CN115235736A - Double-beam four-quadrant alignment method and system based on single crystal lens - Google Patents
Double-beam four-quadrant alignment method and system based on single crystal lens Download PDFInfo
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Abstract
The invention discloses a double-beam four-quadrant alignment method and system based on a single crystal lens, and relates to the technical field of single crystal testing. The system includes a first laser, a second laser, a first photodetector, and a second photodetector. The first laser is used for emitting first laser to the center of the single crystal lens; the first laser forms first reflection laser after being reflected by the single crystal lens; the second laser is used for emitting second laser to the center of the single crystal lens; the second laser forms second reflection laser after being reflected by the single crystal lens; the first photoelectric detector is used for receiving the first reflected laser; the second photodetector is for receiving the second reflected laser light. The invention reduces the operation difficulty of single crystal lens alignment and improves the speed of single crystal lens alignment.
Description
Technical Field
The invention relates to the technical field of single crystal testing, in particular to a double-beam four-quadrant alignment method and system based on a single crystal lens.
Background
Single crystal lenses in special optical systemsIs an essential part, such as a lithography machine, which uses a single crystal lens. With CaF 2 A single crystal lens is taken as an example, and it is generally required to make a specific crystal orientation of the single crystal lens coincide with an optical path direction or make a specific angle when used. However, the single crystal lens is affected by the processing error during processing, and the beveling phenomenon is generated, i.e. the included angle between the specific crystal orientation and the lens surface has a certain deviation, such as CaF 2 The crystal face of a single crystal lens is generally not parallel to the lens surface but rather at an angle. Therefore, the single crystal lens is aligned before use by using an apparatus such as X-ray diffraction to ensure that the single crystal lens is accurately mounted in the optical system.
In the existing traditional position calibration alignment method, an X-ray diffractometer is required to determine that the single crystal lens is positioned at the center of an X-ray path: and driving the single crystal lens to move repeatedly along each axial direction by using a diffractometer sample stage, collecting diffraction signals by using a detector in the process, and finishing the position alignment of the single crystal lens by using a computer based on the diffraction signals. The operation process is complex and time-consuming. Based on this, a more rapid alignment method for single crystal lenses is needed.
Disclosure of Invention
The embodiment of the invention aims to provide a double-beam four-quadrant alignment method and system based on a single crystal lens, which can reduce the operation difficulty of single crystal lens alignment and improve the speed of single crystal lens alignment.
In order to achieve the above object, the embodiments of the present invention provide the following solutions:
a single crystal lens based dual-beam four-quadrant alignment method, based on a dual-beam four-quadrant alignment system, the system comprising: the system comprises two lasers and photoelectric detectors corresponding to the lasers one by one; in operation, the laser light emitted by the two lasers is perpendicular to each other, and the laser device comprises:
placing a single crystal lens to be tested;
irradiating two beams of laser light perpendicular to each other at the same position of the single crystal lens to form two beams of reflected laser light; the two beams of reflected laser respectively fall on corresponding photoelectric detectors to form reflected laser points; any one of the photoelectric detectors corresponds to a Cartesian coordinate system, the Cartesian coordinate system takes the central point of the corresponding photoelectric detector as an original point and is provided with four quadrants;
when any one of the reflected laser points falls at a position outside the target origin, adjusting the single crystal lens in a three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin until each reflected laser point falls at the corresponding target origin; wherein the target origin is: the center of the photoelectric detector corresponding to the reflected laser spot; the three-dimensional coordinate system takes the center of the single crystal lens as an origin and comprises an X axis, a W axis and a Z axis; the adjusting operation comprises: at least one of translating along the Z axis, rotating about the W axis, and rotating about the X axis.
Optionally, the reflected laser spots comprise a first reflected laser spot and a second reflected laser spot; the two lasers include a first laser and a second laser; the laser emitted by the first laser is parallel to the plane where the X axis and the Z axis are located, and the first reflected laser point is formed after the laser is reflected by the single crystal lens; the Cartesian coordinate system where the first reflected laser point is located is a first Cartesian coordinate system;
the laser emitted by the second laser is parallel to the plane where the W axis and the Z axis are located, and the second reflected laser point is formed after the laser is reflected by the single crystal lens; and the Cartesian coordinate system where the second reflected laser point is located is a second Cartesian coordinate system.
Optionally, any cartesian coordinate system comprises: an x-axis and a y-axis;
the positional relationship includes: at least one of a first offset relationship, a second offset relationship, a third offset relationship, and a fourth offset relationship;
wherein the first offset relationship comprises: the first reflected laser point is offset in the x-axis direction relative to its target origin;
the second offset relationship comprises: the second reflected laser point is offset in the x-axis direction relative to its target origin;
the third offset relationship comprises: the first reflected laser point is offset in the y-axis direction relative to its target origin;
the fourth offset relationship comprises: the second reflected laser spot is offset in the y-axis direction from its target origin.
Optionally, the positional relationship includes both a first offset relationship and a fourth offset relationship;
based on the positional relationship, a first positional combination between the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser point is located at a first target position in the first cartesian coordinate system; the target position is: any position on the y-axis of the first cartesian coordinate system other than the target origin, and,
the second reflected laser point is located at a second target position in the second cartesian coordinate system; the second target position is: any position on the y-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps:
and if the first position combination is met, translating the single crystal lens along the Z axis until the first reflected laser point and the second reflected laser point are both positioned at respective target origin points.
