CN115163494A - Dry vacuum pump with compound cooling function - Google Patents

Dry vacuum pump with compound cooling function Download PDF

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Publication number
CN115163494A
CN115163494A CN202210954417.6A CN202210954417A CN115163494A CN 115163494 A CN115163494 A CN 115163494A CN 202210954417 A CN202210954417 A CN 202210954417A CN 115163494 A CN115163494 A CN 115163494A
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CN
China
Prior art keywords
pump
shell
rotor
cooling
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210954417.6A
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Chinese (zh)
Inventor
宋月坤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tutu Vacuum Technology Jiaxing Co ltd
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Tutu Vacuum Technology Jiaxing Co ltd
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Publication date
Application filed by Tutu Vacuum Technology Jiaxing Co ltd filed Critical Tutu Vacuum Technology Jiaxing Co ltd
Priority to CN202210954417.6A priority Critical patent/CN115163494A/en
Publication of CN115163494A publication Critical patent/CN115163494A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/30Casings or housings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention discloses a dry vacuum pump with a composite cooling function, which comprises a pump body and a pump shell, wherein the pump body is arranged in the pump shell; the pump body comprises a rotor shell, a working cavity is arranged in the middle of the rotor shell, and the rotor is arranged in the working cavity; a water jacket is arranged on the outer side of the working cavity, and cooling liquid is arranged in the water jacket; an air inlet is formed in a panel at one end of the pump shell, a fan is mounted on a panel at the other end of the pump shell, a cooling air channel is formed between the rotor shell and the pump shell, and heat dissipation ribs are arranged on the outer side of the rotor shell. The invention integrates water cooling and air cooling, and utilizes the cooling liquid to quickly take away the heat of local high temperature of the pump body, so that the pump body is not easy to be heated and deformed, and the stability of the pump is increased; the fan and the air inlet are matched to work, air is guided by the heat dissipation ribs outside the rotor shell, air flow rate is improved, and cooling efficiency is improved.

