CN115256519A

CN115256519A - Ultra-thin wafer placing plate perforating device

Info

Publication number: CN115256519A
Application number: CN202210844912.1A
Authority: CN
Inventors: 何建军; 沈桂英; 赵有文
Original assignee: Rugao Compound Semiconductor Industry Research Institute; Nantong Fudian Semiconductor Material Technology Co ltd
Current assignee: Rugao Compound Semiconductor Industry Research Institute; Nantong Fudian Semiconductor Material Technology Co ltd
Priority date: 2022-07-19
Filing date: 2022-07-19
Publication date: 2022-11-01

Abstract

The invention relates to a perforating device, in particular to a perforating device for an ultrathin wafer placing plate. The invention provides the perforating device for the ultrathin wafer placing plate, which can clamp the periphery of the placing plate, has a good fixing effect and is accurate in perforating. The utility model provides an ultra-thin wafer places board trompil device, includes chassis, bull stick and places the dish, and the top rotary type of chassis is connected with the bull stick, and the top of bull stick is connected with places the dish. Through using electronic slide rail as drive power, can make the contact lever lapse and promote the push rod, let the push rod pass through the water in the water pipe will push away the frame and promote to the direction of being close to the rotation frame, thereby make the reel rotate and will four press from both sides tight frame and press from both sides tightly to the direction removal of being close to placing the board through the stay cord, with this to placing the board trompil in-process can self-holding place the board, reach and press from both sides tight board effect all around of placing, to taking place the displacement all around when avoiding placing the board trompil, the precision of trompil has been guaranteed, and it is fixed effectual.

Description

Ultra-thin wafer placing plate perforating device

Technical Field

The invention relates to a perforating device, in particular to a perforating device for an ultrathin wafer placing plate.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, the wafer needs to be placed in a placing hole of a placing plate when being transported and stored, so that the wafer can be well protected, and at present, a hole opening device is usually used for opening holes in the placing plate when the placing plate is machined.

According to a novel plate-shaped material tapping device with patent grant publication number CN211615846U, the novel plate-shaped material tapping device comprises a support, a support rod, an adjusting base, a first sliding block, a first knob, a sliding rod, a pressing plate, a second knob, a second sliding block, a connecting rod, a third knob, a motor and a tapper; the support is in a U-shaped tubular structure and is fixed at the bottom of the integral structure; the support rods are respectively fixed with one end of the bracket; the other end of the bracket is fixed with the bottom of the adjusting base; the adjusting base is of a cuboid structure, and the back of the adjusting base is provided with a sliding chute; and a threaded hole is formed in the middle of the adjusting base.

Although above-mentioned trompil device can move the clamp plate to the workpiece surface through annular handle, wrench movement second knob again, turn round the clamp plate tightly, let the clamp plate push down the upper surface of work piece, accomplish and press from both sides tight fixed effect, this kind of stability of pressing from both sides tight is relatively poor, because the clamp plate is only tight to the upper surface clamp of work piece, not press from both sides tightly all around to the work piece receives easy to taking place the displacement all around behind the pressure when external force or trompil, leads to the trompil not accurate, influences the trompil work.

In order to solve the problems in the prior art, the ultra-thin wafer placing plate perforating device which can clamp the periphery of the placing plate and has a good fixing effect and accurate perforating is necessary to design, so that the periphery of the placing plate is clamped tightly, the displacement of the placing plate is prevented, and the perforating accuracy is guaranteed.

Disclosure of Invention

In order to overcome the defect that the hole opening precision is affected due to the poor clamping and fixing effect of the conventional hole opening device, the invention aims to solve the technical problem of providing the hole opening device for the ultrathin wafer placing plate, which can clamp the periphery of the placing plate, has a good fixing effect and is accurate in hole opening.

