CN115278969A - Automatic temperature control device - Google Patents
Automatic temperature control device Download PDFInfo
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- CN115278969A CN115278969A CN202210898543.4A CN202210898543A CN115278969A CN 115278969 A CN115278969 A CN 115278969A CN 202210898543 A CN202210898543 A CN 202210898543A CN 115278969 A CN115278969 A CN 115278969A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/06—Control, e.g. of temperature, of power
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0233—Industrial applications for semiconductors manufacturing
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Control Of Temperature (AREA)
Abstract
The invention provides an automatic temperature control device, comprising: the temperature control output device and at least one vortex tube; the first exhaust port of the vortex tube exhausts gas with a first temperature, the second exhaust port of the vortex tube exhausts gas with a second temperature, and the temperature of the gas with the first temperature is higher than that of the gas with the second temperature; the temperature control output device is characterized in that a cavity is arranged in the temperature control output device, a temperature adjusting pipeline is arranged in the cavity, and the temperature adjusting pipeline is used for introducing the first temperature gas and/or the second temperature gas to adjust the temperature of the temperature control output device. The automatic temperature control device provided by the invention not only has a simple structure, but also has low manufacturing and maintenance costs.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to an automatic temperature control device.
Background
In a semiconductor manufacturing process, it is necessary to control the temperature of equipment used in the process, and a combination of a heating coil and a thermometer is often used as a control scheme of a temperature control system in conventional temperature control systems. However, such control schemes require the expenditure of more power to maintain the temperature. Taking the photo-etching glue-spreading developing device as an example, when the photo-etching glue-spreading developing device needs to be heated, a heating coil below a heating plate is relied on. However, the heating coil is affected by the material and the long-term heating and cooling, so that the problem that the heating coil is broken due to stress is easily caused, and the probability of the risk of breaking the heating coil is correspondingly improved if the number of the heating coils installed in the device is larger.
Therefore, how to provide an automatic temperature control device to overcome the above-mentioned defects in the prior art is becoming one of the technical problems to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide an automatic temperature control device to solve the problem that in the prior art, the manufacturing and maintenance cost of a heating device is increased due to the fact that a heating coil is easy to break in the heating process by the aid of the heating coil.
In order to achieve the above object, the present invention provides an automatic temperature control device, comprising: the temperature control output device and at least one vortex tube;
the first exhaust port of the vortex tube exhausts gas with a first temperature, the second exhaust port of the vortex tube exhausts gas with a second temperature, and the temperature of the gas with the first temperature is higher than that of the gas with the second temperature;
the temperature control output device is characterized in that a cavity is arranged in the temperature control output device, a temperature adjusting pipeline is arranged in the cavity, and the temperature adjusting pipeline is used for introducing the first temperature gas and/or the second temperature gas to adjust the temperature of the temperature control output device.
Optionally, the system further comprises a first pipeline and a second pipeline;
wherein the first pipeline is connected with the first exhaust port and is used for conveying the first temperature gas;
the second pipeline is connected with the second exhaust port and is used for conveying the second temperature gas.
Alternatively to this, the first and second parts may,
when the temperature control output device performs heating operation, the temperature adjusting pipeline is connected with one end of the first pipeline, the other end of the first pipeline is connected with the first exhaust port, and the first temperature gas enters the temperature adjusting pipeline through the first pipeline to heat the temperature control output device;
when the temperature control output device is cooled, the temperature adjusting pipeline is connected with one end of the second pipeline, the other end of the second pipeline is connected with the second exhaust port, and second temperature gas enters the temperature adjusting pipeline through the second pipeline to cool the temperature control output device.
Optionally, a stop valve is respectively disposed on the first pipeline and the second pipeline, and the stop valve is configured to control on/off and/or flow of gas in the first pipeline and the second pipeline.
Optionally, the temperature control system further comprises at least one temperature controller, wherein the temperature controller is configured to adjust a ratio of the first temperature gas and/or the second temperature gas, and introduce the adjusted first temperature gas and/or the adjusted second temperature gas into the temperature adjustment pipeline, so as to adjust the temperature of the temperature control output device.
Optionally, when there is one temperature controller, the temperature controller is connected to the first pipeline and the second pipeline, the first temperature gas and the second temperature gas enter the temperature controller and are mixed to form a third temperature gas, and the temperature controller is configured to deliver the third temperature gas to the temperature adjustment pipeline to adjust the temperature of the temperature control output device.
