CN115287735A - Clamping mechanism and electrochemical deposition equipment - Google Patents

Abstract

A clamping mechanism and electrochemical deposition equipment relate to the technical field of wafer electrochemical deposition. The clamping mechanism comprises a swinging clamping assembly, a cover body assembly, a transmission assembly and a driving assembly; the driving assembly is arranged on the cover body assembly and is in driving connection with the swinging clamping assembly through the transmission assembly so as to enable the swinging clamping assembly to be switched between a clamping state and a loosening state; a cover body cavity is arranged in the cover body assembly; the transmission assembly is positioned in the cavity of the cover body; one part of the swing clamping assembly is positioned in the cover body cavity, and the other part of the swing clamping assembly extends out of the cover body cavity; the swing clamp assembly includes a sealing diaphragm that seals the lid cavity. The electrochemical deposition apparatus includes a clamping mechanism. The invention aims to provide a clamping mechanism and electrochemical deposition equipment, which solve the technical problems that a sealing ring in the prior art is fast in abrasion and short in service life, and a clamping structure is easy to damage a wafer to a certain extent.

Description

Clamping mechanism and electrochemical deposition equipment

Technical Field

The invention relates to the technical field of wafer electrochemical deposition, in particular to a clamping mechanism and electrochemical deposition equipment.

Background

In the technical field of wafer electrochemical deposition (ECD), cu-TSV (copper-plated through silicon via) filling, high-aspect-ratio deep hole filling and other processes have the defects that plating solution cannot enter due to the existence of air in a microstructure, internal holes are generated by electrochemical deposition and the like; therefore, before the electrochemical deposition of the wafer, the chip is placed in the vacuum pre-wetting chamber, and the bubbles in the micro-holes to be plated of the chip are discharged by vacuumizing, so as to prevent the generation of process defects. The wafer clamping mechanism is used for clamping a wafer in a vacuum environment, and in the wafer clamping process, the vacuum in a vacuum pre-wetting cavity is ensured not to leak, and the flexible clamping is ensured to prevent the wafer from being damaged.

The prior art of wafer clamping mechanisms has the following disadvantages:

firstly, the sealing mode adopts the O-shaped sealing ring for sealing, and the abrasion is fast and the service life is short. The particles abraded by the sealing ring easily cause pollution in the vacuum cavity.

Secondly, adopt the cylinder directly to promote the centre gripping pole centre gripping wafer, for "hard" centre gripping mode, change and difference such as compressed air pressure and wafer size cause the clamp of wafer to break up or damage easily.

Disclosure of Invention

The invention aims to provide a clamping mechanism and electrochemical deposition equipment, which solve the technical problems that a sealing ring in the prior art is fast in abrasion and short in service life, and a clamping structure is easy to damage a wafer to a certain extent.

In order to achieve the purpose, the invention provides the following technical scheme:

a clamping mechanism comprises a swing clamping assembly, a cover body assembly, a transmission assembly and a driving assembly;

the driving assembly is arranged on the cover body assembly and is in driving connection with the swinging clamping assembly through the transmission assembly so as to enable the swinging clamping assembly to be switched between a clamping state and a loosening state;

a cover body cavity is arranged in the cover body assembly; the transmission assembly is positioned in the cover cavity chamber;

one part of the swing clamping assembly is positioned in the cover body cavity, and the other part of the swing clamping assembly extends out of the cover body cavity; the swing clamp assembly includes a sealing diaphragm that seals the cover cavity.

In any of the above technical solutions, optionally, the swing clamping assembly further includes a clamping rod, a support, and a swing rod;

the support is fixedly connected with the cover body assembly, the swing rod is pivoted on the support, and the transmission assembly is connected with the swing rod;

the sealing membrane comprises a sealing membrane part and a sealing connecting column part fixedly arranged in the center of the sealing membrane part;

the sealing film part is connected with the cover body assembly in a sealing mode so as to seal the cover body cavity;

the top of the sealing connection column part is fixedly connected with the swing rod, and the bottom of the sealing connection column part is fixedly connected with the clamping rod; the sealing connection column part and the transmission assembly are arranged at an included angle.

