CN115165498A - Preparation method of Cu-containing antibacterial stainless steel transmission electron microscope sample - Google Patents
Preparation method of Cu-containing antibacterial stainless steel transmission electron microscope sample Download PDFInfo
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- 230000000844 anti-bacterial effect Effects 0.000 title claims abstract description 60
- 229910001220 stainless steel Inorganic materials 0.000 title claims abstract description 58
- 239000010935 stainless steel Substances 0.000 title claims abstract description 58
- 230000005540 biological transmission Effects 0.000 title claims abstract description 30
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 42
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000003792 electrolyte Substances 0.000 claims abstract description 10
- 238000005507 spraying Methods 0.000 claims abstract description 9
- 238000004140 cleaning Methods 0.000 claims abstract description 8
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 claims abstract description 6
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000005520 cutting process Methods 0.000 claims abstract description 6
- 238000005498 polishing Methods 0.000 claims abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 12
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 8
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 8
- 238000005868 electrolysis reaction Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000012153 distilled water Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 238000000227 grinding Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 244000137852 Petrea volubilis Species 0.000 claims 2
- 235000019441 ethanol Nutrition 0.000 claims 2
- 238000004080 punching Methods 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 claims 1
- 238000011049 filling Methods 0.000 claims 1
- 239000011259 mixed solution Substances 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 238000002791 soaking Methods 0.000 claims 1
- 239000010949 copper Substances 0.000 abstract description 49
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 25
- 229910052802 copper Inorganic materials 0.000 abstract description 25
- 239000000463 material Substances 0.000 abstract description 7
- 238000004627 transmission electron microscopy Methods 0.000 description 5
- 239000007921 spray Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000001580 bacterial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003517 fume Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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Abstract
Description
技术领域technical field
本发明属于钢铁材料透射电镜样品制备的技术领域,涉及一种含Cu抗菌不锈钢透射电镜样品的制备方法,特别是一种含有尺寸小、分布丰富的富铜相的高抗菌率奥氏体抗菌不锈钢大面积薄区的制样方法。The invention belongs to the technical field of steel material transmission electron microscope sample preparation, and relates to a method for preparing a Cu-containing antibacterial stainless steel transmission electron microscope sample, in particular to a high antibacterial rate austenitic antibacterial stainless steel containing copper-rich phases with small size and abundant distribution Sample preparation method for large thin areas.
背景技术Background technique
抗菌不锈钢是一类具有广泛应用前景的新型钢铁材料,是指在现有不锈钢基体中添加具有杀菌作用的金属元素,如铜(Cu)、银(Ag)等,再经过特殊处理,除了拥有卓越的力学性能,还能使材料表面具有抑制细菌生物膜形成的作用,对创建洁净和健康生存环境具有重要意义。Antibacterial stainless steel is a new type of steel material with wide application prospects. It refers to adding metal elements with bactericidal effect, such as copper (Cu), silver (Ag), etc., to the existing stainless steel matrix, and then after special treatment, in addition to having excellent The mechanical properties of the material can also inhibit the formation of bacterial biofilms on the surface of the material, which is of great significance for creating a clean and healthy living environment.
含Cu抗菌不锈钢是在冶炼不锈钢的过程中添加适量的Cu元素,经过特殊的热处理工艺,析出细小均匀弥散的富铜相,抑制表面细菌生物膜的形成,起到杀菌作用。因此,含Cu抗菌不锈钢发挥杀菌能力的关键是有富铜相的存在,材料的抗菌率与其内部富铜相的尺寸及分布息息相关,富铜相的研究就成了含Cu抗菌不锈钢开发成功的关键。透射电子显微镜具有从几纳米到亚纳米范围的分辨能力,是研究材料微观组织结构,尤其是纳米级析出相的主要表征手段。欲观察富铜相的细节,获得高质量的富铜相图片,制备出高分辨的透射电镜样品是关键。Cu-containing antibacterial stainless steel is made by adding an appropriate amount of Cu element in the process of smelting stainless steel. After a special heat treatment process, a fine and uniformly dispersed copper-rich phase is precipitated, which inhibits the formation of bacterial biofilm on the surface and plays a bactericidal effect. Therefore, the key to the bactericidal ability of Cu-containing antibacterial stainless steel is the existence of a copper-rich phase. The antibacterial rate of the material is closely related to the size and distribution of the internal copper-rich phase. The study of copper-rich phase has become the key to the successful development of Cu-containing antibacterial stainless steel. . Transmission electron microscopy has the ability to resolve from a few nanometers to sub-nanometers, and is the main characterization method to study the microstructure of materials, especially nanoscale precipitates. In order to observe the details of the copper-rich phase and obtain high-quality copper-rich phase pictures, the preparation of high-resolution TEM samples is the key.
