CN115220221A - Setting and manufacturing method of asymmetric photonic mirror enhanced radiation heat management device - Google Patents
Setting and manufacturing method of asymmetric photonic mirror enhanced radiation heat management device Download PDFInfo
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- CN115220221A CN115220221A CN202210733509.1A CN202210733509A CN115220221A CN 115220221 A CN115220221 A CN 115220221A CN 202210733509 A CN202210733509 A CN 202210733509A CN 115220221 A CN115220221 A CN 115220221A
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- G—PHYSICS
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Abstract
The invention discloses a method for setting and manufacturing an asymmetric photonic mirror enhanced radiation heat management device, which comprises the following steps: selecting a medium-infrared broadband high-transmittance and high-optical-density base material; designing a micron-sized periodic array three-dimensional photon diffraction structure on a substrate material; preparing the structural surface of the substrate material by using a patterning process of photoetching, dry etching or nano imprinting and according to the designed micron-sized periodic array three-dimensional photon diffraction structure to obtain an asymmetric photon mirror; preparing or attaching an infrared high-transparency visible high-reflection coating on the asymmetric photon mirror; and mounting the asymmetric photonic mirror on an infrared high-radiation material in a spaced manner to manufacture the asymmetric photonic mirror enhanced radiation heat management device. By the design and preparation of the device, the dual-mode heat management optimization of indoor and outdoor radiation refrigeration and heating in all climates and regions is realized.
Description
Technical Field
The invention belongs to the field of intelligent thermal control films, and particularly relates to a setting and manufacturing method of an asymmetric photonic mirror enhanced radiation thermal management device.
Background
The radiation temperature control technology achieves the physical heat dissipation or heat preservation effects of low energy consumption and low pollution by adjusting the radiation rate or reflectivity of a special wave band of an object. The day radiation cooling technology which is concerned at present generally realizes low sunlight absorption and outward space heat dissipation by designing high reflectivity of a solar waveband and high radiance of an atmospheric transparent window so as to achieve the purpose of efficient cooling.
However, in a wider application field, the target object has an ideal temperature range, and the constant radiance cannot intelligently adjust the heat dissipation efficiency, which may cause the phenomenon of over-cooling and over-heating.
In addition, the traditional design is based on the premise that the radiance of the atmospheric window can be ignored, and under different environments and weathers, the atmospheric window can reduce the transmittance and improve the radiance due to water vapor, greenhouse gases, environmental reverse radiation and the like, so that the radiating efficiency of the outer space is influenced.
To date, the radiation cooling material is limited and influenced by environment, weather and application requirements, and cannot be applied and popularized on a large scale, so that the intellectualization and the design aiming at the inverse radiation are one of breakthrough research directions of the radiation thermal control technology.
Disclosure of Invention
The invention provides a setting and manufacturing method of an asymmetric photon mirror enhanced radiation heat management device, which can enhance the performance and the practicability in all climates and regions in radiation heat management.
The invention provides a setting method of an asymmetric photonic mirror enhanced radiation heat management device, which comprises the following steps:
when light is incident to the structure in the forward direction, the infrared band transmittance of the radiation-enhanced thermal management device enhanced by the asymmetric photonic mirror is greater than the reflectivity;
when light is incident reversely, the reflectivity of an infrared band of the asymmetric photon mirror enhanced radiation heat management device is larger than the transmittance, so that unidirectional radiation heat transfer is realized.
According to another aspect of the present invention, there is also provided a method for manufacturing an asymmetric photonic mirror enhanced radiation thermal management device, comprising the steps of:
s1: selecting a medium-infrared broadband high-transmittance and high-optical-density substrate material;
s2: designing a micron-sized periodic array three-dimensional photon diffraction structure on a substrate material;
s3: preparing the structural surface of the substrate material by using a patterning process of photoetching, dry etching or nano imprinting and according to the designed micron-sized periodic array three-dimensional photon diffraction structure to obtain an asymmetric photon mirror;
s4, preparing or attaching an infrared high-transparency visible high-reflection coating on the asymmetric photon mirror;
s5: and mounting the asymmetric photonic mirror on an infrared high-radiation material in a spaced manner to manufacture the asymmetric photonic mirror enhanced radiation heat management device.
