CN115212804A - Particle/powder surface modification device with built-in rotary container and use method thereof - Google Patents
Particle/powder surface modification device with built-in rotary container and use method thereof Download PDFInfo
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- B01J8/08—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with moving particles
- B01J8/10—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with moving particles moved by stirrers or by rotary drums or rotary receptacles or endless belts
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Abstract
The invention discloses a built-in rotary container type particle/powder surface modification device and a use method thereof, belonging to the technical field of surface modification. The device comprises: the vacuum reaction unit comprises a vacuum reaction cavity and a vacuum door arranged on the vacuum reaction cavity; the rotary reaction unit comprises a reaction container, the reaction container is arranged in the vacuum reaction cavity through a supporting component, the reaction container is connected with a rotary component and rotates under the action of the rotary component, and the interior of the reaction container is communicated with the interior of the vacuum reaction cavity; and an electrode unit including a reaction electrode located outside the reaction vessel. Can treat single-class particles or powder, can also treat a mixture of several particles or powder, can also treat the mixture of particles and powder, has very wide application range, and is particularly suitable for the plasma surface treatment of surface cleaning, activation, etching, polymerization and the like of non-metallic material particles/powder such as plastic, ceramics, polymers, high polymer materials, composite materials and the like.
Description
Technical Field
The invention relates to the technical field of surface modification, in particular to a built-in rotary container type particle/powder surface modification device and a using method thereof.
Background
With the rapid development of new materials and new process technologies, people have raised higher and higher requirements on various aspects of functions, appearance, safety, environmental protection, resource recycling and the like of various products. Meanwhile, various surface treatment techniques capable of improving the performance of various aspects of materials by changing the micro-morphology, the radical components, the molecular structure and the like of the surface of the materials are changing day by day.
Among the wet and dry surface treatment methods, the plasma surface treatment process is an environmental protection technology with safety, high efficiency and low energy consumption, and has been rapidly developed in recent years. Especially, the vacuum plasma processing technology has the advantages of thorough reaction, low temperature, good uniformity and consistency and the like, and has obvious division of labor for processing particles/powder materials of different materials in industrial application.
The roller-driven roller-type industrial powder treatment equipment comprises a metal powder cylinder unit, an electrode unit and a roller unit, wherein the metal powder cylinder unit is a cylindrical hollow barrel with a stirring sheet and stirring particles and used for bearing the electrode unit, the electrode unit is connected with the metal powder cylinder unit and used for discharging in the metal powder cylinder unit to generate plasma, and the roller unit is connected with the metal powder cylinder unit and used for providing power for the metal powder cylinder unit. The powder processing equipment utilizes the discharge space in the equipment to improve the uniformity of the plasma processing on the industrial powder, but has requirements on the discharge mechanism, meanwhile, the electrode is not convenient to maintain as a part of the powder cylinder, the processing capacity of the device is limited, the powder cylinder is placed on the front and rear two groups of rollers, and the rotating drum is required to be taken out together when the particles are processed, so that the operation is inconvenient. When the powder cylinder rolls, the particles are not completely suspended, most objects are often accumulated at the bottom under the influence of gravity, the plasma modified material cannot ensure thorough and uniform treatment, and the treatment effect is poor; and the internal structure thereof is complex; the discharge is performed while rotating, so that the discharge is unstable; meanwhile, excessive loading causes the materials to be difficult to rotate completely, and the bottom is accumulated, so that the loading capacity is low; meanwhile, due to the complexity of the internal structure, the subsequent maintenance is inconvenient; in general, it is less energy efficient in industrial applications. In summary, the vacuum plasma surface modification devices for processing particles/powder on the market at present have the problems of complex structure, unstable discharge, poor processing effect, low loading capacity, inconvenient maintenance, low energy efficiency ratio in industrial application and the like.
Disclosure of Invention
In order to solve the technical problems, the invention provides a built-in rotary container type particle/powder surface modification device and a using method thereof.
The technical scheme of the invention is as follows: built-in rotating container formula granule/powder thing surface modification device includes:
the vacuum reaction unit comprises a vacuum reaction cavity, and a vacuum door is arranged on one side of the vacuum reaction cavity;
the rotary reaction unit comprises a reaction container positioned and arranged in the vacuum reaction cavity through a supporting component, and the interior of the reaction container is communicated with the interior of the vacuum reaction cavity; the reaction container is connected with a rotating assembly positioned on the vacuum reaction cavity, and the rotating assembly can drive the reaction container to rotate; and
and the electrode unit comprises a reaction electrode, and the reaction electrode is arranged on the outer side of the reaction container.