In order to solve the technical problem, the invention provides a perforating device for an ultrathin wafer placing plate, which comprises a bottom frame, a rotating rod, a placing plate, an electric sliding rail, a sliding frame, a motor and a perforator, wherein the rotating rod is rotatably connected to the top of the bottom frame, the placing plate is connected to the top of the rotating rod and used for placing the placing plate to be processed, the electric sliding rail is connected to one side, away from the rotating rod, of the top of the bottom frame, the sliding frame is connected to a sliding part of the electric sliding rail, one end of the sliding frame is connected with the motor, the perforator is connected to an output shaft of the motor and used for perforating the placing plate, the perforating device further comprises a transmission mechanism, a positioning mechanism and a rotating mechanism, the transmission mechanism is arranged on the rotating rod and used for driving the placing plate on the placing plate to rotate, the positioning mechanism is arranged on the placing plate and used for fixing the placing plate, and the rotating mechanism is arranged on the placing plate.

Preferably, drive mechanism is including rack, bevel gear, bracing piece and one-way gear, and the back downside of carriage is connected with the rack, and the top of chassis is connected with the bracing piece, and the upper portion of bracing piece and the lower part of bull stick all are connected with bevel gear, wherein bevel gear and bracing piece normal running fit on the bracing piece, two bevel gear meshing, one side that bevel gear on the bracing piece kept away from bevel gear on the bull stick is connected with the one-way gear with the rack meshing of downstream.

Preferably, positioning mechanism is including pressing from both sides tight frame, first spring, spacing ring, reel and stay cord, places and coils even interval ground sliding connection and is connected with tight frame tightly for press from both sides tightly and place the board, tight frame tightly and place and be connected with first spring between the dish, the bottom of placing the dish evenly interval ground be connected with quantity with the spacing ring that tight frame corresponds tightly, the upper portion of bull stick is connected with the reel, be connected with the stay cord between reel and the tight frame tightly, the stay cord passes the spacing ring, be used for with tight frame tightly to being close to the direction pulling of placing a set middle part.

Preferably, rotary mechanism is including contact bar, guide bar, water pipe, push rod, push away the frame, rotate frame and volute spiral spring, and the preceding downside of carriage is connected with contact bar, and the bottom of placing the dish is connected with evenly at intervals with the guide bar that clamping frame quantity corresponds, and the lower part slidingtype of guide bar has run through the water pipe, and the inside of water pipe is equipped with water, and one side slidingtype that the dish was placed to the water pipe is kept away from is connected with the push rod for push away the water in the water pipe, and one side slidingtype that the water pipe is close to placing the dish is connected with and pushes away the frame, and the bottom of reel is connected with the rotation frame, rotates the frame and pushes away the frame contact, is used for driving the reel and rotates, is connected with volute spiral spring between rotation frame and the rotary rod.

Preferably, still including dust absorption mechanism, dust absorption mechanism is including fixed frame, the hose, the dust catcher, the dust absorption frame, collect frame and button frame, the sub-unit connection of electronic slide rail has fixed frame, the top intercommunication of fixed frame has the hose, the left side sub-unit connection of carriage has the dust catcher, the end of giving vent to anger of dust catcher is connected and communicates with the top of hose, the sub-unit connection of carriage has the dust absorption frame, the dust absorption pipe of dust catcher is connected and communicates with the dust absorption frame, the piece that produces when being used for inhaling away placing the board trompil, place the collection frame in the fixed frame, be used for collecting the piece of being inhaled away by the dust catcher, the preceding downside of electronic slide rail is connected with the button frame, button frame and dust catcher electric connection, contact bar removes downwards can contact with the button frame.

Preferably, including jack-up mechanism, jack-up mechanism is including pulling frame, wedge, kicking block and second spring, places the right part front and back symmetrical formula sliding connection of dish and has the pulling frame, and the pulling frame runs through the right side of placing the dish, places the right side front and back symmetrical formula of the bottom in the dish and is connected with the wedge, and one side sliding connection of pulling frame has the kicking block for to place the board jack-up of placing on placing the dish, pull frame and place and be connected with the second spring between the dish.

Preferably, still including protection machanism, protection machanism is connected with the connecting block including connecting block and protection frame, the motor keep away from one side of carriage, and the bottom of connecting block is connected with protection frame for prevent that the piece from splashing everywhere.

