CN115220905A - Direct-write lithography data processing system and method - Google Patents
Direct-write lithography data processing system and method Download PDFInfo
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- CN115220905A CN115220905A CN202110417075.XA CN202110417075A CN115220905A CN 115220905 A CN115220905 A CN 115220905A CN 202110417075 A CN202110417075 A CN 202110417075A CN 115220905 A CN115220905 A CN 115220905A
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- G06—COMPUTING; CALCULATING OR COUNTING
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- G06F9/00—Arrangements for program control, e.g. control units
- G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
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- G06F9/50—Allocation of resources, e.g. of the central processing unit [CPU]
- G06F9/5005—Allocation of resources, e.g. of the central processing unit [CPU] to service a request
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F9/00—Arrangements for program control, e.g. control units
- G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
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Abstract
The application relates to a system and a method for processing direct-write photoetching data, which belong to the technical field of direct-write photoetching data processing, and the method comprises the following steps: the main control unit acquires a graphic file; carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring the working states of a plurality of processing units which are in communication connection with the main control unit; distributing a plurality of data to be processed to the processing unit according to the working state; when the processing unit acquires the data to be processed, processing the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithographic apparatus; the writing device reads the processed data in the processing unit and writes the processed data into the photoetching device so that the photoetching device performs photoetching processing according to the processed data; the problems of low data processing efficiency and poor reliability of the conventional data processing mode can be solved; the processing unit can process the same graphic file at the same time, and the data processing efficiency and reliability are improved.
Description
Technical Field
The application relates to a system and a method for processing direct-write photoetching data, belonging to the technical field of processing of direct-write photoetching data.
Background
Direct write lithography (Pattern Generator) is a technology for realizing the preparation of computer design data on a specific substrate to form a graphic layout of a high-precision micro-nano structure. Direct-write lithography can directly make a pattern on a substrate coated with a photoresist without a mask, has the advantages of higher flexibility, low cost and the like compared with exposure lithography through the mask, and is rapidly developed in recent years, so that the direct-write lithography is widely applied to the fields of MEMS (Micro-Electro-Mechanical System) device manufacturing, two-dimensional material manufacturing, mask plate manufacturing, PCB (Printed Circuit Board) plate making and the like.
Common writing methods of direct-write lithography include a spatial light modulator (DMD) (digital-micro-mirror-device) field-by-field splicing exposure method, an Acousto-optic deflector (AOD) (Acousto-optic Deflectors) and modulator (AOM) (Acousto-optic Modulators) high-speed scanning method, a laser beam direct focusing single-spot scanning filling method, and the like. Common data file formats are GDSII, gerber, DXF, BMP, etc., and any method involves a large amount of data processing and conversion from a data file format to a device write format.
With the recent shift of optoelectronic device structure from traditional 2D surface to 3D, 3D grayscale lithography is also a hot spot of current direct-write lithography, and 3D grayscale lithography data is multiplied compared to 2D surface direct-write lithography. The writing breadth of direct-write lithography according to the published reports at home and abroad also develops towards a larger breadth. With the continuous extension and expansion of the application scene of the direct-write lithography, the data volume generated by the direct-write lithography will continuously rise, and further higher requirements on the processing capacity and the processing efficiency of the data of the direct-write lithography system will be provided.
At present, two methods are generally adopted in the field of direct-write lithography to realize data processing and writing. One is to process the data in advance, and after the complete task data is obtained, the data is read and written into the device by the computer in sequence. The other is that one special data processing computer processes data in real time and the other computer controls data writing. For large format (meter level), high resolution (100 nm), massive data (hundreds of TB) generated under gray scale and high writing efficiency, the two methods have disadvantages.
The first method requires preprocessing of data, which takes a long time to reduce the yield efficiency of the device and needs to solve the mass data storage problem, and the stability requirement of repeated reading and writing on the storage device.
In the second method, in the application scenario of high resolution and high writing speed, the single computer data processing cannot meet the real-time requirement of direct-write lithography data processing, so that the data processing becomes the writing bottleneck of the system, and the reliability of the system processing data by virtue of the single computer is low.
Disclosure of Invention
The application provides a direct-write photoetching data processing system and a direct-write photoetching data processing method, which can solve the problems of low data processing efficiency and poor reliability of the existing data processing mode. The application provides the following technical scheme:
in a first aspect, a write-through lithography data processing system is provided, comprising:
the main control unit is used for acquiring a graphic file to be processed; carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring the working states of a plurality of processing units which are in communication connection with the main control unit; distributing the plurality of data to be processed to the processing unit according to the working state;
the processing unit is used for processing the data to be processed when the data to be processed is obtained, so as to obtain processed data; the processed data is data that can be directly used by the lithography device;
and the writing device is used for reading the processed data in the processing unit and writing the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data.
