CN115295384B - Three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod - Google Patents
Three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod Download PDFInfo
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- CN115295384B CN115295384B CN202211086150.XA CN202211086150A CN115295384B CN 115295384 B CN115295384 B CN 115295384B CN 202211086150 A CN202211086150 A CN 202211086150A CN 115295384 B CN115295384 B CN 115295384B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
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Abstract
The invention discloses a three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod, which comprises: the X-alpha driving unit, the Y-Z driving unit and the beta driving unit are arranged on the driving rod frame; the Y-Z driving unit includes: the Y-Z piezoelectric driving piece, the joint ball seat, the joint ball, the first pressing piece, the second pressing piece and the switching copper pipe; the beta drive unit includes: the device comprises a beta-drive substrate, a beta-piezoelectric drive piece, a beta-drive wear-resisting piece, a beta-drive fan-shaped rotor and a probe; the beta-driving fan-shaped rotor is rotationally connected to the second pressing piece along an axis perpendicular to the driving shaft; the probe is connected to the beta-drive sector mover; beta-drive wear plates interfere with beta-drive sector movers. According to the three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod, beta tilting is completely integrated at the movable end of the sample rod through high-integration design, so that the problem that the prior art cannot be suitable for a narrow pole shoe scene and the problem of sample drifting under high-resolution imaging in the prior art are solved.
Description
Technical Field
The invention belongs to the technical field of high-resolution in-situ characterization, and particularly relates to a three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod.
Background
A transmission electron microscope (hereinafter referred to as a transmission electron microscope) is a microscopic characterization device with high resolution, and has wide application in various fields such as biology, metal, electron, nano materials, and the like. Wherein, the sample rod is an important component of the transmission electron microscope. Through the sample rod, a researcher can transmit a sample from the outside to the transmission electron microscope and further image the sample under the high-energy electron beam of the transmission electron microscope. Currently, a great deal of emerging material science developments are in urgent need of in situ characterization in transmission electron microscopy to reveal the growth mechanism of the material or the reaction mechanism under the action of an external field. The high-resolution observation of the sample multi-orientation under the double-axis tilting condition can be realized, and the external field effect can be applied through the nano manipulation of multiple degrees of freedom.
Generally, the transmission electron microscope sample rods can be divided into two types of sample rods, i.e., uniaxial tilting and biaxial tilting, according to different tilting modes. Wherein rotation along the axis of the sample rod is referred to as alpha tilting and rotation perpendicular to the axis of the sample rod and the direction of incidence of the electron beam is referred to as beta tilting. The uniaxial tilting sample rod is only suitable for observing the few orientations of the sample, and cannot meet the characterization requirement of obtaining the multi-orientation high resolution of the sample in the experiment. For this purpose, a beta tilting function must be added to the sample rod.
At present, the double-tilting sample rod of the transmission electron microscope is mainly embodied as the following two points:
1. the independent beta tilting is matched with the transmission electron microscope angular table to realize the double tilting function, however, the technical scheme cannot meet the requirement of in-situ experiment of applying an external field while double tilting observation, namely the nano manipulation function of the rest degrees of freedom is lacking;
2. the sample rod fixed end beta tilting is matched with the sample rod movable end nano-manipulation, the technical scheme can meet the experimental requirement of in-situ double tilting characterization to a certain extent, but the beta tilting is mostly in a connecting rod wire drawing mode, so that the stability is poor, the sample drift is serious, and the imaging quality under high resolution is seriously affected. The high-resolution characterization is the core of the transmission electron microscope characterization technology, so that a new technical scheme is needed to break the current application limitation.