Optionally, the positional relationship includes both a first offset relationship and a third offset relationship;
based on the positional relationship, a second combination of positions between the first reflected laser spot and the second reflected laser spot respectively includes:
the first reflected laser point is located at a first target position in the first Cartesian coordinate system; the first target position is: any position on the y-axis of the first cartesian coordinate system other than the target origin, and,
the second reflected laser point is located at a third target position in the second cartesian coordinate system; the third target mark position is as follows: any position on the x-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflection laser point and the corresponding target origin point comprises the following steps:
and if the second position combination is met, rotating the single crystal lens around a W axis until the first reflected laser point and the second reflected laser point are both located at respective target origin points.
Optionally, the positional relationship includes both a second offset relationship and a third offset relationship;
based on the positional relationship, a third positional combination of the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser point is located at a fourth target position in the first cartesian coordinate system; the fourth target position is: any position on the x-axis of the first cartesian coordinate system other than the target origin, and,
the second reflected laser point is located at a second target position in the second cartesian coordinate system; the second target mark position is as follows: any position on the y-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps: rotating around the X axis;
and if the third position combination is met, rotating the single crystal lens around the X axis until the first reflected laser point and the second reflected laser point are located at respective target origin points.
Optionally, the positional relationship includes first to fourth offset relationships simultaneously;
based on the positional relationship, the fourth combination of positions of the first reflected laser spot and the second reflected laser spot respectively includes:
the first reflected laser spot is located in a second quadrant of the first cartesian coordinate system, and the second reflected laser spot is located in a second quadrant of the second cartesian coordinate system;
or,
the first reflected laser spot is located in a fourth quadrant of the first cartesian coordinate system, and the second reflected laser spot is located in a fourth quadrant of the second cartesian coordinate system;
or,
the first reflected laser spot is located in a first quadrant of a first cartesian coordinate system, and the second reflected laser spot is located in a third quadrant of a second cartesian coordinate system;
or,
the first reflected laser spot is located in a third quadrant of a first cartesian coordinate system, and the second reflected laser spot is located in a fourth quadrant of a second cartesian coordinate system;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps:
and if the fourth position combination is met, rotating the single crystal lens around the W axis and the X axis until the first reflected laser point and the second reflected laser point are located at the respective target origin.
Optionally, the positional relationship includes first to fourth offset relationships simultaneously;
based on the positional relationship, a fifth positional combination of the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser spot is located at a first target position in a first cartesian coordinate system, and the second reflected laser spot is located in any quadrant of a second cartesian coordinate system; the first target position is: any position on the y-axis of the first Cartesian coordinate system except the target origin;
or,
the first reflected laser spot is located in any quadrant of a first cartesian coordinate system, and the second reflected laser spot is located in a second target position of a second cartesian coordinate system; the second target mark position is as follows: any position on the y-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps:
and if the fifth position combination is met, enabling the single crystal lens to translate along the Z axis, rotate around the W axis and rotate around the X axis until the first reflected laser point and the second reflected laser point are located at respective target origin points.
Optionally, the performing, according to the position relationship between each reflected laser point and the corresponding target origin, an adjustment operation on the single crystal mirror in the three-dimensional coordinate system includes:
judging whether the first offset relation exists or not;
if so, rotating the single crystal lens around the X axis until the first offset relation is eliminated, and returning the first reflected laser point to the X axis;
if the first offset relation does not exist or is eliminated, judging whether a second offset relation exists or not;
if the second deviation relation exists, the single crystal lens rotates around the W-axis direction until the second deviation relation is eliminated, and the second reflected laser point returns to the x-axis;
if the second offset relation does not exist or is eliminated, judging whether a third offset relation or a fourth offset relation exists;
if the single crystal lens exists, the single crystal lens is translated along the Z axis until the first reflected laser point and the second reflected laser point are located at respective target origin points;
when the first reflected laser spot and the second reflected laser spot are both located at respective target origins, the alignment is completed.
Preferably, a single crystal lens based dual beam four quadrant alignment system, comprising:
the first laser is used for emitting first laser to the center of the single crystal lens; the first laser forms first reflected laser after being reflected by the single crystal lens;
the second laser is used for emitting second laser to the center of the single crystal lens; the second laser forms second reflected laser after being reflected by the single crystal lens;
a first photodetector for receiving the first reflected laser light;
a second photodetector for receiving the second reflected laser light.
According to the specific embodiment provided by the invention, the following technical effects are disclosed:
in the technical scheme provided by the embodiment of the invention, the mutually vertical laser beams irradiate the same position of the single crystal lens and are reflected, and the two reflected laser beams respectively fall on the corresponding photoelectric detectors to form reflected laser spots. Wherein, any one of the photoelectric detectors corresponds to a Cartesian coordinate system and has four quadrants. The reflected laser spot may fall in a quadrant, on an axis, etc. of the corresponding cartesian coordinate system. When any one of the reflected laser points falls at a position outside the target origin, the adjustment operation of the single crystal lens in the three-dimensional coordinate system is determined and adjusted according to the position relationship between each reflected laser point and the corresponding target origin until each reflected laser point falls at the corresponding target origin. The adjusting operation includes: the single crystal lens is translated along the Z axis, rotated around the W axis and rotated around the X axis, namely, the translation adjustment is carried out on the Z axis, the translation is not needed in the directions of the W axis and the X axis, and the diffraction instrument sample stage is not needed to drive the single crystal lens to repeatedly move along each axial direction like the existing mode, so that the operation difficulty of aligning the single crystal lens is reduced, and the aligning speed of the single crystal lens is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive labor.
