CN115260030A - Process preparation method and production device of methacrylate photoresist monomer - Google Patents
Process preparation method and production device of methacrylate photoresist monomer Download PDFInfo
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- CN115260030A CN115260030A CN202210883638.9A CN202210883638A CN115260030A CN 115260030 A CN115260030 A CN 115260030A CN 202210883638 A CN202210883638 A CN 202210883638A CN 115260030 A CN115260030 A CN 115260030A
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/08—Preparation of carboxylic acid esters by reacting carboxylic acids or symmetrical anhydrides with the hydroxy or O-metal group of organic compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/07—Stirrers characterised by their mounting on the shaft
- B01F27/072—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/07—Stirrers characterised by their mounting on the shaft
- B01F27/072—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis
- B01F27/0721—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis parallel with respect to the rotating axis
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/07—Stirrers characterised by their mounting on the shaft
- B01F27/073—Stirrers characterised by their mounting on the shaft with stirring elements moving with respect to the stirrer shaft, e.g. floating or comprising contracting chambers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/09—Stirrers characterised by the mounting of the stirrers with respect to the receptacle
- B01F27/091—Stirrers characterised by the mounting of the stirrers with respect to the receptacle with elements co-operating with receptacle wall or bottom, e.g. for scraping the receptacle wall
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/11—Stirrers characterised by the configuration of the stirrers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/11—Stirrers characterised by the configuration of the stirrers
- B01F27/17—Stirrers with additional elements mounted on the stirrer, for purposes other than mixing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/23—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by the orientation or disposition of the rotor axis
- B01F27/232—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by the orientation or disposition of the rotor axis with two or more rotation axes
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/48—Separation; Purification; Stabilisation; Use of additives
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/48—Separation; Purification; Stabilisation; Use of additives
- C07C67/58—Separation; Purification; Stabilisation; Use of additives by liquid-liquid treatment
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2601/00—Systems containing only non-condensed rings
- C07C2601/06—Systems containing only non-condensed rings with a five-membered ring
- C07C2601/08—Systems containing only non-condensed rings with a five-membered ring the ring being saturated
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
The preparation process of the methacrylate photoresist monomer solves the problems that the whole process is relatively complex and the production efficiency needs to be improved. Which comprises the following steps: adding a solvent toluene into a reaction device, wherein the dosage of the solvent toluene is twice of the mass of 1-methylcyclopentanol, then adding 1 equivalent of 1-methylcyclopentanol, 1.05 equivalent of methacrylic acid, one thousandth equivalent of concentrated sulfuric acid and five ten-thousandth equivalent of polymerization inhibitor; mixing the solution by reaction equipment to obtain a premixed solution; heating the premixed solution, heating to reflux, dividing water, and cooling to stop the reaction when the content of the raw material 1-methylcyclopentanol is less than 5% by sample analysis; when the reaction solution is cooled to room temperature, deionized water is used for washing away sulfuric acid, and when the pH value of a water layer is 6-7, toluene is concentrated under reduced pressure; after the solvent toluene is concentrated, rectifying to obtain the product 1-methyl-1-cyclopentanol methacrylate.
Description
Technical Field
The invention relates to the technical field of photoresist intermediate materials, in particular to a process preparation method and a production device of methacrylate photoresist monomers.
Background
Photoresists, also known as photoresists, have photochemically sensitive media that are essential in semiconductor and printed circuit board manufacturing processes. After the photoresist is cured by ultraviolet light, the physical properties such as hardness, solubility and the like of the photoresist are changed, and a required image is obtained by adding a proper solvent for treatment. Polymers obtained by ultraviolet light curing are called resists because they have corrosion resistance.
