CN115124032A - Multilayer roll-to-roll manufacturing system and multilayer roll-to-roll manufacturing method - Google Patents
Multilayer roll-to-roll manufacturing system and multilayer roll-to-roll manufacturing method Download PDFInfo
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- CN115124032A CN115124032A CN202110321916.7A CN202110321916A CN115124032A CN 115124032 A CN115124032 A CN 115124032A CN 202110321916 A CN202110321916 A CN 202110321916A CN 115124032 A CN115124032 A CN 115124032A
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- roll
- reaction chamber
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- layer
- rollers
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 65
- 239000000463 material Substances 0.000 claims abstract description 55
- 239000011888 foil Substances 0.000 claims abstract description 49
- 238000010438 heat treatment Methods 0.000 claims abstract description 30
- 238000007599 discharging Methods 0.000 claims abstract description 27
- 238000002360 preparation method Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 229910021389 graphene Inorganic materials 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 239000011889 copper foil Substances 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 238000005192 partition Methods 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 2
- 238000010924 continuous production Methods 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 description 16
- 238000005516 engineering process Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 239000000376 reactant Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- 229910000976 Electrical steel Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
- C01B32/186—Preparation by chemical vapour deposition [CVD]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Abstract
The invention discloses a multilayer roll-to-roll preparation system, comprising: a reaction chamber, at least a portion of which is provided with a heating element; the plurality of groups of discharging rollers and receiving rollers are arranged outside the part of the reaction chamber, which is provided with the heating element; and a plurality of layers of base material foils, each layer being discharged through a discharge roller of the group of discharge rollers and a take-up roller, passing through the reaction chamber, and finally being wound up by a take-up roller of the group of discharge rollers and take-up rollers. The invention also discloses a multilayer roll-to-roll preparation method. According to the multilayer roll-to-roll preparation system and the multilayer roll-to-roll preparation method, the preparation area can be increased in a limited preparation space in a continuous production process under the same preparation condition, the production efficiency is improved, and the base material foil and the discharging roller or the receiving roller are prevented from being adhered due to heating.
Description
Technical Field
The present invention relates to roll-to-roll manufacturing equipment and, more particularly, to an improved multi-layer roll-to-roll manufacturing system. The invention also relates to an improved process for preparing a multilayer roll-to-roll gas.
Background
The large-area graphene film is mainly prepared by a chemical vapor deposition method. Continuous preparation of the graphene film can be realized through roll-to-roll preparation equipment. The existing roll-to-roll technology is to pass a single copper foil strip substrate through a reaction zone and realize continuous preparation of graphene through a roll-to-roll transmission device. However, although the existing roll-to-roll graphene preparation equipment realizes continuous preparation, the production efficiency is still unsatisfactory in consideration of the growth time of graphene.
Further improved roll-to-roll manufacturing equipment and methods that increase production efficiency are therefore desirable.
Disclosure of Invention
It is an object of the present invention to at least partially overcome the deficiencies in the prior art by providing an improved multi-layer roll-to-roll manufacturing apparatus and a roll-to-roll manufacturing method that increases production efficiency.
According to one aspect of the present invention, there is provided a multilayer roll-to-roll manufacturing system comprising:
a reaction chamber, at least a portion of which is provided with a heating element;
the plurality of groups of discharging rollers and receiving rollers are arranged outside the part of the reaction chamber, which is provided with the heating element; and
each layer of the multilayer base material foil is discharged through a discharging roller in a group of discharging rollers and a group of receiving rollers, passes through the reaction chamber, and is finally wound up by a receiving roller in the group of discharging rollers and the group of receiving rollers.
Preferably, the system comprises a gas inlet and a gas outlet, respectively arranged on the upstream side and the downstream side of the reaction chamber.
Preferably, the system comprises a plurality of reaction chambers, each comprising a pair of gas inlet and gas outlet, the inlet and gas outlet of each reaction chamber being disposed on an upstream side and a downstream side, respectively, of the respective reaction chamber.
