CN1152540A

CN1152540A - Overhead travelling crane

Info

Publication number: CN1152540A
Application number: CN96119910A
Authority: CN
Inventors: 盐饱保
Original assignee: Murata Machinery Ltd
Current assignee: Murata Machinery Ltd
Priority date: 1995-09-08
Filing date: 1996-09-09
Publication date: 1997-06-25
Also published as: JP2982159B2; KR100277748B1; KR970015444A; TW330187B; JPH0977456A

Abstract

The invention discloses a crown block that the work piece can be accurately clamped, which is provided with a body supported through a track and running on the track, an elevating system arranged on the lower part of the body and a mechanical hand lifted through the above elevating system, which is characterized in that the bottom of the mechanical hand is in horizontal arrangement of a plurality of claws for the positioning of work pieces, and the mechanical hand is also provided with a cam plate for the rotation of the claws and a motor for the rotation of the cam plate.

Description

Overhead traveling crane

The invention relates to the overhead traveling crane of carrying workpiece, particularly about overhead traveling crane with the manipulator holding workpiece.

To use overhead traveling crane when in places such as factory, carrying finished product or half-blank workpiece.Overhead traveling crane is along the track travel that is laid on the building ceiling, and by being arranged on body lifting mechanism lifting machinery hand, and workpiece in clamping on the manipulator.Like this for small-sized, lightweight that realizes overhead traveling crane and the reliability that improves the work transporting process, must be with simple mechanism, holding workpiece exactly.

The purpose of this invention is to provide a kind of overhead traveling crane with following advantage.

1) with simple mechanical grip workpiece.

2) dislocation that can remove between workpiece and manipulator influences, and the permission skew range of its relative position can increase.

3) can detect workpiece and whether be in the state of being held.

For achieving the above object, the present invention takes following technical scheme:

A kind of overhead traveling crane, it is provided with by the body of rail supported and walking thereon, is arranged on the lifting mechanism of body bottom and by the manipulator of above-mentioned lifting mechanism lifting, it is characterized in that: be provided with several claws free to rotate that are used to make the workpiece location at described manipulator bottom level, and be provided with lobe plate that makes each claw rotation and the motor that this lobe plate is rotated at above-mentioned manipulator place.

Described overhead traveling crane is characterized in that: the central position in above-mentioned manipulator bottom is provided with the centering parts that match with the workpiece auxiliary section.

Described overhead traveling crane is characterized in that: the lug boss that can match with workpiece spill position is set in above-mentioned claw termination, and is provided with position transduser at above-mentioned manipulator place, be used to detect the workpiece that is in from the claw float state.

The present invention has following characteristics: be equipped with the body of also being walked by rail supported in this overhead traveling crane thereon, be arranged on the lifting mechanism of body bottom and by the manipulator of above-mentioned lifting mechanism lifting, be provided with several claws free to rotate that are used to make the workpiece location at this manipulator bottom level, be provided with at above-mentioned manipulator place simultaneously and make each claw lobe plate that rotates and the motor that this lobe plate is stopped.

Except that above-mentioned formation, also have gratifying formation: the central position in above-mentioned manipulator bottom is provided with the centering parts that match with the workpiece auxiliary section.

In addition, be provided with the boss that can match with workpiece spill position in above-mentioned claw termination, the while is provided with at above-mentioned manipulator place and is used to detect the position transduser that workpiece is in relative over draft position, claw top.

The effect and the effect of invention:

In the present invention, manipulator bottom is provided with some claws, when lobe plate rotates, drives some claws and horizontally rotates simultaneously, thereby finish location or release to workpiece.The simple structure of forming by lobe plate, lobe plate drive motor, some claws just can be finished the location and the release of workpiece like this.Central part in manipulator bottom is provided with the centering parts in addition, revises the relative position of workpiece and manipulator by matching with component on the workpiece.Like this, carry out clamping again after can revising dislocation by the centering action during manipulator holding workpiece.Because being provided with lug boss in the termination of claw can match with the spill position of workpiece, improved the reliability of location.When above-mentioned lug boss did not cooperate with the spill position, workpiece can upwards improve slightly with respect to claw, so the position transduser that detects this state is set, just can detect not the phenomenon of location fully.

