CN115112234A - Multi-point interpolation linear control system of grating spectrometer - Google Patents

Multi-point interpolation linear control system of grating spectrometer Download PDF

Info

Publication number
CN115112234A
CN115112234A CN202210758902.6A CN202210758902A CN115112234A CN 115112234 A CN115112234 A CN 115112234A CN 202210758902 A CN202210758902 A CN 202210758902A CN 115112234 A CN115112234 A CN 115112234A
Authority
CN
China
Prior art keywords
grating
motor
lead screw
hall
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202210758902.6A
Other languages
Chinese (zh)
Inventor
李淑贤
翟婉同
李爽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN202210758902.6A priority Critical patent/CN115112234A/en
Publication of CN115112234A publication Critical patent/CN115112234A/en
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G01J2003/062—Scanning arrangements arrangements for order-selection motor-driven
    • G01J2003/063—Step motor

Abstract

The invention discloses a grating spectrometer multi-point interpolation linear control system, which comprises: the device comprises a motor (1), a Hall sensor (2), a grating shaft oscillating bar (3), a grating (4), a ball head (5), a lead screw (6), a Hall group (7), a sliding block (8) and magnetic steel (9); the motor (1) drives the lead screw (6), the slide block (8) on the lead screw drives the grating shaft swing rod (3) through the ball head (5), and the grating shaft swing rod (3) is connected with the grating (4) to drive the grating to rotate; the motor (1) rotates to drive a motor rotating shaft to detect the magnetic steel (9), and the Hall sensor (2) monitors the running state of the motor (1); the position of the sliding block (8) is monitored, the Hall group (7) is parallel to the lead screw (6), and the lead screw (6) is divided into a plurality of sections on the stroke through the position monitoring of the sliding block (8) and the Hall group (7).