Preferably, the inlet and outlet ends of the base material foil of the reaction chamber are provided with heat-resistant baffles provided with slits through which the base material foil passes.
Preferably, in a case where the system includes a plurality of reaction chambers each including a pair of the gas inlet and the gas outlet, a heat-resistant baffle plate is included between the plurality of reaction chambers, and a slit through which the base material foil passes is provided on the heat-resistant baffle plate.
Preferably, the system further comprises a vacuum discharge chamber, and the discharge roller and the receiving roller are arranged in the vacuum discharge chamber.
Preferably, in the case where the system includes a plurality of reaction chambers each including a pair of gas inlet and gas outlet, the plurality of reaction chambers include a partition therebetween, the partition being a vacuum chamber.
Preferably, the base material foil is a copper foil, and the system is used for preparing graphene.
Preferably, the system comprises two reaction chambers, each reaction chamber is provided with a pair of air inlet and air outlet, a small amount of oxygen is introduced into the first reaction chamber to pretreat the copper foil substrate or inert gas is introduced into the first reaction chamber to anneal the copper foil substrate, and a carbon source is introduced into the second reaction chamber to grow graphene.
According to another aspect of the present invention, there is provided a multilayer roll-to-roll manufacturing method comprising: a plurality of sets of discharging rollers arranged in layers discharge the multilayer base material foil; extending the multilayer base material foil through the heating zone; and winding the multilayer base material foil by a plurality of groups of material collecting rollers which are arranged in a layered manner.
Preferably, each layer of base material foil is paid out by a respective payout roller, extended through a plurality of heating zones, and then taken up by a respective take-up roller.
Preferably, one or more of the heating zones is exposed to a different atmosphere than the other heating zones.
According to the multilayer roll-to-roll preparation system and the multilayer roll-to-roll preparation method, the preparation area can be increased under the same preparation conditions in a limited preparation space in the continuous production process, the production efficiency is improved, and the adhesion between the base material foil and the discharging roller or the receiving roller due to heating is avoided.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic view of a multi-layer roll-to-roll manufacturing system according to a first embodiment of the present invention;
FIG. 2 is a schematic view of a multi-layer roll-to-roll manufacturing system according to a second embodiment of the present invention;
FIG. 3 is a schematic view of a multi-layer roll-to-roll manufacturing system according to a third embodiment of the present invention;
FIG. 4 is a schematic view of a multilayer roll-to-roll manufacturing system according to a fourth embodiment of the present invention;
fig. 5 is a flow chart of a multilayer roll-to-roll manufacturing process according to the present invention.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
In the present invention, the terms "upper", "outer", "outside", "upstream side", "downstream side", and the like indicate an orientation or positional relationship based on that shown in the drawings. These terms are used primarily to better describe the invention and its embodiments and are not intended to limit the indicated devices, components or elements to a particular orientation or to be constructed and operated in a particular orientation.
FIG. 1 is a schematic view of a multi-layer roll-to-roll manufacturing system according to a first embodiment of the present invention. A multi-layer roll-to-roll manufacturing system, generally designated 100, includes a reaction chamber 110, at least a portion of which is provided with a heating element 111; an air inlet 112 and an air outlet 113 provided on the upstream side and the downstream side of the reaction chamber 110, respectively; a first set of discharging rollers 101 and receiving rollers 102, a second set of discharging rollers 103 and receiving rollers 104, and a third set of discharging rollers 105 and receiving rollers 106, which are disposed outside a portion of the reaction chamber 110 where the heating element 111 is disposed; and a first layer of base material foil 107, a second layer of base material foil 108, and a third layer of base material foil 109, each layer being paid out by a payout roller of a set of payout rollers and take-up rollers, passing through a reaction chamber 110, and finally being taken up by a take-up roller of the set of payout rollers and take-up rollers.
