CN115165097B - Optical measurement device and method based on multi-aperture imaging - Google Patents
Optical measurement device and method based on multi-aperture imaging Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
- G01J2003/2826—Multispectral imaging, e.g. filter imaging
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Abstract
The invention relates to a multi-parameter measuring device and a multi-parameter measuring method based on multi-aperture optical imaging. The laser emits a light source with specific wavelength to irradiate the sample to be detected, scattered light of the light source is imaged in the detector, transmitted light of the light source passes through the beam splitter to obtain a beam of transmitted light, a beam of reflected light passes through the circular adjustable filter to obtain a specific spectrum image in the specific spectrum detector, and the transmitted light passes through the beam splitting prism group to obtain a polarized image of [0 DEG, 45 DEG, 90 DEG, 135 DEG ]. And completing the identification of the target to be detected through computer processing. The invention combines the polarization imaging technology and the multispectral imaging technology on the basis of visible light imaging, thereby realizing the extraction of the information of different dimensions of the target to be detected.
Description
Technical Field
The invention designs a multi-parameter measuring device and a method based on multi-aperture optical imaging based on polarization imaging, multispectral imaging and multi-aperture imaging technologies.
Background
Light is used as a part of electromagnetic waves, and has multiple dimensional information such as amplitude, phase, wavelength, polarization and the like, and the interaction of the information and an object can invert a plurality of important target characteristics such as the shape, the position and the structure of the object. In the existing optical novel imaging technology, the application of polarization imaging, multispectral imaging and multi-aperture imaging is wide, and the development of the detector is mature. The polarization imaging greatly improves the information acquisition capability of an imaging system by receiving and resolving multi-dimensional information such as the polarization degree, the polarization angle and the like of the target and the background, and physical characteristics or internal components of the target can be detected by utilizing spectral imaging. The multi-aperture imaging can realize the detection of targets with multiple angles and large fields of view.
At present, a monocular or binocular camera is adopted to image the target in a visible light wave band, so that all characteristic information of the target is not sufficiently acquired, the information is extracted greatly influenced by the external environment, simultaneous measurement of multi-dimensional optical information cannot be realized, and the application range is limited to a certain extent.
Disclosure of Invention
The invention provides a multi-parameter measuring device and a measuring method based on multi-aperture optical imaging, which are used for solving the technical problems that the prior art is insufficient for acquiring all characteristic information of a target, is greatly influenced by external environment and cannot realize synchronous measurement of multi-dimension optical information.
In order to achieve the aim of the invention, the technical scheme of the invention is as follows: a multi-parameter measuring device based on multi-aperture optical imaging comprises a coordinated laser, a beam expansion and collimation system, a sample to be measured, a beam splitter, a round adjustable filter, a beam splitting prism group, a first detector, a second detector, a specific spectrum detector, a third detector, a fourth detector, a fifth detector, a sixth detector and a computer, wherein the beam expansion and collimation system is arranged on the beam splitter;
the light path adjusting mechanism, the sample to be detected, the beam splitter prism, the first polarization beam splitter prism and the fifth detector are sequentially arranged on an emergent light path of the coordinated laser, an output light beam of the laser irradiates the sample to be detected through the light path adjusting mechanism, a transmitted light beam respectively obtains a reflected light beam and a transmitted light beam through the beam splitter prism, and the transmitted light beam respectively enters the four detectors to form images through the beam splitter prism group;
The first detector and the second detector are arranged on the same vertical plane on one side of the incident light of the sample to be detected and equidistant from the center of the sample to be detected, and the vertical plane is perpendicular to the direction of the incident light;
The reflected light of the beam splitter passes through the circular adjustable filter and then enters the specific spectrum detector;
All detectors are connected with a computer.
The first detector and the second detector are arranged on a circular guide rail, and the center of the guide rail is coaxial with the center of the sample to be detected. The two parts can move in the range of 0-360 degrees.
The four detectors are a third detector, a fourth detector, a fifth detector and a sixth detector, so that polarized light beams in the [0 degree, 45 degrees, 90 degrees, 135 degrees ] four directions are respectively obtained, wherein the third detector receives polarized light beams in the 45 degree direction, the fourth detector receives polarized light beams in the 135 degree direction, the fifth detector receives polarized light beams in the 90 degree direction, and the sixth detector receives polarized light beams in the 0 degree direction.
The beam splitting prism group comprises a beam splitting prism, a first polarization beam splitting prism and a second polarization beam splitting prism, wherein each beam splitting prism consists of two right-angle glass prisms, and the hypotenuses of the two right-angle glass prisms are opposite.
The tunable laser is a wavelength tunable laser.
The light emitted by the coordinated laser is in a wave band of 400nm-1000 nm.
