CN115165171A - Strain gauge type differential pressure sensor with isolated medium - Google Patents
Strain gauge type differential pressure sensor with isolated medium Download PDFInfo
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- CN115165171A CN115165171A CN202210932744.1A CN202210932744A CN115165171A CN 115165171 A CN115165171 A CN 115165171A CN 202210932744 A CN202210932744 A CN 202210932744A CN 115165171 A CN115165171 A CN 115165171A
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- strain gauge
- film
- base
- differential pressure
- pressure sensor
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- 238000004806 packaging method and process Methods 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 5
- 230000000670 limiting effect Effects 0.000 claims description 4
- 238000009530 blood pressure measurement Methods 0.000 abstract description 5
- 230000000149 penetrating effect Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 56
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
- G01L1/2231—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/225—Measuring circuits therefor
- G01L1/2262—Measuring circuits therefor involving simple electrical bridges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
- G01L13/026—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms involving double diaphragm
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
Abstract
The invention discloses a medium-isolated strain gauge type differential pressure sensor, and relates to the field of strain gauge type pressure sensors. The technical scheme is characterized by comprising a first film, a first strain gauge, a packaging shell, a second film and a second strain gauge; the packaging shell comprises an upper cover, a shell, a base and a film support, a sealed cavity is formed in the packaging shell, and the strain gauge is arranged in the sealed cavity; the first strain gauge is connected with a first lead, a circuit switching assembly connected with the first lead is arranged in the closed cavity, the second strain gauge is connected with a second lead, and a first contact pin connected with the circuit switching assembly and a second contact pin connected with the second lead are arranged on the base in a penetrating mode. According to the invention, the strain gauge is arranged in the sealed cavity in the packaging shell and is isolated from external media or air, so that the strain gauge can be prevented from being damaged due to external environment, the performance reliability of the sensor is ensured, and the sensor can carry out differential pressure measurement.
Description
Technical Field
The present invention relates to strain gage pressure sensors, and more particularly, to a media isolated strain gage differential pressure sensor.
Background
The basic structure of the existing strain gauge type pressure sensor is to attach a strain gauge to a metal diaphragm, and two or four strain gauges are generally required. Referring to fig. 1 to 4, a film 2 is disposed on a case 1, a strain gauge 3 is attached to the film 2, and a lead wire 4 is connected to the strain gauge 3. Under the action of pressure, the film 2 can deform, the strain gauge 3 can deform along with the deformation, and the deformation of the strain gauge 3 can change the resistance of the strain gauge. The resistance change is converted into a voltage signal by the wheatstone bridge, and the external device is converted into a pressure value by measuring the voltage signal.
Four different arrangements are illustrated in fig. 1 to 4, and a thin film pressure sensor is also disclosed in chinese patent publication No. CN114689227A, but these arrangements have the following problems: 1. the strain gauge serving as a sensitive element is in a naked state and is influenced by external environments (including humidity, chemical substances, dust and the like), and the strain gauge can be damaged, so that the performance of the sensor is reduced or the sensor fails; 2. since the unpressurized side of the membrane is the air pressure, the gauge pressure is measured and differential pressure measurement is not possible.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a strain gauge type differential pressure sensor with isolated medium, wherein a first strain gauge and a second strain gauge are both arranged in a sealed cavity in a packaging shell and isolated from external medium or air, so that the strain gauges can be prevented from being damaged due to external environment, the performance reliability of the sensor is ensured, the service life of the sensor is prolonged, and the sensor can be used in the working condition with severe environment; meanwhile, two ends of the sensor are respectively provided with a strain gauge structure, so that differential pressure measurement can be performed on liquid media, non-dry gas media, corrosive gas media and the like.
In order to achieve the purpose, the invention provides the following technical scheme:
a medium-isolated strain gauge type differential pressure sensor comprises a first film, a first strain gauge connected with the first film, a packaging shell for bearing the first film, a second film and a second strain gauge connected with the second film;
the packaging shell comprises an upper cover, a shell, a base and a film support, wherein a first film is connected with the upper cover, a second film is connected with the film support, a closed cavity is formed among the first film, the upper cover, the shell, the base, the second film and the film support, and the first strain gauge and the second strain gauge are arranged in the closed cavity;
the first strain gauge is connected with a first lead, a circuit switching assembly connected with the first lead is arranged in the closed cavity, and a first contact pin connected with the circuit switching assembly penetrates through the base;
the second strain gauge is connected with a second lead, and a second contact pin connected with the second lead penetrates through the base.
