 133, in this embodiment, six connecting plates 132 and six bending pieces 133 are arranged in a circumferential array; the plurality of annular plates 131 are arranged at equal intervals, each annular plate 131 is connected to the connecting plate 132, specifically, the connecting plate 132 can be provided with a plurality of chutes along the length direction, the annular plates 131 are inserted into the chutes and welded, the plurality of annular plates 131 are different in size, the size of the annular plates 131 is gradually increased along the outward extending direction of the central axis of the cryopump, the annular plates 131 are inclined, and the diameter of one end, close to the air suction port, of the annular plates 131 is smaller than that of one end, away from the air suction port, of one end of the annular plates 131. The baffle 3 is arranged at the air suction port of the cryopump in a way of facing the vacuum chamber, is designed into a shutter structure and is used for pumping water vapor in the vacuum chamber, precooling the second and third gases and reducing the heat radiation to the internal structure.
As shown in fig. 2, the radiation cold shield 14 is used for protecting the adsorption array from direct heat radiation of the shell 12 and reducing direct heat radiation of gas, the radiation cold shield 14 is arranged between the shell 12 and the adsorption array and surrounds the low-temperature board 15, the bottom of the radiation cold shield 14 is thermally connected with a primary cooling platform of the refrigerator 11 through a bolt, and a bottom head of the radiation cold shield 14 also adopts a bow-shaped bottom head structure, namely, the radiation cold shield has an inclined surface, the length of the inclined surface can be matched with the size of the baffle 13 and the size of the low-temperature board 15, so that water melted from the baffle 13 is ensured to flow to the bottom of the tank after passing through the low-temperature board 15. The radiant cold screen 14 is arranged coaxially with the housing 12. The radiant cold shield 14 is located inside the housing 12.
As shown in fig. 2, the cryopanel 15 includes an installation cylinder 151 and a plurality of single cryogens 152, the plurality of single cryogens 152 are connected to the outside of the installation cylinder 151 at intervals along the height direction of the installation cylinder 151, the installation cylinder 151 is connected to the refrigerator 11, specifically, the cryopanel 15 is connected to a secondary cooling platform of the refrigerator 11, and the single cryogens 152 are integrally a circular plate structure, and the edges of the single cryogens are inclined downward so as to facilitate water flowing downward.
As shown in fig. 2, the drain assembly 16 includes a filter 161 and a solenoid valve 162, the drain port is connected to the filter 161, and the solenoid valve 162 is connected to the bottom of the filter 161. The drainage component 16 consists of a filtering device 161 and an electromagnetic valve 162 and is installed at the lowest position of the pump body, when the intelligent controller recognizes that the temperature and the pump body pressure meet set conditions, the electromagnetic valve 162 is automatically opened to discharge liquid water in the pump body, the filtering device 161 is installed at a water inlet of the valve and mainly used for filtering solid impurities in the water body, the sealing performance of the valve is guaranteed, and the valve is automatically closed after being opened for a certain time.
The heating block 17 is connected to the primary cooling stage and the secondary cooling stage of the refrigerator 11. The heating block 17 is installed on the first-stage cooling table and the second-stage cooling table and is used for heating the first-stage cooling table and the second-stage cooling table during regeneration, so that the temperature return time is shortened, and the adsorption material on the low-temperature plate is ensured to be regenerated thoroughly.
The pumped vapor cryogenic pump 1 further comprises a gas purge joint 18, wherein the gas purge joint 18 is connected with the shell 12 and extends into the radiation cold screen 14. The gas purge fitting 18 is used to purge the interior of the housing 12 of high purity N2 during regeneration, thereby speeding up the regeneration time of the cryopump, and also allowing some of the water vapor in the cryopump to be vented out of the safety valve with the gas.
The embodiment is mainly applied to coating equipment with high water vapor content, when the coating equipment is used, the shell 12 is connected with a coating machine, the temperature pump is pre-pumped to a starting pressure value, and the refrigerator 11 is cooled to a low temperature and then pumps the vacuum chamber to a required vacuum degree through low-temperature adsorption; the embodiment designs into bow end cover shape with cryogenic pump casing 12 and radiation cold screen 14 bottom, and the liquid water orientation when realizing the regeneration flows to the tank bottom department of pump body bow end cover, installs drainage component 16 in bow end cover position lowest trompil, and the water that produces when will regenerating under the normal atmospheric temperature fast discharges the pump body, shortens the time of taking out in advance of backing pump greatly, improves the regeneration efficiency of cryogenic pump.
