CN115184436A

CN115184436A - Detection device and detection method thereof

Info

Publication number: CN115184436A
Application number: CN202210908148.XA
Authority: CN
Inventors: 章凯迪; 林柏全; 蒋慧慧; 杨璐宁; 席克瑞
Original assignee: Shanghai Tianma Microelectronics Co Ltd
Current assignee: Shanghai Tianma Microelectronics Co Ltd
Priority date: 2022-07-29
Filing date: 2022-07-29
Publication date: 2022-10-14

Abstract

The invention discloses a detection device and a detection method thereof, wherein the detection device comprises at least one detection unit, the detection unit comprises an ion sensitive film, a first electrode, a first capacitor, a second capacitor and a first transistor, and further comprises a signal input end, a power supply end and a current output end; the capacitance value of the first capacitor is larger than that of the second capacitor; the ion sensitive film is covered on a first electrode, the first electrode is electrically connected with a first polar plate of a first capacitor, a second polar plate of the first capacitor, the first polar plate of a second capacitor and a grid electrode of a first transistor are electrically connected, and a second polar plate of the second capacitor is connected with a signal input end; the first pole of the first transistor is connected with the power supply end, and the second pole of the first transistor is connected with the current output end. The technical method provided by the invention can solve the problem that the detection structure of the detection device is influenced by factors such as the threshold voltage change of the transistor caused by the preparation process and environmental factors in the prior art, and improves the detection precision of the detection device on the basis of avoiding the influence of the environment on the threshold voltage of the transistor.

Description

Detection device and detection method thereof

Technical Field

The embodiment of the invention relates to the technical field of semiconductor microelectronics, in particular to a detection device and a detection method thereof.

Background

An Ion Sensitive Field Effect Transistor (ISFET) is a microelectronic Ion selective sensor that combines electrochemical and transistor properties. The ISFET has the advantages of small sensitive area, fast response, high sensitivity, low output impedance, less sample consumption, easy batch manufacturing, low cost and the like, and is applied to clinical, food, environmental, military and even robot aspects, and especially plays an increasingly important role in the field of biochemical sensors.

The existing ISFET utilizes a surface treatment technology to enable a sensitive membrane of the ISFET to adsorb specific ions or molecules, the channel conductivity of the ISFET can be changed by the charged ions or molecules, and the concentration of the ions or molecules in a test solution can be indirectly obtained by monitoring the change of the channel conductivity of the ISFET through an external circuit. For example, in a substrate structure of a dual-gate ion sensitive field effect transistor for pH detection, when an ion sensitive layer is arranged on the surface of an ISFET and a device is immersed in a solution to be detected, the surface charge amount of the ion sensitive layer changes according to the difference/change of the concentration of hydrogen ions (H +), thereby affecting the threshold voltage of the ISFET. The pH value can be measured by testing the change of the threshold voltage or the output signal, and other corresponding ion concentrations of the surface liquid can be obtained by arranging different ion sensitive films on the surface according to a similar principle. In the prior art, the ISFET can be used for detecting pH, metal ions, blood sugar, genes, proteins and the like.

However, the conventional ISFET has the problems of poor stability and easy environmental influence, for example, the ISFET is influenced by environmental factors (such as illumination and temperature) and self characteristic fluctuation, the relative threshold voltage is easy to change, the output signal per se has large fluctuation and is difficult to calibrate, and the detection error is large.

Disclosure of Invention

The invention provides a detection device and a detection method thereof, which improve the detection precision of the detection device on the basis of avoiding the threshold voltage of a transistor from being influenced by the environment.

In a first aspect, an embodiment of the present invention provides a detection apparatus, including at least one detection unit, where the detection unit includes an ion sensitive film, a first electrode, a first capacitor, a second capacitor, a first transistor, a signal input terminal, a power supply terminal, and a current output terminal; the capacitance value of the first capacitor is larger than that of the second capacitor;

the ion sensitive film is covered on the first electrode, the first electrode is electrically connected with a first polar plate of the first capacitor, a second polar plate of the first capacitor, the first polar plate of the second capacitor and the grid electrode of the first transistor are electrically connected, and a second polar plate of the second capacitor is connected with the signal input end; the first pole of the first transistor is connected with the power supply end, and the second pole of the first transistor is connected with the current output end.

In a second aspect, an embodiment of the present invention further provides a detection method for a detection apparatus, which is applied to the detection apparatus according to any one of the first aspect, and the detection method includes:

supplying power to the first transistor through the power supply end, detecting a standard solution with known ion concentration by using the first electrode and the ion sensitive film to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to enable the first transistor to be conducted to generate an initial conduction current;

supplying power to the first transistor through the power supply end, detecting a solution to be detected by using the first electrode and the ion sensitive film to generate a detection ion sensitive signal, and adjusting a detection voltage input by the signal input end to enable the first transistor to be conducted, wherein the conduction current is an initial conduction current;

determining the variation of the input voltage according to the initial voltage and the detection voltage;

determining the ion sensitive signal variation between the initial ion sensitive signal and the detected ion sensitive signal according to the variation of the input voltage and the capacitance value ratio of the first capacitor to the second capacitor;

and calculating the ion concentration of the solution to be detected according to the ion sensitive signal variation, the ion concentration of the standard solution and the relation between the known ion sensitive signal and the solution ion concentration.

The embodiment of the invention provides a detection device, which comprises at least one detection unit, wherein the detection unit comprises an ion sensitive film, a first electrode, a first capacitor, a second capacitor, a first transistor, a signal input end, a power supply end and a current output end. Specifically, the ion sensitive film is covered on a first electrode, the first electrode is electrically connected with a first polar plate of a first capacitor, a second polar plate of the first capacitor, the first polar plate of a second capacitor and a grid electrode of a first transistor are electrically connected, and a second polar plate of the second capacitor is connected with a signal input end; the first pole of the first transistor is connected with the power supply end, and the second pole of the first transistor is connected with the current output end. The signal of connecting signal input end is adjusted through guaranteeing that current output end outputs stable current value promptly, can detect the liquid that awaits measuring based on the amplitude of adjustment. Meanwhile, the capacitance value of the first capacitor is larger than that of the second capacitor, and the signal connected with the signal input end is amplified, so that the detection device can detect the concentration of the liquid to be detected conveniently. On the basis of avoiding the threshold voltage of a transistor in the detection device from being influenced by the environment, the detection device is also ensured not to be influenced by the preparation process, and the detection precision of the detection device is improved.

Drawings

In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, a brief description is given below of the drawings used in describing the embodiments. It should be clear that the described figures are only views of some of the embodiments of the invention to be described, not all, and that for a person skilled in the art, other figures can be derived from these figures without inventive effort.

FIG. 1 is a schematic circuit diagram of a device for detecting pH value used in the related art;

FIG. 2 is a graph of the Ids-Vgs characteristics for the detection device of FIG. 1;

FIG. 3 is a schematic structural diagram of a detecting device according to an embodiment of the present invention;

FIG. 4 isbase:Sub>A cross-sectional view of the detecting unit shown in FIG. 3 along line A-A';

FIG. 5 isbase:Sub>A schematic cross-sectional view of the detecting unit shown in FIG. 3 along line A-A';

FIG. 6 is a circuit diagram of a detecting unit according to an embodiment of the present invention;

FIG. 7 is a circuit diagram of another detecting unit according to an embodiment of the present invention;

FIG. 8 is a graph of the Ids-Vgs characteristics for the detection device of FIG. 7;

FIG. 9 is a circuit diagram of another detecting unit according to an embodiment of the present invention;

FIG. 10 is a schematic structural diagram of another detecting device provided in the embodiment of the present invention;

FIG. 11 is a schematic structural diagram of another detecting device provided in the embodiment of the present invention;

FIG. 12 isbase:Sub>A schematic cross-sectional view of the detecting unit shown in FIG. 3 along the section line A-A';

FIG. 13 is a schematic flow chart of a detection method according to an embodiment of the present invention;

FIG. 14 is a schematic flow chart of another detection method provided by the embodiment of the invention;

FIG. 15 is a schematic flow chart of another detection method provided by the embodiment of the invention;

fig. 16 is a schematic flow chart of another detection method according to an embodiment of the present invention.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings, not all of them.