Optionally, when there are at least two of the temperature controllers:
the first temperature controller and the second temperature controller are respectively connected with the first pipeline and the second pipeline, the first temperature gas and the second temperature gas enter the first temperature controller to be mixed to form a third temperature gas, and the first temperature gas and the second temperature gas enter the second temperature controller to be mixed to form a fourth temperature gas;
the first temperature controller delivers the third temperature gas to the temperature regulated conduit;
the second temperature controller delivers the fourth temperature gas to the temperature regulation duct;
the third temperature gas and the fourth temperature gas jointly regulate the temperature of the temperature control output device.
Optionally, the temperature control device further comprises a third pipeline, one end of the third pipeline is connected with the temperature controller, the other end of the third pipeline is connected with the temperature adjusting pipeline, and the third pipeline is used for conveying the third temperature gas and/or the fourth temperature gas to the temperature adjusting pipeline so as to adjust the temperature of the temperature control output device.
Optionally, a temperature display is arranged on the surface of the temperature controller, and the temperature display is used for displaying the temperature of the third temperature gas and the fourth temperature gas delivered by the temperature controller.
Optionally, the shape of the temperature adjusting pipe includes: an exhaust pipeline is further arranged in the temperature control output device, and the exhaust pipeline is communicated with the temperature adjusting pipeline and used for discharging gas in the temperature adjusting pipeline.
Compared with the prior art, the automatic temperature control device provided by the invention has the following beneficial effects:
the invention provides an automatic temperature control device, which comprises: the temperature control output device and at least one vortex tube; the first exhaust port of the vortex tube exhausts gas with a first temperature, the second exhaust port of the vortex tube exhausts gas with a second temperature, and the temperature of the gas with the first temperature is higher than that of the gas with the second temperature; the temperature control output device is characterized in that a cavity is arranged in the temperature control output device, a temperature adjusting pipeline is arranged in the cavity, and the temperature adjusting pipeline is used for introducing the first temperature gas and/or the second temperature gas to adjust the temperature of the temperature control output device. The automatic temperature control device provided by the invention discharges the first temperature gas and the second temperature gas with different temperatures by using the vortex tube, leads the first temperature gas and/or the second temperature gas into the temperature adjusting pipeline arranged in the temperature control output device, and adjusts the temperature of the temperature control output device by using the temperature adjusting pipeline. Therefore, in the using process, the gas with different temperatures can be conveyed according to the temperature requirement of the temperature control output device: when the temperature control output device needs to be heated, the first temperature gas with higher temperature is input into the temperature adjusting pipeline, and when the temperature control output device needs to be cooled, the second temperature gas is conveyed into the temperature adjusting pipeline so as to carry out cooling operation. Meanwhile, the first temperature gas and the second temperature gas can be mixed and then input into the temperature control output device, and the temperature of the gas input into the temperature adjusting pipeline is controlled by controlling the gas flow and the proportion of the first temperature gas and the second temperature gas, so that the temperature control output device can be adjusted to any temperature. Therefore, the automatic temperature control device provided by the invention is simple in structure and low in manufacturing and maintenance cost.
Drawings
Fig. 1 is a schematic structural diagram of an automatic temperature control device according to an embodiment of the present invention;
FIG. 2 is a side view of a temperature controlled output device provided in accordance with one embodiment of the present invention;
fig. 3 is a diagram of an application of an automatic temperature control device according to an embodiment of the present invention;
wherein the reference numbers are as follows:
100-vortex tube, 101-first exhaust port, 102-second exhaust port, 200-temperature controller, 201-first temperature controller, 202-second temperature controller, 300-temperature control output device, 301-temperature regulation pipeline, 302-exhaust pipeline, 303-cavity, 401-first pipeline, 402-second pipeline, 403-third pipeline.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention. It should be understood that the drawings are not necessarily to scale, showing the particular construction of the invention, and that the illustrative features in the drawings, which are used to illustrate certain principles of the invention, are also somewhat simplified. Specific design features of the invention disclosed herein, including, for example, specific dimensions, orientations, locations, and configurations, will be determined in part by the particular intended application and use environment. In the embodiments described below, the same reference numerals are used in common between different drawings to denote the same portions or portions having the same functions, and a repetitive description thereof will be omitted. In this specification, like reference numerals and letters are used to designate like items, and therefore, once an item is defined in one drawing, further discussion thereof is not required in subsequent drawings. These terms, as used herein, are interchangeable where appropriate.