Disclosure of Invention
The invention provides a three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod which solves the technical problems, and specifically adopts the following technical scheme:
a three degree of freedom nano-manipulation and dual axis tilting transmission electron microscope sample rod comprising: the X-alpha driving unit, the Y-Z driving unit and the beta driving unit are arranged on the driving rod frame;
the driving shaft can move along the X direction and is arranged in the driving rod frame in a sliding way;
the X-alpha driving unit is arranged on the driving rod frame and connected to the driving shaft to drive the driving shaft to rotate and move along the X direction;
one end of the Y-Z driving unit is connected to the driving shaft and the other end is connected to the beta driving unit;
the Y-Z driving unit includes: the Y-Z piezoelectric driving piece, the joint ball seat, the joint ball, the first pressing piece, the second pressing piece and the switching copper pipe;
one end of the switching copper pipe is connected to the driving shaft, and the other end of the switching copper pipe is connected with the Y-Z piezoelectric driving piece;
the joint ball seat is connected to the other end of the Y-Z piezoelectric driving piece;
the joint ball is arranged in the ball socket groove of the joint ball seat;
the first press is connected to the second press, and the first press and the second press are pressed and connected to the joint ball;
the beta drive unit includes: the device comprises a beta-drive substrate, a beta-piezoelectric drive piece, a beta-drive wear-resisting piece, a beta-drive fan-shaped rotor and a probe;
the beta drive base plate is connected to one side of the second pressing piece, which is far away from the first pressing piece;
the beta piezoelectric driving piece is connected to the beta driving base plate;
the beta drive wear pad is connected to the beta piezoelectric driver;
the beta-driving fan-shaped rotor is rotationally connected to the second pressing piece along an axis perpendicular to the driving shaft;
the probe is connected to the beta-drive sector mover;
beta-drive wear plates interfere with beta-drive sector movers.
Further, the β drive unit further includes: the device comprises a shaft piece, a bearing and a shaft seat;
the shaft piece is connected to the shaft seat;
the shaft piece and the shaft seat are connected to the second pressing piece;
the beta driving fan-shaped rotor is provided with an arc through hole and an arc part;
the shaft piece passes through the arc-shaped through hole and is connected with the shaft seat;
the bearing is rotatably sleeved on the shaft piece and is contacted with the inner surface of the arc-shaped part;
the beta drive wear pad is in contact with the outer surface of the arcuate portion.
Further, the beta-drive fan-shaped rotor is also provided with a probe fixing boss;
the probe fixing boss is provided with a probe fixing threaded hole and a probe fixing through hole;
the beta driving unit also comprises a probe fixing screw;
the probe is inserted into the probe-fixing through hole and is engaged with the probe-fixing screw hole by the probe-fixing screw to thereby compress the probe.
Further, the beta drive unit also comprises a beta drive elastic connecting component;
the shaft piece and the shaft seat are elastically connected to the second pressing piece through a beta-driving elastic connecting component;
the beta-drive elastic connecting component elastically presses the shaft piece and the shaft seat, so that the bearing presses the inner surface of the arc-shaped part.
Further, the beta-drive elastic connection assembly comprises a plurality of screws and springs;
the screw penetrates through the corresponding through hole of the shaft piece or the shaft seat to be meshed with the corresponding threaded hole of the second pressing piece;
the spring is sleeved in the screw and is positioned between the screw cap of the screw and the shaft piece or the shaft seat;
the spring is in a compressed state pressing the shaft or axle seat against the second press.
Further, a beta driving substrate fixing boss which forms a certain angle and is symmetrically distributed is arranged on the second pressing piece;
a beta drive substrate positioning boss is arranged in the middle of the beta drive substrate fixing boss;
the beta driving substrate is arranged on the beta driving substrate fixing boss in a preset position through the beta driving substrate positioning boss;
the beta driving unit comprises two beta piezoelectric driving pieces and a beta driving wear-resisting piece;
the two beta piezoelectric driving pieces are respectively arranged at two sides of the beta driving base plate.
Further, the Y-Z driving unit comprises a Y-Z driving elastic connecting component;
the first press member and the second press member are connected together by a Y-Z driven elastic connection assembly.
Further, the Y-Z driven elastic connection assembly comprises a plurality of screws and springs;
the screw passes through the corresponding through hole of the first pressing piece to be meshed with the corresponding threaded hole of the second pressing piece;
the spring is sleeved in the screw and is positioned between the screw cap of the screw and the first pressing piece;
the spring is in a compressed state pressing the first pressing member toward the second pressing member.