In a further method for manufacturing the asymmetric photonic mirror enhanced radiation heat management device, the substrate material includes:
infrared transparent silicon, germanium, alkali or alkaline earth metal halides, silicate glasses, aluminate glasses, gallate glasses, chalcogenide glasses, alumina transparent ceramics, yttria transparent ceramics or composites or nanocomposites of these materials.
In a further method for fabricating the asymmetric photonic mirror enhanced radiation thermal management device, the infrared highly transparent and visible highly reflective coating comprises: nano-PE composites and multilayer reflection enhancement films realized with a combination of high and low optical density materials.
In a further manufacturing method of the asymmetric photonic mirror enhanced radiation heat management device, the infrared high-radiation material includes: organic and inorganic materials, wherein the inorganic material comprises: silicate glass, chalcogenides, titanium dioxide/titanate nanomaterials; organic materials include PVC, PVA, PDMS, PET, PEI, PLA, PMMA, PEDOT, PS, PVP polymers, as well as composites or nano-hybrid compounds of these materials.
In a further manufacturing method of the asymmetric photonic mirror enhanced radiation heat management device, the micron-sized periodic array three-dimensional photonic diffraction structure includes: grating structure, grid structure, hole structure, columnar structure and compound eye structure of various unit three-dimensional structures.
In a further manufacturing method of the asymmetric photonic mirror enhanced radiation heat management device, the period size of the micron-sized periodic array three-dimensional photonic diffraction structure is 1-45 microns, the line width is 0.5-20 microns, and the height of the unit structure is 0.5-20 microns.
In a further manufacturing method of the radiation-enhanced thermal management device with the asymmetric photonic mirror, S3: the preparation of the surface of the substrate structure is realized by using a patterning process of photoetching, dry etching or nano imprinting and according to a designed micron-sized periodic array three-dimensional photon diffraction structure to obtain the asymmetric photon mirror, which comprises the following steps:
a. cleaning a substrate vehicle, spin-coating a photoresist on the substrate vehicle, and drying on a hot plate;
b. photoetching a sample by using a mask made of a designed pattern;
c. removing the redundant photoresist of the sample in a developing solution, and cleaning the sample by using deionized water;
d. etching according to the height of the unit structure of the micron-sized periodic array three-dimensional photon diffraction structure by a dry etching process;
e. carrying out ultrasonic cleaning in an organic solution to remove all the photoresist;
f. and thinning the sample in a dicing saw to obtain the asymmetric photon mirror.
In a further manufacturing method of the radiation-enhanced thermal management device with the asymmetric photonic mirror, the radiation space between the asymmetric photonic mirror and the infrared high-transparency and visible high-reflection coating is 0.1-5 cm in distance.
(vacuum not required, because it is also turned over)
The application scene of the invention can be indoor and outdoor small-sized to large-sized equipment and facilities, including but not limited to automobiles, airplanes, solar cells, electronic equipment, buildings, energy-saving windows, greenhouses, wearable objects and the like.
The invention discloses a radiation heat transfer channel with direction guide formed by an asymmetric photon mirror, which realizes the structural design and the preparation method of an asymmetric photon mirror enhanced radiation heat management device. The asymmetric photon mirror enhanced radiation heat management device is composed of a three-dimensional photon diffraction structure substrate spacing device with a visible high-reflection coating and an infrared high-radiation material, and the diffraction structure is prepared by photoetching and dry etching.
Preferably, the substrate is one of infrared transparent silicon, silicate glass and chalcogenide glass.
Preferably, the infrared high-transparency visible high-reflection coating can be a nano PE composite material.
