CN115144073A - Micro spectrometer based on tuning mechanism and spectrum detection method - Google Patents
Micro spectrometer based on tuning mechanism and spectrum detection method Download PDFInfo
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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Abstract
The invention discloses a micro spectrometer based on a tuning mechanism and a spectrum detection method. The micro spectrometer comprises a grating structure at least used for reflecting, transmitting or absorbing light rays with selected wavelengths in the detected light so as to generate at least one resonance peak; the adjustable refractive index structure is made of a refractive index adjustable material, can be penetrated by detected light and is incident on the grating structure, and enables a resonance peak generated by the grating structure to move by adjusting the refractive index; and a detection structure for at least absorbing the light of the selected wavelength reflected or transmitted by the grating structure and generating an electrical signal, or at least for receiving hot carriers generated by the grating structure after absorbing the light of the selected wavelength and generating an electrical signal. The invention adopts the refractive index adjustable material layer to cover the metal grating to tune the spectral response, and can realize the analysis of high-precision original spectrum only by depending on a single or a small number of photodetectors by combining with a compressive sensing algorithm.
Description
Technical Field
The invention relates in particular to a tuning-based mechanism the micro spectrometer and the spectrum detection method thereof, belongs to the technical field of analytical equipment.
Background
The spectrometer is one of the most common devices in material component analysis, and has important application in optical communication, remote sensing mapping, medicine development, medical diagnosis, environment monitoring, agriculture and forestry. Generally, a spectrometer needs a rotatable grating and a detector or a fixed grating and a detector array to realize the collection of spectral information, so that the device is complex, large and expensive. Recently, manufacturers have introduced micro spectrometers based on detector arrays and on-chip spectroscopic structures, which have greatly improved the applicability of spectrometers. However, in infrared and terahertz bands, the detector array unit is small in scale and high in price, and the light splitting elements such as gratings are very expensive.
In response to this problem, a series of micro spectrometers based on a tuning mechanism, i.e. based on a single or a small number of detectors, combined with a tunable response mechanism, have emerged to obtain spectral information. For example, in the journal of Sensors and Actuators, volume 76, page 191, 1999, a MEMS resonator filter-based micro spectrometer was reported, which tunes the transmission wavelength by electrically changing the cavity length of the resonator and obtains the spectral information by sequentially scanning the wavelength; a2006 Applied Physics Letters journal 89, volume 081105, reports a micro spectrometer based on spiral ferroelectric liquid crystal, wherein the distance between liquid crystal molecular layers is adjusted by changing temperature to tune Bragg diffraction wavelength, light intensity information is sequentially sampled and read by a detector, and the spectral resolution of 12-25 nm is obtained in a visible light band; 2013, an Optics Letters journal 38, page 4996, reports a micro spectrometer based on liquid crystal birefringence, which changes the phase difference of o light and e light by changing the size of birefringence through pressurization, so as to change the polarization state of the light emitted to a linear polarizer, further tune the fluctuation of light intensity at different wavelengths, and obtain spectral information by using a compressive sensing technology; 2014. in the annual Optics Letters journal, volume 39, page 3923, a mach-zehnder waveguide type micro spectrometer based on lithium niobate electro-optic crystals is reported, wherein the transmission phase in a waveguide is tuned by changing the refractive index of lithium niobate through bias voltage, and then spectral information is obtained through Fourier transform, and the spectral resolution is less than 1nm;2015, journal 9, volume 1, page 1 of a Laser Photonics Reviews journal reports a micro spectrometer based on an MEMS structure, a large optical path difference is generated between two arms of a Michael interferometer by controlling an MEMS moving mirror, displacement information of the moving mirror is recorded, spectral information is obtained through Fourier transform, and 25nm spectral resolution is obtained in near infrared; in 2018, volume 9, page 478 of the journal of Micromachines reports a micro spectrometer based on a rotating reflection grating, the diffraction wavelength in a fixed emergent direction is tuned by changing an incident angle through rotating the grating, light intensity information is sequentially sampled and read by a detector, and the spectral resolution of 10nm is obtained in a near-infrared band.
However, although the above existing micro spectrometers based on a tuning mechanism all show the function of obtaining spectral information by combining a single detector with a tuning structure, the problems of limited spectral resolution, mechanical moving parts, low tuning efficiency and the like generally exist.
Disclosure of Invention
The invention mainly aims to provide a micro spectrometer based on a tuning mechanism and a spectrum detection method, so as to overcome the defects in the prior art.
In order to achieve the purpose of the invention, the technical scheme adopted by the invention comprises the following steps:
the embodiment of the invention provides a micro spectrometer based on a tuning mechanism, which comprises:
a grating structure at least for reflecting, transmitting or absorbing light of a selected wavelength in the light to be measured, thereby generating at least one formant;
the adjustable refractive index structure is made of a refractive index adjustable material, at least can be penetrated by detected light and is incident on the grating structure, and the resonant peak generated by the grating structure can be moved by adjusting the refractive index of the adjustable refractive index structure;
and a detection structure for at least absorbing the light of the selected wavelength reflected or transmitted by the grating structure and generating an electrical signal, or at least for receiving hot carriers generated by the grating structure after absorbing the light of the selected wavelength and generating an electrical signal.
