CN115143285A - Flow control method of corrosive fluid and electric regulating valve - Google Patents
Flow control method of corrosive fluid and electric regulating valve Download PDFInfo
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- CN115143285A CN115143285A CN202210579347.0A CN202210579347A CN115143285A CN 115143285 A CN115143285 A CN 115143285A CN 202210579347 A CN202210579347 A CN 202210579347A CN 115143285 A CN115143285 A CN 115143285A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/52—Means for additional adjustment of the rate of flow
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0091—For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K47/00—Means in valves for absorbing fluid energy
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Flow Control (AREA)
Abstract
The invention discloses a flow control method of corrosive fluid and an electric regulating valve, and particularly relates to the technical field of chemical automation, wherein the flow control method comprises the following steps: s1, inputting flow demand data by a control end, and controlling the size of a flow passage opening of a valve body. S2, acquiring real-time pressure change data of the liquid inlet port of the valve body, recording pressure change fluctuation data of the liquid inlet port, and sending the pressure change fluctuation data to the control end. And S3, when the pressure of the liquid inlet port of the valve body is instantly increased, pressure is released, and redundant liquid is stored. The liquid inlet sensor is adopted to monitor the liquid flow and the pressure, the air pump is controlled through the control end according to the pressure change, the pressure of the liquid is controlled aiming at the liquid inlet port of the pump body, and after the sealing block is moved to a proper position and is kept to the opening size corresponding to the flow, the pressure can be kept in such a way, the flow is kept constant under the same pressure under the same flow channel size, and the dependence on the upstream raw material supply stability is reduced.
Description
Technical Field
The invention relates to the technical field of chemical automation, in particular to a flow control method of corrosive fluid and an electric regulating valve.
Background
The fluid with corrosion characteristics is used as one of high-risk raw materials in chemical production, is matched with perfect production equipment and a system, and is stably distributed in the processing process, along with the continuous promotion of the current automatic production, the supply of the corrosion fluid is more intelligent and automatic, however, in the distribution process of the current corrosion fluid, due to the relation of the supply of the raw materials of upstream equipment, such as the switching of different corrosion raw materials and even the mixing of various solvents, the continuous conveying stability of the constant flow can be influenced, the deviation of the distributed solution of partial products is easily caused, and the requirement of the increasing precise production can not be met, so the invention is provided and matched with automatic control to solve the defects of the current state.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a flow control method of corrosive fluid and an electric regulating valve, and the technical problems to be solved by the invention are as follows: the problem of dangerous solution automated supply in-process of chemical production, very easily appear the flow variation, be unfavorable for production is solved.
In order to achieve the purpose, the invention provides the following technical scheme: a method of flow control of an etching fluid, comprising the steps of:
s1, inputting flow demand data by a control end, and controlling the size of a flow passage opening of a valve body.
S2, acquiring real-time pressure change data of the liquid inlet port of the valve body, recording pressure change fluctuation data of the liquid inlet port, and sending the pressure change fluctuation data to the control end.
And S3, when the pressure of the liquid inlet port of the valve body is instantly increased, pressure is released, and redundant liquid is stored.
And S4, monitoring flow data of a liquid outlet port of the valve body, and sending the flow data to the control end in real time.
And S5, when the flow of the liquid outlet port of the valve body is reduced, the stored liquid is refluxed to perform pressure compensation, and the flow is maintained.
As a further scheme of the invention: and the control end carries out information acquisition on the liquid inlet port and the liquid outlet port through the local area network.
As a further scheme of the invention: the valve body includes the casing, surface mounting has the connector on the casing, the last fixed surface of connector is connected with the support, the last fixed surface of support is connected with the protecting casing, one side fixed mounting of support has the reduction gear that receives motor drive, the protecting casing runs through the slip jointly with the opposite face of connector has the connecting rod, the output shaft fixedly connected with of driver deflects the pole, the surface of deflecting the pole runs through and has seted up the slide opening, the surface of connecting rod runs through and is fixed with the connecting piece, the fixed surface of connecting piece is connected with the clamp plate, the surface of clamp plate be provided with the gliding round pin axle of slide opening cooperation, the bottom fixedly connected with of connecting rod is used for the seal block of shutoff casing.