The measuring method of the multi-parameter measuring device based on the multi-aperture optical imaging comprises the following steps:
step 1: the laser can be coordinated to emit Gaussian beams, and the Gaussian beams are expanded and collimated through the beam expanding and collimating system and are incident on a sample to be measured;
Step 2: the sample to be measured is illuminated by a light source, scattered light of the sample to be measured is collected and imaged by a first detector and a second detector, the two detectors move in a range of 0-180 degrees on a semicircular guide rail, further target information of different positions is obtained, the target information is transmitted to a computer, and the shape, position and gesture information of the sample to be measured are extracted through camera calibration and image processing;
step 3: the transmitted light emitted by the sample to be detected passes through a beam splitter to obtain a beam of reflected light and a beam of transmitted light, wherein the reflected light passes through a circular adjustable filter to obtain spectral information of each wave band, and the spectral information is collected by a specific spectral detector and is transmitted to a computer;
The transmitted light is divided into polarized light beams in four directions of [0 degrees, 45 degrees, 90 degrees and 135 degrees ] after passing through the beam splitting prism group, and imaged in 4 detectors;
Step 4: the computer processes the image data sent by the seven detectors, receives and processes multidimensional information such as scattered field, polarization, spectrum and the like of the target to be detected, and comprehensively analyzes the target to be detected.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the invention, the scattered light images of the detection targets are respectively acquired through the plurality of detectors, the morphology of the targets is further analyzed, the spectrum information of the targets is acquired, the spectrum characteristics of the targets are analyzed, the polarized images of the targets [0 degrees, 45 degrees, 90 degrees and 135 degrees ] are acquired, and because the outside environment light, the reflected light of the targets to be detected and the scattered light in the atmosphere all have different polarization characteristics, the interference caused by the background light can be eliminated through solving the polarized images and the polarized information of a plurality of angles.
(2) And detecting scattered light of the target to be detected, receiving the scattered light by a detector, acquiring target information of different angles, reconstructing the distance information of the target by a camera calibration and image processing technology, and more comprehensively acquiring the three-dimensional position information of the target to realize real-time and accurate detection of the target.
(3) The coordinated laser 1 selects a light source to emit according to the characteristics of the target to be detected in a wave band of 400nm-1000nm, the extraction range of the spectral characteristics of the target to be detected is increased, the circular adjustable filter 5 divides the filtering range, and the detector with the highest peak sensitivity under the corresponding wavelength is selected, so that the characteristic information of the spectrum can be obtained maximally.
(4) The polarization imaging detection is realized by adopting a method of combining amplitude division and aperture division, the four detectors respectively and correspondingly receive pictures with different polarization states and then transmit the pictures to a computer to calculate the polarization degree and the polarization angle of the pictures, so that the information acquisition capacity of an imaging system is improved.
(5) The invention provides the information measuring device and the information measuring method for the multi-dimensional detection target in the complex environment, which not only can make up for the distortion and the deficiency of the information detected in a single dimension, but also can enrich the information of each dimension through the relevance research of multi-dimensional information, further accurately determine the position information and the characteristic information of the target, and provide more comprehensive basis for the evolution rule and the decision of the target to be predicted in the later stage.
Drawings
FIG. 1 is a schematic diagram of the structure of the measuring device of the present invention.
The device comprises a 1-coordinative laser, a 2-beam expanding and collimating system, a 3-sample to be detected, a 4-beam splitter, a 5-circular adjustable filter, a 6-beam splitter prism, a 7-first polarization beam splitter prism, an 8-second polarization beam splitter prism, a 9-first detector, a 10-second detector, a 11-specific spectrum detector, a 12-third detector, a 13-fourth detector, a 14-fifth detector, a 15-sixth detector, a 16-computer and a 17-guide rail.
Detailed Description
The invention is further illustrated by the following embodiments:
Examples: referring to fig. 1, a multi-parameter measuring device based on multi-aperture optical imaging comprises a coordinated laser 1, a beam expansion and collimation system 2, a sample 3 to be measured, a beam splitter 4, a circular adjustable filter 5, a beam splitting prism group, a first detector 9, a second detector 10, a specific spectrum detector 11, a third detector 12, a fourth detector 13, a fifth detector 14, a sixth detector 15 and a computer 16. The tunable laser 1 is a wavelength tunable laser, an outgoing light path of the tunable laser is sequentially provided with a light path adjusting mechanism 2, a sample 3 to be detected, a beam splitter 4, a beam splitter prism 6, a first polarization beam splitter prism 7 and a fifth detector 14, an output light beam of the laser 1 irradiates the sample 3 to be detected through the light path adjusting mechanism 2, a transmitted light beam respectively obtains a reflected light beam and a transmitted light beam through the beam splitter 4, and the transmitted light beam respectively enters four detectors through the beam splitter prism group to form images. The first detector 9 and the second detector 10 are arranged on a circular guide rail 17 on one side of incident light of the sample to be detected, a movement plane of the first detector 9 and the second detector 10 on the guide rail 17 is perpendicular to the direction of the incident light, the circle center of the movement plane is coaxial with the center of the sample to be detected, and the first detector 9 and the second detector 10 are arranged at equal intervals with the center of the sample to be detected 3. The reflected light of the beam splitter 4 passes through the circular adjustable filter 5 and then enters the specific spectrum detector 11. All of the detectors are connected to a computer 16.