The multi-layer roll-to-roll manufacturing system 100 according to this embodiment of the present invention extends a plurality of continuously wound base material foils in a reaction chamber 110 having a limited space by providing a plurality of sets of discharge rolls 101, 103, 105 and take- up rolls 102, 104, 106, and arranging the base material foils 107, 108, 109 wound by each set of the discharge rolls and take-up rolls in layers.
The multi-layer roll-to-roll manufacturing system according to this embodiment of the invention is suitable for both static and dynamic vapor deposition.
In the case of the static vapor deposition, since the plurality of layers of the base material foils 107, 108, 109 are provided in the reaction chamber 110 in this embodiment of the invention, the total length of the base material foils in the reaction chamber 110 is increased, and therefore, the production efficiency is improved.
In the case of dynamic vapor deposition, the existing roll-to-roll technology is to pass a single substrate web substrate of substrate material through a reaction zone, with continuous production being achieved by a roll-to-roll actuator, as compared to the existing roll-to-roll technology. The production efficiency P of the product is Wv, W is the width of the web of base material, and v is the driving speed. v is determined by the reaction zone length L and the product preparation time t, v ═ L/t. Therefore, P is WL/t. In this embodiment of the present invention, assuming that the length of the reaction chamber 110 is L, the number of layers of the base material foil is n, the length L of the reaction zone and the time t for preparing the product are not changed, and the production efficiency of the product is P nWL/t, which is about n times of the conventional single-piece base material foil-to-roll transmission technology, in this embodiment, the number of base material foil layers is 3, and the production efficiency is about 3 times of the conventional single-piece base material foil-to-roll transmission technology.
Moreover, in both the case of dynamic vapor deposition and the case of static vapor deposition, since the plural sets of the discharging rollers 101, 103, 105 and the receiving rollers 102, 104, 106 are disposed outside the portion of the reaction chamber 110 having the heating element 111, it is also possible to prevent the plural sets of the discharging rollers 101, 103, 105 and the receiving rollers 102, 104, 106 and the multilayer base material foils 107, 108 and 109 from being thermally bonded during heating.
In order to obtain vapor deposition products with uniform growth, the gas inlet 112 and the gas outlet 113 may be arranged in a direction parallel to the multilayer base material foils 107, 108 and 109, and an air moving device may be further provided in the reaction chamber 110 to uniformly distribute the introduced gas in the reaction chamber 110.
The multi-layer roll-to-roll manufacturing system 100 of the present embodiment is suitable for a vapor deposition process under atmospheric pressure, the reaction chamber 110 may be open, and heat- resistant baffles 114 and 115 may be respectively disposed at two ends of the reaction chamber, and slits for passing the multi-layer base material foils 107, 108, and 109 are formed on the heat- resistant baffles 114 and 115. The heat- resistant baffle plates 114 and 115 may be formed by E-type silicon steel sheets, for example, being alternately arranged to form slits, or may be formed by cutting slits into a single heat-resistant baffle plate.
FIG. 2 is a schematic view of a multi-layer roll-to-roll manufacturing system according to a second embodiment of the present invention. In the figure, the multilayer roll-to-roll manufacturing system is indicated at 200, the same components as in the first embodiment are given the same reference numerals, and the first digit to the left is increased by 1 for the sake of distinction.
As can be seen from fig. 2, the second embodiment is different from the first embodiment in that the multi-layered roll-to-roll gas preparation system 200 includes a first reaction chamber 210 and a second reaction chamber 220, the first reaction chamber 210 including a first gas inlet 212 and a first gas outlet 213 respectively disposed at an upstream side and a downstream side of the first reaction chamber 210, and the second reaction chamber 220 including a second gas inlet 222 and a second gas outlet 223 respectively disposed at an upstream side and a downstream side of the second reaction chamber 220.
When the same gaseous reactants are introduced into the first gas inlet 212 and the first gas outlet 213, and the second gas inlet 222' and the second gas outlet 223, compared with the roll-to-roll preparation system 100 according to the first embodiment of the present invention, it is equivalent to that the vapor deposition is continuously performed in the first reaction chamber 210 and the second reaction chamber 220. When the same gaseous reactant is introduced, the first reaction chamber 210 and the second reaction chamber 220 may be provided with only one pair of gas inlet and outlet, which are disposed on the upper edge side of the first reaction chamber 210 and the downstream side of the second reaction chamber 220.