Preferably, the collecting frame further comprises a pulling block, and one side of the collecting frame, which is far away from the fixing frame, is connected with the pulling block.

The invention has the following beneficial effects: 1. through using electronic slide rail as drive power, can make contact lever lapse promote the push rod, let the push rod through the water in the water pipe will push away the frame and promote to the direction that is close to the rotation frame, thereby make the reel rotate and through the stay cord with four tight framves to the direction removal that is close to place the board and press from both sides tightly, with this to placing the in-process of board trompil can self-holding tightly place the board, reach and press from both sides tightly to place board effect all around, to taking place the displacement all around when avoiding placing the board trompil, the precision of trompil has been guaranteed, and fixed effectual.

2. Through using electric slide rail as drive power, can make the dust catcher opened to the hole digger is to placing the piece siphoning away that produces when the board trompil is trompil through the dust absorption frame, reaches the clastic purpose of handling, avoids the piece to splash to causing the pollution to air and surrounding operational environment in the environment on every side.

3. Pulling the kicking block right through pulling the frame, after the kicking block moved the contact wedge rightwards, the wedge can with the kicking block jack-up to the kicking block will be placed the board jack-up that makes progress, with this through above-mentioned operation can make things convenient for the staff will place the board and take off from placing the dish, has brought the facility for the staff.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a partial perspective view of the present invention.

Fig. 3 is a schematic perspective view of the transmission mechanism of the present invention.

Fig. 4 is a partially enlarged view of the transmission mechanism of the present invention.

Fig. 5 is a schematic perspective view of a part of the positioning mechanism of the present invention.

Fig. 6 is a schematic perspective view of the positioning mechanism of the present invention.

Fig. 7 is a schematic view of a first partial body structure of the rotating mechanism of the present invention.

Fig. 8 is a schematic view of a second partial body structure of the rotating mechanism of the present invention.

Fig. 9 is a cross-sectional view of a rotary mechanism of the present invention.

FIG. 10 is a schematic view of a first partial structure of the vacuum mechanism of the present invention.

FIG. 11 is a schematic view of a second partial structure of the vacuum mechanism of the present invention.

Fig. 12 is a schematic perspective view of a part of the jacking mechanism of the present invention.

Fig. 13 is a partially enlarged view of the jack-up mechanism of the present invention.

FIG. 14 is a cross-sectional view of the jacking mechanism of the present invention.

Fig. 15 is a perspective view of the protection mechanism of the present invention.

The labels in the figures are: 1-chassis, 2-rotating rod, 3-placing disk, 4-electric sliding rail, 5-sliding rack, 6-motor, 7-hole opener, 8-transmission mechanism, 81-rack, 82-bevel gear, 83-supporting rod, 84-one-way gear, 9-positioning mechanism, 91-clamping rack, 92-first spring, 93-spacing ring, 94-reel, 95-pulling rope, 10-rotating mechanism, 101-contact rod, 102-guide rod, 103-water pipe, 104-pushing rod, 105-pushing rack, 106-rotating rack, 107-volute spring, 11-dust-absorbing mechanism, 111-fixing rack, 112-hose, 113-dust collector, 114-dust-absorbing rack, 115-collecting rack, 116-pulling block, 117-button rack, 12-jacking mechanism, 121-pulling rack, 122-wedge block, 123-jacking block, 124-second spring, 13-protecting mechanism, 131-connecting block, 132-protecting frame.

Detailed Description

The invention is further described below with reference to the figures and examples.

Example 1

The utility model provides an ultra-thin wafer places board trompil device, please look into fig. 1-9, including chassis 1, bull stick 2, place dish 3, electronic slide rail 4, carriage 5, motor 6, hole digger 7, drive mechanism 8, positioning mechanism 9 and rotary mechanism 10, the top rotary type of chassis 1 is connected with bull stick 2, the top bolt joint of bull stick 2 has placed dish 3, the top left side bolt joint of chassis 1 has electronic slide rail 4, be connected with carriage 5 on the slider of electronic slide rail 4, the right-hand member bolt joint of carriage 5 has motor 6, be connected with hole digger 7 on the output shaft of motor 6, be equipped with drive mechanism 8 on the bull stick 2, be equipped with positioning mechanism 9 on placing dish 3, be equipped with rotary mechanism 10 on placing dish 3.