Description

Dry vacuum pump with compound cooling function
Technical Field
The invention relates to the technical field of vacuum pumps, in particular to a dry vacuum pump with a composite cooling function.
Background
The dry vacuum pump is also called an oil-free vacuum pump or a dry oil-free vacuum pump, is a vacuum pump without lubricating oil in a working cavity, and is widely applied to the fields of semiconductors, photovoltaics, plasma technologies, aerospace and the like. The dry vacuum pumps in the current market mainly comprise a dry screw vacuum pump, a dry multi-stage roots vacuum pump, a dry claw vacuum pump and a dry composite screw vacuum pump.
The dry vacuum pump has two cooling modes, namely wind cooling and water cooling. The water cooling means that a water tank is arranged on the shell of the dry vacuum pump, cooling water flows in the water tank, and heat is taken away by the cooling water. The water cooling and air cooling is a mode of directly blowing air with lower temperature to a shell of the pump through a fan of a motor on the vacuum pump or an external fan to dissipate heat. Both water cooling and air cooling have their own advantages and disadvantages:
the water cooling has the advantages that:
1. the cooling is sufficient, and the cooling effect is good;
2. the cooling is uniform, and the condition that the local temperature is extremely high is avoided;
3. the pump has compact structure, no rotating part of the pump is exposed in a mode of using a water-cooling sealing motor, and the safety is improved;
4. the pump mounting position is not too demanding and ventilation is not a concern.
The disadvantages of water cooling:
1. cooling water needs to be additionally provided, and the temperature of the cooling water needs to be within a certain range;
2. for reasons of cooling the water pipes, the pump is not convenient to move once it is fixed in position.
The air cooling has the advantages that:
1. the pump can be cooled without external cooling water, so that the pump can work normally;
2. the installation position of the air cooling equipment can be moved at any time.
The air cooling has the following defects:
1. the temperature of the pump body is uneven, local high temperature is easily formed on the shell of the pump, particularly near the air outlet, and when the environmental temperature is slightly changed, faults are likely to be generated due to overlarge local deformation, so that the stable operation of the pump is influenced;
2. the heat dissipation is uneven, because the installation position of the fan is fixed, the air flow is larger at the position close to the fan, the air flow is smaller at the position far away from the fan, and the heat dissipation effect is poor;
3. certain requirements are placed on the installation position, a certain distance needs to be kept between the front part, the back part, the left part, the right part, the upper part and the lower part, so that the pump can ventilate normally and is convenient to cool, and faults can be caused if the ventilation is not good.
The conventional air cooling and water cooling modes can not well cool the dry vacuum pump, so that the pump body deforms due to overhigh temperature, and the service life of the vacuum pump is influenced.
Disclosure of Invention
In order to solve the problems, the invention provides a dry vacuum pump with a composite cooling function, which integrates the functions of air cooling and water cooling, exerts the advantages of the air cooling and the water cooling, quickly cools the vacuum pump and ensures the service life of the vacuum pump.
Therefore, the technical scheme of the invention is as follows: a dry vacuum pump with a composite cooling function comprises a pump body and a pump shell, wherein the pump body is arranged in the pump shell; the pump body comprises a rotor shell, a working cavity is arranged in the middle of the rotor shell, and the rotor is arranged in the working cavity; a water jacket is arranged on the outer side of the working cavity, and cooling liquid is arranged in the water jacket; an air inlet is formed in one end panel of the pump shell, a fan is mounted on the other end panel of the pump shell, a cooling air channel is formed between the rotor shell and the pump shell, and heat dissipation ribs are arranged on the outer side of the rotor shell.
The invention integrates two cooling modes of water cooling and air cooling, a water jacket is arranged in the rotor shell, and cooling liquid flows in the water jacket to take away heat generated in a working cavity; meanwhile, the pump shell is provided with the fan and the air inlet, when the fan runs, air flows from the outer side of the rotor shell to take away heat in the water jacket, the two modes of water cooling and air cooling are combined, and the high-temperature deformation of the pump body is prevented through the cooling rate. When the pump runs, heat generated in the working cavity is transferred to cooling liquid in the water jacket, the cooling liquid transfers the heat to the rotor shell with the heat dissipation ribs, the running fan sucks a large amount of air from the air inlet, the air rapidly flows along the surface of the pump body and takes away the heat, and the air is discharged by the fan, so that the rapid cooling of the pump is realized.
Preferably, a plurality of heat dissipation ribs are arranged on both side surfaces and the top surface of the rotor shell, and the heat dissipation ribs are parallel to the central shaft of the rotor; and a diversion trench is formed between the adjacent heat dissipation ribs. The heat dissipation ribs on the outer side of the rotor shell can increase the contact area of the rotor shell and air, and improve the heat dissipation efficiency; the heat dissipation muscle parallels with the axial of rotor, and the heat dissipation muscle can not block the air flow between air intake and the fan promptly, and the heat dissipation muscle can carry out the water conservancy diversion to the air for the air flow is more smooth and easy, accelerates the air flow, and the heat dissipation is faster.
Preferably, an exhaust end cover is arranged at one end of the rotor shell facing the front cover plate of the shell, the air inlet is formed in the front cover plate of the pump shell, and the fan is arranged on the rear cover plate, close to the rotor, of the pump shell. The air inlet is arranged on one side of the exhaust end cover, the temperature on the side of the exhaust end cover is higher, when the fan rotates, air enters from the air inlet and flows to the fan from the side where the exhaust end cover is located, and heat on the radiating ribs is taken away in the flowing process.
Preferably, the pump body is arranged on the base, a pump shell is sleeved on the pump body, and the pump shell is fixedly connected with the base; and a wind shield is arranged on the inner side of the pump shell. The wind shield on the inner side of the pump shell can guide air flow to flow along the surface of the pump body, and the air flow is quickly cooled.
Preferably, a water tank is arranged in the pump shell, and the water tank is communicated with the water jacket. The water tank is connected with the water jacket through a pipeline, so that cooling liquid in the water jacket can be supplemented in time, and the cooling liquid is convenient to overflow and return when expanding with heat and contracting with cold.
