CN115127474A

CN115127474A - Method for controlling XY scanning of laser measuring instrument by computer

Info

Publication number: CN115127474A
Application number: CN202210663595.3A
Authority: CN
Inventors: 万茜; 黄天浩; 赵春晓
Original assignee: Jiangnan University
Current assignee: Jiangnan University
Priority date: 2022-06-10
Filing date: 2022-06-10
Publication date: 2022-09-30

Abstract

The invention discloses a method for controlling XY scanning of a laser measuring instrument by a computer, belonging to the technical field of test and measurement. The invention is based on LabVIEW software platform, through the computer program, realize the computer control LT-9010M laser measuring instrument to the XY scanning measurement of the measured sample, and display the data oscillogram and topography map; by selecting the LT9010M laser measuring instrument, the measuring precision can reach 10 nanometers, which is far higher than that of the laser measuring instrument researched in China at present, and the measuring instrument can be applied to various measuring modes; an adaptive control program is designed by adopting a LabVIEW platform, so that high-efficiency and high-precision XY scanning is realized; in addition, compared with a self-contained scanning mode of the LT9010M laser measuring instrument, the invention can realize simpler, visual and intuitive observation and comparison of detection data, also enables the data processing to be more convenient and faster, and can be applied to various high-precision measuring fields.

Description

Method for controlling XY scanning of laser measuring instrument by computer

Technical Field

The invention relates to a method for controlling XY scanning of a laser measuring instrument by a computer, belonging to the technical field of test and measurement application.

Background

In recent years, due to the rapid development of high-tech and manufacturing industries, the requirements of various industries on the accuracy of measuring objects are continuously increased (reaching micron level or more), and especially in the requirements of product production, the requirements of the accuracy of measuring the surface topography of the object play a key role. Therefore, the surface topography of an object needs to be measured with higher accuracy than the profile measurement of the object in many researches and applications, and the research on the method for measuring the distance of the object by using the micro displacement is more and more keen. The traditional measuring method is to use a contact-pin type contourgraph to measure the surface of an object, a pen point penetrates through the surface of a sample at a constant speed by using static measuring force, and then a measuring signal is analyzed and processed to obtain the data of the surface of the object. The traditional contact type measuring method can generate interaction force with an object in the measuring process, so that the measured object is deformed, and scratches are generated. And thus is difficult to apply to high precision applications.

In order to overcome this drawback, non-contact measurement methods have been developed, which do not damage the sample surface compared to contact measurement methods, and can be applied to high precision applications. Laser confocal detection has attracted attention and is widely used because of its unique measurement method and good stability to enable accurate measurement of geometric quantities. The technology has good response characteristic and larger measurable inclination angle, so that stray light can be shielded, and high longitudinal and transverse resolution which cannot be realized by the conventional optical technology is provided.

The Keynes LT-9010M laser measuring instrument is a precise instrument which can realize various high-precision measurements and has various measurement modes, but the product has no application program on a PC (personal computer) end, cannot realize XY scanning, and has the advantages of weaker data processing capability, lower efficiency and narrower application range.

Disclosure of Invention

The invention provides a method for controlling XY scanning of a laser measuring instrument by a computer, aiming at solving the problems of weak data processing capability and low efficiency of the existing LT-9010M laser measuring instrument and further expanding the use function of the existing LT-9010M laser measuring instrument.

A first object of the present invention is to provide a method for computer-controlled XY scanning of a laser gauge, the method comprising: based on a LabVIEW software platform, the XY scanning measurement of a sample to be measured by controlling an LT-9010M laser measuring instrument by a computer is realized through a computer program, and a data oscillogram and a topography are displayed;

a controller NI PCI-7330 is arranged in a mainboard PCI of the computer and is used for controlling XY directions;

the sample to be measured is placed on an electric XY translation stage with a five-phase stepper motor, which is externally connected to a five-phase stepper motor driver DFC 5107P.

Optionally, the method includes:

the method comprises the following steps: completing the construction of the electric XY translation table, comprising: the connection of the controller NI PCI-7330, the driver DFC5107P, a patch panel, a switching power supply;

step two: connecting and communicating the LT-9010M laser measuring instrument with the computer;

step three: and controlling the electric XY translation stage by setting a range and a stepping length in a computer program by using a LabVIEW software platform, so that the tested sample is driven to move along a Z-shaped scanning route, the height measurement of two directions in an XY plane is realized, and a data oscillogram and a topography are displayed.