Referring to fig. 1, 3 and 4, the transmission mechanism 8 includes a rack 81, a bevel gear 82, a support rod 83 and a one-way gear 84, the rack 81 is bolted to the rear lower side of the sliding frame 5, the support rod 83 is bolted to the top of the bottom frame 1, the support rod 83 is located behind the rotating rod 2, the bevel gears 82 are connected to the upper portion of the support rod 83 and the lower portion of the rotating rod 2, the bevel gears 82 on the support rod 83 are rotatably engaged with the support rod 83, the two bevel gears 82 are engaged, and the one-way gear 84 engaged with the rack 81 moving downward is connected to the rear side of the bevel gear 82 on the support rod 83.

Referring to fig. 1, 5 and 6, the positioning mechanism 9 includes four clamping frames 91, four first springs 92, a limiting ring 93, a reel 94 and a pull rope 95, the four clamping frames 91 are slidably connected to the placing tray 3 at regular intervals, the first springs 92 are connected between the clamping frames 91 and the placing tray 3, the four limiting rings 93 are connected to the bottom of the placing tray 3 at regular intervals, the reel 94 is connected to the upper portion of the rotary rod 2, the pull rope 95 is connected between the reel 94 and the clamping frames 91, and the pull rope 95 passes through the limiting rings 93.

Referring to fig. 1, 7, 8 and 9, the rotating mechanism 10 includes a contact rod 101, a guide rod 102, a water pipe 103, a push rod 104, a push frame 105, a rotating frame 106 and a volute spring 107, the contact rod 101 is bolted to the front lower side of the sliding frame 5, four guide rods 102 are evenly connected to the bottom of the placing tray 3 at intervals, the water pipe 103 is slidably penetrated through the lower part of the guide rod 102, water is filled in the water pipe 103, the push rod 104 is slidably connected to one side of the water pipe 103 far away from the placing tray 3, the push frame 105 is slidably connected to one side of the water pipe 103 close to the placing tray 3, the rotating frame 106 is bolted to the bottom of the reel 94, the rotating frame 106 is in contact with the push frame 105, and the volute spring 107 is connected between the rotating frame 106 and the rotating rod 2.

When holes need to be formed in the placing plate, the placing plate is placed at the top of the placing disc 3 firstly, the placing plate is located between the four clamping frames 91, then the motor 6 is started, the output shaft of the motor 6 drives the hole opener 7 to rotate, then the sliding part of the electric sliding rail 4 is controlled to move downwards, the sliding part drives the motor 6, the hole opener 7, the rack frame 81 and the contact rod 101 to move downwards through the sliding frame 5, the rack frame 81 moves downwards and then is meshed with the one-way gear 84, the rack frame 81 moves downwards and then drives the one-way gear 84 to rotate, because the one-way gear 84 is arranged in a one-way mode, the one-way gear 84 cannot drive the bevel gear 82 on the contact rod 101 to rotate, the contact rod 101 moves downwards and then is contacted with the push rod 104 to push the push rod 104 downwards, the push rod 104 pushes the push rod 105 to be close to the rotating frame 106 through water in the water pipe 103, and then the push frame 105 pushes the rotating frame 106, the rotating frame 106 drives the reel 94 to rotate, the volute spiral spring 107 deforms, the reel 94 rotates and winds up the four pull ropes 95, the four clamping frames 91 move towards the direction close to the placing plate through the pull ropes 95 to clamp the placing plate, the first spring 92 compresses, after the placing plate is clamped, the effect of clamping the periphery of the placing plate is achieved, displacement is avoided when the placing plate is opened, the opening accuracy is guaranteed, the rotating hole opener 7 is in contact with the surface of the placing plate, at the moment, a worker closes the electric sliding rail 4, under the rotating action of the hole opener 7, the hole opener 7 opens the surface of the placing plate, after one hole is opened on the surface of the placing plate, the sliding part of the electric sliding rail 4 is controlled to move upwards to reset, the sliding part drives the motor 6, the hole opener 7, the rack frame 81 and the contact rod 101 to move upwards through the sliding frame 5, the rack 81 moves upwards to drive the one-way gear 84 to rotate reversely, the one-way gear 84 rotates reversely and then drives the rotating rod 2 through the bevel gear 82, the placing plate 3 and the placing plate rotate, the contact rod 101 does not push the push rod 104 any more after moving upwards, so that the spiral spring 107 resets and drives the rotating frame 106 and the reel 94 to rotate reversely, the reel 94 rotates reversely and then releases the four pull ropes 95, the rotating frame 106 pushes the push frame 105 reversely and resets after rotating reversely, the push frame 105 pushes the push rod 104 upwards through water in the water pipe 103 and resets, the first spring 92 resets and drives the four clamping frames 91 to move in a direction away from each other to reset and release the placing plate, then the rack 81 disengages from the one-way gear 84 during the upward movement, at this time, the placing plate rotates 90 degrees, the hole formed in the placing plate is not located below the hole opener 7 any more, then the sliding part moves upwards to reset, the electric sliding rail 4 is closed, then the placing plate is opened again until the four holes are formed in the placing plate, at this time, the worker closes the hole 6 after opening the placing plate, and then the placing plate can automatically open the hole from the placing plate 3 through the placing plate.

