CN115246655A - Terbium stannate and preparation method thereof - Google Patents
Terbium stannate and preparation method thereof Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及发光材料领域,具体涉及一种锡氯酸铽及其制备方法。The invention relates to the field of luminescent materials, in particular to terbium tin chlorate and a preparation method thereof.
背景技术Background technique
SnO2是一种宽禁带半导体,禁带宽度3.6eV,其载流子迁移率高,声子能量低,在可见及近红外波段有很高的透过率。掺杂Sb或者F可以极大提高SnO2中的电子浓度,使其成为优异的导电材料。作为一种商业化的透明导电材料,目前制备SnO2的工艺十分成熟,可以通过真空气相沉积得到高质量的薄膜。SnO2中稀土元素的固溶度高(最高可达~10mol%),且其富氧的环境有利于稀土离子的光学跃迁。如何研发制备出具有光致发光性能的材料是亟待研究的课题。SnO 2 is a wide band gap semiconductor with a band gap of 3.6eV, high carrier mobility, low phonon energy, and high transmittance in the visible and near-infrared bands. Doping Sb or F can greatly increase the electron concentration in SnO2 , making it an excellent conductive material. As a commercialized transparent conductive material, the current process for preparing SnO2 is very mature, and high-quality thin films can be obtained by vacuum vapor deposition. The solid solubility of rare earth elements in SnO2 is high (up to ~10 mol%), and its oxygen-rich environment is conducive to the optical transition of rare earth ions. How to develop and prepare materials with photoluminescence properties is an urgent research topic.
发明内容SUMMARY OF THE INVENTION
本发明所要解决的首要技术问题是提供一种工艺简单、成本低、反应周期短、光致发光性能强的锡氯酸铽及其制备方法。The primary technical problem to be solved by the present invention is to provide a terbium tin chlorate with simple process, low cost, short reaction period and strong photoluminescence performance and a preparation method thereof.
为了解决上述技术问题,本申请提供的一种技术方案为:一种锡氯酸铽的制备方法,包括:以二水合氯化亚锡和铽盐为前驱体,室温溶解于溶剂中,形成溶液A;将溶液A旋涂于衬底上成膜,加热,获得基于衬底的锡氯酸铽薄膜。In order to solve the above-mentioned technical problems, a technical solution provided by the present application is: a preparation method of terbium stannous chlorate, comprising: using stannous chloride dihydrate and terbium salt as precursors, dissolving in a solvent at room temperature to form a solution A; The solution A is spin-coated on a substrate to form a film, and heated to obtain a substrate-based terbium tin chlorate thin film.
其中,加热温度为10-250℃。Wherein, the heating temperature is 10-250°C.
其中,铽盐为六水合氯化铽。The terbium salt is terbium chloride hexahydrate.
其中,二水合氯化亚锡与六水合氯化铽的质量比为(0.1-1):(0.0001-0.1)。Wherein, the mass ratio of stannous chloride dihydrate to terbium chloride hexahydrate is (0.1-1):(0.0001-0.1).
其中,溶剂包括乙醇。Among them, the solvent includes ethanol.
其中,二水合氯化亚锡、六水合氯化铽与乙醇的质量体积比为(0.1-1)g:(0.0001-0.1)g:(0.5-50)ml。Wherein, the mass volume ratio of stannous chloride dihydrate, terbium chloride hexahydrate and ethanol is (0.1-1) g:(0.0001-0.1) g:(0.5-50) ml.
其中,衬底包括硅衬底、锗衬底、砷化镓衬底或氮化镓衬底。Wherein, the substrate includes a silicon substrate, a germanium substrate, a gallium arsenide substrate or a gallium nitride substrate.
其中,旋涂的层数为1-10层。Among them, the number of layers of spin coating is 1-10 layers.
本申请还包括第二种技术方案:一种锡氯酸铽,由上述的锡氯酸铽的制备方法制备而得,锡氯酸铽包括锡氯酸铽薄膜,锡氯酸铽薄膜可见波段光致发光。The application also includes a second technical solution: a kind of terbium tin chlorate prepared by the above-mentioned preparation method of terbium tin chlorate. luminescence.
其中,锡氯酸铽薄膜在550nm波段,发光强度为3.8×103。Among them, the terbium tin chlorate thin film has a luminescence intensity of 3.8×10 3 in the 550nm band.