The embodiment of the present invention further provides a spectrum detection method, which is implemented based on the micro spectrometer based on the tuning mechanism, and the spectrum detection method includes:
the measured light is incident on the grating structure after penetrating through the refractive index adjustable structure;
the refractive index of the structure with the adjustable refractive index is adjusted for multiple times, so that the spectral components reflected, transmitted or absorbed by the grating structure are changed, and the electric signals output by the detection structure are correspondingly changed;
and analyzing the electric signals output by the detection structure for multiple times by combining a compressive sensing algorithm, thereby obtaining the spectral information of the detected light.
Compared with the prior art, the invention has the advantages that:
1) According to the micro spectrometer based on the tuning mechanism, the refractive index adjustable material layer is adopted to cover the metal grating to tune the spectral response, the tuning range of the resonance wavelength is extremely large, the obvious spectral tuning can be obtained through the tiny surface refractive index change, so that enough spectral responses with low correlation degree can be obtained, and the high-precision original spectrum can be analyzed by combining a compressive sensing algorithm;
2) According to the micro spectrometer based on the tuning mechanism, the spectral responses of a plurality of resonance peaks can be obtained by adjusting the metal grating structure, so that the signal-to-noise ratio and the sampling efficiency of spectral information are improved, the spectral reconstruction with less samples is realized, and the volume weight of the spectrometer is reduced;
3) According to the micro spectrometer based on the tuning mechanism, the metal grating can be combined by a single or a plurality of different grating structures, and the metal grating of each different grating structure corresponds to the active material layer which works independently, so that the spectral sampling efficiency is improved, and the wavelength range of spectral analysis is enlarged.
Drawings
For better illustration of the present invention, the following description of the embodiments is briefly made with reference to the accompanying drawings. The drawings are schematic illustrations of idealized embodiments of the present invention, the proportions of layers and regions being exaggerated for clarity of presentation, but should not be considered as strictly reflecting the geometric relationships of proportions. The illustrated embodiments of the present invention should not be considered as limited to the particular shapes of regions illustrated in the figures. The representation in the figures is schematic and should not be considered as limiting the scope of the invention. Wherein:
FIGS. 1a and 1c are schematic diagrams illustrating the operation of a micro spectrometer based on a tuning mechanism in a transmission mode according to an exemplary embodiment of the present invention;
FIG. 1b is a schematic diagram of a one-dimensional periodic grating structure provided in an exemplary embodiment of the present invention;
FIG. 1d is a schematic diagram illustrating the operation of a micro spectrometer based on a tuning mechanism in a reflective mode according to an exemplary embodiment of the present invention;
FIG. 1e is a schematic diagram illustrating the operation of a micro spectrometer based on a tuning mechanism in an absorption mode according to an exemplary embodiment of the present invention;
FIG. 2a is a calculated transmission spectrum corresponding to refractive indices of tunable material layers with different refractive indices in a micro spectrometer based on a tuning mechanism in a transmission mode according to an exemplary embodiment of the present invention;
FIG. 2b is a calculated reflectance spectrum corresponding to refractive indices of different refractive index tunable material layers in a micro spectrometer based on a tuning mechanism in a reflective mode according to an exemplary embodiment of the present invention;
FIG. 2c is a calculated absorption spectrum corresponding to refractive indices of tunable material layers with different refractive indices in an absorption mode for a micro spectrometer based on a tuning mechanism according to an exemplary embodiment of the present invention;
FIG. 3 is a schematic diagram of the spatial distribution of the electric field density corresponding to the resonance peak when the refractive index of the refractive index tunable material layer is 1.4 in the reflection mode of a micro spectrometer based on the tuning mechanism according to an exemplary embodiment of the present invention;
FIG. 4a is a schematic diagram of a metal grating having a two-dimensional periodic structure in accordance with an exemplary embodiment of the present invention;
FIG. 4b is a graph showing the calculated reflectance spectra of a micro spectrometer based on a tuning mechanism operating in a reflection mode under different grating structure parameters and refractive index variation of a refractive index tunable material layer at normal incidence in an exemplary embodiment of the present invention;
FIG. 4c is a calculated reflectance spectrum of a micro spectrometer based on a tuning mechanism under a condition of refractive index change of a refractive index tunable material layer when the micro spectrometer operates in a reflection mode and is obliquely incident according to an exemplary embodiment of the present invention;
FIG. 5a is a calculated reflectance spectrum corresponding to the refractive index variation of the tunable material layers with different refractive indices when the metal grating with one-dimensional periodic structure in the reflective mode according to an exemplary embodiment of the present invention is incident at normal incidence;
FIG. 5b is a reconstructed result of the measured spectrum based on the output signal of the active material layer in combination with a spectral reconstruction algorithm in an exemplary embodiment of the present invention;
FIG. 6a is a calculated reflectance spectrum corresponding to the refractive index variation of different refractive index tunable material layers when a metal grating with a two-dimensional periodic structure is obliquely incident according to an exemplary embodiment of the present invention in a reflective mode, wherein the periods of the grating in two directions are the same;
FIG. 6b is a graph of the reconstructed measured spectra based on the active material layer output signals in conjunction with a spectral reconstruction algorithm in accordance with an exemplary embodiment of the present invention;
FIG. 7a is a portion of the reflectance spectrum of FIG. 6 a;
FIG. 7b is a reconstructed measured spectrum of the output signal based on the active material layer corresponding to the reflectance spectrum of FIG. 7 a;
FIG. 8a is a calculated reflectance spectrum corresponding to the refractive index variation of different refractive index tunable material layers at normal incidence for a metal grating with a one-dimensional periodic structure according to an exemplary embodiment of the present invention in a reflective mode.