Example 2

On the basis of embodiment 1, please refer to fig. 1, 10 and 11, and further includes a dust suction mechanism 11, where the dust suction mechanism 11 includes a fixed frame 111, a hose 112, a dust collector 113, a dust suction frame 114, a collection frame 115 and a button frame 117, the fixed frame 111 is bolted to the lower part of the electric slide rail 4, the hose 112 is communicated with the top of the fixed frame 111, the dust collector 113 is bolted to the lower left side of the sliding frame 5, an air outlet end of the dust collector 113 is connected and communicated with the top of the hose 112, the dust suction frame 114 is bolted to the right side of the lower part of the sliding frame 5, a dust suction pipe of the dust collector 113 is connected and communicated with the dust suction frame 114, the collection frame 115 is placed in the fixed frame 111, the button frame 117 is bolted to the lower front side of the electric slide rail 4, the button frame 117 is electrically connected with the dust collector 113, and the contact rod 101 moves downward and contacts with the button frame 117.

Please see fig. 11, the collecting frame further includes a pulling block 116, and the pulling block 116 is welded to the left side of the collecting frame 115, so that the collecting frame 115 can be conveniently pulled out from the fixing frame 111 by a worker.

Referring to fig. 1 and 15, the protection device 13 further includes a protection mechanism 13, the protection mechanism 13 includes a connection block 131 and a protection frame 132, the connection block 131 is bolted on the right side of the motor 6, and the protection frame 132 is bolted on the bottom of the connection block 131.

During the process that the sliding frame 5 drives the contact rod 101, the motor 6 and the hole opener 7 to move downwards, the sliding frame 5 drives the dust collector 113 and the dust collection frame 114 to move downwards, the motor 6 drives the connecting block 131 and the protection frame 132 to move downwards together, then the contact rod 101 presses the control button on the button frame 117 downwards during the process of continuously moving downwards, so that the control button on the button frame 117 opens the dust collector 113, and at the same time, the hole opener 7 opens the placing plate, then under the action of the dust collector 113, the dust collector 113 sucks debris generated when the hole opener 7 opens the placing plate into the hose 112 through the dust collection frame 114, then the debris in the hose 112 falls into the collection frame 115, meanwhile, the protection frame 132 blocks the debris generated during the hole opening, so as to prevent the debris from reversely splashing away from the dust collection frame 114, thereby achieving the effect of protecting the surrounding working environment through the above operation, avoiding the debris from being splashed into the surrounding environment to pollute the air and the surrounding working environment, and then completing the sliding frame, the contact rod 5 drives the motor 6 and the hole opener 7 to move upwards, and the dust collection frame 113 moves back to the dust collection frame 114, and the dust collection frame 113 is pulled back to the dust collection frame 114, and the dust collection frame 114 is finally, and the dust collection frame is moved back to the dust collection frame 114 is returned to the dust collection frame, and the dust collection frame is returned to the dust collection frame 114, and the dust collection frame is returned to the dust collection frame 115, and the dust collection frame is returned to the dust collection frame 116.