Following with reference to accompanying drawing, describe embodiments of the invention in detail:

Fig. 1 is the main position front elevation of chassis parts in the overhead traveling crane of the present invention

Fig. 2 is the main position planar view of chassis parts in the overhead traveling crane of the present invention

Fig. 3 is the main position of a chassis parts vertical guide cutaway view in the overhead traveling crane of the present invention

Fig. 4 is that overhead traveling crane of the present invention is in chassis parts walking states scheme drawing when turning round the position

Fig. 5 is the main position of a lifting mechanism of the present invention front elevation

Fig. 6 is a lifting mechanism backplan of the present invention

Fig. 7 is the drive connection scheme drawing of motor, drg and hyperbolic gear in the lifting mechanism of the present invention

Fig. 8 is the decomposing state scheme drawing on the lifting mechanism short transverse of the present invention

Fig. 9 is along the decomposing state scheme drawing on rotor plate top in the manipulator of the present invention

Figure 10 is the decomposing state scheme drawing on the manipulator short transverse of the present invention

Figure 11 be in the manipulator of the present invention along on the lobe plate middle part decomposition shape scheme drawing

Figure 12 is the main position of a manipulator of the present invention short transverse cutaway view

Figure 13 is the manipulator of the present invention testing agency's scheme drawing that lands

Figure 14 is an overhead traveling crane schematic perspective view of the present invention

Fig. 1～Figure 14 has represented the embodiment of overhead traveling crane of the present invention, and what at first show is the structure of the integral structure and the chassis of overhead traveling crane.What show among Figure 14 is the integral structure of overhead traveling crane 2.Wherein, the 01st, the track that lays on clean room or the mill construction ceiling, the 02nd, guide rail, the 03rd, the communication cable between overhead traveling crane 02 and administrative center.Overhead traveling crane 2 has two chassis 4, and each chassis 4 has car bumper 6 again respectively.As Fig. 1～shown in Figure 3, body 8 is connected on the chassis 4 by pivot, is provided with lifting mechanism 10 below this body 8.And lifting mechanism 10 makes manipulator 12 make the workpiece 04 such as SMIF gondola that semiconductor substrate is deposited in 12 clampings of dipping and heaving manipulator and conveyance.Two 14 among the figure is a pair of anti-fall parts, when manipulator 12 liftings and conveyance workpiece 04, prevents that this workpiece 04 from coming off.

Chassis

Fig. 1 is the structure of the chassis 4 seen on the vertical direction of being advanced by overhead traveling crane 2, and Fig. 2 is its plan structure, and Fig. 3 is the section-drawing along chassis 4 on track 01 vertical direction.Above among each figure the outer cover of chassis 4 all taken down.Here at first describe with reference to the installation Zhi Yitu 3 of each chassis 4 with respect to track 01.Wherein, the 05th, the strut member of track 01.This strut member 05 can be adjusted the height of track 01, and it is covered with by outer cover 06.The 08th, the power supply stringing of overhead traveling crane 2, the 09th, the identifier of sign overhead traveling crane 2 stop positions.

As Fig. 1～shown in Figure 3, on the length direction of each chassis 4 (promptly parallel direction) with track 01, approximately be horizontally disposed with capable electrizer 16, the motor shaft 20 of this motor 16 also is substantially and is horizontally disposed with, and has in the scope of about ± 10 degree angle such as being located at horizontal surface.Drg is not set on the movable motor 16, is provided with drg 18 such as electromagnetic braking but separate with it.Motor shaft 20 links to each other with hyperbolic gear 24 respectively with the brake axle 22 of drg 18, makes gyratory directions change 90 degree back drive walking axles 25 and rotates last ground-engaging wheel 26.Here the plane of rotation of road wheel 26 is vertical, also can be horizontally disposed with.The 28th, prevent de-orbit 01 orienting roll of chassis 4, as Fig. 2～shown in Figure 3, be provided with 8 respectively at every chassis 4 places.In addition, the end of car bumper 6 also is provided with orienting roll 28, so that car bumper 6 can walking smoothly in guide rail 02.The 30th, current colector free to rotate on vertical axis, this current colector 30 is linked to each other with power supply by stringing 08, gives power supply such as driving motor 16 parts such as grade.