As a further scheme of the invention: the upper surface of connector is fixed with the seal receptacle, the inner wall of seal receptacle is sealed to be fixed with the sealing, the top fixedly connected with of connecting rod slides in the piston of protecting shell inner wall, the last fixed surface of piston is connected with the spring, the inner wall fixedly connected with of protecting shell is used for the supporting seat that the spring top supported.
As a further scheme of the invention: the lower surface intercommunication of casing has the storage tank, the sealed slip that slides of inner wall of storage tank has the isolation slider, the bottom of storage tank is provided with the air cock that is used for communicateing the air pump, the left top of casing is run through and is provided with into liquid sensor, the below on casing right side is run through and is provided with out the liquid sensor.
As a further scheme of the invention: the surface welding of support has the location strip, the surface of connecting piece is seted up and is used for cooperating the gliding locating hole of location strip, the connecting piece is fixed with the sheath that is used for protecting the connecting rod jointly with the opposite face of protecting the shell.
As a further scheme of the invention: the pressure relief process comprises the following steps:
a. the liquid inlet sensor of the liquid inlet port of the valve body detects the pressure increase, and the controller receives the pressure increase value and controls the air pump to pump the air out of the storage tank.
b. The air pressure in the storage tank changes, the isolation slide piece slides to suck the liquid into the liquid inlet port at the position of the liquid inlet sensor into a proper amount through the storage tank, the flow rate of the liquid flowing through the sealing block is constant, and the flow rate is unchanged.
As a further scheme of the invention: the pressure compensation comprises the following steps:
c. and the liquid inlet sensor of the liquid inlet port of the valve body detects the pressure reduction, and the controller receives the reduction data and controls the air pump to pump air into the storage tank.
d. The air pressure in the storage tank is increased, the isolation slide piece extrudes partial liquid in the storage tank to the liquid inlet port, the pressure is kept constant at the moment, and the flow rate is unchanged.
As a further scheme of the invention: after pressure release and pressure compensation, flow control still includes:
e. the liquid outlet sensor detects the flow of the liquid outlet port of the valve body, and controls the driver and the speed reducer to drive the sealing block to move if the flow is high. The opening of the flow passage in the shell is reduced and an alarm is given.
f. If the flow is lower, the driver and the speed reducer are controlled to drive the sealing block to move, and the flow channel in the shell is enlarged and an alarm is given.
The invention has the beneficial effects that:
1. the liquid inlet sensor is adopted to monitor the liquid flow and the pressure, the air pump is controlled through the control end according to the change of the pressure, so that the liquid inlet port of the pump body is subjected to liquid pressure control, the sealing block is further kept to move to a proper position and is kept to be in the opening size corresponding to the flow, the pressure can be kept in such a way, the flow is kept constant under the same pressure under the same flow channel size, and the dependence on the supply stability of upstream raw materials is reduced;
2. the invention monitors the liquid outlet flow through the liquid outlet sensor, if the liquid outlet flow changes, the pressure compensation and the pressure relief at the position of the liquid inlet port cannot be maintained, which indicates that the supply pressure of the solution continuously decreases or continuously increases, at the moment, the size of the opening of the flow channel is changed by matching with the adjusting sealing block, the flow is emergently adjusted and maintained, the real-time adjustment is carried out through the real-time flow change, the alarm is given, the supply state of the upstream raw materials is timely checked, and the stable production is ensured.
Drawings
FIG. 1 is a schematic diagram of a control system of the present invention;
FIG. 2 is a perspective schematic view of the valve body of the present invention;
FIG. 3 is a schematic perspective cross-sectional view of the shield of the present invention;
FIG. 4 is a schematic perspective cross-sectional view of a storage tank of the present invention;
fig. 5 is a perspective view of the connector of the present invention.
In the figure: 1. a housing; 2. a storage tank; 3. a connecting port; 4. sealing; 5. a support; 6. protecting the shell; 7. a speed reducer; 8. a deflection rod; 9. pressing a plate; 10. a slide hole; 11. a connecting member; 12. positioning holes; 13. a positioning bar; 14. a connecting rod; 15. sealing a seat; 16. a sheath; 17. a piston; 18. a spring; 19. a supporting seat; 20. a liquid inlet sensor; 21. a liquid outlet sensor; 22. sealing blocks; 23. a separator slide; 24. an air tap.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1:
a method of flow control of an etching fluid, comprising the steps of:
s1, inputting flow demand data by a control end, and controlling the size of a flow passage opening of a valve body.
