CN115245777B - Feeding device for preparing electronic-grade TFT developing solution - Google Patents
Feeding device for preparing electronic-grade TFT developing solution Download PDFInfo
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- CN115245777B CN115245777B CN202210909333.0A CN202210909333A CN115245777B CN 115245777 B CN115245777 B CN 115245777B CN 202210909333 A CN202210909333 A CN 202210909333A CN 115245777 B CN115245777 B CN 115245777B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/80—Mixing plants; Combinations of mixers
- B01F33/81—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles
- B01F33/813—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles mixing simultaneously in two or more mixing receptacles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
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- Chemical Kinetics & Catalysis (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Accessories For Mixers (AREA)
- Mixers Of The Rotary Stirring Type (AREA)
Abstract
The invention relates to the technical field of preparation of TFT (thin film transistor) developing solutions, in particular to a feeding device for preparing an electronic-grade TFT developing solution, which comprises a main storage cabin, wherein the left side and the right side in the main storage cabin are symmetrically provided with raw material cabins, a liquid storage cabin is arranged between the raw material cabins, a sealing cover is arranged above the raw material cabins, the back side of the main storage cabin is fixedly connected with a main frame body, the front side of the main storage cabin is fixedly connected with an installation frame, the front side of the installation frame is provided with a quantitative liquid pumping mechanism, quantitative ultrapure water is pumped from the interior of a quantitative cylinder through forward driving of a driving cylinder, and the ultrapure water is automatically added into a groove body after the driving cylinder is driven reversely.
Description
Technical Field
The invention relates to the technical field of TFT developing solution preparation, in particular to a feeding device for preparing an electronic-grade TFT developing solution.
Background
The invention discloses a Chinese patent application with the publication number of CN 11199999993A, which provides a preparation process of an electronic-grade TFT developer, and the specific preparation process comprises the following steps: firstly, dissolving first ultrapure water in a dissolving tank; secondly, adding sodium carbonate crystals and sodium bicarbonate crystals into the dissolving tank, stirring and then sending to a mixing tank;
the existing matched forming equipment for the preparation process is still not perfect, the preparation process is complicated and wastes manpower due to the fact that raw materials are required to be added for multiple times for preparing the developing solution, and due to the fact that ultrapure water is required to be added and almost no other impurities are contained in the ultrapure water, if the ultrapure water is added manually, the purity of the ultrapure water is easily polluted, and further the purity of a subsequent developing solution finished product is influenced, so that the invention provides the feeding device for preparing the electronic-grade TFT developing solution to overcome the defects of the preparation process of the TFT developing solution.
Disclosure of Invention
In order to solve the technical problems, the invention provides a feeding device for preparing an electronic-grade TFT developing solution, which solves the technical problems of low efficiency, labor waste and the like of manual feeding in the background technology.
In order to achieve the above purposes, the technical scheme adopted by the invention is as follows: a feed arrangement for preparing electronic grade TFT developer, includes main storage tank, main storage tank includes: the device comprises a raw material cabin, a liquid storage cabin, a main frame body and a mounting frame, wherein the raw material cabin is symmetrically arranged on the left side and the right side inside the main storage cabin, the liquid storage cabin is arranged between the raw material cabins, a sealing cover is arranged above the raw material cabin, the main frame body is fixedly connected to the back side of the main storage cabin, the mounting frame is fixedly connected to the front side of the main storage cabin, the mounting frame, the main frame body and the main storage cabin form a main body framework of the device, a quantitative liquid pumping mechanism is arranged on the front side of the mounting frame, a follow-up opening and closing mechanism is arranged below the quantitative liquid pumping mechanism, and a stirring and feeding mechanism is arranged on the front side of the bottom of the main storage cabin;
the quantitative liquid pumping mechanism comprises: drive actuating cylinder, connection pad, a ration section of thick bamboo, piston rod, catheter and drain pipe, the front side of mounting bracket is installed and is driven actuating cylinder, and drives actuating cylinder's below output fixedly connected with connection pad to the below of connection pad is provided with a ration section of thick bamboo, the inside adaptation of a ration section of thick bamboo is provided with the piston rod, and the upper end fixed connection of piston rod in the bottom surface of connection pad, the below intercommunication of a ration section of thick bamboo has the catheter, and the below front side of catheter is provided with the fluid-discharge tube, the bottom intercommunication of the deposit liquid cabin that main storage cabin inside set up has the drain pipe.
Preferably, the lower end of the liquid guide pipe, the front end of the liquid outlet pipe and the back end of the liquid discharge pipe are communicated through a follow-up opening and closing mechanism.