Optionally, the controller NI PCI-7330 is installed in the computer motherboard PCI, the 68-Pin motion I/O interface of the controller NI PCI-7330 is led out through a wiring board, connected to the corresponding interface of the driver DFC5107P, and connects the five-phase stepping motor to the driver DFC5107P, so as to drive the motor by the driver.

Optionally, the driver DFC5107P is connected to a dc power supply that converts 220V to 24V to power the driver DFC 5107P.

Optionally, in the second step, the computer is connected to the LT9010M laser measuring instrument through an RS232 port, so as to implement real-time control and communication between hardware and the computer.

Optionally, the third step includes: for a software LabVIEW development platform, initializing the system, wherein the initialization is completed by NIMAX;

opening NIMAX software, in the 'equipment and interface', NI Motion Devices check a controller NIPCI-7330 on a PC mainboard, click Reference Move in Add Steps, click initialization, and finish initialization; if the stepping motor is required to Move, the straight Move is selected in the option of Add Steps, so that the stepping motor moves.

Optionally, the third step includes: inputting the range and the step of the X direction, dividing the two numbers by the number obtained by rounding up to obtain the total number of the cycle measured in the X direction, and measuring the object in the X direction; inputting the range and the step of the Y direction, dividing the two numbers by the number of points obtained by rounding up to obtain the total number of the cycle measured in the Y direction, and measuring the object in the Y direction;

and nesting the X-cycle program in the Y-cycle program, and moving the stepping motor downwards towards the Y direction after the cycle total number in one X direction is measured, and continuing to measure the data in the next X direction until the cycle total number in the Y direction is measured, so that the Z-shaped measurement is realized.

A second object of the present invention is to provide an XY scanning system of a computer-controlled laser measuring instrument, characterized in that the system comprises: a computer, LT9010M laser gauge and stage system;

the XY scanning system is developed based on a LabVIEW platform, and the LT9010M laser measuring instrument and the objective table system are controlled by a computer program;

the stage system includes: the device comprises a controller NI PCI-7330, a driver DFC5107P and an electric XY translation table, wherein the electric XY translation table is provided with a five-phase stepping motor;

the controller NI PCI-7330 is installed in a computer mainboard PCI, a 68-Pin motion I/O interface of the controller NI PCI-7330 is led out through a wiring board and is connected to a corresponding interface of the driver DFC5107P, and a five-phase stepping motor in the electric XY translation stage is connected with the driver DFC 5107P;

the computer is connected with the LT9010M laser measuring instrument through an RS232 port.

Optionally, the working process of the XY scanning system includes:

s1: the controller NI PCI-7330 is installed in a computer mainboard PCI, a 68-Pin motion I/O interface thereof is led out through a wiring board and is connected to a corresponding interface of a driver DFC5107P, and a five-phase stepping motor in the electric XY translation table is connected to the driver DFC5107P, so that a stage system is formed;

s2: the RS232 port of the PC is connected with the Keynes LT9010M laser measuring instrument, so that real-time control and communication between the hardware of the laser measuring instrument and the PC are realized;

s3: initializing a system for a software LabVIEW development platform;

s4: the communication port selects RS232 and sets control parameters such as corresponding sampling times;

s5: the range and step of X, Y directions are input respectively: inputting the range and the step of the X direction, and dividing the two numbers by the number of points obtained by rounding up to obtain the total number of the cycles measured in the X direction; inputting the range and the stepping of the Y direction, and dividing the two numbers by the number of points obtained by rounding up to obtain the total number of the cycles measured in the Y direction; nesting the X-cycle program in the Y-cycle program, moving the stepping motor downwards in the Y direction after measuring the total number of cycles in the X direction, and continuing to measure the data in the next X direction until the total number of cycles in the Y direction is measured, so as to realize Z-shaped measurement;

s6: and displaying the height measured by the LT9010M laser measuring instrument in real time through a display screen.