Fig. 1 is a schematic flowchart of a two-beam four-quadrant alignment method based on a single crystal lens according to an embodiment of the present invention;
fig. 2 is a schematic diagram illustrating an operation of adjusting a three-dimensional coordinate system of a single-crystal-lens-based two-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 3 is a first position combination diagram of a single crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a second position combination of a single-crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 5 is a third position combination diagram of a single crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 6 is a diagram illustrating a fourth position combination of a single-crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 7 is a schematic view of another fourth position combination of a single crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of a fifth position combination of a single-crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of another fifth position combination of a single-crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 10 is a schematic view of another fifth position combination of a single crystal lens based dual beam four quadrant alignment method according to an embodiment of the present invention;
FIG. 11 is a schematic view of another fifth position combination of a single-crystal lens based dual-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 12 is a schematic diagram of a two-beam four-quadrant alignment system based on a single crystal lens according to an embodiment of the present invention;
fig. 13 is a flowchart illustrating a double-beam four-quadrant alignment method based on a single crystal lens according to an embodiment of the present invention;
FIG. 14 is a schematic diagram of a single crystal lens based dual beam four quadrant alignment method without adjustment according to an embodiment of the present invention;
FIG. 15 is a schematic view of a translation along the Z-axis in a single crystal lens based two-beam four-quadrant alignment method according to an embodiment of the present invention;
FIG. 16 is a schematic view of a single crystal lens based dual beam four quadrant alignment method with rotation about the W-axis;
fig. 17 is a schematic diagram of rotation around the X-axis in a two-beam four-quadrant alignment method based on a single crystal lens according to an embodiment of the present invention.
Description of the symbols:
a first laser-1, a second laser-2, a first photodetector-3 and a second photodetector-4.
Detailed Description
The structure and scenario described in the embodiment of the present application are for more clearly illustrating the technical solution of the embodiment of the present application, and do not form a limitation on the technical solution provided in the embodiment of the present application, and it is known by a person skilled in the art that with the occurrence of a new scenario, the technical solution provided in the embodiment of the present application is also applicable to similar technical problems.
It is noted that, in the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or illustrations. Any embodiment or design described herein as "exemplary" or "e.g.," is not necessarily to be construed as preferred or advantageous over other embodiments or designs. Rather, use of the word "exemplary" or "such as" is intended to present concepts related in a concrete fashion.
The embodiment of the invention aims to provide a double-beam four-quadrant alignment method and system based on a single crystal lens, so as to solve the problem that a diffractometer sample stage is required to drive the single crystal lens to repeatedly move along each axial direction during alignment, reduce the operation difficulty of single crystal lens alignment and improve the speed of single crystal lens alignment.
The alignment system is based on a two-beam four-quadrant alignment system, which, referring to fig. 12, illustratively comprises: a first laser 1, a second laser 2, a first photodetector 3 and a second photodetector 4. Wherein, the two photoelectric detectors correspond to the two lasers one by one; in operation, the lasers emitted by the two lasers are perpendicular to each other.
Fig. 1 illustrates an exemplary flow of a single crystal lens based two-beam four-quadrant alignment method, comprising:
step 1: placing the single crystal lens to be tested.
In one example, the single crystal lens can be CaF 2 Single crystal lens, mgF 2 A single crystal lens or a sapphire single crystal lens.
The single crystal lens can be placed on an electric swing table (electric angular motion table), and the electric swing table can drive the single crystal lens to translate along a Z axis, rotate around a W axis and/or rotate around an X axis. Illustratively, the specific model of the electric swing table can be a TBG series electric swing sliding table or a PSAG series electric swing sliding table.
Step 2: two beams of laser light perpendicular to each other are irradiated on the same position of the single crystal lens to form two reflected laser light beams.
To achieve the perpendicular laser light, in one example, referring to fig. 12, the first laser 1 emits laser light parallel to the plane of the X-axis and the Z-axis, and the second laser 2 emits laser light parallel to the plane of the W-axis and the Z-axis; or conversely, the laser emitted by the first laser 1 is parallel to the plane of the W axis and the Z axis, and the laser emitted by the second laser 2 is parallel to the plane of the X axis and the Z axis, as long as the laser emitted by the first laser and the laser emitted by the second laser are perpendicular to each other.
The skilled person can flexibly arrange the first laser 1 and the second laser 2 by making the laser beams emitted by the two lasers perpendicular to each other and irradiate the same position of the single crystal lens.
As for the positional relationship between the laser and the corresponding photodetector, in one example, the following design may be made: relative to the plane where the X axis and the Z axis are located, the position of the first laser 1 and the position of the first photoelectric detector 3 are mirror positions; the position of the second laser 2 and the position of the second photodetector 4 are mirror images of each other with respect to the plane in which the W-axis and the Z-axis lie. And vice versa.
In another example, the following design may also be made: the central connecting line of the first laser 1 and the first photoelectric detector 3 is vertical to the plane where the W axis and the Z axis are located, and the central connecting line of the second laser 2 and the second photoelectric detector 4 is vertical to the plane where the X axis and the Z axis are located. Otherwise, it is also not described in detail.
The two beams of reflected laser respectively fall on corresponding photoelectric detectors to form reflected laser spots. For convenience of reference, a reflected laser spot formed by reflecting laser light emitted by the first laser 1 by a single crystal mirror may be referred to as a first reflected laser spot. And a reflected laser spot formed by reflecting the laser emitted by the second laser by the single crystal lens is called as a second reflected laser spot.
It should be noted that there may be refraction and absorption of laser light irradiated on the single crystal lens, but the ratio of refraction and absorption of laser light is very small and can be ignored.
The two photodetectors respectively correspond to a Cartesian coordinate system, and the Cartesian coordinate system takes the central point of the corresponding photodetector as an origin and has four quadrants.
Fig. 3-11 show examples of two reflected laser points in respective cartesian coordinate systems.
