CN115128383A - Adjustable coaxial resonance probe for measuring conductivity of material - Google Patents

Adjustable coaxial resonance probe for measuring conductivity of material Download PDF

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Publication number
CN115128383A
CN115128383A CN202210763441.1A CN202210763441A CN115128383A CN 115128383 A CN115128383 A CN 115128383A CN 202210763441 A CN202210763441 A CN 202210763441A CN 115128383 A CN115128383 A CN 115128383A
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China
Prior art keywords
coaxial
base
probe
conductivity
wavelength resonator
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CN202210763441.1A
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Chinese (zh)
Inventor
叶鸣
杨放
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Xian University of Architecture and Technology
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Xian University of Architecture and Technology
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Priority to CN202210763441.1A priority Critical patent/CN115128383A/en
Publication of CN115128383A publication Critical patent/CN115128383A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
    • H01P3/06—Coaxial lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R24/00—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure
    • H01R24/38—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts
    • H01R24/40—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts specially adapted for high frequency

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention discloses an adjustable coaxial resonance probe for measuring material conductivity, which comprises an SMA coaxial connector, a base, a screw, a sample to be measured, a probe, a half-wavelength resonator, a bearing platform and a radio frequency reflectometer, wherein the SMA coaxial connector is arranged on the base; the sample to be measured is located on the wafer bearing platform, the base is located above the sample to be measured, the bottom of the base is connected with the coaxial outer conductor flange, the SMA coaxial connector is fixed at the top of the base, the base is provided with a central through hole along the axial direction, the upper end of the half-wavelength resonator penetrates through the coaxial outer conductor flange to be inserted into the central through hole, the lower end of the half-wavelength resonator is provided with the probe, the radio frequency reflectometer is connected with the upper end of the half-wavelength resonator through the SMA coaxial connector, and the probe can be used in different scenes.