Preferably, the infrared high-radiation material can be PDMS and composite materials or nano-mixed compounds thereof.
Preferably, the micron-sized periodic array three-dimensional photon diffraction structure can be one of a grid structure, a hole structure and a columnar structure.
Preferably, the three-dimensional photon diffraction structure has a period size of 8 microns, a line width of 2 microns and a unit structure height of 1.5 microns.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a. cleaning a silicon wafer substrate, spin-coating photoresist with the thickness of less than 3 microns, and placing a sample on a hot plate for drying for 30-90 seconds;
b. photoetching a sample by using a mask made of a designed pattern, wherein the exposure time is 10-90 seconds;
c. gently shaking the sample in a developing solution for 10-60 seconds, and washing the sample with deionized water;
d. etching according to the designed height by a dry etching process;
e. the timing ultrasonic cleaning is carried out in the organic solution, and the sequence and the characteristics are as follows: washing in toluene for 10-20 min, acetone for 10-15 min, ethanol for 10-20 min, and finally deionized water for 20-30 min.
f. The samples were thinned in a dicing saw to a final thickness of 100-300 microns.
Due to the adoption of the technical scheme, compared with the prior art, the invention has the following advantages and positive effects:
the design of the invention realizes 20% asymmetric transmission and reflection of broadband infrared by the diffraction structure and the high-refractive-index contrast medium. In the cooling mode, the asymmetric mirror of the present invention achieves a front side reflection rate greater than a front side transmission rate to reflect external thermal radiation; meanwhile, the reverse transmittance is higher than the reverse reflectivity, so that internal heat is transmitted outwards, and the efficient cooling performance is realized. In the heating mode, the asymmetric mirror realizes that the front transmittance is greater than the front reflectance so as to transmit external heat radiation inwards; meanwhile, the reflectivity of the back surface is larger than the transmittance of the back surface, so that the internal heat is limited to be dissipated outwards, and the efficient heating performance is realized. In both outdoor and indoor thermal management experiments, the enhanced thermal management device of the present invention decreased the temperature of the cooling mode by 8 ℃ and increased the temperature of the heating mode by 5.7 ℃ compared to the conventional radiative cooling material alone, even in cloudy/humid environments where back radiation is present. The calculation shows that the radiation refrigeration and heating power of the system is improved by 80%. Thus, the asymmetric mirror is suitable for use in any closed or open space where there is reverse radiation, such as vehicles, electronic devices, solar cells, and energy-saving buildings, and is a promising radiation heat management device.
The invention aims at the radiation heat management under the condition of inverse radiation for the first time, realizes the design and the preparation of the refrigerating/heating dual-mode asymmetric mirror through the asymmetric photon diffraction structure, and obtains the all-weather all-region applicable and performance-enhanced radiation heat control device.
The preparation method provided by the invention has the advantages of high repeatability, wide raw material selection range and simplicity.
Drawings
FIG. 1 is a schematic representation of the thermal radiation transmission mode of the present invention under the influence of a synthetically designed asymmetric device and its mode of application in a vehicle;
FIG. 2 is a schematic diagram of an inverse asymmetric infrared spectrum of a silicon-based asymmetric device in example 4 of the present invention;
FIG. 3 is a schematic diagram of an inverse asymmetric infrared spectrum of a silicon-based asymmetric device in example 4 of the present invention;
figure 4 is a schematic diagram of the silicon-based device of example 4 of the present invention comparing the temperature management of the conventional radiant cooling material alone in cooling and heating modes, respectively.
Detailed Description
The structural design and the manufacturing method of the asymmetric photonic mirror enhanced radiation heat management device provided by the invention are further described in detail with reference to the accompanying drawings and specific embodiments. Advantages and features of the present invention will become apparent from the following description and from the claims.