In the related art, as shown in fig. 1, fig. 1 is a schematic circuit structure diagram of a device used in the related art for detecting pH, and the operating principle of the circuit of the dual-gate ion sensitive field effect transistor used for pH detection in fig. 1 is as follows: in the figure, the point P 'is a potential point to be detected, the potential of the point P is affected by the ion concentration of the reference electrode (usually grounded) and the solution to be detected, and the potential of the point P' is used as a top gate of the ISFET device 00 'to modulate the threshold voltage Vth'. In the detection process, corresponding to the Vgs voltage of the device 00' being scanned, the characteristic curve of the current output by the detection device 00' can be obtained, as shown in fig. 2, fig. 2 is an Ids-Vgs characteristic curve corresponding to the detection device in fig. 1, a curve L1 corresponds to a solution with a pH value of 5, a curve L2 corresponds to a solution with a pH value of 6, and a curve L3 corresponds to a solution with a pH value of 7, when the ion concentration (as shown in fig. 2, each curve represents a different pH value), the potential at the P ' point changes by Δ Vp ', the threshold voltage Vth ' of the device 00' (as shown in Vth1', vth2', and Vth3' in fig. 2) changes by Δ Vth ', Δ Vth ' = Δ Vp ' × Cis/Cbg, cis is the capacitance of the top gate insulating layer of the device 00', and Cbg is the capacitance of the bottom gate insulating layer of the device 00', so that the corresponding characteristic curve changes, and the same current I0 (as shown in dashed line in fig. 2) changes by Δ Vth '. Therefore, the change in ion concentration can be finally obtained from the change value of the potential at the point P'. However, since the self characteristics of the ISFET are affected by various factors such as environment and process, the output signal itself has large fluctuation, and needs to be calibrated before each detection, which is not beneficial for batch use, and even if the ISFET is calibrated before detection, the detection result is not reliable enough.

In order to solve the above technical problem, an embodiment of the present invention provides a detection apparatus, including at least one detection unit, where the detection unit includes an ion sensitive film, a first electrode, a first capacitor, a second capacitor, a first transistor, a signal input terminal, a power supply terminal, and a current output terminal; the capacitance value of the first capacitor is larger than that of the second capacitor; the ion sensitive film is covered on a first electrode, the first electrode is electrically connected with a first polar plate of a first capacitor, a second polar plate of the first capacitor, the first polar plate of a second capacitor and a grid electrode of a first transistor are electrically connected, and a second polar plate of the second capacitor is connected with a signal input end; the first pole of the first transistor is connected with the power supply end, and the second pole of the first transistor is connected with the current output end. The signal connected with the signal input end is adjusted by ensuring that the current output end outputs a stable current value, and the liquid to be detected can be detected based on the adjustment amplitude. Meanwhile, the capacitance value of the first capacitor is larger than that of the second capacitor, so that the signal connected with the signal input end can be amplified, and the detection device can be used for detecting the concentration of the liquid to be detected. On the basis of avoiding the threshold voltage of a transistor in the detection device from being influenced by the environment, the detection device is also ensured not to be influenced by the preparation process, and the detection precision of the detection device is improved.

The above is the core idea of the present invention, and the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present invention without any creative work belong to the protection scope of the present invention.

Fig. 3 isbase:Sub>A schematic structural diagram ofbase:Sub>A detection apparatus according to an embodiment of the present invention, fig. 4 isbase:Sub>A schematic structural diagram ofbase:Sub>A cross section of the detection apparatus provided in fig. 3 alongbase:Sub>A section linebase:Sub>A-base:Sub>A ', fig. 5 isbase:Sub>A schematic structural diagram of another cross section of the detection apparatus provided in fig. 3 alongbase:Sub>A section linebase:Sub>A-base:Sub>A', fig. 6 isbase:Sub>A schematic circuit diagram ofbase:Sub>A detection unit provided in an embodiment of the present invention, referring to fig. 3 to fig. 6, the detection apparatus 10 provided in an embodiment of the present invention includes at least one detection unit 100, the detection unit 100 includes an ion sensitive film 110,base:Sub>A first electrode 120,base:Sub>A first capacitor C1,base:Sub>A second capacitor C2, andbase:Sub>A first transistor 130, and further includesbase:Sub>A signal input terminal Vx,base:Sub>A power supply terminal Vd, andbase:Sub>A current output terminal Id; the capacitance value of the first capacitor C1 is larger than that of the second capacitor C2; the ion sensitive film 110 covers the first electrode 120, the first electrode 120 is electrically connected with the first plate 141 of the first capacitor C1, the second plate 142 of the first capacitor C1, the first plate 143 of the second capacitor C2 and the gate 131 of the first transistor 130 are electrically connected, and the second plate 144 of the second capacitor C2 is connected with the signal input terminal Vx; the first pole 132 of the first transistor 130 is connected to the power supply terminal Vd, and the second pole 133 is connected to the current output terminal Id.

The detection device 10 can be used to detect the concentration of a liquid to be detected (not specifically shown in the figure) dropped into the detection device 10. Specifically, the detecting device 10 includes at least one detecting unit 100, and the number of the detecting units 100 is not particularly limited in the embodiment of the present invention. The detection unit 100 realizes the judgment of the hydrogen ion concentration in the liquid to be detected, namely the judgment of the pH value, through the detection unit 100 based on the acquisition of the hydrogen ion concentration in the liquid to be detected and the feedback of the corresponding electric signal, so as to realize the judgment of the concentration of the liquid to be detected and realize the detection function of the detection device 10.

Specifically, the detection unit 100 includes an ion sensitive membrane 110, and the liquid to be detected by the detection device 10 is dropped onto the ion sensitive membrane 110, and the ion sensitive membrane 110 can generate a corresponding signal based on the concentration of hydrogen ions in the liquid to be detected. Referring to fig. 4 and 5, the ion sensitive membrane 110 covers the first electrode 120, that is, a signal to be detected generated when the liquid to be detected is placed on the ion sensitive membrane 110 is transmitted to the first electrode 120 through the ion signal terminal Vp and transmitted to the detection unit 100 through the first electrode 120, so that the detection device 10 obtains the concentration of hydrogen ions in the liquid to be detected.

Further, referring to fig. 4 to fig. 6, the detecting unit 100 further includes a first capacitor C1 and a second capacitor C2, wherein the first plate 141 of the first capacitor C1 is electrically connected to the first electrode 120, that is, the first capacitor C1 obtains a signal to be detected generated on the ion sensitive membrane 110 through the first electrode 120. Meanwhile, the second plate 144 of the second capacitor C2 is connected to the signal input terminal Vx, and the signal input terminal Vx inputs an adjustable signal, that is, the second capacitor C2 obtains an adjustable signal that can be adjusted. Specifically, the detection unit 100 further includes a first transistor 130, and a gate 131 of the first transistor 130 is electrically connected to a second plate 142 of the first capacitor C1 and a first plate 143 of the second capacitor C2, that is, both the signal to be measured acquired by the first capacitor C1 and the adjustable signal acquired by the second capacitor C2 are transmitted to the first transistor 130, and then a channel of the gate 131 in the first transistor 130 is turned on, so as to allow the transmission of current between the first pole 132 and the second pole 133 in the first transistor 130.