The application number is 202110084005.7, which is named as a methacrylate monomer and a preparation method thereof, 5-dimethyl-4, 8-dioxane [ 4.2.1.03,7 ] nonane-2-alcohol is uniformly mixed with an organic solvent A, an acrylic compound is dropwise added into obtained premixed liquid, after dropwise adding, heating is carried out to carry out esterification reaction, strong alkaline aqueous solution is adopted to carry out reaction obtained after the reaction is finished, liquid separation washing is carried out to the reaction liquid obtained after the reaction is finished to be neutral, after liquid separation washing, a precipitator is added, the obtained precipitate is filtered and dried, a crude product of the methacrylate monomer is obtained, the organic solvent B is added into the crude product, heating, stirring and dissolving are carried out, the obtained crude product solution is recrystallized, and then drying is carried out.
But it has the following disadvantages: 1) The processing steps are relatively complex; 2) The solution in the later period is inconvenient to treat, and can cause partial pollution of the environment.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a preparation process of a methacrylate photoresist monomer, which solves the problems that the whole process is relatively complex and the production efficiency needs to be improved.
In order to solve the problems, the preparation method of the methacrylate photoresist monomer comprises the following steps:
s1, adding a solvent toluene into a reaction device, wherein the using amount of the solvent toluene is twice of the mass of 1-methylcyclopentanol, then adding 1 equivalent of 1-methylcyclopentanol, 1.05 equivalents of methacrylic acid, one thousandth equivalent of concentrated sulfuric acid and five ten thousandth equivalent of polymerization inhibitor;
s2, mixing the solution by using reaction equipment to obtain a premixed solution;
s3, heating the premixed solution to reflux, dividing water, and cooling to stop the reaction when the content of the raw material 1-methylcyclopentanol is less than 5% by sample analysis;
s4, when the reaction solution is cooled to room temperature, deionized water is used for washing away sulfuric acid, and when the pH value of a water layer is 6-7, toluene is concentrated under reduced pressure;
s5, after the solvent toluene is concentrated, rectifying to obtain the product 1-methyl-1-cyclopentanol methacrylate.
The utility model provides a production device of methacrylate class photoinduced anti-reagent monomer, includes reaction equipment, reaction equipment includes hollow retort, is equipped with the first stirring mixing arrangement of limit circumferential motion and carrying out the rotation in the retort, still is equipped with the second stirring mixing arrangement of limit circumferential motion, horizontal reciprocating sliding and rotation in the retort.
Preferably, an inner gear ring is fixed in the reaction tank, and a planet carrier is rotatably arranged in the reaction tank;
the first stirring and mixing device comprises a planet wheel, the planet wheel is rotationally connected with a planet carrier, the lower end of the planet wheel is fixedly connected with a first stirring shaft, and the first stirring shaft is provided with a plurality of groups of first stirring pieces along the vertical direction;
the first stirring piece comprises first stirring rods which are uniformly distributed along the circumference of the first stirring shaft.
Preferably, the second stirring and mixing device comprises an eccentric gear, the eccentric gear is fixed with the planet gear, and the axis of the eccentric gear is not coincident with the axis of the planet gear;
the eccentric gear is meshed with a pinion, and the axis of the pinion is fixedly connected with a rotating shaft;
the planet carrier is provided with a rectangular block which horizontally slides along with the planet carrier, and the pinion is rotationally connected with the rectangular block;
a ring body is coaxially fixed on the eccentric gear, a crank is fixed on the outer side of the ring body, and the outer end of the crank is rotationally connected with a rotating shaft of the pinion.
Preferably, be equipped with the horizontally and lead to the groove on the planet carrier, the rectangular block carries out horizontal slip along leading to the groove, and the outside that leads to the groove is equipped with the guide way, and slidable is equipped with the guide block in the guide way, and guide block outer end runs through guide way and rectangular block fixed connection.
Preferably, the lower end of the rotating shaft penetrates through the rectangular block and is fixedly connected with a second stirring shaft, and a plurality of groups of second stirring pieces are arranged on the second stirring shaft along the vertical direction;
the second stirring piece comprises second stirring rods uniformly distributed along the circumference of the second stirring shaft.
Preferably, the first stirring rod and the second stirring rod are not on the same horizontal plane.
