CN115274398A - Composite ion source and radio frequency power supply circuit thereof - Google Patents
Composite ion source and radio frequency power supply circuit thereof Download PDFInfo
- Publication number
- CN115274398A CN115274398A CN202210923043.1A CN202210923043A CN115274398A CN 115274398 A CN115274398 A CN 115274398A CN 202210923043 A CN202210923043 A CN 202210923043A CN 115274398 A CN115274398 A CN 115274398A
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- Prior art keywords
- torch
- discharge tube
- vacuum
- coil
- quadrupole deflection
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- 239000002131 composite material Substances 0.000 title claims abstract description 18
- 150000002500 ions Chemical class 0.000 claims abstract description 68
- 238000001514 detection method Methods 0.000 claims abstract description 33
- 238000002347 injection Methods 0.000 claims abstract description 7
- 239000007924 injection Substances 0.000 claims abstract description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
- 239000003990 capacitor Substances 0.000 claims description 12
- 238000000605 extraction Methods 0.000 claims description 11
- 230000007935 neutral effect Effects 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000004677 Nylon Substances 0.000 claims description 3
- 229910052743 krypton Inorganic materials 0.000 claims description 3
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229920001778 nylon Polymers 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 208000016253 exhaustion Diseases 0.000 claims description 2
- 239000012855 volatile organic compound Substances 0.000 abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 10
- 229910001385 heavy metal Inorganic materials 0.000 abstract description 9
- 239000000126 substance Substances 0.000 abstract description 8
- 238000009616 inductively coupled plasma Methods 0.000 abstract description 5
- 238000001819 mass spectrum Methods 0.000 abstract description 4
- 238000013461 design Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 5
- 238000005070 sampling Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000000065 atmospheric pressure chemical ionisation Methods 0.000 description 2
- 238000000132 electrospray ionisation Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000003911 water pollution Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210923043.1A CN115274398B (en) | 2022-08-02 | 2022-08-02 | Composite ion source and radio frequency power supply circuit thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210923043.1A CN115274398B (en) | 2022-08-02 | 2022-08-02 | Composite ion source and radio frequency power supply circuit thereof |
Publications (2)
Publication Number | Publication Date |
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CN115274398A true CN115274398A (en) | 2022-11-01 |
CN115274398B CN115274398B (en) | 2024-10-01 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210923043.1A Active CN115274398B (en) | 2022-08-02 | 2022-08-02 | Composite ion source and radio frequency power supply circuit thereof |
Country Status (1)
Country | Link |
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CN (1) | CN115274398B (en) |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010027622A (en) * | 2009-10-30 | 2010-02-04 | Canon Anelva Corp | Mass spectroscope |
CN102169791A (en) * | 2010-02-05 | 2011-08-31 | 岛津分析技术研发(上海)有限公司 | Tandem mass spectrometry apparatus and mass spectrometry method |
CN104716008A (en) * | 2013-12-15 | 2015-06-17 | 中国科学院大连化学物理研究所 | Radio-frequency discharge VUV composite ionization source used for mass spectrometry |
US20150270111A1 (en) * | 2014-03-20 | 2015-09-24 | Lockheed Martin Corporation | Multiple ionization sources for a mass spectrometer |
CN105308714A (en) * | 2013-06-17 | 2016-02-03 | 株式会社岛津制作所 | Ion transport apparatus and mass spectroscope employing said apparatus |
CN105632877A (en) * | 2014-10-28 | 2016-06-01 | 中国科学院大连化学物理研究所 | Double-ion-source quadrupole mass spectrometer based on single-photon ionization and electron bombardment ionization |
CN106169411A (en) * | 2016-07-13 | 2016-11-30 | 中国计量科学研究院 | New type series-parallel connected mass spectrometric apparatus system and parameter adjusting method thereof and using method |
WO2018050090A1 (en) * | 2016-09-18 | 2018-03-22 | 东华理工大学 | Microwave plasma torch mass spectrum analysis device and analysis method |
CN109841491A (en) * | 2017-11-27 | 2019-06-04 | 中国科学院大连化学物理研究所 | A kind of photo-ionisation and chemi-ionization source of combined ions |