Optionally, the performing data segmentation according to the graphic file to obtain a plurality of data to be processed includes:
acquiring a user parameter, wherein the user parameter is used for indicating a segmentation mode of the graphic data;
and dividing the graphic data in the graphic file according to the user parameters to obtain the plurality of data to be processed.
Optionally, the user parameter includes at least one of the following: the dividing direction and the dividing pitch.
Optionally, the main control unit is further configured to send a query instruction to the plurality of processing units before the plurality of to-be-processed data are allocated to the processing units according to the working states, where the query instruction is used to query the working states of the plurality of processing units;
the processing unit is further used for feeding back the current working state to the main control unit when receiving the query instruction;
the main control unit is further configured to obtain the working state fed back by the processing unit.
Optionally, the allocating the plurality of data to be processed to the processing unit according to the working state includes:
for each group of data to be processed to be distributed, determining a target processing unit with an idle working state from the plurality of processing units; each group of data to be processed comprises at least one data to be processed;
when the processing resources of the target processing unit meet the data volume of the current group of data to be processed, distributing the current group of data to be processed to the target processing unit.
Optionally, the operating state of the processing unit is initialized to idle, and the processing unit is further configured to:
when the data to be processed is acquired, setting the working state to be busy;
and after the data to be processed is processed, setting the working state to be idle, and sending a processing completion notification to the main control unit so that the main control unit records the processing state of the data to be processed.
Optionally, the writing device is respectively in communication connection with the main control unit and the processing unit;
the main control unit is further configured to send a write instruction to the write device when receiving a processing completion notification sent by the processing unit, where the write instruction carries a unit identifier of the processing unit;
the writing device is used for receiving the writing instruction; and reading the processed data from the corresponding processing unit based on the unit identification in the writing instruction, and writing the processed data into the photoetching device.
Optionally, the writing device is further configured to send a read completion notification to the processing unit corresponding to the unit identifier after the processed data is read from the corresponding processing unit based on the unit identifier;
and the processing unit corresponding to the unit identifier is also used for deleting the stored processed data when the reading completion notification is received.
Optionally, the system further comprises a standby processing unit,
the processing unit is further configured to feed back a working state to the main control unit when the working state is abnormal, where the working state is used to indicate that the working is abnormal;
the main control unit is further configured to determine whether to control the standby processing unit to start up when the working state fed back by the processing unit indicates that the working is abnormal; and when the standby processing unit is determined to be controlled to be started, starting the processing unit with the abnormal standby processing unit to work.
Optionally, the determining whether to control the standby processing unit to start includes:
determining whether the remaining processing units meet a real-time requirement for data processing;
when the remaining processing units do not meet the real-time requirement of data processing, determining to control the standby processing unit to start;
and when the remaining processing units meet the real-time requirement of data processing, determining not to control the standby processing unit to start.
Optionally, the system establishes a communication connection over a high speed communication bus.
In a second aspect, a direct-write lithography data processing method is provided, where the method is used in a master control unit in the direct-write lithography data processing system provided in the first aspect, and the method includes:
acquiring a graphic file to be processed;
carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed;
acquiring the working states of a plurality of processing units which are in communication connection with the main control unit;
and distributing the plurality of data to be processed to the processing unit according to the working state.
In a third aspect, a method for processing direct-write lithography data is provided, where the method is used in a processing unit in the system for processing direct-write lithography data provided in the first aspect, and the method includes:
acquiring data to be processed;
processing the data to be processed to obtain processed data; the processed data is data that can be used directly by the lithographic apparatus.
In a fourth aspect, a direct-write lithography data processing method is provided, where the method is used in a writing apparatus in the direct-write lithography data processing system provided in the first aspect, and the method includes:
reading the processed data in the processing unit;
and writing the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data.
The beneficial effects of this application include at least: acquiring a graphic file to be processed through a main control unit; performing data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring working states of a plurality of processing units in communication connection with a main control unit; distributing a plurality of data to be processed to the processing unit according to the working state; when the processing unit acquires the data to be processed, processing the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithographic apparatus; the writing device reads the processed data in the processing unit and writes the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data; the problems of low data processing efficiency and poor reliability of the conventional data processing mode can be solved; the processing unit can process the same graphic file at the same time, and the data processing efficiency and reliability are improved.
In addition, by performing data division according to the user parameter, flexibility of data division can be improved.
In addition, the target processing unit which is idle and has processing resources meeting the data volume of the current group of data to be processed is used for data processing, so that the current group of data to be processed can be guaranteed to be processed at one time, and the data processing efficiency and reliability are improved.