Further, a first pole 132 of the first transistor 130 is connected to the power supply terminal Vd, a second pole 133 is connected to the current output terminal Id, and the gate 131 of the first transistor 130 is turned on by the received signal to be measured acquired by the first capacitor C1 and the adjustable signal acquired by the second capacitor C2, that is, the first pole 132 and the second pole 133 are turned on, so that the current output by the power supply terminal Vd is transmitted to the current output terminal Id. Specifically, the first pole 132 and the second pole 133 in the first transistor 130 may be a source and a drain, and specific references are not limited in this embodiment of the invention.

Specifically, in order to ensure accurate detection of the solution to be detected, that is, to avoid that the threshold voltage of the first transistor 130 is affected by the concentration of hydrogen ions in the solution to be detected, which is detected by the ion sensitive layer 110, so as to cause an error in the detection result of the detection unit 10, or the detection result of the first transistor 130 is affected by the preparation process to cause an inaccuracy, the detection device 10 does not directly contact the first transistor 130 with the ion sensitive layer 110, and ensures that the first transistor 130 is always in the same stable state by adjusting the adjustable signal input by the signal input terminal Vx, that is, ensures that the current output terminal Id electrically connected to the second electrode 133 always outputs a fixed current. Meanwhile, the ion sensitive membrane 110 generates a corresponding signal to reflect the concentration of the hydrogen ions based on the concentration of the hydrogen ions in the liquid to be measured, i.e. the signal is a fixed signal. Therefore, the detection of the detection device 10 on the hydrogen ion concentration of the liquid to be detected can be realized by feeding back the signal to be detected generated by the ion sensitive membrane 110, namely feeding back the hydrogen ion concentration of the liquid to be detected, based on the adjustment range of the adjustable signal input to the signal input end Vx. For the prior art, the concentration of hydrogen ions in a solution to be detected is indirectly obtained through the change of the threshold voltage of a transistor, and because the characteristics of the transistor are influenced by various factors such as environment, process and the like, the output signal per se has large fluctuation, the output signal needs to be calibrated before each detection, the batch use is not facilitated, and even if the output signal is calibrated before the detection, the detection result is not reliable enough. However, the detection apparatus 10 provided in the embodiment of the present invention may ensure the stability of the first transistor 130, and does not obtain the hydrogen ion concentration of the solution to be detected based on the threshold voltage, and under the condition that the first transistor 130 is ensured to operate stably, the concentration of the hydrogen ion in the solution to be detected may be directly determined by obtaining the adjustable signal, that is, the input signal of the signal input terminal Vx, so as to avoid the influence of indirect factors, and thus the accuracy of detection by the detection apparatus 10 may be improved.

Specifically, based on the first capacitor C1, the second capacitor C2, and the signal input terminal Vx, the adjustable signal and the signal to be measured Vp generated on the ion sensitive membrane 110 are input, in order to ensure that the current output terminal Id always outputs a fixed current, the formula is satisfied: Δ Vx =Δvp × C1/C2, where Δ Vp is a change value of a signal to be detected, that is, a hydrogen ion concentration of a liquid to be detected, which needs to be detected, Δ Vx is a change amount of an adjustable signal, and C1 and C2 represent capacitance values in the first capacitor C1 and the second capacitor C2. Further, the change value and the change amount of the signal are based on the difference between the signal generated by the detection device 10 performing the detection of the standard solution before the detection of the liquid to be detected and the detection of the liquid to be detected, the signal generated by the standard solution is used as a calibration value, and the hydrogen ion concentration of the standard solution is known. Namely, the hydrogen ion concentration of the liquid to be detected can be obtained by obtaining the variable quantity of the adjustable signal, and the detection device 10 can discharge error factors which may exist in the first transistor 130 and affect the detection precision, so as to ensure the accuracy of the detection result.

Furthermore, the capacitance value of the first capacitor C1 is greater than the capacitance value of the second capacitor C2, based on the above calculated formula, it can be ensured that the change value of the signal to be detected is amplified, and the amplification factor is the capacitance value ratio between the capacitance value of the first capacitor C1 and the capacitance value of the second capacitor C2, that is, the detection result is amplified by adjusting the capacitance value of the capacitor, so that the accuracy and precision of the detection result of the detection apparatus 10 can be further improved.

To sum up, in the detection device provided by the embodiment of the present invention, the ion sensitive film is covered on the first electrode, the first electrode is electrically connected to the first electrode plate of the first capacitor, the second electrode plate of the first capacitor, the first electrode plate of the second capacitor and the gate of the first transistor are electrically connected, and the second electrode plate of the second capacitor is connected to the signal input end; the first pole of the first transistor is connected with the power supply end, and the second pole of the first transistor is connected with the current output end. The signal of connecting signal input end is adjusted through guaranteeing that current output end outputs stable current value promptly, can detect the liquid that awaits measuring based on the amplitude of adjustment. Meanwhile, the capacitance value of the first capacitor is larger than that of the second capacitor, and the signal connected with the signal input end is amplified, so that the detection device can detect the concentration of the liquid to be detected conveniently. On the basis of avoiding the threshold voltage of a transistor in the detection device from being influenced by the environment, the detection device is also ensured not to be influenced by the preparation process, and the detection precision of the detection device is improved.

Fig. 7 is a schematic circuit diagram of another detection unit according to an embodiment of the present invention, fig. 8 is a graph showing Ids-Vgs characteristics of the detection device in fig. 7, and referring to fig. 7 and fig. 8, the detection unit 100 further includes a second transistor 150, a fixed potential signal terminal Vref, and a reset control signal terminal Vrst; the gate 151 of the second transistor 150 is connected to the reset control signal terminal Vrst, the first pole 152 of the second transistor 150 is connected to the fixed potential signal terminal Vref, and the second pole 153 of the second transistor 150 is connected to the gate 131 of the first transistor 130.

Specifically, the detection unit 100 further includes a second transistor 150, and the second transistor 150 includes a gate 151, a first pole 152, and a second pole 153, which are a source and a drain. And, the second pole 153 of the second transistor 150 is connected to the gate 131 of the first transistor 130, i.e. the second transistor 150 provides the gate voltage to the gate 131 of the first transistor 130. Specifically, the gate 151 of the second transistor 150 is connected to the reset control signal terminal Vrst, the first pole 152 of the second transistor 150 is connected to the fixed potential signal terminal Vref, that is, the reset control signal terminal Vrst outputs a complex signal to the second transistor 150, the gate 151 of the second transistor 150 is turned on by receiving the complex signal, that is, the first pole 152 and the second pole 153 are turned on and transmit a fixed signal from the fixed potential signal terminal Vref, and the fixed signal transmitted in the second transistor 150 is transmitted to the first transistor 130 through the second pole 153.

Further, the detecting unit 10 includes a calibration stage and a detection stage, in the detection stage, the hydrogen ion concentration of the liquid to be detected is detected, and the calibration stage calibrates the current output by the current output terminal Id in the first transistor 130 to the current output when the gate voltage is in the sub-threshold region. Specifically, by adding the second transistor 150, a fixed potential can be provided to the gate of the first transistor 130, so as to control the gate-source voltage of the first transistor 130 to be in the sub-threshold interval of the transistor, that is, it can be ensured that the first transistor 130 operates in the sub-threshold interval, and at this time, the current output by the current output terminal Id is the calibration current, so that, in the test stage, the current output by the current output terminal Id is the calibration current by adjusting the signal input by the signal input terminal Vx, and it can be ensured that the first transistor 130 operates in the sub-threshold interval. Exemplarily, referring to fig. 8, the abscissa is a voltage difference between the gate 131 and the source in the first transistor 130, i.e., a voltage difference between the gate 131 and the first electrode 132, i.e., the source, and the ordinate is a current output by the current output terminal Id. As shown in fig. 8, when the voltage is in the subthreshold range, i.e., the region between Vgs1 and Vgs2 in the figure, the current output by the current output terminal Id has a large variation range, i.e., the current is significantly influenced by the voltage in this region. The second transistor 150 transmits the fixed signal transmitted by the fixed potential signal terminal Vref to the first transistor 130, and adjusts the voltage value in the first transistor 130 to a certain potential within a sub-threshold interval (the specific potential is not limited in the embodiment of the present invention), so that it can be ensured that the current output by the first transistor 130 is obviously affected by the voltage, and thus the calibration current determined in the calibration stage can be output by controlling the current output terminal Id in the test stage, the accuracy of the signal input by the signal input terminal Vx is ensured, that is, the signal can be accurately converted into the variation of the signal to be detected, and the variation of the hydrogen ion concentration of the liquid to be detected is determined, so that the detection sensitivity of the detection device 10 can be improved, and the detection accuracy of the detection device 10 is improved.