透射电镜样品的制备主要有FIB(聚焦离子束)技术、离子减薄和电解双喷减薄。其中,FIB技术虽然可以定点制样,但是其完成一个样品需要很长的时间,且费用高;离子减薄要求预减薄阶段把样品磨至20μm以下或凹坑处理,造成样品应力集中、内部位错增加,且在后续的氩离子轰击样品表面减薄过程中用时长,完成一个样品甚至多达数天;传统的电解双喷减薄虽然对预减薄阶段要求磨至60μm以下即可,造成的应力集中很小,且在电解双喷减薄过程耗时短,但是由于含Cu抗菌不锈钢中的富铜相小、弥散且多,再加上富铜相会被优先腐蚀,在电解双喷过程中,富铜相脱落,留下密布的筛孔,致使程序搜集到满足光止值阈值后停止减薄,最后得到的样品孔洞多,边缘厚,几乎无薄区面积,薄膜样品制备成功率不高。因此,研究出一种适合含Cu抗菌不锈钢的操作方便、节时、经济、高质量的透射电镜样品方法迫在眉睫。The preparation of TEM samples mainly includes FIB (focused ion beam) technology, ion thinning and electrolytic double jet thinning. Among them, although the FIB technology can prepare samples at fixed points, it takes a long time to complete a sample, and the cost is high; ion thinning requires the sample to be ground below 20 μm or pit treatment in the pre-thinning stage, resulting in sample stress concentration, internal Dislocations increase, and the subsequent thinning process of the sample surface by argon ion bombardment takes a long time, and it even takes several days to complete a sample; although the traditional electrolytic double jet thinning requires grinding to less than 60 μm in the pre-thinning stage, The resulting stress concentration is very small, and the time-consuming process of electrolytic double-spray thinning is short, but due to the small, diffuse and abundant copper-rich phase in the Cu-containing antibacterial stainless steel, and the copper-rich phase will be preferentially corroded, in the electrolytic double-spray thinning process. During the spraying process, the copper-rich phase fell off, leaving dense sieve holes, which caused the program to stop thinning after the light-stop threshold was met. The final sample obtained had many holes, thick edges, and almost no thin area. The thin film sample was successfully prepared. rate is not high. Therefore, it is urgent to develop a convenient, time-saving, economical and high-quality TEM sample method suitable for Cu-containing antibacterial stainless steel.
发明内容SUMMARY OF THE INVENTION
本发明的目的就是针对上述问题,提供一种含Cu抗菌不锈钢透射电镜样品的制备方法。The purpose of the present invention is to solve the above problems, and provide a method for preparing a Cu-containing antibacterial stainless steel transmission electron microscope sample.