Description

Adjustable coaxial resonance probe for measuring conductivity of material
Technical Field
The invention relates to an adjustable coaxial resonance probe, in particular to an adjustable coaxial resonance probe for measuring the conductivity of a material.
Background
The conductivity of the material reflects the characteristics of the material such as element composition, microstructure, internal defects and the like, so that the influence of the material preparation process on the material characteristics (such as doping of semiconductor materials, annealing of alloy materials and the like) can be evaluated by measuring the conductivity of the material; furthermore, when device/system functionality is implemented using material conductivity, it is particularly desirable to evaluate material conductivity (e.g., microelectronic devices, optoelectronic devices, 3D printing microwave devices, etc.). Currently, the more sophisticated conductivity measurement techniques include: four-probe technology and eddy current technology. The four-probe technology belongs to a contact type measurement technology, and a sample is easily contaminated or damaged in the test process; the eddy current technology belongs to a non-contact measurement technology, and is easy to realize on-line test, but the existing eddy current technology usually works in a low-frequency band and cannot meet the requirement of a high-frequency high-speed device on high-frequency conductivity measurement. In order to realize the evaluation of the conductivity of the material under high frequency conditions, a material conductivity measurement technique based on a microwave technique has been studied. At present, the material conductivity measurement technology based on the microwave technology mainly includes a transmission/reflection method and a resonance method. The common measuring clamp for the transmission/reflection method comprises a rectangular waveguide, a coaxial line, an antenna and the like, and the common measuring clamp for the resonance method comprises a rectangular resonant cavity, a cylindrical resonant cavity, a quasi-optical cavity, a coaxial resonant cavity and the like. The transmission/reflection method has the advantages that the measuring frequency band is wide, but the sensitivity is lower than that of the resonance method; although the resonance method has high sensitivity, it is generally possible to obtain a test result only at one or a plurality of frequency points (a test is performed using a fundamental mode of a resonant cavity and a higher-order mode near the fundamental mode). Compared with other resonance methods, the coaxial line resonance probe-based measurement method has obvious spatial resolution advantages, and the theoretical spatial resolution is equivalent to the radius of the probe tip. In addition, because the coaxial line resonance probe is realized based on the coaxial line, the lower fundamental mode resonance frequency (such as hundreds of MHz magnitude and even tens of MHz magnitude) is easy to obtain, and further, the nearly continuous broadband test can be realized based on the working principle of high-order mode. Currently, the design factors having influence on the measurement performance, which are mainly discussed in the research on the coaxial line resonance probe, include: the size of the coupling gap between the feeder line and the resonant coaxial line, the resonant frequency, the length and the curvature radius of the probe tip, the size of the gap between the probe tip and the material to be tested, the mode number, the attenuation constant and the propagation constant of the coaxial line and the like. In order to develop coaxial probes suitable for different scenes, a new probe needs to be designed.
Disclosure of Invention
The object of the present invention is to overcome the above mentioned drawbacks of the prior art and to provide a tunable coaxial resonant probe for measuring the conductivity of materials, which probe is capable of using different scenarios.
In order to achieve the aim, the adjustable coaxial resonance probe for measuring the conductivity of the material comprises an SMA coaxial connector, a base, a screw, a sample to be measured, a probe, a half-wavelength resonator, a bearing platform and a radio frequency reflectometer;
the sample to be measured is located on the wafer bearing table, the base is located above the sample to be measured, the bottom of the base is connected with a coaxial outer conductor flange, the SMA coaxial connector is fixed to the top of the base, a central through hole is axially formed in the base, the upper end of the half-wavelength resonator penetrates through the coaxial outer conductor flange to be inserted into the central through hole, a probe is arranged at the lower end of the half-wavelength resonator, and the radio frequency reflectometer is connected with the upper end of the half-wavelength resonator through the SMA coaxial connector.
The device also comprises a bracket, wherein the upper part of the base is fixed on the bracket.
The coaxial outer conductor flange is connected with the base through a plurality of screws.
The cross section of the base is of an I-shaped structure.
The half-wavelength resonator is made of standard coaxial lines.
The SMA coaxial connector is of a type L29, N, SMA, 3.5mm or 2.92 mm.
All the screws are evenly distributed along the circumferential direction.
The invention has the following beneficial effects:
when the adjustable coaxial resonance probe for measuring the conductivity of the material is in specific operation, the bottom of the base is connected with the coaxial outer conductor flange, the SMA coaxial connector is fixed at the top of the base, the base is axially provided with the central through hole, the upper end of the half-wavelength resonator penetrates through the coaxial outer conductor flange and is inserted into the central through hole, and the lower end of the half-wavelength resonator is provided with the probe.
Drawings
FIG. 1 is a block diagram of the present invention;
FIG. 2 is a graph of the results of a test on coated glass using two different flange designs.
Wherein, 1 is an SMA coaxial connector, 2 is a base, 3 is a screw, 4 is a sample to be measured, 5 is a coaxial outer conductor flange, 6 is a probe, 7 is a half-wavelength resonator, 8 is a bearing plate, and 9 is a radio frequency reflectometer.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments, and are not intended to limit the scope of the present disclosure. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present disclosure. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
There is shown in the drawings a schematic block diagram of a disclosed embodiment in accordance with the invention. The figures are not drawn to scale, wherein certain details are exaggerated and possibly omitted for clarity of presentation. The shapes of the various regions, layers and their relative sizes, positional relationships are shown in the drawings as examples only, and in practice deviations due to manufacturing tolerances or technical limitations are possible, and a person skilled in the art may additionally design regions/layers with different shapes, sizes, relative positions, according to the actual needs.
Referring to fig. 1, the adjustable coaxial resonant probe for measuring the conductivity of a material according to the present invention includes an SMA coaxial connector 1, a base 2, a screw 3, a sample 4 to be measured, a coaxial outer conductor flange 5, a probe 6, a half-wavelength resonator 7, a stage 8, and a radio frequency reflectometer 9;
the sample 4 to be measured is located on the wafer bearing table 8, the base 2 is located above the sample 4 to be measured, the bottom of the base 2 is connected with a coaxial outer conductor flange 5, the SMA coaxial connector 1 is fixed at the top of the base 2, the base 2 is provided with a central through hole along the axial direction, the upper end of the half-wavelength resonator 7 penetrates through the coaxial outer conductor flange 5 to be inserted into the central through hole, the lower end of the half-wavelength resonator 7 is provided with a probe 6, and the radio frequency reflectometer 9 is connected with the upper end of the half-wavelength resonator 7 through the SMA coaxial connector 1.
The SMA coaxial connector comprises a base 2, a coaxial outer conductor flange 5, a half-wavelength resonator 7, a central through hole and an SMA coaxial connector 1, wherein the upper part of the base 2 is fixed on the support, the coaxial outer conductor flange 5 is connected with the base 2 through a screw 3, a coupling gap is formed between the half-wavelength resonator 7 and the inner wall of the central through hole, and the SMA coaxial connector 1 is L29 type, N type, SMA type, 3.5mm type or 2.92mm type. The cross section of the base 2 is of an I-shaped structure, and the half-wavelength resonator 7 is made of a standard coaxial line.
The base 2 is a fixed structure and can also serve as a coaxial outer conductor, in addition, one probe is provided with a plurality of coaxial outer conductor flanges 5, and the coaxial outer conductor flanges 5 with different shapes/sizes are replaced according to the requirements of a test scene; the half-wavelength resonator 7 is made of a standard coaxial line or is made by custom processing, and the half-wavelength resonator 7 is fastened in the base 2 in an interference fit mode or a plug pin mode; design parameters such as the length and material/specification of the half-wavelength resonator 7, the size of the coupling gap, the needle point of the probe 6, the sample gap and the like are designed according to a test scene; the radio frequency reflectometer 9 measures the amplitude and phase of the reflection coefficient, further extracts the quantitative parameters such as resonance frequency, quality factor, return loss and the like, and realizes the evaluation of the conductivity of the material by associating the quantitative parameters with the conductivity parameters of the material to be measured. The left graph in fig. 2 is a test result graph of the small flange; the right graph is a test result graph of a large flange.
The method has potential application value in at least the following scenes: scenario 1, the conductivity of a semiconductor wafer is tested using a coaxial resonance probe; scene 2, the coaxial resonance probe is used for testing the conductivity of the coated glass in the field of energy-saving buildings; scene 3, the conductivity of the transparent conductive material was tested using a coaxial resonant probe.