In addition, whether the standby processing unit is called or not is determined when the processing unit is abnormal; the real-time performance of data processing can be ensured under the condition that equipment faults occur.
The foregoing description is only an overview of the technical solutions of the present application, and in order to make the technical solutions of the present application more clear and clear, and to implement the technical solutions according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present application and the accompanying drawings.
Drawings
FIG. 1 is a block diagram of a direct write lithography data processing system according to an embodiment of the present application;
FIG. 2 is a schematic diagram of data partitioning provided by an embodiment of the present application;
FIG. 3 is a schematic diagram of a data processing process provided by one embodiment of the present application;
FIG. 4 is a flowchart of a method for processing write-through lithography data by a master control unit according to an embodiment of the present application;
FIG. 5 is a flowchart of a method for processing data by a processing unit according to an embodiment of the present application;
FIG. 6 is a schematic diagram of an exception to a data unit according to an embodiment of the present application;
FIG. 7 is a flowchart of a method for processing direct-write lithography data by a master control unit according to another embodiment of the present application;
FIG. 8 is a flow chart of a method for processing write-through lithography data by a processing unit according to another embodiment of the present application;
FIG. 9 is a flowchart of a method for performing a write-through lithography data processing by a writing apparatus according to an embodiment of the present application;
FIG. 10 is a block diagram of a direct write lithography data processing apparatus according to an embodiment of the present application.
Detailed Description
The following detailed description of embodiments of the present application will be described in conjunction with the accompanying drawings and examples. The following examples are intended to illustrate the present application, but are not intended to limit the scope of the present application.
FIG. 1 is a block diagram of a direct write lithography data processing system according to an embodiment of the present application. As shown in fig. 1, the system includes a master control unit 110, a plurality of processing units 120, and a writing device 130.
The main control unit 110 may be a PC computer, a desktop computer, or a board card with a task management scheduling function, and the implementation manner of the main control unit 110 is not limited in this embodiment. The main control unit 110 implements overall control of the write-once lithography data processing system, such as job scheduling, status detection, fault response processing, and the like of the processing unit 120.
In this embodiment, the main control unit 110 is configured to obtain a graphics file to be processed; performing data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring the working states of a plurality of processing units 120 which are in communication connection with the main control unit; and distributing a plurality of data to be processed to the processing unit according to the working state.
Optionally, the graphic file may be input by the user, and in this case, the main control unit 110 has a human-computer interaction interface for the user to input the graphic file. Alternatively, the graphics file may be sent by other devices. Alternatively, the graphic file may also be pre-stored in the storage medium of the main control unit 110, and the embodiment does not limit the manner in which the main control unit 110 obtains the graphic file.
In an example, the main control unit 110 performs data segmentation according to the graphic file to obtain a plurality of data to be processed, including: acquiring user parameters; the graphic data in the graphic file is divided according to the user parameters to obtain a plurality of data to be processed N1 \8230n.
Alternatively, the data to be processed may also be referred to as write field unit sequence information, write field data, and the like, and the name of the data to be processed is not limited in this embodiment.
Wherein the user parameter is used to indicate a way of segmenting the graphical data. The user parameters may be flexibly set according to the segmentation requirements, i.e. the user parameters may not be fixed. Optionally, the user parameter may be input by a user or sent by other devices, and the embodiment does not limit the manner of obtaining the user parameter.
Optionally, the user parameter includes at least one of the following: the dividing direction and the dividing pitch. The splitting direction is at least one, such as: transverse segmentation and/or longitudinal segmentation; the division spacing between different data to be processed is the same or different.
The following description will take the division direction as horizontal division and the same division pitch between different data to be processed as an example. The direct-write lithography data processing system is assumed to be a maskless laser direct-write lithography system, the system adopts DMD (1920 x 1080) as a pattern generator to write pattern data, the resolution of system data is 100nm, and the format of a user input file is 100mmx100mm. The DMD direct-write lithography system writes graphs field by field in a scanning mode, before writing, user input graphs need to be rasterized and converted into data files of corresponding pixels, and the pixel width of a single writing field cannot exceed the pixel width of a DMD by 1920 pixels. Based on the above segmentation requirements, referring to fig. 2, the user parameters include that the segmentation direction is horizontal segmentation, i.e. segmentation from left to right, and the segmentation pitches are all 1920 pixels. That is, the input file is divided at equal intervals in the step direction in fig. 2 by a distance of 192um, resulting in a total of 521 (100 mm/192 um) write field stripes.
In other embodiments, the main control unit 110 may divide the data in a fixed manner, in which case, different writing devices 130 correspond to different division manners, or the division manners are fixed, and the data division manners are not limited in this embodiment.
