CN115255410A - Air-float semiconductor cutting electric spindle - Google Patents
Air-float semiconductor cutting electric spindle Download PDFInfo
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- CN115255410A CN115255410A CN202210827750.0A CN202210827750A CN115255410A CN 115255410 A CN115255410 A CN 115255410A CN 202210827750 A CN202210827750 A CN 202210827750A CN 115255410 A CN115255410 A CN 115255410A
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- air
- bearing
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- assembly
- spindle
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 238000005520 cutting process Methods 0.000 title claims abstract description 11
- 229910000831 Steel Inorganic materials 0.000 claims description 39
- 239000010959 steel Substances 0.000 claims description 39
- 238000013016 damping Methods 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 239000000498 cooling water Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 230000020347 spindle assembly Effects 0.000 claims 1
- 238000007667 floating Methods 0.000 abstract description 13
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000007704 transition Effects 0.000 description 15
- 239000000306 component Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 239000008358 core component Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention relates to an air-floating main shaft, in particular to an air-floating semiconductor cutting electric main shaft, which solves the structural problem of a cutting main shaft. The radial air-bearing assembly comprises a shaft core assembly and a radial bearing, wherein a radial air cavity and an air film are arranged between the shaft core assembly and the radial air-bearing, the radial air cavity is provided with a radial air hole communicated with the inside and the outside on the radial air-bearing, and the radial air-bearing and the machine body assembly are assembled in an interference manner, so that the domestic production of the semiconductor cutting spindle is realized; the technology can improve the rigidity of the air bearing, improve the capability of keeping the rotation center unchanged, and further improve the integral cutting capability of the air spindle; the technology can increase the surface hardness of the shaft core by almost one time.
Description
Technical Field
The invention relates to an air-floating main shaft, in particular to an air-floating semiconductor cutting electric main shaft.
Background
In the prior art, a plurality of O-shaped rings are arranged on the excircle of an air bearing and then are arranged on a structural member or a shell. According to the structure, the O-shaped ring is made of soft materials, when the air bearing bears radial load, the O-shaped ring can deform, the air bearing displaces, and therefore the rotating center deviates, the machining center leaves the set position, and product precision is insufficient. In the prior art, the hardness and the smoothness of the surface of the shaft core are improved through a heat treatment process and precision grinding, but the hardness is about 60 degrees due to the technical limitation, the friction coefficient is still relatively high, and the product can be slightly contacted in the running process to cause the phenomenon of friction and seizure.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an air-float semiconductor scribing motorized spindle.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows: the radial air-bearing assembly comprises a shaft core assembly and a radial bearing, a radial air cavity and an air film are arranged between the shaft core assembly and the radial air-bearing, the radial air cavity is provided with radial air holes communicated with the inside and the outside of the radial air-bearing, the radial air-bearing and the body assembly are in interference fit, and the shaft core assembly is at least partially provided with a diamond-like coating on the outer circumferential surface.
And the radial air cavity is provided with a damping plug at the radial air hole.
The inner diameter of the air inlet end of the damping plug is larger than that of the air outlet end of the damping plug.
And the air outlet end of the damping plug is expanded outwards to form a horn-shaped opening.
The damping device also comprises a front thrust bearing assembly and a rear thrust bearing assembly which are communicated with the radial air cavity, and damping plugs are arranged at the positions of the front thrust bearing assembly and the rear thrust bearing assembly which are communicated with the radial air cavity.
The machine body assembly is a cavity structural member, and an air inlet main channel, an air return main channel, a cooling water channel, an air inlet and an air lock mounting opening are distributed on the inner wall of the machine body along the axial direction.
The shaft core assembly comprises a shaft core and a partition plate, wherein the shaft core is a solid shaft and is sequentially divided into a central shaft section, a rotor mounting section, a flying disc section and a cutter mounting section, the central shaft section is arranged in the radial air bearing, an air locking hole is formed in the middle of the central shaft section, the flying disc section is arranged in the middle of the front and rear thrust bearing assemblies, and the cutter mounting section is connected to the flying disc section.
The magnetic steel rotor and stator assembly driving mechanism comprises a magnetic steel rotor and a magnetic steel stator.