The invention has the beneficial effects that:

(1) in the aspect of hardware, a PCI-7330 motion control card, two DFC5107P drivers and corresponding five-phase stepping motors are combined, a laser measuring instrument is connected with a PC (personal computer), XY displacement scanning can be carried out on a sample measured by the laser measuring instrument through the PC, a two-dimensional height map is directly given out, and compared with a mode of the laser measuring instrument, the method is simpler, more vividly and intuitively observes and compares detection data, and also enables the data processing to be more convenient and faster;

(2) in the aspect of software, a control program adaptive to LT-9010M is designed by adopting LabVIEW and other software, a main control platform LabVIEW of the software is graphical compiling software, compared with text compiling modes such as C, C + +, Java and the like, the LabVIEW has a short development period, and rich function libraries provided by the platform can be used for realizing powerful functions such as instrument communication, parameter setting, data processing, waveform display, data storage and the like, so that the programming efficiency is greatly improved, and the application range and the productivity of the Kernel LT-9010M laser measuring instrument are greatly improved;

(3) compared with other laser measuring instruments, the LT9010M laser measuring instrument is selected, the measuring precision can reach 10 nanometers, is far higher than that of the laser measuring instrument researched at home at present, can be applied to various measuring modes, and is applied to various high-precision fields.

The X-Y scanning method of the high-precision and high-efficiency laser measuring instrument is designed by combining the Kenzhi LT9010M laser measuring instrument and the LabVIEW development platform, a PC (personal computer) end application program is provided for the Kenzhi LT9010M laser measuring instrument, scanning in two X and Y directions is realized, the scanning precision and efficiency are guaranteed, the use function is expanded, and the reliability and effectiveness of scanning are greatly improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a hardware connection schematic of the present invention.

Figure 2 is a schematic diagram of the connector between the drive DFC5107P and the XY motorized stage of the present invention.

Fig. 3 is a LabVIEW flow chart of initializing a serial port.

FIG. 4 is a three-dimensional graph of the scanning result in the second embodiment of the present invention.

FIG. 5 shows two-dimensional data results of the scanning results in the second embodiment of the present invention.

FIG. 6 is a three-dimensional graph of the scanning result in the third embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Example one

The embodiment provides a method for controlling XY scanning of a laser measuring instrument by a computer, which comprises the following steps: controlling an LT-9010M laser measuring instrument to carry out XY scanning measurement on the article by a computer through a computer program based on a LabVIEW software platform, and displaying a data oscillogram and a topography; a controller NI PCI-7330 is arranged in a mainboard PCI of the computer and is used for controlling XY directions; the article is placed on an electric XY platform with a five-phase stepping motor, the electric XY platform is externally connected with a five-phase stepping motor driver DFC5107P, and a connection principle diagram of a controller, a wiring board, a driver and a laser is shown in fig. 1.

The method specifically comprises the following steps:

the method comprises the following steps: the NI PCI-7330 card is installed in the computer host, and the NI PCI-7330 can control four axes, i.e. can control 4 directions X1, X2, X3, and X4, wherein the two directions X1 and X2, i.e. the needed control direction X, Y, are used in this embodiment.

The X axis is Pin 1-CCW, Pin 35-CW and PIN 59- +5V corresponding to NI PCI-7330, and is respectively connected with CN3-4 CCW-, CN3-2 CW-and CN3-1 CW +, CN3-3 CCW + at the CN3 end in the X driver DFC 5107P;

the Y axis is Pin 7-CCW, Pin 41-CW and Pin 59- +5V corresponding to NI PCI-7330, and is respectively connected with CN3-4 CCW-, CN3-2 CW-and CN3-1 CW +, CN3-3 CCW + at the CN3 end in Y driver DFC 5107P;

step two: the CN1 terminal of the driver DFC5107P is connected with a 24V direct current power supply, wherein CN1-1 is connected with +24V, and CN1-2 is connected with GND ground;

the CN2 end of the driver DFC5107P is connected with a five-phase stepping motor on the electric XY translation table, pins are set to be CN 2-1 corresponding to a blue line of the five-phase stepping motor, CN2-2 corresponding to a red line of the five-phase stepping motor, CN2-3 corresponding to an orange line of the five-phase stepping motor, CN2-4 corresponding to a green line of the five-phase stepping motor, and CN2-5 corresponding to a black line of the five-phase stepping motor;

the driver DFC5107P is connected with a stepping motor in the XY electric platform through a connector (a circular 20-pin connector); the CN2 pin of driver DFC5107P is, from the left: the five-phase stepping motor is provided with five ports, namely, a hole 1-blue, a hole 2-orange, a hole 3-red, a hole 4-black and a hole 5-green; specific connection interfaces are shown in fig. 2, and the connection correspondence of the driver DFC5107P is shown in table 1:

TABLE 1 DFC5107P Pin continuance

Step three: the PC is connected with a Giynes LT9010M laser measuring instrument through RS232, so that real-time control and communication between hardware and the PC are realized;

step four: for the LabVIEW development platform, the system is initialized.