Preferably, follow-up hoist mechanism is including opening and close the cabin, rotating bi-pass, opening, follow-up fluted disc, linkage rack, the front end fixedly connected with of drain pipe opens and close the cabin, and the inside rotation of opening and close the cabin is connected with the rotation bi-pass to the opening has been seted up to the inside of rotating the bi-pass, the right side fixedly connected with follow-up fluted disc of rotation bi-pass, and the dorsal part meshing of follow-up fluted disc has the linkage rack, the upper end fixed connection of linkage rack is in the right flank of connection pad.
Preferably, the opening and closing cabin is of a square cavity structure, and an inner cavity of the opening and closing cabin is cylindrical.
Preferably, the rotation bi-pass is cylinder cavity structures, and rotates the inner chamber of bi-pass adaptation in the open-close cabin, the opening is vertical to run through and sets up in the inside of rotating the bi-pass
Preferably, the stirring and feeding mechanism comprises: (mixing) shaft in follow-up connecting rod, fillet, guide standpipe, electric valve, sensor and the spiral, drive the equal symmetry fixedly connected with follow-up connecting rod in the left and right sides of actuating cylinder, and the lower extreme fixedly connected with fillet of follow-up connecting rod to the inside of fillet is provided with the guide standpipe, the upper end internally mounted of guide standpipe has electric valve, the sensor is installed to one side that main storage cabin outer wall is close to electric valve, and this electric valve is electric connection with the sensor, the guide standpipe upper end extends to the bottom fixedly connected with spiral of depositing the liquid cabin in the (mixing) shaft.
Preferably, the outer wall of the material guide vertical pipe is provided with external threads, and the thread ring is in threaded connection with the material guide vertical pipe.
Preferably, the material guide vertical pipe is of a structure penetrating through the cavity body, the upper end of the material guide vertical pipe is rotatably connected to the bottom of the liquid storage cabin, and the material guide vertical pipe is communicated with the liquid storage cabin.
Compared with the prior art, the invention has the beneficial effects that:
(1) Through the arrangement of the quantitative liquid pumping mechanism, quantitative ultrapure water is pumped in the quantitative cylinder firstly through forward driving of the driving cylinder, and the ultrapure water is enabled to be automatically added into the groove body after the driving cylinder is driven reversely, so that the process does not need manual intervention, an automatic feeding step can be realized, and meanwhile, the pollution to the ultrapure water can be reduced to the greatest extent under the condition of no manual intervention, so that relatively pure ultrapure water can be provided for the preparation of the developing solution, and the purity of the subsequent developing solution preparation is favorably improved;
(2) By arranging the main storage cabin, and arranging the raw material cabin and the liquid storage cabin in the main storage cabin, the arrangement not only can reasonably distribute and store ultrapure water and crystals to be used, but also can prevent the ultrapure water from being polluted by external substances, thereby better supplying the ultrapure water for the subsequent preparation of TFT developing solution;
(3) The follow-up starting and stopping mechanism is arranged, and the follow-up starting and stopping mechanism is matched with the quantitative liquid pumping mechanism to realize automatic starting and stopping of the ultrapure water pumping process in the liquid storage cabin, so that the ultrapure water pumping process can be stopped continuously after the quantitative cylinder pumps a primary amount of ultrapure water, and the precision of ultrapure water delivery in a single time is ensured;
(4) Through being provided with stirring feed mechanism, then can drive after the guide standpipe is rotatory to be located its upper end and be located the spiral internal mixing shaft synchronous revolution of raw materials cabin inside, and the rotation through (mixing) shaft in the spiral then can stir the crystal that raw materials cabin inside was deposited, the stirring through (mixing) shaft in the spiral not only can be convenient for the follow-up of raw materials cabin inside crystal to be seen off, the stirring through (mixing) shaft in the spiral simultaneously also can reduce the condition that the crystal took place the caking in raw materials cabin inside effectively.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the enlarged partial perspective view of the area A in FIG. 1 according to the present invention;
FIG. 3 is a schematic view of a partial cross-sectional perspective structure of a quantification cylinder according to the present invention;
FIG. 4 is a partially enlarged perspective view of the area B of FIG. 1 according to the present invention;
FIG. 5 is a schematic view of a partial three-dimensional structure of the servo opening and closing mechanism of the present invention;
FIG. 6 is a schematic view showing a three-dimensional structure inside the opening and closing compartment according to the present invention;
FIG. 7 is a schematic rear perspective view of the present invention;
FIG. 8 is a schematic view of a partial perspective view of the electrically operated valve of the present invention;
FIG. 9 is a schematic view of a partial top perspective view of the main storage tank of the present invention;
FIG. 10 is a partially schematic perspective view of the two-way rotary joint of the present invention;
FIG. 11 is a schematic top view in partial cross section of the dual-pass rotary mechanism of the present invention.
