CN1151023A - Manufacturing method of optical micro-perforated plate - Google Patents
Manufacturing method of optical micro-perforated plate Download PDFInfo
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- CN1151023A CN1151023A CN 95113620 CN95113620A CN1151023A CN 1151023 A CN1151023 A CN 1151023A CN 95113620 CN95113620 CN 95113620 CN 95113620 A CN95113620 A CN 95113620A CN 1151023 A CN1151023 A CN 1151023A
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Abstract
A method for making micro pores of optical microporous plate features the use of easily corrosive glass fibre and anticorrosive one, and includes such steps as arranging glass fibres (arranging the easily corrosive glass fibre at positions of micro pores), fusion press, drawing, cutting, grinding, and corroding with 10-20% solution of hydrochloric acid. Its advantages are small and uniform apeture, regular shape of micro pore, and qualified interval between pores. Said microporous plate can be used in imaging system, especially in X-ray area.
Description
The present invention is that the method for making of the optical micro-perforated plate that uses on the optical instrument is improved, and belongs to optical technical field.
Optical micro-perforated plate is a kind of imaging optic element of widespread use on the optical instrument, and making optical alignment hole and imaging pin hole on its microwell plate is the key of its performance of decision.The method of making optical alignment hole and imaging pin hole usually mainly contains: laser boring, electric spark-erosion perforation and mechanical punching.The hole that this several method is produced has following problem: 1. the minimum-value aperture of its making is 20 μ m-50 μ m, understands that with the provisional capital more little its optical resolution in aperture is high more, so it can't guarantee higher imaging resolution; 2. produced hole shape is irregular, particularly laser boring, and the zigzag cut phenomenon around the hole is serious; 3. produced aperture and pitch of holes error are very big, and particularly pinhole array more can't guarantee the position of related features between its hole, and consistance is very poor.Because the existence of these problems makes the performance of many optical instruments can not get for a long time improving.
The micropore method for making that the purpose of this invention is to provide a kind of optical micro-perforated plate, the micropore size of producing is little, smooth, smooth, error is little, high conformity to solve above-mentioned existing problems, to make.
The present invention realizes by following technical scheme, selects perishable and corrosion-resistant two kinds of glass fiber for use, arranges silk, fusion pressure, wire drawing, section and grinding by the method for making of microchannel plate, perishable glass fiber should be come its corresponding position when row's silk; Place ground glass sheet the hydrochloric acid solution of 10-20% to corrode, after dissolving fully to perishable glass, use flushing with clean water, promptly obtain making the optical micro-perforated plate of micropore.Wherein said expansion coefficient perishable and corrosion-resistant two kinds of glass materials should be close, and diffusibleness should be as best one can little, and require the viscosity of perishable glass material bigger; The position of perishable glass fiber is exactly the relevant position of making micropore on the microwell plate during row's silk, and the aperture of micropore is to calculate with the sectional dimension that all glass fiber sectional dimensions and wire drawing finally form glass fiber according to the perishable glass fiber sectional dimension of adopt and row's silk; The concentration of hydrochloric acid solution of corrosion usefulness is excessive then can to make corrosion-resistant glass material also be corroded, too low its etching time of concentration is long, so it all is feasible selecting the concentration range of 10-20% in the present invention, the concrete using priciple of its concentration is the thick then concentration of the glass sheet height that is corroded in this scope, and etching time is about 1 hour.
As can be seen, the present invention compares with existing micropore method for making from above scheme, and the micropore of produced optical micro-perforated plate not only aperture is little, smooth, smooth, and can guarantee the relative position of micropore, little, the high conformity of its error.Method for making of the present invention is simple, and the I in aperture reaches 2 μ m, can improve the resolution of optical imagery, can be widely used in the imaging system of various optical instruments, the especially application of optical array imaging system, thus the performance of optical instrument is improved.
Below be described in detail embodiment of the present invention.
If make the micropore on the microwell plate more round, when making, use corrosion-resistant glass tube to be inserted in the method for perishable glass fiber just with level and smooth.The external diameter of corrosion-resistant glass tube should be consistent with the external diameter of the corrosion-resistant glass fiber of arranging silk usefulness simultaneously, is convenient to row's silk; The internal diameter of corrosion-resistant glass tube should coincide with the external diameter of perishable glass fiber, and the cooperation of its insertion should not have the slit as far as possible, to reduce residual bubble; Because the microwell plate of making is thinner, and the glass bar that wire drawing forms is very long, if guarantee on this very long glass bar, to have a bit of so in addition several millimeters interval in no bubble get final product microsection manufacture, so neither be very strict to the slit requirement of inserting cooperation.After using the method for this sleeve, arrange silk, molten pressure, wire drawing, section, grinding and corrosion again after, produced micropore is because its periphery be corrosion-resistant glass tube, thus its micropore very round just with smoothly.
