CN115256049A - Signal trigger stability measuring device and measuring method thereof - Google Patents

Signal trigger stability measuring device and measuring method thereof Download PDF

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Publication number
CN115256049A
CN115256049A CN202210912284.6A CN202210912284A CN115256049A CN 115256049 A CN115256049 A CN 115256049A CN 202210912284 A CN202210912284 A CN 202210912284A CN 115256049 A CN115256049 A CN 115256049A
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contact
signal
measuring head
reed
measuring
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CN115256049B (en
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卢红
魏玉展
刘琪
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Wuhan University of Technology WUT
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Wuhan University of Technology WUT
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention provides a signal trigger stability measuring device and a measuring method thereof, wherein the signal trigger stability measuring device is used for detecting signals of a contact measuring head, comprises a fixing mechanism for vertically fixing the contact measuring head, and further comprises: the measuring mechanism comprises a reed, an adjusting table, PZT piezoelectric ceramics and a displacement sensor, the reed is connected to the supporting plate through a flexible part and is opposite to the contact measuring head, a containing groove is formed in the reed in the horizontal direction, one end of the adjusting table is connected to the supporting plate, the other end of the adjusting table is inserted into the containing groove, and the PZT piezoelectric ceramics is arranged at the lifting end of the adjusting table and is abutted against the inner wall of the containing groove. The signal trigger stability measuring device can detect signals of the contact measuring head in different directions so as to obtain a proper angle of the trigger stability signal of the contact measuring head.

Description

Signal trigger stability measuring device and measuring method thereof
Technical Field
The invention relates to the technical field of contact measuring heads, in particular to a device and a method for measuring signal trigger stability.
Background
The contact measuring head is used as an important component of a machine tool in-place measuring system and is used for measuring geometric information of a workpiece, the precision of the contact measuring head directly influences the precision of in-place measurement and the measurement precision, the working performance, the use efficiency and the flexibility degree of the precision measuring instrument, and whether the precision measuring instrument can meet modern measurement requirements depends on continuous innovation and development of a precision measuring head system.
For example, CN215035934U provides a contact type one-way measuring device, which is composed of a supporting plate, an adapter plate, a guide rail, a slider, a sliding body, a pneumatic driving device and a contact type measuring head, wherein the supporting plate is installed on a moving assembly of a Z axis of a machine tool through the adapter plate and can move up and down under the action of the Z axis driving device; the guide rail and the pneumatic driving device are both arranged on the supporting plate; the sliding body acts on the guide rail through the sliding block and can move up and down along the guide rail under the action of the pneumatic driving device; the contact type measuring head is arranged at the lower end of the sliding body and can move up and down along with the sliding body; the contact type measuring head is connected with a machine tool control device through a signal line and transmits a measuring signal to a machine tool numerical control system.
The contact type measuring head is generally installed on a machine tool to be used, the contact type measuring head is similar to the above patent, the installation position and the direction of the contact type measuring head are different in actual use, the displacement amount of the contact type measuring head required to move when triggering a measuring head signal is different, and for some high-precision machining tools, the contact type measuring head must be guaranteed to have higher triggering precision and stability. Therefore, a measuring device capable of measuring the trigger accuracy and trigger stability of the stylus is required in order to select the optimum measuring direction of the stylus.
Disclosure of Invention
In view of the above, there is a need to provide a signal trigger stability measuring apparatus and a measuring method thereof, which solve the technical problem that the machine tool in the prior art cannot test the signal trigger accuracy and stability after the contact probe is installed.