Preferably, the lower end of the reaction tank is rotatably provided with an annular rotating disc, and the lower end of the first stirring shaft is rotatably connected with the rotating disc.
Preferably, a sliding block which horizontally slides along with the rotating disc is arranged on the rotating disc, and the lower end of the second stirring shaft is rotatably connected with the sliding block.
Preferably, a plurality of vertical stirring plates are uniformly distributed on the circumference of the lower end of the rotating disc.
The preparation method adopting the process has the following advantages: 1) Concentrated sulfuric acid is used as a catalyst for dehydration reaction, so that the cost is low, and the concentrated sulfuric acid can be conveniently removed by washing during post-treatment; 2) Toluene is used as a solvent, water is separated for reaction, the reaction is promoted to be complete, and the toluene can be recycled and reused at the later stage; 3) The waste water after reaction is deacidified and deionized and can be recycled for reuse, thus realizing waste utilization.
Compared with the prior art, the production device has the following advantages: 1) The first stirring and mixing device rotates while rotating circumferentially, so that the mixing efficiency is increased; 2) The second stirring and mixing device rotates in a circle, slides horizontally and rotates automatically at the same time, so that the mixing efficiency is improved; 3) The first stirring piece and the second stirring piece are not on the same horizontal plane, so that the stirring effect of different water layers is improved; 4) The bottom stirring plate is arranged, so that the generation of precipitation is avoided, and the mixing effect is improved.
Drawings
FIG. 1 is a chemical reaction formula of the preparation method of the present invention;
FIG. 2 is a schematic view of the overall structure of the reaction apparatus of the present invention;
FIG. 3 is a schematic view of the internal structure of the reaction tank of the present invention;
FIG. 4 is a schematic axial view of the internal structure of the reaction tank according to the present invention;
FIG. 5 is a schematic view of the structure of the planet carrier driving the pinion to move in accordance with the present invention;
FIG. 6 is a schematic view of the sliding structure of the rectangular block driven by the eccentric gear according to the present invention;
FIG. 7 is a schematic view of the eccentric gear and ring body structure of the present invention;
FIG. 8 is a schematic view of the configuration of the first stirring rod and the second stirring rod of the present invention;
in the figure: 1. a reaction tank; 2. a first stirring and mixing device; 3. a second stirring and mixing device; 4. an inner gear ring; 5. a planet wheel; 6. a planet carrier; 7. a first stirring shaft; 8. a first stirring rod; 9. an eccentric gear; 10. a pinion gear; 11. a rotating shaft; 12. a rectangular block; 13. a ring body; 14. a crank; 15. a second stirring shaft; 16. a second stirring rod; 17. a turntable; 18. and (4) stirring the plate.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
Referring to fig. 1, a method for preparing a methacrylate photoresist monomer includes the following steps:
s1, adding a solvent toluene into a reaction device, wherein the using amount of the solvent toluene is twice of the mass of 1-methylcyclopentanol, then adding 1 equivalent of 1-methylcyclopentanol, 1.05 equivalents of methacrylic acid, one thousandth equivalent of concentrated sulfuric acid and five ten thousandth equivalent of polymerization inhibitor;
s2, mixing the solution by using reaction equipment to obtain a premixed solution;
s3, heating the premixed solution to reflux, dividing water, and cooling to stop the reaction when the content of the raw material 1-methylcyclopentanol is less than 5% by sample analysis;
s4, when the reaction solution is cooled to room temperature, deionized water is used for washing away sulfuric acid, and when the pH value of a water layer is 6-7, toluene is concentrated under reduced pressure;
s5, after the solvent toluene is concentrated, rectifying to obtain the product 1-methyl-1-cyclopentanol methacrylate.
The preparation method adopting the process has the following advantages: 1) Concentrated sulfuric acid is used as a catalyst for dehydration reaction, so that the cost is low, and the concentrated sulfuric acid can be conveniently removed by washing during post-treatment; 2) Toluene is used as a solvent, water is separated for reaction, the reaction is promoted to be complete, and the toluene can be recycled and reused at the later stage; 3) The waste water after reaction is deacidified and deionized and can be recycled for reuse, thus realizing waste utilization.