If make the micropore size on the microwell plate make very for a short time, on the make can be more repeatedly once or secondary the technology of row's silk, fusion pressure, wire drawing.Promptly after finishing wire drawing for the first time, be cut into the silk section, arrange silk with corrosion-resistant glass fiber again, this silk section that contains perishable glass core is come the corresponding position of its micropore, carry out fusion pressure, wire drawing again to designing requirement.As can be seen, at needs repeatedly in the making of wire drawing, during all row's silks before its last row's silk, perishable glass fiber is come positive center, the position grasp being more convenient for so after during row thread; And when silk row just comes the corresponding position of its micropore to the silk section that contains perishable glass core the last time.If adopt and aforesaid perishable glass fiber sleeve to be gone into the mode of corrosion-resistant glass tube, also be the example of this category with arranging silk with corrosion-resistant glass fiber again after its direct wire drawing segment.The size of the size of microwell plate and thin and thick size and micropore size depends on the requirement of institute's preparation instrument, before making, should calculate and design according to this requirement, the silk footpath that should reach during with total used amount of silk footpath, the row's silk of determining selected glass fiber, wire drawing, and wire drawing reaches the requirement of micropore size several times.
If when needing on microwell plate, to make a plurality of micropore, in the time of on the make can not finishing as if a wire drawing, general adopt aforesaid perishable glass fiber sleeve is gone into the direct wire drawing segment of corrosion-resistant glass tube after, arrange the mode of silk again with corrosion-resistant glass fiber, be just the silk section that contains perishable glass core to be come the corresponding position of its micropore when arranging the last time thread equally, be more conducive to the relative position between definite hole like this, and reduce the error of pitch of holes.So the size of micropore interval error depends on the accuracy of row's silk as can be seen, the general row of needing only silk accurately its error can be controlled within 2%.
The range of choice of glass material is very wide among the present invention, as the optional simple glass of corrosion-resistant glass material, 4 flint glass Fs, high pbo glass, barium titanate ceramics or the like, and the optional Pyrex of perishable glass material, boron lanthanum glass etc.The selection of material should be considered the requirement of microplate application in concrete the making, need prevent seeing through of X ray as microwell plate, then selects high pbo glass.
Below be concrete manufacturing process of the present invention.
(1). calculate the layout array of microwell plate according to the requirement of microwell plate, determine silk footpath and wire drawing silk footpath that good perishable glass fiber is selected for use, and the glass material that adopts, and design process program, comprise wire drawing several times with row's several inferior above-mentioned requirement.
(2). carefully choose the glass fiber that is adopted, require silk footpath uniformity.If adopt the mode of perishable glass silk braid being inserted corrosion-resistant glass tube,, be suspended on the wire drawing machine direct wire drawing to designing requirement then with in the core material tubular stinger material.Wire drawing machine uses automatic wire drawing machine, and its temperature, wire drawing position and wire drawing silk footpath all are automatic control.
(3). needed glass is cut into the silk section of design, arrange silk, row's silk is to finish on special fiber-arranging device, and it can determine the total quantity in much silks footpath, reduce the trouble of people's number number, so relative position during row's silk and spacing etc. are measurement unit with the radical of glass fiber all; When silk row should be inserted perishable glass fiber the corresponding position of its micropore and be sequenced that tie up at a back two, fusion pressure becomes excellent the last time, then goes up the wire drawing machine wire drawing when the needs wire drawing, then enters subsequent processing when not needing wire drawing again.
(4). with the glass bar section that presses, carry out grinding and polishing by designing requirement again.
(5). the hydrochloric acid solution that the slide that grinding and polishing is good is put into 10-20% corrodes, and the thick slide of 200 μ m corroded about 1 hour, used flushing with clean water, and dewatered drying is used microscopic examination, gets final product.
Claims (3)
1. the method for making of an optical micro-perforated plate is characterized in that, selects perishable and corrosion-resistant two kinds of glass fiber for use, and require the expansion coefficient of two kinds of glass should be close, diffusibleness is as far as possible little, and the viscosity of perishable glass is bigger; Arrange silk, fusion pressure, wire drawing, section and grinding by the plate-making method of microchannel plate, row should come perishable glass fiber its corresponding position during silk; Place ground glass sheet the hydrochloric acid solution of 10-20% to corrode, extremely perishable glass dissolves the formation micropore fully, with flushing with clean water, dewatered drying.