In any of the above solutions, optionally, the swing clamp assembly further includes a gland configured to compress the sealing membrane portion; the gland is fixedly connected with the support;

the sealing membrane part is made of polytetrafluoroethylene or silica gel;

the sealing film part is in a double-U shape;

optionally, a rotating shaft pivoted with the top of the swing rod is arranged on the support; the bottom of the swing rod is inserted into the top of the sealing connection column part; the side part of the swing rod is hinged with the transmission component.

In any of the above technical solutions, optionally, the number of the swing clamping assemblies is multiple; the plurality of swing clamping assemblies are arranged along the circumferential direction of the driving assembly;

the transmission assembly comprises a connecting rod and a sliding sleeve; the number of the connecting rods corresponds to the number of the swing clamping assemblies; the plurality of connecting rods are arranged on the periphery of the sliding sleeve;

one end of the connecting rod is hinged with the sliding sleeve, and the other end of the connecting rod is hinged with the swinging clamping component;

the driving assembly is in driving connection with the sliding sleeve.

In any of the above technical solutions, optionally, a guide shaft is fixedly arranged on the cover assembly; the sliding sleeve suit is in on the guiding axle, just the sliding sleeve can be followed the axial reciprocating motion of guiding axle.

In any of the above solutions, optionally, an elastic member is sleeved outside the guide shaft; the elastic piece is positioned between the cover body assembly and the sliding sleeve; the elastic piece has the tendency of enabling the sliding sleeve to be far away from the cover body assembly;

optionally, the resilient member is a spring.

In any of the above solutions, optionally, the cover assembly includes a sealing cover and a bracket; the bracket is fixed above the sealing cover, and the bracket and the sealing cover form the cavity of the cover body;

the driving assembly is fixed on the bracket;

the sealing membrane is connected with the sealing cover to seal the cavity of the cover body.

In any of the above technical solutions, optionally, an upper cover is fixedly connected above the bracket;

the driving assembly is arranged in a cavity formed by the upper cover and the bracket;

the material of the sealing cover is transparent organic glass.

In any of the above technical solutions, optionally, the cover assembly is fixedly connected with a plurality of positioning columns;

the positioning column and the part of the swing clamping assembly extending out of the cover body cavity are positioned on the same surface of the cover body assembly;

the driving assembly comprises an air cylinder, a hydraulic cylinder or a motor.

An electrochemical deposition apparatus includes a clamping mechanism.

The invention has the following beneficial effects:

according to the clamping mechanism and the electrochemical deposition equipment, the driving assembly drives the transmission assembly, and then the transmission assembly drives the swinging clamping assembly to switch the swinging clamping assembly between the clamping state and the loosening state, the driving mode improves the movement flexibility of the clamping assembly through the transmission assembly, and the damage problem of clamped articles is reduced to a certain extent; when the cover body assembly is used for being connected with other structures and forming a vacuum chamber below the cover body assembly, the sealing diaphragm can effectively seal the cover body chamber, so that the cover body chamber is not communicated with the vacuum chamber; the sealing diaphragm is a diaphragm sealing structure without a sealing ring, the sealing effect is good, no abrasion is caused, no pollution is caused, the service life is long, and meanwhile, the swinging clamping assembly moves to clamp articles or loosen the articles under the condition that the vacuum does not leak through the deformation of the diaphragm.

In order to make the aforementioned and other objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a clamping mechanism according to an embodiment of the present invention;

FIG. 2 is a top view of a clamping mechanism provided in accordance with an embodiment of the present invention;

FIG. 3 is a bottom view of a clamping mechanism provided by an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a swing clamp assembly and a cover assembly according to an embodiment of the present invention;

FIG. 5 is a schematic structural diagram of a swing clamping assembly according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a sealing membrane according to an embodiment of the present invention.