In this embodiment, referring to fig. 1 to fig. 2, in particular, fig. 1 is a schematic structural diagram of an automatic temperature control device according to an embodiment of the present invention, fig. 2 is a side view of a temperature control output device according to an embodiment of the present invention, and as can be seen from fig. 1 and fig. 2, the automatic temperature control device includes: a temperature controlled output device 300 and at least one vortex tube 100; wherein the first exhaust port 101 of the vortex tube 100 exhausts a first temperature gas, the second exhaust port 102 of the vortex tube 100 exhausts a second temperature gas, and the temperature of the first temperature gas is higher than that of the second temperature gas; a cavity 303 is arranged in the temperature control output device 300, a temperature adjusting pipeline 301 is arranged in the cavity 303, and the temperature adjusting pipeline 301 is used for introducing the first temperature gas and/or the second temperature gas to adjust the temperature of the temperature control output device 300.
In this way, according to the automatic temperature control device provided by the present invention, the vortex tube 100 is used to discharge the first temperature gas and the second temperature gas with different temperatures, and the first temperature gas and/or the second temperature gas are introduced into the temperature adjusting pipeline 301 disposed in the temperature control output device 300, and the temperature adjusting pipeline 301 is used to adjust the temperature of the temperature control output device 300. Thus, gases with different temperatures can be delivered during use according to the temperature requirements of the temperature controlled output device 300: when the temperature control output device 300 needs to be heated, the first temperature gas having a higher temperature is input to the temperature adjustment duct 301, and when the temperature control output device 300 needs to be cooled, the second temperature gas is delivered into the temperature adjustment duct 301 to perform a cooling operation. Meanwhile, the first temperature gas and the second temperature gas may be mixed and then input into the temperature control output device 300, and the temperature of the gas input into the temperature adjusting pipeline 301 is controlled by controlling the gas flow and the proportion of the first temperature gas and the second temperature gas, so that the temperature control output device 300 can be adjusted to any temperature. Therefore, the automatic temperature control device provided by the invention is simple in structure and low in manufacturing and maintenance cost.
Referring to fig. 2, fig. 2 is an application diagram of an automatic temperature control device according to an embodiment of the present invention, and as can be seen from the application diagram, the automatic temperature control device further includes a first pipe 401 and a second pipe 402; wherein the first pipe 401 is connected with the first exhaust port 101 and is used for conveying the first temperature gas; the second pipe 402 is connected to the second exhaust port 102 and is used to convey the second temperature gas. In one preferred embodiment, when the temperature controlled output device 300 performs a heating operation, the temperature adjusting duct 301 is connected to one end of the first duct 401, the other end of the first duct 401 is connected to the first exhaust port 101, and the first temperature gas enters the temperature adjusting duct 301 through the first duct 401 to heat the temperature controlled output device 300; when the temperature control output device 300 performs a cooling operation, the temperature adjustment duct 301 is connected to one end of the second duct 402, the other end of the second duct 402 is connected to the second exhaust port 102, and the second temperature gas enters the temperature adjustment duct 301 through the second duct 402 to cool the temperature control output device 300. Therefore, a user can select to connect the temperature adjusting pipeline 301 with a corresponding pipeline according to requirements, so as to adjust the temperature of the temperature control output device 300.
It should be further noted that, when the temperature-controlled output device 300 is a heating plate in an apparatus used in a semiconductor manufacturing process, such as a photoresist coating developing apparatus, when the heating plate is heated, the first temperature gas separated by the vortex tube 100 heats the heating plate, so that the manufacturing and maintenance costs for heating the heating plate can be reduced.
In one preferred embodiment, a stop valve is disposed on each of the first pipeline 401 and the second pipeline 402, and the stop valve is used for controlling the on/off and/or flow rate of the gas in the first pipeline 401 and the second pipeline 402. Since the first pipe 401 and the second pipe 402 respectively convey the first temperature gas and the second temperature gas having different temperatures, the type of the gas flowing into the temperature adjustment pipe 301 is selected by using a shut-off valve provided in each of the first pipe 401 and the second pipe 402, when the temperature control output device 300 needs to be heated, the shut-off valve on the first pipe 401 is opened, the shut-off valve on the second pipe 402 is closed, and the heating operation is realized by introducing the first temperature gas into the temperature adjustment pipe 301. Accordingly, the cooling process is the same.