S2, acquiring real-time pressure change data of the liquid inlet port of the valve body, recording pressure change fluctuation data of the liquid inlet port, and sending the pressure change fluctuation data to the control end.
S3, when the pressure of the liquid inlet of the valve body is instantly increased, pressure is released, and redundant liquid is stored.
And S4, monitoring flow data of the liquid outlet port of the valve body, and sending the flow data to the control end in real time.
And S5, when the flow of the liquid outlet port of the valve body is reduced, the stored liquid is refluxed to perform pressure compensation, and the flow is maintained.
The control end carries out information acquisition on the liquid inlet port and the liquid outlet port through the local area network.
The liquid flow and the pressure are monitored by adopting the liquid inlet sensor 20, the air pump is controlled by the control end according to the pressure change, so that the pressure control of liquid is carried out on the liquid inlet port of the pump body, the sealing block 22 is further kept to move to a proper position and is kept to the opening size corresponding to the flow, the pressure can be kept in this way, the flow is kept constant under the same pressure under the same flow channel size, the dependence on the upstream raw material supply stability is reduced, the liquid outlet sensor 21 is used for monitoring the liquid outlet flow, if the liquid outlet flow changes, the pressure compensation and the pressure relief at the position of the liquid inlet port cannot be kept, the supply pressure of the solution is continuously reduced or continuously increased, at the moment, the sealing block 22 is adjusted to change the opening size of the flow channel, the flow is emergently adjusted and kept, the real-time adjustment is carried out through the real-time flow change, the alarm is given out, the timely inspection on the supply state of the upstream raw materials is carried out, and the stable production is ensured.
The key equipment adopted by the flow control method of the corrosive fluid, namely the valve body, which is an electric regulating valve, specifically comprises the following structural characteristics:
the valve body includes casing 1, 1 surface mounting of casing has connector 3, connector 3's last fixed surface is connected with support 5, the last fixed surface of support 5 is connected with protecting casing 6, one side fixed mounting of support 5 has motor drive's reduction gear 7, protecting casing 6 has connecting rod 14 with connector 3's opposite face runs through the slip jointly, the output shaft fixedly connected with deflection bar 8 of driver, the surface of deflection bar 8 runs through and has seted up slide opening 10, the surface of connecting rod 14 runs through and is fixed with connecting piece 11, the fixed surface of connecting piece 11 is connected with clamp plate 9, the surface of clamp plate 9 is provided with the round pin axle with slide opening 10 cooperation slip, the bottom fixedly connected with of connecting rod 14 is used for the seal block 22 of shutoff casing 1. A sealing seat 15 is fixed on the upper surface of the connecting port 3, a sealing piece 4 is fixed on the inner wall of the sealing seat 15 in a sealing manner, a piston 17 sliding on the inner wall of the protective shell 6 is fixedly connected to the top end of the connecting rod 14, a spring 18 is fixedly connected to the upper surface of the piston 17, and a supporting seat 19 used for supporting the top end of the spring 18 is fixedly connected to the inner wall of the protective shell 6. The lower surface of the shell 1 is communicated with a storage tank 2, the inner wall of the storage tank 2 is provided with an isolation slider 23 in a sealing sliding manner, the bottom of the storage tank 2 is provided with an air nozzle 24 for communicating with an air pump, a liquid inlet sensor 20 is arranged above the left side of the shell 1 in a penetrating manner, and a liquid outlet sensor 21 is arranged below the right side of the shell 1 in a penetrating manner. The surface of the bracket 5 is welded with a positioning strip 13, the surface of the connecting piece 11 is provided with a positioning hole 12 used for matching the positioning strip 13 to slide, and the opposite surfaces of the connecting piece 11 and the protective shell 6 are jointly fixed with a sheath 16 used for protecting a connecting rod 14.
The structural features include the following mechanisms:
the height of the seal block 22 is varied to control the size of the flow passage opening;
when the device is used, the control end is matched with the speed reducer 7 through the control driver to increase the output torque, so that the deflection rod 8 of the control end starts to deflect under the action of the output shaft of the speed reducer 7, meanwhile, the deflection rod 8 is matched with the pin shaft on the surface of the pressing plate 9 through the sliding hole 10 on the surface, so that the pressing plate 9 drives the connecting piece 11 to move up and down, and the connecting piece 11 keeps stable movement through the matching of the positioning hole 12 and the positioning strip 13 when moving.