FIG. 8b is a calculated reflectance spectrum corresponding to the refractive index variation of different refractive index tunable material layers when the metal grating with two-dimensional periodic structure is in normal incidence, wherein the periods in two directions of the grating are different.
Fig. 8c is a calculated reflection spectrum corresponding to the refractive index change of the different refractive index tunable material layers when the metal grating with the two-dimensional periodic structure is obliquely incident, wherein the periods in the two directions of the grating are different.
Fig. 8d is a reconstructed measured spectrum based on the output signals of the active material layer corresponding to these three types of reflectance spectra.
Fig. 9a is a calculated reflection spectrum corresponding to the refractive index change of the adjustable material layers with different refractive indexes when the metal grating with the two-dimensional periodic structure is used for each of the three unit structures in the micro spectrometer based on the tuning mechanism in the reflection mode and obliquely incident;
FIG. 9b is a measured spectrum reconstructed from the output signal corresponding to the reflectance spectrum of FIG. 9a based on the active material layer in an exemplary embodiment of the invention;
FIG. 10 is a calculated reflectance spectrum corresponding to the change in refractive index of the tunable material layers of different refractive indices for a micro spectrometer based on a tuning mechanism operating in the far infrared band in the reflective mode according to an exemplary embodiment of the present invention.
Detailed Description
In view of the deficiencies in the prior art, the inventors of the present invention have made extensive studies and extensive practices to provide technical solutions of the present invention. The technical solution, its implementation and principles, etc. will be further explained as follows.
Aiming at the defects of the prior art, the embodiment of the invention provides a micro spectrometer based on a tuning mechanism, which at least comprises a light beam collimator, a metal grating, a refractive index adjustable material layer and an active material layer, wherein the refractive index adjustable material layer covers the surface of the metal grating, detected light passes through the refractive index adjustable material layer and then is incident on the metal grating after passing through the light beam collimator, spectral components reflected, transmitted or absorbed by the metal grating can be changed by adjusting the refractive index of the refractive index adjustable material layer, so that a photoelectric conversion signal output by the active material layer is changed, and the spectral information of the detected light is analyzed by combining output signals of active material layers corresponding to multiple adjustments with a compression sensing algorithm.
The embodiment of the invention provides a metal grating in a micro spectrometer based on a tuning mechanism, which can excite the surface plasma resonance of an electromagnetic field distribution local on the surface of the metal grating under illumination and has extremely high surface refractive index sensitivity, so that the tuning of obvious reflection, transmission and absorption spectrums can be obtained by tiny surface refractive index changes, thereby obtaining enough spectrum responses with low correlation degree and being very beneficial to a compressed sensing algorithm to analyze high-precision original spectrums.
The embodiment of the invention provides a micro spectrometer based on a tuning mechanism, which comprises:
a grating structure for at least reflecting, transmitting or absorbing light of selected wavelengths of the light being measured, thereby generating at least one formant;
the adjustable refractive index structure is made of a refractive index adjustable material, at least can be penetrated by detected light and is incident on the grating structure, and the resonant peak generated by the grating structure can be moved by adjusting the refractive index of the adjustable refractive index structure;
and a detection structure for at least absorbing the light of the selected wavelength reflected or transmitted by the grating structure and generating an electrical signal, or at least for receiving hot carriers generated by the grating structure after absorbing the light of the selected wavelength and generating an electrical signal.
Further, the grating structure can reflect, transmit or absorb light of selected wavelengths in the measured light in a specified wavelength band.
Furthermore, the adjustable refractive index structure is covered on the first surface of the grating structure, and the first surface of the grating structure faces the light source.
Further, the adjustable refractive index structure comprises a refractive index adjustable material layer.
Further, the manner of adjusting the refractive index of the tunable refractive index structure includes, but is not limited to, electrical, thermal, or optical excitation.
Furthermore, the number of the grating structures is one or more, each grating structure corresponds to an independently working detection structure, that is, each metal grating of different grating structures corresponds to an independently working active material layer.
In some specific embodiments, the grating structure is a one-dimensional periodic grating structure, or the grating structure is a two-dimensional periodic grating structure, and the grating structure has relatively independent period parameters in two orthogonal directions x and y.
Further, the height of the grating structure is less than one tenth of the selected wavelength.
Further, the grating structure is a metal grating.
Further, the grating structure comprises a continuous metal film.