本发明的目的是这样实现的:一种含Cu抗菌不锈钢透射电镜样品的制备方法,其特征在于:包括以下步骤:步骤一:切取薄片状含Cu抗菌不锈钢试样;步骤二:手工打磨双面薄片状试样,制备的圆片样品;步骤三:电解液是由800~1200mL无水乙醇、60~80mL浓度为70.0%~72.0%的高氯酸和8~12 mL的乙酸甲酯配制而成的混合溶液;步骤四:分别用蒸馏水和无水乙醇清洗两次电解双喷减薄仪的电解槽后,在电解槽内加入电解液,对中电解双喷减薄仪两喷嘴射出的小液柱,使其在两喷嘴中间对接;步骤五:在电解槽中加入液氮,装好待减薄的样品,调节减薄工艺参数,开始减薄;步骤六:减薄结束后,迅速清洗减薄样品,并放入盛酒精的连盖圆底离心管中静置,待观察前1h取出放在滤纸上,用红外线灯干燥,得到含Cu抗菌不锈钢的透射电镜样品。The object of the present invention is achieved in this way: a method for preparing a Cu-containing antibacterial stainless steel transmission electron microscope sample is characterized in that: comprising the following steps: step 1: cutting a thin-shaped Cu-containing antibacterial stainless steel sample; step 2: manually polishing both sides Flake samples, prepared disk samples; Step 3: The electrolyte is prepared from 800~1200mL of absolute ethanol, 60~80mL of perchloric acid with a concentration of 70.0%~72.0% and 8~12 mL of methyl acetate. Step 4: After cleaning the electrolytic cell of the electrolytic double jet thinning apparatus twice with distilled water and anhydrous ethanol respectively, add electrolyte into the electrolytic cell, and align the small holes emitted by the two nozzles of the electrolytic double jet thinning apparatus. The liquid column is connected between the two nozzles; Step 5: Add liquid nitrogen into the electrolytic cell, install the sample to be thinned, adjust the thinning process parameters, and start thinning; Step 6: After the thinning is completed, quickly clean The sample was thinned and placed in a round-bottomed centrifuge tube with a lid containing alcohol to stand. 1 hour before observation, it was taken out and placed on filter paper, and dried with an infrared lamp to obtain a TEM sample containing Cu antibacterial stainless steel.
所述的步骤一中,利用线切割机切取厚度为0.8~1.2mm,长宽各8~12mm的方形或直径为8~12mm的圆形薄片试样。In the first step, a wire cutting machine is used to cut a square or round thin sample with a thickness of 0.8-1.2 mm, a length and a width of 8-12 mm, or a circular sheet with a diameter of 8-12 mm.
所述的步骤二中,首先需要将带背胶的碳化硅砂纸粘贴在玻璃板上,用橡胶塞压住含Cu抗菌不锈钢0.8~1.2mm厚的片状试样,依次在600#、1000#、1500#、2000#砂纸上转圈双面打磨,直至样品厚度为50~60μm后,再用的圆片冲样器对50~60μm厚样品进行冲圆片,最后继续在细碳化硅砂纸上缓慢双面打磨至25~40μm,获得待减薄的样品。In the second step, firstly, paste the silicon carbide sandpaper with adhesive back on the glass plate, press the 0.8~1.2mm thick sheet sample of Cu-containing antibacterial stainless steel with a rubber stopper, and place the sample at 600# and 1000# in turn. , 1500#, 2000# sandpaper on both sides of the circle, until the thickness of the sample is 50~60μm, then use the wafer punch to punch the 50~60μm thick sample, and finally continue to slowly on the fine silicon carbide sandpaper. Grind both sides to 25~40μm to obtain the sample to be thinned.
所述的玻璃板必须是光滑平整的,所述的橡胶塞为直径30~70mm,所述的打磨为在砂纸上画“○”。The glass plate must be smooth and flat, the rubber stopper is 30-70mm in diameter, and the grinding is to draw "○" on the sandpaper.
所述的细碳化硅砂纸为2500~4000目。The fine silicon carbide sandpaper is 2500-4000 mesh.
所述的步骤五中,电解双喷过程的环境温度为-32~-38℃。In the step 5, the ambient temperature of the electrolysis double spray process is -32~-38°C.
所述的步骤五中,减薄工艺参数:电解电压为35~40V,感光停止值为250~400,双喷减薄过程中电解电流40~56mA。In the fifth step, the thinning process parameters: the electrolysis voltage is 35~40V, the photosensitive stop value is 250~400, and the electrolysis current is 40~56mA during the double jet thinning process.