The reference numbers in the figures are:
1. a main storage compartment; 11. a raw material cabin; 12. a liquid storage tank; 13. a main frame body; 14. a mounting frame;
2. a quantitative liquid pumping mechanism; 21. a driving cylinder; 22. a connecting disc; 23. a dosing cylinder; 24. a piston rod; 25. a catheter; 26. a liquid outlet pipe; 27. a liquid discharge pipe;
3. a follow-up opening and closing mechanism; 31. opening and closing the cabin; 32. rotating for two passes; 33. a port; 34. a follow-up fluted disc; 35. a linkage rack;
4. a stirring and feeding mechanism; 41. a follower link; 42. a thread ring; 43. a vertical material guiding pipe; 44. an electrically operated valve; 45. a sensor; 46. a spiral inner stirring shaft.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As an embodiment of the present invention
Referring to fig. 1, 4 to 6, 10 and 11, a feeding device for preparing an electronic TFT developing solution includes a main storage compartment 1, where the main storage compartment 1 includes: the device comprises a raw material cabin 11, a liquid storage cabin 12, a main frame body 13 and a mounting frame 14, wherein the raw material cabin 11 is symmetrically arranged on the left side and the right side inside a main storage cabin 1, the liquid storage cabin 12 is arranged between the raw material cabins 11, a sealing cover is arranged above the raw material cabin 11, the main frame body 13 is fixedly connected on the back side of the main storage cabin 1, the mounting frame 14 is fixedly connected on the front side of the main storage cabin 1, the mounting frame 14, the main frame body 13 and the main storage cabin 1 form a main body framework of the device, the main frame body 13 mainly plays a role in supporting and stabilizing the main storage cabin 1, a quantitative liquid pumping mechanism 2 is arranged on the front side of the mounting frame 14, and a follow-up opening and closing mechanism 3 is arranged below the quantitative liquid pumping mechanism 2, this follow-up starting and stopping mechanism 3 is including opening and closing the cabin 31, rotate bi-pass 32, through-port 33, follow-up fluted disc 34 and linkage rack 35, the front end fixedly connected with of drain pipe 26 opens and closes cabin 31, it is square cavity structures to open and close cabin 31, and the inner chamber of opening and closing cabin 31 is cylindrical, and the inside rotation of opening and closing cabin 31 is connected with rotates bi-pass 32, and rotate bi-pass 32's inside and seted up through-port 33, it is cylinder cavity structures to rotate bi-pass 32, and rotate bi-pass 32 adaptation in the inner chamber of opening and closing cabin 31, through-port 33 is vertical running through and sets up in the inside of rotating bi-pass 32, the right side fixedly connected with follow-up fluted disc 34 of rotating bi-pass 32, and the dorsal part meshing of follow-up fluted disc 34 has linkage rack 35, the upper end fixed connection of linkage rack 35 is in the right flank of connection pad 22.
The working principle is as follows: when the drive cylinder 21 drives the connecting disc 22 to ascend, the linkage rack 35 fixedly connected on the right side is synchronously driven to ascend when the drive cylinder 21 drives the connecting disc 22 to ascend, the linkage rack 35 drives the following toothed disc 34 meshed with the linkage rack to rotate after ascending, the following toothed disc 34 synchronously drives the rotating double-way 32 positioned in the opening and closing cabin 31 to synchronously rotate and just rotate for ninety degrees after rotating the double-way 32 for ninety degrees, at the moment, one group of through ports 33 positioned below the rotating double-way 32 rotate to the front end part of the liquid outlet pipe 26, namely, at the moment, the opening and closing cabin 31 completes the communication between the liquid outlet pipe 26 and the opening and closing cabin 31 through the through port 33 rotated by the rotating double-way 32, namely, the quantitative cylinder 23 can suck out ultrapure water from the inside of the liquid storage cabin 12, when the drive cylinder 21 drives the connecting disc 22 to reset, the following toothed disc 34 drives the rotating double-way 32 to reversely reset, at the moment, the liquid outlet pipe 26 is not communicated with the lower end of the liquid outlet pipe 25, at the other group of the rotating double-way 33 positioned above the rotating double-way 32 is communicated with the inner end of the quantitative cylinder 27, so that the ultrapure water can be continuously pumped and the ultrapure water pumping mechanism can be continuously pumped out through the quantitative liquid delivery tank 23 after the quantitative pumping mechanism for one-on-off and-flow in the ultrapure water delivery process of the ultrapure water delivery tank is continuously pumped in the single-flow-delivery process of the ultrapure water delivery cabin, and-delivery tank.