Optionally, the acquiring, by the main control unit 110, the working states of the plurality of processing units 120 includes: the main control unit 110 sends an inquiry instruction to the plurality of processing units, wherein the inquiry instruction is used for inquiring the working states of the plurality of processing units; when receiving the query instruction, the processing unit 120 feeds back the current working state to the main control unit; the main control unit 110 is further configured to obtain a working state fed back by the processing unit.
The query instruction may be sent by the main control unit 110 at regular intervals, or sent before sending the data to be processed each time; in addition, the query instruction may be sent to multiple processing units 120 at the same time, or sent to the processing units 120 one by one, and when the current processing unit 120 is in a busy state, the query instruction is sent to the next processing unit 120; when the previous processing unit 120 is in the idle state, the query instruction is stopped from being sent, and the sending time of the query instruction is not limited in this embodiment.
Alternatively, the acquiring, by the main control unit 110, the working states of the plurality of processing units 120 includes: the main control unit 110 receives the working state fed back by the processing unit 120. At this time, the processing unit 120 may feed back the operating state at regular time or at the time of updating the operating state, and the timing of feeding back the operating state by the processing unit 120 is not limited in this embodiment.
In other embodiments, the main control unit 110 may further determine the working state of the corresponding processing unit 120 according to the processing state of the data to be processed, and the working state of each processing unit 120 is initialized to be idle. At this time, after the data to be processed is sent to a certain processing unit 120, the working state of the processing unit 120 is recorded as busy, and the main control unit 110 records the data to be processed, the unit identifier of the processing unit 120 and the corresponding relationship between the working states; after the processing unit 120 completes processing the data, the main control unit 110 updates the working state of the processing unit 120 in the corresponding relationship to idle according to the processing completion notification fed back by the processing unit 120. Based on this, when the data to be processed is in the processing state, the working state of the corresponding processing unit 120 is busy, and when the data to be processed is in the processed state, the working state of the corresponding processing unit 120 is idle, and the main control unit 110 may determine the working state of the corresponding processing unit 120 according to the processing state of the data to be processed. Of course, the main control unit 110 may also obtain the working state of the processing unit 120 based on other manners, and the manner in which the main control unit 110 obtains the working state of the processing unit 120 is not limited in this embodiment.
Optionally, the main control unit 110 allocates a plurality of data to be processed to the processing unit according to the working state, including: for each group of data to be processed to be distributed, determining a target processing unit with an idle working state from a plurality of processing units; and when the processing resources of the target processing unit meet the data volume of the current group of data to be processed, distributing the current group of data to be processed to the target processing unit.
Wherein each group of data to be processed comprises at least one data to be processed.
Alternatively, the main control unit 110 may divide the data to be processed into N groups, each group corresponding to one processing unit 120, where the data of each group may be continuous, or random, or selected according to a certain rule, for example, according to a p + Nq rule, where p sequentially takes positive integers from 1 to N, and q sequentially takes positive integers from 0. Assuming that there are 3 processing units 120, N is 3, which is divided into three groups, the first group being 1, 4, 7, 10, \ 8230; the second group is 2, 5, 8, 11, \8230, the third group is 3, 6, 9, 12, \8230. The present embodiment does not limit the way in which the main control unit 110 divides the data group to be processed. Wherein the value of N is less than or equal to the number of processing units 120. Optionally, the number of the data to be processed in different sets of data to be processed is the same or different.
In other embodiments, the master control unit 110 may not divide the to-be-processed data into groups, but send the to-be-processed data one by one.
Optionally, when the processing unit whose working state is the idle state is not determined, the main control unit 110 may obtain the working state of each processing unit again after a period of time, until the target processing unit whose working state is the idle state is determined, and allocate the to-be-processed data.
Wherein, the processing resource satisfying the data volume of the current set of data to be processed includes that the storage capacity of the target processing unit is greater than or equal to the data volume of the current set of data to be processed.
Such as: after the data division is performed in the manner shown in fig. 2, it is assumed that the number of pieces of data to be processed by each processing unit 120 in a single time is the same, and is 5 pieces (which may be different in actual implementation). The single generation data capacity was calculated as (100 mm/100 nm) × (192 um/100 nm)/8 × 5= 1171875kbytes.
The main control unit 110 queries the operating status of each processing unit 120, and confirms that each processing unit 120 is in an idle state and the remaining storage capacity is greater than or equal to 1171875 kbytes. Thereafter, referring to fig. 3, the first set of data to be processed (i.e., write field stripe 1, write field stripe 4, write field stripe 7, write field stripe 10, write field stripe 13) is sent to the processing unit 1, and a start processing instruction is sent. The second set of data to be processed (i.e. write field stripe 2, write field stripe 5, write field stripe 8, write field stripe 11, write field stripe 14) is sent to the processing unit 2 and a start-up processing instruction is sent. The third set of data to be processed (i.e. write field stripe 3, write field stripe 6, write field stripe 9, write field stripe 12, write field stripe 15) is sent to the processing unit 3 and a start-up processing instruction is sent.