The cryopump in this embodiment can shorten cryopump regeneration time, improves the regeneration effect of cryopump, avoids causing adverse effect to the backing pump, improves the operating efficiency of coating equipment.
Example two:
as shown in fig. 4, the present embodiment provides a method for testing a vapor pumping rate, and the testing system includes the vapor pumping cryopump 1, the test sealing device 2, the heating device 3, the sealing graduated cylinder 4, the evacuation device 5, the gas pipeline 6, and the evacuation pipeline 7 in the first embodiment.
The steam-pumping cryogenic pump 1 is mechanically connected with the test sealing device 2 through a pump port flange, the test sealing device 2 comprises a vacuum measuring meter, the seal measuring cylinder 4 is connected with the test sealing device 2 through a gas pipeline 6, and the seal measuring cylinder 4 is connected with the evacuating device 5 through an evacuating pipeline 7; the needle valve is connected to the gas pipeline 6, and the hand valve is connected to the evacuation pipeline 7.
The heating device 3 comprises a constant temperature heater 31 and a vessel 32, water is arranged in the vessel 32, the sealed measuring cylinder 4 is positioned in the vessel 32, the vessel 32 is positioned on the constant temperature heater 31, and the water in the vessel 32 is heated by the water in the sealed measuring cylinder 4. The vessel 32 is made of glass, so that the condition in the vessel 32 and the sealed measuring cylinder 4 can be observed conveniently.
In the embodiment, the water vapor pumping cryopump 1 adopts a DN550 caliber cryopump commonly used for vacuum coating, and has the characteristics of large water vapor pumping speed, simple water drainage and the like as the structural design is shown in figures 1 and 2; the vacuum measuring meter adopts the measuring range of 10 -7 The vacuum range of 1Pa, the vacuum value in the water vapor pumping cryopump 1 is displayed in real time through a display instrument, and the installation position refers to the test standard; the needle valve can finely adjust the flow of the water vapor entering the low-temperature pump and adjust the vacuum value of the water vapor pumping low-temperature pump 1, so that pumping speed results of the water vapor pumping low-temperature pump 1 under different vacuum values are obtained; the gas pipeline 6 is used for communicating the whole testing device and is used for supplying a channel for steam stripping of evaporated water to enter the water pumping steam low-temperature pump 1; the hand valve is used for controlling the evacuating device 5 to evacuate the testing device; the evacuating device 5 is a dry pump, and the dry pump is used for evacuating the testing device, reducing the air pressure of the testing device, reducing the boiling point of water and obtaining water vapor at a lower temperature; the sealed measuring cylinder 4, the glass vessel 32 and the constant temperature heater 31 are devices for obtaining water vapor, and the water can be accelerated by heating the waterThe evaporation speed, a large amount of water vapor is obtained.
Firstly, as shown in fig. 4, a test system is set up, leak detection is carried out on the test system, specifically, leak detection is carried out by adopting a helium mass spectrometer leak detector, and the leak rate is required to be less than 5 × 10 -9 Pa.m 3 and/S, ensuring the tightness of the device, opening the constant temperature heater 31 to heat water in the sealed measuring cylinder 4 to a certain temperature, recording the scale value of the water surface, opening the evacuating device 5 and the hand valve, slowly opening the needle valve to adjust to the vacuum value to be measured and start timing when the water in the sealed measuring cylinder 4 starts boiling to generate bubbles, closing the needle valve and the hand valve after ventilating for a period of time, recording the scale value of the water surface and the continuous ventilating time again, obtaining the water vapor pumping speed of the water vapor low-temperature pump 1 under the vacuum value to be measured through the S = Q/P formula, obtaining the water vapor pumping speed under different vacuum values through repeated circulation of the operations, and finally obtaining the water vapor pumping speed curve of the water vapor low-temperature pump 1.
The embodiment can obtain the measured data of the water vapor pumping speed of the cryogenic pump, and meanwhile, the measured data can be comprehensively compared with the data calculated theoretically, so that the theoretical calculation parameters are optimized, and the calculation precision is improved.