Different gaseous reactants can be introduced into the first gas inlet 212, the first gas outlet 213, the second gas inlet 222 and the second gas outlet 223, so that different atmosphere environments can be controlled on the base material foil, the quality of a product growth base can be effectively improved, and the quality of a prepared product film is improved. For example, when graphene is prepared by vapor deposition using a copper foil as a base material foil, a copper foil base is pretreated by adding a small amount of oxygen into the first inlet port 212 and the first outlet port 222 of the first reaction chamber 210 or annealed in an inert gas, and a carbon source is introduced into the second inlet port 222 and the second outlet port 223 of the second reaction chamber 220 to grow graphene, so that a graphene film with higher quality can be obtained.
In addition, in the second embodiment, heat- resistant baffles 214, 215 and 216 are respectively arranged at the upstream end of the first reaction chamber 210, at the downstream end of the second reaction chamber 220 and between the first reaction chamber 210 and the second reaction chamber 220, slits for the multilayer base material foils 207, 208 and 209 to pass through are formed on the heat- resistant baffles 214, 215 and 216, and different atmospheres introduced into the first reaction chamber 210 and the second reaction chamber 220 are separated. The heat- resistant baffle plates 214, 215 and 216 may also be, for example, silicon steel sheets.
FIG. 3 is a schematic diagram of a multi-layer roll-to-roll manufacturing system according to a third embodiment of the present invention. In the figure, the multilayer roll-to-roll manufacturing system is indicated at 300, the same components as in the second embodiment are given the same reference numerals, and the first digit to the left is increased by 1 for the sake of distinction.
As can be seen from fig. 3, the third embodiment is different from the second embodiment in that the multi-layer roll-to-roll manufacturing system includes a first vacuum discharging chamber 330 and a second vacuum discharging chamber 340 at 300, discharging rollers 301, 303, and 305 are disposed in the first vacuum discharging chamber 330, and receiving rollers 302, 304, and 306 are disposed in the second vacuum discharging chamber 340.
In this third embodiment, the vapor deposition can be performed under vacuum, even under negative pressure.
FIG. 4 is a schematic view of a multilayer roll-to-roll manufacturing system according to a fourth embodiment of the present invention. In the figure, the multilayer roll-to-roll manufacturing system is indicated at 400, the same components as in the third embodiment are given the same reference numerals, and the first digit to the left is increased by 1 for the sake of distinction.
As can be seen from fig. 3, the fourth embodiment is different from the third embodiment in that the multi-layer roll-to-roll manufacturing system 400 includes a first set of discharging rollers 401 and receiving rollers 402, and a second set of discharging rollers 403 and receiving rollers 404, which are disposed outside a portion of the first reaction chamber 410 where the heating element 411 is disposed and a portion of the second reaction chamber 420 where the heating element 421 is disposed; and a first layer 407 of base material foil and a second layer 408 of base material foil, each layer being paid out by a payout roller of a set of payout and take-up rollers, passing through a first reaction chamber 410 and a second reaction chamber 420, and finally being taken up by a take-up roller of the set of payout and take-up rollers.
The number of layers of the base material foil used in the multilayer roll-to-roll manufacturing system according to the present invention is not limited to the specific number of layers shown in the examples, and may be set according to the size of the actual reaction chamber and the quality of the product to be manufactured.
Fig. 5 is a flow chart of a multilayer roll-to-roll manufacturing process according to the present invention. A multi-layer roll-to-roll manufacturing process according to the present invention is generally designated 1000 and includes steps 1001, 1002 and 1003.
Specifically, in step 1001, the layered sets of stock rolls pay out the multilayer base material foil, in step 1002, the paid-out base material foil is extended through a heating zone to perform vapor deposition, and then in step 1003, the layered sets of stock rolls take up the multilayer base material foil.