The invention has the beneficial effects that: the air-floating semiconductor cutting electric spindle provided by the invention realizes the domestic production of the semiconductor cutting spindle; the technology can improve the rigidity of the air bearing, improve the capability of keeping the rotation center unchanged, and further improve the integral cutting capability of the air spindle; the technology can increase the surface hardness of the shaft core by almost one time, the friction coefficient is reduced by more than one half, the general contact friction is generated in the product operation process, the clamping phenomenon cannot be caused, the clamping proportion of the product can be obviously reduced, and the service life of the product is prolonged.
Drawings
FIG. 1 is a schematic front sectional view of the present invention;
fig. 2 is a schematic top sectional view of the present invention.
Detailed Description
As shown in fig. 1-2, an air-floating semiconductor dicing motorized spindle includes a radial air-floating bearing assembly 7 and a body assembly 6 disposed outside the radial air-floating bearing assembly 7, where the radial air-floating bearing assembly 7 includes a shaft core assembly 2 and a radial air-floating bearing, a radial air cavity and an air film are disposed between the shaft core assembly 2 and the radial air-floating bearing, the radial air cavity is provided with radial air holes communicating inside and outside on the radial air-floating bearing, the radial air-floating bearing and the body assembly 6 are in interference fit, and the shaft core assembly 2 is at least partially provided with a diamond-like coating on an outer circumferential surface. In practice, the product should include the machine body assembly 6, the shaft core assembly 2, the driving assembly, the radial air bearing assembly 7, the rear thrust bearing assembly, the front thrust bearing assembly 1, the rear steel sleeve 9, the transition sleeve 8, the air lock assembly, the outlet plate 10, the rear cover plate 12, the separating plate 11, the carbon brush 22 and the side cover plate. The radial air-bearing assembly 7 is a cavity structural member, and a plurality of circles of uniform damping plug holes are arranged in the radial direction and are arranged in an inner hole of the machine body assembly 6; the transition sleeve 8 is positioned at the tail part of the engine body assembly 6 and is mainly used for communicating the engine body assembly 6 with the rear steel sleeve 9; the rear steel sleeve 9 is a cavity structural member, and a cooling water channel and a cooling water inlet and a cooling water outlet are distributed on the inner wall of the rear steel sleeve 9 along the axial direction; a power line outlet and a power connector are arranged in the wire outlet plate 10 and fixed on the rear steel sleeve 9; the rear cover plate 12 is positioned at the tail part of the rear steel sleeve 9, an air outlet and a carbon brush mounting hole are arranged on the rear cover plate, and a carbon brush 22 and a separation plate 11 are fixed on the rear cover plate; the air lock component comprises a lock shaft main body 17, a piston pin 19, an air plug 18 and a spring 20, wherein the lock shaft main body 17 is a cavity part locked on the machine body component 6; the piston pin 19 passes through the spring 20 and is positioned inside the lock shaft main body 17; an air lock 18 is fixed to the rear end of the lock shaft main body 17.
Main air flotation gas flow: gas enters a main air channel of the machine body assembly 6 from the outside through an air joint on the machine body assembly 6, one part of gas in the main air channel is three, two or more gas enters a cavity between the radial bearing assembly and the machine body assembly 6 through a radial small hole of the machine body assembly 6, and then enters an air cavity between the radial air bearing assembly 7 and the shaft core assembly 2 through a 6-ring damping plug small hole on the air bearing assembly, so that the shaft core assembly 2 is supported to be radially suspended; the other gas enters the front end of the main shaft through an axial air hole of the machine body component 6, the gas is divided into two parts and respectively enters the cavities of the front and rear thrust bearing components, and then enters an air cavity between the shaft core flying disc and the thrust bearing 3 through a circle of small damping plug holes of the thrust bearing 3, and the shaft core component 2 is supported to axially suspend;
the air in the air cavity of the radial air-bearing assembly 7 flows to the air cavity of the flying disc and the air cavity of the transition sleeve 8 respectively along the left and right sides of the outer wall of the shaft core under the action of pressure; the air in the flying disc air cavity is increased along with the pressure, enters the air return channel of the rear thrust bearing assembly through the gap plate U-shaped hole, then enters the air return channel of the engine body assembly 6, reaches the air cavity of the transition sleeve 8, enters the cavities of the rear steel sleeve 9 and the rear cover plate 12 through the gap between the stator and the rotor, and finally reaches the air return joint of the rear cover plate 12 through the air channel of the rear cover plate 12 to be led out of the main shaft.