本发明的有益效果:Beneficial effects of the present invention:
(1)本发明的一种锡氯酸铽的制备方法,通过溶胶凝胶法和加热台热处理结合制备锡氯酸铽薄膜,无需贵重仪器设备,通过合理的工艺控制,即可得到锡氯酸铽薄膜,并且锡氯酸铽在可见波段具有较强的光致发光性能。可应用于硅基光源、LED光源、集成电路和显示器件等领域。(1) the preparation method of a kind of terbium stannous chlorate of the present invention, the terbium tin chlorate thin film is prepared by combining the sol-gel method and the heat treatment on the heating stage, without expensive instruments and equipment, through reasonable process control, can obtain stannous chloric acid Terbium thin film, and terbium stannochlorate has strong photoluminescence properties in the visible band. It can be applied to the fields of silicon-based light sources, LED light sources, integrated circuits and display devices.
(2)本发明的一种锡氯酸铽的制备方法,原料廉价易得,合成工艺简单,可控程度高,成本低,反应周期短,且对环境无污染,该制备的锡氯酸铽薄膜材料光致发光性能强。(2) the preparation method of a kind of terbium stannous chlorate of the present invention, the raw material is cheap and easy to obtain, the synthesis process is simple, the controllability is high, the cost is low, the reaction cycle is short, and does not pollute the environment, the terbium stannous chlorate prepared by the preparation Thin film materials have strong photoluminescence properties.
(3)本发明的一种锡氯酸铽的制备方法,反应温度低,热预算少,可以减少能耗。(3) the preparation method of a kind of terbium stannous chlorate of the present invention, the reaction temperature is low, the thermal budget is few, can reduce energy consumption.
附图说明Description of drawings
图1是本申请实例1所制备锡氯酸铽薄膜的光致发光图。FIG. 1 is a photoluminescence diagram of the terbium tin chlorate thin film prepared in Example 1 of the present application.
图2是本申请实例1所制备锡氯酸铽薄膜的一扫描电子显微镜图。2 is a scanning electron microscope image of the terbium tin chlorate thin film prepared in Example 1 of the present application.
图3是本申请实例1所制备锡氯酸铽薄膜的另一扫描电子显微镜图。3 is another scanning electron microscope image of the terbium tin chlorate thin film prepared in Example 1 of the present application.
图4是本申请实例1所制备锡氯酸铽薄膜的EDS图。4 is the EDS diagram of the terbium tin chlorate thin film prepared in Example 1 of the present application.
具体实施方式Detailed ways
以下通过具体实施例用于进一步说明本发明描述的方法,但是并不意味着本发明局限于这些实施例。The following specific examples are used to further illustrate the method described in the present invention, but it does not mean that the present invention is limited to these examples.
本申请实施例提供一种锡氯酸铽的制备方法,包括:以二水合氯化亚锡和铽盐为前驱体,室温溶解于溶剂中,形成溶液A;将溶液A旋涂于衬底上成膜,加热,获得基于衬底的锡氯酸铽薄膜。An embodiment of the present application provides a method for preparing terbium tin chlorate, including: using stannous chloride dihydrate and terbium salt as precursors, dissolving in a solvent at room temperature to form solution A; spin-coating solution A on a substrate Film formation and heating to obtain a substrate-based terbium tin chlorate thin film.
本申请实施例的锡氯酸铽的制备方法简单,在室温下通过形成溶胶,并通过旋涂成膜,形成凝胶,并通过加热,即可获得锡氯酸铽薄膜;本申请实施例的方法简单,原料成本低,制备周期短,制备出薄膜均匀强,且制备过程对环境无污染。本申请实施例制备出的锡氯酸铽在可见波段具有较强的具有光致发光性能,可以用于光源,例如硅基光源、LED光源,以及显示器件领域。The preparation method of terbium tin chlorate in the embodiment of the present application is simple. The sol is formed at room temperature, and the film is formed by spin coating to form a gel, and then the terbium tin chlorate film can be obtained by heating; The method is simple, the cost of raw materials is low, the preparation period is short, the prepared film is uniform and strong, and the preparation process does not pollute the environment. The terbium stannous chlorate prepared in the examples of the present application has strong photoluminescence performance in the visible wavelength band, and can be used in the fields of light sources, such as silicon-based light sources, LED light sources, and display devices.