The 32nd, pivot is used to connect chassis 4 and body 8.Like this, a pair of chassis 4 relative bodies 8 can be used as bogie truck and use.Each part 34 is respectively car bumper 6 and chassis 4 bonded assembly pivots, and links to each other with the shell 15 of chassis 4.Car bumper 6 is walked on guide rail 02 by orienting roll 28, and can be by the break-in campaign of pivot 34 dos with respect to chassis 4.Leading section at this car bumper 6 is provided with proximity transducer 36, and whether be used to detect direct of travel the place ahead has other overhead traveling crane or obstacle etc.The 38th, be identification marking symbol 09 read sensor that is provided with, this read sensor is by means of the control data identification stop position of storage in the body 8.

The following describes the feature of chassis 4.Concerning at the overhead traveling crane 2 that uses such as places such as clean rooms, very important feature is that volume is little.Concerning chassis 4, because can take up space on track 01 length direction determined by the total length of overhead traveling crane 2, so chassis 4 should be as far as possible little with respect to the width and the height of track 01 in this case.In an embodiment, be provided with road wheel 26 near the length direction center of each chassis 4, the one side is a movable motor 16, and opposite side is provided with drg 18.And the part of movable motor 16 highlights from chassis 4.Motor shaft 20 and brake axle 22 all are substantially and are horizontally disposed with, greatly about horizontal surface ± scopes of 10 degree in, it is axially parallel with the direct of travel of chassis 4.Like this, the length direction of motor 16, drg 18 is parallel with the length direction of track 01, so reduced the width and the height of chassis 4.Motor shaft 20 and brake axle 22 mesh with hyperbolic gear 24 respectively, and gyratory directions is changed 90 degree rear drive road wheels 26.And the axis direction mutually exclusive (as shown in Figure 1) of the axis direction of hyperbolic gear 24 and motor shaft 20, brake axle 22, just configured in parallel.Like this, compare, use hyperbolic gear 24 can realize to reduce the height of gear thickness and chassis 4 simultaneously with thin gear transmission required drive with bevel gear.

Movable motor 16 and drg 18 are roughly relative separation setting of center with road wheel 26, can reduce motor size like this, and because weight load is dispersed in the both sides of road wheel 26 Stability Analysis of Structures.If drg 18 is made of one with movable motor 16, it is big that motor volume becomes, and because road wheel 26 must be substantially disposed in the central part of chassis 4, make the volume of chassis 4 become big.In addition, the weight load side that concentrates on chassis 4 makes structure become unstable.

Two chassis 4 separate setting with respect to body 8, are connected by pivot 32 respectively.Because be respectively arranged with movable motor 16 parts such as grade on every chassis,, also reduced the height and the width of chassis 4 simultaneously so reduced the external diameter of motor 16 and drg 18.Because chassis 4 links to each other (as shown in Figure 4) with body 8 by pivot respectively, so overhead traveling crane 2 can turn round reposefully, the rotation meeting of the workpiece of carrying 04 is very little.In addition, front and back car bumper 6 is linked to each other with chassis 4 by pivot 34 respectively, when so car bumper 6 can turn round with respect to chassis 4 on the direction of track 01, can accurately detect other overhead traveling crane in walking the place ahead by proximity transducer 36, and, even under the occasion of collision, also can prevent the direct bump of chassis 4.If car bumper 6 is not a pivotal joint with chassis 4, then owing on the direct of travel of proximity transducer 36 fixing middle chassis 4, will can not detect the problem of the place ahead, corner overhead traveling crane.

Lifting mechanism

Fig. 5～Fig. 7 has represented the lifting mechanism 10 of embodiment.Lifting mechanism 10 is supported on the bottom of body 8, wherein, the 40th, the substrate of lifting mechanism, its bottom surface is provided with 3 coiling drums 42, each drum 42 of reeling is divided into two parts setting, disposed on each drum 42 two derrick lines or-band promptly plays heave hand etc. and is used for winding unit, 6 drums of reeling use 12 derrick lines 80 altogether.Each drum 42 of reeling disposes along each limit of an equilateral triangle respectively.Look from the center of lifting mechanism 10, anti-roll release 44 is arranged, break away from coiling drums 42 to prevent derrick line 80 in the arranged outside of coiling drum 42.

