CN115163494A - A dry vacuum pump with compound cooling function - Google Patents

Abstract

The invention discloses a dry type vacuum pump with compound cooling function, comprising a pump body and a pump casing, the pump body is placed in the pump casing; the pump body comprises a rotor casing, a working cavity is arranged in the middle of the rotor casing, and the rotor is placed in the pump casing. in the working chamber; the outer side of the working chamber is provided with a water jacket, and the cooling liquid is arranged in the water jacket; one end panel of the pump casing is provided with an air inlet, the other end panel is installed with a fan, the rotor casing and the pump casing A cooling air duct is formed between them, and cooling ribs are arranged on the outside of the rotor housing. The invention integrates two cooling modes, water cooling and air cooling, and uses the cooling liquid to quickly take away the heat of the local high temperature of the pump body, the pump body is not easily deformed by heat, and the stability of the pump is increased; The heat dissipation ribs on the outside of the body drain the air to increase the air flow rate and improve the cooling efficiency.

Description

A dry vacuum pump with compound cooling function

technical field

The invention relates to the technical field of vacuum pumps, in particular to a dry-type vacuum pump with a composite cooling function.

Background technique

Dry vacuum pump, also known as oil-free vacuum pump or dry oil-free vacuum pump, is a vacuum pump without lubricating oil in the working chamber, which is widely used in semiconductor, photovoltaic, plasma technology, aerospace and other fields. At present, the dry vacuum pumps on the market mainly include dry screw vacuum pumps, dry multi-stage Roots vacuum pumps, dry claw vacuum pumps, and dry composite screw vacuum pumps.

The cooling methods of dry vacuum pump are air-cooled and water-cooled. Water cooling means that a water tank is opened on the shell of the dry vacuum pump, cooling water flows in the water tank, and the heat is taken away by the cooling water. Water-cooling and air-cooling is a method of blowing lower temperature air to the pump casing directly through the fan of the motor on the vacuum pump or an external fan to dissipate heat. Both water cooling and air cooling have their own advantages and disadvantages:

Advantages of water cooling:

1. Sufficient cooling and good cooling effect;

2. The cooling is uniform, and the local temperature is not particularly high;

3. The structure of the pump is compact, and by using a water-cooled sealed motor, the pump has no exposed rotating parts to improve safety;

4. The installation position of the pump does not have too high requirements, and ventilation does not need to be considered.

Disadvantages of water cooling:

1. Additional cooling water needs to be provided, and the temperature of the cooling water must be within a certain range;

2. Because of the cooling water pipe, it is inconvenient to move the pump once the position is fixed.

Advantages of air cooling:

1. The pump can be cooled without external cooling water to make it work normally;

2. The installation location of the air-cooled equipment can be moved at any time.

Disadvantages of air cooling:

1. The temperature of the pump body is uneven, and the shell of the pump, especially near the exhaust port, is prone to local high temperature. When the ambient temperature changes slightly, it may cause failure due to excessive local deformation, affecting the stable operation of the pump;

2. The heat dissipation is uneven, because the fan installation position is fixed, the air flow near the fan is larger, and the air flow away from the fan is smaller, and the heat dissipation effect is also poor;

3. There are certain requirements for the installation position, and a certain distance must be kept at the front, back, left, right, up, and down, so that the pump can be properly ventilated for cooling. If the ventilation is not good, failure may occur.

The conventional air-cooling and water-cooling cooling methods cannot cool the dry vacuum pump well, resulting in the deformation of the pump body due to excessive temperature, which affects the service life of the vacuum pump.

SUMMARY OF THE INVENTION

In order to solve the above problems, the present invention provides a dry vacuum pump with a composite cooling function, which integrates the functions of air cooling and water cooling, and utilizes the advantages of both to rapidly cool the vacuum pump and ensure the service life of the vacuum pump.

To this end, the technical solution of the present invention is: a dry vacuum pump with a composite cooling function, comprising a pump body and a pump casing, and the pump body is placed in the pump casing; the pump body includes a rotor casing, and the rotor casing is arranged in the middle. There is a working cavity, and the rotor is placed in the working cavity; the outer side of the working cavity is provided with a water jacket, and the cooling liquid is arranged in the water jacket; one end panel of the pump casing is provided with an air inlet, and the other end panel is provided with a fan, A cooling air duct is formed between the rotor casing and the pump casing, and cooling ribs are arranged on the outside of the rotor casing.

The invention integrates two cooling modes, water cooling and air cooling. A water jacket is arranged in the rotor casing, and the cooling liquid flows in the water jacket to take away the heat generated in the working chamber; meanwhile, a fan and an air inlet are arranged on the pump casing. , When the fan is running, the air flows from the outside of the rotor casing, taking away the heat in the water jacket, combining the two methods of water cooling and air cooling, and preventing the high temperature deformation of the pump body through the cooling rate. When the pump is running, the heat generated in the working chamber is transferred to the cooling liquid in the water jacket, and the cooling liquid then transfers the heat to the rotor casing with cooling ribs. The running fan sucks a large amount of air from the air inlet, along the pump body. The surface flows quickly and carries heat away, which is expelled by the fan, thereby achieving rapid cooling of the pump.