Further, the X-alpha driving unit comprises an X-alpha driving substrate, an X piezoelectric driving piece, an alpha piezoelectric driving piece and an X-alpha driving wear pad;
the X-alpha driving base plate is connected to the driving rod frame;
the X piezoelectric driving piece is connected to the X-alpha driving base plate;
the alpha piezoelectric driving piece is connected to the X piezoelectric driving piece;
the X-alpha drive wear pad is connected to an alpha piezoelectric driver.
Further, the three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod comprises a plurality of groups of X-alpha driving units;
the groups of X-alpha drive units are uniformly distributed at intervals along the circumferential direction of the drive shaft.
The invention has the advantages that the provided three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod completely integrates beta tilting at the movable end of the sample rod through high-integration design, and completely solves the problem that the prior art cannot be suitable for a narrow pole shoe scene.
The invention has the advantages that the provided three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod can realize the full-drive three-degree-of-freedom nano-manipulation and double-shaft tilting function.
The three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod provided by the invention has the advantages that the fan-shaped active cell is matched with a group of symmetrically distributed driving components, so that the beta tilting motion is creatively realized, the structure is simple and stable, and the stability of high-resolution imaging is effectively ensured.
The three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod provided by the invention has the advantages that the bearing is introduced, and the arc surface of the fan-shaped rotor is in good contact with the driving component through the close fit of the shaft piece, the shaft seat and the elastic connecting piece, so that the smoothness of movement is ensured, the stability of the system is further improved, and the stability of high-resolution imaging is further improved.
Drawings
FIG. 1 is a schematic illustration of a three degree of freedom nano-manipulation and dual axis tilting transmission electron microscope sample rod of the present invention;
FIG. 2 is a schematic diagram of an X-alpha drive unit of the present invention;
FIG. 3 is a schematic diagram of a Y-Z drive unit of the present invention;
FIG. 4 is a schematic diagram of a beta drive unit of the present invention;
FIG. 5 is a schematic view of a second compression element of the present invention;
FIG. 6 is a schematic diagram of a beta drive fan mover of the present invention;
the driving rod frame 01, the driving shaft 02, the x- α driving unit 03, the x- α driving substrate 0301, the x piezoelectric driving piece 0302, the α piezoelectric driving piece 0303, the x- α driving wear pad 0304, the y-Z driving unit 04, the y-Z piezoelectric driving piece 0401, the joint ball seat 0402, the joint ball 0403, the first pressing piece 0404, the second pressing piece 0405, the β driving substrate fixing boss 04051, the β driving substrate positioning boss 04052, the shaft seat guide counterbore 04053, the shaft fixing screw hole 04054, the y-Z driving elastic connection member 0406, the adapter copper tube 0407, the β driving unit 05, the β driving substrate 0501, the β piezoelectric driving piece 0502, the β driving wear pad 0503, the shaft 0504, the β driving elastic connection member 0505, the bearing 0506, the β driving fan-shaped mover 0507, the probe fixing boss 05071, the probe fixing screw hole 05072, the probe fixing through hole 05073, the arc through hole 05074, the arc portion 05075, the probe 0508, the probe fixing screw 0509, the bearing fixing screw 0510, the shaft seat 0511, the shaft seat guide boss 05111.
Detailed Description
The invention is described in detail below with reference to the drawings and the specific embodiments.
1-6 show a three-degree-of-freedom nano-manipulation and biaxial tilting transmission electron microscope sample rod of the present application, mainly comprising: a drive rod frame 01, a drive shaft 02, an X-alpha drive unit 03, a Y-Z drive unit 04 and a beta drive unit 05. In this application, the axial direction along the drive shaft 02 is defined as the X direction, and the Y and Z directions are both perpendicular to the X direction and to each other.
Wherein the driving shaft 02 is slidably arranged in the driving rod frame 01 along the X direction. The X- α driving unit 03 is provided on the driving lever frame 01 and is connected to the driving shaft 02 to drive the driving shaft 02 to rotate and move in the X direction. One end of the Y-Z drive unit 04 is connected to the drive shaft 02 and the other end is connected to the β drive unit 05.