For convenience of reference, the cartesian coordinate system in which the first reflected laser point is located may be referred to as a first cartesian coordinate system; the cartesian coordinate system in which the second reflected laser spot is located is referred to as the second cartesian coordinate system.
Any cartesian coordinate system includes: the x-axis and the y-axis.
And 3, step 3: and when any one of the reflected laser points falls at a position outside the target origin, adjusting the single crystal lens in a three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin until each reflected laser point falls at the corresponding target origin.
Referring to fig. 2, the three-dimensional coordinate system uses the center of the single crystal lens as the origin and includes an X-axis, a W-axis and a Z-axis.
The target origin is: the reflected laser spot corresponds to the center of the photodetector.
Taking fig. 3 as an example, it is assumed that the cartesian coordinate system on the left side of fig. 3 is the first cartesian coordinate system, and the origin of the coordinate system is the target origin of the first reflected laser spot.
Similarly, assuming that the cartesian coordinate system on the right side of fig. 3 is the second cartesian coordinate system, the origin of the coordinate system is the target origin of the second reflected laser spot.
As can be seen from fig. 3, neither of the two reflected laser spots falls at its target origin, and an adjustment is required.
Still referring to fig. 2, the adjusting operation may include: at least one of translating along the Z axis, rotating about the W axis, and rotating about the X axis. The specific adjustment operation will be described in detail later in this document with reference to different cases. The range of translation along the Z axis is ± 2mm.
Fig. 13 shows a more specific exemplary process of the above-described two-beam four-quadrant alignment method, which may include:
s1: placing the single crystal lens to be tested.
This step is the same as the step 1, and is not described herein again.
S2: and placing the two lasers and the two photoelectric detectors so that the lasers emitted by the two lasers are perpendicular to each other and irradiate the same position of the single crystal lens.
Illustratively, the same position may be a center point of the single crystal lens.
In practical operation, if the laser beams emitted by the two lasers irradiate on other positions of the single crystal lens except the central point, the single crystal lens can be translated, so that the laser beams emitted by the two lasers irradiate on the central point of the single crystal lens.
The two laser beams form two laser beams after being reflected by the single crystal lens, and the two laser beams respectively fall on the two photoelectric detectors to form two laser reflection spots. For details, reference may be made to the description of the foregoing embodiments, which are not described herein.
S3: a Cartesian coordinate system is established by taking the central point of the photoelectric detector as an original point, a horizontal line where the original point is located is taken as an x axis, and a straight line perpendicular to the horizontal line where the original point is located is taken as a y axis.
Each coordinate system has four quadrants, and the reflected laser spot falls in the corresponding coordinate system, which can be seen in the above description and fig. 3-11, and will not be described herein.
S4: and judging the position relation between each reflected laser point and the corresponding target origin. If the positions of all the reflected laser points and the corresponding target original points coincide, the single crystal lens does not need to be adjusted; if the positions of the reflected laser points and the corresponding target origin are not coincident (namely, any reflected laser point is located at a position outside the target origin), the single crystal lens is adjusted in the three-dimensional coordinate system until each reflected laser point is coincident with the corresponding target origin.
Therefore, the double-beam four-quadrant alignment method provided by the embodiment of the invention does not need to require a diffractometer sample stage to drive the single crystal lens to repeatedly move along each axial direction like the conventional method, and the diffractometer sample stage has larger axial ratio and slow rotation speed. The single crystal lens only needs to be adjusted by at least one of three adjusting operations of translation along the Z axis, rotation around the W axis and rotation around the X axis. The operation difficulty of single crystal lens alignment is reduced, and the speed of single crystal lens alignment is improved.
The positional relationship mentioned above is described below.
In one example, the positional relationship may include: at least one of a first offset relationship, a second offset relationship, a third offset relationship and a fourth offset relationship.
Wherein the first offset relationship comprises: the first reflected laser spot is offset in the x-axis direction from its target origin. Alternatively, it can also be said that the first reflected laser point falls on the left or right side of the y-axis of the first cartesian coordinate system.
The second offset relationship includes: the second reflected laser spot is offset in the x-axis direction from its target origin. Alternatively, it can also be said that the second reflected laser spot falls to the left or right of the y-axis of the second cartesian coordinate system.
The third offset relationship includes: the first reflected laser light spot is offset in the y-axis direction from its target origin. Alternatively, it can also be said that the first reflected laser light point falls above or below the x-axis of the first cartesian coordinate system.
The fourth offset relationship includes: the second reflected laser spot is offset in the y-axis direction from its target origin. Alternatively, it can also be said that the second reflected laser spot falls above or below the x-axis of the second cartesian coordinate system.
The offset is due to the single crystal lens being offset or tilted in at least one dimension of the three-dimensional coordinate system.
Taking the first photodetector 3 as an example (the laser light emitted by it is parallel to the plane in which the X-axis and the Z-axis lie), the relationship between the shift or tilt of the single crystal mirror and the position of the first reflected laser point is described below:
referring to fig. 14, if there is no deviation of the single crystal mirror from the ideal position, the first reflected laser point is exactly located at the target origin. The ideal position is the position of the single crystal lens at the center of the optical path.
Still taking the first photodetector 3 as an example, referring to fig. 15, if the single crystal lens has a Z-axis offset (higher or lower than the ideal position), the first reflected laser spot is located on the y-axis (specifically, may be located on the positive half axis or the negative half axis of the y-axis), which belongs to a third offset relationship.
Still taking the first photodetector 3 as an example, referring to fig. 16, if the single crystal lens has a W-axis offset (tilted left or right relative to the ideal position), the first reflected laser spot is located on the y-axis (specifically, may be located on the positive half axis or the negative half axis of the y-axis), which is a third offset relationship.