The processing unit 120 may be a PC computer, a desktop computer, or a device with data processing and storage capabilities, such as an FGPA board, and the implementation of the processing unit 120 is not limited in this embodiment. The processing unit 120 is responsible for receiving the instruction of the main control unit 110, completing the generation, storage and collection of the direct-write lithography data, and has a function of feeding back the working state of itself.
In this embodiment, the processing unit 120 is configured to, when the data to be processed is obtained, process the data to be processed to obtain processed data; the processed data is data that the lithographic apparatus can use directly.
Specifically, the processing unit 120 is further configured to set the working state to be busy when the data to be processed is acquired; performing rasterization processing on data to be processed to obtain processed data; and after the data to be processed is processed, setting the working state to be idle, and sending a processing completion notification to the main control unit so that the main control unit can record the processing state of the data to be processed.
Such as: based on the example described in fig. 2, after receiving the information and the instruction, the processing unit sets the working state of itself to be busy, analyzes the stripe information, and enters the rasterization processing process. The main control unit waits for the data processing unit to process the completion notification information. The processing unit completes data processing and informs the main control unit to set the working state of the processing unit to be idle. And the main control unit receives the processing completion notification and records that the processing state of the data to be processed is a completion state.
The writing device 130 is responsible for reading data generated by each processing unit 120 and writing the data to the lithographic apparatus.
In one example, the writing device 130 is communicatively coupled to the master control unit 110 and the processing unit 120, respectively. The main control unit 110 is further configured to send a write instruction to the write device 130 when receiving the processing completion notification sent by the processing unit 120, where the write instruction carries the unit identifier of the processing unit.
The unit identifier may be a reference number of the processing unit or a device number, and the implementation of the unit identifier is not limited in this embodiment.
Accordingly, the writing device 130 is configured to receive a writing instruction; the processed data is read from the corresponding processing unit 120 based on the unit identifier in the write command and written to the lithographic apparatus. Such as: referring to fig. 3, the writing device 130 reads the processed data from each processing unit 120, resulting in processed data (i.e., write field data 1, 2, 3, 4, 5 \8230;).
The writing means 130 is further configured to send a read completion notification to the processing unit corresponding to the unit identifier after the processed data is read from the corresponding processing unit based on the unit identifier.
Accordingly, the unit id corresponds to the processing unit 120, and is further configured to delete the stored processed data when receiving the read completion notification.
Such as: the main control unit inquires that the data of the write field stripe 1 in fig. 2 is processed, and informs the writing device to read the data from the corresponding processing unit. After the writing device reads the data of the processing unit, the processing unit is informed to delete the data. The writing means writes data to the direct writing means. The main control unit repeatedly inquires whether each to-be-processed process is finished, and writes the write field data stripes (i.e. processed data) in sequence until all the stripes are written.
In other embodiments, the writing device 130 may also read the processed data from each processing unit at regular time; alternatively, after the processing unit 120 finishes processing the data, the writing device 130 is notified to read the processed data, and the embodiment does not limit the way in which the writing device 130 reads the processed data.
In order to more clearly understand the data processing procedure of the main control unit 110 in the present application, the data processing procedure of the main control unit 110 is illustrated below. Referring to fig. 4, the data processing procedure of the master control unit includes at least steps 41-410:
optionally, the waiting time duration is preset in the main control unit 110.
In order to more clearly understand the data processing procedure of the processing unit 120 in the present application, the data processing procedure of the processing unit 120 is illustrated below. Referring to fig. 5, the data processing procedure of the master control unit includes at least steps 51-55:
step 51, receiving data to be processed, and setting the working state as busy;
step 53, after the data processing is completed, sending a processing completion notification to the main control unit;
step 54, deleting the stored processed data when receiving the read completion notification sent by the writing device;
and step 55, setting the working state to be idle, and ending the process.
In the present application, the main control unit 110 further has a dynamic allocation function, which can dynamically allocate the number of processing units according to the data consumption of the processing unit 120. Optionally, the data processing system further includes a standby processing unit 140, the processing unit 120, and is further configured to feed back the working state to the main control unit 110 when the working state is abnormal, where the working state is used to indicate that the working is abnormal; the main control unit 110 is further configured to determine whether to control the standby processing unit to start up when the working state fed back by the processing unit indicates that the working is abnormal; and when the control standby processing unit is determined to be started, starting the standby processing unit to replace the processing unit with abnormal working state.