Specifically, as shown in fig. 3, the Y-Z driving unit 04 includes: the Y-Z piezoelectric driving piece 0401, the joint ball seat 0402, the joint ball 0403, the first pressing piece 0404, the second pressing piece 0405 and the switching copper tube 0407.
One end of the adapter copper tube 0407 is connected to the drive shaft 02 and the other end is connected to the Y-Z piezoelectric driver 0401. The adapter copper tube 0407 is used for connecting electrodes of the Y-Z piezoelectric driving piece 0401. The articulation ball seat 0402 is connected to the other end of the Y-Z piezoelectric driver 0401. The joint ball 0403 is arranged in the ball socket groove of the joint ball seat 0402. The first press 0404 is connected to the second press 0405, and the first press 0404 and the second press 0405 are crimped to the joint ball 0403. Grooves which are matched with the joint balls 0403 are arranged on the first pressing piece 0404 and the second pressing piece 0405.
Preferably, the Y-Z drive unit 04 includes a Y-Z drive resilient connection component 0406. The first press member 0404 and the second press member 0405 are connected together by a Y-Z driven resilient connection member 0406. The first pressing piece 0404 and the second pressing piece 0405 clamp the joint ball 0403 through the Y-Z driving elastic connection component 0406, and the tightness degree of clamping between the first pressing piece 0404 and the second pressing piece 0405 can be adjusted through the Y-Z driving elastic connection component 0406.
In this application, the Y-Z drive resilient connection 0406 comprises a plurality of screws and springs. The screws pass through corresponding through holes of the first pressing piece 0404 and engage corresponding threaded holes of the second pressing piece 0405. The spring is sleeved in the screw and is positioned between the screw cap of the screw and the first pressing piece 0404. After the screw is fixed, the spring is in a compressed state, so that the first pressing piece 0404 is pressed towards the second pressing piece 0405, the clamping force between the first pressing piece 0404 and the second pressing piece 0405 and the joint ball 0403 is provided, loosening caused by long-term use can be effectively prevented, and the reliability of the sample rod is improved.
Specifically, as the Y-Z piezoelectric driver 0401 moves slowly in the Y or Z direction with the articulation ball 0403, the static friction between the articulation ball 0403 and the first and second compression elements 0404, 0405 causes the compression elements to be stationary relative to the articulation ball 0403. When the Y-Z piezoelectric driving element 0401 is quickly reset with the joint ball 0403, sliding friction force is generated between the joint ball 0403 and the first pressing element 0404 and the second pressing element 0405, and when the joint ball 0403 is reset, the first pressing element 0404 and the second pressing element 0405 are kept in place or only generate small displacement due to inertia. Thus, through the periodic cyclic motion, the translational motion in the Y direction and the Z direction can be realized.
As shown in fig. 4, the β drive unit 05 includes: a beta-drive substrate 0501, a beta-piezoelectric driver 0502, a beta-drive wear pad 0503, a beta-drive sector mover 0507, and a probe 0508.
The beta drive base plate 0501 is connected to a side of the second press 0405 remote from the first press 0404. The beta piezoelectric actuator 0502 is connected to the beta drive substrate 0501. The beta drive wear pad 0503 is connected to the beta piezoelectric driver 0502. The β -drive sector mover 0507 is rotatably connected to the second pressing piece 0405 along an axis perpendicular to the drive shaft 02. The probe 0508 is connected to a β -drive sector mover 0507. The beta drive wear pad 0503 abuts against the beta drive sector mover 0507. In particular, the method comprises the steps of,
specifically, as shown in fig. 5, a β -drive substrate fixing boss 04051 is disposed on the second pressing member 0405, and the β -drive substrate fixing boss is formed at a certain angle and is symmetrically distributed. A β drive substrate positioning boss 04052 is provided in the middle of the β drive substrate fixing boss 04051. The β drive substrate 0501 is disposed on the β drive substrate fixing boss 04051, pre-positioned by the β drive substrate positioning boss 04052. Thus, the β drive substrate 0501 can be accurately placed on the β drive substrate fixing boss 04051, which reduces the difficulty of assembly and improves the reliability of the structure. The beta drive unit 05 comprises two beta piezoelectric drives 0502 and a beta drive wear pad 0503. The two β piezoelectric drivers 0502 are disposed on both sides of the β driving substrate 0501, respectively. Preferably, the β piezoelectric actuator 0502 is slightly smaller in size than the β actuator substrate 0501, leaving wire bonding space and wire-passing grooves. The wire passing groove is used for conveniently introducing a wire to the beta driving substrate 0501 and limiting the position of the wire, so that the interference of free movement of the wire on the movement of the sample rod is avoided, and the reliability of the system is improved.