Still taking the first photodetector 3 as an example, referring to fig. 17, if the single crystal lens has an offset in the X-axis direction (which is inclined inward or outward relative to the ideal position), the first reflected laser spot is located on the X-axis (specifically, may be located on the positive half axis or the negative half axis of the X-axis) -belonging to the first offset relationship.
Since the laser emitted by the second photodetector is perpendicular to the first photodetector, the relationship between the shift or tilt of the single crystal lens and the position of the second reflected laser point may be:
and if the single crystal lens does not deviate relative to the ideal position, the second reflected laser point is just positioned at the target origin.
If the single crystal mirror has a Z-axis offset (higher or lower than the ideal position), the second reflected laser spot is located on the y-axis (specifically, the upper half axis or the lower half axis of the y-axis), which belongs to the fourth offset relationship.
If the single crystal mirror has a tilt in the W-axis direction (left or right relative to the ideal position), the second reflected laser spot is located on the x-axis (specifically, may be located on the positive or negative half of the x-axis), which is in the second offset relationship.
If the single crystal mirror has a tilt in the X-axis direction (inward or outward with respect to the ideal position), the second reflected laser spot is located on the y-axis (specifically, may be located on the positive half axis or the negative half axis of the y-axis) — belonging to the above-mentioned fourth offset relationship.
When the positional relationship includes a different offset relationship or a combination of offset relationships, the positions of the first and second reflected laser points in the respective cartesian coordinate systems may also be different. Accordingly, the corresponding adjustment operations may also differ. Which will be described separately below.
The positional relationship includes both the first offset relationship and the fourth offset relationship.
Based on the positional relationship one, a first positional combination between the first reflected laser spot and the second reflected laser spot may include:
the first reflected laser point is located at a first target position in a first Cartesian coordinate system; the first target position is: any position on the y-axis of the first cartesian coordinate system except the target origin, and a second target position where the second reflected laser spot is located in the second cartesian coordinate system; the second target position is: any position on the y-axis of the second cartesian coordinate system other than the target origin.
Fig. 3 shows an exemplary first combination of positions: the first reflected laser point is located on the positive y-axis half axis in the first Cartesian coordinate system, and the second reflected laser point is located on the positive y-axis half axis in the second Cartesian coordinate system.
From the above description, it is understood that in this case, the single crystal lens is deviated in the Z-axis and not horizontally. The aforementioned "performing an adjustment operation on the single crystal lens in a three-dimensional coordinate system according to the positional relationship between each reflected laser point and the corresponding target origin" may specifically include:
and if the first position combination is met, translating the single crystal lens along the Z axis until the first reflected laser point and the second reflected laser point are positioned at respective target origin points.
In the foregoing description, the single crystal lens can be placed on the electric swing table, and the electric swing table can be moved vertically along the Z axis to drive the single crystal lens to move horizontally along the Z axis.
Position relation two
The positional relationship includes both the first offset relationship and the third offset relationship.
Based on the second position relationship, the second position combination between the first reflected laser spot and the second reflected laser spot respectively comprises:
the first reflected laser point is located at a first target position in a first cartesian coordinate system; and the second reflected laser spot is located at a third target position in a second cartesian coordinate system; the third target mark position is as follows: any position on the x-axis of the second cartesian coordinate system other than the target origin.
Fig. 4 shows an exemplary second position combination: the first reflected laser spot is located on the positive y-axis half axis in the first cartesian coordinate system and the second reflected laser spot is located on the negative x-axis half axis in the second cartesian coordinate system.
From the foregoing description, it can be seen that in this case, the single crystal lens is offset in the horizontal direction. The aforementioned "performing an adjustment operation on the single crystal mirror in a three-dimensional coordinate system according to the positional relationship between each reflected laser point and the corresponding target origin" may specifically include:
and if the second position combination is met, rotating the single crystal lens around the W axis until the first reflected laser point and the second reflected laser point are both positioned at respective target origin points.
Under the condition that the single crystal lens is placed on the electric swing table, the electric swing table can rotate around the W axis to drive the single crystal lens to rotate around the W axis.
Position relation three
The positional relationship includes both the second offset relationship and the third offset relationship.
Based on the third positional relationship, the third positional combination of the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser point is located at a fourth target position in the first Cartesian coordinate system; the fourth target position is: any position on the x-axis of the first cartesian coordinate system except the target origin, and a second reflected laser spot at a second target position in the second cartesian coordinate system.
Fig. 5 shows an exemplary third position combination: the first reflected laser spot is located on the negative x-axis half axis in the first cartesian coordinate system and the second reflected laser spot is located on the positive y-axis half axis in the second cartesian coordinate system.
From the foregoing description, it can be seen that in this case, the single crystal lens is offset in the horizontal direction. The aforementioned "performing an adjustment operation on the single crystal lens in a three-dimensional coordinate system according to the positional relationship between each reflected laser point and the corresponding target origin" may specifically include:
and if the third position combination is met, rotating the single crystal lens around the X axis until the first reflected laser point and the second reflected laser point are both positioned at the respective target origin.
Under the condition that the single crystal lens is placed on the electric swing table, the electric swing table can rotate around the X axis to drive the single crystal lens to rotate around the X axis.
Position relation of four
The positional relationship includes first to fourth offset relationships at the same time.