Description

Multi-point interpolation linear control system of grating spectrometer
Technical Field
The invention belongs to the technical field of grating spectrometers, and particularly relates to a multi-point interpolation linear control system of a grating spectrometer.
Background
The optical spectrum scanning in the working range of the grating spectrometer is completed by depending on the angular rotation of the grating in the working process of the grating spectrometer, and the wavelength accuracy of the grating spectrometer greatly depends on the processing precision, the adjusting precision and the control precision of a grating scanning driving mechanism. In the actual processing and adjusting process, a certain error always exists in the grating spectrometer, and the influence on the wavelength accuracy of the grating spectrometer caused by the processing error and the adjusting error can be reduced by using the control method.
The control system adopted by the grating spectrometer mainly comprises open-loop control and closed-loop control, and is controlled by open-loop control, the generally adopted scheme is to control the rotation angle of the grating by utilizing a stepping motor and a lead screw oscillating bar mechanism, and the control scheme has no feedback when the execution system operates, so that the accuracy and the correction of the grating spectrometer in the wavelength range are weak, and the requirements on the processing precision and the assembly precision of parts are high.
The closed-loop feedback positioning element adopted for closed-loop control can be generally positioned by a grating ruler and a magnetic grating ruler, and the positioning precision of the grating ruler positioning mode is higher but the requirement on the environment is strict; the requirement of the positioning mode of the magnetic grating ruler on the environment is not high, but the whole device is complex, and the positioning of the magnetic grating ruler can not meet the use requirement under the condition that the grating spectrometer needs high resolution.
The invention provides a semi-closed loop grating spectrometer drive control method based on Hall multi-point interpolation positioning and piecewise linear control, which reduces the influence on wavelength accuracy caused by machining errors and adjusting errors to the minimum through a multi-point interpolation and piecewise linear sub-control method on the structural basis of an open loop control method.
Disclosure of Invention
The invention aims to provide a multi-point interpolation linear control system for a grating spectrometer, which improves the wavelength output accuracy of the grating spectrometer and reduces the influence of part errors and adjustment errors of a sine swing rod mechanism.
In order to achieve the above object, the present invention provides a multi-point interpolation linear control system for a grating spectrometer, comprising: the device comprises a motor (1), a Hall sensor (2), a grating shaft oscillating bar (3), a grating (4), a ball head (5), a lead screw (6), a Hall group (7), a sliding block (8) and magnetic steel (9); the motor (1) drives the lead screw (6), the slide block (8) on the lead screw drives the grating shaft swing rod (3) through the ball head (5), and the grating shaft swing rod (3) is connected with the grating (4) to drive the grating to rotate; the motor (1) rotates to drive a motor rotating shaft to detect the magnetic steel (9), and the Hall sensor (2) monitors the running state of the motor (1); the position of the sliding block (8) is monitored, the Hall group (7) is parallel to the lead screw (6), and the lead screw (6) is divided into a plurality of sections on the stroke through the position monitoring of the sliding block (8) and the Hall group (7).
Optionally, the hall groups H1, H2, H3, H4, and H5 correspond to X1, X2, X3, X4, and X5 of the lead screw position; in an actual grating spectrometer, the positions of H1, H2, H3, H4 and H5 can correspond to the wavelengths of Y1, Y2, Y3, Y4 and Y5, and the linear relation among the sections of the screw is determined through calibration.
Optionally, X1, X2, X3, X4, and X5 of the lead screw position are obtained, and the corresponding wavelength includes: by building an experiment test platform, standard wavelength Y is obtained based on a standard sample or a standard light source i ,i＝[0,a]And i is an integer.
Optionally, data of a standard wavelength corresponding to the position of the lead screw is collected, and the relation between the stroke of the lead screw and the wavelength is fitted by utilizing piecewise linearity by combining the data of the standard wavelength with the position information of the lead screw corresponding to the hall group.
Optionally, specifically:
Figure BDA0003720439360000031
in the segment [ X1, X2 ], when the slide block moves to the H1 position, the control output step number of the stepping motor is reset to zero by using lambda 1 The control equation controls the screw.
Optionally, a stepping motor for driving the lead screw to rotate exists a corresponding relationship of x ═ kn between the number of steps n of the stepping motor and the lead screw position x, where k is a constant, and equation (1) may be changed into:
Figure BDA0003720439360000032
at the end [ X1, X2 ] of the screw rod, in order to obtain the corresponding wavelength, the corresponding motor step number is obtained by calculation according to the formula (2), and the screw rod is moved to the designated position by the motor, so that the corresponding wavelength can be obtained.
Optionally, in paragraph [ X2, X3), when the slider is moved to the H2 position, the stepper motor control output step number is zeroed, using λ 2 A control equation for calculating the number of steps of the output motor required for obtaining the corresponding wavelength;
in the segment [ X3, X4 ], when the slide block moves to the H3 position, the control output step number of the stepping motor is reset to zero by using lambda 3 A control equation for calculating the number of steps of the output motor required for obtaining the corresponding wavelength;
in the segment [ X4, X5 ], when the slide block moves to the H4 position, the control output step number of the stepping motor is reset to zero by using lambda 4 And controlling an equation, and calculating the step number of the output motor required for obtaining the corresponding wavelength.