所述的步骤六中,迅速清洗减薄样品包括:待红外光电自动感应器报警时,迅速取出样品夹并放入盛放无水乙醇的烧杯中;轻轻晃动样品夹3~5s,取出圆片样品;用镊子小心夹起样品浸入干净的无水乙醇,轻轻晃动圆片样品3~5s;最后放入盛酒精的连盖圆底离心管中静置。In the step 6, rapidly cleaning and thinning the sample includes: when the infrared photoelectric automatic sensor alarms, quickly take out the sample clip and put it into a beaker containing absolute ethanol; gently shake the sample clip for 3-5 s, and take out the circle. Then, carefully pick up the sample with tweezers and immerse it in clean absolute ethanol, and gently shake the round sample for 3-5 s; finally, put it in a round-bottomed centrifuge tube with a lid and let it stand.
本发明的有益效果是:本发明提供的一种含Cu抗菌不锈钢透射电镜样品的制备方法,解决了富铜相脱落多,富铜相被保留少,薄区面积小的问题,制备透射电镜样品成功率达到98%以上。本发明大大提高了含Cu抗菌不锈钢透射电镜试样制备的速率,缩短了检测周期,获得的富铜相的形貌更加清晰、尺寸更加精确,为产品研发、工艺路线改进提供了精确的基础实验数据。The beneficial effects of the invention are as follows: the method for preparing a Cu-containing antibacterial stainless steel transmission electron microscope sample provided by the invention solves the problems that the copper-rich phase falls off a lot, the copper-rich phase is less retained, and the thin area is small, and the transmission electron microscope sample is prepared. The success rate is over 98%. The invention greatly improves the preparation rate of Cu-containing antibacterial stainless steel transmission electron microscope samples, shortens the detection period, the obtained copper-rich phase has clearer appearance and more accurate size, and provides accurate basic experiments for product research and development and process route improvement. data.
附图说明Description of drawings
下面结合附图对本发明作进一步的描述。The present invention will be further described below in conjunction with the accompanying drawings.
图1:本发明制备的304Cu抗菌不锈钢透射电镜样品。Figure 1: 304Cu antibacterial stainless steel transmission electron microscope sample prepared by the present invention.
图2:传统工艺制备的304Cu抗菌不锈钢透射电镜样品。Figure 2: TEM sample of 304Cu antibacterial stainless steel prepared by traditional process.
图3:本发明所述获得的304Cu抗菌不锈钢富铜相形貌图。Figure 3: The 304Cu antibacterial stainless steel copper-rich phase morphology diagram obtained according to the present invention.
图4:本发明制备的430Cu抗菌不锈钢透射电镜样品。Figure 4: 430Cu antibacterial stainless steel transmission electron microscope sample prepared by the present invention.
图5:传统工艺制备的430Cu抗菌不锈钢透射电镜样品。Figure 5: TEM sample of 430Cu antibacterial stainless steel prepared by traditional process.
图6:本发明所述获得的430Cu抗菌不锈钢富铜相形貌图。Figure 6: The 430Cu antibacterial stainless steel copper-rich phase morphology diagram obtained according to the present invention.
具体实施方式Detailed ways
本发明旨在发明一种含Cu抗菌不锈钢透射电镜样品的制备方法,其目的在于解决由于产品中富铜相小、弥散且多,减薄过程中富铜相易脱落,造成筛孔多,而薄区差的问题。本方法可以在保证含Cu抗菌不锈钢中的富铜相脱落少的前提下,制备出大面积薄区的透射样品,获得富铜相高质量的透射图片。The invention aims to invent a method for preparing a Cu-containing antibacterial stainless steel transmission electron microscope sample. Bad question. The method can prepare a transmission sample with a large area and a thin area on the premise of ensuring that the copper-rich phase in the Cu-containing antibacterial stainless steel falls off less, and obtain a high-quality transmission image of the copper-rich phase.