Further, the vacuum reaction unit also comprises an evacuation channel, an air inlet channel and a vacuum breaking channel.
Furthermore, the vacuum door is connected with the vacuum reaction cavity through a door driving assembly, the door driving assembly comprises a sliding rail, the sliding rail is arranged on the outer side of the vacuum reaction cavity and is parallel to the axis of the vacuum reaction cavity, a sliding block is arranged on the sliding rail in a sliding mode, and the sliding block is connected with the vacuum door. In addition, in order to ensure the moving distance of the vacuum door, the vacuum door is provided with a connecting plate which is connected with the sliding block, the lengths of the connecting plate and the sliding rail are ensured, and after the vacuum door is opened, enough clearance or space is still left for processing the inside of the vacuum reaction cavity. And the door drive assembly can be symmetrically arranged on two sides of the vacuum door, so that the stability of the vacuum door in the moving process is improved.
Furthermore, a handle is arranged on the vacuum door. Generally, two handles can be arranged to ensure that the vacuum door can be stably pulled out.
Furthermore, the support assembly is arranged on the inner side of the vacuum door and comprises two support rods which are arranged in parallel along the central axis direction of the reaction container, and one ends of the two support rods are respectively and fixedly connected to the side wall of the vacuum door; at least one tip of reaction vessel sets up the support ring, two the periphery wall of bracing piece all rolls the butt with the periphery wall of support ring simultaneously, just the bracing piece all sets up the central axis department that is higher than the minimum of support ring and is less than the support ring. Namely, the supporting ring is supported from the two sides below, and simultaneously the reaction vessel is also supported. And the position of the supporting ring contacting with the supporting rod is provided with a roller or a rolling bearing on the supporting rod, so that the stability of the rotating assembly during driving is ensured.
Further, still set up location coupling assembling between the inboard of vacuum door and reaction vessel's the terminal surface, location coupling assembling includes the constant head tank, the constant head tank sets up in vacuum door's inboard, sets up the locating piece at reaction vessel's tip, the fixed inner circle that sets up location bearing on the locating piece, location bearing's outer lane card is established in the constant head tank. Through setting up the constant head tank in central axis department, realized the accurate location to reaction vessel.
Furthermore, a positioning annular groove is further formed in the positioning block, a positioning stop block is fixedly arranged on the inner side of the vacuum door, and the positioning stop block is clamped in the positioning annular groove. The positioning ring groove is formed in the positioning block, and the positioning stop block is arranged, so that the independence of the reaction container during rotation is guaranteed, and the reaction container is pulled to move together when the vacuum door is opened conveniently. And the two positioning stop blocks can be symmetrically arranged, so that the stability in moving along the axis direction is ensured.
Of course, support rings may be provided at both ends of the reaction vessel, and the stability is ensured by the support rings at both ends. It is of course also possible to provide a support ring, which is replaced by a positioning groove and positioning block.
Furthermore, the central axis of the reaction container is perpendicular to the vacuum door, baffles are respectively arranged on two end faces of the central axis of the reaction container, a screen plate is arranged in the circumferential direction of the central axis of the reaction container, two ends of the screen plate are connected with the baffles, and the screen plate and the baffles enclose the reaction container. The whole shape can be cylindrical, spindle-shaped, square and the like, and the stirring sheet can be arranged in the reaction vessel, so that the product to be treated in the reaction vessel can be conveniently stirred, and the stirring sheet is connected with the inner wall of the reaction vessel, so that the stirring efficiency is ensured.
Furthermore, the screen plate is provided with a plurality of screen plates, and at least one screen plate is detachable. Through setting up a detachable otter board, conveniently get the product of putting to inside, can dismantle moreover and connect through screw or bolt, also can be through the mode of joint, for example set up the fixture block on the baffle, set up the draw-in groove on the fixture block, the chucking is carried out the otter board to the draw-in groove internal energy, also convenient the dismantlement simultaneously.
Furthermore, the rotating assembly comprises a rotating motor, the rotating motor is connected with a magnetic fluid connector through a coupler, and one end of the magnetic fluid connector extends into the vacuum reaction cavity from the outer side of the vacuum reaction cavity and is connected with the reaction container. The rotating motor, the coupler and the magnetic fluid connector are all arranged on the outer side of the vacuum reaction cavity, only one end of the magnetic fluid connector extends into the vacuum reaction cavity and is coaxially connected with the central axis of the reaction container, and when the rotating motor needs to rotate, the rotating motor is started to drive the reaction container inside to rotate.
Furthermore, the end part of the reaction container is provided with a rotating block, and a connecting block is arranged at one end of the magnetic fluid connector extending into the vacuum reaction cavity, and the connecting block is detachably connected with the rotating block.