Preferably, the cooling liquid in the water jacket is water or a mixed liquid of water and glycol. The high temperature of the exhaust position can be taken away fast by the cooling liquid, so that the temperature inside the pump body is uniform, and the service life of the pump body is prolonged.
Preferably, the pump housing is a sheet metal part or a plastic molded part.
Compared with the prior art, the invention has the beneficial effects that:
1) The cooling liquid can quickly take away the heat of local high temperature, and the temperature of the cooling liquid in the pump body is relatively uniform, so that the surface of the working cavity cannot form local high temperature, the pump body is not easy to be deformed by heat, and the stability of the pump is improved;
2) The fan and the air inlet are matched to work, air is guided by the heat dissipation ribs on the outer side of the rotor shell, the air flow rate is improved, the temperature of cooling liquid is quickly reduced, the contact area of the rotor shell and the air is increased by the heat dissipation ribs, the cooling efficiency is greatly improved, and the cooling effect is good;
3) The integral structure is simple, the installation is convenient, the requirement on the installation position is low, and the application range is wide.
Drawings
The following detailed description is made with reference to the accompanying drawings and embodiments of the present invention
FIG. 1 is a schematic view of the internal structure of the present invention;
FIG. 2 isbase:Sub>A cross-sectional view A-A of FIG. 1;
FIG. 3 is a front side view of the present invention;
fig. 4 is a rear side view of the present invention.
Labeled as: the pump body 1, the rotor shell 11, the working cavity 12, the rotor 13, the water jacket 14, the water tank 15, the heat dissipation cover plate 16, the heat dissipation ribs 17, the exhaust end cover 18, the pump shell 2, the base 21, the upper cover plate 22, the front cover plate 23, the rear cover plate 24, the upper wind shield plate 25, the lower wind shield plate 26, the air inlet 31, the air outlet 32, the air inlet 4 and the fan 5.
Detailed Description
In the description of the present invention, it should be noted that, for the terms of orientation, such as "central", "lateral (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate that the orientation and positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and should not be construed as limiting the specific scope of the present invention.
Furthermore, if the terms "first" and "second" are used for descriptive purposes only, they are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. Thus, a definition of "a first" or "a second" feature may, explicitly or implicitly, include one or more of the features, and in the context of this disclosure, a "plurality" or "a plurality" means two or more unless otherwise explicitly specified.
See the drawings. The dry vacuum pump comprises a pump body 1 and a pump shell 2, wherein the pump shell 2 comprises a base 21 and peripheral cover plates, the pump body 1 is arranged on the base 21, and the peripheral cover plates are sheet metal parts and made of cast iron or aluminum alloy; an air inlet 31 is arranged at the upper cover plate 22 of the pump shell 2, an air inlet 4 and an air outlet 32 are arranged at the front cover plate 23, and the air outlet 32 is positioned below the front cover plate 23; at least one fan 5 is arranged at the position of the rear cover plate 24, and an air outlet is arranged in the middle of the fan. When the fan 5 works, air enters from the air inlet 4 of the front cover plate and is discharged by the fan 5, and heat outside the pump body is taken away. The inner side of the pump shell upper cover plate 22 is provided with an upper wind shield 25, the base is provided with a lower wind shield 26, and the upper wind shield 25 and the lower wind shield 26 can guide airflow to flow along the surface of the pump body 1 for rapid cooling.
The pump body 1 comprises a rotor shell 11, a working cavity 12 is arranged in the middle of the rotor shell, and a rotor 13 is arranged in the working cavity; the outer side of the working cavity 12 is provided with a water jacket 14, a cooling liquid is arranged in the water jacket, and the cooling liquid in the water jacket can be water or a mixed liquid of water and glycol. The high temperature of the exhaust position can be taken away fast by the cooling liquid, so that the temperature inside the pump body is uniform, and the service life of the pump body is prolonged.
A water tank 15 is arranged in the pump shell 2, the water tank 15 is communicated with the water jacket 14 through a pipeline, cooling liquid in the water jacket can be supplemented in time, and overflowing and backflow of the cooling liquid during expansion and contraction are facilitated.
The panels on the left, right and top of the rotor housing 11 are heat dissipating cover plates 16 made of aluminum or copper alloy. A plurality of radiating ribs 17 are arranged on the outer side of the radiating cover plate 16, and the radiating ribs are parallel to the direction of the central shaft of the rotor; and a diversion trench is formed between the adjacent heat dissipation ribs. The heat-radiating cover plate 16 and the outer side of the working cavity 12 of the rotor shell form a closed water jacket 14, namely, the inner side of the heat-radiating cover plate is in contact with the cooling liquid, so that heat conduction between the cooling liquid and the heat-radiating ribs is facilitated, and the temperature of the cooling liquid is reduced.
The heat dissipation ribs 17 on the outer side of the rotor shell 11 can increase the contact area of the rotor shell and air, and improve the heat dissipation efficiency; the heat dissipation rib is parallel to the axial direction of the rotor, namely the heat dissipation rib can not block air flowing between the air inlet and the fan, and the heat dissipation rib can guide air, so that the air flowing is smoother, the air flowing is accelerated, and the heat dissipation is quicker.
An exhaust end cover 18 is arranged at one end, facing a front cover plate of the shell, of the rotor shell 11, the air inlet 4 is formed in one side of the exhaust end cover, the temperature of the side of the exhaust end cover is higher, when the fan 5 rotates, air enters from the air inlet and flows to the fan from the side where the exhaust end cover is located, and in the flowing process, heat on the heat dissipation ribs is taken away.
When the pump body 1 works, the rotor 13 can generate heat when running, the heat is transferred to the cooling liquid in the water jacket 14 through the cavity wall of the working cavity 12, the temperature of the exhaust end of the pump body is highest, the cooling liquid can rapidly reduce local high temperature, and then the cooling liquid starts to flow after being heated, so that the temperature of the cooling liquid is uniform, and the pump body cannot deform due to the local high temperature; meanwhile, the fan 5 works, a large amount of air is sucked from the air inlet 4 of the front cover plate of the pump shell and flows rapidly along the outer side of the pump body 1, heat transmitted to the heat dissipation cover plate 16 by cooling liquid is taken away, and the air is discharged by the fan 5, so that the pump body 1 is cooled rapidly.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.