Referring to fig. 2-8, a production apparatus for a methacrylate photo-reactive reagent monomer comprises a reaction device, the reaction device comprises a hollow reaction tank 1, a first stirring and mixing device 2 which rotates circumferentially and rotates automatically is arranged in the reaction tank 1, and a second stirring and mixing device 3 which rotates circumferentially, slides horizontally and reciprocally and rotates automatically is also arranged in the reaction tank 1.
In the preparation method, the reaction equipment is used, the whole reaction equipment comprises a hollow reaction tank 1, a motor is fixed at the upper end of the reaction tank 1, and the motor drives the first stirring and mixing device 2 and the second stirring and mixing device 3 to move, so that materials in the reaction tank 1 are quickly mixed, and the premixed liquid is produced.
In this device, first stirring mixing arrangement 2 carries out the rotation on one side the circumferencial rotation to carry out quick mixture to the material, second stirring mixing arrangement 3 is carrying out the circumferencial rotation, horizontal reciprocating sliding and rotation, mixes the material, and first stirring mixing arrangement 2 and second stirring mixing arrangement 3 cooperate, thereby realize the flash mixed of material.
An inner gear ring 4 is fixed in the reaction tank 1, and a planet carrier 6 is rotatably arranged in the reaction tank 1;
the first stirring and mixing device 2 comprises a planet wheel 5, the planet wheel 5 is rotationally connected with a planet carrier 6, the lower end of the planet wheel 5 is fixedly connected with a first stirring shaft 7, and the first stirring shaft 7 is provided with a plurality of groups of first stirring pieces along the vertical direction;
the first stirring member comprises first stirring rods 8 uniformly distributed along the circumference of the first stirring shaft 7.
In the invention, the shaft end of the motor is fixedly connected with the planet carrier 6 so as to drive the planet carrier 6 to rotate, the planet carrier 6 rotates so as to drive the planet wheel 5 to revolve, the planet wheel 5 is meshed with the inner gear ring 4 so as to achieve the purpose of autorotation of the planet wheel 5, and the lower end of the first stirring shaft 7 penetrates through the planet carrier 6 and is provided with a plurality of groups of first stirring pieces so as to stir and mix objects in the reaction tank 1.
The second stirring and mixing device 3 comprises an eccentric gear 9, the eccentric gear 9 is fixed with the planet gear 5, and the axis of the eccentric gear 9 is not coincident with the axis of the planet gear 5;
the eccentric gear 9 is engaged with a pinion 10, and the axis of the pinion 10 is fixedly connected with a rotating shaft 11;
the planet carrier 6 is provided with a rectangular block 12 which horizontally slides along with the planet carrier 6, and the pinion 10 is rotationally connected with the rectangular block 12;
a ring body 13 is coaxially fixed on the eccentric gear 9, a crank 14 is fixed on the outer side of the ring body 13, and the outer end of the crank 14 is rotatably connected with the rotating shaft 11 of the pinion 10.
In the invention, the upper end of the planet wheel 5 is fixedly connected with an eccentric gear 9, the axis of the eccentric gear 9 is not coincident with the axis of the planet wheel 5, the distance between the axis of the ring body 13 and the rotating shaft 11 is equal to the distance between the eccentric gear 9 and the axis of the pinion 10, so that the eccentric gear 9 and the pinion 10 are always in a meshed state, when the planet wheel 5 drives the eccentric gear 9 to rotate, the pinion 10 is driven to rotate, and meanwhile, the rectangular block 12 is driven to horizontally slide back and forth, namely, the pinion 10 horizontally slides back and forth in the rotating process.
Be equipped with the horizontally logical groove on planet carrier 6, rectangular block 12 carries out horizontal slip along leading to the groove, and the outside that leads to the groove is equipped with the guide way, and slidable is equipped with the guide block in the guide way, and the guide way runs through guide block outer end and rectangular block 12 fixed connection.