Optionally, the upper computer sends a pulse signal to perform direct open-loop control on the motor, wherein the sine swing rod driving mechanism comprises a cosine mechanism and a cam mechanism.
The invention has the technical effects that: the invention discloses a multi-point interpolation linear control system of a grating spectrometer, which adopts a sine swing rod mechanism to convert the input and the output of the system into a linear relation, thereby reducing the complexity of the system; the method comprises the following steps of (1) carrying out multipoint positioning by adopting Hall sensors, wherein the Hall sensors are uniformly (or non-uniformly) distributed on the stroke of a lead screw and are used for positioning the position of the lead screw; a multi-section linear control scheme is adopted, the linear relation between input and output of a sine swing rod mechanism is utilized, and the stroke of the screw rod is divided into multi-section linear control by combining a multi-point positioning Hall sensor. The control difficulty of the whole system is reduced, the wavelength output accuracy of the grating spectrometer is improved, and the influence of part errors and adjusting errors of the sine swing rod mechanism is reduced.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application. In the drawings:
fig. 1 is a schematic structural diagram of a multi-point interpolation linear control system of a grating spectrometer according to an embodiment of the present invention.
FIG. 2 is a schematic diagram illustrating a principle of grating light splitting according to an embodiment of the present invention;
fig. 3 is a schematic diagram of the driving principle of the sine mechanism according to the embodiment of the invention.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
It should be noted that the steps illustrated in the flowcharts of the figures may be performed in a computer system such as a set of computer-executable instructions and that, although a logical order is illustrated in the flowcharts, in some cases, the steps illustrated or described may be performed in an order different than presented herein.
As shown in fig. 1, the present embodiment provides a multi-point interpolation linear control system for a grating spectrometer, including: the device comprises a motor 1, a Hall sensor 2, a grating shaft swing rod 3, a grating 4, a ball head 5, a lead screw 6, a Hall group 7, a sliding block 8 and magnetic steel 9; the motor 1 drives the lead screw 6, the slide block 8 on the lead screw 6 drives the grating shaft swing rod 3 through the ball head 5, and the grating shaft swing rod 3 is connected with the grating 4 to drive the grating to rotate; the motor 1 rotates to drive a motor rotating shaft to detect the magnetic steel 9, and the H0 Hall 2 monitors the running state of the motor 1; the position of a screw slide block is monitored, the Hall group 7 is parallel to the screw 6, and the Hall group 7 divides the screw 6 into a plurality of sections on the stroke through the position monitoring of a slide block 8.
The hall sensor 2 is used for monitoring the running state of the motor, and the specific working mode is that the magnetic steel 9 is fixed on the output shaft of the motor and rotates along with the motor shaft to periodically trigger the hall sensor 2 to output a signal, so that the running state of the motor is monitored.
The specific working principle of the lead screw slide block position detection Hall group 7 is as follows: through the mode of installing hall group 7 and lead screw 6 parallel, divide into several sections through hall group 7 even (inhomogeneous) arrangement with the lead screw stroke.
The specific working mode is as follows: and magnetic steel is fixed on a sliding block 8 arranged on the screw rod 6, and when the sliding block runs to a Hall at a corresponding position in the Hall group 7, a Hall output signal is triggered.
Taking the slide block 8 to the X1 position marked by the H1 Hall in the Hall group as an example, when the slide block 8 runs to the X1 position on the lead screw 6, the magnetic steel fixed on the slide block 8 triggers the H1 Hall, namely the purpose of marking the X1 position of the lead screw 6 is achieved.
In a further optimization scheme, the Hall groups H1, H2, H3, H4 and H5 correspond to X1, X2, X3, X4 and X5 of the positions of the lead screws; in an actual grating spectrometer, the positions of H1, H2, H3, H4 and H5 can correspond to the wavelengths of Y1, Y2, Y3, Y4 and Y5, and the linear relation among the sections of the screw is determined through calibration.
Further optimizing the scheme, obtaining X1, X2, X3, X4 and X5 of the position of the lead screw, wherein the corresponding wavelength comprises: by building an experiment test platform, standard wavelength Y is obtained based on a standard sample or a standard light source i ,i＝[0,a]And i is an integer.
And further optimizing the scheme, collecting data of standard wavelength corresponding to the position of the lead screw, and fitting the relation between the stroke and the wavelength of the lead screw by utilizing piecewise linearity by utilizing the data of the standard wavelength and combining the lead screw position information corresponding to the Hall group.
The further optimization scheme specifically comprises the following steps:
Figure BDA0003720439360000061
in the segment [ X1, X2 ], when the slide block moves to the H1 position, the control output step number of the stepping motor is reset to zero by using lambda 1 The control equation controls the screw.
Optionally, a stepping motor for driving the lead screw to rotate exists a corresponding relationship of x ═ kn between the number of steps n of the stepping motor and the lead screw position x, where k is a constant, and equation (1) may be changed into:
Figure BDA0003720439360000071
at the end of the screw rod (X1, X2), in order to obtain the corresponding wavelength, the corresponding motor step number is obtained by calculation according to the formula (2), and the screw rod is moved to the designated position by the motor, so that the corresponding wavelength can be obtained.
In the further optimized scheme, in the section of [ X2, X3 ], when the slide block moves to the position of H2, the control output step number of the stepping motor is reset to zero by utilizing lambda 2 A control equation is used for calculating the step number of the output motor required for obtaining the corresponding wavelength;