And the motor working state initialization module is initialized by NIMAX. Software of NI MAX is opened, NI Motion Devices in 'equipment and interface' check NI PCI-7330 on a PC mainboard, Reference Move in Add Steps is clicked, initialization is completed, if a stepping motor moves along with the NI Motion Devices, a streamline Move is selected in an option of Add Steps, so that the stepping motor moves, and working parameters of the stepping motor are shown in Table 2:

TABLE 2 stepping motor controller operating parameters

Motor speed/pulse/s	10000
		Acceleration type	Acceleration
Acceleration pulse/s ²	100000
		Deceleration type	Deceleration
Deceleration pulses/s ²	100000
		The multi-axis interpolation curve-Jerk trapezoid is high, and the S-shape is low	2000
Moving mode	Absolute

Step five: setting a motion state, setting a checking module and a serial port setting and initializing module together, inputting the range and the step of the X direction, and dividing two numbers by the number of points obtained by rounding up to obtain the total number of the cycles measured in the X direction; inputting the range and the step of the Y direction, and dividing the two numbers by the number of points obtained by rounding up to obtain the total number of the cycles measured in the Y direction;

nesting the X-cycle program in the Y-cycle program, moving the stepping motor upwards towards the Y direction after measuring the total number of cycles in one X direction, and continuing to measure the data in the next X direction until the total number of cycles in the Y direction is measured, so as to realize Z-shaped measurement; the above is the principle of implementing two-dimensional map measurement.

In the programming process, the serial port is changed after the X direction is finished once, the process is circulated until the total number of the X circulation is full, the serial port is changed to the Y direction, the serial port is also changed like the X direction, and the process is circulated to finish the Z-shaped measurement.

And a serial port protocol in LabVIEW is adopted, and a VISA read-write module is used for realizing data exchange between the upper computer and the lower computer. The serial port adopts a full duplex and asynchronous communication mode, and is basically set as shown in table 3:

TABLE 3 RS232 communication parameters

Baud rate	115,200bit/s
		Data bit
	8
		Examination of	NONE
Stop position
		1
Flow control			Is free of
	Data segmentation symbol	CR
VISA name			COM1

The sending format of the upper computer is as follows: m a, b CR; wherein, a is the measurement number, b is the measurement content, and the format of the control command sent by the PC through the serial port RS-232 is shown in Table 4.

TABLE 4 PC sends control command format via serial RS-232

Value of a	OUT numbering
		0	OUT1 and OUT2
1	OUT1
		2	OUT2

Value of b	Measuring output content
		0	Measured value
1	Judgment of

Fig. 3 shows a flow chart of LabVIEW for initializing baud rate, data bit, parity, stop bit and flow control of the serial port, a VISA protocol is adopted in LabVIEW, a PC control command is written into a laser measuring instrument through a VISA writing module, data of the laser measuring instrument is read through a VISA reading module, and the data of the laser measuring instrument is sent into a data smoothing module to obtain corresponding average height data.

Step six: and setting one-digit transmission to convert into two-dimensional data, displaying two arrays of 1 x N when X, Y are measured, and displaying a topography map by using a one-digit data to two-dimensional data conversion module.

Step seven: the measured height is displayed in real time through a LT9010M laser measuring instrument display screen, the upper limit and the lower limit of the output are 300 mu m, and the measuring signal adopted at this time and the output content can be selected. The measurement signal has three modes, namely an out1 output, an out1 output and an out1+ out2 output; the output content has two modes, measured value + judgment. The run results are shown in table 5:

TABLE 5 output values and decision states for different measurement modes

The PC sends a command, the LT9010M laser meter reads the command, scans data output, the PC processes the data, determines the measurement value, and displays the range as shown in table 6.