In order to achieve the above technical object, a technical solution of the present invention provides a signal trigger stability measuring apparatus for detecting a signal of a contact probe, including: the support plate is arranged below the contact measuring head and is horizontally arranged, the measuring mechanism comprises a reed, an adjusting table, PZT (piezoelectric ceramic) and a displacement sensor, the reed is connected to the support plate through a flexible part and is arranged opposite to the contact measuring head, a containing groove is formed in the reed along the horizontal direction, one end of the adjusting table is connected to the support plate, the other end of the adjusting table is inserted into the containing groove, the PZT piezoelectric ceramic is arranged at the lifting end of the adjusting table so that the adjusting table can drive the PZT piezoelectric ceramic to be abutted to the inner wall of the containing groove, the displacement sensor is connected to the support plate through an adjusting part and is abutted to the bottom of the reed, and the position of the displacement sensor can be adjusted through the adjusting part so that the displacement sensor and the contact measuring head are coaxially arranged;
the reed can be jacked up through the PZT piezoelectric ceramics until the contact type measuring head outputs a stable signal, so that the displacement required by the contact type measuring head for triggering the stable signal can be obtained through the displacement sensor.
Further, still include elevating system, elevating system set up in the backup pad with between the regulation platform, be used for adjusting the height of regulation platform, elevating system includes crane, diaphragm and drive end, the crane connect in the backup pad, the one end of diaphragm connect in the crane, the other end connect in the regulation platform, the drive end set up in the backup pad connect in the crane, be used for the drive the crane drives the diaphragm with the regulation platform goes up and down.
Further, the adjusting platform is a micro-motion measuring platform.
Furthermore, the support column is vertically arranged and positioned between the flexible part and the support plate, and is used for supporting the reed and enabling the reed to be in a suspended state.
Furthermore, the flexible part is a double-arc flexible hinge, one end of the double-arc flexible hinge is connected to the supporting column, and the other end of the double-arc flexible hinge is connected to the reed and used for driving the reed to move along the vertical direction.
Further, the displacement sensor is a contact type digital sensor.
Further, the regulating part includes dead lever and connecting rod, the dead lever vertical set up in the backup pad, the one end of connecting rod is provided with fixed cover, the other end is provided with the clamping part, the one end of connecting rod is passed through fixed cover rotate connect in dead lever, the other end then pass through fixed connection can be dismantled in the clamping part in contact digital sensor, so that adjust contact digital sensor's position and height.
Furthermore, the fixing rod is a screw rod, and the inner wall of the fixing sleeve is provided with an internal thread corresponding to the screw rod, so that the connecting rod is in threaded connection with the screw rod.
The invention also comprises a signal trigger stability measuring method, which comprises the signal trigger stability measuring device and further comprises the following operation steps:
adjusting the positions of the contact measuring head and the displacement sensor to ensure that a measuring ball of the contact measuring head just contacts the reed and is in a non-triggered state, so that the displacement sensor contacts the lower surface of the reed and the measuring direction of the displacement sensor and the measuring ball of the contact measuring head are on the same axis;
step two, performing contact type measuring head signal triggering test, driving PZT piezoelectric ceramics and a reed to ascend to generate contact displacement with a measuring ball of a contact type measuring head, observing the signal triggering condition of the contact type measuring head in real time until the contact type measuring head triggering signal is stable, and recording the data of the displacement sensor at the triggering moment for later use;
step three, adjusting the positions of the contact type measuring head and the corresponding displacement sensor thereof, repeating the experiment operation of the step one and the step two and recording data;
and step four, analyzing and processing the measurement data, and finding the measurement angle with the best trigger stability by analyzing the stability of the trigger of the contact type measuring head and the stability of the touch distance of the measuring head at different angles through the data, and suggesting the direction as the installation direction when the measuring head detects.
Further, in the first step, the relative positions of the displacement sensor and the contact type measuring head can be set according to an abbe error principle.
Compared with the prior art, the invention has the beneficial effects that: the measuring device can be used for detecting the stability of the trigger signal of the contact measuring head, and can also detect the displacement required by the trigger signal of the contact measuring head through the displacement sensor;
the measuring method provided by the invention can rapidly judge whether the contact type measuring head meets the precision requirement through signal detection so as to rapidly find out the measuring direction with the highest precision, and the optimal measuring angle of the contact type measuring head is utilized to work, so that the measuring precision of the machine tool on-site measuring system can be effectively improved, and the processing efficiency and the product quality are improved.