in the segment [ X3, X4 ], when the slide block moves to the H3 position, the control output step number of the stepping motor is reset to zero by using lambda 3 A control equation for calculating the number of steps of the output motor required for obtaining the corresponding wavelength;
in the segment [ X4, X5 ], when the slide block moves to the H4 position, the control output step number of the stepping motor is reset to zero by using lambda 4 And controlling an equation, and calculating the step number of the output motor required for obtaining the corresponding wavelength.
According to the further optimized scheme, an upper computer sends out pulse signals to carry out direct open-loop control on the motor, wherein the sine swing rod driving mechanism comprises a cosine mechanism and a cam mechanism; the Hall positioning group positioning comprises a capacitive position sensor, an inductive position sensor, an eddy current proximity sensor, a photoelectric position sensor and other position sensor schemes.
The sine swing link mechanism is adopted to convert the input and the output of the system into a linear relation, the complexity of the system is reduced,
principle of concave grating dispersion
d(sini±sinθ)＝mλ (1)
When the diffraction spectrum order and the incident light are on the same side of the normal, the sign is taken in formula 1; otherwise, the negative sign is taken.
As shown in fig. 2, ON is the grating normal, OB is the angular bisector of the outgoing ray and the incoming ray, i is the angle between the incoming ray and the grating normal, θ is the angle between the outgoing ray and the grating normal,
Figure BDA0003720439360000086
is the angle of the grating normal ON with the incident and diffracted light raysBisect the contained angle of OB, 2 delta is the contained angle of emergent ray and diffraction spectrum, adopts the different side diffraction spectrum as photometer spectroscopic system's emergent light, then formula 1 can simplify to:
Figure BDA0003720439360000081
in equation 2, m is the order of the diffraction spectrum, d is the grating pitch, and λ is the wavelength corresponding to the grating exit position, and for the photometer system described herein, m is 1 and d is 1/1200 mm.
The geometrical relationships between the various angles can be found in fig. 1, with the following geometrical relationships for the angles of incidence and emergence:
Figure BDA0003720439360000082
the formula 3 is replaced by the formula 2 to obtain the corner of the wavelength with respect to the grating
Figure BDA0003720439360000085
The relation of (1):
Figure BDA0003720439360000083
in equation 3, when the grating diffraction order m is 1, the grating constant d is 1/1200mm, the included angle 2 δ between the incident light and the diffracted light is 64 °, and a is 2d cos δ/m, equation 4 can be expressed as:
Figure BDA0003720439360000084
according to the formula 5, the input wavelength and the output wavelength of the system are in a linear relation only by ensuring that the sine value of the grating rotation angle and the wavelength are in the linear relation.
Sine mechanism driving principle
As shown in FIG. 3, the grating is pivoted at the initial positionThe rod is perpendicular to the screw rod, namely the angle bisector position of the included angle between the incident light and the diffraction spectrum coincides with the normal position of the grating, so that the rotating angle alpha of the oscillating rod of the grating shaft and the included angle between the grating normal ON and the angle bisector OB of the incident light and the emergent light
Figure BDA0003720439360000093
Always equal, the following relationship can be obtained:
Figure BDA0003720439360000091
substituting formula 6 for formula 4 to obtain:
Figure BDA0003720439360000092
in formula 7, the grating constant d, the included angle between the incident light and the diffracted light is 2 δ, the grating diffraction order m, the grating swing rod length l is a constant, and only the slider position x is a variable. A linear relation is established between the input quantity and the output quantity of the spectrum scanning through a sine mechanism, and the control relation of a control system is simplified.
The hall sensor 2 is used as a hall for monitoring the running state of the motor, and the specific working mode is that the magnetic steel 9 is fixed on an output shaft of the motor and rotates along with a motor shaft to periodically trigger the hall sensor 2 to output a signal, so that the running state of the motor is monitored. The specific working principle of the slide block 8 position detection Hall group 7 is as follows: through the mode of installing hall group 7 and lead screw 6 parallel, divide into several sections through hall group 7 even (inhomogeneous) arrangement with the lead screw stroke. The specific working mode is as follows: and magnetic steel is fixed on a sliding block 8 arranged on the screw rod 6, and when the sliding block runs to a Hall at a corresponding position in the Hall group 7, a Hall output signal is triggered. Taking the slide block 8 to the X1 position marked by the H1 Hall in the Hall group as an example, when the slide block 8 runs to the X1 position on the lead screw 6, the magnetic steel fixed on the slide block 8 triggers the H1 Hall, namely the purpose of marking the X1 position of the lead screw 6 is achieved.
The invention discloses a multi-point interpolation linear control system of a grating spectrometer, which adopts a sine swing rod mechanism to convert the input and the output of the system into a linear relation, thereby reducing the complexity of the system; the method comprises the following steps of (1) carrying out multipoint positioning by adopting Hall sensors, wherein the Hall sensors are uniformly (or non-uniformly) distributed on the stroke of a lead screw and are used for positioning the position of the lead screw; a multi-section linear control scheme is adopted, the linear relation between input and output of a sine swing rod mechanism is utilized, and the stroke of the screw rod is divided into multi-section linear control by combining a multi-point positioning Hall sensor. The control difficulty of the whole system is reduced, the wavelength output accuracy of the grating spectrometer is improved, and the influence of part errors and adjusting errors of the sine swing rod mechanism is reduced.
The above description is only for the preferred embodiment of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims (8)