TABLE 6 measurement of upper and lower limits

Determination of State 1	The result is in the upper and lower limits of the measuring range	GO
			Determination of State 1	Over the upper limit of the range	HI
Determination of State 3	Exceeding the lower limit of the range	LO

Example two

The embodiment provides a method for measuring the step height of about 20um by controlling XY scanning of a laser measuring instrument by using a computer Labview platform, which comprises the following steps:

1) initializing a system for a software Labview development platform, wherein the system comprises a motor working state initialization module, and initialization is completed through NIMAX;

2) placing a rough sample with known height difference of 20um on an objective table, adjusting the focal length of a Kinzhi LT9010M laser measuring instrument to obtain a clear picture on a display screen, and setting the display to be out1+ out2 by using a remote controller for outputting;

3) selecting a COM1 port of RS232, setting a corresponding control parameter, namely sampling times, setting the sampling times of each position to be 3, and opening a test end return-to-origin button; setting a checking module through a motion state, inputting a range of X direction as 200um, stepping as 1um, inputting a range of Y direction as 20um, stepping as 5um, and then operating Labview software;

4) the operation results are as follows:

dividing the two values of the range and the step by the number of points obtained by rounding up to obtain the total cycle number 201 measured in the X direction; the number of points rounded up is the total number of cycles measured in the Y direction 5, which is the number of samples in the X, Y direction. A checking module is arranged through the motion state, and the stepping motor returns to the original point after the total number of cycles in the Y direction is completed;

secondly, the laser scans the surface of the sample from left to right, and moves in the y direction after completing a measuring period in the x direction, so that the step of the sample is repeatedly scanned. The measured three-dimensional topography and two-dimensional data plots are shown in fig. 4 and 5, respectively, and although the sample surface was rough, a significant step was seen to exist, with a step height of about 20 um.

EXAMPLE III

In the embodiment, the LT9010M laser measuring instrument is controlled based on a LabVIEW platform to scan and measure the surface roughness of the digital surface of the unitary coin with high precision.

Experimental equipment: LabVIEW software; hardware such as a kirnshen LT9010M laser measuring instrument, an NIPCI-7330, a DFC5107P driver, a switching board, an electric XY translation table (with an XY stepping motor) and the like.

The experimental method comprises the following steps:

(1) the controller NI PCI-7330 is installed in a computer, and the NI PCI7330 can control a four-axis stepper, i.e. can control 4 directions X1, X2, X3, and X4, but this embodiment only uses two: x1, X2, i.e. desired X, Y orientation;

(2) the CN1 terminal of the driver DFC5107P is connected with a 24V direct current power supply, and CN2 is connected with a five-phase stepping motor through a connector (a circular 20-pin connector); the CN3 end is connected with a corresponding Pin port led out by the PCI-7330 through a wiring board;

(3) connecting an RS232 communication line, and connecting the PC with the Giynes LT9010M laser measuring instrument through RS232 to realize real-time control and communication between hardware and the PC;

(4) initializing a system for a software LabVIEW development platform, wherein the system comprises a motor working state initialization module, and initialization is completed through NIMAX;

(5) placing a one-dimensional coin on an object stage with the digital surface facing upwards, aligning the laser red point of a Ginzhi LT9010M laser measuring instrument right at the middle of the object, and setting the display to be out1+ out2 output by using a remote controller;

(6) selecting a COM1 port of RS232, setting a corresponding control parameter, namely sampling times, and setting the sampling times of each position to be 3 in the example; setting a checking module through a motion state, inputting a range of 600 micrometers in an X direction, stepping 10 micrometers, inputting a range of 200 micrometers in a Y direction, stepping 5 micrometers, and then running a program;

(7) the results of the run were:

the number of points obtained by rounding up is divided by the range and the stepping value, and the number is the total number 61 of the circulation measured in the X direction; the number of points rounded up is the total number of cycles 41 measured in the Y direction, which is the number of samples in the X, Y direction that are sought. And then, an inspection module is arranged through the motion state, the program of the X cycle is embedded in the program of the Y cycle, after the cycle total number of one X direction is measured, the stepping motor moves downwards towards the Y direction, the data of the next X direction are continuously measured until the cycle total number of the Y direction is measured, and the measurement of the X direction and the Y direction of the measured object by the Z-shaped measurement is realized.

After a one-coin is put on, the measured three-dimensional topography is shown in fig. 6, and a strip with fluctuation of about 20um is obtained, which is consistent with the topography of an actual sample.