Drawings
FIG. 1 is a schematic assembly diagram of a signal triggered stability measurement device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a signal triggered stability measurement apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an adjusting member in the signal triggered stability measuring device according to the embodiment of the present invention;
fig. 4 is a schematic operation flow diagram of the signal trigger stability measurement method provided by the present invention.
Detailed Description
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
Referring to fig. 1, the present invention provides a signal trigger stability measuring apparatus for detecting a signal of a contact probe 10, including: the measuring device comprises a supporting plate 1 and a measuring mechanism 2, wherein the supporting plate 1 is arranged below the contact measuring head and is horizontally arranged, the measuring mechanism 2 comprises a reed 21, an adjusting table 22, PZT piezoelectric ceramics 23 and a displacement sensor 24, the reed 21 is connected to the supporting plate 1 through a flexible part 20 and is arranged opposite to the contact measuring head 10, an accommodating groove 211 is formed in the reed 21 along the horizontal direction, one end of the adjusting table 22 is connected to the supporting plate 1, the other end of the adjusting table 22 is inserted into the accommodating groove 211, the PZT piezoelectric ceramics 23 is arranged at the lifting end of the adjusting table 22, so that the adjusting table 22 drives the PZT piezoelectric ceramics 23 to abut against the inner wall of the accommodating groove 211, the displacement sensor 24 is connected to the supporting plate 1 through an adjusting part 30 and abuts against the bottom of the reed 21, and the position of the displacement sensor 24 can be adjusted through the adjusting part 30, so that the displacement sensor 24 and the contact measuring head 10 are coaxially arranged. Wherein, contact gauge head 10 mainly includes gauge head body, survey needle and survey ball, surveys the ball and fixes on the gauge head, and the gauge head body is connected to on the gauge head body, and the gauge head body is connected to the external signal receiving terminal, produces certain displacement when surveying the ball contact work piece, and the contact gauge head then can send one section pulse signal, and this contact gauge head is common structure among the prior art, and here is no longer repeated.
Contact gauge head 10 can be through the vertical fixed of three-jaw chuck, this measuring device then sets up with the survey ball of contact gauge head 10 relatively, measuring mechanism 2 installs in backup pad 1, but through PZT piezoceramics jacking reed, until contact gauge head 10 output stabilizing signal, then derive contact gauge head 10 through displacement sensor 24 and trigger the required displacement volume of stabilizing signal, adjust the position of gauge head through the three-jaw chuck, displacement sensor 24 among the measuring mechanism then can be through regulating part 30 adjustment position, make displacement sensor 24 keep with the coaxial setting of gauge head, then can find out the highest measuring direction of contact gauge head 10 precision through the measurement of many times different angles.
In the embodiment provided by the invention, the displacement sensor 24 is a contact type digital sensor and is used for measuring the displacement of the reed 21.
In the embodiment provided by the invention, the measuring device further comprises a lifting mechanism 3, the lifting mechanism 3 is arranged between the support plate 1 and the adjusting table 22 and used for adjusting the height of the adjusting table 22, the lifting mechanism 3 comprises a lifting frame 31, a transverse plate 32 and a driving end (not shown in the figure), the lifting frame 31 is connected to the support plate 1, one end of the transverse plate 32 is connected to the lifting frame 31, the other end of the transverse plate 32 is connected to the adjusting table 22, the driving end is arranged on the support plate 1 and connected to the lifting frame 31 and used for driving the lifting frame 31 to drive the transverse plate 32 and the adjusting table 22 to lift and lower, and the lifting frame is used for matching with the adjusting table 22 to complete the primary adjustment of the height of the PZT piezoelectric ceramics (which is the height adjustment in the macroscopic sense) so that the high-precision displacement adjustment (which is the height adjustment in the microscopic sense) is completed after the subsequent PZT piezoelectric ceramics are connected with an external power supply. The adjusting table 22 is a micro-motion measuring table for adjusting the height of the PZT piezoelectric ceramic 23 in the vertical direction, and the micro-motion measuring table is a common device in the prior art and is not described herein again.