Example 3

On the basis of embodiment 2, please look at fig. 1, fig. 12, fig. 13 and fig. 14, the portable electronic device further includes a jacking mechanism 12, the jacking mechanism 12 includes a pulling frame 121, a wedge block 122, a top block 123 and a second spring 124, the pulling frame 121 is connected to the right portion of the placing tray 3 in a sliding manner, the pulling frame 121 penetrates through the right side of the placing tray 3, the wedge block 122 is welded to the right portion of the bottom portion of the placing tray 3 in a sliding manner, the top block 123 is connected to the left side of the pulling frame 121 in a sliding manner, and the second spring 124 is connected between the pulling frame 121 and the placing tray 3.

When the hole is formed in the placing plate, and the placing plate needs to be taken down from the placing plate 3, the worker pulls the pulling frame 121 rightwards, the second spring 124 is compressed, the pulling frame 121 drives the jacking block 123 to move rightwards together, then the jacking block 123 is jacked upwards by the wedge block 122 in the rightwards moving process, the placing plate is jacked upwards after the jacking block 123 moves upwards, then the placing plate is taken down from the placing plate 3 after the pulling frame 121 pulls rightwards to the limit, the pulling frame 121 is loosened, the second spring 124 resets and drives the pulling frame 121 and the jacking block 123 to move leftwards to reset, the jacking block 123 is not jacked by the wedge block 122 after moving leftwards, therefore, the jacking block 123 can move downwards to reset under the action of gravity, the worker can conveniently take the placing plate down from the placing plate 3 through the operation, and convenience is brought to the worker.

The above examples are merely representative of preferred embodiments of the present invention, and the description thereof is more specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, various changes, modifications and substitutions can be made without departing from the spirit of the present invention, and these are all within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. The utility model provides a board trompil device is placed to ultra-thin wafer, including chassis (1), bull stick (2), place dish (3), electronic slide rail (4), carriage (5), motor (6) and hole digger (7), the top rotary type of chassis (1) is connected with bull stick (2), the top of bull stick (2) is connected with places dish (3), be used for placing the board of placing of treating processing, one side that bull stick (2) were kept away from at the top of chassis (1) is connected with electronic slide rail (4), be connected with carriage (5) on the slider of electronic slide rail (4), the one end of carriage (5) is connected with motor (6), be connected with hole digger (7) on the output shaft of motor (6), be used for carrying out the trompil to placing the board, a serial communication port, still including drive mechanism (8), positioning mechanism (9) and rotary mechanism (10), be equipped with drive mechanism (8) on bull stick (2), it rotates to be used for driving the board of placing on placing dish (3), be equipped with positioning mechanism (9) on placing dish (3), be used for the fixed placing the board, be equipped with rotary mechanism (10) on placing dish (3).

2. The ultra-thin wafer placing plate perforating device as claimed in claim 1, wherein the transmission mechanism (8) comprises a rack (81), a bevel gear (82), a support rod (83) and a one-way gear (84), the rack (81) is connected to the rear lower side of the sliding frame (5), the support rod (83) is connected to the top of the bottom frame (1), the bevel gears (82) are connected to the upper portion of the support rod (83) and the lower portion of the rotating rod (2), wherein the bevel gear (82) on the support rod (83) is in running fit with the support rod (83), the two bevel gears (82) are meshed, and the one side of the bevel gear (82) on the support rod (83), which is far away from the bevel gear (82) on the rotating rod (2), is connected with the one-way gear (84) meshed with the rack (81) moving downwards.