As example two of the present invention
Referring to fig. 1 and fig. 7 to 9, a feeding device for preparing an electronic TFT developer includes a main storage tank 1, where the main storage tank 1 includes: raw materials cabin 11, deposit the liquid cabin 12, the body frame body 13 and mounting bracket 14, raw materials cabin 11 has been seted up to the left and right sides symmetry of 1 inside in main storage cabin, and seted up between the raw materials cabin 11 and deposited the liquid cabin 12, and sealed lid is installed to the top of this raw materials cabin 11, 1 dorsal part fixedly connected with body frame body 13 in main storage cabin, the front side fixedly connected with mounting bracket 14 in main storage cabin 1, mounting bracket 14, the body frame body 13, main storage cabin 1 constitutes the main body framework of this device, wherein the body frame body 13 mainly plays the effect of supporting and firm main storage cabin 1, the bottom front side in main storage cabin 1 is provided with stirring feed mechanism 4, this stirring feed mechanism 4 includes: follow-up connecting rod 41, the screw ring 42, guide standpipe 43, electric valve 44, stirring shaft 46 in sensor 45 and the spiral, the equal symmetry fixedly connected with follow-up connecting rod 41 in the left and right sides of driving cylinder 21, and the lower extreme fixedly connected with screw ring 42 of follow-up connecting rod 41, and the inside of screw ring 42 is provided with guide standpipe 43, the external screw thread has been seted up to the outer wall of guide standpipe 43, screw ring 42 is threaded connection with guide standpipe 43, guide standpipe 43 is for running through cavity formula structure, and the upper end of guide standpipe 43 rotates the bottom of connecting in storage tank 12, guide standpipe 43 is linked together with storage tank 12, the upper end internally mounted of guide standpipe 43 has electric valve 44, sensor 45 is installed to one side that main storage tank 1 outer wall is close to electric valve 44, this electric valve 44 is electric connection with sensor 45, pass through sensor 45 detected signal promptly, and control electric valve 44's automatic start-stop, guide standpipe 43 upper end extends to the bottom fixedly connected with in the spiral stirring shaft of storage tank 12.
The working principle is as follows: when the device is used, when the driving cylinder 21 drives upwards, the driving cylinder synchronously drives the follower connecting rods 41 at the left side and the right side of the lower end of the driving cylinder to move upwards, the follower connecting rods 41 drive the thread ring 42 at the lower end of the driving cylinder to gradually move upwards along the outer wall of the material guide vertical pipe 43, the material guide vertical pipe 43 rotates under the screw thread matching transmission of the thread ring 42 and the material guide vertical pipe 43, the material guide vertical pipe 43 rotates to drive the spiral inner stirring shaft 46 positioned at the upper end of the material guide vertical pipe and positioned inside the material cabin 11 to synchronously rotate, crystals stored inside the material cabin 11 are stirred through the rotation of the spiral inner stirring shaft 46, the subsequent sending of the crystals inside the material cabin 11 can be facilitated through the stirring of the spiral inner stirring shaft 46, meanwhile, the situation that the crystals are caked inside the material cabin 11 can be effectively reduced through the stirring of the spiral inner stirring shaft 46, when the driving cylinder 21 drives the thread ring 42 to move to a position close to the electric valve 44, the sensor 45 detects the signal and timely transmits the signal to the electric valve 44, at the electric valve 44 is opened, namely, the electric valve 44 controls the electric valve 11 to automatically and the electric valve 42 to downwards to drive the crystal to automatically and the electric valve to drive the vertical pipe to move downwards, and the electric valve 42 to control the electric valve to automatically and control the crystal to move downwards.