The four detectors are a third detector 12, a fourth detector 13, a fifth detector 14 and a sixth detector 15, so as to respectively obtain polarized light beams in [0 °,45 °,90 °,135 ° ] four directions, wherein the third detector 12 receives the polarized light beam in the 45 ° direction, the fourth detector 13 receives the polarized light beam in the 135 ° direction, the fifth detector 14 receives the polarized light beam in the 90 ° direction, and the sixth detector 15 receives the polarized light beam in the 0 ° direction.
The beam splitting prism group comprises a beam splitting prism 6, a first polarization beam splitting prism 7 and a second polarization beam splitting prism 8, each beam splitting prism consists of two right-angle glass prisms, and hypotenuses of the two right-angle glass prisms are opposite.
In the present embodiment, the tuning range of the tunable laser 1 is 400nm to 1000nm. The method comprises visible light and near infrared short wave regions, and for the division of spectrum bands, the following modes are adopted: in the visible light range, the three spectrum detection is carried out according to the light wave lengths corresponding to red, orange, yellow, green, cyan, blue and purple, in the near infrared wavelength range, the three spectrum detection is carried out in the 800-1000nm range.
The circular adjustable optical filter 5 realizes adjustment of optical energy in a circular linear direction, and a detector with highest peak sensitivity under corresponding wavelength is selected as a specific spectrum detector 11 to finish measurement of a specific spectrum.
The detection method of the multi-parameter measurement device based on multi-aperture optical imaging provided by the invention can coordinate the laser 1 to irradiate the sample 3 to be detected, uses scattered light to image, and synchronously acquires a specific spectrum image and a polarized image of [0 °,45 °,90 °,135 ° ].
The method specifically comprises the following steps:
step 1: firstly, a Gaussian beam is emitted by a coordinated laser 1, and is expanded and collimated by an expanded beam collimation system 2, and then is incident on a sample 3 to be measured.
Step 2: the sample 3 to be measured is illuminated by a light source, scattered light of the sample 3 to be measured is collected and imaged by a first detector 9 and a second detector 10, the two detectors symmetrically move relative to the center point of the sample 3 to be measured in a range of 0-180 degrees on a semicircular guide rail 17, the scattered light on the incident side of the sample 3 to be measured is imaged by the first detector 9 and the second detector 10, target information with different angles is obtained, the target information is transmitted to a computer to be processed, and the shape, position and gesture information of the sample 3 to be measured are extracted.
Step 3: the transmitted light emitted by the sample 3 to be measured is passed through a beam splitter 4 to obtain a beam of reflected light and a beam of transmitted light. The reflected light passes through a circular adjustable filter 5 to obtain spectral information of each wave band, and the spectral information is collected through a specific spectral detector 11 and is transmitted to a computer to obtain physical characteristics or internal components of a sample 3 to be detected; the transmitted light obtained through the beam splitter 4 is split into polarized light beams in four directions of [0 °,45 °,90 °,135 ° ] after passing through the beam splitter prism group, and imaged in 4 detectors. And is transmitted to a computer to improve the imaging quality of the imaging system in a complex environment.
Step 4: the computer processes the image data sent by the seven detectors, receives and processes multidimensional information such as scattered fields, polarization, spectrum and the like of the target to be detected, comprehensively analyzes the target to be detected and improves the recognition capability of target detection.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and some practical embodiments, and variations and modifications may be made by those skilled in the art without departing from the inventive concept, which are all within the scope of the present invention.