CN111834195A (en) * | 2019-04-16 | 2020-10-27 | 广州禾信仪器股份有限公司 | Composite ion source, method of using the same, and mass spectrometer |
CN112185801A (en) * | 2019-07-05 | 2021-01-05 | 上海大学 | Novel photoelectric composite ion source |
CN114527187A (en) * | 2020-11-02 | 2022-05-24 | 岛津分析技术研发(上海)有限公司 | Ion analysis apparatus and method |
CN218631914U (en) * | 2022-08-02 | 2023-03-14 | 天津国科医工科技发展有限公司 | Composite ion source and radio frequency power supply circuit thereof |
-
2022
- 2022-08-02 CN CN202210923043.1A patent/CN115274398B/en active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010027622A (en) * | 2009-10-30 | 2010-02-04 | Canon Anelva Corp | Mass spectroscope |
CN102169791A (en) * | 2010-02-05 | 2011-08-31 | 岛津分析技术研发(上海)有限公司 | Tandem mass spectrometry apparatus and mass spectrometry method |
US20160189946A1 (en) * | 2013-06-17 | 2016-06-30 | Shimadzu Corporation | Ion transport apparatus and mass spectrometer using the same |
CN105308714A (en) * | 2013-06-17 | 2016-02-03 | 株式会社岛津制作所 | Ion transport apparatus and mass spectroscope employing said apparatus |
CN104716008A (en) * | 2013-12-15 | 2015-06-17 | 中国科学院大连化学物理研究所 | Radio-frequency discharge VUV composite ionization source used for mass spectrometry |
US20150270111A1 (en) * | 2014-03-20 | 2015-09-24 | Lockheed Martin Corporation | Multiple ionization sources for a mass spectrometer |
CN105632877A (en) * | 2014-10-28 | 2016-06-01 | 中国科学院大连化学物理研究所 | Double-ion-source quadrupole mass spectrometer based on single-photon ionization and electron bombardment ionization |
CN106169411A (en) * | 2016-07-13 | 2016-11-30 | 中国计量科学研究院 | New type series-parallel connected mass spectrometric apparatus system and parameter adjusting method thereof and using method |
WO2018050090A1 (en) * | 2016-09-18 | 2018-03-22 | 东华理工大学 | Microwave plasma torch mass spectrum analysis device and analysis method |
CN109841491A (en) * | 2017-11-27 | 2019-06-04 | 中国科学院大连化学物理研究所 | A kind of photo-ionisation and chemi-ionization source of combined ions |
CN111834195A (en) * | 2019-04-16 | 2020-10-27 | 广州禾信仪器股份有限公司 | Composite ion source, method of using the same, and mass spectrometer |
CN112185801A (en) * | 2019-07-05 | 2021-01-05 | 上海大学 | Novel photoelectric composite ion source |
CN114527187A (en) * | 2020-11-02 | 2022-05-24 | 岛津分析技术研发(上海)有限公司 | Ion analysis apparatus and method |
CN218631914U (en) * | 2022-08-02 | 2023-03-14 | 天津国科医工科技发展有限公司 | Composite ion source and radio frequency power supply circuit thereof |
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CN115274398B (en) | 2024-10-01 |
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Country or region after: China Address after: Building 4, No.16 Wujing Road, development zone, Dongli District, Tianjin Applicant after: Tianjin Guoke Medical Technology Development Co.,Ltd. Address before: Building 4, No.16 Wujing Road, development zone, Dongli District, Tianjin Applicant before: TIANJIN GUOKE YIGONG TECHNOLOGY DEVELOPMENT Co.,Ltd. Country or region before: China |
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TA01 | Transfer of patent application right |
Effective date of registration: 20240325 Address after: Building 4, No.16 Wujing Road, development zone, Dongli District, Tianjin Applicant after: Tianjin Guoke Medical Technology Development Co.,Ltd. Country or region after: China Applicant after: Suzhou Institute of Biomedical Engineering and Technology Chinese Academy of Sciences Address before: Building 4, No.16 Wujing Road, development zone, Dongli District, Tianjin Applicant before: Tianjin Guoke Medical Technology Development Co.,Ltd. Country or region before: China |
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Effective date of registration: 20240830 Address after: Room 209, Building 4, International Medical Device Industrial Park, No.16 Wujing Road, Dongli Economic and Technological Development Zone, Dongli District, Tianjin, with a budget of 300000 RMB Applicant after: Guoke Xinzhi (Tianjin) Technology Development Co.,Ltd. Country or region after: China Address before: Building 4, No.16 Wujing Road, development zone, Dongli District, Tianjin Applicant before: Tianjin Guoke Medical Technology Development Co.,Ltd. Country or region before: China Applicant before: Suzhou Institute of Biomedical Engineering and Technology Chinese Academy of Sciences |
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