Specifically, the metal grating may allow the light to be measured in one or more wavelength ranges to be reflected or transmitted to the active material layer, and the light to be measured in the remaining wavelength ranges is absorbed or irradiated to the outside of the active material layer, and the material of the metal grating includes at least one of gold, platinum, silver, copper, aluminum, titanium, and the like, but is not limited thereto.
Specifically, the wavelength of the reflected light, the transmitted light or the absorbed light generated by the metal grating is mainly determined by the period of the metal grating, the incident angle and the surface refractive index of the metal grating, and the wavelength range of the reflected or transmitted light can be tuned to each waveband by regulating and controlling the parameters.
Further, the detection structure is arranged on a second surface of the grating structure, the second surface and the first surface are arranged oppositely, or the detection structure is arranged on one side of the adjustable refractive index structure opposite to the grating structure.
Further, the detection structure includes an active material layer capable of converting an optical signal into an electrical signal.
Further, the micro spectrometer based on the tuning mechanism further includes: and the light beam collimator is at least used for enabling the detected light emitted by the light source to be collimated and then to enter the adjustable refractive index structure.
The embodiment of the present invention further provides a spectrum detection method, which is implemented based on the micro spectrometer based on the tuning mechanism, and the spectrum detection method includes:
the measured light is made to penetrate through the adjustable refractive index structure and then is incident on the grating structure;
the refractive index of the adjustable refractive index structure is adjusted for multiple times, so that the spectral components reflected, transmitted or absorbed by the grating structure are changed, and the electric signal output by the detection structure is correspondingly changed;
and analyzing the electric signal output by the detection structure for multiple times by combining a compressive sensing algorithm, thereby obtaining the spectral information of the detected light.
Further, the spectrum detection method specifically comprises the following steps: the refractive index of the adjustable refractive index structure is adjusted by means of electrical, thermal or optical excitation.
Further, the spectrum detection method further comprises: the wavelength range over which the grating structure allows light to be reflected, transmitted or absorbed is tuned to a desired wavelength band by at least adjusting one or more operating parameters of the grating structure, including grating period, angle of incidence or grating surface refractive index.
As will be described in further detail with reference to the accompanying drawings, the metal grating, the refractive index tunable material layer, the active material layer, etc. constituting a micro spectrometer provided by the embodiments of the present invention may be any material known to those skilled in the art, unless otherwise specified.
Referring to fig. 1, a micro spectrometer based on a tuning mechanism according to an embodiment of the present invention at least includes an active material layer 1, a metal grating 2, a refractive index adjustable material layer 3, and a beam collimator 4, where the refractive index adjustable material layer 3 covers a surface of the metal grating 2, and spectral components reflected, transmitted, or absorbed by the metal grating can be changed by adjusting a refractive index of the refractive index adjustable material layer 3, so as to change a photoelectric conversion signal output by the active material layer 1, and the output signal of the active material layer 1 obtained by multiple adjustments is combined with a compressive sensing algorithm to analyze spectral information of a measured light.
The micro spectrometer based on the tuning mechanism provided by the embodiment of the invention has three working modes of a transmission mode (fig. 1a, fig. 1 c), a reflection mode (fig. 1 d) and an absorption mode (fig. 1 e):
in the transmission mode, the detected light passes through the refractive index adjustable material layer 3 and the metal grating 2, and the transmitted light is absorbed by the active material layer 1 to form an electric signal;
in the reflection mode, the detected light passes through the refractive index adjustable material layer 3 and is reflected by the metal grating 2, and the reflected light is absorbed by the active material layer 1 to form an electric signal;
in the absorption mode, the detected light passes through the refractive index adjustable material layer 3, the transmitted light is absorbed by the metal grating 2 to form hot carriers, and the hot carriers are injected into the active material layer 1 to form an electrical signal.
The technical solution of the present invention will be described in detail with reference to several preferred embodiments and related drawings.
Example 1
Referring to fig. 1a, in the present embodiment, a micro spectrometer based on a tuning mechanism has a transmission mode and operates in a near-infrared band, and includes an active material layer 1, a metal grating 2, a refractive index tunable material layer 3, and a beam collimator 4; as shown in fig. 1b, the metal grating 2 is a one-dimensional periodic grating and is in direct contact with the active material layer 1, an incident beam 5 is incident to the refractive index adjustable material layer 3 through the beam collimator 4 and sequentially passes through the refractive index adjustable material layer 3 and the metal grating 2, and the transmission light passing through the refractive index adjustable material layer 3 and the metal grating 2 is absorbed by the active material layer 1 to form an electrical signal for output.
Specifically, incident beams with different wavelengths are coupled with the surface plasmon wave of the metal grating 2 at a specific incident angle, and the coupling condition is determined by the following formula:
nk 0 sinθ+mG＝±k sp
wherein k is 0 Is a vacuum wave vector, n is a refractive index of the refractive index tunable material layer, θ is an incident angle on the surface of the metal grating 2, G =2 π/Λ is a lattice vector of the metal grating 2, Λ is a period of the metal grating 2, m is a diffraction order, k is a refractive index of the metal grating 2 sp Is the wavevector of the metal surface plasmon wave.