Icon: 100-swing clamp assembly; 110-a clamping bar; 120-a rotating shaft; 130-a gland; 140-sealing the membrane; 141-sealing the membrane portion; 142-a sealed connection post portion; 150-a support; 160-oscillating bar;

200-a cover assembly; 210-a sealing cover; 220-a bracket; 240-upper cover; 250-a guide shaft;

300-a transmission assembly; 310-a connecting rod; 320-a sliding sleeve; 400-an elastic member; 500-a drive assembly; 600-positioning column.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships that the present product is conventionally placed in use, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Some embodiments of the invention are described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

Examples

The embodiment provides a clamping mechanism and an electrochemical deposition device; referring to fig. 1 to 6, fig. 1 is a half-sectional schematic view of a clamping mechanism provided in this embodiment; fig. 2 is a top view of the clamping mechanism provided in the present embodiment, in which the structures of the bracket, the upper cover, the driving assembly, and the like are not shown; FIG. 3 is a bottom view of the clamping mechanism provided in this embodiment; FIG. 4 is a schematic structural view of the swing clamp assembly and the cover assembly according to the present embodiment, in which only a portion of the cover assembly is shown; fig. 5 is a schematic structural diagram of the swing clamping assembly provided in this embodiment, and fig. 6 is a schematic half-sectional structural diagram of the sealing membrane.

The clamping mechanism provided by the embodiment is used for clamping a sheet object in a vacuum environment, such as a wafer in the vacuum environment. The clamping mechanism provided by the embodiment can be applied to electrochemical deposition equipment, can also be applied to wet cleaning equipment in an expanded mode, and has a wide application market prospect.

Referring to fig. 1-6, the clamping mechanism includes a swing clamp assembly 100, a cover assembly 200, a transmission assembly 300, and a drive assembly 500. Wherein the swing clamp assembly 100 is used to clamp an article.

The driving assembly 500 is disposed on the cover assembly 200, and the driving assembly 500 is drivingly connected to the swing clamping assembly 100 through the transmission assembly 300, so that the swing clamping assembly 100 is switched between a clamping state and a releasing state; for example, the fixed end of drive assembly 500 is fixedly attached to cover assembly 200, and the drive end of drive assembly 500 drives oscillating clamp assembly 100 to clamp or unclamp an article via actuator assembly 300. The article of this embodiment may be a sheet or the like, such as a wafer.

A cover cavity is arranged inside the cover assembly 200; the transmission assembly 300 is located within the cover chamber.

A portion of the swing clamp assembly 100 is located within the cover chamber and another portion extends out of the cover chamber; the swing clamp assembly 100 includes a sealing diaphragm 140 that seals the cover cavity.

In the clamping mechanism of the embodiment, the driving assembly 500 drives the transmission assembly 300, and then the transmission assembly 300 drives the swing clamping assembly 100, so that the swing clamping assembly 100 is switched between the clamping state and the releasing state, the driving mode improves the flexibility of the swing clamping assembly 100 in movement through the transmission assembly 300, and the problem of damage to clamped articles is reduced to a certain extent; when the cover assembly 200 is used for connecting with other structures and a vacuum chamber is formed below the cover assembly 200, the sealing membrane 140 can effectively seal the cover chamber, so that the cover chamber is not communicated with the vacuum chamber; the sealing diaphragm 140 is a diaphragm sealing structure without a sealing ring, which has good sealing effect, no abrasion, no pollution and long service life, and simultaneously realizes the swinging of the clamping assembly 100 to clamp or loosen articles under the condition of vacuum without leakage through the deformation of the diaphragm.

Referring to fig. 1-6, in an alternative embodiment of the present invention, the swing clamping assembly 100 further includes a clamping bar 110, a support 150, and a swing bar 160. The gripping bar 110 is used to grip an item.

The support 150 is fixedly connected to the cover assembly 200. For example, the support 150 may be fastened to the cover assembly 200 by screwing, adhesive clamping, or the like.

The swing link 160 is pivotally connected to the support 150, that is, the swing link 160 rotates around the support 150.