Both sides that lead to the groove all are provided with the guide way to remove the stability of guaranteeing rectangular block 12, under the assistance that leads to groove and guide way, thereby guarantee that rectangular block 12 carries out the horizontally slip along planet carrier 6.
The lower end of the rotating shaft 11 penetrates through the rectangular block 12 and is fixedly connected with a second stirring shaft 15, and a plurality of groups of second stirring pieces are arranged on the second stirring shaft 15 along the vertical direction;
the second stirring member comprises second stirring rods 16 uniformly distributed along the circumference of the second stirring shaft 15.
The rotation shaft 11 is fixedly connected with the pinion 10, and the rotation shaft 11 rotates to drive the plurality of second stirring rods 16 to rotate, so that the materials in the reaction tank 1 are quickly mixed.
The first stirring rod 8 and the second stirring rod 16 are not on the same horizontal plane.
The horizontal planes of the first stirring rod 8 and the second stirring rod 16 are different, so that the first stirring rod can avoid the interference between the first stirring rod and the second stirring rod, and the second stirring rod can also form the effect of stirring and mixing different water layers.
The lower end of the reaction tank 1 is rotatably provided with an annular turntable 17, and the lower end of the first stirring shaft 7 is rotatably connected with the turntable 17.
The first stirring shaft 7 is supported by the turntable 17, so that the torque borne by the first stirring shaft 7 can be increased.
The turntable 17 is provided with a slide block which horizontally slides along with the turntable 17, and the lower end of the second stirring shaft 15 is rotatably connected with the slide block.
For the same reason, the turntable 17 provides support for the second stirring shaft 15, and increases the torque that the second stirring shaft 15 can bear.
A plurality of vertical stirring plates 18 are uniformly distributed on the circumference of the lower end of the rotating disc 17.
In order to avoid the situation that the lower end of the material is precipitated, the lower end of the material is stirred through the stirring plate 18, and the precipitation is avoided.
The examples are given solely for the purpose of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. A process preparation method of methacrylate photoresist monomer is characterized by comprising the following steps:
s1, adding a solvent toluene into a reaction device, wherein the using amount of the solvent toluene is twice of the mass of 1-methylcyclopentanol, then adding 1 equivalent of 1-methylcyclopentanol, 1.05 equivalents of methacrylic acid, one thousandth equivalent of concentrated sulfuric acid and five ten thousandth equivalent of polymerization inhibitor;
s2, mixing the solution by using reaction equipment to obtain a premixed solution;
s3, heating the premixed solution to reflux, dividing water, and cooling to stop the reaction when the content of the raw material 1-methylcyclopentanol is less than 5% by sample analysis;
s4, when the reaction solution is cooled to room temperature, deionized water is used for washing out sulfuric acid, and when the pH value of a water layer is 6-7, toluene is concentrated under reduced pressure;
s5, after the solvent toluene is concentrated, rectifying to obtain the product 1-methyl-1-cyclopentanol methacrylate.
2. The production device adopting the process preparation method of the methacrylate photo-resistant reagent monomer according to claim 1 comprises reaction equipment, and is characterized in that the reaction equipment comprises a hollow reaction tank (1), a first stirring and mixing device (2) which rotates circumferentially and rotates automatically is arranged in the reaction tank (1), and a second stirring and mixing device (3) which rotates circumferentially, slides horizontally and reciprocally and rotates automatically is arranged in the reaction tank (1).
3. The apparatus for producing methacrylate photoresist monomer according to claim 2, wherein an inner gear ring (4) is fixed in the reaction tank (1), and a planet carrier (6) is rotatably arranged in the reaction tank (1);
the first stirring and mixing device (2) comprises a planet wheel (5), the planet wheel (5) is rotationally connected with a planet carrier (6), the lower end of the planet wheel (5) is fixedly connected with a first stirring shaft (7), and the first stirring shaft (7) is provided with a plurality of groups of first stirring pieces along the vertical direction;
the first stirring piece comprises first stirring rods (8) which are uniformly distributed along the circumference of the first stirring shaft (7).