本申请实施例中,加热温度为10-250℃。本申请通过低温加热就可以制备出锡氯酸铽薄膜,所需要的热预算低,且制备出的锡氯酸铽薄膜具有光致发光性能。本申请实施例中,加热温度可以是25℃、50℃、60℃、80℃、100℃、120℃、150℃、180℃、210℃或250℃等。In the examples of the present application, the heating temperature is 10-250°C. In the present application, the terbium tin chlorate thin film can be prepared by heating at a low temperature, the required thermal budget is low, and the prepared terbium tin chlorate thin film has photoluminescence properties. In the embodiments of the present application, the heating temperature may be 25°C, 50°C, 60°C, 80°C, 100°C, 120°C, 150°C, 180°C, 210°C, or 250°C.
本申请实施例中,铽盐包括六水合氯化铽。本申请实施例中,铽盐为六水合氯化铽,使得制备出的锡氯酸铽的纯度较高。在其他实施例中,铽盐也可以包括硝酸铽等。In the embodiments of the present application, the terbium salt includes terbium chloride hexahydrate. In the embodiments of the present application, the terbium salt is terbium chloride hexahydrate, so that the prepared terbium tin chlorate has a higher purity. In other embodiments, the terbium salt may also include terbium nitrate and the like.
本申请实施例中,二水合氯化亚锡与六水合氯化铽的质量比为(0.1-1):(0.0001-0.1)。本申请实施例中,通过控制二水合氯化亚锡与六水合氯化铽的质量比,使得制备出的锡氯酸铽薄膜的光致发光性能性能最佳。In the embodiments of the present application, the mass ratio of stannous chloride dihydrate to terbium chloride hexahydrate is (0.1-1): (0.0001-0.1). In the examples of the present application, by controlling the mass ratio of stannous chloride dihydrate to terbium chloride hexahydrate, the prepared terbium tin chlorate thin film has the best photoluminescence performance.
本申请实施例中,溶剂包括乙醇。其中,二水合氯化亚锡与六水合氯化铽在乙醇中能够溶解,且乙醇易挥发,可以缩减锡氯酸铽薄膜产品的制备时间。在其他实施例中,溶剂也可以是水和乙醇的混合物。In the embodiments of the present application, the solvent includes ethanol. Among them, stannous chloride dihydrate and terbium chloride hexahydrate can be dissolved in ethanol, and ethanol is volatile, which can shorten the preparation time of terbium tin chlorate thin film products. In other embodiments, the solvent can also be a mixture of water and ethanol.
本申请实施例中,二水合氯化亚锡、六水合氯化铽与乙醇的质量体积比为(0.1-1)g:(0.0001-0.1)g:(0.5-50)ml。本申请实施例通过合理的控制二水合氯化亚锡、六水合氯化铽与乙醇的质量体积比,使得二水合氯化亚锡和六水合氯化铽能够完全分散于乙醇中,且可以制备出锡氯酸铽。In the examples of this application, the mass volume ratio of stannous chloride dihydrate, terbium chloride hexahydrate and ethanol is (0.1-1) g:(0.0001-0.1) g:(0.5-50) ml. By reasonably controlling the mass volume ratio of stannous chloride dihydrate, terbium chloride hexahydrate and ethanol in the examples of the present application, stannous chloride dihydrate and terbium chloride hexahydrate can be completely dispersed in ethanol, and can be prepared Terbium tin chlorate.
本申请实施例中,衬底为硅衬底,在其他实施例中,衬底也可以为锗衬底、砷化镓衬底或氮化镓衬底。可以提升衬底的光致发光性能,使形成基于硅衬的锡氯酸铽薄膜,可以应用于硅基光源、LED光源以及集成电路等领域。In the embodiments of the present application, the substrate is a silicon substrate. In other embodiments, the substrate may also be a germanium substrate, a gallium arsenide substrate, or a gallium nitride substrate. The photoluminescence performance of the substrate can be improved, so that a terbium tin chlorate film based on a silicon lining can be formed, which can be applied to the fields of silicon-based light sources, LED light sources, integrated circuits and the like.
本申请实施例中,旋涂的层数为1-10层。本申请实施例中,旋涂的层数为1层、2层、3层、5层、6层、8层、10层等,通过旋涂不同层数的溶液A,使得制备出薄膜的厚度可以根据需要进行设置,且在该厚度下,光致发光性能最佳。本申请实施例中,锡氯酸铽薄膜的厚度在1-100nm。In the examples of the present application, the number of layers of spin coating is 1-10 layers. In the examples of the present application, the number of layers of spin coating is 1 layer, 2 layers, 3 layers, 5 layers, 6 layers, 8 layers, 10 layers, etc., by spin coating solution A with different layers, so that the thickness of the film is prepared It can be set as desired, and at this thickness, the photoluminescence performance is optimal. In the embodiments of the present application, the thickness of the terbium tin chlorate thin film is 1-100 nm.