Example three as the present invention
Referring to fig. 1 to 11, a feeding device for preparing an electronic TFT developer includes a main storage compartment 1, where the main storage compartment 1 includes: the device comprises a raw material cabin 11, a liquid storage cabin 12, a main frame body 13 and a mounting frame 14, wherein the raw material cabin 11 is symmetrically arranged on the left side and the right side inside a main storage cabin 1, the liquid storage cabin 12 is arranged between the raw material cabins 11, a sealing cover is arranged above the raw material cabin 11, the main frame body 13 is fixedly connected to the back side of the main storage cabin 1, the mounting frame 14 is fixedly connected to the front side of the main storage cabin 1, and the mounting frame 14, the main frame body 13 and the main storage cabin 1 form a main body framework of the device, wherein the main frame body 13 mainly plays a role in supporting and stabilizing the main storage cabin 1;
wherein the front side that is located mounting bracket 14 is provided with quantitative drawing liquid mechanism 2, and this quantitative drawing liquid mechanism 2 includes: the device comprises a driving cylinder 21, a connecting disc 22, a quantifying cylinder 23, a piston rod 24, a liquid guide pipe 25 and a liquid outlet pipe 26, wherein the driving cylinder 21 is installed on the front side of a mounting frame 14, the connecting disc 22 is fixedly connected to the lower output end of the driving cylinder 21, the quantifying cylinder 23 is arranged below the connecting disc 22, the piston rod 24 is arranged inside the quantifying cylinder 23 in a matched mode, the upper end of the piston rod 24 is fixedly connected to the bottom surface of the connecting disc 22, the liquid guide pipe 25 is communicated with the lower portion of the quantifying cylinder 23, the liquid outlet pipe 27 is arranged on the front side of the lower portion of the liquid guide pipe 25, the liquid outlet pipe 26 is communicated with the bottom of a liquid storage cabin 12 arranged inside a main storage cabin 1, and the lower end of the liquid guide pipe 25, the front end of the liquid outlet pipe 26 and the back end of the liquid outlet pipe 27 are communicated with one another through a follow-up opening and closing mechanism 3;
a follow-up opening and closing mechanism 3 is arranged below the quantitative liquid pumping mechanism 2, the follow-up opening and closing mechanism 3 comprises an opening and closing chamber 31, a rotating bi-pass 32, a through opening 33, a follow-up fluted disc 34 and a linkage rack 35, the front end of the liquid outlet pipe 26 is fixedly connected with the opening and closing chamber 31, the opening and closing chamber 31 is of a square cavity structure, the inner cavity of the opening and closing chamber 31 is cylindrical, the inner part of the opening and closing chamber 31 is rotatably connected with the rotating bi-pass 32, the through opening 33 is formed in the rotating bi-pass 32, the rotating bi-pass 32 is of a cylindrical cavity structure, the rotating bi-pass 32 is adapted to the inner cavity of the opening and closing chamber 31, the through opening 33 vertically penetrates through the rotating bi-pass 32, the right side of the rotating bi-pass 32 is fixedly connected with the follow-up fluted disc 34, the back side of the follow-up fluted disc 34 is meshed with the linkage rack 35, and the upper end of the linkage rack 35 is fixedly connected to the right side surface of the connection disc 22;
and the bottom front side that is located main storage cabin 1 is provided with stirring feed mechanism 4, and stirring feed mechanism 4 includes: follow-up connecting rod 41, the screw ring 42, guide standpipe 43, electric valve 44, sensor 45, spiral internal stirring axle 46, the equal symmetrical fixedly connected with follow-up connecting rod 41 in the left and right sides of driving cylinder 21, and the lower extreme fixedly connected with screw ring 42 of follow-up connecting rod 41, and the inside of screw ring 42 is provided with guide standpipe 43, the external screw thread has been seted up to the outer wall of guide standpipe 43, screw ring 42 is threaded connection with guide standpipe 43, guide standpipe 43 is for running through cavity formula structure, and the upper end of guide standpipe 43 rotates the bottom of connecting in depositing liquid cabin 12, guide standpipe 43 is linked together with liquid cabin 12, the upper end internally mounted of guide standpipe 43 has electric valve 44, sensor 45 is installed to one side that main storage cabin 1 outer wall is close to electric valve 44, this electric valve 44 is electric connection with sensor 45, pass through sensor 45 detected signal promptly, and control electric valve 44's automatic start-stop, guide standpipe 43 upper end extends to the bottom fixedly connected with spiral internal stirring axle 46 of depositing liquid cabin 12.
In summary, the complete process and the working principle of the invention are as follows: before the device is used, a worker can add ultrapure water into a liquid storage cabin 12 arranged in the inner cavity of a main material storage cabin 1, respectively add sodium carbonate crystals and sodium bicarbonate crystals into two groups of raw material cabins 11, and then cover a sealing cover arranged above the main material storage cabin 1 in a closing manner, so that the whole main material storage cabin 1 is a sealed space.