Based on the fourth positional relationship, the fourth positional combinations of the first reflected laser spot and the second reflected laser spot respectively include:
the first reflected laser spot is located in a second quadrant of the first cartesian coordinate system and the second reflected laser spot is located in a second quadrant of the second cartesian coordinate system. Alternatively, the first reflected laser spot is located in the fourth quadrant of the first cartesian coordinate system and the second reflected laser spot is located in the fourth quadrant of the second cartesian coordinate system. Alternatively, the first reflected laser spot is located in a first quadrant of the first cartesian coordinate system and the second reflected laser spot is located in a third quadrant of the second cartesian coordinate system. Alternatively, the first reflected laser spot is located in a third quadrant of the first cartesian coordinate system and the second reflected laser spot is located in a fourth quadrant of the second cartesian coordinate system.
Fig. 6 shows an exemplary fourth combination of positions: the first reflected laser spot is located in a second quadrant of the first cartesian coordinate system and the second reflected laser spot is located in a second quadrant of the second cartesian coordinate system.
FIG. 7 illustrates an exemplary fourth combination of locations: the first reflected laser spot is located in a first quadrant of the first cartesian coordinate system and the second reflected laser spot is located in a third quadrant of the second cartesian coordinate system.
From the foregoing description, it can be seen that in this case, the single crystal lens is offset in the horizontal direction. The aforementioned "performing an adjustment operation on the single crystal mirror in a three-dimensional coordinate system according to the positional relationship between each reflected laser point and the corresponding target origin" may specifically include:
and if the fourth position combination is met, rotating the single crystal lens around the W axis and the X axis until the first reflected laser point and the second reflected laser point are located at the respective target origin points.
Under the condition that the single crystal lens is placed on the electric swing platform, the electric swing platform can rotate around the W shaft to drive the single crystal lens to rotate around the W shaft, and then the electric swing platform can rotate around the X shaft to drive the single crystal lens to rotate around the X shaft.
Position relation five
The positional relationship includes first to fourth offset relationships at the same time.
Based on the positional relationship of five, a fifth positional combination of the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser spot is located at a first target position in a first cartesian coordinate system, and the second reflected laser spot is located in any quadrant of a second cartesian coordinate system; alternatively, the first reflected laser spot is located in either quadrant of the first cartesian coordinate system and the second reflected laser spot is located at a second target location of the second cartesian coordinate system.
Fig. 8 shows a first example of the fifth position combination: the first reflected laser spot is located in the positive y-axis half axis of the first cartesian coordinate system and the second reflected laser spot is located in the second quadrant of the second cartesian coordinate system.
Fig. 9 shows a second example of the fifth position combination: the first reflected laser spot is located on the y-axis in a first cartesian coordinate system and the second reflected laser spot is located in a first quadrant in a second cartesian coordinate system.
Fig. 10 shows a third example of a fifth position combination: the first reflected laser spot is located in a second quadrant of the first cartesian coordinate system, and the second reflected laser spot is located on a positive y-axis semiaxis of the second cartesian coordinate system.
Fig. 11 shows a fourth example of the fifth position combination: the first reflected laser spot is located in a second quadrant of the first cartesian coordinate system and the second reflected laser spot is located on the y-axis of the second cartesian coordinate system.
From the above description, it is understood that in this case, the single crystal lens is shifted in the horizontal direction and also in the height. The aforementioned "performing an adjustment operation on the single crystal lens in a three-dimensional coordinate system according to the positional relationship between each reflected laser point and the corresponding target origin" may specifically include:
and if the fifth position combination is met, the single crystal lens is enabled to translate along the Z axis, rotate around the W axis and rotate around the X axis until the first reflected laser point and the second reflected laser point are located at respective target origin points.
Under the condition that the single crystal lens is placed on the electric swing table, the electric swing table can rotate around the W shaft to drive the single crystal lens to rotate around the W shaft, then the electric swing table rotates around the X shaft to drive the single crystal lens to rotate around the X shaft, and finally the electric swing table translates along the Z shaft to drive the single crystal lens to translate along the Z shaft.
In summary, when the single crystal mirror is displaced in height (Z-axis direction) and/or tilted in the left-right direction (rotation about W-axis as the rotation axis), the reflected laser spot is located above or below the x-axis of the cartesian coordinate system.
When the single crystal lens is tilted inward and outward (rotation about the X-axis as the rotation axis), the reflected laser spot is located on the left or right side of the y-axis of the cartesian coordinate system. For a first reflected laser spot to the left or right of the y-axis relative to the target origin, a second reflected laser spot is correspondingly located above or below the x-axis relative to the target origin.
Therefore, during alignment, whether the first reflected laser spot has left-right deviation or not can be judged, the inner-outer inclination (rotation with the X axis as a rotating axis) of the single crystal lens is eliminated preferentially, whether the second reflected laser spot has left-right deviation or not is judged, the left-right inclination (rotation with the W axis as a rotating axis) of the single crystal lens is eliminated, finally, the height deviation (Z axis direction deviation) is adjusted, and the deviation in height is eliminated until the reflected laser spots return to the center, so that the alignment is completed. The method comprises the following specific steps:
the method comprises the following steps: observing whether the first reflected laser point has left-right deviation relative to the target origin (namely judging whether the single crystal lens has rotation taking the X axis as a rotation axis); if yes, executing the step two, otherwise, executing the step three.
Step two: and rotating the electric swing table around the X axis to drive the single crystal lens to rotate around the X axis until the first reflection laser point moves to the y axis, namely eliminating the deviation in the X axis direction.
Step three: observing whether the second reflected laser point is shifted left and right relative to the target origin (namely judging whether the single crystal lens rotates around the W axis as a rotating axis); if yes, executing the step four, otherwise, executing the step five.
Step four: and rotating the electric swing table around the W axis to drive the single crystal lens to rotate around the W axis until the second reflected laser point moves to the y axis, namely eliminating the horizontal deviation in the W axis direction.