基于常规电解双喷减薄在含Cu抗菌不锈钢透射电镜样品减薄过程中出现的客观问题,本发明提供了一种含Cu抗菌不锈钢透射电镜样品的制备方法,解决了富铜相脱落多,薄区面积小,薄膜样品制备成功率低的问题。通过该方法制备的透射样品能够实现富铜相被保留、筛孔少、薄区面积大的特征,实现表征富铜相尺寸、形状及其与基体位向关系等的信息。Based on the objective problems of conventional electrolytic double jet thinning in the thinning process of Cu-containing antibacterial stainless steel TEM samples, the present invention provides a preparation method of Cu-containing antibacterial stainless steel TEM samples, which solves the problem that the copper-rich phase falls off a lot, and the thin The problem of small area and low success rate of thin film sample preparation. The transmission sample prepared by this method can realize the characteristics of retained copper-rich phase, less sieve holes, and large area of thin area, and realize information to characterize the size, shape and orientation relationship between copper-rich phase and matrix.
一种含Cu抗菌不锈钢透射电镜样品的制备方法,该方法包括以下步骤:A preparation method of Cu-containing antibacterial stainless steel transmission electron microscope sample, the method comprises the following steps:
(1)在含Cu抗菌不锈钢试样上,利用线切割机切取厚度为0.8~1.2mm的片状试样;(1) On the antibacterial stainless steel sample containing Cu, use a wire cutting machine to cut a sheet sample with a thickness of 0.8~1.2mm;
(2)手工打磨双面薄片状试样,将带背胶的碳化硅砂纸粘贴在玻璃板上,用手将Φ30~70mm橡胶塞压住含Cu抗菌不锈钢0.8~1.2mm厚的片状试样,使试样依次在600目、1000目、1500目、2000目砂纸上转圈双面打磨,直至样品厚度为50~60μm,用圆片冲样器对50~60μm厚样品进行冲片,获得Φ3mm的圆片样品;(2) Manually polish the double-sided sheet-like sample, paste the silicon carbide sandpaper with adhesive back on the glass plate, and press the Φ30~70mm rubber stopper by hand to press the 0.8~1.2mm thick sheet-like sample of Cu-containing antibacterial stainless steel , make the sample turn on 600-mesh, 1000-mesh, 1500-mesh, and 2000-mesh sandpaper and grind both sides in turn until the thickness of the sample is 50~60μm, and use a wafer punch to punch the 50~60μm thick sample to obtain Φ3mm wafer samples;
(3)将步骤(2)中的圆片样品继续在2500~4000目碳化硅砂纸上缓慢双面打磨至约25~40μm;(3) Continue to grind the wafer sample in step (2) on 2500~4000 mesh silicon carbide sandpaper slowly on both sides to about 25~40μm;
(4)分别用蒸馏水和无水乙醇清洗两次电解双喷减薄仪的电解槽后,在电解槽内加入电解液,对中电解双喷减薄仪两喷嘴射出的小液柱,使其在两喷嘴中间对接;(4) After cleaning the electrolytic cell of the electrolytic double jet thinning instrument twice with distilled water and anhydrous ethanol respectively, add electrolyte into the electrolytic cell, and align the small liquid column ejected from the two nozzles of the electrolytic double jet thinning instrument to make it. Butt between the two nozzles;
(5)在电解槽中加入一部分液氮,待电解双喷减薄仪内设的温度计稳定显示-30℃后,再多次少量继续加入液氮,直至温度计显示在-32℃~-38℃内。(5) Add a part of liquid nitrogen to the electrolytic cell. After the thermometer inside the electrolytic double jet thinning instrument shows a stable display of -30 °C, continue to add liquid nitrogen several times in a small amount until the thermometer shows -32 °C ~ -38 °C Inside.