Preferably, the automatic temperature control device further includes at least one temperature controller 200, and the temperature controller 200 is configured to adjust a ratio of the first temperature gas and/or the second temperature gas, and introduce the adjusted first temperature gas and/or the adjusted second temperature gas into the temperature adjusting pipeline 301, so as to adjust the temperature of the temperature control output device 300. In one preferred embodiment, a temperature controller 200 is provided, the temperature controller 200 is connected to the first pipeline 401 and the second pipeline 402, the first temperature gas and the second temperature gas enter the temperature controller 200 to be mixed to form a third temperature gas, and the temperature controller 200 is used for delivering the third temperature gas to the temperature adjusting pipeline 301 to adjust the temperature of the temperature controlled output device 300. Referring to fig. 3, fig. 3 is a diagram of an application of an automatic temperature control device according to an embodiment of the present invention, and it can be seen that, in another preferred embodiment, the temperature controller 200 has at least two: wherein, a first temperature controller 201 and a second temperature controller 202 are respectively connected with the first pipeline 401 and the second pipeline 402, the first temperature gas and the second temperature gas enter the first temperature controller 201 to be mixed to form a third temperature gas, and the first temperature gas and the second temperature gas enter the second temperature controller 202 to be mixed to form a fourth temperature gas; the first temperature controller 201 delivers the third temperature gas to the temperature regulation duct 301; the second temperature controller 202 delivers the fourth temperature gas to the temperature regulation duct 301; the third temperature gas and the fourth temperature gas together regulate the temperature of the temperature controlled output device 300. Therefore, the temperature of the third temperature gas and/or the fourth temperature gas output by the temperature controller 200 into the temperature adjusting pipeline 301 is controlled by adjusting the flow rate and the proportion of the first temperature gas and the second temperature gas introduced into the temperature controller 200. Thereby ensuring that the temperature controlled output device 300 can be adjusted to the required temperature. It will be understood by those skilled in the art that when two or more vortex tubes 100 are provided, the number of temperature controllers 200 is adjusted accordingly. It should be further noted that the shape of the temperature adjustment pipe 301 includes a spiral shape or a plurality of circular rings with different diameters, and a plurality of air inlets are disposed on the temperature adjustment pipe 301. Therefore, the present invention can also realize the zone heating or cooling operation of the temperature controlled output device 300 by introducing the third temperature gas and the fourth temperature gas into different portions of the temperature adjusting duct 301.
Preferably, in one exemplary embodiment, the automatic temperature control device further includes a third pipe 403, one end of the third pipe 403 is connected to the temperature controller 200, the other end of the third pipe 403 is connected to the temperature adjustment pipe 301, and the third pipe 403 is used for delivering the third gas and/or the fourth temperature gas into the temperature adjustment pipe 301 to adjust the temperature of the temperature control output device 300. So configured, the third temperature gas and/or the fourth temperature gas can be delivered into the temperature control output device 300 through the third pipe 403.
Preferably, a temperature display (not shown) is disposed on a surface of the temperature controller 200, and the temperature display is used for displaying the temperature of the third temperature gas and the fourth temperature gas delivered by the temperature controller 200. Therefore, a user can conveniently observe the current temperature value through the temperature display, so that the gas flow and proportion of the first temperature gas and the second temperature gas can be conveniently controlled, and the temperature of the output third temperature gas and the output fourth temperature gas is guaranteed to be the required temperature.
Preferably, an exhaust duct 302 is further disposed in the temperature control output device 300, and the exhaust duct 302 is communicated with the temperature adjusting duct 301 and is used for exhausting the gas in the temperature adjusting duct 301. Thereby, it is ensured that the temperature regulating pipe 301 can continuously receive the input of the gas, so that the temperature controlled output device 300 maintains the same technical effect as the temperature of the input gas during the continuous gas input process.
In addition, the functional modules in the embodiments herein may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part. In addition, it is to be noted that the terms "first", "second", "third", and the like in the description are used only for distinguishing the respective components in the description, unless otherwise specified or indicated. Elements, steps, etc., rather than representing logical or sequential relationships between various components, elements, steps, etc.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example.
In summary, in the automatic temperature control device provided by the present invention, the vortex tube 100 is used to discharge the first temperature gas and the second temperature gas with different temperatures, and the first temperature gas and/or the second temperature gas are introduced into the temperature adjusting pipe 301 disposed in the temperature control output device 300, and the temperature adjusting pipe 301 is used to adjust the temperature of the temperature control output device 300. Thus, gases with different temperatures can be delivered during use according to the temperature requirements of the temperature controlled output device 300: when the temperature control output device 300 needs to be heated, the first temperature gas having a higher temperature is input to the temperature adjustment duct 301, and when the temperature control output device 300 needs to be cooled, the second temperature gas is delivered into the temperature adjustment duct 301 to perform a cooling operation. Meanwhile, the first temperature gas and the second temperature gas may be mixed and then input into the temperature control output device 300, and the temperature of the gas input into the temperature adjustment pipe 301 is controlled by controlling the gas flow rate and the proportion of the first temperature gas and the second temperature gas, so that the temperature control output device 300 can be adjusted to any temperature. Therefore, the automatic temperature control device provided by the invention is simple in structure and low in manufacturing and maintenance cost.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. An automatic temperature control device, comprising: the temperature control output device and at least one vortex tube;
the first exhaust port of the vortex tube exhausts gas with a first temperature, the second exhaust port of the vortex tube exhausts gas with a second temperature, and the temperature of the gas with the first temperature is higher than that of the gas with the second temperature;
the temperature control output device is characterized in that a cavity is arranged in the temperature control output device, a temperature adjusting pipeline is arranged in the cavity, and the temperature adjusting pipeline is used for introducing the first temperature gas and/or the second temperature gas to adjust the temperature of the temperature control output device.