Furthermore, the circuit switching assembly comprises a switching plate fixedly arranged on the inner end face of the upper cover, a bonding pad is arranged on the switching plate, and the first lead and the contact pin are respectively connected with the bonding pad.
Furthermore, a sleeve connected with the welding disc is arranged on the adapter plate, and the contact pin is embedded in the sleeve.
Further, a metal solidified layer is arranged between the sleeve and the contact pin.
Furthermore, the sleeve is in plug-in fit with the adapter plate.
Furthermore, the inner end face of the upper cover is provided with a limit groove matched with the adapter plate.
Furthermore, an insulating sealing element is fixedly arranged between the first contact pin and the base and/or between the second contact pin and the base, and the insulating sealing element comprises a sintered glass column.
Furthermore, a step hole is formed in the base, and the film support is embedded in the step hole from the outer side of the base.
Furthermore, the film support is annular, and the film support protrudes from the outer surface of the base.
Further, a step joint surface is arranged between the upper cover and the outer shell and/or between the outer shell and the base.
In conclusion, the invention has the following beneficial effects:
1. the first strain gauge and the second strain gauge are arranged in a sealed cavity in the packaging shell and are isolated from an external medium or air, so that the strain gauge can be prevented from being damaged due to an external environment, the performance reliability of the sensor is ensured, the service life of the sensor is prolonged, and the sensor can be used in a working condition with a severe environment;
2. the two ends of the sensor are respectively provided with a strain gauge structure, and differential pressure measurement can be carried out on liquid media, non-dry gas media, corrosive gas media and the like.
Drawings
FIG. 1 is a first schematic structural diagram of a prior art strain gauge pressure sensor;
FIG. 2 is a second schematic structural diagram of a prior art strain gauge pressure sensor;
FIG. 3 is a third schematic structural diagram of a prior art strain gauge pressure sensor;
FIG. 4 is a fourth schematic structural diagram of a prior art strain gauge pressure sensor;
FIG. 5 is a cross-sectional view of a media isolated strain gage differential pressure sensor according to an embodiment;
FIG. 6 is an exploded view of a first media isolated strain gage differential pressure sensor according to an embodiment;
fig. 7 is an exploded view of a second embodiment of a media isolated strain gage differential pressure sensor.
In the figure: 1. a housing; 2. a film; 3. a strain gauge; 4. a wire; 51. a first film; 52. a second film; 61. an upper cover; 62. a housing; 63. a base; 64. a film support; 65. a first step engagement surface; 66. a second step engagement surface; 67. a stepped bore; 71. a first strain gauge; 72. a first conductive line; 73. an adapter plate; 731. a bonding pad; 732. a jack; 74. a sleeve; 75. a first pin; 81. a second strain gauge; 82. a second conductive line; 83. a second pin; 9. and (5) sintering the glass column.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications of the present embodiment without inventive contribution as needed after reading the present specification, but all of them are protected by patent law within the scope of the claims of the present invention.