Referring to fig. 2a, the material of the active material layer 1 includes silicon, the period of the metal grating 2 is 1 μm, the width is 0.6 μm, the height is 50nm, and the thickness of the gold material layer coated on the surface layer of the metal grating 2 is 40nm.
Assuming that the refractive index adjustable material layer 3 covers the upper surface space of the metal grating 2, when the refractive index of the refractive index adjustable material layer 3 changes, the wavelength of the transmission peak in the transmission spectrum changes; for example, when the refractive index of the refractive index-tunable material layer 3 is changed from 1.4 to 1.2, the transmission peak wavelength is blue-shifted from 1.42 μm to 1.22 μm.
Example 2
Referring to fig. 1c, in this embodiment, a tuning mechanism-based micro spectrometer has a transmission mode as a working mode, and includes an active material layer 1, a metal grating 2, a refractive index adjustable material layer 3, and a beam collimator 4, where the metal grating 2 is a one-dimensional periodic grating, the metal grating 2 is made of gold, the active material layer 1 is not in direct contact with the metal grating 2, and the active material layer 1 may be a material layer of a discrete detection structure; the incident light beam 5 is incident to the refractive index adjustable material layer 3 through the light beam collimator 4, and the transmission light passing through the refractive index adjustable material layer 3 and the metal grating 2 is absorbed by the active material layer 1 to form an electric signal for output.
Example 3
Referring to fig. 1d, in the present embodiment, a micro spectrometer based on a tuning mechanism has a transmission mode and operates in a terahertz band; the micro spectrometer based on the tuning mechanism comprises an active material layer 1, a metal grating 2, a refractive index adjustable material layer 3 and a beam collimator 4, wherein the metal grating 2 is made of gold, and the metal grating 2 is a one-dimensional periodic grating; the incident light beam 5 is incident to the refractive index adjustable material layer 3 through the light beam collimator 4, passes through the refractive index adjustable material layer 3, is reflected by the metal grating 2, is emitted through the refractive index adjustable material layer 3 again, and is finally received by the active material layer 1 to form an electric signal.
Referring to fig. 2b, the period of the metal grating 2 is 140 μm, the width is 116 μm, the height is 5.5 μm, and the thickness of the gold material layer coated on the surface layer of the metal grating 2 is 200nm; assuming that the refractive index adjustable material layer 3 is covered and arranged on the upper surface space of the metal grating 2, when the refractive index of the refractive index adjustable material layer 3 is changed, the wavelength of a reflection peak in a reflection spectrum is changed; for example, when the refractive index of the refractive index adjustable material layer 3 is changed from 1.4 to 1.2, the reflection peak frequency is shifted from 1.525 thz to 1.779 thz; when the refractive index of the refractive index adjustable material layer 3 is 1.4, the electric field density spatial distribution corresponding to the reflection peak 1.525 thz is as shown in fig. 3, and it can be seen from fig. 3 that most of the electric field is localized on the surface of the metal grating 2, so that the effect of the electromagnetic field and the refractive index adjustable material layer 3 is greatly enhanced, and further, the movement of the reflection peak under the condition of the same refractive index change is increased.
Example 4
Referring to fig. 1e, in the embodiment, a micro spectrometer based on a tuning mechanism operates in an absorption mode and operates in a near-infrared band; the micro spectrometer based on the tuning mechanism comprises an active material layer 1 the device comprises a metal grating 2, a refractive index adjustable material layer 3 and a beam collimator 4; an incident light beam 5 is incident to the refractive index adjustable material layer 3 through the light beam collimator 4, and the measured light passes through the refractive index adjustable material layer 3 and is absorbed by the metal grating 2 to form hot carriers, which are injected into the active material layer 1 and form an electrical signal.
Specifically, the active material layer 1 is made of silicon, the metal grating 2 is made of gold and has a one-dimensional periodic grating structure, the period of the metal grating 2 is 1 μm, the width of the metal grating 2 is 0.6 μm, the height of the metal grating 2 is 50nm, the thickness of the gold material layer covered on the surface layer of the metal grating 2 is 100nm, and the refractive index adjustable material layer 3 covers the upper surface of the metal grating 2; as shown in fig. 2c, the absorption spectrum has a narrow line width resonance peak and shifts with the change in the refractive index of the refractive index adjustable material layer 3.
Example 5
In the above embodiments, the metal grating adopts a one-dimensional periodic grating structure, and a formant is generated in a detection band.
Different from embodiments 1-4, the metal grating in this embodiment is a two-dimensional periodic grating structure, and the periods of the metal grating in the orthogonal x and y directions are different, as shown in fig. 4a, the metal grating 2 is made of gold, the period Λ x =190 μm in the x direction, the period Λ y =210 μm in the y direction, the width Wgx =160 μm in the x direction, the width Wgy =176 μm in the y direction, the height of the metal grating 2 is 6 μm, and the thickness of the gold material layer coated on the surface layer of the metal grating 2 is 200nm; the refractive index adjustable material layer 1 is liquid crystal and has a thickness of 40 μm. .