Preferably, a plurality of heat dissipation ribs are provided on both sides and the top surface of the rotor housing, and the heat dissipation ribs are parallel to the central axis of the rotor; and a flow guide groove is formed between the adjacent heat dissipation ribs. The heat dissipation ribs on the outside of the rotor casing can increase the contact area between the rotor casing and the air, and improve the heat dissipation efficiency; The ribs can guide the air, making the air flow more smoothly, speeding up the air flow, and dissipating heat faster.

Preferably, the rotor casing is provided with an exhaust end cover at one end facing the casing front cover, the air inlet is arranged on the front cover of the pump casing, and the fan is arranged on the rear cover of the pump casing close to the rotor. The air inlet is set on the side of the exhaust end cover, and the temperature on the side of the exhaust end cover is higher. When the fan rotates, the air enters from the air inlet and flows from the side of the exhaust end cover to the fan. During the flow, the heat is dissipated. The heat on the tendons is taken away.

Preferably, the pump body is installed on the base, the pump casing is sleeved on the top, and the pump casing is fixedly connected with the base; the inner side of the pump casing is provided with a wind shield. The air baffle on the inside of the pump casing can guide the air flow along the surface of the pump body to quickly cool down.

Preferably, a water tank is provided in the pump casing, and the water tank and the water jacket communicate with each other. The water tank is connected to the water jacket through pipes, which can replenish the cooling liquid in the water jacket in time, which is convenient for the overflow and backflow of the cooling liquid when the cooling liquid expands and contracts.

Preferably, the cooling liquid in the water jacket is water, or a mixed liquid of water and ethylene glycol. The coolant can quickly take away the high temperature at the exhaust, so that the internal temperature of the pump body is uniform and the service life of the pump body is prolonged.

Preferably, the pump casing is a sheet metal part or a plastic molded part.

Compared with the prior art, the beneficial effects of the present invention are:

1) The cooling liquid can quickly take away the heat of local high temperature, and make the temperature of the cooling liquid inside the pump body relatively uniform, so that the surface of the working cavity will not form a local high temperature, the pump body is not easily deformed by heat, and the stability of the pump is increased;

2) The fan cooperates with the air inlet, and the air is drained by the heat dissipation ribs on the outside of the rotor casing, which increases the air flow rate and quickly reduces the temperature of the cooling liquid, and the heat dissipation ribs increase the contact area between the rotor casing and the air, which greatly improves the cooling efficiency. , the cooling effect is good;

3) The overall structure is simple, the installation is convenient, the requirements for the installation position are low, and the scope of application is wide.

Description of drawings

Further detailed description will be given below in conjunction with the accompanying drawings and the embodiments of the present invention

Fig. 1 is the internal structure schematic diagram of the present invention;

Fig. 2 is the A-A sectional view of Fig. 1;

Fig. 3 is the front side view of the present invention;

Figure 4 is a rear side view of the present invention.

Marked in the figure: pump body 1, rotor housing 11, working chamber 12, rotor 13, water jacket 14, water tank 15, heat dissipation cover plate 16, heat dissipation ribs 17, exhaust end cover 18, pump casing 2, base 21, The upper cover 22 , the front cover 23 , the rear cover 24 , the upper windshield 25 , the lower windshield 26 , the air inlet 31 , the air outlet 32 , the air inlet 4 , and the fan 5 .

Detailed ways

In the description of the present invention, it should be noted that for orientation words, such as the terms "center", "horizontal (X)", "longitudinal (Y)", "vertical (Z)", "length", " Width, Thickness, Top, Bottom, Front, Back, Left, Right, Vertical, Horizontal, Top, Bottom, Inside ", "outside", "clockwise", "counterclockwise" and other indications of orientation and positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying The device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and should not be construed as limiting the specific protection scope of the present invention.

In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or indicating the number of technical features. Therefore, defining the "first" and "second" features may expressly or implicitly include one or more of the features, and in the description of the present invention, "several" and "several" mean two or two above, unless otherwise expressly specifically defined.

See attached image. The dry vacuum pump described in this embodiment includes a pump body 1 and a pump casing 2. The pump casing 2 includes a base 21 and surrounding cover plates. The pump body 1 is placed on the base 21, and the surrounding cover plates are sheet metal parts. Made of cast iron or aluminum alloy; the upper cover plate 22 of the pump casing 2 is provided with an air inlet 31, the front cover plate 23 is provided with an air inlet 4 and an exhaust port 32, and the exhaust port 32 is located below the front cover plate 23; At least one fan 5 is provided at the rear cover plate 24, and an air outlet is located in the middle of the fan. When the fan 5 is working, the air enters from the air inlet 4 of the front cover and is discharged by the fan 5 to take away the heat outside the pump body. The inner side of the upper cover plate 22 of the pump casing is provided with an upper wind shield 25, and the base is provided with a lower wind shield 26. The upper wind shield 25 and the lower wind shield 26 can guide the airflow to flow along the surface of the pump body 1, quickly. Cool down.