The transmission assembly 300 is connected with the swing rod 160; optionally, the transmission assembly 300 is hinged to the swing rod 160, and is hinged to the swing rod 160 through the transmission assembly 300, so as to improve the flexibility of the transmission assembly 300 for driving the swing clamping assembly 100 to move, and reduce the problem of damage to the clamped article to some extent.

Alternatively, the sealing membrane 140 includes a sealing membrane portion 141 and a sealing connection pillar portion 142 fixedly disposed at the center of the sealing membrane portion 141.

Optionally, the sealing film portion 141 is sealingly connected with the lid assembly 200 to seal the lid cavity.

Alternatively, the top of the sealing connection pillar 142 is fixedly connected to the swing link 160, and the bottom of the sealing connection pillar 142 is fixedly connected to the clamping rod 110; the seal connection pillar portion 142 is disposed at an angle with respect to the transmission assembly 300, for example, the angle between the seal connection pillar portion 142 and the transmission assembly 300 is 80 degrees to 130 degrees, such as 85 degrees, 90 degrees, 100 degrees, 110 degrees, etc.

In this embodiment, the driving assembly 500 drives the connection swing link 160 through the transmission assembly 300, so that the swing link 160 swings around the support 150, and the sealing connection pillar portion 142 swings around the support 150, and the clamping rod 110 swings around the support 150 to clamp or release the article, thereby clamping and releasing the wafer.

In this embodiment, the support 150 and the swing link 160 are located in the cover chamber; the sealing connection post 142 is located outside the lid cavity; the gripper bar 110 is located outside the cover cavity, such as in a vacuum chamber located outside the cover cavity.

Referring to fig. 4-6, in an alternative version of the present embodiment, the swing clamp assembly 100 further includes a gland 130 configured to compress the sealing membrane portion 141; the gland 130 is fixedly connected with the support 150; the pressing cover 130 presses the sealing diaphragm 140 tightly, so that the sealing diaphragm 140 seals the cover cavity, that is, the sealing diaphragm 140 seals the vacuum cavity, so that the upper and lower spaces of the sealing diaphragm 140 are not communicated with each other, thereby achieving sealing.

Optionally, the material of the sealing film portion 141 is teflon or silicone, or other flexible materials. Among them, polytetrafluoroethylene is known by its english name as Poly tetra fluoroethylene, abbreviated as PTFE.

Alternatively, the sealing film portion 141 has a double U shape; adopt two U-shaped flexible construction through sealed membrane portion 141 to make sealed connection post portion 142 can along axial and radial motion, and two U-shaped flexible construction have sealed boss, and sealed effect is better.

Optionally, the support 150 is provided with a rotating shaft 120 pivotally connected to the top of the swing link 160, that is, the swing link 160 is mounted on the support 150 through the rotating shaft 120, and rotates around the rotating shaft 120 through the swing link 160, so as to drive the clamping rod 110 to swing.

Optionally, the bottom of the swing link 160 is plugged on top of the sealing connection pillar portion 142; the side of the swing link 160 is hinged to the driving assembly 300.

Referring to fig. 1-4, in an alternative of the present embodiment, the number of swing clamp assemblies 100 is plural; a plurality of swing clamp assemblies 100 are disposed along the circumferential direction of the driving assembly 500. Alternatively, a plurality of swing clamp assemblies 100 are uniformly arranged along the circumferential direction of the driving assembly 500. Optionally, the number of swing clamp assemblies 100 is 3, 4, or 6, or other numbers.

Optionally, the number of the swing clamping assemblies 100 is 4, and 4 swing clamping assemblies 100 are symmetrically mounted on the cover assembly 200 to better clamp the wafer.

Optionally, drive assembly 500 is drivingly connected to sliding sleeve 320. The transmission assembly 300 includes a connecting rod 310 and a sliding sleeve 320; the number of links 310 corresponds to the number of swing clamp assemblies 100, for example, when the number of swing clamp assemblies 100 is 4, the number of links 310 is 4.