At this point, if both reflected laser points return to their respective target origins, the alignment is complete.
Step five: observing whether the two reflected laser points are offset up and down (namely offset in the Z-axis direction); if yes, executing step six, otherwise, completing the alignment.
Step six: and (3) translating the electric swing table along the Z axis to drive the single crystal lens to translate along the Z axis until the two reflected laser points return to respective target original points, namely eliminating the height deviation in the Z axis direction and finishing alignment.
In addition, the embodiment of the invention also provides a double-beam four-quadrant alignment system based on a single crystal lens, which comprises a first laser 1, a second laser 2, a first photoelectric detector 3 and a second photoelectric detector 4.
The first laser 1 is used for emitting first laser to the center of the single crystal lens; the first laser forms first reflection laser after being reflected by the single crystal lens.
The second laser 2 is used for emitting second laser to the center of the single crystal lens; the second laser forms second reflection laser after being reflected by the single crystal lens.
The first photodetector 3 is configured to receive the first reflected laser light.
The second photodetector 4 is for receiving the second reflected laser light.
The first laser 1, the second laser 2, the first photoelectric detector 3 and the second photoelectric detector 4 are fixed in position; the first laser is perpendicular to the second laser.
For example, referring to fig. 12, the first laser 1 emits the first laser parallel to the plane where the X axis and the Z axis are located, the first laser is reflected by the single crystal mirror to form the first reflected laser, and the first reflected laser falls on the first photodetector 3. The second laser 2 emits second laser parallel to the plane of the W axis and the Z axis, the second laser is reflected by the single crystal lens to form second reflected laser, and the second reflected laser falls on the second photodetector 4. The positions of the first laser 1, the second laser 2, the first photoelectric detector 3 and the second photoelectric detector 4 are fixed, and the first laser and the second laser are perpendicular to each other.
In one example, the photodetector may be a Pilatus100K two-dimensional array detector from Dectris, switzerland, but is not limited to this model, or a GP-660 camera from suzhou high-quality digital, and likewise, is not limited to this model; the laser may employ a mini laser sight.
In summary, the double-beam four-quadrant alignment method and system based on the single crystal lens provided by the embodiments of the present invention avoid the situation that the single crystal lens is driven by the sample stage of the diffractometer to repeatedly move along each axial direction, reduce the operation difficulty of aligning the single crystal lens, and increase the speed of aligning the single crystal lens.
In the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principle and implementation of the embodiments of the present invention are explained herein by applying specific examples, and the above descriptions of the embodiments are only used to help understanding the method and the core idea of the embodiments of the present invention; meanwhile, for a person skilled in the art, according to the idea of the embodiment of the present invention, the specific implementation and the application range may be changed. In view of the above, the description should not be taken as limiting the embodiments of the invention.
Claims (10)
1. A single crystal lens based dual-beam four-quadrant alignment method, based on a dual-beam four-quadrant alignment system, comprising: the system comprises two lasers and photoelectric detectors corresponding to the lasers one by one; in operation, the laser light emitted by the two lasers is perpendicular to each other, and the laser device comprises:
placing a single crystal lens to be tested;
irradiating two beams of laser light perpendicular to each other at the same position of the single crystal lens to form two beams of reflected laser light; the two beams of reflected laser respectively fall on corresponding photoelectric detectors to form reflected laser points; wherein, any one of the photoelectric detectors corresponds to a Cartesian coordinate system which takes the central point of the corresponding photoelectric detector as an origin and has four quadrants;
when any one of the reflected laser points falls at a position outside the target origin, adjusting the single crystal lens in a three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin until each reflected laser point falls at the corresponding target origin; wherein the target origin is: the center of the photoelectric detector corresponding to the reflected laser spot; the three-dimensional coordinate system takes the center of the single crystal lens as an origin and comprises an X axis, a W axis and a Z axis; the adjusting operation comprises: at least one of translating along the Z axis, rotating about the W axis, and rotating about the X axis.
2. The single crystal lens based two-beam four-quadrant alignment method of claim 1,
the reflected laser points comprise a first reflected laser point and a second reflected laser point; the two lasers include a first laser and a second laser; the laser emitted by the first laser is parallel to the plane where the X axis and the Z axis are located, and the first reflected laser point is formed after the laser is reflected by the single crystal lens; a Cartesian coordinate system where the first reflection laser point is located is a first Cartesian coordinate system;
the laser emitted by the second laser is parallel to the plane where the W axis and the Z axis are located, and the second reflected laser point is formed after the laser is reflected by the single crystal lens; and the Cartesian coordinate system where the second reflected laser point is located is a second Cartesian coordinate system.
3. A single crystal lens based dual beam four quadrant alignment method as claimed in claim 2 wherein any cartesian coordinate system comprises: an x-axis and a y-axis;
the positional relationship includes: at least one of a first offset relationship, a second offset relationship, a third offset relationship, and a fourth offset relationship;
wherein the first offset relationship comprises: the first reflected laser point has an offset in the x-axis direction relative to its target origin;
the second offset relationship comprises: the second reflected laser point has an offset in the x-axis direction relative to its target origin;
the third offset relationship comprises: the first reflected laser point is offset in the y-axis direction relative to its target origin;
the fourth offset relationship comprises: the second reflected laser spot is offset in the y-axis direction from its target origin.