The air lock function: gas enters the cavity of the lock shaft body from the outside through the gas joint on the lock shaft body, the piston pin 19 presses the spring 20 to move towards the shaft core under the action of gas pressure, the piston pin 19 is inserted into the gas lock hole of the shaft core, and the shaft core is fixed. The external air pressure disappears, the piston pin 19 rebounds to the top under the counterforce of the spring 20 and is tightly attached to the air plug 18, and the air plug 18 is provided with an O-shaped ring sealing air which is fixed through a screw.
Cooling water channels: cooling water enters a first water inlet channel of the rear steel sleeve 9 from the outside through an upper water inlet joint of the rear steel sleeve 9, and is sequentially connected with a first water channel of the transition sleeve 8 and a first water inlet channel of the engine body assembly 6, the first water channel of the engine body assembly 6 is in switching connection with a second water channel of the engine body assembly 6, and is sequentially communicated with the second water channel of the transition sleeve 8 and a second water channel of the rear steel sleeve 9, the second water channel of the rear steel sleeve 9 is in switching connection with a third water channel of the third water channel at the tail part of the rear steel sleeve 9, the third water channel of the rear steel sleeve 9 is connected with a third water channel of the transition sleeve 8, the third water channel of the rear steel sleeve 9 is in switching connection with a fourth water channel of the transition sleeve 9, the fourth water channel of the rear steel sleeve 9 is in switching connection with a fourth water channel of the rear steel sleeve 9, and the fifth water channel of the rear steel sleeve 9 are sequentially connected with a fifth water channel of the transition sleeve 8 and the third water channel of the engine body assembly 6; a third water channel and a fourth water channel of the machine body assembly 6 are switched on the lower portion of the machine body, the fourth water channel of the machine body assembly 6 is communicated with a sixth water channel of a transition sleeve 8, a sixth water channel of a rear steel sleeve 9 is sequentially connected with a sixth water channel of the rear steel sleeve 9, the sixth water channel of the rear steel sleeve 9 is communicated with a sealed cavity of a rear cover plate 12 through a rear steel sleeve 9, a seventh water channel of the rear steel sleeve 9 is sequentially connected with a seventh water channel of the transition sleeve 8, a fifth water channel of the machine body assembly 6 is sequentially connected with a fifth water channel of the rear steel sleeve 9, the fifth water channel of the machine body assembly 6 is switched on the lower portion of the machine body assembly 6, the sixth water channel of the machine body assembly 6 is communicated with an eighth water channel of the transition sleeve 8, an eighth water channel of the rear steel sleeve 9 is sequentially connected with a eighth water channel of the rear steel sleeve 9, the eighth water channel of the rear steel sleeve 9 is switched on the tail portion of the rear steel sleeve 9, the ninth water channel of the rear steel sleeve 9 is connected with a ninth water channel of the transition sleeve 8, the ninth water channel of the transition sleeve 8 is communicated with a tenth water channel, the tenth water channel of the transition sleeve 8 is sequentially connected with a twelfth water channel of the rear steel sleeve 9, the twelfth water channel assembly 6, the twelfth water channel assembly of the twelfth water channel of the machine body assembly 6, the twelfth water sleeve 6 is sequentially connected with a twelfth water channel of the twelfth water sleeve 6, and a connector of the rear steel sleeve 6, and a twelfth water channel connector of the rear steel sleeve 6, and a twelfth water sleeve 6, and a connector of the twelfth water channel connector assembly.