The asymmetric photonic structure may exhibit asymmetric optical characteristics when electromagnetic waves are incident in forward and reverse directions. Under the condition of the addition of asymmetric infrared transmission and reflection performance, the radiation refrigeration/heating technology can realize the breakthrough optimization and enhancement of all climates and all regions. Under the reverse radiation of the sky, the strong atmospheric radiation can cause the traditional radiation cooling material to absorb a large amount of heat energy, and if an asymmetric structure is adopted as a middle heat transfer channel, the asymmetric transmittance and reflectivity formed by different surfaces can be obtained, and the directionally-oriented radiation heat transfer can be realized. For example, under the requirement of refrigeration, the asymmetric mirror can guide heat to the outside, and radiation (inverse radiation) in an inward direction can be reflected while releasing internal heat, so that the refrigeration efficiency can be greatly improved. Under the heating requirement, the asymmetric mirror is turned over, heat can be guided to the inside, and radiation in the outward direction can be reflected back to the inside while external heat is transmitted inwards, so that the heating or heat preservation function is realized. Thus, by breaking forward and reverse thermal radiation transmission, the asymmetric mirror can complement conventional radiative cooling materials, enhancing radiative thermal management performance with full consideration and utilization of reverse radiation. In general, the dual-mode cooling/heating asymmetric photonic mirror can help promote the breakthrough development of the advanced radiation cooling technology, and greatly improve the performance and practical applicability of the mirror.
Example 1
The embodiment discloses an asymmetric photonic mirror for thermal management of an enclosed space in an automobile.
S1: the skylight glass material of the automobile is replaced by a chalcogenide glass substrate with moderate transparency in a visible wave band and high transparency in a middle infrared wave band.
S2: a mask plate of a chrome plate having a pattern of a square array having a width of 8 μm side width of 2 μm was prepared.
S3: cleaning a substrate, spin-coating a positive photoresist with the thickness of about 3 microns, and placing a sample on a hot plate for drying for 60 seconds; photolithography was performed on the dried sample for 90 seconds; the sample was gently shaken in a developing solution for 30 seconds, and washed with deionized water. Etching 1.5 micron deep by using reactive ion medium etching process. The timing ultrasonic cleaning is carried out in the organic solution, and the sequence and the characteristics are as follows: washing in toluene for 10-20 min, acetone for 10-15 min, ethanol for 10-20 min, and finally deionized water for 20-30 min. The samples were thinned in a dicing saw to a final thickness of 200 microns. And finishing the preparation of the device.
When the temperature in the car is too high, for example summer day, turn over skylight microstructure face to in the car, the smooth surface is outside towards the car, so can make the smooth surface reflect outside heat radiation, the inside heat of structural plane outward transmission, form the unidirectional heat transmission passageway of refrigeration function. When the temperature in the vehicle is low, such as winter, the skylight microstructure surface is turned to face the outside of the vehicle, and the smooth surface faces the inside of the vehicle, so that external heat radiation can be transmitted to the inside of the vehicle. In addition, can heat up because of shining in the white overhead traveling crane and form inside heat radiation, the smooth surface can pin inside heat radiation, makes its internal reflection, forms inside one-way heat transmission passageway, realizes gathering heat in the car and keeps warm. Fig. 1 shows the heat radiation transmission of the asymmetric device according to the invention and the application in a vehicle in example 1. It can be seen that the asymmetric mirror prepared by the embodiment has a double cooling and heating mode, and realizes one-way heat transfer according to different requirements so as to avoid the negative effects caused by the reverse radiation in cooling and utilize the reverse radiation in heating. Therefore, the asymmetric mirror obtained by the embodiment greatly improves the temperature control performance and the practicability in the radiation heat management technology.
Example 2
The present embodiments disclose an asymmetric photonic mirror for solar cell thermal management.
S1: the cover plate material of the solar cell is replaced by a substrate such as aluminum oxide transparent ceramic or yttrium oxide transparent ceramic with high transparency in visible to mid-infrared wave bands.