Wherein determining whether to control the standby processing unit to start comprises: determining whether the remaining processing units meet a real-time requirement for data processing; when the remaining processing units do not meet the real-time requirement of data processing, determining to control the standby processing unit to start; and when the remaining processing units meet the real-time requirement of data processing, determining not to control the standby processing unit to start.
In one example, the real-time requirement is used to indicate that the consumption rate of the data to be processed is greater than or equal to a rate threshold. In other words, the data to be processed in the master unit is processed at least at the speed of the speed threshold. The speed threshold may be set by a user or set by default in the main control unit 110, and the setting manner of the speed threshold is not limited in this embodiment.
Referring to fig. 6, assuming that an abnormal situation occurs during the operation of the processing unit 2, the main control unit 110 can determine whether to add the standby processing unit 4 according to the data processing load situation. If the remaining processing units 1 and 3 can meet the real-time requirement, the processing unit 4 is not allocated. If the consumption of the generated data buffer is found not to be equal to the consumption speed of the data writing device, the standby processing unit 4 is automatically called to take over the work of the processing unit 2.
In fig. 1, it is illustrated that 1 writing device (or writing optical head) is included, 1 main control unit PC computer, 3 processing units PC computers and one standby processing unit are deployed as an example, in actual implementation, the number of the writing device, the main control unit, the processing unit and the standby processing unit may be other numbers, and the number of each device is not limited in this embodiment.
Alternatively, the data processing system may establish a communication connection over a high-speed communication bus, such as an ethernet or fiber optic network. For another example: all units in the data processing system are connected by adopting a high-speed gigabit network to form a local area network.
In summary, the direct-write lithography data processing system provided in this embodiment obtains the graphic file to be processed through the main control unit; carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring working states of a plurality of processing units in communication connection with a main control unit; distributing a plurality of data to be processed to the processing unit according to the working state; when the processing unit acquires the data to be processed, processing the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithographic apparatus; the writing device reads the processed data in the processing unit and writes the processed data into the photoetching device so that the photoetching device performs photoetching processing according to the processed data; the problems of low data processing efficiency and poor reliability of the conventional data processing mode can be solved; the processing unit can process the same graphic file at the same time, and the data processing efficiency and reliability are improved.
In addition, by performing data division according to the user parameter, flexibility of data division can be improved.
In addition, the target processing unit which is idle and has processing resources meeting the data volume of the current group of data to be processed is used for data processing, so that the current group of data to be processed can be guaranteed to be processed at one time, and the data processing efficiency and reliability are improved.
In addition, whether the standby processing unit is called or not is determined when the processing unit is abnormal; the real-time performance of data processing can be ensured under the condition that equipment faults occur.
The following describes a method for processing write-through lithography data provided by the present application.
FIG. 7 is a flowchart of a method for processing data for direct-write lithography according to an embodiment of the present application. The embodiment is described by taking the method as an example for being used in the main control unit 110 in the direct-write lithography data processing system shown in fig. 1, and the method at least comprises the following steps:
And step 702, performing data segmentation according to the graph file to obtain a plurality of data to be processed.
The related description of this embodiment is detailed in the above system embodiment, and this embodiment is not described herein again.
In summary, in the method for processing direct-write lithography data provided by this embodiment, the graphic file to be processed is obtained through the main control unit; carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring the working states of a plurality of processing units which are in communication connection with the main control unit; distributing a plurality of data to be processed to the processing unit according to the working state; when the processing unit acquires the data to be processed, processing the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithographic apparatus; the writing device reads the processed data in the processing unit and writes the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data; the problems of low data processing efficiency and poor reliability of the conventional data processing mode can be solved; the method and the device can realize that a plurality of processing units simultaneously process the same graphic file, and improve the data processing efficiency and reliability.
FIG. 8 is a flow chart of a method for processing write-through lithography data according to an embodiment of the present application. The embodiment is described by taking as an example that the method is used in the processing unit 120 in the direct-write lithography data processing system shown in fig. 1, and the method at least comprises the following steps:
For related description of this embodiment, reference is made to the above system embodiment, and this embodiment is not described herein again.
In summary, in the method for processing direct-write lithography data provided by this embodiment, the graphic file to be processed is obtained through the main control unit; carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring working states of a plurality of processing units in communication connection with a main control unit; distributing a plurality of data to be processed to the processing unit according to the working state; when the processing unit acquires the data to be processed, processing the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithographic apparatus; the writing device reads the processed data in the processing unit and writes the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data; the problems of low data processing efficiency and poor reliability of the conventional data processing mode can be solved; the processing unit can process the same graphic file at the same time, and the data processing efficiency and reliability are improved.