Further, the discharge mechanism of the reaction electrode is any one of a CCP capacitive coupling type and an ICP inductive coupling type.
Further, when the discharge mechanism of the reaction electrode is CCP capacitive coupling, the reaction electrode is any one of a horizontal electrode, a vertical electrode and a ring electrode which are arranged in pairs. The horizontal electrodes or the vertical electrodes are arranged in pairs and are positioned at the upper, lower, left and right sides of the reaction vessel; when the annular electrode is arranged, the feed-in electrode of the annular electrode is sleeved on the outer side of the reaction vessel along the axis direction, the shielding cover is arranged on the outer side of the feed-in electrode, the shielding cover and the feed-in electrode are concentrically arranged and supported by a support column, and meanwhile, the shielding cover is fixed with the vacuum reaction cavity through a screw or a bolt.
And the arrangement of the electrodes needs to pay attention to insulation treatment, so that the safety of the equipment is ensured.
Further, when the discharge mechanism of the reaction electrode is an ICP inductive coupling type, the reaction electrode includes a quartz glass cylinder disposed on the vacuum reaction chamber, and an induction coil is wound on an outer wall of the quartz glass cylinder. And the quartz glass cylinder and the induction coil can be arranged on the outer side and are communicated with the vacuum reaction cavity, when the process gas passes through the quartz glass cylinder, the process gas is ionized into plasma, the plasma enters the vacuum reaction cavity and enters the reaction container through meshes on the screen plate to carry out plasma surface treatment.
The beneficial technical effects of the invention are as follows: the rotary reaction unit adopts a magnetic fluid sealing structure, the running state of power can be monitored, data is acquired and fed back, and the sealing effect, stability and intellectualization of equipment are greatly improved; the shape, size and number of the reaction containers are not limited, the structure is simple, the distribution is reasonable, the operation difficulty is greatly reduced, the maintenance is convenient, and the effect, consistency and stability of plasma treatment on the particles/powder are guaranteed; the discharge mechanism of the electrode can be selected at will, the discharge is stable, and the maintenance is very convenient; can treat single kind of particles or powder, can also treat a mixture of several kinds of particles or powder, can also treat the mixture of particles and powder, has very wide application range, and is particularly suitable for surface cleaning, activating, etching, polymerizing and other ion surface treatments of non-metal material particles/powder such as plastic, ceramics, polymers, high polymer materials, composite materials and the like.
The use method of the built-in rotary container type particle/powder surface modification device comprises the following steps:
the vacuum door is opened until the reaction container is completely exposed;
opening a detachable screen plate on the reaction container, pouring particles/powder to be treated, fixing the detachable screen plate, closing a vacuum door when the reaction container is in a horizontal state, and hermetically connecting the vacuum door and the vacuum reaction cavity;
sequentially turning on switches of a vacuum pump and a rotary motor, continuously vacuumizing and keeping the reaction container to rotate, and introducing process gas when the vacuum is pumped to a preset vacuum degree;
opening the electrode unit when the vacuum reaction cavity is maintained to a preset vacuum degree, so that gas between the reaction electrodes is excited into plasma, the plasma enters the reaction container along the holes of the mesh plate and fully reacts with the particles/powder in the rotating process, and formed volatile substances are pumped away by the vacuum pump;
after the surface modification time set according to the process requirements is finished, vacuum breaking gas is filled, the vacuum door is pulled open, the detachable mesh plate is opened, and the particles/powder are poured out.
By the use method, materials can be reasonably filled according to the capacity of the reaction vessel, the rotating speed can be reasonably prepared according to the filling amount, when the equivalent weight is increased, the rotating speed is correspondingly increased, the materials are ensured to uniformly rotate in the reaction vessel, and meanwhile, the surface modification is carried out by utilizing the plasma produced by the reaction electrode.
Drawings
FIG. 1 is an overall schematic view of a surface modification apparatus.
Fig. 2 is a schematic view of a door drive assembly.
Fig. 3 is a schematic view of a rotating assembly.
Fig. 4 is a schematic view of the internal structure of the surface modifying apparatus.
Fig. 5 is a schematic view of a positioning connection assembly.
Fig. 6 is a schematic view of another perspective of the positioning connection assembly.
Fig. 7 is a schematic view of a support assembly.
FIG. 8 is a schematic view of the connection of the rotating assembly to the reaction vessel.
Fig. 9 is a partially enlarged view of fig. 8.
Fig. 10 is an exploded view of the rotating assembly and the reaction vessel.
Figure 11 is a schematic view of a connection block.
FIG. 12 is a cross-sectional view of the connector block.