The steps S2 and S3 refer to example 1.
S4: and antireflection films are added on the surface layers of the two sides of the sample to improve the transmittance of sunlight.
S5: the reversible asymmetric cover plate is arranged at a position which is a certain distance away from the solar battery so as to reserve the turnover space. Example (c): such as 2 gamma 2cm for the cover plate 2 Then a space of 1cm can be reserved.
The solar cell usually operates at 50-55 deg.C, the working efficiency decreases by 0.45% when the temperature rises by 1 deg.C, and the aging rate doubles after the temperature rises by 10 deg.C. In addition, the thermal control coating of the solar cell needs to be transparent in the visible band to achieve efficient photoelectric conversion. The asymmetric mirrors involved therefore need to exhibit a broad band of high transparency in the visible band. When the solar cell is overheated, the asymmetric mirror needs to be turned to the cooling mode of the asymmetric mirror to realize heat dissipation, and when the solar cell is overcooled, the asymmetric mirror needs to be turned to the heating mode of the asymmetric mirror to realize heat collection and heat preservation. The asymmetric mirror prepared by the embodiment can perfectly match a refrigeration and heating dual mode required by a solar cell, and high transparent optical performance of a visible waveband is realized. Therefore, the asymmetric mirror obtained by the embodiment has considerable usability in the field of thermal management of solar cells.
Example 3
The embodiment discloses an asymmetric photon mirror for adjusting room temperature of an energy-saving building.
S1: and selecting a material with high transparency in the middle infrared band, such as a silicon wafer.
The steps S2 and S3 refer to example 1.
And S4, adding an antireflection film on the smooth surface layer of the sample to reduce the absorption of sunlight.
S5: and covering the surface of the building, which is strongly heated, with the sample, and reserving the overturning distance.
When the indoor temperature in summer is too high, the microstructure surface of the device is turned to face the interior of a building, the reflection increasing film faces the external environment, the function of the reflection increasing film is consistent with that of the skylight of the example 1 in the infrared band, and an outward and unidirectional heat dissipation channel is formed; in the visible band, the reflection increasing film can reflect sunlight to avoid severe temperature rise caused by the sunlight. In winter, the temperature in the room is too low, the window is turned over for 180 degrees, and an inward and unidirectional heat gathering and transmitting channel is formed. At the moment, sunlight can be absorbed by the silicon wafer surface to gather heat, so that the heat preservation in a room is facilitated.
Example 4
The embodiment discloses an asymmetric photonic mirror for electronic device thermal management.
S1-S3 are as in example 3.
S4: and processing and punching the sample to replace the material of the heat dissipation plate of the electronic equipment.
S5: the asymmetric heat dissipation plate is reserved with a turning distance and is arranged around the heating device.
For electronic devices, both over-cooling and over-heating of Integrated Circuits (ICs) can reduce their operating efficiency. When the microstructured surface of the APM is facing each IC board (cooling mode), they will release heat from the respective IC board while shielding the other board from heat. Conversely, if the surfaces are smooth facing the respective IC boards (heating mode), the radiant heat will be confined around each board and the residual heat between the two APMs will also be directed towards the IC boards to fully utilize the heat. Therefore, the operating efficiency of the electronic device is less affected by temperature changes.
FIGS. 2 and 3 are asymmetric IR spectra of the asymmetric device of example 4. It can be seen from the figure that the design of the present invention realizes 20% of asymmetric transmission and reflection of broadband infrared by the diffraction structure and the high refractive index contrast medium. In the cooling mode, the asymmetric mirror of the present invention achieves a front side reflection rate greater than a front side transmission rate to reflect external thermal radiation; meanwhile, the transmittance of the back surface is larger than the reflectivity of the back surface, so that internal heat is transmitted outwards, and high-efficiency cooling performance is realized. In the heating mode, the asymmetric mirror realizes that the front transmittance is greater than the front reflectance so as to transmit external heat radiation inwards; meanwhile, the reflectivity of the back surface is larger than the transmittance of the back surface, so that the internal heat is limited to be dissipated outwards, and the efficient heating performance is realized.