The beta drive unit 05 further includes: shaft 0504, bearing 0506 and axle seat 0511. The shaft 0504 is connected to the shaft socket 0511. The shaft 0504 and the shaft socket 0511 are connected to the second pressing member 0405. As shown in fig. 6, the β -drive fan-shaped mover 0507 is provided with an arc-shaped through hole 05074 and an arc-shaped portion 05075. The shaft 0504 passes through the arc-shaped through hole 05074 and is connected with the shaft seat 0511. The bearing 0506 is rotatably sleeved on the shaft element 0504 and contacts with the inner surface of the arc-shaped portion 05075. Two beta drive wear pads 0503 are in tangential contact with the outer surface of the arcuate portion 05075. Here, the inner surface of the arc portion 05075 means an arc surface radially inward of the arc portion 05075, and the outer surface of the arc portion 05075 means an arc surface radially outward of the arc portion 05075. The shaft member 0504 passes through the arc-shaped through hole 05074 and the bearing 0506, and is connected with the shaft seat 0511 through the bearing fixing screw 0510. Preferably, threaded holes are provided in the longer shaft element 0504, ensuring the reliability of the connection.
In this application, the β -drive sector mover 0507 is also formed with a probe fixing boss 05071. The probe fixing boss 05071 is provided therein with a probe fixing screw hole 05072 and a probe fixing through hole 05073. The beta drive unit 05 also includes a probe set screw 0509. The probe 0508 is inserted into the probe fixing through hole 05073, and is engaged with the probe fixing screw hole 05072 by the probe fixing screw 0509 to press the probe 0508. To ensure the reliability of the compression of the probe 0508, the probe fixation boss 05071 is higher than the rest of the β drive sector mover 0507.
In this application, the beta drive unit 05 further comprises a beta drive elastic connection assembly 0505. The shaft 0504 and the shaft socket 0511 are elastically connected to the second pressing piece 0405 by the β -drive elastic connection assembly 0505. The shaft member 0504 and the shaft seat 0511 are provided with through holes, and are fixed on the second pressing member 0405 of the Y-Z driving unit 04 through the β driving elastic connection assembly 0505.
Further, the beta drive spring connection assembly 0505 includes a plurality of screws and springs. The screws pass through corresponding through holes of the shaft 0504 or the shaft socket 0511 to engage corresponding threaded holes of the second pressing member 0405. The spring is sleeved in the screw and is positioned between the screw cap of the screw and the shaft 0504 or the shaft seat 0511. The spring is in a compressed state pressing the shaft 0504 or the shaft socket 0511 towards the second pressing member 0405. The beta drive spring connection assembly 0505 resiliently presses the shaft 0504 and the axle seat 0511 such that the bearing 0506 presses the inner surface of the arcuate portion 05075.
The axle seat 0511 is provided with two axle seat guide bosses 05111, and the axle seat guide bosses 05111 are matched with the axle seat guide counter bores 04053 on the second pressing piece 0405, so that the stability of the beta tilting drive unit is effectively ensured.
The symmetrically distributed beta piezoelectric driving pieces 0502 on the beta tilting driving unit deform slowly in the same direction under the sawtooth wave signal. In this way, the beta-drive sector mover 0507 is driven to synchronously move by static friction force. Further, when the two β piezoelectric drivers 0502 return quickly in the same direction at the same time, the β drive sector mover 0507 remains in place due to inertia and sliding friction, does not follow the β piezoelectric driver 0502 to return, or the movement stroke is smaller than the piezoelectric driver return stroke. In this way, the beta-large-angle tilting angle can be realized by accumulating the small displacements of the beta-piezoelectric actuator 0502 a plurality of times.