Fig. 9 is a circuit schematic diagram of another detection unit according to an embodiment of the present invention, and referring to fig. 9, the detection unit 100 further includes a third transistor 160 and a scan signal terminal Vgn; a gate 161 of the third transistor 160 is connected to the scan signal terminal Vgn, and a first pole 162 of the third transistor 160 and a second pole 163 of the third transistor 160 are connected to the second pole 133 of the first transistor 130 and the current output terminal Id, respectively.

Specifically, the detection unit 100 further includes a third transistor 160, the third transistor 160 includes a gate 161, a first pole 162 and a second pole 163, and the first pole 162 of the third transistor 160 and the second pole 163 of the third transistor 160 are respectively connected to the second pole 133 of the first transistor 130 and the current output terminal Id, that is, it is ensured that the third transistor 160 is turned on and the current is output when the first transistor 130 is turned on, and the third transistor 160 is turned on and the second pole 133 of the first transistor 130 and the current output terminal Id are turned on, so that the current output by the first transistor 130 at the current output terminal Id is satisfied.

Further, the gate 161 of the third transistor 160 is connected to the scan signal terminal Vgn, that is, the scan signal terminal Vgn transmits a scan signal to the gate 161 of the third transistor 160, that is, the gate 161 is turned on, and then the third transistor 160 is turned on, so that the first transistor 130 is enabled to normally output a current at the current output terminal Id.

Illustratively, when the detection device 10 has a plurality of detection units 100, the third transistor 160 is arranged, and the third transistor 160 is controlled to be turned on and off, so that time-sharing control over the plurality of detection units 100 is realized, the detection efficiency of the detection device 10 is further improved, and the detection device 10 is better suitable for detecting the liquid to be detected.

Fig. 10 is a schematic structural diagram of another detection apparatus provided in an embodiment of the present invention, and referring to fig. 10, the detection apparatus 10 includes a plurality of detection units 100 arranged in an array; the current output terminals Id of all the detecting units 100 are connected to each other, the signal input terminals Vx of all the detecting units 100 are connected to each other, the power supply terminals Vd of the plurality of detecting units 100 in the same column are connected to each other, and the scanning signal terminals Vgn of the plurality of detecting units 100 in the same row are connected to each other.

Specifically, referring to fig. 10, the detecting device 10 includes a plurality of detecting units 100 arranged along rows and columns, and the specific arrangement manner of the detecting units 100 is not specifically limited in the embodiment of the present invention. In the detection apparatus 10 having a plurality of detection units 100, the signal input ends Vx of all the detection units 100 are connected with each other (not specifically shown in fig. 10), so that the detection apparatus 10 can conveniently acquire and analyze an adjustable signal input by the signal input ends Vx, and accurately determine the hydrogen ion concentration of a solution to be detected.

Specifically, referring to fig. 10, the power supply terminals Vd of the detecting units 100 in the same column are connected to each other, and the scan signal terminals Vgn of the detecting units 100 in the same row are connected to each other, which facilitates the step-by-step control of the detecting apparatus 10 on the detecting units 100, and improves the detecting accuracy of the detecting apparatus 10. Furthermore, in this embodiment, the current output terminals Id of the detection units in the same column are connected to the same current output trace, and then the current output traces of the detection units 100 in each column are connected to the same total current output trace, so that the output of the currents of all the detection units 10 can be realized by only one port, thereby reducing the current output ports, simplifying the complexity of the receiving device, and improving the integration level of the receiving device.

For example, referring to fig. 10, if the first row of the scan signal terminals Vgn (1) is turned on, the scan signal is provided to the detection unit 100 in the row. In the plurality of detection units 100 connected to the first row scanning signal terminal Vgn (1), if the current output terminal Id of the detection unit 100 of which the first column power supply terminal Vd (1) is turned on among the power supply terminals Vd outputs a current, the current output terminal Id of the detection unit 100 of which the second column power supply terminal Vd (2) is not turned on among the power supply terminals Vd outputs no current. Meanwhile, the second line of scan signal terminals Vgn (2) in the scan signal terminals Vgn is not turned on, and no scan signal is provided to the detection unit 100 in the line, so that the current output terminal Id of the detection unit 100 does not output a current. In other words, when the scanning signal terminal Vgn and the power supply terminal Vd of the detection unit 100 are both turned on, the current output terminal Id of the detection unit 100 outputs a current, the adjustable signal input from the signal input terminal Vx is adjusted according to the output current value, the current value is ensured to be an expected calibration value, and the concentration of hydrogen ions in the liquid to be measured is determined according to the adjusted adjustable signal. Based on the above-mentioned detecting unit 100 and the setting mode of terminal, detecting unit 100 that realizes different positions department among the detection device 10 realizes that timesharing subregion carries out the detection of the liquid that awaits measuring one by one, promotes detecting device 10's detection accuracy, avoids appearing need not to detect the department and leads to detecting unit 100 to carry out the extravagant phenomenon of work simultaneously.

Fig. 11 is a schematic structural diagram of another detection apparatus provided in an embodiment of the present invention, and referring to fig. 11, the detection apparatus 10 includes a plurality of detection units 100 arranged in an array; the power supply terminals Vd of all the detecting units 100 are connected to each other, the signal input terminals Vx of all the detecting units 100 are connected to each other, the current output terminals Id of a plurality of detecting units 100 in the same column are connected to each other, and the scanning signal terminals Vgn of a plurality of detecting units 100 in the same row are connected to each other.

Specifically, referring to fig. 11, the detecting device 10 includes a plurality of detecting units 100 arranged in rows and columns, and the specific arrangement of the detecting units 100 is not specifically limited in the embodiment of the present invention. In the detecting device 10 having a plurality of detecting units 100, the signal input ends Vx of all the detecting units 100 are connected with each other (not specifically shown in fig. 11), so that the detecting device 10 can conveniently obtain and analyze an adjustable signal input by the signal input ends Vx, and accurately judge the hydrogen ion concentration of the solution to be detected.

Specifically, referring to fig. 11, the current output terminals Id of the plurality of detecting units 100 in the same column are connected to each other, and the scanning signal terminals Vgn of the plurality of detecting units 100 in the same row are connected to each other, which facilitates the control of the detecting apparatus 10 on the plurality of detecting units 100 in a row by row, and improves the detecting accuracy and the detecting efficiency of the detecting apparatus 10. Furthermore, in this embodiment, the power supply terminals Vd of the detection units in the same row are connected to the same power supply line, and then the power supply terminals Vd of the detection units 100 in each row are connected to the same main power supply output line, so that power supply of all the detection units 10 can be realized by only one port, thereby reducing the output ports for power supply, simplifying the complexity of the receiving device, and improving the integration level of the receiving device.