4. The apparatus for producing methacrylate-based photoresist monomer according to claim 3, wherein the second stirring and mixing device (3) comprises an eccentric gear (9), the eccentric gear (9) is fixed with the planetary gear (5), and the axis of the eccentric gear (9) is not coincident with the axis of the planetary gear (5);
the eccentric gear (9) is meshed with a pinion (10), and the axis of the pinion (10) is fixedly connected with a rotating shaft (11);
the planet carrier (6) is provided with a rectangular block (12) which horizontally slides along with the planet carrier (6), and the pinion (10) is rotationally connected with the rectangular block (12);
a ring body (13) is coaxially fixed on the eccentric gear (9), a crank (14) is fixed on the outer side of the ring body (13), and the outer end of the crank (14) is rotatably connected with a rotating shaft (11) of the pinion (10).
5. The production device of methacrylate photoresist monomers as claimed in claim 4, wherein the planet carrier (6) is provided with a horizontal through groove, the rectangular block (12) slides horizontally along the through groove, the outer side of the through groove is provided with a guide groove, a guide block is slidably arranged in the guide groove, and the outer end of the guide block penetrates through the guide groove and is fixedly connected with the rectangular block (12).
6. The apparatus for producing a methacrylate-based photoresist monomer according to claim 4, wherein the lower end of the rotation shaft (11) penetrates through the rectangular block (12) and is fixedly connected with a second stirring shaft (15), and the second stirring shaft (15) is provided with a plurality of groups of second stirring members along a vertical direction;
the second stirring piece comprises second stirring rods (16) which are uniformly distributed along the circumference of the second stirring shaft (15).
7. The apparatus for producing a methacrylate-based photoresist monomer according to claim 6, wherein the first stirring bar (8) and the second stirring bar (16) are not on the same horizontal plane.
8. The apparatus for producing a methacrylate-based photoresist monomer according to claim 3, wherein the lower end of the reaction tank (1) is rotatably provided with an annular turntable (17), and the lower end of the first stirring shaft (7) is rotatably connected with the turntable (17).
9. The apparatus for producing a methacrylate-based photoresist monomer according to claim 6, wherein the turntable (17) is provided with a slider which slides horizontally along with the turntable (17), and the lower end of the second stirring shaft (15) is rotatably connected to the slider.
10. The apparatus for producing methacrylate-based photoresist monomer according to claim 8, wherein a plurality of vertical stirring plates (18) are evenly distributed on the circumference of the lower end of the rotating disc (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210883638.9A CN115260030A (en) | 2022-07-26 | 2022-07-26 | Process preparation method and production device of methacrylate photoresist monomer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210883638.9A CN115260030A (en) | 2022-07-26 | 2022-07-26 | Process preparation method and production device of methacrylate photoresist monomer |
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| CN115260030A true CN115260030A (en) | 2022-11-01 |
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| CN202210883638.9A Pending CN115260030A (en) | 2022-07-26 | 2022-07-26 | Process preparation method and production device of methacrylate photoresist monomer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115717002A (en) * | 2022-11-24 | 2023-02-28 | 河南七彩异涂新材料科技有限公司 | Coating with formaldehyde purifying and antibacterial and mildew-proof functions and preparation method thereof |
| CN115961517A (en) * | 2022-11-30 | 2023-04-14 | 江苏预立新能源科技有限公司 | Asphalt material mixing processing device |
| CN116139798A (en) * | 2023-04-23 | 2023-05-23 | 山东天弘化学有限公司 | Production device and method for preparing acetone through oxidative decomposition of isobutane |
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| JP2021109857A (en) * | 2020-01-14 | 2021-08-02 | 三菱ケミカル株式会社 | Method for producing alcohol compound and method for producing (meth)acrylate compound |
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| CN104447311A (en) * | 2014-10-31 | 2015-03-25 | 上海博康精细化工有限公司 | 1-methyl-cyclopentanol-acrylate and preparation method thereof |
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