46 is respectively two groups of lifting motors, and the drg such as electromagnetic braking 48 that is used to brake separates setting with motor.The 50th, motor shaft, the 52nd, brake axle, each is all roughly becoming with horizontal surface ± scope of 10 degree angles in setting.Like this, each motor 46, drg 48 can with each roughly horizontal substantially configuration on identical height of drum 42 of reeling.The center of lifting mechanism 10 i.e. the place, centre of the equilateral triangle of 3 coiling drum 42 formations, is provided with hyperbolic gear 54 driven wheels such as grade, is provided with the straight gear 56 that transmission is used on the public axle 55 of driven wheel.Above-mentioned hyperbolic gear 54 is rotation around vertical axis with motor 46 around the rotational transform of horizontal shaft.Though the also available bevel gear of this conversion is finished, because gear mass is thin and transmission is accurate, the most handy hyperbolic gear 54.Above-mentioned straight gear 56 drives coiling drum 42 by the straight gear 58 of coiling drum 42 1 sides.Its drive path is: be provided with bevel gear 60 on the axis of revolution of this straight gear 58, the bevel gear 62 that drives on the coiling drum 42 rotates.Above-mentioned

straight gear

56,58 also can replace with helical wheel.64 is locating dowel pins of manipulator 12 among the figure.

The course of action of lifting mechanism 10 is described below with reference to Fig. 6.3 points of manipulator 12 are for installing derrick line 80 respectively on the P point among the figure, and derrick line 80 accounts for from each P and upwards draw two respectively, are wound on separately on the drum 42 of respectively reeling that disposes on two limits of triangle.When manipulator 12 dropped to extreme lower position, derrick line 80 was positioned at the inboard of coiling drum 42, and along with the carrying out of coiling action, winding position moves gradually laterally.Like this, having formed by each point P respectively is the summit, and derrick line 80 is the equicrural triangle on limit, and derrick line 80 distance between the winding position on each coiling drum 42 respectively, along with the rising of manipulator 12 reduces gradually.Therefore, manipulator 12 is when position down, and above-mentioned winding position distance is bigger, and its distance of back that rises reduces, and the angle of fixing two derrick lines 80 of same point and have the lifting with manipulator 12 to change roughly keeps necessarily.So but manipulator 12 held stationary on any height and position moves and the required coiling moment of lifting is constant substantially.Certainly 80 motions of great machinery hand are steady more more for the angle of above-mentioned two derrick lines 80, but the moment of reeling has accordingly also increased.In the present embodiment, the angle of two derrick lines 80 remains unchanged substantially, can make manipulator 12 do dipping and heaving with the moment of constant.In addition, in the present embodiment, owing to used 6 derrick lines 80 to be used for the lifting of manipulator 12, so even having the derrick line to disconnect midway can not make manipulator 12 tilt yet, and can continue to transport reposefully workpiece 04.

Below, describe with regard to the size of lifting mechanism 10.Can be clear that from Fig. 5, Fig. 6 motor 48 is roughly the same and be horizontal arrangement substantially with the height and position of coiling drum 42.Like this, can reduce the height of lifting mechanism 10, and because hyperbolic gear 54 and straight gear overlapping setting about in the of 56, its area occupied is also reduced.Axis of revolution roughly is the rotation of the above-mentioned motor 46 of level and does 90 degree conversion by hyperbolic gear 54, transmits and conversion by

straight gear

56,58,

bevel gear

60,62 again, passes to the coiling drum 42 that rotates around horizontal direction.

On the line of this triangle center at each summit of the equilateral triangle at above-mentioned 3 coiling drum 42 places and hyperbolic gear 54 places, disposed motor 46 and drg 48 respectively, the planar dimension of whole lifting mechanism 10 has been reached minimize.In addition, because two motors 46 separate setting with drg 48, can reduce the size of each motor 46.And each drum 42 of reeling, motor 46, drg 48 are the roughly even decentralized configuration in center with hyperbolic gear 54, so the basic rectangular distribution of the weight load of lifting mechanism 10.Like this, can easily move laterally on the traversing guide rail 78 that lifting mechanism 10 will be told about in the back.