In the embodiment, a micro spectrometer based on a tuning mechanism has a reflection mode and operates in a terahertz wave band; as shown in fig. 4b, when the incident light beam is normally incident, the two-dimensional periodic grating structure generates two reflection peaks, and when the refractive index of the refractive index adjustable material layer 3 is fixed, the frequency position of one resonance peak in the reflection spectrum can be independently adjusted by changing the period of the metal grating in the x or y direction, respectively. For example, the period in the x direction is fixed to be 190 μm, and the periods in the y direction are respectively 210 μm, 226 μm and 250 μm, so that the reflection peak corresponding to the 1.29 terahertz is kept unchanged relative to the grating structure in the x direction, and the reflection peaks corresponding to the grating structure in the y direction are respectively 1.2 terahertz, 1.1 terahertz and 1.05 terahertz; when the refractive index of the refractive index adjustable material layer is adjusted from 1.58 to 1.8, the reflection peak frequencies corresponding to the two directional grating structures are changed.
Example 6
The working mode of the micro spectrometer based on the tuning mechanism in this embodiment is a reflection mode, and the micro spectrometer operates in a terahertz waveband, similar to embodiment 4, this embodiment also adopts a two-dimensional periodic grating structure, except that incident light (beam) in this embodiment is oblique incident, so four reflection peaks are generated, as shown in fig. 4 c; the metal grating is made of gold, the period Λ x =190 μm in the x direction of the metal grating, the period Λ y =230 μm in the y direction of the metal grating, the width Wgx =164 μm in the x direction of the metal grating, the width Wgy =198 μm in the y direction of the metal grating, the height of the metal grating 2 is 6 μm, the thickness of a gold material layer coated on the surface layer of the metal grating 2 is 200nm, the refractive index adjustable material layer 3 adopts liquid crystal, the thickness is 40 μm, and the incident angle is 5 degrees; when the refractive index of the refractive index-tunable material layer was changed from 1.58 to 1.8, the frequencies of the four reflection peaks were changed.
Example 7
Referring to fig. 1d, in the present embodiment, a micro spectrometer based on a tuning mechanism has a reflective mode and a reflective mode, and operates in a terahertz band; the metal grating is made of gold and has a one-dimensional periodic grating structure, the period of the metal grating is 210 mu m, the width of the metal grating is 176 mu m, the height of the metal grating is 6 mu m, the adjustable refractive index layer 3 is made of liquid crystal, and the thickness of the adjustable refractive index layer is 40 mu m.
As shown in fig. 5a, when the refractive index of the liquid crystal changes from 1.58 to 1.8, the frequency of the reflection peak changes from 1.23 thz to 1.14 thz, and the energy of the reflected wave is converted into an electrical signal by the active material layer and is output; when the refractive index of the liquid crystal changes between 1.58 and 1.8, electrical signals corresponding to 25 and 50 different values are respectively taken, and the spectrum of the incident light can be reconstructed based on the spectrum information of the graph in FIG. 5a and by combining a compressed sensing algorithm; as shown in fig. 5b, taking 50 changes of the refractive index of the liquid crystal (i.e. 50 samples) to perform spectral reconstruction can obtain a result almost completely coinciding with the original spectrum of the incident light.
Example 8
Referring to fig. 4a, in the present embodiment, a micro spectrometer based on a tuning mechanism has a reflective mode and operates in a terahertz band; the metal grating 2 is made of gold material and has a two-dimensional periodic grating structure, the period in the x and y directions is 210 micrometers, the width of the metal grating 2 is 176 micrometers, the height of the metal grating is 6 micrometers, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness of the material is 40 micrometers, and the incident angle of incident light is 4 degrees.
As shown in fig. 6a, compared with the one-dimensional periodic grating structure, the reflection spectrum has two more reflection peaks in the normal incidence result of incident light (fig. 5 a), and the frequency is changed from 1.14 thz to 1.23 thz; the reflected wave energy is converted into an electric signal by the active material layer and is output; when the refractive index of the liquid crystal changes between 1.58 and 1.8, electrical signals corresponding to 25 and 15 different values are respectively taken, and the spectrum of the incident light can be reconstructed based on the spectrum information of the graph in FIG. 6a and by combining a compressed sensing algorithm; as shown in fig. 6b, the electrical signal corresponding to the change of the refractive index of 25 liquid crystals (i.e. 25 samples) is taken for spectrum reconstruction, so that the result almost completely coincides with the original spectrum of the incident light can be obtained; the reduction of the sampling times comes from the newly added reflection peak, namely, the metal grating can sample the incident light at more frequency points under the same liquid crystal adjustable refractive index value.
Example 9
In this embodiment, a micro spectrometer based on a tuning mechanism has a reflective mode (as shown in fig. 4 a) and operates in a terahertz band; the metal grating is made of gold materials and is of a two-dimensional periodic grating structure, the periods in the x direction and the y direction are respectively 218 micrometers and 220 micrometers, the width of the metal grating is respectively 174 micrometers and 176 micrometers, the height of the metal grating is respectively 6 micrometers, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness of the adjustable refractive index layer is 40 micrometers, and the incident angle is 3.0 degrees.