Illustratively, referring to fig. 11, the power supply terminals Vd of all the detecting units 100 are connected to each other, i.e., the power supply terminals Vd continuously supply power to the detecting units 100. If the first row of the scan signal terminals Vgn (1) is turned on, the scan signal is provided to the detecting unit 100 in the row, that is, the current output terminal Id of the detecting unit 100 in the row outputs a current. Meanwhile, the second line of scan signal terminals Vgn (2) in the scan signal terminals Vgn is not turned on, and no scan signal is provided to the detection unit 100 in the line, so that the current output terminal Id of the detection unit 100 does not output a current. In other words, in a case that the power supply terminal Vd of the detection unit 100 is turned on, if the scanning signal terminal Vgn provides a scanning signal, the current output terminal Id of the detection unit 100 outputs a current, the adjustable signal input to the signal input terminal Vx is adjusted according to the output current value, the current value is ensured to be an expected calibration value, and the concentration of hydrogen ions in the liquid to be measured is determined according to the adjusted adjustable signal. Based on the above-mentioned detecting element 100 and the setting mode of terminal, detecting element 100 that realizes different position rows among the detection device 10 realizes that the line by line of timesharing subregion carries out the detection of the liquid that awaits measuring, promotes detecting device 10's detection accuracy, avoids appearing need not to detect the department and leads to detecting element 100 to carry out the extravagant phenomenon of work simultaneously.

Further, referring to fig. 4 and 5, the area of the first capacitor C1 is larger than that of the second capacitor C2.

Specifically, referring to fig. 4 and 5, in a direction parallel to the detection unit 100, a size of the first plate 141 and the second plate 142 in the first capacitor C1 is L1, a size of the first plate 143 and the second plate 144 in the second capacitor C2 is L2, and L1 is greater than L2. Based on the adjustment of the relative size of the capacitor substrate, the adjustment of the size of the capacitor is realized, namely the capacitance value of the first capacitor C1 is larger than that of the second capacitor C2, and further the change value of the signal to be detected is amplified. The accuracy of the detection result of the detection device 10 is improved.

With continued reference to fig. 4 and 5, the insulating

dielectric layers

145 and 146 in the first capacitor C1 and the second capacitor C2 are formed in the same layer and using the same material.

The insulating dielectric layer 145 in the first capacitor C1 and the insulating dielectric layer 146 in the second capacitor C2 are disposed in the same layer, that is, the distance between the first plate 141 and the second plate 142 in the first capacitor C1 is the same as the distance between the first plate 143 and the second plate 144 in the second capacitor C2, so as to avoid the capacitance adjustment caused by the distance problem. Further, the insulating

dielectric layers

145 and 146 are prepared in the same layer, so that the thickness of the detection unit 100 can be reduced, and the thin design of the detection device 10 can be realized. Meanwhile, the insulating

dielectric layers

145 and 146 can be made of the same material, so that the process cost for manufacturing the detection unit 100 is reduced.

With continued reference to fig. 4 and 5, the first and

second electrodes

132 and 133 of the first transistor 130, the first plate 141 of the first capacitor C1, and the second plate 144 of the second capacitor C2 are formed in the same layer and made of the same material. That is, by performing the same layer preparation on the film layers in the first transistor 130 and the first capacitor C1, the thickness of the detection unit 100 can be reduced, and the thin design of the detection device 10 can be realized. Furthermore, when the layered film is prepared, the same material is used for preparation, that is, the process cost for preparing the detection unit 100 is reduced.

With continued reference to fig. 4 and 5, the detection cell 100 further includes a substrate 170; the first transistor 130, the first capacitor C1 and the second capacitor C2 are located on the substrate 170, and vertical projections of the first transistor 130, the first capacitor C1 and the second capacitor C2 on the substrate 170 do not overlap each other; the first electrode 120 is located on a side of the first transistor 130, the first capacitor C1, and the second capacitor C2 away from the substrate 170, and the ion sensitive film 110 is located on a side of the first electrode 120 away from the first transistor 130, the first capacitor C1, and the second capacitor C2.

The detection unit 100 further includes a substrate 170, vertical projections of the first transistor 130, the first capacitor C1, and the second capacitor C2 disposed on the substrate 170 are not overlapped with each other, and the same-layer arrangement of the first capacitor C1, the second capacitor C2, and the first transistor 130 is realized by ensuring that the first transistor, the first capacitor C1, and the second capacitor C2 are not overlapped with each other. On this basis, the first electrode 120 and the ion sensitive membrane 110 included in the detection unit 100 are both located on the side of the first transistor 130, the first capacitor C1, and the second capacitor C2 away from the substrate 170, so as to ensure that the detection unit 100 detects the liquid to be detected.

With continued reference to fig. 4 and 5, the gate 131 of the first transistor 130 is multiplexed into the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2; the vertical projections of the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2 on the substrate 170 do not overlap each other.

Specifically, referring to fig. 4, the gate 131 in the first transistor 130 is multiplexed into the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2, i.e., the process cost of manufacturing the detection unit 100 is reduced. Meanwhile, the vertical projections of the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2 on the substrate 170 are not overlapped with each other, so that the same layer arrangement of the first capacitor C1 and the second capacitor C2 is ensured, which is beneficial to realizing the thin design of the detection unit 100.

Further, referring to fig. 5, the gate 131 of the first transistor 130, the second plate 142 of the first capacitor C1, and the first plate 143 of the second capacitor C2 are designed in the same layer, which can also reduce the process cost when the detection unit 100 is manufactured.

With continued reference to fig. 4 and 5, the sensing unit 100 further includes an organic insulating layer 180, the organic insulating layer 180 being located between the first electrode 120 and the first transistor 130.

Specifically, referring to fig. 5, the detection unit 100 further includes an organic insulating layer 180 between the first electrode 120 and the first transistor 130, where the organic insulating layer 180 may increase a distance between the first electrode 120 and the first transistor 130, that is, increase a distance between the ion sensitive layer 110 and the first transistor 130, ensure that the first transistor 130 is not affected by a concentration of hydrogen ions in the liquid to be detected, and ensure that the first transistor 130 has a threshold voltage, that is, the stability of the detection unit 100 is improved, and the organic insulating layer 180 is combined with a preparation process thereof, so that a thicker film is easily prepared. Further, by adding the organic insulating layer 180, the flatness of the entire detection unit 100 can be improved. Illustratively, referring to fig. 4, an inorganic insulating layer 181 may be further disposed between the first electrode 120 and the organic insulating layer 180, so as to ensure the overall flatness of the detecting unit 100 and improve the stability of the detecting unit 100.

With continued reference to fig. 4 and 5, the first transistor 130 is a top gate type or a bottom gate type transistor.

Here, as shown in fig. 4, the first transistor 130 is a bottom gate transistor, or as shown in fig. 5, the first transistor 130 is a top gate transistor. That is, the detection unit 300 provided in the embodiment of the present invention can be implemented in different types of the first transistors 130, so that the detection unit 300 can detect the hydrogen ion concentration of the liquid to be detected.

Fig. 12 isbase:Sub>A schematic cross-sectional view of the detecting apparatus provided in fig. 3 alongbase:Sub>A sectional linebase:Sub>A-base:Sub>A', and referring to fig. 4, 5 and 12, the active layer 135 of the first transistor 130 is any one of an oxide semiconductor with an etch stop structure, an oxide semiconductor withbase:Sub>A back channel etch structure, amorphous silicon orbase:Sub>A low temperature polysilicon structure.

The first transistor 130 in the detection unit 100 further includes an active layer 135, and the type of the active layer 135 has diversity. Illustratively, referring to fig. 12, the first transistor 130 includes

active layers

135 and 136, that is, the active layer 135 in the first transistor 130 is an oxide semiconductor with an etch-stop structure; referring to fig. 4, the active layer 135 of the first transistor 130 is an oxide semiconductor with a back channel etch type structure; referring to fig. 5, the active layer 135 of the first transistor 130 is a back channel etch type structure oxide semiconductor. That is, different types of active layers 135 in the first transistor 130 can implement the detection unit 300 provided in the embodiment of the present invention, so that the detection unit 300 can detect the hydrogen ion concentration of the liquid to be detected.