The side travel of lifting mechanism

The following describes the traversing action of lifting mechanism 10.In Fig. 5, Fig. 6, Fig. 8, the 70th, lifting unit 10 is with respect to the traversing motor of body 8 side travels, and the 72nd, drg, the 74th, belt pulley is all driven by motor 70.Belt 90 is installed on the belt pulley 74, drives leading screw 92 and rotates.94, the 96th, bearing, the 76th, ball nut.In above-mentioned each parts, ball nut 76 is installed on the lifting mechanism 10, and other parts are installed on the body 8.Ball nut 76 can certainly be installed on the body 8, other parts are installed in lifting mechanism 10 upsides, but have just increased the weight of lifting mechanism 10 like this, are not good methods.Said mechanism can be generically and collectively referred to as the feed mechanism of lifting mechanism.Above-mentioned ball nut 76 also can replace with common tubular nut.Be provided with in the bottom of body 8 as Fig. 5, traversing guide rail 78 shown in Figure 6, when ball nut 76 advances or retreats, just can drive lifting mechanism 10 and on guide rail 78, move laterally.

As mentioned above, because the rotation of motor 70 makes leading screw 92 drive ball nut 76 and seesaws with respect to screw mandrel 92, on traversing guide rail 78, move laterally thereby drive lifting mechanism 10.Therefore, the vertical lower of walking track 01 also can be loaded and transported with the workpiece of placing on the external position 04, has so just loosened the restriction of workpiece 04 deposit position greatly.The restriction that this means the (not shown) configuration of stock ground, ground is relaxed, can set up the stock ground in desirable position.In addition, increased the degree of freedom of walking track 01 configuration, made it be easy to lay.

Lifting mechanism 10 depends on the center-of-gravity position mobility scale of chassis 4 unlikely overturnings with respect to the traversing scope of track 01.Chassis 4 is stable more with respect to the installation of track 01, and the side travel scope is big more thereupon.In the present embodiment, chassis 4 and body 8 configured separate, traversing guide rail 78 is arranged on the body 8.If chassis 4 and body 8 are as one, then traversing guide rail 78 should be arranged on the bottom of chassis 4.

According to Fig. 9～Figure 13 manipulator 12 is illustrated below.In Fig. 9, Figure 10, the 100th, the manipulator body is stretched the derrick line 80 that gets off by lifting mechanism 10 and is hung and hold.The 102nd, rotor plate drives the rotation of doing with respect to manipulator body 100 by motor 104.The 106th, drg, the 108th, axle, the 110th, with the axle 108 ingear bevel gear that cogs.This bevel gear 110 drive figure rotate at the gear that does not show.To drive cingulum 112, rotor plate 102 is rotated.In addition, the 114th, the installation position of derrick line 80 (with above-mentioned P point), the 116th, the knock hole that cooperates with locating dowel pin 64.

As shown in figure 10, be provided with the spring 122 that is hemispheric centering parts 120 approximately and will feels relieved parts 120 downward pushings all the time on rotor plate 102, these centering parts 120 match with the internal point that workpiece 04 holding plate 010 central authorities are provided with, and carry out centralized positioning.In addition, be provided with 3 groups of claws 126 on rotor plate 102, these 3 groups of claws 126 rotate with claw axle 124 respectively, and match with the recess or the hole that are provided with on the holding plate 010.

Figure 11, Figure 12 have represented the associated member of claw 126.128 are arranged on the lobe plate, the 130th of rotor plate 102 inboards, are arranged on the bevel gear of lobe plate 128 central parts such as the motor, 132 of band brake, and the 134th, cam path.Lobe plate 128 is driven by bevel gear 132 by inner electric machine 130.The roller 136 that is configured in the cam path 134 rotates with the rotation of lobe plate 128, and this rotation passes to the gear that is arranged on the axis 124 by gear 138, rotates thereby drive claw 136.The 140th, for making the lobe plate 128 level and smooth orienting rolls of establishing that rotate.