As shown in fig. 2, the X- α drive unit 03 includes an X- α drive substrate 0301, an X piezoelectric driver 0302, an α piezoelectric driver 0303, and an X- α drive wear pad 0304.
Wherein the X-alpha drive baseplate 0301 is connected to a drive rod rest 01. The X piezoelectric driver 0302 is connected to an X-a driving substrate 0301. The alpha piezoelectric driver 0303 is connected to the X piezoelectric driver 0302. The X-alpha drive wear pad 0304 is connected to an alpha piezoelectric driver 0303. Specifically, the X- α drive wear pad 0304 is arranged tangentially to the drive shaft 02.
The deformation direction of the X piezoelectric driving piece 0302 is along the axial direction of the sample rod, and the periodic motion of 'slow deformation and fast recovery' drives the driving shaft 02 to translate along the axial direction. When the X piezoelectric driving piece 0302 is slowly deformed, static friction is formed between the X-alpha driving wear-resisting piece 0304 and the driving shaft 02, so that the driving shaft 02 is driven to synchronously move. When the voltage applied to the X piezoelectric driver 0302 disappears, the X piezoelectric driver 0302 quickly returns, and sliding friction is generated between the X- α driving wear pad 0304 and the driving shaft 02. Due to inertia the position of the drive shaft 02 remains unchanged or only small displacements are produced. Thus, accumulation of displacement can be realized through the periodical voltage signals, so that large displacement movement of the sample rod in the X direction is realized. The deformation direction of the alpha piezoelectric driving piece 0303 is tangential to the driving shaft 02, the driving shaft 02 is continuously driven to rotate under the periodic motion of 'slow deformation and fast recovery', and 360-degree rotation motion can be realized through accumulation of displacement.
Preferably, the three-degree-of-freedom nano-manipulation and biaxial tilting transmission electron microscope sample rod comprises a plurality of groups of X-alpha driving units 03, and the groups of X-alpha driving units 03 are uniformly distributed at intervals along the circumferential direction of the driving shaft 02.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be appreciated by persons skilled in the art that the above embodiments are not intended to limit the invention in any way, and that all technical solutions obtained by means of equivalent substitutions or equivalent transformations fall within the scope of the invention.
Claims (10)
1. A three degree of freedom nano-manipulation and dual axis tilting transmission electron microscope sample rod, comprising: the X-alpha driving unit, the Y-Z driving unit and the beta driving unit are arranged on the driving rod frame;
the driving shaft can move along the X direction and is arranged in the driving rod frame in a sliding way;
the X-alpha driving unit is arranged on the driving rod frame and connected to the driving shaft to drive the driving shaft to rotate and enable the driving shaft to move along the X direction;
one end of the Y-Z driving unit is connected to the driving shaft and the other end is connected to the beta driving unit;
the Y-Z driving unit includes: the Y-Z piezoelectric driving piece, the joint ball seat, the joint ball, the first pressing piece, the second pressing piece and the switching copper pipe;
one end of the switching copper pipe is connected to the driving shaft, and the other end of the switching copper pipe is connected with one end of the Y-Z piezoelectric driving piece;
the joint ball seat is connected to the other end of the Y-Z piezoelectric driving piece;
the joint ball is arranged in the ball socket groove of the joint ball seat;
the first press piece is connected to the second press piece, and the first press piece and the second press piece are pressed and connected to the joint ball;
the beta drive unit includes: the device comprises a beta-drive substrate, a beta-piezoelectric drive piece, a beta-drive wear-resisting piece, a beta-drive fan-shaped rotor and a probe;
the beta drive base plate is connected to a side of the second press member remote from the first press member;
the beta piezoelectric driving piece is connected to the beta driving base plate;
the beta drive wear pad is connected to the beta piezoelectric driver;
the beta-drive sector mover is rotatably connected to the second pressing member along an axis perpendicular to the drive shaft;
the probe is connected to the beta-drive sector mover;
and the beta-drive wear-resisting piece is abutted against the beta-drive fan-shaped rotor.
2. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 1, wherein,
the beta drive unit further comprises: the device comprises a shaft piece, a bearing and a shaft seat;
the shaft piece is connected to the shaft seat;
the shaft member and the shaft seat are connected to the second pressing member;
the beta driving fan-shaped rotor is provided with an arc through hole and an arc part;
the shaft piece penetrates through the arc-shaped through hole and is connected with the shaft seat;
the bearing is rotatably sleeved on the shaft piece and is in contact with the inner surface of the arc-shaped part;
the beta drive wear pad is in contact with an outer surface of the arcuate portion.
3. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 2, wherein,
the beta-drive fan-shaped rotor is also provided with a probe fixing boss;
the probe fixing boss is internally provided with a probe fixing threaded hole and a probe fixing through hole;
the beta driving unit further comprises a probe fixing screw;
the probe is inserted into the probe-fixing through hole and is engaged with the probe-fixing screw hole by the probe-fixing screw to thereby press the probe.
4. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 2, wherein,
the beta drive unit also comprises a beta drive elastic connecting component;
the shaft member and the shaft seat are elastically connected to the second pressing piece through the beta-driving elastic connecting component;
the beta-drive elastic connecting assembly elastically presses the shaft piece and the shaft seat, so that the bearing presses the inner surface of the arc-shaped part.
5. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 4, wherein,
the beta-drive elastic connecting component comprises a plurality of screws and springs;
the screw penetrates through the corresponding through hole of the shaft piece or the shaft seat to be meshed with the corresponding threaded hole of the second pressing piece;
the spring is sleeved in the screw and is positioned between the screw cap of the screw and the shaft piece or the shaft seat;
the spring is in a compressed state to press the shaft or the shaft seat toward the second pressing member.
6. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 1, wherein,
the second pressing piece is provided with a beta driving substrate fixing boss which forms a certain angle and is symmetrically distributed;
a beta driving substrate positioning boss is arranged in the middle of the beta driving substrate fixing boss;
the beta driving substrate is arranged on the beta driving substrate fixing boss in a preset position through the beta driving substrate positioning boss;
the beta driving unit comprises two beta piezoelectric driving pieces and a beta driving wear pad;
the two beta piezoelectric driving pieces are respectively arranged on two sides of the beta driving base plate.
7. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 1, wherein,
the Y-Z driving unit comprises a Y-Z driving elastic connecting component;
the first press member and the second press member are connected together by the Y-Z driven elastic connection assembly.
8. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 7, wherein,
the Y-Z driving elastic connection assembly comprises a plurality of screws and springs;
the screw penetrates through the corresponding through hole of the first pressing piece to be meshed with the corresponding threaded hole of the second pressing piece;
the spring is sleeved in the screw and is positioned between the screw cap of the screw and the first pressing piece;
the spring is in a compressed state pressing the first pressing member toward the second pressing member.
9. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 1, wherein,
the X-alpha driving unit comprises an X-alpha driving substrate, an X piezoelectric driving piece, an alpha piezoelectric driving piece and an X-alpha driving wear pad;
the X-alpha driving base plate is connected to the driving rod frame;
the X piezoelectric driving piece is connected to the X-alpha driving substrate;
the alpha piezoelectric driving piece is connected to the X piezoelectric driving piece;
the X-alpha drive wear pad is connected to the alpha piezoelectric driver.
10. The three degree of freedom nanomanipulated and biaxially tilted transmission electron microscope sample rod of claim 9, wherein,
the three-degree-of-freedom nano-manipulation and biaxial tilting transmission electron microscope sample rod comprises a plurality of groups of X-alpha driving units;
the X-alpha driving units are uniformly distributed at intervals along the circumferential direction of the driving shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211086150.XA CN115295384B (en) | 2022-09-06 | 2022-09-06 | Three-degree-of-freedom nano-manipulation and double-shaft tilting transmission electron microscope sample rod |
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