A plurality of links 310 are disposed in a circumferential direction of the sliding sleeve 320; alternatively, the plurality of connecting rods 310 are uniformly arranged in the circumferential direction of the sliding sleeve 320. Through the sliding sleeve 320, so that the driving assembly 500 transmits the driving force to the plurality of connecting rods 310 to enable the swing clamping assembly 100 to be clamped or loosened better.

Optionally, one end of the connecting rod 310 is hinged to the sliding sleeve 320, and the other end of the connecting rod 310 is hinged to the swing clamping assembly 100, so as to form a similar linkage mechanism, and the movement of the sliding sleeve 320 can drive the clamping rod 110 in the swing clamping assembly 100 to move through the connecting rod 310, so as to clamp and release the wafer and other articles. Optionally, the sliding sleeve 320 moves downward in a vertical direction under the driving of the driving assembly 500.

Referring to fig. 1, in an alternative embodiment, a guide shaft 250 is fixedly disposed on the cover assembly 200; the sliding sleeve 320 is sleeved on the guide shaft 250, and the sliding sleeve 320 can reciprocate along the axial direction of the guide shaft 250. For example, the axial direction of the guide shaft 250 is the vertical direction. The guide shaft 250 guides the moving direction of the sliding sleeve 320, so as to ensure the stability of the article clamping by the swing clamping assembly 100.

Referring to fig. 1, in an alternative embodiment, the guide shaft 250 is covered with an elastic member 400; the elastic member 400 is located between the cover assembly 200 and the sliding sleeve 320; the elastic member 400 tends to move the sliding sleeve 320 away from the cover assembly 200; by the elastic member 400, when the driving assembly 500 withdraws the driving force, the sliding sleeve 320 can be reset under the elastic potential energy of the elastic member 400 and drives the transmission assembly 300 to reset, for example, clamp the object.

Alternatively, the resilient member 400 is a spring, or other resilient member.

Referring to fig. 1-4, in an alternative embodiment, the cover assembly 200 includes a sealing cover 210 and a bracket 220; the bracket 220 is fixed above the sealing cover 210, and the bracket 220 and the sealing cover 210 form a cover cavity; the sealing cover 210 and the bracket 220 facilitate the manufacturing process of the cap assembly 200.

The driving assembly 500 is fixed to the bracket 220.

The sealing membrane 140 is coupled to the sealing cap 210 to seal the lid cavity.

Optionally, the material of the sealing cover 210 is transparent organic glass. The sealing cover 210 is made of transparent organic glass so as to facilitate observation; for example, the sealing cover 210 covers the vacuum chamber by using a transparent organic glass material so as to observe the wafer in the vacuum chamber.

Referring to fig. 1 to 3, in an alternative embodiment, an upper cover 240 is fixedly connected to the upper side of the bracket 220.

The driving assembly 500 is disposed in a cavity formed by the upper housing 240 and the bracket 220; the driving assembly 500 is protected by the upper cover 240.

Referring to fig. 1-3, in an alternative embodiment, a plurality of positioning posts 600 are fixedly connected to the cover assembly 200. Optionally, the number of positioning pillars 600 is 3, 4, or 6, or other numbers. Positioning posts 600 are used for positioning of articles, such as wafers.

The positioning column 600 and the part of the swing clamping assembly 100 extending out of the cover cavity are positioned on the same surface of the cover assembly 200; the positioning column 600 is used for positioning the article, so that the article is prevented from being inclined when being clamped, and clamping failure is prevented.

Alternatively, the drive assembly 500 includes an air cylinder, hydraulic cylinder, or electric motor, or in other ways.

In this embodiment, when the clamping mechanism clamps the wafer, the sealing diaphragm 140 adopts a double U-shaped flexible structure, so that the sealing between the cavity of the cover body and the inside and outside of the vacuum chamber is realized in the wafer clamping process, and the vacuum degree in the vacuum chamber is ensured. Meanwhile, the positioning column 600 is used for positioning, the elastic piece 400 drives the transmission assembly 300 to flexibly clamp the wafer, and damage to the wafer is avoided.