The multi-layer roll-to-roll manufacturing method 1000 according to the present invention is applicable to both static vapor deposition and dynamic vapor deposition manufacturing processes.
Because the base material foils enter and leave the heating zone in a layered arrangement, the base material foils are arranged in multiple layers and the production area is increased due to the unchanged length of the heating zone and the production time during the static vapor deposition and the dynamic vapor deposition, so the production efficiency is improved.
Moreover, no matter in the case of dynamic vapor deposition or static vapor deposition, because the discharging roller and the receiving roller are arranged outside the heating area, the base material foil can be prevented from being adhered to the discharging roller or the receiving roller due to heating in the production process.
In the multilayer roll-to-roll preparation method according to the invention, under the condition that the multilayer base material foil extends into and out of the plurality of heating zones, one or more heating zones and other heating zones can be introduced with different atmospheres, so that the treatment process of the base material foil can be added in the continuous preparation process, the performance of the base material foil is improved, and the prepared product film with higher quality can be obtained.
Although the roll-to-roll manufacturing apparatus and the roll-to-roll manufacturing method according to the present invention are described by taking a vapor deposition process as an example, the roll-to-roll manufacturing apparatus and the roll-to-roll manufacturing method according to the present invention are not limited to the vapor deposition process, and are also applicable to a manufacturing method in which a reactant is applied to a base material foil and heated, or a roll-to-roll manufacturing system and a roll-to-roll manufacturing method in which a product is manufactured without introducing an atmosphere.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by a person skilled in the art that the scope of the invention as referred to in the present application is not limited to the embodiments with a specific combination of the above-mentioned features, but also covers other embodiments with any combination of the above-mentioned features or their equivalents without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (12)
1. A multi-layer roll-to-roll manufacturing system comprising:
a reaction chamber, at least a portion of which is provided with a heating element;
the plurality of groups of discharging rollers and receiving rollers are arranged outside the part of the reaction chamber, which is provided with the heating element; and
each layer of the multilayer base material foil is discharged through a discharging roller in a group of discharging rollers and a group of receiving rollers, passes through the reaction chamber, and is finally wound up through a receiving roller in the group of discharging rollers and the group of receiving rollers.
2. The multi-layer roll-to-roll manufacturing system according to claim 1, wherein the system comprises a gas inlet and a gas outlet, respectively disposed on an upstream side and a downstream side of the reaction chamber.
3. The multi-layer roll-to-roll manufacturing system according to claim 1, wherein the system comprises a plurality of reaction chambers, each comprising a pair of gas inlet and gas outlet, the gas inlet and gas outlet of each reaction chamber being disposed at an upstream side and a downstream side of the corresponding reaction chamber, respectively.
4. A multi-layer roll-to-roll manufacturing system as claimed in any one of claims 1 to 3, wherein the reaction chamber is provided with heat-resistant baffles at the base material foil inlet and outlet ends, the heat-resistant baffles being provided with slits through which the base material foil passes.
5. The multi-layer roll-to-roll manufacturing system according to claim 4, wherein in a case where the system includes a plurality of reaction chambers each including a pair of air inlet and air outlet, a heat-resistant baffle plate is included between the plurality of reaction chambers, the heat-resistant baffle plate being provided with a slit through which the base material foil passes.
6. The multi-layer roll-to-roll manufacturing system according to any of claims 1-3, wherein the system further comprises a vacuum discharge chamber, the discharge roller and the take-up roller being disposed in the vacuum discharge chamber.
7. The multi-layer roll-to-roll preparation system according to claim 6, wherein in the case where the system comprises a plurality of reaction chambers each comprising a pair of gas inlet and gas outlet, a partition is included between the plurality of reaction chambers, the partition being a vacuum chamber.
8. The multi-layer roll-to-roll manufacturing system according to any of claims 1-3, wherein the base material foil is a copper foil, the system being used for manufacturing graphene.