3. The ultra-thin wafer placing plate hole opening device as claimed in claim 2, wherein the positioning mechanism (9) comprises a clamping frame (91), a first spring (92), a limiting ring (93), a winding wheel (94) and a pulling rope (95), the clamping frame (91) is connected to the placing disc (3) in a sliding manner at uniform intervals for clamping the placing plate, the first spring (92) is connected between the clamping frame (91) and the placing disc (3), the limiting rings (93) corresponding to the clamping frame (91) in number are connected to the bottom of the placing disc (3) at uniform intervals, the winding wheel (94) is connected to the upper portion of the rotating rod (2), the pulling rope (95) is connected between the winding wheel (94) and the clamping frame (91), and the pulling rope (95) penetrates through the limiting rings (93) and is used for pulling the clamping frame (91) to a direction close to the middle of the placing disc (3).

4. The ultra-thin wafer placing plate punching device according to claim 3, wherein the rotating mechanism (10) comprises a contact rod (101), a guide rod (102), a water pipe (103), a push rod (104), a push frame (105), a rotating frame (106) and a volute spring (107), the contact rod (101) is connected to the front lower side of the sliding frame (5), the guide rods (102) corresponding to the clamping frames (91) are connected to the bottom of the placing disc (3) at uniform intervals, the water pipe (103) penetrates through the lower portion of the guide rod (102) in a sliding manner, the volute pipe (103) is filled with water, the push rod (104) is connected to one side of the water pipe (103) far away from the placing disc (3) in a sliding manner and is used for pushing the water in the water pipe (103), the push frame (105) is connected to one side of the water pipe (103) close to the placing disc (3), the rotating frame (106) is connected to the bottom of the reel (94), the rotating frame (106) is in contact with the push frame (105) and is used for driving the reel (94) to rotate, and the spring (107) is connected between the rotating frame (106) and the rotating rod (2).

5. The ultra-thin wafer placing plate hole opening device as claimed in claim 4, further comprising a dust suction mechanism (11), wherein the dust suction mechanism (11) comprises a fixing frame (111), a hose (112), a dust collector (113), a dust suction frame (114), a collection frame (115) and a button frame (117), the fixing frame (111) is connected to the lower portion of the electric sliding rail (4), the hose (112) is communicated with the top of the fixing frame (111), the dust collector (113) is connected to the lower portion of the left side of the sliding frame (5), the air outlet end of the dust collector (113) is connected and communicated with the top of the hose (112), the dust suction frame (114) is connected to the lower portion of the sliding frame (5), a dust suction pipe of the dust collector (113) is connected and communicated with the dust suction frame (114) for sucking away debris generated during hole opening of the placing plate, the collection frame (115) is placed in the fixing frame (111) and used for collecting the debris sucked away by the dust collector (113), the button frame (117) is connected to the lower front side of the electric sliding rail (4), the button frame (117) is electrically connected with the dust collector (113), and the contact rod (101) moves downward and contacts the button frame (117).

6. The ultra-thin wafer placing plate hole opening device as claimed in claim 5, further comprising a jacking mechanism (12), wherein the jacking mechanism (12) comprises a pulling frame (121), a wedge block (122), a top block (123) and a second spring (124), the pulling frame (121) is connected to the right portion of the placing tray (3) in a front-back symmetrical manner, the pulling frame (121) penetrates through the right side of the placing tray (3), the wedge block (122) is connected to the right side of the bottom of the placing tray (3) in a front-back symmetrical manner, the top block (123) is connected to one side of the pulling frame (121) in a sliding manner and used for jacking the placing plate placed on the placing tray (3), and the second spring (124) is connected between the pulling frame (121) and the placing tray (3).

7. The ultra-thin wafer placing plate hole opening device as claimed in claim 6, further comprising a protection mechanism (13), wherein the protection mechanism (13) comprises a connection block (131) and a protection frame (132), the connection block (131) is connected to one side of the motor (6) far away from the sliding rack (5), and the protection frame (132) is connected to the bottom of the connection block (131) for preventing the debris from splashing around.

8. The ultra-thin wafer placing plate hole opening device as claimed in claim 7, further comprising a pulling block (116), wherein the pulling block (116) is connected to a side of the collecting frame (115) away from the fixing frame (111).