In the clamping mechanism of this embodiment, a sealing diaphragm 140, which is a diaphragm sealing structure without a sealing ring, is used between the swing clamping assembly 100 and the sealing cover 210, and the movement of the clamping rod 110 is realized by the deformation of the sealing diaphragm 140 under the condition of ensuring the vacuum degree of the cavity. The swing clamp assembly 100 is connected to the sliding sleeve 320 by a link 310 to form a linkage mechanism, and the sliding sleeve 320 can move up and down in the vertical direction along the guide shaft 250. The release of the clamping bar 110 is accomplished by the driving assembly 500 pushing the sliding sleeve 320 to move downward and the transmission assembly 300 moving the swing clamping assembly 100. The elastic member 400 pushes the sliding sleeve 320 to move upwards, and the transmission assembly 300 drives the swing clamping assembly 100 to realize flexible clamping of the wafer, so that damage to the wafer is avoided.

In this embodiment, the movement process of the clamping mechanism is, for example: firstly, the driving end of the driving assembly 500 is extended out, the sliding sleeve 320 is pushed to move downwards along the vertical direction, the connecting rod 310 of the transmission assembly 300 drives the swing clamping assembly 100 to open all the clamping rods 110, the whole wafer clamping mechanism moves to the wafer clamping position, the electromagnetic valve is reversed, and the driving end of the driving assembly 500 is retracted. Meanwhile, the sliding sleeve 320 is moved upward in the vertical direction by the elastic member 400, and the connecting rod 310 drives the swing clamp assembly 100 to close all the clamping rods 110, so as to clamp the wafer to be processed. The sealing cover 210 is attached to the vacuum chamber, the vacuum chamber is vacuumized, the vacuum degree is maintained, the pressure is released in the chamber after the process treatment time is reached, the driving end of the driving assembly 500 drives the clamping rod 110 to be opened again, and the wafer is taken out.

The embodiment also provides an electrochemical deposition device, which comprises the clamping mechanism in any embodiment. According to the electrochemical deposition equipment, the driving assembly 500 of the clamping mechanism drives the transmission assembly 300, and then the transmission assembly 300 drives the swinging clamping assembly 100, so that the swinging clamping assembly 100 is switched between a clamping state and a loosening state, the driving mode improves the movement flexibility of the swinging clamping assembly 100 through the transmission assembly 300, and the damage problem of clamped articles is reduced to a certain extent; when the cover assembly 200 is used for connecting with other structures and a vacuum chamber is formed below the cover assembly 200, the sealing membrane 140 can effectively seal the cover chamber, so that the cover chamber is not communicated with the vacuum chamber; the sealing diaphragm 140 is a diaphragm sealing structure without a sealing ring, which has good sealing effect, no abrasion, no pollution and long service life, and simultaneously realizes the swinging of the clamping assembly 100 to clamp or loosen articles under the condition of vacuum without leakage through the deformation of the diaphragm.

The electrochemical deposition apparatus provided by this embodiment includes the above-mentioned clamping mechanism, and the technical features of the above-mentioned disclosed clamping mechanism are also applicable to this electrochemical deposition apparatus, and the technical features of the above-mentioned disclosed clamping mechanism are not described repeatedly. The electrochemical deposition apparatus of the present embodiment has the advantages of the clamping mechanism, and the advantages of the clamping mechanism disclosed above will not be described repeatedly.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A clamping mechanism, comprising a swing clamping assembly (100), a cover assembly (200), a transmission assembly (300) and a driving assembly (500);

the driving assembly (500) is arranged on the cover assembly (200), and the driving assembly (500) is in driving connection with the swinging clamping assembly (100) through the transmission assembly (300) so as to enable the swinging clamping assembly (100) to be switched between a clamping state and a loosening state;

a cover cavity is arranged in the cover body assembly (200); the transmission assembly (300) is located in the cover chamber;

a portion of the swing clamp assembly (100) is located within the lid chamber and another portion extends out of the lid chamber; the swing clamp assembly (100) includes a sealing diaphragm (140) that seals the cover cavity.