(6)步骤(4)和步骤(5)中的电解液是由800~1200mL无水乙醇、60mL~80mL浓度为70.0%~72.0%的高氯酸和8~12mL的乙酸甲酯配制的混合溶液;(6) The electrolyte in step (4) and step (5) is a mixture of 800~1200mL of absolute ethanol, 60mL~80mL of perchloric acid with a concentration of 70.0%~72.0% and 8~12mL of methyl acetate. solution;
(7)将步骤(3)制备的约25~40μm圆片样品装入双喷减薄仪的样品夹,放入卡槽内,盖紧卡槽盖,并将样品夹插到两喷嘴中间,所用电解电压为35~40V,设置的感光停止值为250~400,双喷减薄过程中电解电流40~56mA;(7) Put the sample of about 25~40μm wafer prepared in step (3) into the sample holder of the double jet thinning apparatus, put it into the card slot, close the card slot cover, and insert the sample holder into the middle of the two nozzles, The electrolytic voltage used is 35~40V, the set photosensitive stop value is 250~400, and the electrolytic current is 40~56mA during the double jet thinning process;
(8)待红外光电自动感应器报警时,迅速取出样品夹并放入盛放无水乙醇的烧杯中,轻轻晃动样品夹3~5s(避免将薄区清洗掉),取出圆片样品,用镊子小心夹起样品浸入干净的无水乙醇,轻轻晃动圆片样品3~5s,最后放入盛酒精的连盖圆底离心管中静置(是为了防止圆片样品表面被污染),待观察前0.5~3.5h取出放在滤纸上,用红外线灯干燥。(8) When the infrared photoelectric automatic sensor alarms, quickly take out the sample clip and put it into a beaker containing absolute ethanol, shake the sample clip gently for 3~5s (avoid cleaning the thin area), and take out the wafer sample. Carefully pick up the sample with tweezers and immerse it in clean absolute ethanol, gently shake the wafer sample for 3~5s, and finally put it into a round-bottomed centrifuge tube with a lid and let it stand still (to prevent the surface of the wafer sample from being polluted), Take it out 0.5~3.5h before observation, put it on filter paper, and dry it with an infrared lamp.
下面结合实施例详细说明本方法的具体实施方式,但本发明的具体实施方式不局限于下述的实施例。The specific implementation of the method will be described in detail below with reference to the examples, but the specific implementation of the present invention is not limited to the following examples.
实施例一Example 1
304Cu抗菌不锈钢透射电镜试样的制备及透射电镜下富铜相的形貌。Preparation of 304Cu antibacterial stainless steel for transmission electron microscopy and the morphology of copper-rich phase under transmission electron microscopy.
(1)切取10mm×10mm方形、厚1.0mm薄片状304Cu抗菌不锈钢试样;(1) Cut a 10mm×10mm square, 1.0mm thick flake 304Cu antibacterial stainless steel sample;
(2)手握Φ50mm的橡胶塞,压住步骤(1)所得样品,依次在600目、1000目、1500目、2000目砂纸上转圈双面打磨,直至厚度约为56μm,冲Φ3mm圆片,接着继续在3000目砂纸上缓慢转圈双面打磨,最后样品厚约38μm;(2) Hold the rubber stopper of Φ50mm in hand, press the sample obtained in step (1), and grind it on both sides on 600-mesh, 1000-mesh, 1500-mesh, and 2000-mesh sandpaper in turn, until the thickness is about 56μm, punch a Φ3mm disc, Then continue to grind on both sides slowly on 3000-grit sandpaper, and the final sample thickness is about 38μm;
(3)清洗电解槽,分别用蒸馏水和无水乙醇清洗两次;(3) Clean the electrolytic cell and wash it twice with distilled water and absolute ethanol respectively;