The embodiment is as follows:
a media isolated strain gauge differential pressure sensor, referring to fig. 5 to 7, includes a first film 51, a first strain gauge 71 connected to the first film 51, and a package housing for carrying the first film 51, and further includes a second film 52, and a second strain gauge 81 connected to the second film 52; in this embodiment, the package housing includes an upper cover 61, a housing 62, a base 63, and a film support 64, the first film 51 is connected to the upper cover 61, the second film 52 is connected to the film support 64, a sealed chamber is formed among the first film 51, the upper cover 61, the housing 62, the base 63, the second film 52, and the film support 64, and the first strain gauge 71 and the second strain gauge 81 are both disposed in the sealed chamber; the first strain gauge 71 is connected with a first lead 72, a circuit switching component connected with the first lead 72 is arranged in the closed cavity, and a first contact pin 75 connected with the circuit switching component penetrates through the base 63; the second strain gauge 81 is connected with a second lead 82, and a second pin 83 connected with the second lead 82 penetrates through the base 63; in the embodiment, the first strain gauge 71 and the second strain gauge 81 are both arranged in a closed cavity in the packaging shell and isolated from an external medium or air, so that the strain gauges can be prevented from being damaged due to an external environment, the performance reliability of the sensor is ensured, the service life of the sensor is prolonged, and the sensor can be used in a working condition with a severe environment; the two ends of the sensor are respectively provided with a strain gauge structure, so that differential pressure measurement can be performed on a liquid medium, a non-dry gas medium, a corrosive gas medium and the like; preferably, the closed chamber is a vacuum chamber.
Referring to fig. 5 to 7, when the strain gauge is installed in the sealed chamber, how to connect the lead with the external circuit is a difficult problem to overcome; in this embodiment, the base 63 is respectively provided with the first pin 75 and the second pin 83 in a penetrating manner, the second strain gauge 81 is located on one side of the base 63, and the second lead 82 of the second strain gauge 81 is directly connected with the second pin 83, so that the internal and external connection of the circuit of the second strain gauge 81 can be realized; the first strain gauge 71 is located on one side of the upper cover 61 and cannot be directly connected with the first contact pin 75, so that the circuit switching assembly is provided in the embodiment, and the first lead 72, the circuit switching assembly and the first contact pin 75 are matched to realize the internal and external connection of the circuit of the first strain gauge 71; in this embodiment, the first film 51 and the upper cover 61 are integrally formed, that is, a groove is formed on the inner end surface of the upper cover 61 to form the first film 51, the outer surface of the first film 51 is opposite to the outside, the inner surface is opposite to the closed chamber, and the first strain gauge 71 is adhered to the inner surface of the first film 51; similarly, the second film 52 and the film support 64 are integrally formed, that is, a groove is formed on the outer end surface of the film support 64 to form the second film 52 on the inner end surface of the film support 64, and the grooved film support 64 is annular; the first pin 75 and the second pin 83 are arranged on the base 63 in a penetrating manner, so that the connection with an external circuit can be facilitated, the structure of the upper cover 61 can be simplified, and the processing difficulty can be reduced; the film support 64 is provided to facilitate the processing of the second film 52, and to simplify the structure of the base 63, so as to arrange the first pins 75 and the second pins 83 on the base 63; in this embodiment, the processing and the assembly of the upper cover 61 part, the processing of the shell 62, and the processing and the assembly of the base 63 part can be respectively performed, and then the assembly is performed, which is beneficial to improving the production efficiency, improving the yield, and reducing the product control cost.
Referring to fig. 5 to 7, specifically, a stepped hole 67 is formed in the base 63, the film support 64 is embedded in the stepped hole 67 from the outer side of the base 63, and then the stepped hole 67 is closed by the second film 52; the film support 64 protrudes out of the outer surface of the base 63, so that the assembly and measurement are convenient; the film support 64 is embedded in the stepped hole 67, and then the film support 64 and the base 63 are fixed through welding; the arrangement of the stepped hole 67 has the advantages that the limiting effect is achieved, the assembly is convenient, the connection stability is improved, and the air tightness of the connection position of the film support 64 and the base 63 is improved; of course, in other alternative embodiments, the stepped hole 67 may be replaced by a straight hole, which is not limited herein; meanwhile, in other alternative embodiments, the first film 51 may also adopt an arrangement structure of the second film 52, and the second film 52 may also adopt an arrangement structure of the first film 51, which is not limited herein.