Based on the same inventive concept, an embodiment of the present invention further provides a detection method of a detection apparatus, and fig. 13 is a schematic flow chart of the detection method provided in the embodiment of the present invention, as shown in fig. 13, the detection method includes:

s110, supplying power to the first transistor through the power supply end, detecting the standard solution with known ion concentration by using the first electrode and the ion sensitive film to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to enable the first transistor to be conducted to generate an initial conduction current.

The detection device can be used for detecting the concentration of the liquid to be detected which is dripped into the detection device, and the detection device comprises at least one detection unit. The detection unit realizes the judgment of the concentration of the hydrogen ions in the liquid to be detected, namely the pH value judgment, through the detection unit based on the acquisition of the concentration of the hydrogen ions in the liquid to be detected and the feedback of corresponding electric signals, so that the judgment of the concentration of the liquid to be detected is realized, and the detection function of the detection device is realized. Furthermore, the detection unit comprises an ion sensitive film, a first electrode, a first capacitor, a second capacitor, a first transistor, a signal input end, a power supply end, a current output end and the like.

Specifically, the first transistor is supplied with power through the power supply terminal and is configured to output an initial on-current when the first transistor is turned on. Meanwhile, the first electrode and the ion sensitive membrane detect a standard solution with known ion concentration to generate an initial ion sensitive signal, namely, an ion sensitive signal for referencing the concentration of particles in subsequent liquid to be detected is generated, and an initial voltage is input to a signal input end. The first transistor is conducted by inputting an initial ion sensitive signal and an initial voltage to the grid electrode of the first transistor, and meanwhile, the power supply terminal supplies power to the first transistor and outputs an output initial conducting current for realizing the initial conducting current.

And S120, supplying power to the first transistor through the power supply end, detecting the solution to be detected by using the first electrode and the ion sensitive film, generating a detection ion sensitive signal, and adjusting the detection voltage input by the signal input end to enable the first transistor to be conducted, wherein the conduction current is the initial conduction current.

Furthermore, the solution to be detected is placed in a detection device, so that the hydrogen ion concentration in the solution to be detected is detected. Specifically, the ion sensitive membrane is in contact with the liquid to be detected, and the generated detection ion sensitive signal, namely the signal to be detected, is transmitted into the detection unit through the first electrode, so that the detection unit can acquire the concentration of hydrogen ions in the liquid to be detected. Furthermore, the detection voltage input through the signal input end can be used for adjusting the signal, and the detection voltage and the ion sensitive signal are transmitted to the grid electrode of the first transistor to ensure that the first transistor is conducted. And the first transistor is ensured to continuously output stable initial conduction current by adjusting the detection voltage input by the signal input end.

And S130, determining the variation of the input voltage according to the initial voltage and the detection voltage.

The initial voltage is a voltage value input by a signal input end which is initially ensured to be conducted by the first transistor, the detection voltage is a signal which is adjusted by the signal input end by an adjustable signal, the first transistor is ensured to continuously output stable initial conduction current by the detection voltage, and the voltage variation input by the signal input end is determined based on the difference value of the initial voltage and the detection voltage.

And S140, determining the ion sensitive signal variation between the initial ion sensitive signal and the detected ion sensitive signal according to the variation of the input voltage and the capacitance value ratio of the first capacitor to the second capacitor.

The ion sensitive signal variation can be determined based on the voltage variation input by the signal input end and the capacitance value ratio of the first capacitor and the second capacitor, namely the difference value of the hydrogen ion concentration in the liquid to be detected and the standard solution with the known ion concentration is determined. I.e. based on the formula: Δ Vx =Δvp × C1/C2, where Δ Vp is a change value of a signal to be detected, that is, a change amount of an ion sensitive signal, that is, a change amount of an adjustable signal, that is, a voltage change amount input at a signal input end, and C1 and C2 represent capacitance values in the first capacitor C1 and the second capacitor C2. Based on the formula, the ion sensitive signal variation can be accurately determined.

S150, calculating the ion concentration of the solution to be detected according to the ion sensitive signal variation, the ion concentration of the standard solution and the known relationship between the ion sensitive signal and the ion concentration of the solution.

The ion concentration of the standard solution is the ion concentration obtained by the detection device before the liquid to be detected is detected, and the ion sensitive signal in the actual liquid to be detected can be determined based on the ion sensitive signal variation. The concentration of hydrogen ions in the liquid to be detected, namely the ion concentration of the liquid to be detected at the detection position of the detection device can be obtained through calculation by combining the known relation between the ion sensitive signal and the solution ion concentration.

In summary, the detection method of the detection device provided by the embodiment of the invention adjusts the signal connected to the signal input end by ensuring that the current output end outputs a stable current value, and can detect the liquid to be detected based on the adjusted amplitude. On the basis of avoiding the threshold voltage of a transistor in the detection device from being influenced by the environment, the detection device is also ensured not to be influenced by the preparation process, and the detection precision of the detection device is improved.

Based on the same inventive concept, an embodiment of the present invention further provides another detection method of a detection apparatus, fig. 14 is a schematic flow chart of the another detection method provided by the embodiment of the present invention, and as shown in fig. 14, the detection method includes:

s210, supplying power to the first transistor through the power supply end, detecting the standard solution with known ion concentration by using the first electrode and the ion sensitive film to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to enable the first transistor to be conducted to generate an initial conduction current.

S220, providing a reset signal to the fixed potential signal terminal, and providing a control start signal to the reset control signal terminal, so as to turn on the second transistor and the first transistor, and the on current of the first transistor is an initial on current.

Specifically, the detection unit further comprises a second transistor, a fixed potential signal terminal and a reset control signal terminal; and the grid of the second transistor is connected with the reset control signal end, the first pole is connected with the fixed potential signal end, and the second pole is connected with the grid of the first transistor. And the second pole of the second transistor is connected to the gate of the first transistor, i.e. the second transistor provides the gate voltage to the gate of the first transistor. Specifically, the gate of the second transistor is connected to the reset control signal terminal, the first pole of the second transistor is connected to the fixed potential signal terminal, that is, the reset control signal terminal outputs a complex signal to the second transistor, the gate of the second transistor is turned on by receiving the complex signal, that is, the first pole and the second pole are turned on and transmit the fixed signal sent by the fixed potential signal terminal, and the fixed signal transmitted in the second transistor is transmitted to the first transistor through the second pole.

Furthermore, the detection unit comprises a calibration stage and a detection stage, the hydrogen ion concentration of the liquid to be detected is detected in the detection stage, and the calibration stage is to calibrate the current output by the current output end in the first transistor and calibrate the current to be output when the grid voltage is in the sub-threshold range. Specifically, by adding the second transistor, a fixed potential can be provided for the gate of the first transistor, so as to control the gate-source voltage of the first transistor to be in a sub-threshold interval of the transistor, that is, to ensure that the first transistor works in the sub-threshold interval, and the current output by the current output end is the calibration current. When the voltage is within the subthreshold interval, the current output by the current output end has a large change range, namely the current is obviously influenced by the voltage in the region. The fixed signal transmitted by the fixed potential signal end is transmitted to the first transistor through the second transistor, and the voltage value in the first transistor is adjusted to a certain potential in a sub-threshold interval (the specific potential is not limited in the embodiment of the invention), so that the current output by the first transistor can be obviously influenced by the voltage, the calibration current determined in the calibration stage can be output by controlling the current output end in the test stage, the accuracy of the signal input by the signal input end is ensured, the variable quantity of the signal to be detected can be accurately converted, the change value of the hydrogen ion concentration of the liquid to be detected is determined, the detection sensitivity of the detection device can be improved, and the detection accuracy of the detection device is improved.