1. A grating spectrometer multi-point interpolation linear control system is characterized by comprising: the device comprises a motor (1), a Hall sensor (2), a grating shaft oscillating bar (3), a grating (4), a ball head (5), a lead screw (6), a Hall group (7), a sliding block (8) and magnetic steel (9); the motor (1) drives the lead screw (6), the slide block (8) on the lead screw drives the grating shaft swing rod (3) through the ball head (5), and the grating shaft swing rod (3) is connected with the grating (4) to drive the grating to rotate; the motor (1) rotates to drive a motor rotating shaft to detect the magnetic steel (9), and the Hall sensor (2) monitors the running state of the motor (1); the position of the sliding block (8) is monitored, the Hall group (7) is parallel to the lead screw (6), and the lead screw (6) is divided into a plurality of sections on the stroke through the position monitoring of the sliding block (8) and the Hall group (7).
2. The multi-point interpolation linear control system of the grating spectrometer as claimed in claim 1, wherein the hall groups H1, H2, H3, H4, H5 correspond to X1, X2, X3, X4, X5 of the lead screw position; in an actual grating spectrometer, the positions of H1, H2, H3, H4 and H5 can correspond to the wavelengths of Y1, Y2, Y3, Y4 and Y5, and the linear relation among the sections of the screw is determined through calibration.
3. The grating spectrometer multi-point interpolation linear control system of claim 2, wherein X1, X2, X3, X4, X5 of lead screw position are obtained, corresponding wavelengths comprising: by building an experiment test platform, standard wavelength Y is obtained based on a standard sample or a standard light source i ,i＝[0,a]And i is an integer.
4. The grating spectrometer multi-point interpolation linear control system of claim 1, wherein data of standard wavelengths corresponding to lead screw positions are collected, and the relationship between lead screw stroke and wavelength is fitted by piecewise linear using the data of the standard wavelengths in combination with lead screw position information corresponding to the hall group.
5. The grating spectrometer multi-point interpolation linear control system of claim 4, specifically comprising:
Figure FDA0003720439350000021
in the segment [ X1, X2 ], when the slide block moves to the H1 position, the control output step number of the stepping motor is reset to zero by using lambda 1 The control equation controls the screw.
6. The system as claimed in claim 5, wherein the step motor drives the screw to rotate, and there is a correspondence between the number of steps n of the step motor and the screw position x, where k is a constant, where the equation (1) can be changed as follows:
Figure FDA0003720439350000022
at the end [ X1, X2 ] of the screw rod, in order to obtain the corresponding wavelength, the corresponding motor step number is obtained by calculation according to the formula (2), and the screw rod is moved to the designated position by the motor, so that the corresponding wavelength can be obtained.
7. The system of claim 6, wherein in the stage [ X2, X3 ], when the slider is moved to the H2 position, the step number of the stepping motor control output is zeroed, using λ 2 A control equation for calculating the number of steps of the output motor required for obtaining the corresponding wavelength;
in the segment [ X3, X4 ], when the slide block moves to the H3 position, the control output step number of the stepping motor is reset to zero by using lambda 3 A control equation for calculating the number of steps of the output motor required for obtaining the corresponding wavelength;
in the segment [ X4, X5 ], when the slide block moves to the H4 position, the control output step number of the stepping motor is reset to zero by using lambda 4 And controlling an equation, and calculating the step number of the output motor required for obtaining the corresponding wavelength.
8. The system of claim 7, wherein the upper computer sends a pulse signal to directly perform open-loop control on the motor, and wherein the sine pendulum driving mechanism comprises a cosine mechanism and a cam mechanism.
CN202210758902.6A 2022-06-29 2022-06-29 Multi-point interpolation linear control system of grating spectrometer Withdrawn CN115112234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210758902.6A CN115112234A (en) 2022-06-29 2022-06-29 Multi-point interpolation linear control system of grating spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210758902.6A CN115112234A (en) 2022-06-29 2022-06-29 Multi-point interpolation linear control system of grating spectrometer