FIG. 9 is a flowchart of a method for processing data for direct-write lithography according to an embodiment of the present application. The embodiment is described by taking the method as an example for being used in the writing device 130 in the direct-write lithography data processing system shown in fig. 1, and the method at least comprises the following steps:
step 901 reads the processed data in the processing unit.
And step 902, writing the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data.
The related description of this embodiment is detailed in the above system embodiment, and this embodiment is not described herein again.
In summary, in the method for processing direct-write lithography data provided by this embodiment, a graphic file to be processed is obtained through a main control unit; performing data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring working states of a plurality of processing units in communication connection with a main control unit; distributing a plurality of data to be processed to the processing unit according to the working state; when the processing unit acquires the data to be processed, processing the data to be processed to obtain processed data; the processed data is data that can be directly used by the lithographic apparatus; the writing device reads the processed data in the processing unit and writes the processed data into the photoetching device so that the photoetching device performs photoetching processing according to the processed data; the problems of low data processing efficiency and poor reliability of the conventional data processing mode can be solved; the processing unit can process the same graphic file at the same time, and the data processing efficiency and reliability are improved.
FIG. 10 is a block diagram of a direct write lithography data processing apparatus according to an embodiment of the present application. The apparatus may be the master control unit 110, or the processing unit 120, or the writing apparatus 130 in the direct-write lithography data processing system shown in fig. 1.
Processor 1001 may include one or more processing cores such as: 4 core processors, 8 core processors, etc. The processor 1001 may be implemented in at least one hardware form of a DSP (Digital Signal Processing), an FPGA (Field-Programmable Gate Array), and a PLA (Programmable Logic Array). The processor 1001 may also include a main processor and a coprocessor, where the main processor is a processor for Processing data in an awake state, and is also referred to as a Central Processing Unit (CPU); a coprocessor is a low power processor for processing data in a standby state. In some embodiments, the processor 1001 may be integrated with a GPU (Graphics Processing Unit), which is responsible for rendering and drawing the content required to be displayed on the display screen. In some embodiments, the processor 1001 may further include an AI (Artificial Intelligence) processor for processing a calculation operation related to machine learning.
Memory 1002 may include one or more computer-readable storage media, which may be non-transitory. Memory 1002 can also include high-speed random access memory, as well as non-volatile memory, such as one or more magnetic disk storage devices, flash memory storage devices. In some embodiments, a non-transitory computer readable storage medium in the memory 1002 is used to store at least one instruction for execution by the processor 1001 to implement the write-through lithography data processing methods provided by the method embodiments herein.
In some embodiments, the direct write lithography data processing apparatus may further include: a peripheral interface and at least one peripheral. The processor 1001, memory 1002 and peripheral interface may be connected by bus or signal lines. Each peripheral may be connected to the peripheral interface via a bus, signal line, or circuit board. Illustratively, peripheral devices include, but are not limited to: radio frequency circuit, touch display screen, audio circuit, power supply, etc.
Of course, the write-through lithography data processing apparatus may also include fewer or more components, which is not limited by the embodiment.
Optionally, the present application further provides a computer-readable storage medium, in which a program is stored, and the program is loaded and executed by a processor to implement the direct-write lithography data processing method of the above method embodiment.
Optionally, the present application further provides a computer product, which includes a computer-readable storage medium, in which a program is stored, and the program is loaded and executed by a processor to implement the direct-write lithography data processing method of the above-mentioned method embodiment.
All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is specific and detailed, but not to be understood as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (14)
1. A direct write lithography data processing system, comprising:
the main control unit is used for acquiring a graphic file to be processed; carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed; acquiring working states of a plurality of processing units in communication connection with the main control unit; distributing the plurality of data to be processed to the processing unit according to the working state;
the processing unit is used for processing the data to be processed when the data to be processed is obtained, so as to obtain processed data; the processed data is data that can be directly used by the lithography device;
and the writing device is used for reading the processed data in the processing unit and writing the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data.
2. The system of claim 1, wherein the performing data segmentation according to the graphics file to obtain a plurality of data to be processed comprises:
acquiring a user parameter, wherein the user parameter is used for indicating a segmentation mode of the graphic data;
and dividing the graphic data in the graphic file according to the user parameters to obtain the plurality of data to be processed.
3. The system of claim 2, wherein the user parameter comprises at least one of: the dividing direction and the dividing pitch.
4. The system of claim 1,
the main control unit is further configured to send a query instruction to the plurality of processing units before the plurality of to-be-processed data are distributed to the processing units according to the working states, where the query instruction is used to query the working states of the plurality of processing units;
the processing unit is further used for feeding back the current working state to the main control unit when receiving the query instruction;
the main control unit is further configured to obtain the working state fed back by the processing unit.