Fig. 13 is a schematic view of a horizontal electrode.
Fig. 14 is a schematic view of a vertical electrode.
FIG. 15 is a schematic view of a ring electrode.
Fig. 16 is a schematic diagram of an ICP inductively coupled electrode.
Fig. 17 is a cross-sectional view of fig. 16.
Wherein:
1. a vacuum reaction unit 11, a vacuum reaction cavity 12, a vacuum door 13, a door driving component 131, a slide rail 132, a slide block 14, an evacuation channel 15, an air inlet channel 16, an evacuation channel 17 and a handle,
2. a rotary reaction unit, 21, a reaction vessel, 211, a baffle plate, 212, a screen plate, 22, a supporting component, 221, a supporting rod, 222, a supporting ring, 23, a rotating component, 231, a rotating motor, 232, a coupling, 233, a magnetic fluid connector, 234, a rotating block, 235, a connecting block, 2341, a rotary connecting groove, 2351, a movable clamping block, 2352, a hinge groove, 2353, a hinge shaft, 2354 and a tension spring,
3. the electrode unit, 31, the reaction electrode,
4. positioning connection assembly 41, positioning groove 42, positioning block 43, positioning bearing 44, positioning ring groove 45 and positioning stop block.
Detailed Description
In order to make the technical means of the present invention more clearly understood and to make the implementation of the technical means in accordance with the content of the specification, the following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings and examples, which are used for illustrating the present invention but not for limiting the scope of the present invention.
Referring to fig. 1-17, the apparatus for modifying the surface of a particle/powder with a built-in rotary container of this embodiment includes:
the device comprises a vacuum reaction unit 1, wherein the vacuum reaction unit 1 comprises a vacuum reaction cavity 11, and a vacuum door 12 is arranged on one side of the vacuum reaction cavity 11;
a rotary reaction unit 2, the rotary reaction unit 2 comprising a reaction vessel 21 positioned and arranged inside the vacuum reaction chamber 11 through a support member 22, while the inside of the reaction vessel 21 communicates with the inside of the vacuum reaction chamber 11, while the reaction vessel 21 is further connected with a rotary member 23 positioned and arranged inside the vacuum reaction chamber and capable of rotating under the action of the rotary member 23, an
An electrode unit 3, the electrode unit 3 including a reaction electrode 31, the reaction electrode 31 being located outside the reaction vessel 21.
The product to be treated is put into the rotary reaction vessel 21, the process gas is changed into plasma through the electrode unit 3, and enters the interior of the reaction vessel 21 along the channel on the surface of the reaction vessel 21, and at this time, the product can be completely and thoroughly surface-treated by the plasma under the rotation action of the rotating assembly 23.
The vacuum reaction unit 1 further comprises an evacuation channel 14, an air inlet channel 15 and a vacuum breaking channel 16, wherein the evacuation channel 14, the air inlet channel 15 and the vacuum breaking channel 16 are all communicated with the vacuum reaction cavity 11, the evacuation channel 14 is connected with a vacuum pump and a vacuum gauge, so that the vacuum reaction cavity 11 is in a vacuum state, generated volatile substances can be pumped away, and data are controllable; the gas inlet passage 15 can be filled with process gas; the vacuum breaking channel 16 can break vacuum of the vacuum reaction cavity 11 after reaction, and the reaction container is convenient to take out.
Illustratively, the vacuum reaction chamber 11 is formed by welding magnesium aluminum alloy.
The vacuum door 12 is connected with the vacuum reaction chamber 11 through a door driving assembly 13, the door driving assembly 13 includes a sliding rail 131, the sliding rail 131 is disposed outside the vacuum reaction chamber 11, the sliding rail 131 is parallel to the axis of the vacuum reaction chamber 11, a sliding block 132 is slidably disposed on the sliding rail 131, and the sliding block 132 is connected with the vacuum door 12. In order to ensure the moving distance of the vacuum door 12, the vacuum door 12 is provided with a connecting plate, the connecting plate is connected with the sliding block 132, and the length of the connecting plate and the sliding rail 131 is ensured, so that after the vacuum door 12 is opened, enough clearance or space is still provided for processing the inside of the vacuum reaction chamber 11. And the door driving assemblies 13 can be symmetrically arranged at both sides of the vacuum door 12, thereby improving the stability of the vacuum door 12 during the moving process.
And in order to provide stability, reinforcing ribs can be arranged on the connecting plate to provide stability.
A handle 17 is also provided on the vacuum door 12. Generally, two handles 17 are provided to ensure stable pulling out of the vacuum door 12.