When the height of the connecting piece 11 changes, the pull rod drives the sealing block 22 to move by driving the synchronous height change of the pull rod, so that the size of the flow passage opening in the shell 1 changes, and the flow can be controlled.
Meanwhile, when the pull rod moves, the piston 17 is driven to press the spring 18 to contract and change, so that the spring 18 is supported by the supporting seat 19, and when the driver is closed, the spring 18 drives the pull rod and the sealing block 22 to be in a closed state in the resetting process of the piston 17 under the action of the spring 18.
The structure for ensuring the constant flow rate and the stable pressure includes that the air pump is controlled by the control end, so that the air pump can pump out and pump air into the storage tank 2, the isolation slider 23 moves up and down under the air pressure control of the air pump, the solution is pumped in and out, and the control end dynamically adjusts the air pump in real time according to the pressure data detected by the liquid inlet sensor 20 of the liquid inlet port.
The three states of the overall control include pressure relief, compensation and emergency flow control, and the three states are directed to three response modes under different use conditions, as follows:
1 the pressure relief process comprises the following steps:
a. the liquid inlet sensor 20 at the liquid inlet of the valve body detects the pressure increase, and the controller receives the pressure increase value and controls the air pump to pump the air out of the storage tank 2.
b. When the air pressure in the storage tank 2 changes, the isolation slide piece 23 slides through the storage tank 2 to suck a proper amount of liquid into the liquid inlet port at the position of the liquid inlet sensor 20, and the flow rate of the liquid flowing through the sealing block 22 is constant and unchanged.
The pressure compensation comprises the following steps:
c. the liquid inlet sensor 20 at the liquid inlet of the valve body detects the pressure reduction, and the controller receives the reduction data and controls the air pump to pump air into the storage tank 2.
d. The air pressure in the storage tank 2 is increased, the isolation slide piece 23 extrudes part of the liquid in the storage tank 2 to the liquid inlet port, and the pressure is kept constant at the moment, and the flow rate is unchanged.
3 when the pressure relief and pressure compensation effect has no effect, the emergency flow control further comprises:
e. the liquid outlet sensor 21 detects the flow of the liquid outlet port of the valve body, and controls the driver and the reducer 7 to drive the sealing block 22 to move if the flow is high. The opening of the flow passage in the shell 1 is reduced and an alarm is given.
f. If the flow is low, the control driver and the speed reducer 7 drive the sealing block 22 to move, and the flow passage in the shell 1 is enlarged and gives an alarm.
The points to be finally explained are: although the present invention has been described in detail with the general description and the specific embodiments, on the basis of the present invention, the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and these modifications or substitutions do not depart from the spirit of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. A method of controlling flow of an etching fluid, comprising:
s1, inputting flow demand data by a control end, and controlling the size of a flow passage opening of a valve body;
s2, acquiring real-time pressure change data of the liquid inlet port of the valve body, recording pressure change fluctuation data of the liquid inlet port, and sending the pressure change fluctuation data to the control end;
s3, when the pressure of the liquid inlet port of the valve body is increased instantly, pressure relief is carried out, and redundant liquid is stored;
s4, monitoring flow data of a liquid outlet port of the valve body, and sending the flow data to a control end in real time;
and S5, when the flow of the liquid outlet port of the valve body is reduced, the stored liquid is refluxed to perform pressure compensation, and the flow is maintained.
2. A method of controlling flow of an etching fluid according to claim 1, wherein: and the control end carries out information acquisition on the liquid inlet port and the liquid outlet port through the local area network.
3. An electric control valve, characterized in that, the flow control method of a corrosive fluid is used according to any one of claims 1-2, the valve body comprises a housing (1), the upper surface of the housing (1) is provided with a connector (3), the upper surface of the connector (3) is fixedly connected with a support (5), the upper surface of the support (5) is fixedly connected with a protective shell (6), one side of the support (5) is fixedly provided with a reducer (7) driven by a motor, the opposite surfaces of the protective shell (6) and the connector (3) jointly penetrate and slide to form a connecting rod (14), the output shaft of the driver is fixedly connected with a deflection rod (8), the surface of the deflection rod (8) penetrates and is provided with a sliding hole (10), the surface of the connecting rod (14) penetrates and is fixedly provided with a connecting piece (11), the surface of the connecting piece (11) is fixedly connected with a pressing plate (9), the surface of the pressing plate (9) is provided with a pin shaft which is matched and slides to the sliding hole (10), and the bottom end of the connecting rod (14) is fixedly connected with a sealing block (22) for sealing the housing (1).