2. The clamping mechanism of claim 1, wherein said swing clamp assembly (100) further comprises a clamping bar (110), a mount (150), and a swing link (160);

the support (150) is fixedly connected with the cover body assembly (200), the swing rod (160) is pivoted on the support (150), and the transmission assembly (300) is connected with the swing rod (160);

the sealing membrane (140) comprises a sealing membrane part (141) and a sealing connection column part (142) fixedly arranged at the center of the sealing membrane part (141);

the sealing film part (141) is connected with the cover body assembly (200) in a sealing mode to seal the cover body cavity;

the top of the sealing connection column part (142) is fixedly connected with the swing rod (160), and the bottom of the sealing connection column part (142) is fixedly connected with the clamping rod (110); the sealing connection column part (142) and the transmission component (300) are arranged in an included angle mode.

3. The clamping mechanism of claim 2, wherein the swing clamp assembly (100) further comprises a gland (130) configured to compress the sealing membrane portion (141); the gland (130) is fixedly connected with the support (150);

the sealing film part (141) is made of polytetrafluoroethylene or silica gel;

the sealing film part (141) is in a double U shape;

optionally, a rotating shaft (120) pivoted to the top of the swing rod (160) is arranged on the support (150); the bottom of the swing rod (160) is inserted into the top of the sealing connection column part (142); the side part of the swing rod (160) is hinged with the transmission assembly (300).

4. Clamping mechanism according to claim 1, characterized in that said oscillating clamping assembly (100) is in a plurality; a plurality of the swing clamping assemblies (100) are arranged along the circumferential direction of the driving assembly (500);

the transmission assembly (300) comprises a connecting rod (310) and a sliding sleeve (320); the number of the connecting rods (310) corresponds to the number of the swing clamping assemblies (100); a plurality of the connecting rods (310) are arranged on the circumference of the sliding sleeve (320);

one end of the connecting rod (310) is hinged with the sliding sleeve (320), and the other end of the connecting rod (310) is hinged with the swing clamping assembly (100);

the driving assembly (500) is in driving connection with the sliding sleeve (320).

5. The clamping mechanism according to claim 4, characterized in that a guide shaft (250) is fixedly arranged on the cover body assembly (200); the sliding sleeve (320) is sleeved on the guide shaft (250), and the sliding sleeve (320) can reciprocate along the axial direction of the guide shaft (250).

6. The clamping mechanism of claim 5, wherein said guide shaft (250) is externally covered with an elastic member (400); the elastic piece (400) is positioned between the cover body assembly (200) and the sliding sleeve (320); the elastic piece (400) has the tendency to enable the sliding sleeve (320) to be away from the cover body assembly (200);

optionally, the resilient member (400) is a spring.

7. The clamping mechanism of claim 1, wherein the cover assembly (200) comprises a sealing cover (210) and a bracket (220); the bracket (220) is fixed above the sealing cover (210), and the bracket (220) and the sealing cover (210) form the cover cavity;

the driving assembly (500) is fixed on the bracket (220);

the sealing membrane (140) is coupled to the sealing cap (210) to seal the lid cavity.

8. The clamping mechanism according to claim 7, characterized in that an upper cover (240) is fixedly connected above the bracket (220);

the driving assembly (500) is arranged in a cavity formed by the upper cover (240) and the bracket (220);

the sealing cover (210) is made of transparent organic glass.

9. The clamping mechanism of claim 1, wherein said cover assembly (200) is fixedly connected with a plurality of positioning posts (600);

the positioning column (600) and the part of the swing clamping assembly (100) extending out of the cover cavity are positioned on the same surface of the cover assembly (200);

the drive assembly (500) includes a pneumatic cylinder, a hydraulic cylinder, or an electric motor.

10. An electrochemical deposition apparatus comprising a clamping mechanism as claimed in any one of claims 1 to 9.

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