The pump body 1 includes a rotor casing 11, a working chamber 12 is arranged in the middle of the rotor casing, and the rotor 13 is placed in the working chamber; a water jacket 14 is arranged on the outer side of the working chamber 12, and a cooling liquid is arranged in the water jacket. The cooling liquid in the jacket can be water or a mixture of water and ethylene glycol. The coolant can quickly take away the high temperature at the exhaust, so that the internal temperature of the pump body is uniform and the service life of the pump body is prolonged.

The pump casing 2 is provided with a water tank 15. The water tank 15 and the water jacket 14 are communicated with each other through pipelines, so that the cooling liquid in the water jacket can be replenished in time to facilitate the overflow and backflow of the cooling liquid during thermal expansion and contraction.

The panels on the left and right sides and the top of the rotor housing 11 are heat dissipation cover plates 16, and the heat dissipation cover plates are made of aluminum or copper alloy. A number of heat dissipation ribs 17 are provided on the outer side of the heat dissipation cover plate 16, and the heat dissipation ribs are parallel to the direction of the central axis of the rotor; a diversion groove is formed between the adjacent heat dissipation ribs. The heat dissipation cover plate 16 forms a closed water jacket 14 with the outer side of the working cavity 12 of the rotor housing, that is, the inner side of the heat dissipation cover plate is in contact with the cooling liquid, which facilitates heat conduction between the cooling liquid and the cooling ribs and reduces the temperature of the cooling liquid.

The heat dissipation ribs 17 on the outside of the rotor casing 11 can increase the contact area between the rotor casing and the air and improve the heat dissipation efficiency; the heat dissipation ribs are parallel to the axial direction of the rotor, that is, the heat dissipation ribs will not block the air flow between the air inlet and the fan. And the heat dissipation ribs can guide the air, making the air flow more smoothly, speeding up the air flow, and dissipating heat faster.

The rotor casing 11 is provided with an exhaust end cover 18 at one end facing the front cover plate of the casing, and the air inlet 4 is arranged on the side of the exhaust end cover, and the temperature on the side of the exhaust end cover is higher. It enters from the air inlet and flows toward the fan from the side where the exhaust end cover is located. During the flow, the heat on the cooling ribs is taken away.

When the pump body 1 is working, the rotor 13 will generate heat, and the heat will be transferred to the cooling liquid in the water jacket 14 through the cavity wall of the working chamber 12. The temperature of the exhaust end of the pump body is the highest, and the cooling liquid can quickly reduce the local high temperature, and then After the cooling liquid is heated, it starts to flow, so that the temperature of the cooling liquid is uniform, and the pump body will not be deformed due to local high temperature; at the same time, the fan 5 works, a large amount of air is sucked from the air inlet 4 of the front cover of the pump casing, and flows rapidly along the outside of the pump body 1 , take away the heat transferred from the cooling liquid to the heat dissipation cover plate 16 , and the air is exhausted by the fan 5 , thereby realizing the rapid cooling of the pump body 1 .

The above are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions under the idea of the present invention belong to the protection scope of the present invention. It should be pointed out that for those skilled in the art, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims (7)

1. A dry vacuum pump with a composite cooling function comprises a pump body and a pump shell, wherein the pump body is arranged in the pump shell; the pump body comprises a rotor shell, a working cavity is arranged in the middle of the rotor shell, and the rotor is arranged in the working cavity; the method is characterized in that: a water jacket is arranged on the outer side of the working cavity, and cooling liquid is arranged in the water jacket; an air inlet is formed in a panel at one end of the pump shell, a fan is mounted on a panel at the other end of the pump shell, a cooling air channel is formed between the rotor shell and the pump shell, and heat dissipation ribs are arranged on the outer side of the rotor shell.

2. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: a plurality of heat dissipation ribs are arranged on the two side faces and the top face of the rotor shell, and the heat dissipation ribs are parallel to the central shaft of the rotor; and a diversion trench is formed between the adjacent heat dissipation ribs.

3. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: an exhaust end cover is arranged at one end of the rotor shell, which faces to the front cover plate of the shell, an air inlet is arranged on the front cover plate of the pump shell, and a fan is arranged on the rear cover plate of the pump shell, which is close to the rotor.

4. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: the pump body is arranged on the base, a pump shell is sleeved on the pump body, and the pump shell is fixedly connected with the base; and a wind shield is arranged on the inner side of the pump shell.

5. A dry vacuum pump with a combined cooling function as set forth in claim 1, wherein: a water tank is arranged in the pump shell and communicated with the water jacket.

6. A dry vacuum pump with a combined cooling function as set forth in claim 1, wherein: the cooling liquid in the water jacket is water or a mixed liquid of water and glycol.

7. A dry vacuum pump having a combined cooling function as claimed in claim 1, wherein: the pump shell is a sheet metal part or a plastic forming part.

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