Claims (7)

1. An adjustable coaxial resonance probe for measuring material conductivity is characterized by comprising an SMA coaxial connector (1), a base (2), a screw (3), a sample to be measured (4), a probe (6), a half-wavelength resonator (7), a wafer bearing table (8) and a radio frequency reflectometer (9);
the sample (4) to be measured is located on the bearing platform (8), the base (2) is located above the sample (4) to be measured, the bottom of the base (2) is connected with a coaxial outer conductor flange (5), the SMA coaxial connector (1) is fixed at the top of the base (2), the base (2) is provided with a central through hole along the axial direction, the upper end of the half-wavelength resonator (7) penetrates through the coaxial outer conductor flange (5) to be inserted into the central through hole, the lower end of the half-wavelength resonator (7) is provided with a probe (6), and the radio frequency reflectometer (9) is connected with the upper end of the half-wavelength resonator (7) through the SMA coaxial connector (1).
2. The tunable coaxial resonant probe for measuring conductivity of a material according to claim 1, further comprising a support, wherein the upper portion of the base (2) is fixed to the support.
3. The tunable coaxial resonant probe for measuring material conductivity according to claim 1, wherein the coaxial outer conductor flange (5) is connected to the base (2) by a plurality of screws (3).
4. The tunable coaxial resonant probe for measuring material conductivity according to claim 1, wherein the base (2) has an i-shaped cross-section.
5. The tunable coaxial resonant probe for measuring conductivity of materials according to claim 1, characterized in that the half-wavelength resonator (7) is made of standard coaxial wire.
6. The tunable coaxial resonant probe for measuring the electrical conductivity of a material according to claim 1, characterized in that the SMA coaxial connector (1) is of the type L29, N, SMA, 3.5mm or 2.92 mm.
7. The tunable coaxial resonant probe for measuring conductivity of materials according to claim 3, characterized in that the screws (3) are evenly distributed in circumferential direction.
CN202210763441.1A 2022-06-30 2022-06-30 Adjustable coaxial resonance probe for measuring conductivity of material Pending CN115128383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210763441.1A CN115128383A (en) 2022-06-30 2022-06-30 Adjustable coaxial resonance probe for measuring conductivity of material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210763441.1A CN115128383A (en) 2022-06-30 2022-06-30 Adjustable coaxial resonance probe for measuring conductivity of material

Publications (1)

Publication Number Publication Date
CN115128383A true CN115128383A (en) 2022-09-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210763441.1A Pending CN115128383A (en) 2022-06-30 2022-06-30 Adjustable coaxial resonance probe for measuring conductivity of material

Country Status (1)

Country Link
CN (1) CN115128383A (en)

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