9. The multi-layer roll-to-roll preparation system according to claim 8, wherein the system comprises two reaction chambers, each reaction chamber is provided with a pair of gas inlet and gas outlet, a first reaction chamber is filled with a small amount of oxygen to pretreat the copper foil substrate or filled with an inert gas to anneal the copper foil substrate, and a second reaction chamber is filled with a carbon source to grow graphene.
10. A method of making a multilayer roll-to-roll, comprising: a plurality of sets of discharging rollers arranged in layers discharge the multilayer base material foil; extending the multi-layer base material foil through the heating zone; and winding the multilayer base material foil by a plurality of groups of material collecting rollers which are arranged in a layered manner.
11. A multi-layer roll-to-roll production method according to claim 10, wherein each layer of base material foil is paid out by a respective pay-out roll, extends through a plurality of heating zones, and is then taken up by a respective take-up roll.
12. The method of claim 11, wherein one or more of the heating zones is exposed to a different atmosphere than the other heating zones.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110321916.7A CN115124032A (en) | 2021-03-25 | 2021-03-25 | Multilayer roll-to-roll manufacturing system and multilayer roll-to-roll manufacturing method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110321916.7A CN115124032A (en) | 2021-03-25 | 2021-03-25 | Multilayer roll-to-roll manufacturing system and multilayer roll-to-roll manufacturing method |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120061224A (en) * | 2010-12-03 | 2012-06-13 | 에스케이이노베이션 주식회사 | Apparatus and method for preparing graphene film using chemical vapor deposition |
| US20160068397A1 (en) * | 2014-09-04 | 2016-03-10 | National Central University | Apparatus and method for continuous synthesis of carbon film or inorganic material film |
| CN105752968A (en) * | 2016-01-31 | 2016-07-13 | 安徽贝意克设备技术有限公司 | Reel-to-reel continuous graphene film growth equipment |
| CN106829935A (en) * | 2017-03-27 | 2017-06-13 | 重庆墨希科技有限公司 | The continuous growth apparatus of multi-chamber Graphene of lateral arrangement |
| CN110421952A (en) * | 2019-08-30 | 2019-11-08 | 江苏闳业机械股份有限公司 | A kind of graphene heating film flat rubber belting compounding machine and its processing method |
| CN210620935U (en) * | 2019-09-04 | 2020-05-26 | 中国科学院宁波材料技术与工程研究所 | Rapid roll-to-roll vapor deposition preparation device based on tube furnace |
| CN214653668U (en) * | 2021-03-25 | 2021-11-09 | 电子科技大学 | Multilayer roll-to-roll preparation system |
-
2021
- 2021-03-25 CN CN202110321916.7A patent/CN115124032A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120061224A (en) * | 2010-12-03 | 2012-06-13 | 에스케이이노베이션 주식회사 | Apparatus and method for preparing graphene film using chemical vapor deposition |
| US20160068397A1 (en) * | 2014-09-04 | 2016-03-10 | National Central University | Apparatus and method for continuous synthesis of carbon film or inorganic material film |
| CN105752968A (en) * | 2016-01-31 | 2016-07-13 | 安徽贝意克设备技术有限公司 | Reel-to-reel continuous graphene film growth equipment |
| CN106829935A (en) * | 2017-03-27 | 2017-06-13 | 重庆墨希科技有限公司 | The continuous growth apparatus of multi-chamber Graphene of lateral arrangement |
| CN110421952A (en) * | 2019-08-30 | 2019-11-08 | 江苏闳业机械股份有限公司 | A kind of graphene heating film flat rubber belting compounding machine and its processing method |
| CN210620935U (en) * | 2019-09-04 | 2020-05-26 | 中国科学院宁波材料技术与工程研究所 | Rapid roll-to-roll vapor deposition preparation device based on tube furnace |
| CN214653668U (en) * | 2021-03-25 | 2021-11-09 | 电子科技大学 | Multilayer roll-to-roll preparation system |
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