2. An automatic temperature control device according to claim 1, further comprising a first pipe and a second pipe;
wherein the first pipeline is connected with the first exhaust port and is used for conveying the first temperature gas;
the second pipeline is connected with the second exhaust port and is used for conveying the second temperature gas.
3. An automatic temperature control device according to claim 2,
when the temperature control output device performs heating operation, the temperature adjusting pipeline is connected with one end of the first pipeline, the other end of the first pipeline is connected with the first exhaust port, and the first temperature gas enters the temperature adjusting pipeline through the first pipeline to heat the temperature control output device;
when the temperature control output device is cooled, the temperature adjusting pipeline is connected with one end of the second pipeline, the other end of the second pipeline is connected with the second exhaust port, and second temperature gas enters the temperature adjusting pipeline through the second pipeline to cool the temperature control output device.
4. An automatic temperature control device as claimed in claim 3, wherein a stop valve is provided on each of the first conduit and the second conduit, and the stop valves are used for controlling the make-and-break and/or the flow of the gas in the first conduit and the second conduit.
5. The automatic temperature control device as claimed in claim 2, further comprising at least one temperature controller for adjusting the ratio of the first temperature gas and/or the second temperature gas and introducing the adjusted first temperature gas and/or the adjusted second temperature gas into the temperature adjusting pipe to adjust the temperature of the temperature control output device.
6. An automatic temperature control device as claimed in claim 5, wherein when there is one of said temperature controllers, said temperature controller is connected to said first pipe and said second pipe, said first temperature gas and said second temperature gas enter said temperature controller to be mixed to form a third temperature gas, said temperature controller is adapted to deliver said third temperature gas to said temperature regulating pipe for temperature regulation of said temperature controlled output device.
7. An automatic temperature control device according to claim 5, wherein when there are at least two of said temperature controllers:
the first temperature controller and the second temperature controller are respectively connected with the first pipeline and the second pipeline, the first temperature gas and the second temperature gas enter the first temperature controller to be mixed to form a third temperature gas, and the first temperature gas and the second temperature gas enter the second temperature controller to be mixed to form a fourth temperature gas;
the first temperature controller delivers the third temperature gas to the temperature regulated conduit;
the second temperature controller delivers the fourth temperature gas to the temperature regulation duct;
the third temperature gas and the fourth temperature gas jointly regulate the temperature of the temperature control output device.
8. An automatic temperature control device according to any one of claims 6 to 7, further comprising a third pipeline, one end of the third pipeline is connected to the temperature controller, the other end of the third pipeline is connected to the temperature adjusting pipeline, and the third pipeline is used for conveying the third temperature gas and/or the fourth temperature gas into the temperature adjusting pipeline to adjust the temperature of the temperature control output device.
9. An automatic temperature control device as claimed in claim 8, wherein said temperature controller is provided with a temperature display on its surface, said temperature display being adapted to display the temperature of said third temperature gas and said fourth temperature gas delivered by said temperature controller.
10. The automatic temperature control device as claimed in claim 1, wherein an exhaust duct is further provided in the temperature controlled output device, the exhaust duct being in communication with the temperature adjusting duct and adapted to exhaust gas from the temperature adjusting duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210898543.4A CN115278969A (en) | 2022-07-28 | 2022-07-28 | Automatic temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210898543.4A CN115278969A (en) | 2022-07-28 | 2022-07-28 | Automatic temperature control device |
Publications (1)
| Publication Number | Publication Date |
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| CN115278969A true CN115278969A (en) | 2022-11-01 |
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| CN202210898543.4A Pending CN115278969A (en) | 2022-07-28 | 2022-07-28 | Automatic temperature control device |
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| CN (1) | CN115278969A (en) |
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- 2022-07-28 CN CN202210898543.4A patent/CN115278969A/en active Pending
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