Then, the device can be moved to the upper part of the tank body by an operator for feeding, when feeding, the operator drives the driving cylinder 21 arranged at the front side of the mounting frame 14 to drive the connecting disc 22 to displace upwards after the driving cylinder 21 is started, simultaneously drives the piston rod 24 arranged in the quantifying cylinder 23 to synchronously move upwards after the connecting disc 22 rises, and at the moment, the air pressure in the quantifying cylinder 23 is caused to change, so that under the action of atmospheric pressure, the liquid guide pipe 25 and the liquid outlet pipe 26 which are mutually communicated through the follow-up opening and closing mechanism 3 synchronously extract ultrapure water from the interior of the liquid storage chamber 12 to the inner cavity of the quantifying cylinder 23, after a certain amount of ultrapure water is extracted from the interior of the quantifying cylinder 23, the liquid guide pipe 25 and the liquid outlet chamber 31 are driven to reset downwards by reverse driving, the connecting disc 22 is caused to drive the piston rod 24 to reset downwards, and at the moment, the action of pressure difference generated by the lower pressure of the piston rod 24 is caused to cause the purified water extracted from the lower end of the piston rod 24 to gradually flow through the liquid guide pipe 25 and the interior of the open and close chamber 31, and finally, the purified water is conveyed to the interior of the tank body through the liquid discharge pipe 27, so that the purified water extracted by the liquid can be supplied to the developing cylinder 21, and the process of the developing cylinder 21, thereby the developing cylinder can be beneficial to the automatic purified water extraction process of the purification process of the developing tank body, and the process of the developing cylinder to reduce pollution of the ultrapure water which is realized.
Because the lower end of the liquid guide pipe 25, the front end of the liquid outlet pipe 26 and the back end of the liquid discharge pipe 27 are communicated through the arranged follow-up opening and closing mechanism 3, the follow-up opening and closing mechanism 3 is arranged in the process in the second process, and the specific operation principle and the process of the follow-up opening and closing mechanism 3 are as follows: when the driving cylinder 21 drives the connecting disc 22 to ascend, the linkage rack 35 fixedly connected on the right side is synchronously driven to ascend, the linkage rack 35 drives the following toothed disc 34 meshed with the linkage rack to rotate after ascending, the following toothed disc 34 synchronously drives the rotating double-pass 32 positioned in the opening and closing cabin 31 to synchronously rotate and rotate by ninety degrees after rotating the double-pass 32, at the moment, one group of through ports 33 positioned below the rotating double-pass 32 rotate to the front end part of the liquid outlet pipe 26, namely, at the moment, the opening and closing cabin 31 completes the communication between the liquid outlet pipe 26 and the opening and closing cabin 31 through the through ports 33 after rotating the double-pass 32, namely, the quantitative cylinder 23 can suck out ultrapure water from the inside of the liquid storage cabin 12, when the driving cylinder 21 drives the connecting disc 22 to reset, the following toothed disc 34 drives the rotating double-pass 32 to reversely reset, at the moment, the liquid outlet pipe 26 is not communicated with the lower end of the liquid guide pipe 25, at the other group of the liquid outlet pipe 33 positioned above the rotating double-pass 27 and the inner end of the quantitative cylinder 23 can be communicated with the inner end of the liquid outlet pipe 27, so that the ultrapure water can be continuously pumped and the ultrapure water can be continuously pumped in the single-flow-through the opening and the quantitative pumping mechanism after-opening and-closing cabin 23 is pumped in the single-closing cabin.
Meanwhile, when the driving cylinder 21 drives upwards, the following connecting rods 41 on the left and right sides of the lower end of the driving cylinder are synchronously driven to move upwards, the following connecting rods 41 drive the thread ring 42 on the lower end of the following connecting rods to gradually move upwards along the outer wall of the material guiding vertical tube 43, the material guiding vertical tube 43 rotates under the screw thread matching transmission of the thread ring 42 and the material guiding vertical tube 43, the material guiding vertical tube 43 rotates to drive the spiral inner stirring shaft 46 positioned at the upper end of the material guiding vertical tube and positioned inside the material cabin 11 to synchronously rotate, crystals stored inside the material cabin 11 are stirred through the rotation of the spiral inner stirring shaft 46, the subsequent discharge of the crystals inside the material cabin 11 can be facilitated through the stirring of the spiral inner stirring shaft 46, the caking of the crystals inside the material cabin 11 can be effectively reduced through the stirring of the spiral inner stirring shaft 46, when the driving cylinder 21 drives the thread ring 42 to move to a position close to the electric valve 44, the sensor 45 detects the signal and timely transmits the signal to the electric valve 44, the electric valve 44 is opened, namely, the electric valve 44 controls the electric valve 11 to automatically and the electric valve 42 to downwards to drive the crystal to automatically and control the crystal to move downwards, and the electric valve 42 to automatically and the electric valve to control the crystal to move downwards.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (2)