As shown in fig. 7a, the reflection spectrum has two more reflection peaks compared with the result of the normal incidence one-dimensional grating structure (fig. 5 a), and the energy of the reflected wave is converted into an electrical signal by the active material layer and is output. When the refractive index of the liquid crystal changes between 1.58 and 1.8, 25 electric signals corresponding to different values are taken, and the spectrum of the incident light can be reconstructed based on the spectrum information of fig. 7a and by combining a compressed sensing algorithm; as shown in fig. 7b, the electrical signal corresponding to the change of the refractive index of 25 liquid crystals (i.e. 20 times of sampling) is taken for spectrum reconstruction, so that the result almost completely coincides with the original spectrum of the incident light, and effective resolution of two reflection peaks at an interval of 0.1GHz is achieved.
The results of comparing the three different structures of example 6 and example 7, the liquid crystal of the limited refractive index tunable material varied in the range of 1.58 to 1.8, and the spectrum results are shown in FIG. 8 (a-c):
firstly, the metal grating is made of gold material and has a one-dimensional periodic grating structure, the period of the metal grating is 210 μm, the width is 176 μm, the height is 6 μm, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness is 40 μm, incident light is vertically incident, the corresponding reflection spectrum is shown in fig. 8a, and the reflection spectrum only comprises one peak;
secondly, the metal grating is made of gold materials and is of a two-dimensional periodic grating structure, the periods in the x direction and the y direction are 210 micrometers and 226 micrometers respectively, the width of the metal grating is 176 micrometers, the height of the metal grating is 6 micrometers, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness of the adjustable refractive index layer is 40 micrometers, incident light vertically enters, a corresponding reflection spectrum is shown in fig. 8b, and the reflection spectrum of the metal grating has one more reflection peak compared with that of the one-dimensional periodic grating structure (fig. 8 a);
thirdly, the metal grating is made of gold materials and is of a two-dimensional periodic grating structure, the periods in the x direction and the y direction are respectively 190 micrometers and 230 micrometers, the width of the metal grating is respectively 164 micrometers and 198 micrometers, the height of the metal grating is respectively 6 micrometers, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness of the adjustable refractive index layer is 40 micrometers, the incident angle of the adjustable refractive index layer is 5.0 degrees, the corresponding reflection spectrum is shown in figure 8c, and the reflection spectrum of the adjustable refractive index layer has two reflection peaks compared with the two-dimensional periodic grating structure (figure 8 b);
the spectral reconstruction of the compressed sensing of the 45 converted signals from the active material layer for each case of spectra is shown in fig. 8d, and it can be seen that the spectral reconstruction of fig. 8c is more accurate, which is benefited by the fact that the reflection peak of the spectrum covers a larger frequency range in example 6.
Example 10
In the embodiment, the micro spectrometer based on the tuning mechanism adopts a grating structure, and the spectrum of the resonance peak generated by the grating is changed by adjusting the material layer with the adjustable refractive index; in the embodiment, three grating structures are adopted, and the spectrum of the resonance peak generated by the grating is changed by adjusting the adjustable refractive index material layer.
Specifically, for the first unit structure: the metal grating is made of gold materials and is of a two-dimensional periodic grating structure, the periods in the x direction and the y direction are respectively 120 microns and 138 microns, the width of the metal grating is respectively 96 microns and 110 microns, the height of the metal grating is respectively 6 microns, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness of the adjustable refractive index layer is 40 microns, and the incident angle is 14.0 degrees;
for the second cell structure: the metal grating is made of gold materials and is of a two-dimensional periodic grating structure, the periods in the x direction and the y direction are 194 microns and 210 microns respectively, the width of the metal grating is 155 microns and 168 microns respectively, the height of the metal grating is 6 microns, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness of the adjustable refractive index layer is 40 microns, and the incident angle is 14.0 degrees;
for the third unit structure: the metal grating is made of gold materials and is of a two-dimensional periodic grating structure, the periods in the x direction and the y direction are 226 micrometers and 240 micrometers respectively, the width of the metal grating is 180 micrometers and 192 micrometers respectively, the height of the metal grating is 6 micrometers, the material of the adjustable refractive index layer 3 is liquid crystal, the thickness of the adjustable refractive index layer is 40 micrometers, and the incident angle is 14.0 degrees;
the liquid crystal of the refractive index adjustable material is limited to change within the range of 1, 58 to 1.8, the spectrum result is shown in FIG. 9a, and the spectrum adjustable range can approach 1 terahertz; spectral reconstruction for compressive sensing of 20 signals converted by the active material layer for the spectrum of the embodiment as shown in fig. 9b, the frequency range covered by the reconstructable reflection peak is also close to 1 terahertz.
Example 11
In this embodiment, a micro spectrometer based on a tuning mechanism has a reflection mode (as shown in fig. 1 d) and operates in a mid-infrared band, the metal grating is made of gold, a period of the metal grating is 10.55 μm, a width of the metal grating is 9.6 μm, a height of the metal grating is 460nm, a thickness of a gold material layer coated on a surface layer of the metal grating 2 is 200nm, and a reflection spectrum corresponding to a change of a refractive index of the refractive index adjustable material layer 3 is shown in fig. 10.