Referring to fig. 5 to 7, preferably, the circuit switching assembly includes a switching board 73 fixedly disposed on an inner end surface of the upper cover 61, a pad 731 is disposed on the switching board 73, and the first wire 72 and the first pin 75 are respectively connected to the pad 731; the adapter plate 73 can be a PCB, a ceramic or an injection molding, and the like, and the adapter plate 73 and the upper cover 61 are in insulating fit without limitation; specifically, in the present embodiment, the adapter plate 73 is adhered to the inner end surface of the upper cover 61, and the inner end surface of the upper cover 61 is provided with a limiting groove matched with the adapter plate 73, so that the adapter plate 73 can be conveniently adhered, and the connection stability is improved; in this embodiment, the inner side wall of the limiting groove and the outer side wall of the adapter plate 73 are non-cylindrical surfaces which are matched with each other, so that the adapter plate 73 can be prevented from rotating, and the reliability of connection between the first lead 72 and the bonding pad 731 is ensured; in this embodiment, the bonding pad 731 is disposed on the end surface of the interposer 73 away from the upper cover 61, and the interposer 73 is provided with a through hole, and the first wire 72 connected to the first strain gauge 71 passes through the through hole and then is connected to the bonding pad 731, so that the first pin 75 is conveniently connected to the bonding pad 731.
Referring to fig. 5 to 7, preferably, the interposer 73 is provided with an extension connected to the pad 731, and the extension is connected to the first pin 75; by adopting the extension piece, on one hand, the length of the first pin 75 can be reduced, and on the other hand, the connection of the first pin 75 can be realized conveniently; specifically, in the present embodiment, the extending member is a sleeve 74, and the first pin 75 is embedded in the sleeve 74; the first pin 75 is embedded in the sleeve 74, so that the connection stability can be improved on one hand, and the connection can be facilitated on the other hand; specifically, when the base 63 is connected with the housing 62, the first pin 75 is inserted into the sleeve 74 to achieve assembly connection, so that the operation is convenient; preferably, a circumferential locating structure is provided between the base 63 and the housing 62 to facilitate alignment of the first pin 75 with the sleeve 74; preferably, a metal solidified layer is disposed between the sleeve 74 and the first insertion pin 75 in the present embodiment; a small amount of metal paste, such as silver paste, is placed in the sleeve 74 in advance, and after the first contact pin 75 is inserted into the sleeve 74, a metal cured layer is formed between the sleeve 74 and the first contact pin 75 by heating and curing, so that the connection stability between the first contact pin 75 and the sleeve 74 can be further improved; of course, in other alternative embodiments, the first pin 75 may be directly abutted, plugged or clamped with the pad 731, or the first pin 75 may be abutted or clamped with the extension piece, which is not limited herein; wherein abutting means two face contact mating, such as the face of the first pin 75 contacting the face of the extension piece; preferably, in the present embodiment, the sleeve 74 and the adapter plate 73 are in a plug-in fit, so as to facilitate assembly and ensure connection stability; specifically, an insertion shaft with a smaller outer diameter is arranged at the end of the sleeve 74, the adapter plate 73 is provided with a jack 732, and the pad 731 is provided with a through hole opposite to the jack 732; the insertion shaft of the sleeve 74 penetrates through the through hole in the pad 731 and then is embedded into the insertion hole 732, so that the end face of the sleeve 74 is in contact with the pad 731, and the stability of the sleeve 74 can be improved by matching the insertion shaft with the insertion hole 732; of course, a metal cylinder connected to the pad 731 may be provided in the insertion hole 732, and the insertion shaft of the sleeve 74 may be fitted into the metal cylinder, which is not limited herein; of course, in other alternative embodiments, the sleeve 74 and the adapter plate 73 may be screwed or clamped, for example, a metal threaded sleeve may be provided in the adapter plate 73, which is not limited herein.