Publications (1)

Publication Number Publication Date
CN115112234A true CN115112234A (en) 2022-09-27

Family

ID=83329575

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210758902.6A Withdrawn CN115112234A (en) 2022-06-29 2022-06-29 Multi-point interpolation linear control system of grating spectrometer

Country Status (1)

Country Link
CN (1) CN115112234A (en)

Similar Documents

Publication Publication Date Title
CN100410625C (en) Shedding profilogram measuring apparatus
US6556153B1 (en) System and method for improving encoder resolution
JP6147038B2 (en) Position detecting device, lens device, imaging system, and machine tool
US9766096B2 (en) Encoder for producing position information using positions of a first and second sensor, tilt angles, period of a pattern on a scale
US9417100B2 (en) Method of assisted mounting and error compensation for absolute grating ruler
EP2754999B1 (en) Scale, displacement detection apparatus, lens apparatus, image pickup system, and assembling apparatus
CN1786671A (en) Photoelectric encoder, scale therefor and method for manufacturing the same
EP0643285A3 (en) System for measuring the absolute position of the movinging periodic scale of an incremental encoder.
CN105229424A (en) For the method for self calibration rotary encoder
US20190301900A1 (en) Adaptive reference mark detection process
WO2010116144A2 (en) Position encoder apparatus
CN106500606B (en) Multi-code-channel grating ruler
RU2572058C2 (en) Sizing device for transducers meant for measurement of diameter and other geometrical features of cylinders
CN101055195B (en) Optical encoders
CN108981764A (en) A kind of rotating grating encoder rotating angle measurement apparatus and method
CN115112234A (en) Multi-point interpolation linear control system of grating spectrometer
US11644346B2 (en) Rotation angle encoder apparatus
CN105425844A (en) High-precision grating positioning device and method of spectrum analyzer
US6356219B1 (en) Calibrated encoder multiplier
CN111055167B (en) Indexing two-link type ball rod instrument and method for detecting machine tool precision by using same
US7710549B2 (en) Apparatus for detecting speed of movable body and drive stage using the same
CN115031838A (en) Wavelength calibration method for scanning type double-layer secondary diffraction linear array spectrometer
CN112284300A (en) Angular displacement measuring method, device and system and computer readable storage medium
US7995217B2 (en) High-resolution encoder array
WO2006082601A1 (en) Machine for flexographic printing lines

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WW01 Invention patent application withdrawn after publication

Application publication date: 20220927

WW01 Invention patent application withdrawn after publication