In order to detect the position of holding plate 010, be provided with the position transduser that constitutes by illuminating part 142 and light accepting part 143, its optical axis is configured in the position that claw 126 fitting projection portions go up slightly.Be claw 126 termination lug bosses with before holding plate 010 recess cooperates, holding plate 010 is in slightly upwards position, and the optical axis between illuminating part 142 and the light accepting part 143 is interdicted.Corresponding, when the recess of holding plate 010 with after claw 126 termination lug bosses match, the position fetters of holding plate 010 descends, the light that illuminating part 142 sends just can be received by light accepting part 143.Whether like this, just can detect holding plate 010 is located by claw 126.In addition, in the present embodiment, illuminating part 142 also can be established the reflected light of holding plate 010 to penetrate to ditch light portion 143 and detect to the only transmitted light of light accepting part 143.Also can detect the position of holding plate 010 in addition with ultrasonic transduter.

Figure 13 has represented 3 testing agencies that land of manipulator 12.In Figure 14, when manipulator 12 drops to the position of contact workpiece 04, be necessary to make the coiling of drg 48 actions with the drum 42 that stops to reel, loose to prevent derrick line 80.So, derrick line installing component 114 places in manipulator 12, derrick line 80 is fixing by retention tab 80, and this installing component 114 is pushed downwards by the spring 86 that is configured in the housing 84 all the time.When manipulator 12 descended and touches the workpiece 04 that is placed in the stock ground, ground, manipulator 12 was subjected to the upwards application force of workpiece 04, and the elastic force of spring 86 moves down derrick line retention tab 82.Because the position of derrick line retainer 82 monitors by limit switch 88, so when retention tab 82 moves down, limit switch 88 pressings and detect manipulator 12 and landed.Detected signal passes to control loop in the body 8 through signal wire (SW) not shown in the figures.Make drg 48 actions, coiling drum 42 is braked by hyperbolic gear 84.Certainly, also can be with the position that monitors retention tab 82 near replacement limit switches such as switches.

Manipulator 12 makes rotor plate 102 rotate before loading workpiece 04 earlier, make its be in workpiece 04 cooresponding tram on.When manipulator 12 descended, matching in the hole that is provided with on centering parts 120 and the holding plate 010, can finely tune manipulator 12 by these centering parts 120 and operate to realize feeling relieved with the relative position of workpiece 04.Here used hemispheric centering parts 120, but be not limited to hemispherical, so long as the convex shape that can easily slide in the end all can.In addition, the protuberance position of centering usefulness can be set on holding plate 010 also, and on manipulator 12, the hole or the spill position of matching with this boss be set.

After the centering operation was finished, lobe plate 128 was driven and is rotated by motor 130, and roller 136 is moved along cam path 134.Roll 136 motion and become the rotation of gear 138, thereby drive claw axle 124 pendulum, make claw 126 its inboard rotation of lateral by workpiece 04, embed the spill unit that is located on the holding plate 010 at last, claw 126 termination lug bosses cooperate fully with the spill position of holding plate 010 before, because holding plate 010 is in the position that makes progress slightly with respect to manipulator 12, has interdicted the optical axis of 143 of illuminating part 142 and light accepting parts, is the position of not working good as yet at present so can detect.With as in like manner, when in workpiece 04 handling process, claw 126 and the situation that keeps Gao 010 disengaging to cooperate appear, then can be detected equally by blocking because of above-mentioned optical axis.

The structure of in detail described in the present embodiment each chassis 4 and lifting mechanism 10, but said structure combining and configuring as required.In addition, the swing of the side travel of lifting mechanism 10 and rotor plate 102 also can be cancelled according to demand.

Claims

1, a kind of overhead traveling crane, it is provided with by the body of rail supported and walking thereon, is arranged on the lifting mechanism of body bottom and by the manipulator of above-mentioned lifting mechanism lifting, it is characterized in that: be provided with several claws free to rotate that are used to make the workpiece location at described manipulator bottom level, and be provided with lobe plate that makes each claw rotation and the motor that this lobe plate is rotated at above-mentioned manipulator place.

2, overhead traveling crane according to claim 1 is characterized in that: the central position in above-mentioned manipulator bottom is provided with the centering parts that match with the workpiece auxiliary section.

3, according to claim 1 and 2 described overhead traveling cranes, it is characterized in that: the lug boss that can match with workpiece spill position is set in above-mentioned claw termination, and is provided with position transduser, be used to detect the workpiece that is in from the claw float state at above-mentioned manipulator place.