(4)配制电解液:将电解槽放在通风良好的通风橱内,在电解槽内加入1000mL无水乙醇,用量筒分别量取65mL的70.0%~72.0%高氯酸及10mL的乙酸甲酯,一边用玻璃棒搅拌,一边缓慢加入无水乙醇中;(4) Preparation of electrolyte: put the electrolytic cell in a well-ventilated fume hood, add 1000 mL of absolute ethanol to the electrolytic cell, and measure 65 mL of 70.0%~72.0% perchloric acid and 10 mL of methyl acetate with a graduated cylinder. , while stirring with a glass rod, slowly add it to anhydrous ethanol;
(5)对中电解双喷减薄仪两喷嘴射出的小液柱,使其在两喷嘴中间对接,在电解槽中加入液氮,使电解温度为-33℃~-35℃;(5) Align the small liquid column ejected from the two nozzles of the electrolytic double-jet thinning instrument, so that it is connected in the middle of the two nozzles, and add liquid nitrogen into the electrolytic cell to make the electrolysis temperature -33℃~-35℃;
(6)将304Cu抗菌不锈钢Φ3mm、厚约38μm圆片装入样品夹,放入卡槽内,盖紧卡槽盖,并将样品夹插到两喷嘴中间,调节电解电压为38V,设置的感光停止值为300,按开始按钮,减薄开始,减薄过程中的电流为46mA;(6) Put the 304Cu antibacterial stainless steel Φ3mm, about 38μm thick disc into the sample holder, put it into the card slot, close the card slot cover, insert the sample holder between the two nozzles, adjust the electrolytic voltage to 38V, and set the photosensitive The stop value is 300, press the start button, the thinning starts, and the current during the thinning process is 46mA;
(7)“滴滴滴”感应器报警,减薄结束,迅速取出样品夹并放入盛放无水乙醇的烧杯中,轻轻晃动样品夹5s,打开样品夹,取出圆片样品,用镊子小心夹起样品浸入干净的无水乙醇,轻轻晃动圆片样品5s,最后放入盛酒精的连盖圆底离心管中静置,得到304Cu抗菌不锈钢透射电镜样品;(7) "DiDiDi" sensor alarms, thinning is over, quickly take out the sample holder and put it into a beaker containing absolute ethanol, gently shake the sample holder for 5s, open the sample holder, take out the wafer sample, use tweezers Carefully pick up the sample and immerse it in clean absolute ethanol, gently shake the wafer sample for 5s, and finally put it into a round-bottom centrifuge tube with a lid containing alcohol and let it stand to obtain a 304Cu antibacterial stainless steel TEM sample;
(8)观察前1h取出步骤(7)的304Cu抗菌不锈钢透射电镜样品放在滤纸上,用红外线灯干燥3min后,装入透射电镜样品杆后进入透射电镜进行观察,观察结果见图1,图2为传统工艺电解双喷所制备的304Cu抗菌不锈钢透射电镜样品,图3为实施例一所获得的304Cu抗菌不锈钢富铜相形貌图。(8) Take out the 304Cu antibacterial stainless steel TEM sample of step (7) 1 hour before the observation, put it on the filter paper, dry it with an infrared lamp for 3 minutes, put it into the TEM sample holder and then enter the TEM for observation. The observation results are shown in Figure 1 and Figure 1. 2 is a transmission electron microscope sample of 304Cu antibacterial stainless steel prepared by traditional electrolytic double-spraying, and FIG. 3 is a morphological map of the copper-rich phase of 304Cu antibacterial stainless steel obtained in Example 1.
实施例二Embodiment 2
430Cu抗菌不锈钢透射电镜试样的制备及透射电镜下富铜相的形貌。Preparation of 430Cu antibacterial stainless steel for transmission electron microscopy and the morphology of copper-rich phase under transmission electron microscopy.