Claims (7)

1. A dry vacuum pump with a composite cooling function comprises a pump body and a pump shell, wherein the pump body is arranged in the pump shell; the pump body comprises a rotor shell, a working cavity is arranged in the middle of the rotor shell, and the rotor is arranged in the working cavity; the method is characterized in that: a water jacket is arranged on the outer side of the working cavity, and cooling liquid is arranged in the water jacket; an air inlet is formed in a panel at one end of the pump shell, a fan is mounted on a panel at the other end of the pump shell, a cooling air channel is formed between the rotor shell and the pump shell, and heat dissipation ribs are arranged on the outer side of the rotor shell.
2. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: a plurality of heat dissipation ribs are arranged on the two side faces and the top face of the rotor shell, and the heat dissipation ribs are parallel to the central shaft of the rotor; and a diversion trench is formed between the adjacent heat dissipation ribs.
3. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: an exhaust end cover is arranged at one end of the rotor shell, which faces to the front cover plate of the shell, an air inlet is arranged on the front cover plate of the pump shell, and a fan is arranged on the rear cover plate of the pump shell, which is close to the rotor.
4. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: the pump body is arranged on the base, a pump shell is sleeved on the pump body, and the pump shell is fixedly connected with the base; and a wind shield is arranged on the inner side of the pump shell.
5. A dry vacuum pump with a combined cooling function as set forth in claim 1, wherein: a water tank is arranged in the pump shell and communicated with the water jacket.
6. A dry vacuum pump with a combined cooling function as set forth in claim 1, wherein: the cooling liquid in the water jacket is water or a mixed liquid of water and glycol.
7. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: the pump shell is a sheet metal part or a plastic forming part.
CN202210954417.6A 2022-08-10 2022-08-10 Dry vacuum pump with compound cooling function Pending CN115163494A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210954417.6A CN115163494A (en) 2022-08-10 2022-08-10 Dry vacuum pump with compound cooling function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210954417.6A CN115163494A (en) 2022-08-10 2022-08-10 Dry vacuum pump with compound cooling function

Publications (1)

Publication Number Publication Date
CN115163494A true CN115163494A (en) 2022-10-11

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ID=83480258

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210954417.6A Pending CN115163494A (en) 2022-08-10 2022-08-10 Dry vacuum pump with compound cooling function

Country Status (1)

Country Link
CN (1) CN115163494A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115507579A (en) * 2022-10-26 2022-12-23 山东博科真空科技有限公司 Screw cooling device of screw vacuum pump
CN116838609A (en) * 2023-07-05 2023-10-03 山东亿宁环保科技有限公司 Claw type vacuum pump cooling system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115507579A (en) * 2022-10-26 2022-12-23 山东博科真空科技有限公司 Screw cooling device of screw vacuum pump
CN115507579B (en) * 2022-10-26 2023-12-22 山东博科真空科技有限公司 Screw cooling device of screw vacuum pump
CN116838609A (en) * 2023-07-05 2023-10-03 山东亿宁环保科技有限公司 Claw type vacuum pump cooling system
CN116838609B (en) * 2023-07-05 2024-02-27 山东亿宁环保科技有限公司 Claw type vacuum pump cooling system

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