In the embodiment provided by the invention, the measuring device further comprises a supporting column 4, wherein the supporting column 4 is vertically arranged and positioned between the flexible member 20 and the supporting plate 1, and is used for supporting the spring plate 21 and enabling the spring plate 21 to be in a suspended state. The flexible part 20 is a double-arc flexible hinge, one end of the double-arc flexible hinge 20 is connected with the support column 4 through a bolt, and the other end of the double-arc flexible hinge is connected with the reed 21 through a pin shaft, so that the reed 21 is driven to move in the vertical direction.
In the embodiment of the present invention, the adjusting member 30 includes a fixing rod 301 and a connecting rod 302, the fixing rod 301 is vertically disposed on the supporting plate 1, one end of the connecting rod 302 is provided with a fixing sleeve 3021, the other end of the connecting rod 302 is provided with a clamping portion 3022, one end of the connecting rod 302 is rotatably connected to the fixing rod 301 through the fixing sleeve, and the other end of the connecting rod 302 is detachably and fixedly connected to the contact digital sensor 24 through the clamping portion, so as to adjust the position and height of the contact digital sensor 24. The fixing sleeve 3021 is used to adjust the position of the contact digital sensor 24 in the horizontal direction, and the clamping portion 3022 can clamp and fix different positions of the contact digital sensor 24 as needed, and is used to adjust the position of the contact digital sensor 24 in the vertical direction, so as to keep the measuring direction of the contact digital sensor 24 and the measuring ball of the contact measuring head 10 on the same axis.
In the embodiment provided by the present invention, the fixing rod 301 is a screw, and the inner wall of the fixing sleeve 3021 is provided with an internal thread corresponding to the screw 301, so that the connecting rod 302 is screwed to the screw 301.
The invention also comprises a signal trigger stability measuring method, which comprises the signal trigger stability measuring device and also comprises the following operation steps:
adjusting the positions of a contact type measuring head and a displacement sensor to enable a measuring ball of the contact type measuring head to just contact a reed and be in a non-triggered state, and enabling the displacement sensor to contact the lower surface of the reed and enable the measuring direction of the displacement sensor and the measuring ball of the contact type measuring head to be on the same axis; it is specific, before the experiment begins, install contact gauge head and measuring device in proper order earlier fixedly, measure the position of rack cooperation adjustment reed through elevating system and fine motion, make the survey ball of contact gauge head just contact the reed and be in the state that does not trigger, the fine motion measures the required displacement volume of moving of rack and is theoretical displacement distance, then adjustment displacement sensor's position, make displacement sensor contact the lower surface of reed and produce certain displacement numerical value, guarantee that this displacement numerical value is greater than required displacement numerical value when the contact gauge head triggers, it can make displacement sensor's measuring direction and the survey ball of contact gauge head on same axis according to the minimum principle of abbe's error.
Step two, performing contact type measuring head signal triggering test, driving the reed to ascend through PZT piezoelectric ceramics to generate contact displacement with a measuring ball of the contact type measuring head, observing the signal triggering condition of the contact type measuring head in real time until the contact type measuring head triggering signal is stable, and recording the data of the displacement sensor at the triggering moment for later use; specifically, the reed rises and generates contact displacement with the measuring ball through the driving of the micro-motion measuring rack, the synchronous displacement of the upper surface and the lower surface is realized by the reed through the micro deformation of the double-arc flexible hinge, the lower surface of the reed rises, so that the displacement data of the displacement sensor is slowly reduced, the signal triggering condition of the contact measuring head is observed in real time when the PZT piezoelectric ceramic is driven, the driving is stopped when the signal of the contact measuring head is triggered, whether the trigger signal of the contact measuring head is stable or not is observed after waiting for several seconds, and if the trigger signal of the measuring head is stable, the data of the displacement sensor at the moment is recorded and the macro-motion experimental platform is reset; if the contact type measuring head trigger signal is unstable, the PZT piezoelectric ceramics continue to generate displacement until the trigger signal is stable, and when the measuring head trigger signal is stable, the data of the displacement sensor at the moment of triggering is recorded for later use.