4. An electrically actuated regulator valve according to claim 3 wherein: the upper surface of connector (3) is fixed with a seal seat (15), the inner wall of seal seat (15) is sealed to be fixed with a seal (4), the top fixedly connected with of connecting rod (14) slides in piston (17) of protecting crust (6) inner wall, the upper surface fixedly connected with spring (18) of piston (17), the inner wall fixedly connected with of protecting crust (6) is used for supporting seat (19) in spring (18) top.
5. An electrically actuated valve according to claim 4, wherein: the lower surface intercommunication of casing (1) has storage tank (2), the sealed slip that slides of inner wall of storage tank (2) has isolation slider (23), the bottom of storage tank (2) is provided with air cock (24) that are used for communicateing the air pump, casing (1) left top is run through and is provided with into liquid sensor (20), casing (1) right side below is run through and is provided with out liquid sensor (21).
6. An electrically actuated regulator valve according to claim 3 wherein: the surface welding of support (5) has location strip (13), locating hole (12) that are used for cooperating location strip (13) gliding are seted up on the surface of connecting piece (11), connecting piece (11) and the opposite face of protecting casing (6) are fixed with sheath (16) that are used for protecting connecting rod (14) jointly.
7. A flow control method and an electric control valve for an etching fluid according to any one of claims 1 to 6, wherein: the pressure relief process comprises the following steps:
a. a liquid inlet sensor (20) at a liquid inlet port of the valve body detects that the pressure is increased, and the controller receives the pressure increase value and controls the air pump to pump air out of the storage tank (2);
b. when the air pressure in the storage tank (2) changes, the isolation slide piece (23) slides through the storage tank (2) to suck the liquid into the liquid inlet port at the position of the liquid inlet sensor (20) into a proper amount, and the flow rate of the liquid flowing through the sealing block (22) is constant and the flow rate is unchanged.
8. A flow control method and an electric control valve for an etching fluid according to any one of claims 1 to 6, wherein: the pressure compensation comprises the following steps:
c. a liquid inlet sensor (20) at a liquid inlet port of the valve body detects that the pressure is reduced, and the controller receives reduction data and controls the air pump to pump air into the storage tank (2);
d. the air pressure in the storage tank (2) is increased, the isolation slide piece (23) extrudes part of liquid in the storage tank (2) to the liquid inlet port, and the pressure is kept constant at the moment, and the flow rate is unchanged.
9. A flow control method and an electric control valve for an etching fluid according to any one of claims 7 to 8, wherein: after pressure release and pressure compensation, flow control still includes:
e. the liquid outlet sensor (21) detects the flow of the liquid outlet port of the valve body, and controls the driver and the reducer (7) to drive the sealing block (22) to move if the flow is high; the opening of the flow passage in the shell (1) is reduced and an alarm is given;
f. if the flow is low, the driver and the speed reducer (7) are controlled to drive the sealing block (22) to move, and the flow channel in the shell (1) is enlarged and an alarm is given.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210579347.0A CN115143285A (en) | 2022-05-25 | 2022-05-25 | Flow control method of corrosive fluid and electric regulating valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210579347.0A CN115143285A (en) | 2022-05-25 | 2022-05-25 | Flow control method of corrosive fluid and electric regulating valve |
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| Publication Number | Publication Date |
|---|---|
| CN115143285A true CN115143285A (en) | 2022-10-04 |
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|---|---|---|---|
| CN202210579347.0A Pending CN115143285A (en) | 2022-05-25 | 2022-05-25 | Flow control method of corrosive fluid and electric regulating valve |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116906598A (en) * | 2023-09-13 | 2023-10-20 | 江苏南极机械有限责任公司 | High-speed exhaust PV valve for ballast tank |
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2022
- 2022-05-25 CN CN202210579347.0A patent/CN115143285A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116906598A (en) * | 2023-09-13 | 2023-10-20 | 江苏南极机械有限责任公司 | High-speed exhaust PV valve for ballast tank |
| CN116906598B (en) * | 2023-09-13 | 2023-11-24 | 江苏南极机械有限责任公司 | High-speed exhaust PV valve for ballast tank |
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