The supporting component 22 is arranged at the inner side of the vacuum door 12, the supporting component 22 comprises two supporting rods 221 which are arranged in parallel along the central axis direction of the reaction vessel, and one ends of the two supporting rods are respectively fixedly connected to the side walls of the vacuum door; at least one end of the reaction vessel 21 is provided with a support ring 222, the peripheral walls of the two support rods 221 are simultaneously in rolling contact with the peripheral wall of the support ring 222, and the support rods 221 are arranged at the central axis higher than the lowest point of the support ring 222 and lower than the support ring 222. That is, the support ring 222 is lifted from both sides from below, and the reaction vessel 21 is also lifted. And at the position where the support ring 222 contacts the support rod 221, a roller or a rolling bearing is arranged on the corresponding support rod 221, so that the support rod contacts the support ring, and the stability of the rotating assembly 23 during driving is ensured.
Still set up positioning connection assembly 4 between the terminal surface of the inboard of vacuum door 12 and reaction vessel 21, positioning connection assembly 4 includes constant head tank 41, and constant head tank 41 sets up in the inboard of vacuum door 12, at the fixed locating piece 42 that sets up of the terminal surface of reaction vessel 21, and the cover is equipped with location bearing 43 on the locating piece 42, and this location bearing's inner circle sets firmly in the locating piece tip, and this location bearing's outer lane card is located in constant head tank (41). By providing the positioning groove 41 at the central axis, a precise positioning of the reaction vessel 21 is achieved.
Illustratively, the number of the reaction vessels 21 may be set reasonably according to the inner space of the vacuum reaction chamber 11 and the size of the reaction vessels 21, for example, two reaction vessels may be set in parallel in the vertical direction.
A positioning annular groove 44 is further formed in the positioning block 42, a positioning stop 45 is fixedly arranged on the inner side of the vacuum door 12, and the positioning stop 45 is clamped in the positioning annular groove 44. The positioning ring groove 44 and the positioning stopper 45 are arranged on the positioning block 42, so that the reaction vessel 21 is ensured to be independent when rotating, and the reaction vessel 21 is pulled to move together when the vacuum door 12 is opened. And two positioning stop blocks 45 can be symmetrically arranged, so that the stability in the movement along the axis direction is ensured.
Of course, the support rings 222 may be disposed at both ends of the reaction vessel 21, the support rings 222 at both ends ensure stability, the middle of the support ring 222 is hollow, and the positioning connection assembly 4 is disposed at one end close to the vacuum door 12 to connect the ends of the axis. Of course, a support ring 222 may be provided, and the positioning groove 41 and the positioning block 42 may be directly connected instead of a support ring 222.
The central axis of the reaction vessel 21 is perpendicular to the vacuum door 12, the baffle plates 211 are respectively arranged on two end faces of the central axis of the reaction vessel 21, the screen plates 212 are arranged in the circumferential direction of the central axis of the reaction vessel 21, two ends of the screen plates 212 are connected with the baffle plates 211, and the screen plates 212 and the baffle plates 211 enclose the reaction vessel 21. The whole shape can be cylindrical, spindle-shaped, square and the like, and the stirring sheet can be arranged in the reaction vessel 21, so that the product to be treated in the reaction vessel can be conveniently stirred, and the stirring sheet is connected with the inner wall of the reaction vessel 21, so that the stirring efficiency can be ensured. And the shape, size and number of the reaction containers 21 are not limited, the structure is simple, the distribution is reasonable, the operation difficulty is greatly reduced, the maintenance is convenient, and the effect, consistency and stability of plasma treatment on the particles/powder are guaranteed.
The mesh plate 212 is provided in plurality, and at least one mesh plate 212 is provided to be detachable. Through setting up a detachable otter board 212, conveniently get the product of putting to inside, detachable mode can be connected through screw or bolt moreover, also can be through the mode of joint, for example sets up the fixture block on baffle 211, sets up the draw-in groove on the fixture block, and the chucking is carried out otter board 212 in the draw-in groove, also convenient dismantlement simultaneously.
The rotating assembly 23 includes a rotating motor 231, the rotating motor 231 is connected to a magnetic fluid connector 233 through a coupling 232, and one end of the magnetic fluid connector 233 extends into the vacuum reaction chamber 11 from the outside thereof and is coaxially connected to the reaction vessel 21. The rotating motor 231, the coupling 232 and the magnetic fluid connector 233 are all arranged outside the vacuum reaction chamber 11, and extend into the vacuum reaction chamber only through one end of the magnetic fluid connector 233, and are coaxially connected along the central axis of the reaction vessel 21, when the rotating motor 231 is started to drive the reaction vessel 21 inside to rotate. The rotary reaction unit 2 adopts a magnetic fluid sealing structure, the running state of power can be monitored, data is collected and fed back, and the sealing effect, stability and intellectualization of the equipment are greatly improved.