1. The utility model provides a feed arrangement for preparing electronic grade TFT developer, includes main storage cabin (1), its characterized in that: the main storage compartment (1) comprises: the device comprises raw material cabins (11), liquid storage cabins (12), a main frame body (13) and a mounting frame (14), wherein the raw material cabins (11) are symmetrically arranged on the left side and the right side inside the main storage cabin (1), the liquid storage cabins (12) are arranged between the raw material cabins (11), the main frame body (13) is fixedly connected to the back side of the main storage cabin (1), the mounting frame (14) is fixedly connected to the front side of the main storage cabin (1), a quantitative liquid pumping mechanism (2) is arranged on the front side of the mounting frame (14), a follow-up opening and closing mechanism (3) is arranged below the quantitative liquid pumping mechanism (2), and a stirring and feeding mechanism (4) is arranged on the front side of the bottom of the main storage cabin (1); the quantitative liquid pumping mechanism (2) comprises: the device comprises a driving cylinder (21), a connecting disc (22), a quantifying cylinder (23), a piston rod (24), a liquid guide pipe (25) and a liquid outlet pipe (26), wherein the driving cylinder (21) is installed on the front side of a mounting frame (14), the connecting disc (22) is fixedly connected to the output end of the lower portion of the driving cylinder (21), the quantifying cylinder (23) is arranged below the connecting disc (22), the piston rod (24) is arranged inside the quantifying cylinder (23) in a matched mode, the upper end of the piston rod (24) is fixedly connected to the bottom surface of the connecting disc (22), the liquid guide pipe (25) is communicated with the lower portion of the quantifying cylinder (23), the liquid outlet pipe (27) is arranged on the front side of the lower portion of the liquid guide pipe (25), and the liquid storage cabin (12) arranged inside a main storage cabin (1) is communicated with the liquid outlet pipe (26);
the lower end of the liquid guide pipe (25), the front end of the liquid outlet pipe (26) and the back end of the liquid outlet pipe (27) are communicated through a follow-up opening and closing mechanism (3);
the follow-up opening and closing mechanism (3) comprises an opening and closing cabin (31), a rotating bi-pass (32), a through hole (33), a follow-up fluted disc (34) and a linkage rack (35), wherein the front end of the liquid outlet pipe (26) is fixedly connected with the opening and closing cabin (31), the rotating bi-pass (32) is rotatably connected with the inside of the opening and closing cabin (31), the through hole (33) is formed in the rotating bi-pass (32), the follow-up fluted disc (34) is fixedly connected to the right side of the rotating bi-pass (32), the linkage rack (35) is meshed with the back side of the follow-up fluted disc (34), and the upper end of the linkage rack (35) is fixedly connected to the right side face of the connecting disc (22); the opening and closing cabin (31) is of a square cavity structure, and the inner cavity of the opening and closing cabin (31) is cylindrical; the rotating bi-pass (32) is of a cylindrical cavity structure, the rotating bi-pass (32) is adapted to an inner cavity of the opening and closing cabin (31), and the through hole (33) vertically penetrates through the rotating bi-pass (32);
when the driving cylinder (21) drives the connecting disc (22) to ascend, the linkage rack (35) fixedly connected on the right side is synchronously driven to ascend, the linkage rack (35) drives the following fluted disc (34) meshed with the linkage rack to rotate after ascending, the following fluted disc (34) synchronously drives the rotating double-pass port (32) positioned inside the opening and closing cabin (31) to synchronously rotate after rotating, and just rotates ninety degrees, after the rotating double-pass port (32) rotates ninety degrees, one group of through ports (33) positioned below the rotating double-pass port (32) rotate to the front end part of the liquid outlet pipe (26), namely the opening and closing cabin (31) completes the communication between the liquid outlet pipe (26) and the opening and closing cabin (31) through the rotating through ports (33) after the rotating double-pass port (32), namely, the quantitative cylinder (23) can suck ultrapure water from the inside of the liquid storage cabin (12), when the driving cylinder (21) drives the connecting disc (22) to reset, the follow-up toothed disc (34) drives the liquid outlet pipe (32) to reversely rotate, so that the ultrapure water is sucked out from the inner end of the liquid outlet pipe (32) and is communicated with the liquid outlet pipe (26), and the liquid outlet pipe (27) is conveyed by the quantitative cylinder (32), and the ultrapure water conveying tank (23), the follow-up opening and closing mechanism (3) is matched with the quantitative liquid pumping mechanism (2) to realize the automatic opening and closing of the ultrapure water pumping process, and the ultrapure water in the liquid storage cabin (12) can be stopped from being continuously pumped after the quantitative cylinder (23) pumps the ultrapure water for one time, so that the precision of ultrapure water delivery for one time is ensured.