And step three, adjusting the positions of the contact measuring head and the corresponding displacement sensor thereof, clamping and loosening the contact measuring head through a three-jaw chuck, so that the contact measuring head can rotate in the horizontal direction, the rotation angle of the contact measuring head is 20-40 degrees each time, and repeating the experiment operation of the step one and the step two after the contact measuring head rotates each time and recording data.
And step four, analyzing and processing the measurement data, finding the measurement angle with the best trigger stability by analyzing the stability of the trigger of the contact type measuring head and the stability of the touch distance of the measuring head at different angles through the data, and suggesting the direction as the installation direction when the measuring head is detected. Specifically, the data of the displacement sensor before the start of the experiment is recorded as x1When the contact type measuring head trigger signal is stable, the data of the displacement sensor is x2The two are differentiated by (x)1-x2) The displacement required by stable triggering of the contact type measuring head signal is obtained, repeated experimental data measured in different directions of the measuring head form a group, and the range, the variance and the standard deviation of the group of data are respectively calculated for the data measured in multiple times through formulas (1), (2) and (3) after the data abnormal value is eliminated.
R＝xmax-xmin (1)
Figure BDA0003772970440000081
Figure BDA0003772970440000082
Where x represents the mean of the samples, n represents the number of samples, xi represents the individual, and data in other directions measured by the stylus are processed in the same manner to yield the range, variance and standard deviation. By comparing data in different directions, the optimal measuring angle of the measuring head can be found, and the direction is suggested to be used as the mounting direction of the measuring head during detection.
While the invention has been described with reference to specific preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims.

Claims (10)

1. The utility model provides a signal trigger stability measuring device for detect the signal of contact gauge head, including the fixed establishment who is used for vertical fixed contact gauge head, its characterized in that still includes: the measuring mechanism comprises a reed, an adjusting platform, PZT piezoelectric ceramics and a displacement sensor, wherein the reed is connected to the supporting plate through a flexible part and is arranged opposite to the contact measuring head, the reed is provided with a containing groove along the horizontal direction, one end of the adjusting platform is connected to the supporting plate, the other end of the adjusting platform is inserted into the containing groove, the PZT piezoelectric ceramics is arranged at the lifting end of the adjusting platform so that the adjusting platform drives the PZT piezoelectric ceramics to abut against the inner wall of the containing groove, the displacement sensor is connected to the supporting plate through an adjusting part and abuts against the bottom of the reed, and the position of the displacement sensor can be adjusted through the adjusting part so that the displacement sensor and the contact measuring head are coaxially arranged;
the reed can be jacked up through the PZT piezoelectric ceramics until the contact type measuring head outputs a stable signal, so that the displacement required by the contact type measuring head for triggering the stable signal can be obtained through the displacement sensor.
2. The signal-triggered stability measurement device of claim 1, wherein: still include elevating system, elevating system set up in the backup pad with between the regulation platform, be used for adjusting the height of regulation platform, elevating system includes crane, diaphragm and drive end, the crane connect in the backup pad, the one end of diaphragm connect in crane, the other end connect in the regulation platform, the drive end set up in the backup pad and connect in the crane is used for the drive the crane drives the diaphragm with the regulation platform goes up and down.
3. The signal-triggered stability measurement device of claim 2, wherein: the adjusting platform is a micro-motion measuring platform.
4. The signal-triggered stability measurement device of claim 1, wherein: the support column is vertically arranged and located between the flexible part and the support plate, and is used for supporting the reed and enabling the reed to be in a suspended state.