The end of the reaction vessel 21 is provided with a rotary block 234, and a connection block 235 is provided at one end of the magnetic fluid connector 233 extending into the vacuum reaction chamber 11, and the connection block 235 is detachably connected to the rotary block 234.
Illustratively, the end of the connecting block 235 is provided with a non-circular bump, the rotating block 234 is provided with a groove matched with the bump pattern, the detachable connection is realized through the insertion of the bump pattern and the rotating block, and stable power output can be realized after the detachable connection. And the non-circular shape can be a triangle, a quadrangle or other polygons, and can also be a strip, a cross or other shapes, so that the non-circular shape can be matched and connected with the groove.
Illustratively, the rotation block 234 is disposed in a ring shape, and a rotation connection groove 2341 is disposed on an inner wall of the ring shape, and a protruding catch is disposed on an outer periphery of the connection block 235 and can be inserted into the rotation connection groove 2341. Through this kind of connected mode, can guarantee the stability of dismantling and subsequent power transmission of connection too.
For example, the rotating block 234 is disposed in a ring shape, a rotating connection groove 2341 is disposed on the inner wall of the ring shape, a movable clamping block 2351 is hinged to the periphery (in the circumferential direction) of the insertion connection end of the connection block 235, a hinge groove 2352 is disposed on the connection block 235, the hinge groove 2352 has two openings facing the end surface (one end in the axial direction) and the periphery of the insertion connection end, the movable clamping block 2351 is disposed in the hinge groove 2352 through a hinge shaft 2353, and the movable clamping block 2351 has two different states, as shown in fig. 12;
a first state: a tensioning spring 2354 is arranged in the hinge groove 2352, the pulling-in spring is arranged along the radial direction, and can pull the movable clamping block 2351 into the hinge groove 2352 along the radial direction, at the moment, when the movable clamping block 2351 is exposed out of an opening on the end surface, almost no leakage occurs at the opening on the periphery, and the movable clamping block can be separated from the rotary connecting groove on the inner annular surface of the rotary block;
and a second state: during the grafting, the baffle 211 of reaction vessel 21's tip contacts with the uncovered movable fixture block 2351 that exposes of the follow terminal surface of state one to during continuous grafting, can press movable fixture block 2351 in the articulated groove 2352 along the axis direction, when the uncovered parallel and level of movable fixture block 2351 and terminal surface, movable fixture block 2351 exposes from outlying uncovered department this moment, the part that exposes this moment can insert in rotatory spread groove 2341 just, insert along annular radial direction moreover, the stability of power when having guaranteed the rotation.
Referring now to FIG. 12: the movable clamping block 2351 is in a right trapezoid, and comprises a short bottom edge, a long bottom edge, a right-angle edge and a bevel edge, the middle part of the right trapezoid is hinged, the short bottom edge is flush with the edge of an opening of the end surface of the hinge groove 2352, the right-angle edge is parallel to the bottom of the hinge groove 2352 along the axial direction and is provided with a first gap, a tensioning spring 2354 is arranged at the first gap, the long bottom edge is parallel to the bottom edge of the hinge groove 2352 along the radial direction and is provided with a second gap, and the bevel edge is exposed out of the opening of the periphery at the moment; and the tensioning spring 2354 is disposed between the hinge axis 2353 and the side bottom edge, which is state two at this time; when disengaged, it becomes state one under the influence of the tensioning spring 2354. And can be respectively exposed from the two openings in the changing process of the state one and the state two. Of course, it is also possible to change the right trapezoid into a parallelogram (right angle side into hypotenuse side) to achieve this function.
Exemplarily, the tensioning spring can be changed into an ejecting spring, namely, the state is a normal state, when the connecting block is in non-directional connection with the rotating block, namely, the movable clamping block is firstly in contact with the inner ring of the rotating block, and then, when manual or fine adjustment is performed, the movable clamping block can rotate along the inner ring and is ejected under the action of the ejecting spring when rotating to the rotating connecting groove, so that clamping connection between the movable clamping block and the rotating connecting groove is realized.
The discharge mechanism of the reaction electrode 31 is any of CCP capacitive coupling type and ICP inductive coupling type. And the arrangement of the electrodes needs to pay attention to insulation treatment, so that the safety of the equipment is ensured.