Referring to fig. 5 to 7, in the present embodiment, an insulating sealing member is fixedly disposed between the first pin 75 and the base 63, and between the second pin 83 and the base 63, and the insulating sealing member includes a sintered glass column 9; a sintering hole is formed in the base 63, the contact pin penetrates through the sintering hole, and then glass is sintered in the sintering hole; the sintered glass column 9 is adopted, so that the connection is reliable, the stability is good, the air tightness between the contact pin and the base 63 can be effectively ensured, and the insulation between the contact pin and the base 63 is realized; of course, in other alternative embodiments, the insulating sealing member may also be made of other materials, such as the pin and the base are fixed and formed by injection molding, which is not limited herein; preferably, in this embodiment, a step joint surface is provided between the upper cover 61 and the outer casing 62, and between the outer casing 62 and the base 63, specifically, a first step joint surface 65 is provided between the upper cover 61 and the outer casing 62, and a second step joint surface 66 is provided between the outer casing 62 and the base 63; the arrangement of the step joint surface is beneficial to improving the connection stability and the air tightness; specifically, in the present embodiment, the upper cover 61 and the housing 62 are fixed by welding, and the housing 62 and the base 63 are fixed by welding, so that the connection stability can be ensured, and the upper cover 61 and the base 63 are conveniently processed respectively; of course, in other alternative embodiments, the upper cover 61 may be integrally formed with the housing 62, and is not limited herein.
Claims (10)
1. A media-isolated strain gage differential pressure sensor comprising a first diaphragm, a first strain gage connected to the first diaphragm, and a package housing for carrying the first diaphragm, characterized in that: the second film and a second strain gauge connected with the second film are also included;
the packaging shell comprises an upper cover, a shell, a base and a film support, wherein a first film is connected with the upper cover, a second film is connected with the film support, a closed cavity is formed among the first film, the upper cover, the shell, the base, the second film and the film support, and the first strain gauge and the second strain gauge are arranged in the closed cavity;
the first strain gauge is connected with a first lead, a circuit switching assembly connected with the first lead is arranged in the closed cavity, and a first contact pin connected with the circuit switching assembly penetrates through the base;
the second strain gauge is connected with a second lead, and a second contact pin connected with the second lead penetrates through the base.
2. The media isolated strain gage differential pressure sensor of claim 1, wherein: the circuit switching assembly comprises a switching plate fixedly arranged on the inner end face of the upper cover, a bonding pad is arranged on the switching plate, and the first lead and the contact pin are respectively connected with the bonding pad.
3. The media isolated strain gage differential pressure sensor of claim 2, wherein: the adapter plate is provided with a sleeve connected with the welding disc, and the contact pin is embedded in the sleeve.
4. The media isolated strain gage differential pressure sensor of claim 3, wherein: a metal curing layer is arranged between the sleeve and the contact pin.
5. The media isolated strain gage differential pressure sensor of claim 3, wherein: the sleeve is in plug-in fit with the adapter plate.
6. The media isolated strain gage differential pressure sensor of claim 2, wherein: and a limiting groove matched with the adapter plate is formed in the inner end face of the upper cover.
7. The media isolated strain gage differential pressure sensor of claim 1, wherein: and an insulating sealing part is fixedly arranged between the first contact pin and the base and/or between the second contact pin and the base, and the insulating sealing part comprises a sintered glass column.
8. The media isolated strain gage differential pressure sensor of claim 1, wherein: the film support is embedded in the step hole from the outer side of the base.
9. The media isolated strain gage differential pressure sensor of claim 8, wherein: the film support is annular, and the film support protrusion is in the base surface.
10. The media isolated strain gage differential pressure sensor of claim 1, wherein: and a step joint surface is arranged between the upper cover and the shell and/or between the shell and the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210932744.1A CN115165171A (en) | 2022-08-04 | 2022-08-04 | Strain gauge type differential pressure sensor with isolated medium |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210932744.1A CN115165171A (en) | 2022-08-04 | 2022-08-04 | Strain gauge type differential pressure sensor with isolated medium |
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| CN115165171A true CN115165171A (en) | 2022-10-11 |
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| CN202210932744.1A Pending CN115165171A (en) | 2022-08-04 | 2022-08-04 | Strain gauge type differential pressure sensor with isolated medium |
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| CN212807437U (en) * | 2020-08-03 | 2021-03-26 | 厦门乃尔电子有限公司 | Core body of differential pressure sensor |
| CN216815831U (en) * | 2022-01-19 | 2022-06-24 | 昆山灵科传感技术有限公司 | Differential pressure sensor |
| CN114705354A (en) * | 2022-03-29 | 2022-07-05 | 孝感华工高理电子有限公司 | High waterproof high insulation welded tube structure pressure sensor |
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