5. The signal-triggered stability measurement device of claim 4, wherein: the flexible part is a double-arc flexible hinge, one end of the double-arc flexible hinge is connected with the supporting column, and the other end of the double-arc flexible hinge is connected with the reed and used for driving the reed to move along the vertical direction.
6. The signal-triggered stability measurement device of claim 1, wherein: the displacement sensor is a contact type digital sensor.
7. The signal-triggered stability measurement device of claim 1, wherein: the regulating part includes dead lever and connecting rod, the dead lever vertical set up in the backup pad, the one end of connecting rod is provided with fixed cover, the other end is provided with the clamping part, the one end of connecting rod is passed through fixed cover rotate connect in dead lever, the other end then pass through fixed connection can be dismantled in the clamping part in contact digital sensor, so that adjust contact digital sensor's position and height.
8. The signal-triggered stability measurement device of claim 7, wherein: the fixing rod is a screw rod, and the inner wall of the fixing sleeve is provided with an internal thread corresponding to the screw rod, so that the connecting rod is in threaded connection with the screw rod.
9. A signal triggered stability measurement method comprising the signal triggered stability measurement device of claims 1-8, characterized by:
the method comprises the following operation steps:
adjusting the positions of the contact measuring head and the displacement sensor to ensure that a measuring ball of the contact measuring head just contacts the reed and is in a non-triggered state, so that the displacement sensor contacts the lower surface of the reed and the measuring direction of the displacement sensor and the measuring ball of the contact measuring head are on the same axis;
step two, performing contact probe signal triggering test, driving PZT piezoelectric ceramics and reeds to rise to generate contact displacement with a measuring ball of the contact probe, observing the signal triggering condition of the contact probe in real time until the contact probe triggering signal is stable, and recording the data of the displacement sensor at the triggering moment for later use;
step three, adjusting the positions of the contact type measuring head and the corresponding displacement sensor thereof, repeating the experiment operation of the step one and the step two and recording data;
and step four, analyzing and processing the measurement data, finding the measurement angle with the best trigger stability by analyzing the stability of the trigger of the contact type measuring head and the stability of the touch distance of the measuring head at different angles through the data, and suggesting the direction as the installation direction when the measuring head is detected.
10. The signal-triggered stability measurement method of claim 9, wherein: in the first step, the relative positions of the displacement sensor and the contact type measuring head can be set according to an Abbe error principle.
CN202210912284.6A 2022-07-29 2022-07-29 Signal trigger stability measuring device and measuring method thereof Active CN115256049B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006189399A (en) * 2005-01-07 2006-07-20 Mitsutoyo Corp Contact type measuring apparatus
CN102814707A (en) * 2012-08-14 2012-12-12 西安理工大学 Device and method for determining trigger stroke of trigger sensor
CN103344197A (en) * 2013-07-16 2013-10-09 北京工业大学 Contact-type three-dimensional scanning measuring head
CN110487155A (en) * 2019-08-02 2019-11-22 西安工业大学 The acquisition methods of linear array gauge head and contact straight spur gear flank of tooth point cloud
CN112296368A (en) * 2020-11-13 2021-02-02 哈尔滨工业大学 Macro-micro composite diamond turning tool height adjusting tool rest based on piezoelectric ceramics

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006189399A (en) * 2005-01-07 2006-07-20 Mitsutoyo Corp Contact type measuring apparatus
CN102814707A (en) * 2012-08-14 2012-12-12 西安理工大学 Device and method for determining trigger stroke of trigger sensor
CN103344197A (en) * 2013-07-16 2013-10-09 北京工业大学 Contact-type three-dimensional scanning measuring head
CN110487155A (en) * 2019-08-02 2019-11-22 西安工业大学 The acquisition methods of linear array gauge head and contact straight spur gear flank of tooth point cloud
CN112296368A (en) * 2020-11-13 2021-02-02 哈尔滨工业大学 Macro-micro composite diamond turning tool height adjusting tool rest based on piezoelectric ceramics

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