The above examples are only intended to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. The pumped steam cryopump is characterized by comprising a refrigerator, a shell, a baffle, a radiation cold shield, a cryopanel and a drainage component; the shell is connected with the refrigerator, the radiation cold screen is connected with a primary cooling table of the refrigerator, the low-temperature plate is connected with a secondary cooling table of the refrigerator, the baffle is connected with the top of the radiation cold screen, the radiation cold screen is positioned in the shell, the radiation cold screen and the shell are coaxially arranged, the shell and the bottom of the radiation cold screen are inclined planes, a water outlet is formed in the shell and the inclined plane of the radiation cold screen, and the water outlet of the shell is connected with the water drainage component.
2. The water vapor cryopump of claim 1, further comprising a heating block coupled to the primary and secondary cooling stages of the chiller.
3. The steam-pumping cryopump of claim 1, wherein the housing includes a pump port flange, a barrel, and a bottom seal, the barrel is a cylindrical barrel with two open ends, the pump port flange is connected to the outside of the top end of the barrel, the bottom end of the barrel is connected to the bottom seal, the bottom surface of the bottom seal is an inclined surface, the water outlet is located at the lowest position of the inclined surface, and the drainage assembly is connected to the bottom seal.
4. The pumped vapor cryopump of claim 1, wherein the baffle includes a plurality of annular plates, a plurality of connecting plates, one end of each of the plurality of connecting plates being connected and the other end being connected to the inner wall of the radiant cold shield, the plurality of annular plates being connected to the connecting plates at equal intervals, the annular plates having an end closer to the inlet opening with a smaller diameter than an end farther from the inlet opening.
5. The pumped vapor cryopump of claim 1, wherein the cryopanel comprises an installation cylinder and a plurality of low temperature single plates, the plurality of low temperature single plates are connected to the outside of the installation cylinder at intervals along the height direction of the installation cylinder, and the installation cylinder is connected to the refrigerator.
6. The water vapor extraction cryopump of claim 1, wherein said drain assembly includes a filter device and a solenoid valve, said drain port being connected to said filter device, said filter device being connected to said solenoid valve.
7. The steam-pumped cryopump of claim 1, further comprising a gas purge connection connected to said housing and extending into an interior of said radiant cold shield.
8. The water vapor pumping speed test method is characterized by comprising the water vapor pumping cryogenic pump, a test sealing device, a heating device, a sealed measuring cylinder and an evacuating device according to any one of the claims 1 to 7; the steam-pumping cryogenic pump is positioned in the test sealing device, the test sealing device comprises a vacuum measuring meter, the sealed measuring cylinder is connected with the test sealing device through a gas pipeline, and the sealed measuring cylinder is connected with the evacuating device through an evacuating pipeline;
the heating device heats the sealed measuring cylinder, simultaneously records water level scales, and opens the evacuating device; when water in the sealed measuring cylinder begins to boil, introducing water vapor into the testing sealing device to reach a vacuum value to be tested, starting timing, keeping the air introduction for more than 10 minutes, closing the water vapor introduction, recording a water surface scale value and continuous water vapor introduction time, obtaining the water vapor pumping speed of the water vapor low-temperature pump under the vacuum control value to be tested through S = Q/P, repeating the operation for multiple times, obtaining the water vapor pumping speed under different vacuum values, and finally obtaining the water vapor pumping speed curve of the water vapor low-temperature pump.
9. The water vapor extraction cryopump of claim 8, wherein said heating device includes a thermostatic heater, a vessel with water therein, said sealed graduated cylinder being located in the vessel, said vessel being located on said thermostatic heater.
10. The water vapor cryopump of claim 8, further comprising a needle valve, a hand valve, the needle valve being connected to the gas line, the hand valve being connected to the evacuation line.
CN202211145493.9A 2022-09-20 2022-09-20 Water vapor pumping low-temperature pump and water vapor pumping speed testing method Pending CN115324868A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116906297A (en) * 2023-09-12 2023-10-20 中国科学院合肥物质科学研究院 Low-temperature pump rapid regeneration system and method suitable for tokamak steady-state operation
CN117489563A (en) * 2023-12-05 2024-02-02 上海优尊真空设备有限公司 Improved cryogenic pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116906297A (en) * 2023-09-12 2023-10-20 中国科学院合肥物质科学研究院 Low-temperature pump rapid regeneration system and method suitable for tokamak steady-state operation
CN116906297B (en) * 2023-09-12 2023-12-08 中国科学院合肥物质科学研究院 Low-temperature pump rapid regeneration system and method suitable for tokamak steady-state operation
CN117489563A (en) * 2023-12-05 2024-02-02 上海优尊真空设备有限公司 Improved cryogenic pump

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