When the discharge mechanism of the reaction electrode 31 is the CCP capacitive coupling type, the reaction electrode 31 is any one of a horizontal electrode (see fig. 13), a vertical electrode (see fig. 14), and a ring electrode (see fig. 15) provided in pairs. The horizontal electrodes or the vertical electrodes are arranged in pairs and are positioned at the upper, lower, left and right sides of the reaction vessel 21; when the annular electrode is arranged, the feed-in electrode of the annular electrode is sleeved on the outer side of the reaction container 21 along the axis direction, a shielding cover is arranged on the outer side of the feed-in electrode, the shielding cover and the feed-in electrode are concentrically arranged and supported by a support column, and the shielding cover is fixed with the vacuum reaction cavity 11 by a screw or a bolt; when the CCP capacitive coupling type is adopted, the process gas is filled inside and ionized into plasma under the action of the reaction electrode 31.
When the discharge mechanism of the reaction electrode 31 is ICP inductive coupling, the reaction electrode 31 comprises a quartz glass cylinder disposed on the vacuum reaction chamber, and an induction coil is wound on the outer wall of the quartz glass cylinder, as shown in fig. 16-17. Moreover, a quartz glass cylinder and an induction coil can be arranged outside the vacuum reaction chamber 11 and are communicated with the vacuum reaction chamber 11, when the process gas passes through the quartz glass cylinder, the process gas is ionized into plasma, the plasma enters the vacuum reaction chamber 11 and enters the reaction container 21 through meshes on the screen 212 to perform plasma surface treatment. The discharge mechanism of the reaction electrode 31 can be selected at will, the discharge is stable, and the maintenance is very convenient;
for example, a temperature control sensor may be further disposed on the vacuum reaction chamber 11 and the reaction electrode 31, and the internal temperature may be detected and controlled by the temperature control sensor.
Correspondingly, the reaction container is arranged in the vacuum reaction cavity, materials are filled in the reaction container, the reaction container is independently rotated by the rotating assembly, the rotating speed can be adjusted according to the quantity of the materials, the materials are guaranteed to be mixed in time, bottom deposition is prevented, the loading capacity is improved, and the treatment effect is improved; meanwhile, the electrode unit is arranged on the outer side of the reaction container, plasma is generated through the electrode unit, and the electrode unit is fixed, so that the stability of the discharge effect of the electrode unit can be ensured; meanwhile, the capacity can be improved within the same energy consumption, and the energy efficiency ratio is improved. In addition, the reaction container, the vacuum reaction cavity and the electrode unit are independently arranged, so that the whole structure of the equipment is simple, and meanwhile, when faults occur, the equipment can be maintained respectively, and timely maintenance is convenient to carry out.
The device can treat single-grade particles or powder, can also treat a mixture of several types of particles or powder, can also treat a mixture of particles and powder, has a very wide application range, and is particularly suitable for surface cleaning, activating, etching, polymerizing and other ion surface treatments of non-metal material particles or powder such as plastic, ceramics, polymers, high polymer materials, composite materials and the like.
The using method of the device can be carried out according to the following steps:
the vacuum door 12 is pulled open until the reaction vessel 21 is completely exposed;
opening the detachable screen 212 on the reaction container 21, pouring the particles/powder to be treated, fixing the screen 212, closing the vacuum door 12 when the reaction container 21 is in a horizontal state, and ensuring that the vacuum door 12 is hermetically connected with the vacuum reaction cavity 11;
sequentially turning on switches of the vacuum pump and the rotating motor 231, continuously vacuumizing and keeping the reaction container 21 to rotate, and introducing process gas as required when the vacuum is pumped to a preset vacuum degree (data display is carried out by a vacuum gauge);
after the vacuum reaction chamber 11 is maintained to a preset vacuum degree, opening the electrode unit 3 to enable the gas between the reaction electrodes 31 to be excited into plasma, enabling the plasma to enter the reaction container 21 along the holes of the mesh plate 212 and fully react with the uniformly dispersed particles/powder, and pumping out the formed volatile substances by a vacuum pump;
after the surface modification time is set according to the process requirements, vacuum breaking gas is filled, the vacuum door 12 is pulled open, the detachable screen plate 212 is opened, and the particles/powder are poured out.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A built-in rotary container type particle/powder surface modification device is characterized by comprising:
the device comprises a vacuum reaction unit (1), wherein the vacuum reaction unit (1) comprises a vacuum reaction cavity (11), and a vacuum door (12) is arranged on one side of the vacuum reaction cavity (11);
the rotary reaction unit (2), the rotary reaction unit (2) comprises a reaction container (21) which is positioned in the vacuum reaction cavity (11) through a supporting component (22), and the interior of the reaction container (21) is communicated with the interior of the vacuum reaction cavity (11); the reaction vessel (21) is connected with a rotating component (23) positioned on the vacuum reaction cavity (11), and the rotating component can drive the reaction vessel (21) to rotate; and
the electrode unit (3), electrode unit (3) includes reaction electrode (31), reaction electrode (31) are located the outside of reaction vessel (21).
2. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 1, wherein: the support assembly (22) comprises two support rods (221) which are arranged in parallel along the central axis direction of the reaction vessel, and one ends of the two support rods are respectively and fixedly connected to the side wall of the vacuum door; at least one end of the reaction container (21) is provided with a support ring (222), the peripheral walls of the two support rods (221) are simultaneously in rolling contact with the peripheral wall of the support ring (222), and the support rods (221) are arranged at the positions which are higher than the lowest point of the support ring (222) and lower than the central axis of the support ring (222).
3. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 1, wherein: vacuum door (12) are connected through door drive assembly (13) with vacuum reaction cavity (11), door drive assembly (13) are including setting up slide rail (131) in the outside of vacuum reaction cavity (11), and slide rail (131) are parallel with the axis of reaction vessel (21), slide on slide rail (131) and set up slider (132), just slider (132) and vacuum door (12) fixed connection.
4. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 1, wherein: still set up positioning connection subassembly (4) between the inboard of vacuum door (12) and the terminal surface of reaction vessel (21), positioning connection subassembly (4) are including setting up constant head tank (41) in the inboard of vacuum door (12), at the fixed locating piece (42) that sets up of terminal surface of reaction vessel (21), and the cover is equipped with location bearing (43) on this locating piece, and the inner circle of this location bearing sets firmly in the locating piece tip, and the outer lane card of this location bearing locates in constant head tank (41).
5. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 1, wherein: the central axis of the reaction container (21) is perpendicular to the vacuum door (12), the baffle plates (211) are respectively arranged on two end faces of the reaction container (21), the screen plates (212) are arranged in the circumferential direction of the central axis of the reaction container (21), two ends of each screen plate (212) are connected with the baffle plates (211), the screen plates (212) and the baffle plates (211) enclose the reaction container (21), the number of the screen plates (212) is multiple, and at least one screen plate (212) is detachable.
6. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 1, wherein: the rotating assembly (23) comprises a rotating motor (231), the rotating motor (231) is connected with a magnetic fluid connector (233) through a coupler (232), and one end of the magnetic fluid connector (233) extends into the vacuum reaction cavity (11) from the outer side of the vacuum reaction cavity (11) and is connected with the reaction container (21).
7. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 6, wherein: the end part of the reaction container (21) is provided with a rotating block (234), one end of a magnetic fluid connector (233) extending into the vacuum reaction cavity (11) is provided with a connecting block (235), and the connecting block (235) is detachably connected with the rotating block (234).
8. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 1, wherein: the discharge mechanism of the reaction electrode (31) is any one of CCP capacitive coupling type and ICP inductive coupling type.
9. The apparatus for modifying the surface of a particle/powder with a built-in rotary container according to claim 8, wherein: when the discharge mechanism of the reaction electrode (31) is CCP capacitive coupling, the reaction electrode (31) is any one of a horizontal electrode, a vertical electrode and a ring electrode which are arranged in pairs;
when the discharge mechanism of the reaction electrode (31) is an ICP inductive coupling type, the reaction electrode (31) comprises a quartz glass cylinder arranged on the vacuum reaction cavity (11), an induction coil is wound on the outer wall of the quartz glass cylinder, and the quartz glass cylinder is communicated with the vacuum reaction cavity (11).
10. The use method of the surface modification device for particle/powder of built-in rotary container type according to any one of claims 1 to 9, comprising:
the vacuum door (12) is opened until the reaction container (21) is completely exposed;
opening a detachable screen plate (212) on the reaction container (21), pouring particles/powder to be treated, fixing the detachable screen plate (212), closing the vacuum door (12) when the reaction container (21) is in a horizontal state, and hermetically connecting the vacuum door and the vacuum reaction cavity;
sequentially turning on switches of a vacuum pump and a rotating motor (231), continuously vacuumizing and keeping a reaction container (21) to rotate, and introducing process gas when the vacuum is pumped to a preset vacuum degree;
when the vacuum reaction cavity (11) is maintained to a preset vacuum degree, opening the electrode unit (3) to enable gas between the reaction electrodes (31) to be excited into plasma, enabling the plasma to enter the reaction container (21) along the holes of the mesh plate (212) and fully react with particles/powder in the rotating process, and pumping out formed volatile substances by a vacuum pump;
after the surface modification time set according to the process requirements is finished, vacuum breaking gas is filled, the vacuum door (12) is pulled open, the detachable screen plate (212) is opened, and the particles/powder are poured out.
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