The working principle is summarized as follows: the air bearing assembly in the electric spindle of the air bearing in the prior art is schematically installed, and the existing air bearing is mostly installed on a machine body through an O-shaped ring for the convenience of disassembly and assembly. That is to say, the air bearing can be installed or detached as long as the friction force between the compressed O-shaped ring and the inner wall of the machine body can be offset. Although the air floatation bearing is convenient to assemble, maintain and disassemble, soft support is caused between the air floatation bearing and the machine body, when the shaft core receives radial load, the shaft core extrudes an air film, the air film pushes the air floatation bearing to compress an O-shaped ring to deform, and the rotating center of the shaft core deviates from the original position, so that the integral rigidity of the air floatation motorized spindle is reduced. In order to improve the prior art, the invention provides an air bearing and an installation method. The direct interference fit of the O-shaped ring is not arranged between the machine body component 6 and the radial air-bearing component 7, when the shaft core component 2 receives an external load, because the air-bearing is in rigid fit with the machine body, an air film can not push the air-bearing to displace, only when the external load is greater than the air film rigidity, the radial displacement can occur to the shaft core, and the air film rigidity is far greater than the elastic modulus of the O-shaped ring.
In the prior art, the surface hardness and the smoothness of a shaft core are improved through a heat treatment process and precision grinding, but the hardness is about 60 degrees due to the technical limitation, the friction coefficient is still relatively high, and the phenomenon of friction and blocking can be caused by slight contact of products in the operation process. In order to improve the prior art, the invention applies a shaft core surface treatment technology. As shown in a schematic diagram, the surface (whole or part) of the shaft core is coated with a layer of diamond-like carbon with high hardness and small friction coefficient by a DLC coating technology, the coating thickness is uniform, the form and position tolerance of a base material is not changed, and only a micron-sized coating layer is added. When the shaft core operates, accidental friction occurs, and because the friction coefficient is small and the surface of the shaft core is superhard, the shaft core and the bearing cannot be blocked by friction.
The radial air cavity is provided with a damping plug at the radial air hole, the air floatation motorized spindle further comprises a plurality of damping plugs, through holes are formed in the damping plugs, the inner diameter of the air inlet end is larger than that of the air outlet end, and the tail of the air outlet end is expanded outwards to form a horn cavity. The inner diameter of the air inlet end of the damping plug is larger than that of the air outlet end. And the air outlet end of the damping plug is expanded outwards to form a horn-shaped opening. The front thrust bearing assembly 1 and the rear thrust bearing assembly are communicated with the radial air cavity, and damping plugs are arranged at the positions where the front thrust bearing assembly 1 and the rear thrust bearing assembly are communicated with the radial air cavity. The front thrust bearing assembly, the rear thrust bearing assembly and the radial air bearing assembly 7 are respectively provided with a damping plug. When the air reaches the air outlet end from the air inlet end of the damping plug, the flow velocity is increased, the bearing capacity of the shaft core is increased, when the air flow passes through the horn-shaped air outlet tail end, a vortex cannot be formed, and the pressure loss of the air film is reduced, so that the supporting force of the shaft core is increased, and the heat productivity can be reduced.
The machine body assembly 6 is a cavity structural member, and an air inlet main channel, an air return main channel, a cooling water channel, an air inlet and an air lock mounting opening are distributed on the inner wall of the machine body along the axial direction.
The shaft core component 2 comprises a shaft core and a partition plate 4, wherein the shaft core is a solid shaft and is sequentially divided into a central shaft section, a rotor mounting section, a flying disc section and a cutter mounting section, the central shaft section is arranged in the radial air bearing, an air locking hole is formed in the middle of the central shaft section, the flying disc section is arranged in the middle of the front thrust bearing component and the rear thrust bearing component, and the cutter mounting section is connected to the flying disc section.
Still include drive assembly, drive assembly includes magnet steel rotor and stator module. The magnetic steel rotor is arranged at the tail part of the shaft core and forms a permanent magnet synchronous motor with the stator assembly, a high-frequency alternating current is conducted to the stator assembly through a driver, so that an alternating magnetic field is formed between the stator and the magnetic steel rotor, and the magnetic steel rotor receives a rotating torque to drive the whole shaft core to rotate at a high speed. The anterior cutter installation section of axle core subassembly 2, outer taper angle is unanimous with the cutter, guarantee cutter and axle core laminating that can be fine, and the hole adopts anti-tooth locking, and when the axle core was rotatory, cutter set screw became more and more tight under the effect of centrifugal force, ensures that the cutter can not loosen and take off at the operation in-process. The carbon brush 22 is installed on the rear cover plate 12, the carbon brush 22 is in contact with the electrode plate 21 at the tail part of the shaft core, the tail spring 20 is pressed, the shaft core rotates at a high speed and rubs with the carbon brush 22, the hardness of the carbon brush 22 is low, the friction is shortened, the carbon brush 22 is pushed by the tail spring 20 of the carbon brush 22 to be always in contact with the electrode plate 21 at the tail part of the shaft core, and therefore the shaft core and the carbon brush 22 are ensured to be always conducted.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, are not to be considered as limiting the present invention, and that the fundamental principles, the main features, and the advantages of the present invention are shown and described above, as would be understood by those skilled in the art.