5. The system of claim 1, wherein said assigning said plurality of data to be processed to said processing unit in accordance with said operating state comprises:
for each group of data to be processed to be distributed, determining a target processing unit with an idle working state from the plurality of processing units; each group of data to be processed comprises at least one data to be processed;
when the processing resources of a target processing unit meet the data volume of a current group of data to be processed, distributing the current group of data to be processed to the target processing unit.
6. The system of claim 1, wherein the operating state of the processing unit is initialized to idle, the processing unit further configured to:
when the data to be processed is acquired, setting the working state to be busy;
and after the data to be processed is processed, setting the working state to be idle, and sending a processing completion notification to the main control unit so that the main control unit records the processing state of the data to be processed.
7. The system of claim 1, wherein the writing device is communicatively connected to the main control unit and the processing unit, respectively;
the main control unit is further configured to send a write instruction to the write device when receiving a processing completion notification sent by the processing unit, where the write instruction carries a unit identifier of the processing unit;
the writing device is used for receiving the writing instruction; and reading the processed data from the corresponding processing unit based on the unit identification in the writing instruction, and writing the processed data into the photoetching device.
8. The system of claim 7,
the writing device is further configured to send a read completion notification to the processing unit corresponding to the unit identifier after the processed data is read from the corresponding processing unit based on the unit identifier;
and the processing unit corresponding to the unit identifier is also used for deleting the stored processed data when the reading completion notification is received.
9. The system of claim 1, further comprising a backup processing unit,
the processing unit is further configured to feed back a working state to the main control unit when the working state is abnormal, where the working state is used to indicate that the working is abnormal;
the main control unit is further configured to determine whether to control the standby processing unit to start up when the working state fed back by the processing unit indicates that the working is abnormal; and when the standby processing unit is determined to be controlled to be started, starting the processing unit with the abnormal standby processing unit to work.
10. The system of claim 9, wherein the determining whether to control the standby processing unit to boot comprises:
determining whether the remaining processing units meet a real-time requirement for data processing;
when the remaining processing units do not meet the real-time requirement of data processing, determining to control the standby processing unit to start;
and when the remaining processing units meet the real-time requirement of data processing, determining not to control the standby processing unit to start.
11. A system according to any one of claims 1 to 10, wherein the system establishes the communication link via a high speed communication bus.
12. A write-through lithography data processing method for use in a master control unit in a write-through lithography data processing system according to any one of claims 1 to 11, the method comprising:
acquiring a graphic file to be processed;
carrying out data segmentation according to the graphic file to obtain a plurality of data to be processed;
acquiring the working states of a plurality of processing units which are in communication connection with the main control unit;
and distributing the plurality of data to be processed to the processing unit according to the working state.
13. A method of direct-write lithography data processing, for use in a processing unit of a direct-write lithography data processing system according to any one of claims 1 to 11, the method comprising:
acquiring data to be processed;
processing the data to be processed to obtain processed data; the processed data is data that can be used directly by the lithographic apparatus.
14. A write-through lithography data processing method for use in a write apparatus in a write-through lithography data processing system according to any one of claims 1 to 11, the method comprising:
reading the processed data in the processing unit;
and writing the processed data into the photoetching device so that the photoetching device performs photoetching according to the processed data.
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| CN202110417075.XA CN115220905A (en) | 2021-04-19 | 2021-04-19 | Direct-write lithography data processing system and method |
| PCT/CN2021/137696 WO2022222494A1 (en) | 2021-04-19 | 2021-12-14 | Direct-write lithography data processing system and method |
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| CN104035817A (en) * | 2014-07-08 | 2014-09-10 | 领佰思自动化科技(上海)有限公司 | Distributed parallel computing method and system for physical implementation of large scale integrated circuit |
| US20170083338A1 (en) * | 2015-09-19 | 2017-03-23 | Microsoft Technology Licensing, Llc | Prefetching associated with predicated load instructions |
| CN106507114A (en) * | 2016-11-25 | 2017-03-15 | 天津津芯微电子科技有限公司 | It is based on FPGA method for compressing image, device and Transmission system |
| GB2558885B (en) * | 2017-01-12 | 2021-04-07 | Imagination Tech Ltd | Graphics processing units and methods for subdividing a set of one or more tiles of a rendering space for rendering |
| CN111999984B (en) * | 2019-05-27 | 2021-07-13 | 苏州苏大维格科技集团股份有限公司 | Photoetching method |
| CN111090221B (en) * | 2019-12-05 | 2021-10-26 | 合肥芯碁微电子装备股份有限公司 | PCIe DMA data transmission system and method for direct-write lithography system |
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