And S230, supplying power to the first transistor through the power supply end, detecting the solution to be detected by using the first electrode and the ion sensitive film, generating a detection ion sensitive signal, and adjusting the detection voltage input by the signal input end to enable the first transistor to be conducted, wherein the conduction current is the initial conduction current.

And S240, determining the variation of the input voltage according to the initial voltage and the detection voltage.

And S250, determining the ion sensitive signal variation between the initial ion sensitive signal and the detected ion sensitive signal according to the variation of the input voltage and the capacitance value ratio of the first capacitor to the second capacitor.

And S260, calculating the ion concentration of the solution to be detected according to the ion sensitive signal variation, the ion concentration of the standard solution and the known relationship between the ion sensitive signal and the ion concentration of the solution.

To sum up, in the detection method of the detection apparatus provided by the embodiment of the present invention, the second transistor, the fixed potential signal terminal and the reset control signal terminal are added, the reset signal is provided to the fixed potential signal terminal, and the control start signal is provided to the reset control signal terminal, so that the second transistor and the first transistor are turned on, and the on current of the first transistor is the initial on current. Based on the voltage, the current output by the first transistor can be obviously influenced by the voltage, so that the calibration current determined in the calibration stage can be output by controlling the current output end in the test stage, the accuracy of the signal input by the signal input end is ensured, the signal can be accurately converted into the variation of the signal to be detected, the variation value of the hydrogen ion concentration of the liquid to be detected is determined, the detection sensitivity of the detection device can be improved, and the detection accuracy of the detection device is improved.

Based on the same inventive concept, an embodiment of the present invention further provides another detection method of a detection apparatus, and fig. 15 is a schematic flow chart of the another detection method provided by the embodiment of the present invention, as shown in fig. 15, the detection method includes:

s310, supplying power to the first transistor through the power supply end, detecting the standard solution with known ion concentration by using the first electrode and the ion sensitive film to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to enable the first transistor to be conducted to generate an initial conduction current.

And S320, sequentially supplying power to the power supply ends in the detection units in each column, and sequentially supplying grid scanning signals to the scanning signal ends of the detection units in each row so as to sequentially start the detection units according to the row sequence and the column sequence.

Specifically, the detection unit further includes a third transistor and a scan signal terminal; the grid electrode of the third transistor is connected with a scanning signal end, and the first pole of the third transistor and the second pole of the third transistor are respectively connected with the second pole of the first transistor and the current output end; the detection device comprises a plurality of detection units arranged in an array; the current output ends of all the detection units are connected with each other, the signal input ends of all the detection units are connected with each other, the power supply ends of the detection units in the same column are connected with each other, and the scanning signal ends of the detection units in the same row are connected with each other.

Specifically, in this embodiment, the current output ends of the detection units in the same row are connected to the same current output line, and then the current output lines of the detection units in each row are connected to the same total current output line, so that the output of the currents of all the detection units can be realized by only one port, thereby reducing the current output ports, simplifying the complexity of the receiving device, and improving the integration level of the receiving device.

S330, detecting the solution to be detected by using the first electrode and the ion sensitive membrane in each started detection unit to generate a detection ion sensitive signal, and adjusting the detection voltage input by the signal input end to enable the first transistor in the currently started detection unit to be conducted, wherein the conduction current is the initial conduction current.

Specifically, based on the fact that the detected ion sensitive signal and the detected voltage are both transmitted to the gate of the first transistor, the first transistor is turned on, that is, the detecting unit is turned on under the condition that the scanning signal end and the power supply end of the detecting unit are both turned on, that is, the current output end of the detecting unit outputs current, the adjustable signal input by the signal input end is adjusted according to the output current value, the current value is ensured to be an expected calibration value, and the concentration of the hydrogen ions in the liquid to be detected is determined according to the adjusted adjustable signal. Based on the setting mode of above-mentioned detecting element and terminal, realize among the detection device that the detecting element of different positions department realizes that timesharing subregion carries out the detection of the liquid that awaits measuring one by one, promote detection device's detection accuracy, avoid appearing need not to detect the department and lead to the detecting element to carry out the extravagant phenomenon of work simultaneously.

And S340, determining the variation of the input voltage according to the initial voltage and the detection voltage.

And S350, determining the ion sensitive signal variation between the initial ion sensitive signal and the detected ion sensitive signal according to the variation of the input voltage and the capacitance value ratio of the first capacitor to the second capacitor.

And S360, calculating the ion concentration of the solution to be detected according to the ion sensitive signal variation, the ion concentration of the standard solution and the known relationship between the ion sensitive signal and the ion concentration of the solution.

To sum up, in the detection method of the detection device provided in the embodiment of the present invention, the third transistor is added, the scanning signal terminal is added to the detection unit based on the third transistor, and the detection unit is turned on based on the condition that the scanning signal terminal and the power supply terminal of the detection unit are both turned on, that is, the current output terminal of the detection unit outputs a current, the adjustable signal input by the signal input terminal is adjusted according to the output current value, so as to ensure that the current value is an expected calibration value, and the concentration of hydrogen ions in the liquid to be detected is determined according to the adjusted adjustable signal, so as to improve the detection accuracy of the detection device, and avoid the waste phenomenon that the detection unit works because no detection part is needed.

Based on the same inventive concept, an embodiment of the present invention further provides another detection method for a detection apparatus, and fig. 16 is a schematic flow chart of the another detection method provided in the embodiment of the present invention, as shown in fig. 16, the detection method includes:

s410, supplying power to the first transistor through the power supply end, detecting the standard solution with known ion concentration by using the first electrode and the ion sensitive film to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to enable the first transistor to be conducted to generate an initial conduction current.

And S420, supplying power to the power supply ends of all the detection units at the same time.

Specifically, the detection unit further includes a third transistor and a scan signal terminal; the grid electrode of the third transistor is connected with the scanned signal end, and the first pole of the third transistor and the second pole of the third transistor are respectively connected with the second pole of the first transistor and the current output end; the detection device comprises a plurality of detection units arranged in an array; the power supply terminals of all the detection units are mutually connected, the signal input terminals of all the detection units are mutually connected, the current output terminals of a plurality of detection units in the same column are mutually connected, and the scanning signal terminals of a plurality of detection units in the same row are mutually connected. Wherein, the power supply terminals of all the detecting units are connected with each other, that is, the power supply terminals can simultaneously supply power to the detecting units. In the embodiment, the power supply ends of the detection units in the same row are connected to the same power supply line, and then the power supply ends of the detection units in each row are connected to the same total power supply output line, so that the power supply of all the detection units can be realized by only one port, the output ports of the power supply can be reduced, the complexity of the receiving equipment is simplified, and the integration level of the receiving equipment is improved.

S430, sequentially providing a gate scanning signal to the scanning signal end of each row of detection units, so that each row of detection units is sequentially started.

S440, detecting the solution to be detected by using the first electrodes and the ion sensitive membranes in the started detection units in each row to generate a detection ion sensitive signal, and adjusting the detection voltage input by the signal input end to enable the first transistors in the detection units in the current row to be conducted, wherein the conduction current is the initial conduction current.

Specifically, based on that the detected ion sensitive signal and the detected voltage are both transmitted to the gate of the first transistor, when the first transistor is turned on, the detection unit outputs current at the current output end of the detection unit under the condition that the power supply end is turned on, if the scanning signal end provides a scanning signal, namely a gate scanning signal, the adjustable signal input at the signal input end is adjusted according to the output current value, the current value is ensured to be an expected calibration value, and the concentration of the hydrogen ions in the liquid to be detected is determined according to the adjusted adjustable signal.