Claims (8)
1. The utility model provides an air supporting semiconductor cutting electricity main shaft, includes radial air supporting subassembly and locates its outside organism subassembly, radial air supporting subassembly includes axle core subassembly and radial bearing, have radial air cavity and air film between axle core subassembly and the radial air supporting bearing, radial air cavity is equipped with the inside and outside radial gas pocket of intercommunication on the radial air supporting bearing, its characterized in that, interference fit between radial air supporting bearing and the organism subassembly, and the axle core subassembly is equipped with the diamond-like carbon coating on at least part on the periphery.
2. The air-bearing semiconductor dicing motorized spindle of claim 1, wherein the radial air cavity is provided with a damping plug at a radial air hole.
3. The air-bearing semiconductor dicing motorized spindle of claim 2, wherein an inner diameter of an air inlet end of the damping plug is larger than an inner diameter of an air outlet end of the damping plug.
4. The air-bearing semiconductor dicing motorized spindle of claim 3, wherein the air outlet end of the damping plug is flared to form a flared opening.
5. The air-bearing semiconductor dicing electric spindle of claim 3 or 4, further comprising a front thrust bearing assembly and a rear thrust bearing assembly communicating with the radial air chamber, and the front thrust bearing assembly and the rear thrust bearing assembly are provided with damping plugs at the positions communicating with the radial air chamber.
6. The air-bearing semiconductor dicing motorized spindle of claim 1, wherein the body assembly is a cavity structure, and an air intake main channel, an air return main channel, a cooling water channel, and an air intake and an air lock mounting opening are distributed along an axial direction on an inner wall of the body.
7. The air-bearing semiconductor dicing electric spindle of claim 6, wherein the spindle assembly includes a spindle core and a partition plate, wherein the spindle core is a solid spindle and is sequentially divided into a central spindle section, a rotor mounting section, a flying disc section and a cutter mounting section, the central spindle section is disposed in the radial air-bearing, an air lock hole is disposed in the middle of the central spindle section, the flying disc section is disposed in the middle of the front and rear thrust bearing assemblies, and the cutter mounting section is connected to the flying disc section.
8. The air-bearing semiconductor dicing motorized spindle of claim 7, further comprising a drive assembly, the drive assembly comprising a magnetic steel rotor and a stator assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210827750.0A CN115255410A (en) | 2022-07-14 | 2022-07-14 | Air-float semiconductor cutting electric spindle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210827750.0A CN115255410A (en) | 2022-07-14 | 2022-07-14 | Air-float semiconductor cutting electric spindle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115255410A true CN115255410A (en) | 2022-11-01 |
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ID=83765181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210827750.0A Pending CN115255410A (en) | 2022-07-14 | 2022-07-14 | Air-float semiconductor cutting electric spindle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115255410A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116658524A (en) * | 2023-05-31 | 2023-08-29 | 深圳市汉诺克精密科技有限公司 | Self-lubricating and low-magnetic-disturbance air floatation main shaft |
-
2022
- 2022-07-14 CN CN202210827750.0A patent/CN115255410A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116658524A (en) * | 2023-05-31 | 2023-08-29 | 深圳市汉诺克精密科技有限公司 | Self-lubricating and low-magnetic-disturbance air floatation main shaft |
| CN116658524B (en) * | 2023-05-31 | 2024-02-06 | 深圳市汉诺克精密科技有限公司 | Self-lubricating and low-magnetic-disturbance air floatation main shaft |
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