本申请还包括第二种技术方案:一种锡氯酸铽,由上述的锡氯酸铽的制备方法制备而得,锡氯酸铽包括锡氯酸铽薄膜,锡氯酸铽薄膜可见波段光致发光。本申请实施例的锡氯酸铽薄膜可应用于硅基光源、LED光源、显示器件、集成电路等领域。The application also includes a second technical solution: a kind of terbium tin chlorate prepared by the above-mentioned preparation method of terbium tin chlorate. luminescence. The terbium tin chlorate thin film of the embodiments of the present application can be applied to the fields of silicon-based light sources, LED light sources, display devices, integrated circuits, and the like.
本申请实施例中,锡氯酸铽薄膜在550nm波段,发光强度为3.8×103。本申请实施的锡氯酸铽具有极强的光致发光性能。In the examples of the present application, the terbium tin chlorate thin film has a luminescence intensity of 3.8×10 3 in the wavelength band of 550 nm. The terbium tin chlorate implemented in this application has extremely strong photoluminescence properties.
为了便于理解本申请技术方案,提供以下具体实施例。In order to facilitate the understanding of the technical solutions of the present application, the following specific examples are provided.
实施例1:Example 1:
一种锡氯酸铽的制备方法,其步骤包括:A kind of preparation method of terbium stannous chlorate, its steps comprise:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在150℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
如图1所示,为本实施例制成锡氯酸铽薄膜的光致发光图,从图1中可以看出制备的锡氯酸铽薄膜在可见波段具有较强的光致发光性能;550nm波段,发光强度为3.8×103,在490nm波段,发光强度为1.8×103,在590nm波段,发光强度为1.45×103;在628nm波段,发光强度为1.2×103。如图2和图3所示,为本申请实施例制备出的锡氯酸铽薄膜的扫描电子显微镜图,从图中可以看出,制备出的锡氯酸铽薄膜致密性强,分布均匀,锡氯酸铽颗粒的粒径在100nm-800nm之间。如图4所示,本申请实施例制备出的产品的EDS图,从图中可以看出制备出的产品含有元素氧、锡、氯和铽,说明本申请实施例制备出的产品为锡氯酸铽。As shown in Figure 1, the photoluminescence diagram of the terbium tin chlorate thin film prepared in this example, it can be seen from Figure 1 that the prepared terbium tin chlorate thin film has strong photoluminescence performance in the visible band; 550nm In the wavelength band, the luminous intensity is 3.8×10 3 , in the 490 nm band, the luminous intensity is 1.8×10 3 , in the 590 nm band, the luminous intensity is 1.45×10 3 ; in the 628 nm band, the luminous intensity is 1.2×10 3 . As shown in FIG. 2 and FIG. 3 , the scanning electron microscope images of the terbium tin chlorate thin films prepared in the examples of the present application, it can be seen from the figures that the prepared terbium tin chlorate thin films have strong compactness and uniform distribution, The particle size of the terbium stannous chlorate particles is between 100nm and 800nm. As shown in Figure 4, the EDS diagram of the product prepared in the embodiment of the application, it can be seen from the figure that the prepared product contains the elements oxygen, tin, chlorine and terbium, indicating that the product prepared in the embodiment of the application is tin chloride Terbium acid.