2. method according to claim 1, it is characterized in that, on the make can be more repeatedly once or secondary the technology of row silk, fusion pressure, wire drawing, should come positive center to perishable glass fiber during the row of all before row silk silk the last time, and just the silk section that contains perishable glass core be come the corresponding position of its micropore during row's silk the last time.
3. method according to claim 1 and 2, it is characterized in that, can adopt the method for perishable glass silk braid being inserted corrosion-resistant glass tube when making, it requires the internal diameter of corrosion-resistant glass tube to coincide with the external diameter of perishable glass fiber, and the cooperation that inserts it into does not have the slit as far as possible; Directly wire drawing of glass tube after cover is inserted also can be arranged the making that silk is finished microwell plate with other corrosion-resistant glass fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95113620 CN1151023A (en) | 1995-12-26 | 1995-12-26 | Manufacturing method of optical micro-perforated plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95113620 CN1151023A (en) | 1995-12-26 | 1995-12-26 | Manufacturing method of optical micro-perforated plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1151023A true CN1151023A (en) | 1997-06-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 95113620 Pending CN1151023A (en) | 1995-12-26 | 1995-12-26 | Manufacturing method of optical micro-perforated plate |
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| CN (1) | CN1151023A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458444C (en) * | 2007-03-28 | 2009-02-04 | 山东轻工业学院 | Micro-pool array chip processing method capable of being as ultra microhole analytical plate |
| CN1758405B (en) * | 2005-09-20 | 2010-09-29 | 北方夜视技术股份有限公司 | Method for manufacturing micro-channel plate with solid edge |
| CN105372755A (en) * | 2015-11-24 | 2016-03-02 | 中国建筑材料科学研究总院 | Optical fiber panel and preparation method thereof |
| CN106018287A (en) * | 2016-05-23 | 2016-10-12 | 玉林师范学院 | Photo-thermal conversion monitoring device |
| CN107527670A (en) * | 2017-08-01 | 2017-12-29 | 中国工程物理研究院激光聚变研究中心 | A kind of X ray choosing of transmitance multi-level modulation can device |
| CN114163135A (en) * | 2021-12-09 | 2022-03-11 | 哈尔滨工程大学 | Low-pressure corrosion device and method for quartz microporous plate |
| CN115043587A (en) * | 2021-03-09 | 2022-09-13 | 飞秒光电科技(西安)有限公司 | Glass fiber arranging structure and method |
-
1995
- 1995-12-26 CN CN 95113620 patent/CN1151023A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1758405B (en) * | 2005-09-20 | 2010-09-29 | 北方夜视技术股份有限公司 | Method for manufacturing micro-channel plate with solid edge |
| CN100458444C (en) * | 2007-03-28 | 2009-02-04 | 山东轻工业学院 | Micro-pool array chip processing method capable of being as ultra microhole analytical plate |
| CN105372755A (en) * | 2015-11-24 | 2016-03-02 | 中国建筑材料科学研究总院 | Optical fiber panel and preparation method thereof |
| CN105372755B (en) * | 2015-11-24 | 2018-07-03 | 中国建筑材料科学研究总院 | Fibre faceplate and preparation method thereof |
| CN106018287A (en) * | 2016-05-23 | 2016-10-12 | 玉林师范学院 | Photo-thermal conversion monitoring device |
| CN107527670A (en) * | 2017-08-01 | 2017-12-29 | 中国工程物理研究院激光聚变研究中心 | A kind of X ray choosing of transmitance multi-level modulation can device |
| CN115043587A (en) * | 2021-03-09 | 2022-09-13 | 飞秒光电科技(西安)有限公司 | Glass fiber arranging structure and method |
| CN115043587B (en) * | 2021-03-09 | 2023-10-24 | 飞秒光电科技(西安)有限公司 | Glass fiber arranging structure and method |
| CN114163135A (en) * | 2021-12-09 | 2022-03-11 | 哈尔滨工程大学 | Low-pressure corrosion device and method for quartz microporous plate |
| CN114163135B (en) * | 2021-12-09 | 2023-07-21 | 哈尔滨工程大学 | Low-pressure corrosion device and method for quartz micro-pore plate |
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