Claims (4)
1. The measuring method of the multi-parameter measuring device based on multi-aperture optical imaging comprises the steps of adopting a device comprising a coordinative laser (1), a beam expanding and collimating system (2), a sample to be measured (3), a beam splitter (4), a round adjustable optical filter (5), a beam splitting prism group, a first detector (9), a second detector (10), a specific spectrum detector (11), a third detector (12), a fourth detector (13), a fifth detector (14), a sixth detector (15) and a computer (16);
The beam expanding and collimating system (2), the sample to be detected (3), the beam splitting mirror (4), the beam splitting prism (6), the first polarization beam splitting prism (7) and the fifth detector (14) are sequentially arranged on an emergent light path of the coordinated laser (1), an output light beam of the laser (1) irradiates the sample to be detected (3) through the beam expanding and collimating system (2), a transmitted light beam respectively obtains a reflected light beam and a transmitted light beam through the beam splitting mirror (4), and the transmitted light beam respectively enters the four detectors through the beam splitting prism group to form images;
The first detector (9) and the second detector (10) are arranged on the same vertical plane on one side of the incident light of the sample to be detected and equidistant from the center of the sample to be detected (3), and the same vertical plane is perpendicular to the direction of the incident light;
The reflected light of the beam splitter (4) passes through the circular adjustable optical filter (5) and then enters the specific spectrum detector (11);
All the detectors are connected with a computer (16);
The first detector (9) and the second detector (10) are arranged on a circular guide rail (17), the center of the guide rail (17) is coaxial with the center of the sample to be detected, and the two parts can move within the range of 0-360 degrees;
The four detectors are a third detector (12), a fourth detector (13), a fifth detector (14) and a sixth detector (15) which respectively obtain polarized light beams in four directions of [0 degrees, 45 degrees, 90 degrees and 135 degrees ], wherein the third detector (12) receives the polarized light beams in the 45 degrees, the fourth detector (13) receives the polarized light beams in the 135 degrees, the fifth detector (14) receives the polarized light beams in the 90 degrees, and the sixth detector (15) receives the polarized light beams in the 0 degrees; the method is characterized in that: the method comprises the following steps:
Step 1: the laser (1) can be coordinated to emit Gaussian beams, the beam expansion and collimation are carried out through the beam expansion and collimation system (2), and the Gaussian beams are incident on a sample (3) to be measured;
Step 2: the sample (3) to be measured is illuminated by a light source, scattered light of the sample is collected and imaged by a first detector (9) and a second detector (10), the two detectors move in a range of 0-180 degrees on a semicircular guide rail (17), further target information at different positions is obtained, the target information is transmitted to a computer, and the shape, position and gesture information of the sample (3) to be measured are extracted through camera calibration and image processing;
Step 3: the transmitted light emitted by the sample (3) to be tested passes through a beam splitter (4) to obtain a beam of reflected light and a beam of transmitted light, wherein the reflected light passes through a circular adjustable filter (5) to obtain spectral information of each wave band, and the spectral information is collected through a specific spectral detector (11) and is transmitted to a computer;
The transmitted light is divided into polarized light beams in four directions of [0 degrees, 45 degrees, 90 degrees and 135 degrees ] after passing through the beam splitting prism group, and imaged in 4 detectors;
step 4: the computer processes the image data sent by the seven detectors, receives and processes multidimensional information of scattering fields, polarization and spectrums of the target to be detected, and comprehensively analyzes the target to be detected.
2. The measurement method of the multi-parameter measurement device based on multi-aperture optical imaging according to claim 1, wherein: the beam splitting prism group comprises a beam splitting prism (6), a first polarization beam splitting prism (7) and a second polarization beam splitting prism (8), each beam splitting prism is composed of two right-angle glass prisms, and hypotenuses of the two right-angle glass prisms are opposite.
3. The measurement method of a multi-parameter measurement device based on multi-aperture optical imaging according to claim 1 or 2, characterized in that: the tunable laser (1) is a wavelength tunable laser.
4. A method of measuring a multi-parameter measurement device based on multi-aperture optical imaging as claimed in claim 3, wherein: the light emitted by the laser (1) can be coordinated to be in the wave band of 400nm-1000 nm.
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| CN101806723A (en) * | 2010-04-02 | 2010-08-18 | 中国科学院上海光学精密机械研究所 | Double-beam multifunctional z-scanning optical nonlinear measuring device and method |
| CN101871815A (en) * | 2009-04-24 | 2010-10-27 | 中国科学院西安光学精密机械研究所 | Programmable polarization hyperspectral imager based on aperture segmentation and acousto-optic tunable filter |
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| WO2005029015A2 (en) * | 2003-06-25 | 2005-03-31 | The University Of Akron | Multispectral, multifusion, laser-polarimetric optical imaging system |
| CN106644083B (en) * | 2017-02-23 | 2018-05-29 | 深圳大学 | The polarization spectrum characteristic measuring device and system of Terahertz material |
| CN108760048B (en) * | 2018-04-13 | 2024-01-30 | 中国科学院西安光学精密机械研究所 | Optical coherence micro-spectrum imaging detection device based on acousto-optic tunable filter |
| WO2021155363A1 (en) * | 2020-01-31 | 2021-08-05 | Photothermal Spectroscopy Corp. | Method and apparatus for high performance wide field photothermal infrared spectroscopy and imaging |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101871815A (en) * | 2009-04-24 | 2010-10-27 | 中国科学院西安光学精密机械研究所 | Programmable polarization hyperspectral imager based on aperture segmentation and acousto-optic tunable filter |
| CN101806723A (en) * | 2010-04-02 | 2010-08-18 | 中国科学院上海光学精密机械研究所 | Double-beam multifunctional z-scanning optical nonlinear measuring device and method |
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