2. The feeding device for preparing the developing solution of the electronic grade TFT according to claim 1, wherein: the stirring and feeding mechanism (4) comprises: the automatic feeding device comprises a follow-up connecting rod (41), a threaded ring (42), a material guide vertical pipe (43), an electric valve (44), a sensor (45) and a spiral inner stirring shaft (46), wherein the left side and the right side of a driving cylinder (21) are symmetrically and fixedly connected with the follow-up connecting rod (41), the lower end of the follow-up connecting rod (41) is fixedly connected with the threaded ring (42), the material guide vertical pipe (43) is arranged inside the threaded ring (42), the electric valve (44) is arranged inside the upper end of the material guide vertical pipe (43), the sensor (45) is arranged on one side, close to the electric valve (44), of the outer wall of a main material storage cabin (1), and the upper end of the material guide vertical pipe (43) extends to the bottom of a liquid storage cabin (12) and is fixedly connected with the spiral inner stirring shaft (46);
the outer wall of the material guide vertical pipe (43) is provided with external threads, and the thread ring (42) is in threaded connection with the material guide vertical pipe (43);
the material guide vertical pipe (43) is of a through cavity type structure, the upper end of the material guide vertical pipe (43) is rotatably connected to the bottom of the liquid storage cabin (12), and the material guide vertical pipe (43) is communicated with the raw material cabin (11);
when the driving cylinder (21) drives upwards, the driving cylinder synchronously drives the follow-up connecting rods (41) at the left side and the right side of the lower end of the driving cylinder to move upwards, the follow-up connecting rods (41) drive the threaded rings (42) at the lower end of the driving cylinder to gradually move upwards along the outer wall of the material guide vertical pipes (43), and under the screw thread matching transmission of the threaded rings (42) and the material guide vertical pipes (43), the material guide vertical pipes (43) can rotate, the material guide vertical pipes (43) drive the spiral inner stirring shafts (46) positioned at the upper ends of the material guide vertical pipes and positioned inside the material cabin (11) to synchronously rotate after rotating, crystals stored inside the material cabin (11) can be stirred through the rotation of the spiral inner stirring shafts (46), the subsequent sending-out of the crystals inside the material cabin (11) can be facilitated through the stirring of the spiral inner stirring shafts (46), meanwhile, the situation that the crystals are caked inside the material cabin (11) can be effectively reduced through the stirring of the spiral inner stirring shafts (46), when the driving cylinder (21) drives the threaded rings (42) to move to be close to the position of the electric valve (44), the electric valve (44) is started, and the electric valve (44) can drive the electric valve (44) to gradually reset the electric valve (44) to reset the electric valve (11) and then the electric valve (11) to reset the electric valve (44) to reset the electric valve (42) and the electric valve (44) to reset the electric valve (11), the electric valve (44) is automatically closed under the control of the sensor (45), so that the automatic addition of the two crystals is completed.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210909333.0A CN115245777B (en) | 2022-07-29 | 2022-07-29 | Feeding device for preparing electronic-grade TFT developing solution |
| PCT/CN2022/123023 WO2024021305A1 (en) | 2022-07-29 | 2022-09-30 | Feeding device for preparing electronic-grade tft developing solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210909333.0A CN115245777B (en) | 2022-07-29 | 2022-07-29 | Feeding device for preparing electronic-grade TFT developing solution |
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| Publication Number | Publication Date |
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| CN115245777A CN115245777A (en) | 2022-10-28 |
| CN115245777B true CN115245777B (en) | 2023-03-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210909333.0A Active CN115245777B (en) | 2022-07-29 | 2022-07-29 | Feeding device for preparing electronic-grade TFT developing solution |
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| Country | Link |
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| CN (1) | CN115245777B (en) |
| WO (1) | WO2024021305A1 (en) |
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| CN107261910A (en) * | 2017-06-08 | 2017-10-20 | 惠安县长信机电科技有限公司 | A kind of sour milk beverage homogenizer of convenient charging |
| CN107537352A (en) * | 2017-09-06 | 2018-01-05 | 段华勇 | A kind of Landscape image soluble fertilizers grain dissolution mixing apparatus |
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| CN214915242U (en) * | 2021-05-21 | 2021-11-30 | 河南华正工程试验检测有限责任公司 | Raw material storage device for concrete trial preparation |
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2022
- 2022-07-29 CN CN202210909333.0A patent/CN115245777B/en active Active
- 2022-09-30 WO PCT/CN2022/123023 patent/WO2024021305A1/en unknown
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| CN208180523U (en) * | 2018-05-09 | 2018-12-04 | 河南中瀛包装科技股份有限公司 | A kind of printing machine rapid feeding device |
| CN208554177U (en) * | 2018-06-19 | 2019-03-01 | 施卫昌 | A kind of liquid chemical raw material hybrid reaction kettle |
| CN209966648U (en) * | 2018-12-14 | 2020-01-21 | 采纳科技股份有限公司 | Electric or pneumatic continuous injector |
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| Publication number | Publication date |
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| CN115245777A (en) | 2022-10-28 |
| WO2024021305A1 (en) | 2024-02-01 |
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