According to the micro spectrometer based on the tuning mechanism, the refractive index adjustable material layer is adopted to cover the metal grating to tune the spectral response, the tuning range of the resonance wavelength is extremely large, and the micro surface refractive index change can obtain obvious spectral tuning, so that enough spectral response with low correlation degree can be obtained.
The metal grating in the micro spectrometer based on the tuning mechanism provided by the embodiment of the invention can excite a resonance mode under illumination, and the electromagnetic field distribution in the resonance mode is localized on the surface of the metal grating, so that when the refractive index of the adjustable refractive index structure is changed, the electromagnetic field distribution can be greatly changed, and the resonance peak generated by the grating structure can be moved more remarkably.
According to the micro spectrometer based on the tuning mechanism, the spectral responses of a plurality of resonance peaks can be obtained by adjusting the metal grating structure, so that the signal-to-noise ratio and the sampling efficiency of spectral information are improved, the spectral reconstruction with less samples is realized, and the volume weight of the spectrometer is reduced.
According to the micro spectrometer based on the tuning mechanism, the metal grating can be combined by a single grating structure or a plurality of different grating structures, and the metal grating of each different grating structure corresponds to the active material layer which works independently, so that the spectrum sampling efficiency is improved, and the wavelength range of spectrum analysis is enlarged.
It should be understood that the above-mentioned embodiments are merely illustrative of the technical concepts and features of the present invention, which are intended to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and therefore, the protection scope of the present invention is not limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (10)
1. A micro spectrometer based on a tuning mechanism, comprising:
a grating structure for at least reflecting, transmitting or absorbing light of selected wavelengths of the light being measured, thereby generating at least one formant;
the adjustable refractive index structure is made of a refractive index adjustable material, can be penetrated by detected light and is incident on the grating structure, and can enable a resonance peak generated by the grating structure to move by adjusting the refractive index of the adjustable refractive index structure;
and a detection structure for at least absorbing the light of the selected wavelength reflected or transmitted by the grating structure and generating an electrical signal, or at least for receiving hot carriers generated by the grating structure after absorbing the light of the selected wavelength and generating an electrical signal.
2. The micro spectrometer based on the tuning mechanism of claim 1, wherein: the grating structure can reflect, transmit or absorb one or more selected wavelengths of light in the measured light in a specified wavelength range.
3. The micro spectrometer based on the tuning mechanism of claim 1, wherein: the adjustable refractive index structure is covered on the first surface of the grating structure, and the first surface of the grating structure faces the light source;
preferably, the adjustable refractive index structure comprises a layer of refractive index adjustable material;
preferably, the means for adjusting the refractive index of the tunable refractive index structure comprises electrical, thermal or optical actuation.
4. The micro spectrometer based on the tuning mechanism of claim 1, wherein: the number of the grating structures is one or more, and each grating structure corresponds to an independently working detection structure.
5. The micro spectrometer based on the tuning mechanism of claim 1 or 4, wherein: the grating structure is a one-dimensional periodic grating structure; or the grating structure is a two-dimensional periodic grating structure, and the grating structure has relatively independent periodic parameters in the orthogonal x and y directions;
preferably, the height of the grating structure is less than one tenth of the selected wavelength;
preferably, the grating structure is a metal grating;
preferably, the grating structure comprises a continuous metal film.
6. The micro spectrometer based on the tuning mechanism of claim 3, wherein: the detection structure is arranged on a second surface of the grating structure, and the second surface and the first surface are arranged oppositely, or the detection structure is arranged on one side of the adjustable refractive index structure opposite to the grating structure;
preferably, the detection structure comprises an active material layer capable of converting an optical signal into an electrical signal;
preferably, the material of the active material layer includes a photoelectric material and/or a photo-thermal-electric material.
7. The micro spectrometer based on the tuning mechanism of claim 1, further comprising: and the light beam collimator is at least used for enabling the collimated light emitted by the light source to be incident into the adjustable refractive index structure.
8. A method of spectral detection implemented based on the micro spectrometer based on the tuning mechanism of any of claims 1-7, and comprising:
the measured light is incident on the grating structure after penetrating through the refractive index adjustable structure;
the refractive index of the adjustable refractive index structure is adjusted for multiple times, so that the spectral components reflected, transmitted or absorbed by the grating structure are changed, and the electric signal output by the detection structure is correspondingly changed;
and analyzing the electric signal output by the detection structure for multiple times by combining a compressive sensing algorithm, thereby obtaining the spectral information of the detected light.
9. The method for spectral detection according to claim 8, characterized in that it comprises in particular: the refractive index of the adjustable refractive index structure is adjusted by means of electrical, thermal or optical excitation.
10. The method for spectrum detection according to claim 8, further comprising: the wavelength range over which the grating structure allows light to be reflected, transmitted or absorbed is tuned to a desired wavelength band by at least adjusting one or more operating parameters of the grating structure, including grating period, angle of incidence of the light source or refractive index of the grating surface.
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