实施例2:Example 2:
该实施例与实施例1的区别在于步骤一中六水合氯化铽的量改变为0.0036g,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0036g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0036g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在150℃加热台上加热,加热时间为10分钟,获得基于硅衬底的锡氯酸铽薄膜。
本申请实施例,可以在硅衬底上形成锡氯酸铽薄膜,锡氯酸铽薄膜的形貌及性能与实施例1相同或近似。本申请实施例制备锡氯酸铽薄膜时间短、温度低,需要热预小。In this embodiment of the present application, a terbium tin chlorate thin film can be formed on a silicon substrate, and the morphology and performance of the terbium tin chlorate thin film are the same as or similar to those in
实施例3:Example 3:
该实施例与实施例1的区别在于步骤一中乙醇的量改变为20ml,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于20ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 20ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在150℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
实施例4:Example 4:
该实施例与实施例1的区别在于步骤二中加热台处理的温度变为50℃,其他与实施例1相同,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在50℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
实施例5:Example 5:
该实施例与实施例1的区别在于步骤二中加热台处理的温度变为60℃,其他与实施例1相同,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在60℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
实施例6:Example 6:
该实施例与实施例1的区别在于步骤二中加热台处理的温度变为70℃,其他与实施例1相同,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在70℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
实施例7:Example 7:
该实施例与实施例1的区别在于步骤二中加热台处理的温度变为80℃,其他与实施例1相同,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在80℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
实施例8:Example 8:
该实施例与实施例1的区别在于步骤二中加热台处理的温度变为90℃,其他与实施例1相同,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在90℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
实施例9:Example 9:
该实施例与实施例1的区别在于步骤二中加热台处理的温度变为100℃,其他与实施例1相同,具体如下:The difference between this embodiment and
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在100℃加热台上加热,获得基于硅衬底的锡氯酸铽薄膜。
实施例10:Example 10:
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在250℃加热台上加热20min,获得基于硅衬底的锡氯酸铽薄膜。
实施例11:Example 11:
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在10℃加热台上加热2h,获得基于硅衬底的锡氯酸铽薄膜。
实施例12:Example 12:
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.4516g二水合氯化亚锡、0.0216g六水合氯化铽溶于15ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.4516g of stannous chloride dihydrate and 0.0216g of terbium chloride hexahydrate in sequence in 15ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取40μl的溶液A,采用旋涂法在硅衬底上制备成膜,旋涂3层,并放在10℃加热台上加热2h,获得基于硅衬底的锡氯酸铽薄膜。
实施例13:Example 13:
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.1g二水合氯化亚锡、0.0001g六水合氯化铽溶于0.5ml无水乙醇,在室温下搅拌至完全溶解,搅拌2分钟,形成混合溶液A;Step 1: Dissolve 0.1 g of stannous chloride dihydrate and 0.0001 g of terbium chloride hexahydrate in sequence in 0.5 ml of absolute ethanol, stir at room temperature until completely dissolved, and stir for 2 minutes to form mixed solution A;
步骤二,取上述溶液A,采用旋涂法在锗衬底上制备成膜,旋涂1层,并放在50℃加热台上加热1h,获得基于锗衬底的锡氯酸铽薄膜。
实施例14:Example 14:
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将1g二水合氯化亚锡、0.1g六水合氯化铽溶于50ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 1g of stannous chloride dihydrate and 0.1g of terbium chloride hexahydrate in sequence in 50ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取上述溶液A,采用旋涂法在砷化镓衬底上制备成膜,旋涂10层,并放在80℃加热台上加热0.5h,获得基于砷化镓衬底的锡氯酸铽薄膜。
实施例15:Example 15:
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将1g二水合氯化亚锡、0.0001g六水合氯化铽溶于10ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 1g of stannous chloride dihydrate and 0.0001g of terbium chloride hexahydrate in sequence in 10ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取上述溶液A,采用旋涂法在氮化镓衬底上制备成膜,旋涂6层,并放在80℃加热台上加热0.5h,获得基于氮化镓衬底的锡氯酸铽薄膜。
实施例16:Example 16:
锡氯酸铽的制备方法,包括:The preparation method of terbium stannous chlorate, comprising:
步骤一,依次将0.1g二水合氯化亚锡、0.1g六水合氯化铽溶于50ml无水乙醇,在室温下搅拌至完全溶解,形成混合溶液A;Step 1: Dissolve 0.1 g of stannous chloride dihydrate and 0.1 g of terbium chloride hexahydrate in sequence in 50 ml of absolute ethanol, and stir at room temperature until completely dissolved to form mixed solution A;
步骤二,取上述溶液A,采用旋涂法在氮化镓衬底上制备成膜,旋涂8层,并放在80℃加热台上加热0.2h,获得基于氮化镓衬底的锡氯酸铽薄膜。Step 2: Take the above solution A, prepare a film on a gallium nitride substrate by spin coating, spin
尽管本发明的实施方案已公开如上,但其并不仅仅限于说明书和实施方式中所列运用。它完全可以被适用于各种适合本发明的领域。对于熟悉本领域的人员而言可容易地实现另外的修改。因此在不背离权利要求及等同范围所限定的一般概念下,本发明并不限于特定的细节和这里示出与描述的图例。Although embodiments of the present invention have been disclosed above, they are not limited to the applications set forth in the specification and embodiments. It can be fully adapted to various fields suitable for the present invention. Additional modifications can be readily implemented by those skilled in the art. Therefore, the invention is not to be limited to the specific details and illustrations herein shown and described, without departing from the general concept defined by the appended claims and the scope of equivalents.
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