Fig. 4 is a comparison of the temperature management of the asymmetric device of example 4 in cooling and heating modes, respectively, with conventional radiant cooling material alone. It can be seen that in both outdoor and indoor thermal management experiments, the enhanced thermal management device of the present invention, even in cloudy/humid environments where there is counter radiation, the temperature in the cooling mode dropped by-9 ℃ and the temperature in the heating mode increased by-7 ℃ compared to the conventional radiant cooling material alone. Therefore, the asymmetric mirror obtained by the embodiment greatly improves the temperature control performance and the practicability in the radiation heat management technology.
Example 5
The embodiment discloses an asymmetric photon mirror of a columnar array three-dimensional photon diffraction structure.
S1 refers to example 4.
S2: a chrome mask was prepared in a 4 micron periodic 2 micron diameter columnar array.
S3 referring to example 1, since the structure of example 5 is finer, the thickness of the photoresist can be appropriately thinned to ensure that the pattern can be completely photo-etched and developed.
Example 6
The embodiment discloses an asymmetric photon mirror of an aperture array three-dimensional photon diffraction structure.
S1 refers to example 4.
S2: a chrome mask was prepared with a pattern of 4 micron periodic 1 micron diameter hole arrays.
S3 refers to example 5.
The structure of this example 6 is substantially identical to the infrared performance and thermal management performance of the other two structures mentioned in this patent, and so reference is made to fig. 2-3. Examples 1-4 above propose different material selection and application for different applications, while examples 5-6 propose different design and preparation for different microstructures (1-4 for one structure, 5 and 6 for each). The diversification of the microstructure enables the design of the invention to be more universal, the invention can have more functions, and different performance requirements can be satisfied in many aspects; for example, different surface structure designs can enable visible light to generate different color effects, and for example, a special micro-structure design is combined with a hydrophobic material to realize a super-hydrophobic self-cleaning asymmetric mirror, and a hydrophilic material is combined with a structure design to realize a super-hydrophilic anti-fog asymmetric mirror, and the like. In addition, the asymmetric design of the invention can be extended to different wave bands, including visible and microwave, and the corresponding structure size can be adjusted to the corresponding wave band aiming at different applications, such as stealth/camouflage or unidirectional signal transmission of an antenna, and the like.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments. Even if various changes are made to the present invention, they are still within the scope of the present invention provided that they fall within the scope of the claims of the present invention and their equivalents.
Claims (9)
1. A method for setting an asymmetric photonic mirror enhanced radiation thermal management device is characterized by comprising the following steps:
when light is incident to the structure in the forward direction, the infrared band transmittance of the radiation-enhanced thermal management device enhanced by the asymmetric photonic mirror is greater than the reflectivity;
when light is incident reversely, the reflectivity of an infrared band of the asymmetric photon mirror enhanced radiation heat management device is larger than the transmittance, so that unidirectional radiation heat transfer is realized.
2. A manufacturing method of an asymmetric photonic mirror enhanced radiation heat management device is characterized by comprising the following steps:
s1: selecting a medium-infrared broadband high-transmittance and high-optical-density substrate material;
s2: designing a micron-sized periodic array three-dimensional photon diffraction structure on a substrate material;
s3: preparing the structural surface of the substrate material by using a patterning process of photoetching, dry etching or nano imprinting and according to the designed micron-sized periodic array three-dimensional photon diffraction structure to obtain an asymmetric photon mirror;
s4, preparing or attaching an infrared high-transparency visible high-reflection coating on the asymmetric photon mirror;
s5: and mounting the asymmetric photonic mirror on an infrared high-radiation material in a spaced manner to manufacture the asymmetric photonic mirror enhanced radiation heat management device.