4. The single crystal lens based two-beam four-quadrant alignment method of claim 3,
the positional relationship includes both a first offset relationship and a fourth offset relationship;
based on the positional relationship, a first positional combination between the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser point is located at a first target position in the first Cartesian coordinate system; the first target position is: any position on the y-axis of the first cartesian coordinate system other than the target origin, and,
the second reflected laser point is located at a second target position in the second cartesian coordinate system; the second target position is: any position on the y-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps:
and if the first position combination is met, translating the single crystal lens along the Z axis until the first reflected laser point and the second reflected laser point are both positioned at respective target origin points.
5. The single crystal lens based dual beam four quadrant alignment method of claim 3,
the positional relationship includes both a first offset relationship and a third offset relationship;
based on the positional relationship, a second combination of positions between the first reflected laser spot and the second reflected laser spot respectively includes:
the first reflected laser point is located at a first target position in the first cartesian coordinate system; the first target position is: any position on the y-axis of the first cartesian coordinate system other than the target origin, and,
the second reflected laser point is located at a third target position in the second cartesian coordinate system; the third target position is as follows: any position on the x-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflection laser point and the corresponding target origin point comprises the following steps:
and if the second position combination is met, rotating the single crystal lens around a W axis until the first reflected laser point and the second reflected laser point are both positioned at respective target origin points.
6. The single crystal lens based two-beam four-quadrant alignment method of claim 3,
the positional relationship includes both a second offset relationship and a third offset relationship;
based on the positional relationship, a third positional combination of the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser point is located at a fourth target position in the first cartesian coordinate system; the fourth target position is: any position on the x-axis of the first cartesian coordinate system other than the target origin, and,
the second reflected laser point is located at a second target position in the second cartesian coordinate system; the second target position is: any position on the y-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps: rotating around the X axis;
and if the third position combination is met, rotating the single crystal lens around the X axis until the first reflected laser point and the second reflected laser point are both located at the respective target origin.
7. The single crystal lens based dual beam four quadrant alignment method of claim 3,
the positional relationship includes first to fourth offset relationships at the same time;
based on the positional relationship, the fourth positional combinations of the first reflected laser spot and the second reflected laser spot respectively include:
the first reflected laser spot is located in a second quadrant of the first cartesian coordinate system, and the second reflected laser spot is located in a second quadrant of the second cartesian coordinate system;
or,
the first reflected laser spot is located in a fourth quadrant of the first cartesian coordinate system, and the second reflected laser spot is located in a fourth quadrant of the second cartesian coordinate system;
or,
the first reflected laser spot is located in a first quadrant of a first cartesian coordinate system, and the second reflected laser spot is located in a third quadrant of a second cartesian coordinate system;
or,
the first reflected laser spot is located in a third quadrant of a first cartesian coordinate system, and the second reflected laser spot is located in a fourth quadrant of a second cartesian coordinate system;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps:
and if the fourth position combination is met, rotating the single crystal lens around the W axis and the X axis until the first reflected laser point and the second reflected laser point are located at the respective target origin.
8. The single crystal lens based dual beam four quadrant alignment method of claim 3,
the positional relationship includes first to fourth offset relationships at the same time;
based on the positional relationship, a fifth positional combination of the first reflected laser spot and the second reflected laser spot includes:
the first reflected laser spot is located at a first target position in a first cartesian coordinate system, and the second reflected laser spot is located in any quadrant of a second cartesian coordinate system; the first target position is: any position on the y-axis of the first Cartesian coordinate system except the target origin;
or,
the first reflected laser spot is located in any quadrant of a first cartesian coordinate system, and the second reflected laser spot is located in a second target position of a second cartesian coordinate system; the second target mark position is as follows: any position on the y-axis of the second Cartesian coordinate system except the target origin;
the adjusting operation of the single crystal lens in the three-dimensional coordinate system according to the position relation between each reflected laser point and the corresponding target origin comprises the following steps:
if the fifth position combination is met, the single crystal lens is enabled to translate along the Z axis, rotate around the W axis and rotate around the X axis until the first reflected laser point and the second reflected laser point are located at respective target origin points.
9. A single crystal lens-based dual beam four quadrant alignment method as claimed in claim 3 wherein the performing an adjustment operation on the single crystal lens in a three dimensional coordinate system according to the positional relationship between each reflected laser point and the corresponding target origin comprises:
judging whether the first offset relation exists or not;
if so, rotating the single crystal lens around the X axis until the first offset relation is eliminated, and returning the first reflected laser point to the X axis;
if the first offset relation does not exist or is eliminated, judging whether a second offset relation exists or not;
if the second deviation relation exists, the single crystal lens rotates around the W-axis direction until the second deviation relation is eliminated, and the second reflected laser point returns to the x-axis;
if the second offset relation does not exist or is eliminated, judging whether a third offset relation or a fourth offset relation exists;
if the single crystal lens exists, the single crystal lens is translated along the Z axis until the first reflected laser point and the second reflected laser point are located at respective target origin points;
when the first reflected laser spot and the second reflected laser spot are both located at respective target origins, the alignment is completed.
10. A single crystal lens based dual beam four quadrant alignment system, comprising:
the first laser is used for emitting first laser to the center of the single crystal lens; the first laser forms first reflection laser after being reflected by the single crystal lens;
the second laser is used for emitting second laser to the center of the single crystal lens; the second laser forms second reflected laser after being reflected by the single crystal lens;
a first photodetector for receiving the first reflected laser light;
a second photodetector for receiving the second reflected laser light.
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| CN202210870158.9A CN115235736A (en) | 2022-07-22 | 2022-07-22 | Double-beam four-quadrant alignment method and system based on single crystal lens |
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| CN202210870158.9A CN115235736A (en) | 2022-07-22 | 2022-07-22 | Double-beam four-quadrant alignment method and system based on single crystal lens |
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Application publication date: 20221025 |