(1)切取10mm×10mm方形、厚1.0mm薄片状430Cu抗菌不锈钢试样;(1) Cut a 10mm×10mm square, 1.0mm thick sheet-like 430Cu antibacterial stainless steel sample;
(2)手握Φ50mm的橡胶塞,压住步骤(1)所得样品,依次在600目、1000目、1500目、2000目砂纸上转圈双面打磨,直至厚度约为52μm,冲Φ3mm圆片,接着继续在4000目砂纸上缓慢转圈双面打磨,最后样品厚约39μm;(2) Hold the rubber stopper of Φ50mm in hand, press the sample obtained in step (1), and grind it on both sides on 600-mesh, 1000-mesh, 1500-mesh, and 2000-mesh sandpaper in turn, until the thickness is about 52μm, punch a Φ3mm disc, Then continue to grind on 4000-grit sandpaper slowly on both sides, and the final sample thickness is about 39μm;
(3)清洗电解槽,分别用蒸馏水和无水乙醇清洗两次;(3) Clean the electrolytic cell and wash it twice with distilled water and absolute ethanol respectively;
(4)配制电解液:将电解槽放在通风良好的通风橱内,在电解槽内加入1000mL无水乙醇,用量筒分别量取65mL的70.0%~72.0%高氯酸及10mL的乙酸甲酯,一边用玻璃棒搅拌,一边缓慢加入无水乙醇中;(4) Preparation of electrolyte: put the electrolytic cell in a well-ventilated fume hood, add 1000 mL of absolute ethanol to the electrolytic cell, and measure 65 mL of 70.0%~72.0% perchloric acid and 10 mL of methyl acetate with a graduated cylinder. , while stirring with a glass rod, slowly add it to anhydrous ethanol;
(5)对中电解双喷减薄仪两喷嘴射出的小液柱,使其在两喷嘴中间对接,在电解槽中加入液氮,使电解温度为-33℃~-36℃;(5) Align the small liquid column ejected from the two nozzles of the electrolytic double jet thinning instrument, so that it is docked in the middle of the two nozzles, and add liquid nitrogen into the electrolytic tank to make the electrolysis temperature -33 °C ~ -36 °C;
(6)将430Cu抗菌不锈钢Φ3mm、厚约39μm圆片装入样品夹,放入卡槽内,盖紧卡槽盖,并将样品夹插到两喷嘴中间,调节电解电压为35V,设置的感光停止值为300,按开始按钮,减薄开始,减薄过程中的电流为40mA;(6) Put the 430Cu antibacterial stainless steel Φ3mm, about 39μm thick disc into the sample holder, put it into the card slot, close the card slot cover, insert the sample holder between the two nozzles, adjust the electrolytic voltage to 35V, and set the photosensitive The stop value is 300, press the start button, the thinning starts, and the current during the thinning process is 40mA;
(7)“滴滴滴”感应器报警,减薄结束,迅速取出样品夹并放入盛放无水乙醇的烧杯中,轻轻晃动样品夹5s,打开样品夹,取出圆片样品,用镊子小心夹起样品浸入干净的无水乙醇,轻轻晃动圆片样品5s,最后放入盛酒精的连盖圆底离心管中静置,得到430Cu抗菌不锈钢透射电镜样品;(7) "DiDiDi" sensor alarms, thinning is over, quickly take out the sample holder and put it into a beaker containing absolute ethanol, gently shake the sample holder for 5s, open the sample holder, take out the wafer sample, use tweezers Carefully pick up the sample and immerse it in clean absolute ethanol, gently shake the wafer sample for 5s, and finally put it into a round-bottomed centrifuge tube containing alcohol and let it stand to obtain a 430Cu antibacterial stainless steel TEM sample;
(8)观察前1h取出步骤(7)的430Cu抗菌不锈钢透射电镜样品放在滤纸上,用红外线灯干燥3min后,装入透射电镜样品杆后进入透射电镜进行观察,观察结果见图4,图5为传统工艺电解双喷所制备的430Cu抗菌不锈钢透射电镜样品,图6为实施例一所获得的430Cu抗菌不锈钢富铜相形貌图。(8) Take out the 430Cu antibacterial stainless steel TEM sample of step (7) 1 hour before the observation, put it on the filter paper, dry it with an infrared lamp for 3 minutes, put it into the TEM sample holder and then enter the TEM for observation. The observation results are shown in Figure 4 and Figure 4. 5 is a transmission electron microscope sample of 430Cu antibacterial stainless steel prepared by traditional electrolytic double-spraying, and FIG.
以上所述仅为本发明的具体实施例,但本发明所保护范围的结构特征并不限于此,任何本领域的技术人员在本发明的领域内,所作的变化或修饰皆涵盖在本发明的专利范围内。The above are only specific embodiments of the present invention, but the structural features of the protection scope of the present invention are not limited thereto. Any changes or modifications made by those skilled in the art within the field of the present invention are all covered by the present invention. within the scope of the patent.
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