3. The method of fabricating an asymmetric photonic mirror enhanced radiation heat management device according to claim 2, wherein said base material comprises:
infrared transparent silicon, germanium, alkali or alkaline earth metal halides, silicate glasses, aluminate glasses, gallate glasses, chalcogenide glasses, alumina transparent ceramics, yttria transparent ceramics, or composites or nanocomposites of these materials.
4. The method of fabricating an asymmetric photonic mirror enhanced radiation thermal management device according to claim 3, wherein said infrared highly transparent and visible highly reflective coating comprises: nano-PE composites and multilayer reflection enhancement films realized with a combination of high and low optical density materials.
5. The method of fabricating an asymmetric photonic mirror enhanced radiation thermal management device according to claim 4, wherein said infrared high emissivity material comprises: organic and inorganic materials, wherein the inorganic material comprises: silicate glass, chalcogenides, titanium dioxide/titanate nanomaterials; organic materials include PVC, PVA, PDMS, PET, PEI, PLA, PMMA, PEDOT, PS, PVP polymers, as well as composites or nano-hybrid compounds of these materials.
6. The method of fabricating an asymmetric-photonic-mirror enhanced radiation thermal management device according to claim 5, wherein said micron-sized periodic array three-dimensional photonic diffraction structure comprises: grating structure, grid structure, hole structure, columnar structure and compound eye structure of various unit three-dimensional structures.
7. The method of claim 6, wherein the periodic dimension of the micron-sized periodic array three-dimensional photonic diffraction structure is 1-45 microns, the line width is 0.5-20 microns, and the height of the unit structure is 0.5-20 microns.
8. The method of fabricating an asymmetric photonic mirror enhanced radiation thermal management device according to claim 7, wherein S3: the preparation of the surface of the substrate structure is realized by using a patterning process of photoetching, dry etching or nano imprinting and according to a designed micron-sized periodic array three-dimensional photon diffraction structure to obtain the asymmetric photon mirror, which comprises the following steps:
a. cleaning a substrate vehicle, spin-coating a photoresist on the substrate vehicle, and drying on a hot plate;
b. photoetching a sample by using a mask made of a designed pattern;
c. removing the redundant photoresist of the sample in a developing solution, and cleaning the sample by using deionized water;
d. etching according to the height of the unit structure of the micron-sized periodic array three-dimensional photon diffraction structure by a dry etching process;
e. carrying out ultrasonic cleaning in an organic solution to remove all photoresist;
f. and thinning the sample in a dicing saw to obtain the asymmetric photon mirror.
9. The method of claim 8, wherein the asymmetric photonic mirror is spaced from the infrared highly transparent and visible highly reflective coating by a distance of 0.1 cm to 5 cm from the radiation space.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116774332A (en) * | 2023-08-24 | 2023-09-19 | 中国科学院长春光学精密机械与物理研究所 | Application of directional radiation device in radiation refrigeration |
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| CN111718584A (en) * | 2020-06-18 | 2020-09-29 | 上海交通大学 | Radiation cooling film, preparation method and application thereof |
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| CN111718584A (en) * | 2020-06-18 | 2020-09-29 | 上海交通大学 | Radiation cooling film, preparation method and application thereof |
Non-Patent Citations (1)
| Title |
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| KALLY CHEIN SHENG LY等: "《A Dual-Mode Infrared Asymmetric Photonic Structure for All-Season Passive Radiative Cooling and Heating》", 《ADWANCED FUNCTIONAL MATERIALS》, pages 1 - 10 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116774332A (en) * | 2023-08-24 | 2023-09-19 | 中国科学院长春光学精密机械与物理研究所 | Application of directional radiation device in radiation refrigeration |
| CN116774332B (en) * | 2023-08-24 | 2023-11-17 | 中国科学院长春光学精密机械与物理研究所 | Application of directional radiation device in radiation refrigeration |
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