The embodiment of the invention is based on a LabVIEW software platform, realizes XY scanning measurement of a sample to be measured by controlling an LT-9010M laser measuring instrument by a computer through a computer program, and displays a data oscillogram and a topography; by selecting an LT9010M laser measuring instrument, the measuring precision can reach 10 nanometers, and the method can be applied to various measuring modes; an adaptive control program is designed by adopting a LabVIEW platform, so that high-efficiency and high-precision XY scanning is realized; in addition, compared with a self-contained scanning mode of the LT9010M laser measuring instrument, the invention can realize simpler, visual and intuitive observation and comparison of detection data, also enables the data processing to be more convenient and faster, and can be applied to various high-precision measuring fields.

Some steps in the embodiments of the present invention may be implemented by software, and the corresponding software program may be stored in a readable storage medium, such as an optical disc or a hard disk.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, which is intended to cover any modifications, equivalents, improvements, etc. within the spirit and scope of the present invention.

Claims

1. A method of computer controlled XY scanning of a laser gauge, the method comprising: based on a LabVIEW software platform, the XY scanning measurement of a sample to be measured by controlling an LT-9010M laser measuring instrument by a computer is realized through a computer program, and a data oscillogram and a topography are displayed;

2. The method according to claim 1, characterized in that it comprises:

the method comprises the following steps: completing the construction of the electric XY translation table, comprising: the controller NICPCI-7330, the driver DFC5107P, a patch panel and a switching power supply are connected;

step three: and a LabVIEW software platform is used, and the electric XY translation stage is controlled by setting the range and the stepping length in a computer program, so that the tested sample is driven to move along a Z-shaped scanning route, the height measurement in two directions in an XY plane is realized, and a data oscillogram and a topography are displayed.

3. The method of claim 2, wherein the controller NICCI-7330 is installed in the computer motherboard PCI, the 68-Pin motion I/O interface of the controller NIC-7330 is led out through the wiring board, connected to the corresponding interface of the driver DFC5107P, and the five-phase stepping motor is connected to the driver DFC5107P, to realize the driving of the motor by the driver.

4. The method of claim 3 wherein the driver DFC5107P is connected to a DC power supply that converts 220V to 24V to power the driver DFC 5107P.

5. The method as claimed in claim 2, wherein in the second step, the computer is connected with the LT9010M laser measuring instrument through an RS232 port, so as to realize real-time control and communication between hardware and the computer.

6. The method of claim 2, wherein step three comprises: initializing a system for a software LabVIEW development platform, wherein the initialization is completed by NIMAX;

opening NI MAX software, in the 'equipment and interface', NI Motion Devices check the controller NI PCI-7330 on the PC mainboard, click Reference Move in Add Steps, click Initialize, and the initialization is completed; if the stepping motor is required to Move, a streamlining Move is selected in the option of Add Steps, so that the stepping motor moves.

7. The method of claim 6, wherein step three comprises: inputting the range and the step of the X direction, dividing the two numbers by the number obtained by rounding up to obtain the total number of the cycle measured in the X direction, and measuring the object in the X direction; inputting the range and the step of the Y direction, dividing the two numbers by the number of points obtained by rounding up to obtain the total number of the cycle measured in the Y direction, and measuring the object in the Y direction;

8. A computer controlled laser gauge XY scanning system, the system comprising: a computer, LT9010M laser gauge and stage system;

the stage system includes: a controller NI PCI-7330, a driver DFC5107P, an electric XY translation stage with a five-phase stepper motor;

9. The XY scanning system of claim 8, wherein the driver DFC5107P is connected to a dc power supply that converts 220V to 24V to power the driver DFC 5107P.

10. An XY scanning system as recited in claim 9 wherein the operation of the XY scanning system comprises:

s2: the laser measuring instrument is connected with the LT9010M laser measuring instrument through the RS232 port of the PC, so that real-time control and communication between hardware of the laser measuring instrument and the PC are realized;

s3: initializing a system for a software LabVIEW development platform;

s5: the range and step of X, Y directions are input respectively: inputting the range and the step of the X direction, and dividing the two numbers by the number of points obtained by rounding up to obtain the total number of the cycles measured in the X direction; inputting the range and the step of the Y direction, and dividing the two numbers by the number of points obtained by rounding up to obtain the total number of the cycles measured in the Y direction; nesting the X-cycle program in the Y-cycle program, moving the stepping motor downwards in the Y direction after measuring the total number of cycles in the X direction, and continuing to measure the data in the next X direction until the total number of cycles in the Y direction is measured, so as to realize Z-shaped measurement;