And based on the mode that sets up of above-mentioned detecting element and terminal, the detecting element that realizes different position lines among the detection device realizes that the detection of the partition line by line of timesharing carries out the liquid that awaits measuring, promotes detecting device's detection accuracy, avoids appearing the extravagant phenomenon that need not to detect the department and lead to the detecting element to carry out work simultaneously.

And S450, determining the variation of the input voltage according to the initial voltage and the detection voltage.

And S460, determining the ion sensitive signal variation between the initial ion sensitive signal and the detected ion sensitive signal according to the variation of the input voltage and the capacitance value ratio of the first capacitor and the second capacitor.

S470, calculating the ion concentration of the solution to be measured according to the ion sensitive signal variation, the ion concentration of the standard solution and the known relationship between the ion sensitive signal and the ion concentration of the solution.

In summary, according to the detection method of the detection device provided by the embodiment of the present invention, the third transistor is arranged, and based on the arrangement manner of the detection units and the terminals, the detection units in different position rows in the detection device realize the detection of the liquid to be detected in a time-sharing and partition manner, so that the detection accuracy of the detection device is improved, and the waste phenomenon that the detection units work without detection positions is avoided.

It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. The detection device is characterized by comprising at least one detection unit, wherein the detection unit comprises an ion sensitive film, a first electrode, a first capacitor, a second capacitor, a first transistor, a signal input end, a power supply end and a current output end; the capacitance value of the first capacitor is larger than that of the second capacitor;

2. The detection device according to claim 1, wherein the detection unit further comprises a second transistor, a fixed potential signal terminal, and a reset control signal terminal;

the grid electrode of the second transistor is connected with the reset control signal end, the first pole of the second transistor is connected with the fixed potential signal end, and the second pole of the second transistor is connected with the grid electrode of the first transistor.

3. The detection device according to claim 1, wherein the detection unit further comprises a third transistor and a scan signal terminal;

the grid electrode of the third transistor is connected with the scanning signal end, and the first pole of the third transistor and the second pole of the second transistor are respectively connected with the second pole of the first transistor and the current output end.

4. The detecting device according to claim 3, wherein the detecting device comprises a plurality of the detecting units arranged in an array;

all the detecting element the current output end interconnect, all the detecting element the signal input end interconnect, a plurality of with one row among the detecting element the power supply end interconnect, a plurality of with the same row among the detecting element scanning signal end interconnect.

5. The detecting device according to claim 3, wherein the detecting device comprises a plurality of the detecting units arranged in an array;

all the detecting element the power supply end interconnect, all the detecting element the signal input end interconnect, a plurality of with one row in the detecting element current output end interconnect, a plurality of with the same row in the detecting element scanning signal end interconnect.

6. The detection device of claim 1, wherein an area of the first capacitor is larger than an area of the second capacitor.

7. The detecting device for detecting the rotation of a motor rotor according to the claim 1, wherein the insulating dielectric layers in the first capacitor and the second capacitor are in the same layer and made of the same material.

8. The detecting device for detecting the rotation of a motor rotor according to claim 7, wherein the first pole and the second pole of the first transistor, the first pole plate of the first capacitor and the second pole plate of the second capacitor are in the same layer and made of the same material.

9. The detection apparatus according to claim 8, wherein the detection cell further comprises a substrate;

the first transistor, the first capacitor and the second capacitor are positioned on the substrate, and vertical projections of the first transistor, the first capacitor and the second capacitor on the substrate are not overlapped with each other;

the first electrode is positioned on one side of the first transistor, the first capacitor and the second capacitor far away from the substrate, and the ion sensitive film is positioned on one side of the first electrode far away from the first transistor, the first capacitor and the second capacitor.

10. The detection device according to claim 9, wherein the gate of the first transistor is multiplexed into the second plate of the first capacitor and the first plate of the second capacitor;

the second plate of the first capacitor and the first plate of the second capacitor do not overlap with each other in vertical projection on the substrate.

11. The device of claim 9, wherein the detection cell further comprises an organic insulating layer between the first electrode and the first transistor.

12. The detection device according to claim 9, wherein the first transistor is a top-gate type or a bottom-gate type transistor.

13. The device according to claim 9, wherein the active layer of the first transistor is any one of an oxide semiconductor with an etch stop structure, an oxide semiconductor with a back channel etch structure, amorphous silicon, or a low temperature polysilicon structure.

14. A detection method of a detection apparatus, applied to the detection apparatus according to any one of claims 1 to 13, the detection method comprising:

supplying power to the first transistor through the power supply end, detecting a solution to be detected by using the first electrode and the ion sensitive film to generate a detected ion sensitive signal, and adjusting a detection voltage input by the signal input end to enable the first transistor to be conducted, wherein the conduction current is an initial conduction current;

15. The detection method according to claim 14, wherein the detection unit further includes a second transistor, a fixed potential signal terminal, and a reset control signal terminal;

the grid electrode of the second transistor is connected with the reset control signal end, the first pole of the second transistor is connected with the fixed potential signal end, and the second pole of the second transistor is connected with the grid electrode of the first transistor;

supply power to the first transistor through the supply terminal, utilize first electrode and ion sensitive membrane detection solution to be measured, generate and detect ion sensitive signal, and adjust the detection voltage of signal input part input, so that first transistor switches on, and before the break-over current is initial break-over current, still include:

and providing a reset signal to the fixed potential signal end, and providing a control starting signal to the reset control signal end so as to enable the second transistor and the first transistor to be conducted, wherein the conducting current of the first transistor is initial conducting current.

16. The detection method according to claim 14, wherein the detection unit further comprises a third transistor and a scan signal terminal; a gate of the third transistor is connected to the scan signal terminal, and a first pole of the third transistor and a second pole of the third transistor are respectively connected to a second pole of the first transistor and the current output terminal;

the detection device comprises a plurality of detection units arranged in an array; the current output ends of all the detection units are mutually connected, the signal input ends of all the detection units are mutually connected, the power supply ends in a plurality of the detection units in the same column are mutually connected, and the scanning signal ends in a plurality of the detection units in the same row are mutually connected;

through the feed end to first transistor power supply utilizes first electrode with the ion sensitive membrane detects the solution that awaits measuring, generates and detects ion sensitive signal, and adjusts the detection voltage of signal input part input, so that first transistor switches on, and the break-over current is initial break-over current, includes:

sequentially supplying power to the power supply ends in the detection units in each row, and sequentially supplying grid scanning signals to the scanning signal ends of the detection units in each row so as to sequentially start the detection units according to the row sequence and the column sequence;

detecting a solution to be detected by utilizing the first electrode and the ion sensitive membrane in each started detection unit to generate a detection ion sensitive signal, and adjusting a detection voltage input by the signal input end to enable the first transistor in the currently started detection unit to be conducted, wherein the conduction current is an initial conduction current.

17. The detection method according to claim 14, wherein the detection unit further includes a third transistor and a scan signal terminal; a gate of the third transistor is connected to the scan signal terminal, and a first pole of the third transistor and a second pole of the third transistor are respectively connected to a second pole of the first transistor and the current output terminal;

the detection device comprises a plurality of detection units arranged in an array; the power supply terminals of all the detection units are connected with each other, the signal input terminals of all the detection units are connected with each other, the current output terminals of a plurality of the detection units in the same column are connected with each other, and the scanning signal terminals of a plurality of the detection units in the same row are connected with each other;

simultaneously supplying power to the power supply terminals of all the detection units;

sequentially providing grid scanning signals to the scanning signal ends of the detection units of each row so as to sequentially start the detection units of each row;

detecting a solution to be detected by using the first electrodes and the ion sensitive membranes in the started detection units in each row to generate a detection ion sensitive signal, and adjusting a detection voltage input by the signal input end to enable the first transistors in the detection units in the current row to be conducted, wherein the conduction current is an initial conduction current.